JP2014231121A - Electrodeposited wire tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrodeposited wire tool which has good cutting ability from the initial stage of processing, exhibits superior processing accuracy, and has a long tool life.SOLUTION: An electrodeposited wire tool 100 having an abrasive grain layer 40 which is formed by fixing abrasive grains on an outer periphery of a core wire 10 using electro-deposition metal 30, includes: an exposed abrasive grain part 21Y where a tip portion 20Ya of a super abrasive grain 20Y protruding from a core wire outer coat surface 30a of the electro-deposition metal 30 is not coated with the electro-deposition metal 30; and a coated abrasive grain part 21X where a tip portion 20Xa of a super abrasive grain 20X is covered with the electro-deposition metal 30. A ratio of the coated abrasive grain part 21X contained in the abrasive grain layer 40 is adjustable within a range of 50 piece% to 90 piece%, and a ratio of the exposed abrasive grain part 21Y is adjustable within a range of 10 piece% to 50 piece%.

Description

  The present invention relates to an electrodeposition wire tool used when slicing ingots such as silicon for solar cells, silicon for semiconductors, magnetic materials, sapphire, and SiC.

  For wire tools used for slicing hard and brittle materials such as ingots for solar cells and silicon for semiconductors, sapphire ingots, etc., resin wire tools with abrasive grains fixed to the outer periphery of the core wire with resin bonds (for example, patents) References 1 and 2) and an electrodeposition wire tool in which abrasive grains are fixed by electrodeposition.

  The electrodeposition wire tools described in Patent Documents 1 and 2 are excellent in terms of high abrasive grain retention and high processing efficiency, but have low flexibility and are weak against twisting. There are also drawbacks.

  In addition, in other electrodeposition wire tools, a tool in which the adhesive force of the abrasive grains to the core wire is enhanced by coating the surface of the abrasive grains with a conductive material such as metal has been proposed (for example, see Patent Document 3). Yes. Although this electrodeposition wire tool can firmly fix the abrasive grains, the metal (plating layer) coated on the surface of the abrasive grains prevents contact between the abrasive grains and the object to be ground. There is a disadvantage that the processing accuracy is also deteriorated.

  Therefore, in order to improve the sharpness of the electrodeposition wire tool at the initial stage of processing, an electrodeposition wire tool in which a part of the plating layer at the tip of the abrasive grain is removed in advance has been proposed (see, for example, Patent Document 4). ).

JP-A-53-14489 JP 2003-340729 A JP 2006-181698 A JP 2006-181701 A

  The electrodeposition wire tool described in Patent Document 4 has a sharpness at the initial stage of processing by removing a part of the plating layer at the tip of the abrasive grain and exposing the abrasive grain before processing. The work of removing the electrodeposited metal covering the metal requires a great deal of labor. Further, during the work of removing a part of the electrodeposited metal covering the abrasive grains (so-called truing work), the core wire (wire) and the abrasive grains may be damaged, and the tool life may be reduced.

  On the other hand, there is a method in which the surface of the abrasive grains is not coated with a conductive material such as metal, and the abrasive grains are embedded in the outer periphery of the core wire by electrodeposition as it is, but the abrasive grains not coated with the conductive material adhere to the core wire. However, there is a problem that it is easy to shed during processing.

  Therefore, the problem to be solved by the present invention is to perform electrodeposition that exhibits a good sharpness and excellent machining accuracy from the beginning of machining, and has a long tool life without performing an operation for removing the electrodeposited metal at the tip of the abrasive grain in advance. To provide a wire tool.

  The electrodeposition wire tool of the present invention is an electrodeposition wire tool having an abrasive layer formed by adhering abrasive grains to the outer periphery of a core wire with an electrodeposited metal, and protrudes from the core wire jacket surface of the electrodeposited metal An exposed abrasive grain portion in which the tip of the abrasive grain is not coated with an electrodeposited metal, and a coated abrasive grain portion in which the tip of the abrasive grain is coated with an electrodeposited metal. .

  Here, the core wire jacket surface of the electrodeposited metal is the surface of the electrodeposited metal in the region where no abrasive grains exist in the electrodeposited metal forming the abrasive layer (electrodeposition along the outer peripheral surface of the core wire). The surface of the electrodeposited metal in the region where the metal is directly fixed.

  With such a configuration, in the initial stage of machining, the cutting action is generated by the exposed abrasive grain part that is not coated with the electrodeposited metal at the tip of the abrasive grain. Since the abrasive grains of the abrasive grains are firmly fixed to the core wire by the electrodeposited metal, it is difficult for the grains to fall during processing, and a long tool life can be realized.

  Here, it is preferable that the ratio of the coated abrasive grains contained in the abrasive layer is 50% to 90% and the ratio of the exposed abrasives is 10% to 50%. Here, the “ratio” is the sum of the number of the coated abrasive grains and the number of the exposed abrasive grains existing in a predetermined region of the abrasive layer, and the number of the coated abrasive grains, A numerical value calculated by dividing the number of the exposed abrasive grain parts is displayed as a percentage (number%).

  Moreover, it is desirable that a region of 3/4 to 1/3 of the average particle diameter of the abrasive grains forming the exposed abrasive grain portion protrudes from the core coating surface of the electrodeposited metal. This means that a region of ¼ to 2/3 of the average particle diameter of the abrasive grains forming the exposed abrasive grains is buried in the electrodeposited metal.

  Furthermore, the electrodeposited metal may include nickel and one or more of copper, zinc, and phosphorus. In such a configuration, the abrasive grains forming the exposed abrasive grain portion are not easily covered with the electrodeposited metal, which is good.

  According to the present invention, it is possible to provide an electrodeposition wire tool that exhibits good sharpness and excellent machining accuracy from the beginning of machining and has a long tool life.

It is a perspective view which shows a part of electrodeposition wire tool which is embodiment of this invention. It is a partially-omission sectional view in the plane containing the central axis of the electrodeposition wire tool shown in FIG. It is a graph which shows the result of the sharpness evaluation test of the electrodeposition wire tool shown in FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. As shown in FIGS. 1 and 2, the electrodeposition wire tool 100 of this embodiment has an abrasive layer 40 formed by fixing superabrasive grains 20 </ b> X and 20 </ b> Y with an electrodeposited metal 30 on the outer periphery of the core wire 10. The exposed abrasive grain portion 21Y where the tip portion 20Ya of the superabrasive grain 20Y is not covered with the electrodeposited metal 30 and the tip portion 20Xa of the superabrasive grain 20X protruding from the core coating surface 30a of the electrodeposited metal 30. Is provided with a coated abrasive grain portion 21 </ b> X covered with an electrodeposited metal 30.

  That is, the superabrasive grains 20X forming the coated abrasive grains 21X are entirely covered with the electrodeposited metal 30, and the superabrasive grains 20Y forming the exposed abrasive grains 21Y are separated from the core coating surface 30a of the electrodeposited metal 30. A region other than the tip 20Ya of the protruding abrasive grain 20Y (a region closer to the core wire 10 than the tip 20Ya) is covered with the electrodeposited metal 30.

  Here, the core wire jacket surface 30a of the electrodeposited metal 30 refers to the surface (core wire) of the electrodeposited metal 30 in the region where the superabrasive grains 20X and 20Y are not present in the electrodeposited metal 30 forming the abrasive layer 40. 10 is a surface of the electrodeposited metal 30 in a region where the electrodeposited metal 30 is directly fixed along the outer peripheral surface 10a. In the present embodiment, the electrodeposited metal 30 contains nickel, copper, zinc, and phosphorus, but is not limited thereto.

The ratio of the coated abrasive grain portion 21X included in the abrasive grain layer 40 can be adjusted within the range of 50% to 90% by number, and the ratio of the exposed abrasive grain part 21Y is within the range of 10% to 50%. It can be adjusted. Here, the ratio of the coated abrasive grain portion 21X is within a certain region of the abrasive grain layer 40.
The value calculated by (number of coated abrasive grains 21X) / (number of coated abrasive grains 21X + number of exposed abrasive grains 21Y) is expressed as a percentage (number%).
The ratio of the exposed abrasive grain portion 21 </ b> Y is within a certain area of the abrasive grain layer 40.
The value calculated by (number of exposed abrasive grains 21Y) / (number of coated abrasive grains 21X + number of exposed abrasive grains 21Y) is expressed in percentage (number%).

  When the ratio of the coated abrasive grain portion 21X is less than 50% by number, or when the ratio of the exposed abrasive grain portion 21Y exceeds 50% by number, a pulley (not shown) is used in the plating process for forming the electrodeposited metal 30. 2) and the exposed abrasive grain portion 21Y interposed between the core wire 10 and the necessary plating cannot be performed, so that the superabrasive grains 20Y and the coated abrasive grain portion 21X of the exposed abrasive grain portion 21Y cannot be performed. The superabrasive grains 20X may be shattered together. Therefore, it is desirable that the ratio of the coated abrasive grains 21X included in the abrasive layer 40 is 50% to 90% and the ratio of the exposed abrasive grains 21Y is 10% to 50%.

  Further, the tip 20Ya of the superabrasive grain 20Y that forms the exposed abrasive grain part 21Y is desirably a region that is 3/4 to 1/3 of the average grain diameter of the superabrasive grain 20Y. About 1/3 of the average particle diameter of the superabrasive grains 20Y forming the exposed abrasive grains 21Y is set to be the tip 20Ya.

  Next, for the electrodeposition wire tool 100 described above and a conventional electrodeposition wire tool (not shown), using an automatic diamond wire saw (CS-400 type) from DWT (Diamond Wire Technology), The workpiece to be described later was cut and a sharpness evaluation test was performed.

  The wire diameter of the core wire 10 (see FIG. 1) of the electrodeposition wire tool 100 and the core wire (not shown) of the conventional electrodeposition wire tool is 180 μm, and the superabrasive grains 20X and 20Y of the electrodeposition wire tool 100 and The conventional abrasive grains (not shown) for electrodeposition wire tools are 30/40 diamond grains. Further, as shown in FIGS. 1 and 2, the abrasive grain layer 40 of the electrodeposition wire tool 100 is composed of a coated abrasive grain portion 21X and an exposed abrasive grain portion 21Y, whereas a conventional electrodeposition wire tool. Each of the abrasive grains is covered with an electrodeposited metal (the state of the coated abrasive grain portion 21X in FIG. 2).

  The workpiece used for the test was a 75 mm square silicon ingot, and the silicon ingot was cut under the conditions of a cutting wire speed of 350 m / min, a cutting speed of 1.5 mm / min, a cutting time of 50 minutes, and a wire tension of 13 N. Went. Then, when the cut amount (mm) of each cut of 1 cut to 5 cut was measured, a graph as shown in FIG. 3 was obtained.

  As seen from the graph shown in FIG. 3, the electrodeposition wire tool 100 and the conventional electrodeposition wire tool are shown in the situation where the cutting amount (mm) decreases as the number of cuts increases from 1 cut to 5 cut. Are similar to each other, but the cutting amount of the conventional electrodeposition wire tool at 1 cut is 67 mm, whereas the cutting amount of the electrodeposition wire tool 100 is 72 mm. It can be seen that the cutting amount of the electrodeposition wire tool 100 is about 5 mm larger than the cutting amount.

  In the subsequent cutting process from 2 cut to 5 cut, the cutting amount of the electrodeposition wire tool 100 is about 4 to 5 mm larger than the cutting amount of the conventional electrodeposition wire tool. This trend is expected to continue.

  When the result shown in FIG. 3 is seen, in the case of the electrodeposition wire tool 100, the front-end | tip part 20Ya of the superabrasive grain 20Y which forms the exposed abrasive grain part 21Y is not coat | covered with the electrodeposited metal 30, but is in the exposed state. Therefore, it can be seen that a cutting action is produced, and a good sharpness is exhibited from 1 cut in the initial stage of machining. On the other hand, since all the abrasive grains of the conventional electrodeposition wire are covered with the electrodeposited metal (the state of the coated abrasive grain portion 21X in FIG. 2), a good sharpness can be exhibited from the initial stage of processing. It is considered impossible.

  As shown in FIGS. 1 and 2, in the electrodeposition wire tool 100, the superabrasive grains 20 </ b> X of the coated abrasive grain portion 21 </ b> X are firmly fixed to the core wire 10 by the electrodeposited metal 30. Therefore, a long tool life can be realized.

  When the characteristic X-ray intensity of nickel atoms on the surfaces of the superabrasive grains 20Y and 20X forming the exposed abrasive grains 21Y and the coated abrasive grains 21X was measured using a Scanning Electron Microscope (scanning electron microscope), The characteristic X-ray intensity of the surface of the superabrasive grain 20X forming the coated abrasive grain part 21X was 100 times or more the characteristic X-ray intensity of the surface of the superabrasive grain 20Y forming the exposed abrasive grain part 21Y. Therefore, it can be seen that nickel atoms are not substantially attached to the surface of the superabrasive grains 20Y forming the exposed abrasive grains 21Y.

  Next, the electrodeposition wire tool 100 having a ratio of the exposed abrasive grain portion 21Y of 33% by number, the electrodeposition wire tools 101 and 102 having the ratio of the exposed abrasive grain portion of 10% by number and 50% by number, and the conventional electric tool. Using the automatic diamond wire saw (CS-400 type) manufactured by DWT (Diamond Wire Technology), the workpiece material is cut under the same conditions as described above, and the initial cutting depth is measured. As a result, the results shown in Table 1 were obtained.

  As shown in Table 1, as the ratio of the exposed abrasive grains increases from 0% to 10%, 33%, and 50%, the initial cutting depth increases from 67mm to 68mm, 72mm, and 73mm. I understand. This means that the larger the ratio (number%) of the exposed abrasive part (corresponding to the exposed abrasive part 21Y shown in FIGS. 1 and 2) that forms the abrasive layer of the electrodeposited wire tool, the sharpness from the initial stage of processing becomes larger. Is good.

  In addition, the electrodeposition wire tool 100 which concerns on embodiment described based on FIGS. 1-3 shows an example of this invention, and the electrodeposition wire tool of this invention is limited to the electrodeposition wire tool 100 mentioned above. Not.

  The wire tool of the present invention can be widely used in various industrial fields using an apparatus for slicing ingots such as silicon for solar cells, silicon for semiconductors, magnetic materials, sapphire, and SiC.

DESCRIPTION OF SYMBOLS 10 Core wire 10a Outer peripheral surface 20X, 20Y Super abrasive grain 21X Coated abrasive grain part 21Y Exposed abrasive grain part 20Xa, 20Ya Tip part 30 Electrodeposited metal 30a Core wire outer surface 40 Abrasive grain layer 100 Electrodeposited wire tool

Claims (4)

  An electrodeposited wire tool having an abrasive layer formed by adhering abrasive grains to the outer periphery of a core wire with an electrodeposited metal, wherein the tip of the abrasive grain protruding from the core wire jacket surface of the electrodeposited metal is an electrode. An electrodeposited wire tool comprising: an exposed abrasive grain portion that is not coated with a metal deposit; and a coated abrasive grain portion in which a tip portion of the abrasive grain is coated with an electrodeposit metal.   2. The electrodeposited wire according to claim 1, wherein the ratio of the coated abrasive grains contained in the abrasive layer is 50% to 90% and the ratio of the exposed abrasives is 10% to 50%. tool.   The electrodeposition wire tool according to claim 1 or 2, wherein a region of 3/4 to 1/3 of an average particle diameter of the abrasive grains forming the exposed abrasive grain portion protrudes from a core wire jacket surface of the electrodeposited metal.   The electrodeposition wire tool according to any one of claims 1 to 3, wherein the electrodeposited metal contains nickel and one or more of copper, zinc, and phosphorus.

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