JP2014210279A - Brazing method and brazing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a brazing device which speeds up temperature rise of a work-piece.SOLUTION: A brazing device 1 includes: a work-piece vacuum chamber 2x in which a work-piece 20 is disposed; a heater vacuum chamber 4x in which a heater 5 is disposed; and a division wall plate 3 etc. disposed between the vacuum chambers 2x and 4x. A work-piece vacuum chamber formation container 2 is disposed at the first wall surface 3a side of the division wall plate 3, which is located one side of the division wall plate 3. A heater vacuum chamber formation container 4 is disposed at the second wall surface 3b side, which is the other side of the division wall plate 3. In the brazing device 1, heat of a heater 5 is conducted from the heater 5 to the work-piece 20 through the division wall plate 3 to melt a brazing material of the work-piece 20 in a state where vacuum is created in the work-piece vacuum chamber 2x and the heater vacuum chamber 4x, a heating surface 5a of the heater 5 in the heater vacuum chamber 4x contacts with a second wall surface 3b of the division wall plate 3, and a first wall surface 3a of the division wall plate 3 contacts with the work-piece 20 in the work-piece vacuum chamber 2x.

Description

  The present invention relates to a brazing method and a brazing apparatus used for manufacturing various brazed products such as heat exchangers and radiators.

  In the present specification, unless otherwise specified, the term “aluminum” is used to mean not only pure aluminum but also an aluminum alloy.

  Brazing methods used for manufacturing various brazed products are roughly classified into a flux brazing method and a fluxless brazing method. As a fluxless brazing method, a vacuum brazing method is generally known, and a VAW method is also known. Known flux brazing methods include in-furnace brazing and nocolok brazing. JP 2010-17724 A (Patent Document 1) and JP 2011-614 A (Patent Document 2) disclose a method of manufacturing a heat exchanger by a flux brazing method.

  In any of these brazing methods described above, the brazing material of the workpiece is brazed by heating and melting the brazing material interposed in the planned brazing portion (scheduled joining interface) of the workpiece with the heat of a predetermined heat source. Is done.

JP 2010-17724 A JP 2011-614

  Among these brazing methods, in the vacuum brazing method, the heat of the heat source is transmitted to the workpiece by radiant heat transfer, and the brazing material is heated and melted. In the VAW method, the in-furnace brazing method and the Nocolok brazing method, the heat of the heat source is transferred to the workpiece by radiation and convection heat transfer, and the brazing material is heated and melted. However, these brazing methods have room for improvement with respect to the rate of temperature rise of the workpiece.

  The present invention has been made in view of the above-described technical background, and an object of the present invention is to provide a brazing method and a brazing apparatus which are improved from the conventional brazing method and brazing apparatus.

  The present invention provides the following means.

[1] Work vacuum chamber, heater vacuum chamber, heater disposed in the heater vacuum chamber and having a heating surface, interposed between the work vacuum chamber and the heater vacuum chamber, and on the workpiece vacuum chamber side A partition wall plate having a first wall surface facing toward the heater and a second wall surface facing toward the heater vacuum chamber, a work vacuum chamber forming container disposed on the first wall surface side of the partition wall plate, and the first of the partition wall plates. A heater vacuum chamber forming vessel disposed on the two wall surfaces, the work vacuum chamber being surrounded by the partition plate and the work vacuum chamber forming vessel, and the heater vacuum chamber being the partition wall Preparing a brazing device formed by being surrounded by a plate and the heater vacuum chamber forming container;
A workpiece placement step of placing a workpiece having a brazing planned portion having a brazing material in the workpiece vacuum chamber of the brazing device;
After the work placement step, each of the work vacuum chamber and the heater vacuum chamber is evacuated, the heating surface of the heater is brought into contact with the second wall surface of the partition plate, and the first wall surface of the partition plate is contacted. A melting step of melting the brazing material by transferring heat of the heater from the heater to the workpiece through the partition plate in a state of being in contact with the workpiece;
The brazing method characterized by including.

[2] The partition plate is separable from at least the workpiece forming vessel among the workpiece vacuum chamber forming vessel and the heater vacuum chamber forming vessel,
The work vacuum chamber forming container has an opening formed in the work vacuum chamber forming container by separating the partition plate from the work vacuum chamber forming container. 2. The brazing method according to item 1, wherein the brazing method is an inlet.

  [3] The brazing method according to item 1 or 2, wherein in the melting step, the brazing material is melted in a state where the heating surface of the heater is pressed against the workpiece via the partition plate.

  [4] The brazing method according to any one of items 1 to 3, wherein the heater is covered with a heat insulating material in a state where the heating surface is exposed.

  [5] The brazing method according to any one of items 1 to 4, wherein, in the melting step, the brazing material is melted while only the workpiece vacuum chamber is evacuated out of the workpiece vacuum chamber and the heater vacuum chamber.

  [6] In the melting step, thermal expansion of the partition plate parallel to the second wall surface generated in the melting step is provided around a contact portion of the partition plate with the heating surface of the heater. The brazing method according to any one of the preceding items 1 to 5, wherein the brazing method absorbs by the absorbed part.

[7] The heater vacuum chambers are respectively disposed on both outer sides of the work vacuum chamber,
The heater is disposed in each heater vacuum chamber,
The partition plate is interposed between the work vacuum chamber and each heater vacuum chamber,
In the melting step, the heat of each heater is transferred from each heater through the corresponding partition plate to the workpiece by conductive heat transfer, thereby melting the brazing material according to any one of the preceding items 1 to 6. Brazing method.

  [8] The brazing method according to item 7, wherein in the melting step, the heating surfaces of the heaters are relatively pressed against the workpiece via the corresponding partition plate so as to sandwich the workpiece between the two heating surfaces. .

[9] A workpiece vacuum chamber in which a workpiece having a brazing planned portion having a brazing material is disposed;
A heater vacuum chamber;
A heater disposed in the heater vacuum chamber and having a heating surface;
A partition plate interposed between the workpiece vacuum chamber and the heater vacuum chamber and having a first wall surface facing the workpiece vacuum chamber side and a second wall surface facing the heater vacuum chamber side;
A work vacuum chamber forming container disposed on the first wall surface side of the partition plate;
A heater vacuum chamber forming container disposed on the second wall surface side of the partition plate;
Comprising
The work vacuum chamber is formed by being surrounded by the partition plate and the work vacuum chamber forming container,
The heater vacuum chamber is formed by being surrounded by the partition plate and the heater vacuum chamber forming container,
The work vacuum chamber and the heater vacuum chamber are each evacuated, the heating surface of the heater is in contact with the second wall surface of the partition plate, and the first wall surface of the partition plate is disposed in the work vacuum chamber. The heat of the heater is transferred from the heater through the partition plate to the work by conduction heat transfer while in contact with the work, thereby melting the brazing material. Brazing equipment.

[10] The partition plate is separable from at least the work vacuum chamber forming container among the work vacuum chamber forming container and the heater vacuum chamber forming container.
The work vacuum chamber forming container has an opening formed in the work vacuum chamber forming container by separating the partition plate from the work vacuum chamber forming container. The brazing device according to item 9, which is used as a slot.

  [11] Furthermore, a heater moving mechanism is provided that moves the heating surface of the heater so as to be able to come into contact with and separate from the second wall surface of the partition plate and to be pressed against the workpiece via the partition plate. 11. The brazing device according to 9 or 10 above.

[12] The heater moving mechanism includes:
A screw hole provided in the heater vacuum chamber forming container, a screw rod screwed into the screw hole in a state of airtightly penetrating the peripheral wall of the heater vacuum chamber forming container from the outside to the heater vacuum chamber side, The heater is connected to one end of the screw rod disposed on the heater vacuum chamber side, and the screw is disposed on the other end of the screw rod disposed outside the heater vacuum chamber forming container. 12. The brazing device according to item 11, wherein a driving unit for rotating the rod is provided, and the heater is moved by rotating the screw rod by the driving unit.

  [13] The brazing device according to any one of items 9 to 12, wherein the heater is covered with a heat insulating material in a state where the heating surface is exposed.

[14] Furthermore, the apparatus includes vacuum means for evacuating the work vacuum chamber and the heater vacuum chamber,
The vacuum means is
A first intake pipe that communicates with the work vacuum chamber and sucks the gas in the work vacuum chamber; a second intake pipe that communicates with the heater vacuum chamber and sucks the gas in the heater vacuum chamber; and the first intake pipe A vacuum pump for evacuating the work vacuum chamber and the heater vacuum chamber through a pipe and the second intake pipe, a first on-off valve provided in the first intake pipe and opening and closing the first intake pipe, 14. The brazing device according to any one of items 9 to 13, further comprising a second on-off valve that is provided in the second intake pipe and opens and closes the second intake pipe.

  [15] The vacuum means is configured such that when the brazing material is melted, the first on-off valve is opened and the second on-off valve is closed with the vacuum pump operating. 15. The brazing device according to item 14 above.

  [16] An absorbing portion that absorbs thermal expansion of the partition plate in a direction parallel to the second wall surface generated when the brazing material is melted around the contact portion of the partition plate with the heating surface of the heater. 16. The brazing device according to any one of items 9 to 15, wherein the brazing device is provided.

[17] A seal member is interposed between the mutual seal portions of the workpiece vacuum chamber forming container and the partition plate,
The seal portion of the partition plate is located on the outer peripheral portion of the partition plate, and further in a direction in which the seal portion is in close contact with the seal portion of the work vacuum chamber forming container when the brazing material is melted. Is relatively pressed,
The seal member is cooled when the brazing material is melted,
The contact portion of the partition plate with the heating surface of the heater is located at a substantially central portion of the partition plate,
The brazing device according to item 16, wherein the absorbing portion is provided inside the seal portion of the partition plate and around the contact portion with the heating surface of the heater.

  [18] The brazing device according to item 16 or 17, wherein the absorbing portion is formed by bending a part of the partition plate into a corrugated cross section.

[19] The heater vacuum chambers are respectively disposed on both outer sides across the workpiece vacuum chamber,
The heater is disposed in each heater vacuum chamber,
The partition plate is interposed between the work vacuum chamber and each heater vacuum chamber,
The heat of each said heater is transmitted to the said workpiece | work through the said partition plate corresponding from each said heater by conduction | electrical_connection heat transfer, In any one of the preceding clauses 9-18 which shall be what fuse | melts the said brazing material. Brazing equipment.

  [20] The brazing device according to item 19 above, wherein the heating surface of each heater is relatively pressed against the workpiece via the corresponding partition plate so as to sandwich the workpiece between the two heating surfaces. .

  The present invention has the following effects.

  In the brazing method of [1] in the previous section, the heat of the heater as the heat source is transferred to the work by conduction heat transfer during the melting process, so compared with the case of transferring the heat of the heat source to the work by radiant heat transfer or convection heat transfer. As a result, the workpiece heating rate can be increased, and as a result, the time required for brazing (ie, the brazing time) can be shortened, and the amount of heat required for brazing can be further reduced. Can be achieved.

  Furthermore, since the work vacuum chamber and the heater vacuum chamber are each evacuated during the melting step, the vacuum state of each vacuum chamber can be maintained without increasing the thickness of the partition plate. Therefore, the wall thickness of the partition plate can be reduced. Thereby, the heat capacity of the partition plate can be reduced, and as a result, the workpiece heating rate can be further increased.

  Of course, since the brazing material is melted in a state where the workpiece vacuum chamber is evacuated, it is possible to satisfactorily braze the brazing planned portion without necessarily supplying the flux to the brazing planned portion or brazing material of the workpiece.

  In the above item [2], the work vacuum chamber forming container has an opening formed in the work vacuum chamber forming container by separating the partition plate from the work vacuum chamber forming container. Since it serves as a slot, the workpiece can be easily put into the workpiece vacuum chamber, and the workpiece can be easily taken out from the workpiece vacuum chamber.

  In the preceding item [3], the brazing material is melted in a state where the heater heating surface is pressed against the workpiece via the partition plate, and therefore the heater heating surface is brought into close contact with the second wall surface of the partition plate during the melting step. The first wall surface of the partition plate can be brought into close contact with the workpiece. Thereby, the heat of a heater can be reliably transmitted to a workpiece | work via a partition board from a heater.

  In the previous item [4], since the heater is covered with the heat insulating material with the heating surface exposed, the heat insulating material is prevented from interfering when the heating surface of the heater is brought into contact with the second wall surface of the partition plate. As a result, the heating surface of the heater can be brought into direct contact with the second wall surface of the partition plate, and further, the heater heat is radiated from a surface other than the heating surface of the heater to cause a heater vacuum. It is possible to suppress the problem that the temperature of the container rises as it is transmitted to the chamber forming container.

  In the previous item [5], by melting the brazing filler metal while evacuating only the workpiece vacuum chamber of the workpiece vacuum chamber and heater vacuum chamber, the gas generated from the workpiece during the melting process is quickly discharged from the workpiece vacuum chamber. can do. Therefore, it is possible to surely prevent the gas from adversely affecting the brazed portion, and as a result, it is possible to reliably braze the planned brazing portion of the workpiece satisfactorily.

  In the previous item [6], the thermal expansion of the partition wall plate in the direction parallel to the second wall surface generated during the melting step is absorbed by the absorption portion provided around the contact portion of the partition plate with the heating surface of the heater. The following effects are achieved.

  That is, during the melting step, the partition plate is heated by the heat of the heater and thermally expands in a direction parallel to the second wall surface, but this thermal expansion is absorbed by the absorbing portion. Thereby, the deformation | transformation by the thermal expansion of a partition board can be prevented. Therefore, the contact state between the heating surface of the heater and the second wall surface of the partition plate and the contact state between the first wall surface of the partition plate and the workpiece can be maintained well during the melting process. It can be used repeatedly reliably.

  In the previous item [7], the heat of each heater is transferred from each heater to the workpiece through the corresponding partition plate by conductive heat transfer, so that the brazing material is melted. Therefore, compared to the case where the number of heaters is one. Further, the time required for brazing can be further shortened.

  In the previous item [8], the heating surface of each heater is relatively pressed against the workpiece via the corresponding partition plate so that the workpiece is sandwiched between the two heating surfaces, so that the workpiece is brazed during the melting process. A brazing load can be applied, and thereby the brazed portion of the workpiece can be brazed better.

  The brazing device of the preceding item [9] has the same effect as the effect of the preceding item [1].

  The previous item [10] has the same effect as the effect of the previous item [2].

  In the previous item [11], since the brazing device has a heater moving mechanism, the heating surface of the heater can be separated from the second wall surface of the partition plate when the brazing material is not melted. When melting the heater, the heating surface of the heater can be brought into contact with the second wall surface of the partition plate, and further, the heating surface of the heater can be pressed against the workpiece via the partition plate. Therefore, the heating surface of the heater can be brought into close contact with the second wall surface of the partition plate, and the first wall surface of the partition plate can be brought into close contact with the workpiece. Thereby, the heat of a heater can be reliably transmitted to a workpiece | work via a partition board from a heater.

  In the preceding item [12], a heater moving mechanism that can reliably move the heating surface of the heater can be configured.

  The previous item [13] has the same effect as the effect of the previous item [4].

  In the preceding item [14], the work vacuum chamber and the heater vacuum chamber can be surely evacuated.

  In the previous item [15], the vacuum means is configured so that the first on-off valve is in the open state and the second on-off valve is in the closed state with the vacuum pump operating when melting the brazing filler metal. Of these vacuum chambers, only the workpiece vacuum chamber can be evacuated by a vacuum pump to melt the brazing material. Thereby, the vacuuming speed of the gas in the work vacuum chamber by the vacuum pump is increased, and as a result, the gas generated from the work when the brazing material is melted can be quickly discharged from the work vacuum chamber. Therefore, it is possible to surely prevent the gas from adversely affecting the brazed portion, and as a result, it is possible to reliably braze the planned brazing portion of the workpiece satisfactorily.

  The previous item [16] has the same effect as the effect of the previous item [6].

  In the preceding item [17], a seal member is interposed between the mutual seal portions of the work vacuum chamber forming container and the partition plate, and the seal portion of the partition plate is used when the brazing material is melted. Therefore, when the brazing material is melted, the vacuum state of the workpiece vacuum chamber can be reliably maintained.

  Furthermore, since the sealing member is cooled when the brazing material is melted, thermal deterioration of the sealing member can be prevented, and as a result, the sealing state of the mutual seal portion can be maintained well. Furthermore, the sealing part of the partition plate is fixed by being pressed relatively to the sealing part of the work vacuum chamber forming container in addition to cooling the sealing member when the brazing material is melted as described above. A large thermal expansion occurs in the partition plate due to a large temperature difference between the temperature of the seal portion of the partition plate and the temperature of the contact portion of the partition plate with the heating surface of the heater. However, the absorption part is provided inside the seal part of the partition plate and around the contact part with the heating surface of the heater. Can be absorbed into.

  In the previous item [18], since the absorbing portion is formed by bending a part of the partition plate in a corrugated cross section, the absorbing portion can be reliably absorbed, and the absorbing portion can be formed by pressing or the like. It can be formed easily.

  The previous item [19] has the same effect as the effect of the previous item [7].

  The previous item [20] has the same effect as the effect of the previous item [8].

FIG. 1 is a cross-sectional view showing a brazing apparatus according to an embodiment of the present invention in a state where a brazing material is melted. FIG. 2 is a cross-sectional view taken along line XX in FIG. FIG. 3 is an enlarged view of a portion K in FIG. FIG. 4 is a cross-sectional view showing the brazing apparatus in a state where the partition plate is separated from the work vacuum chamber forming container.

  Next, an embodiment of the present invention will be described below with reference to the drawings.

  As shown in FIG. 1, a brazing apparatus 1 according to an embodiment of the present invention is used for producing, for example, a heat exchanger as a brazed product.

  The workpiece 20 to be brazed by the brazing apparatus 1 includes a brazing planned portion 21. In the present embodiment, the workpiece 20 is composed of a plurality of brazed members 23a, 23a, and 23b that are brazed and integrated with each other. These brazed members 23a, 23a, and 23b are all made of metal, and in this embodiment, are made of aluminum. The number of members to be brazed is, for example, three. Of these brazed members 23a, 23a, 23b, the two members 23a, 23a have a substantially flat plate shape and are spaced apart from each other in parallel. The size of each flat plate member 23a is, for example, width 80 × length 80 × wall thickness 2 mm, and the material thereof is, for example, A1100. The remaining one member 23b has a corrugated fin shape, and is disposed between both flat plate-like members 23a and 23a. The size of the corrugated fin-like member 23b is, for example, width 80 × length 80 × height 16 × thickness 0.5 mm. The corrugated fin-like member 23b is formed of a brazing sheet. As shown in FIG. 3, brazing material layers 22 and 22 as brazing materials are clad on both surfaces of the core material 23c, respectively. The material of the core material 23c is, for example, A3003, and the material of each brazing filler metal layer 22 is, for example, an Al—Si alloy, specifically, for example, A4004. Therefore, the mutual contact portion (that is, the planned joining interface) between the upper flat plate member 23a and the corrugated fin-like member 23b, and the mutual contact portion (ie, planned joining) between the lower flat member 23a and the corrugated fin-like member 23b. The brazing material layer 22 (brazing material) of the corrugated fin-like member 23b is interposed between the interfaces. Then, by melting the brazing material layer 22 interposed between the mutual contact portions, the mutual contact portions are brazed and the brazed members 23a, 23a, 23b are integrated. That is, this work 20 is provided with such a mutual contact portion as a brazing planned portion 21, and a brazing material layer 22 as a brazing material is provided in the mutual contact portion (the brazing planned portion 21).

  As shown in FIGS. 1 and 4, the brazing apparatus 1 includes a work vacuum chamber 2x, two heater vacuum chambers 4x and 4x, two partition plates 3 and 3, a work vacuum chamber forming container 2, and two Heater vacuum chamber forming containers 4 and 4, two heaters 5 and 5, two heater moving mechanisms 6 and 6, vacuum means 7, gas supply means 8, cooling means 10 and the like are provided.

  The workpiece vacuum chamber 2x is where the workpiece 20 is disposed. When the brazing material (that is, the brazing material layer 22) is melted, the workpiece vacuum chamber 2x is brought into a vacuum state.

  The heater vacuum chamber 4x is disposed on both outer sides of the workpiece vacuum chamber 2x, and in the present embodiment, the heater vacuum chamber 4x is disposed on the upper side and the lower side, respectively, with respect to the workpiece vacuum chamber 2x. The heater vacuum chamber 4x arranged below (hereinafter referred to as “lower heater vacuum chamber 4x”) is inverted upside down from the heater vacuum chamber 4x arranged below (hereinafter referred to as “upper heater vacuum chamber 4x”). It has a configuration. When the brazing material is melted, each heater vacuum chamber 4x is evacuated.

  Each partition plate 3 has a substantially rectangular shape in plan view (see FIG. 2), and is interposed between the work vacuum chamber 2x and the upper and lower heater vacuum chambers 4x. That is, the upper partition plate 3 (hereinafter referred to as “upper partition plate 3”) is interposed between the workpiece vacuum chamber 2x and the upper heater vacuum chamber 4x, and the workpiece vacuum chamber 2x and the lower heater vacuum chamber 4x. A lower partition plate 3 (hereinafter referred to as “lower partition plate 3”) is interposed between the two. The lower partition plate 3 is configured by turning the upper partition plate 3 upside down.

  Each partition plate 3 is made of a metal that can withstand the heat generated when the brazing material is melted, and is made of, for example, stainless steel such as SUS304.

Further, the upper partition plate 3 has a first wall surface 3a facing the workpiece vacuum chamber 2x side (ie, the lower side) and a second wall surface 3b facing the upper heater vacuum chamber 4x side (ie, the upper side). . Similarly, the lower partition plate 3 has a first wall surface 3a facing the workpiece vacuum chamber 2x side (that is, the upper side) and a second wall surface 3b facing the lower heater vacuum chamber 4x side (that is, the lower side). And
The work vacuum chamber forming container 2 is disposed on the first wall surfaces 3a and 3a side of the upper and lower partition plates 3 and 3 and forms the work vacuum chamber 2x in cooperation with both the partition plates 3 and 3. In other words, the work vacuum chamber forming container 2 is disposed between the first wall surface 3a side of the upper partition plate 3 and the first wall surface 3a side of the lower partition plate 3, and the work vacuum chamber forming container 2 and both partition plates. The work vacuum chamber 2x is formed by being hermetically surrounded by 3 and 3. In the present embodiment, the brazing apparatus 1 includes a workpiece vacuum chamber forming container 2 having a peripheral side wall 2a having a substantially rectangular frame shape in a plan view with openings on the upper surface side and the lower surface side. The lower end surface of the peripheral side wall 2a is airtightly bonded and fixed to the outer peripheral portion of the first wall surface 3a of the lower partition plate 3 by welding (W1 is the welded portion). Thereby, the lower opening of the peripheral side wall 2 a of the work vacuum chamber forming container 2 is closed by the lower partition plate 3 so as not to be opened and closed. Therefore, the lower partition plate 3 also has a role as the bottom wall of the work vacuum chamber forming container 2.

  The work vacuum chamber forming container 2 (that is, the peripheral side wall 2a) is made of a metal that can withstand heat when the brazing material is melted, and is made of stainless steel such as SUS304.

  The upper partition plate 3 also has a role as a lid wall that closes the opening on the upper side of the peripheral side wall 2a of the work vacuum chamber forming container 2 so that the opening can be opened and closed. In other words, the upper partition plate 3 has the outer peripheral portion of the first wall surface 3a as a seal portion 3c with the work vacuum chamber forming container 2 (specifically, the peripheral side wall 2a). On the other hand, the work vacuum chamber forming container 2 has an upper end surface of the peripheral side wall 2 a as a seal portion 2 c with the upper partition plate 3. Then, as shown in FIG. 4, the seal portion 3c of the upper partition plate 3 is pressed against the seal portion 2c of the peripheral side wall 2a via a seal member 12 to be described later, whereby the peripheral side wall 2a of the work vacuum chamber forming container 2 is pressed. The upper opening 2 e is airtightly closed by the upper partition plate 3. As shown in FIG. 1, in the state in which the upper opening 2e is closed by the upper partition plate 3, the first partition wall 3 is located on the first wall surface 3a side and inside the work vacuum chamber forming container 2. Thus, an airtight work vacuum chamber 2x surrounded by the peripheral side wall 2a of the work vacuum chamber forming container 2 and both partition plates 3 and 3 is formed. On the other hand, when the upper partition plate 3 is separated from the work vacuum chamber forming container 2 (specifically, the peripheral side wall 2a), the upper partition plate 3 has a substantially rectangular shape in plan view on the upper surface side of the peripheral side wall 2a of the work vacuum chamber forming container 2. The opening 2e is formed, and this opening 2e is used as an inlet / outlet of the workpiece 20 in the workpiece vacuum chamber forming container 2.

  Each heater vacuum chamber forming container 4 is arranged on the second wall surface 3b side of the corresponding partition plate 3 and forms a heater vacuum chamber 4x in cooperation with the corresponding partition plate 3. More specifically, one heater vacuum chamber forming container 4 (hereinafter referred to as “upper heater vacuum chamber forming container 4”) is disposed on the second wall surface 3b side of the upper partition plate 3, and the upper heater vacuum chamber forming container is disposed. 4 and the upper partition plate 3 are hermetically surrounded to form an upper heater vacuum chamber 4x. The other heater vacuum chamber forming container 4 (hereinafter referred to as “lower heater vacuum chamber forming container 4”) is disposed on the second wall surface 3 b side of the lower partition plate 3. The lower heater vacuum chamber 4x is formed by being hermetically surrounded by the plate 3. The lower heater vacuum chamber forming container 4 has a configuration in which the upper heater vacuum chamber forming container 4 is turned upside down.

  Each heater vacuum chamber forming container 4 is made of a metal that can withstand heat when the brazing material is melted, and is made of stainless steel such as SUS304.

  The upper heater vacuum chamber forming container 4 includes an opposing wall 4b having a quadrangular shape in plan view spaced apart from the upper partition plate 3 on the second wall surface 3b side of the upper partition plate 3 and an outer periphery of the opposing wall 4b. And a peripheral side wall 4a having a rectangular frame shape in plan view and formed integrally with the opposing wall 4b at a substantially right angle to the lower side. The opposing wall 4b and the peripheral side wall 4a constitute the peripheral wall 4c of the upper heater vacuum chamber forming container 4. The lower end surface of the peripheral side wall 4a is airtightly bonded and fixed to the outer peripheral portion of the second wall surface 3b of the upper partition plate 3 by welding (W2 is the welded portion). Thus, the upper heater vacuum chamber forming container 4 (that is, the opposing wall 4b and the peripheral side wall 4a) and the upper partition plate are located on the second wall surface 3b side of the upper partition plate 3 and inside the upper heater vacuum chamber forming container 4. The airtight upper heater vacuum chamber 4x surrounded by 3 is formed.

  The lower heater vacuum chamber forming container 4 is configured in the same manner as the upper heater vacuum chamber forming container 4. That is, the lower heater vacuum chamber forming container 4 includes a facing wall 4b having a quadrangular shape in plan view and spaced apart from the lower partition plate 3 on the second wall surface 3b side of the lower partition plate 3 and a facing wall 4b. And a peripheral side wall 4a having a rectangular frame shape in plan view, which is integrally formed at a substantially right angle on the upper side with respect to the opposing wall 4b. The upper end surface of the peripheral side wall 4a is airtightly bonded and fixed to the outer peripheral portion of the second wall surface 3b of the lower partition plate 3 by welding (W3 is the welded portion). Thus, the lower heater vacuum chamber forming container 4 (that is, the opposing wall 4b and the peripheral side wall 4a) and the lower partition plate are disposed on the second wall surface 3b side of the lower partition plate 3 and inside the lower heater vacuum chamber forming container 4. An airtight lower heater vacuum chamber 4x surrounded by 3 is formed.

  The heater 5 is disposed in each heater vacuum chamber 4x. More specifically, one heater 5 (hereinafter referred to as “upper heater 5”) is disposed in the upper heater vacuum chamber 4x, and the other heater 5 (hereinafter referred to as “lower heater 5”) is disposed in the lower heater vacuum chamber 4x. .) Is arranged. Further, the upper heater 5 is disposed away from the inner surface of the peripheral wall 4c of the upper heater vacuum chamber forming container 4, and the lower heater 5 is disposed away from the inner surface of the peripheral wall 4c of the lower heater vacuum chamber forming container 4. Yes. Furthermore, the upper heater 5 and the lower heater 5 are disposed at positions on both the upper and lower sides across the workpiece arrangement position in the workpiece vacuum chamber 2x. The lower heater 5 has a configuration in which the upper heater 5 is turned upside down.

  Each heater 5 has a flat heating surface 5a in a part of its outer peripheral surface. Each heater 5 is composed of, for example, an electric heater, and is configured such that the temperature of the heater 5 (specifically, the temperature of the heating surface 5a of the heater 5) can be controlled by increasing or decreasing the amount of current supplied to the heater 5. Yes. The heating surface 5a of each heater 5 is disposed so as to face the second wall surface 3b side of the corresponding partition wall plate 3 and to be in surface contact with the second wall surface 3b. When the brazing material is melted, the heat of each heater 5 comes into surface contact with the second wall surface 3b of the partition plate 3 corresponding to the heating surface 5a of each heater 5, and the first wall surface of each partition plate 3 is heated. 3a is in contact with the workpiece 20 in a surface contact state, and is simultaneously transmitted from each heater 5 to the workpiece 20 through the corresponding partition plate 3 by conduction heat transfer to heat and melt the brazing material. Conductive heat transfer is also called heat conduction.

  A heat insulating material 5b is provided in a layered manner on the outer peripheral surface of each heater 5 excluding the heating surface 5a, whereby the outer peripheral surface of each heater 5 excluding the heating surface 5a is covered with the heat insulating material 5b. On the other hand, the heating surface 5a of each heater 5 is exposed so as to be in direct contact with the corresponding second wall surface 3b of the partition plate 3. A heat insulating material consists of ceramics, such as an alumina, for example. The heating surface 5a of each heater 5 is pressed against the workpiece 20 via the corresponding partition plate 3 when the brazing material is melted.

  Each heater moving mechanism 6 moves the heating surface 5a of the corresponding heater 5 so as to be able to contact and separate from the second wall surface 3b of the corresponding partition plate 3 and to be pressed against the workpiece 20 via the corresponding partition plate 3. It is provided with a screw hole 6a, a screw rod 6b, a drive unit 6c, and the like.

  In both heater moving mechanisms 6, 6, in one heater moving mechanism 6 (hereinafter referred to as “upper heater moving mechanism 6”) that moves the heating surface 5 a of the upper heater 5, the screw hole 6 a is an upper heater vacuum chamber forming container. 4, the screw rod 6b is screwed into the screw hole 6a in a state of penetrating the opposing wall 4b from the outside to the upper heater vacuum chamber 4x side. ing. In FIG. 1, 6d is a sealing member, and this sealing member 6d is disposed adjacent to the screw hole 6a at the substantially central portion of the opposing wall 4b. Then, the screw rod 6b is screwed into the screw hole 6a through the seal member 6d, so that the screw rod 6b is disposed in an airtight manner through the opposing wall 4b. The upper heater 5 is connected to one end portion (lower end portion) of the screw rod 6b disposed on the upper heater vacuum chamber 4x side, and on the other hand, the screw rod 6b is disposed outside the upper heater vacuum chamber forming container 4. A driving unit 6c is provided at the other end (upper end). The drive unit 6c is for rotating the screw rod 6b, and in the present embodiment is for manually rotating the screw rod 6b.

  Then, the upper heater moving mechanism 6 rotates the handle provided in the driving unit 6c in one rotation direction by hand force (this rotation direction is referred to as “forward rotation direction” for convenience of description), thereby providing a screw rod. 6b is rotated in the forward rotation direction, whereby the heating surface 5a of the upper heater 5 is moved closer to the second wall surface 3b of the upper partition plate 3 and further pressed against the workpiece 20 via the upper partition plate 3. The screw rod 6b is rotated in the reverse rotation direction by rotating the handle of the drive unit 6c in the reverse rotation direction with the force of the hand, and the heating surface 5a of the upper heater 5 is thereby configured. The upper partition plate 3 is configured to be movable in the separating direction with respect to the second wall surface 3b.

  In the present invention, the drive unit 6c is not limited to manually rotating the screw rod 6b, but for other purposes, for example, rotating the screw rod 6b electrically using an electric motor or the like. Also good.

  The other heater moving mechanism 6 that moves the heating surface 5a of the lower heater 5 (hereinafter referred to as “lower heater moving mechanism 6”) has a structure in which the upper heater moving mechanism 6 is turned upside down. The upper heater moving mechanism 6 has the same structure.

  The vacuum means 7 evacuates the work vacuum chamber 2x and both heater vacuum chambers 4x and 4x, and sucks the gas in the work vacuum chamber 2x and the gas in the upper heater vacuum chamber 4x. The second intake pipe 7b (hereinafter referred to as "second upper intake pipe 7b") and the second intake pipe 7b (hereinafter referred to as "second lower intake pipe 7b") for sucking the gas in the lower heater vacuum chamber 4x. And a vacuum pump 7d.

  The first intake pipe 7a is connected to the work vacuum chamber 2x in a state of airtightly penetrating the peripheral side wall 2a of the work vacuum chamber forming container 2 from the outside to the work vacuum chamber 2x side. The second upper intake pipe 7b is communicatively connected to the upper heater vacuum chamber 4x while penetrating the peripheral side wall 4a of the upper heater vacuum chamber forming container 4 from the outside to the upper heater vacuum chamber 4x side. The second lower intake pipe 7b is connected to the lower heater vacuum chamber 4x in a state of airtightly penetrating the peripheral side wall 4a of the lower heater vacuum chamber forming container 4 from the outside to the lower heater vacuum chamber 4x side. The downstream ends of these intake pipes 7a, 7b, 7b are connected to and joined to one joining pipe 7c, and one joining the joining pipe 7c with one vacuum pump 7d (more specifically, the vacuum pump 7d (Suction tube) is connected. The vacuum pump 7d is for evacuating the work vacuum chamber 2x, the upper heater vacuum chamber 4x, and the lower heater vacuum chamber 4x through the junction pipe 7c, that is, the first intake pipe 7a, the second upper intake pipe 7b, The work vacuum chamber 2x, the upper heater vacuum chamber 4x, and the lower heater vacuum chamber 4x are evacuated through the second lower intake pipe 7b, respectively.

  The first intake pipe 7a is provided with a first on-off valve 7e for opening and closing the first intake pipe 7a. The second upper intake pipe 7b is provided with a second on-off valve 7f (hereinafter referred to as "second upper on-off valve 7f") for opening and closing the second upper intake pipe 7b. Is provided with a second on-off valve 7f (hereinafter referred to as "second lower on-off valve 7f") for opening and closing the second lower intake pipe 7b. These on-off valves 7e, 7f, and 7f are all composed of electromagnetic valves that can be electrically controlled, for example. In the present invention, these on-off valves 7e, 7f, 7f are not limited to those composed of electromagnetic valves, and may be those that can be manually opened / closed, for example.

  The gas supply means 8 supplies, for example, air as a predetermined gas to the work vacuum chamber 2x and both heater vacuum chambers 4x, 4x, a first supply pipe 8a for supplying air to the work vacuum chamber 2x, and an upper heater A second supply pipe 8b for supplying air to the vacuum chamber 4x (hereinafter referred to as "second upper supply pipe 8b") and a second supply pipe 8b for supplying air to the lower heater vacuum chamber 4x (hereinafter referred to as "second" Lower supply pipe 8b ").

  The first supply pipe 8a is communicatively connected to the work vacuum chamber 2x while penetrating the peripheral side wall 2a of the work vacuum chamber forming container 2 from the outside to the work vacuum chamber 2x side. The second upper supply pipe 8b is connected to the upper heater vacuum chamber 4x in a state of airtightly penetrating the peripheral side wall 4a of the upper heater vacuum chamber forming container 4 from the outside to the upper heater vacuum chamber 4x side. The second lower supply pipe 8b is connected to the lower heater vacuum chamber 4x in a state of airtightly penetrating the peripheral side wall 4a of the lower heater vacuum chamber forming container 4 from the outside to the lower heater vacuum chamber 4x side. And the upstream edge part of these supply pipes 8a, 8b, and 8b is connected and joined to one merge pipe 8c. Further, the upstream end opening of the junction pipe 8c is opened to the atmosphere. The junction pipe 8c is provided with a third on-off valve 8d for opening and closing the junction pipe 8c. The third on-off valve 8d is composed of, for example, an electrically controllable electromagnetic valve. In the present invention, the third on-off valve 8d is not limited to a solenoid valve, and may be one that can be manually opened and closed, for example.

  Furthermore, the brazing apparatus 1 of the present embodiment includes a controller 9 that controls the operation of the on-off valves 7e, 7f, 7f, 8d, the vacuum pump 7d, the heaters 5 and the like. The controller 9 includes a computer having a CPU, RAM, ROM and the like. A predetermined program is installed in the computer so that the brazing scheduled portion 21 of the workpiece 20 can be brazed satisfactorily and efficiently. The controller 9 causes the vacuum means 7 to open the first open / close valve 7e and close the second upper / lower open / close valves 7f, 7f with the vacuum pump 7d operating when melting the brazing filler metal. The gas supply means 8 is configured such that the third on-off valve 8d is closed with the vacuum pump 7d operating when the brazing material is melted.

  Between the mutual seal portions 2c and 3c between the work vacuum chamber forming container 2 and the upper partition plate 3, there is an annular seal member 12 having a substantially rectangular shape in plan view for hermetically sealing between the mutual seal portions 2c and 3c. Intervened. The seal member 12 is made of, for example, a rubber gasket (including packing). As described above, the seal portion 2c of the work vacuum chamber forming container 2 is composed of the upper end surface of the peripheral side wall 2a of the work vacuum chamber forming container 2, and a groove is formed in the seal portion 2c by extending in a substantially rectangular shape in plan view. Has been. And the sealing member 12 is arrange | positioned in this groove | channel. The seal portion 3c of the upper partition plate 3 is composed of the outer peripheral portion of the first wall surface 3a of the upper partition plate 3 as described above.

  The cooling means 10 cools at least the sealing member 12 when the brazing material is melted. In the present embodiment, the cooling means 10 is provided in the work vacuum chamber forming container 2. That is, the cooling means 10 includes a coolant flow path 10 a having a substantially square cross section provided inside the peripheral side wall 2 a of the work vacuum chamber forming container 2. A coolant (eg, coolant) is circulated through the coolant channel 10a, and the coolant channel 10a is provided so as to extend over substantially the entire circumference in the circumferential direction of the peripheral side wall 2a. Then, when the brazing material is melted, the cooling means 10 causes the cooling liquid (for example, cooling water) to flow through the cooling liquid flow path 10a, so that the sealing portion 2c and the sealing member 12 of the workpiece vacuum chamber forming container 2 The seal portion 3c of the partition plate 3 is configured to be cooled.

  In the brazing apparatus 1 of the present embodiment, the size of the work vacuum chamber forming container 2 is set according to the size of the work 20 and the like, and is not limited. The width of the container 2 is set to 300 to 800 mm, the length is set to 300 to 800 mm, and the height is set to 20 to 100 mm. Further, the thickness of the peripheral side wall 2a of the work vacuum chamber forming container 2 is not limited. However, in order to ensure the shape retention of the peripheral side wall 2a when the workpiece vacuum chamber 2x is in a vacuum state, it is particularly desirable that the thickness of the peripheral side wall 2a is 4 mm or more. On the other hand, the upper limit of the wall thickness is generally set to 10 mm.

  The size of each heater vacuum chamber forming container 4 is set according to the size of the heater 5 or the work vacuum chamber forming container 2 and is not limited. For example, the heater vacuum chamber forming container 4 The width is set to 300 to 800 mm, the length is set to 300 to 800 mm, and the height is set to 100 to 300 mm. Further, the thickness of the opposing wall 4b and the peripheral side wall 4a of each heater vacuum chamber forming container 4 is not limited. However, in order to ensure the shape retention of the opposing wall 4b and the peripheral side wall 4a when the heater vacuum chamber 4x is in a vacuum state, the wall thickness is particularly preferably 4 mm or more. On the other hand, the upper limit of the wall thickness is generally set to 10 mm.

  Although the thickness of each partition plate 3 is not limited, if the thickness is increased, the heat capacity of each partition plate 3 is increased and the temperature increase rate of the workpiece 20 is decreased. In order to increase the speed, it is desirable that the wall thickness be as thin as possible. Here, in the brazing apparatus 1 of the present embodiment, when the brazing material is melted, the workpiece vacuum chamber 2x and the heater vacuum chambers 4x and 4x are each evacuated. The vacuum state of each vacuum chamber 2x, 4x, 4x can be maintained without increasing the thickness. Specifically, the thickness can be set to 0.1 to 3 mm. In this embodiment, the thickness is set to about 0.2 mm, and the material is SUS304.

  In the brazing device 1 of the present embodiment, the contact portion 3e of the upper partition plate 3 with the heating surface 5a of the upper heater 5 is located at a substantially central portion of the second wall surface 3b of the upper partition plate 3. Similarly, the contact portion 3 e of the lower partition plate 3 with the heating surface 5 a of the lower heater 5 is located at a substantially central portion of the second wall surface 3 b of the lower partition plate 3.

  Further, an absorbing portion 3d is provided around the contact portion 3e inside the seal portion 3c of each partition plate 3 (that is, the central portion side of each partition plate 3) and the corresponding heating surface 5a of the heater 5. It has been.

  The absorption part 3d is a part for absorbing the thermal expansion of the partition wall plate 3 parallel to the second wall surface 3b generated when the brazing material is melted. Specifically, the absorbing portion 3d is formed by locally bending the peripheral portion of the contact portion 3e of the partition plate 3 with the heating surface 5a of the heater 5 into a plurality of cross-sectional corrugations by pressing. is there. Further, as shown in FIG. 2, the absorbing portion 3d is configured to surround the contact portion 3e of the partition plate 3 with the heating surface 5a of the heater 5 in a substantially rectangular shape and in the circumferential direction around the contact portion 3e. More specifically, it is provided so as to continuously extend over the entire circumference in the circumferential direction centering on the contact portion 3e.

  In the present embodiment, the absorbing portion 3d has a bellows shape, that is, the absorbing portion 3d can be expanded and contracted in a bellows shape. The bending shape of the cross section of the absorbing portion 3d is described in detail as a substantially sinusoidal shape, and further described in detail. The first wall surface 3a side half and the second wall surface 3b side half of each wave portion of the absorbing portion 3d are, for example, approximately It is formed in a semicircular arc shape, and its radius of curvature is set to about 1.5 mm, for example. In the present invention, the bent shape of the cross section of the absorbing portion 3d is not limited to a substantially sine wave shape, and may be, for example, a substantially triangular shape (including a sawtooth shape).

  Next, a brazing method using the brazing apparatus 1 of the present embodiment will be described below.

  First, a workpiece 20 is prepared in which a plurality of brazed members 23a, 23a, 23a are temporarily assembled into a predetermined shape. As the temporary assembly method, for example, a method of assembling a plurality of brazed members 23a, 23a, 23b into a predetermined shape and binding them with a wire or the like so that they are not accidentally disassembled. The workpiece 20 is pretreated for brazing (for example, degreasing, alkali cleaning treatment, oxide film removal treatment) in accordance with a conventional method. Here, it is not necessary to supply flux to the brazing material (brazing material layer 22) or the brazing planned portion 21 of the workpiece 20.

  Moreover, the brazing apparatus 1 of this embodiment is prepared. This process is called a “brazing device preparation process”.

  Next, as shown in FIG. 4, the upper heater vacuum chamber forming container 4 of the brazing apparatus 1 is moved upward so that the upper partition plate 3 is moved with respect to the work vacuum chamber forming container 2 (specifically, the peripheral side wall 2a). To separate. Thereby, an opening 2e is formed on the upper surface side of the work vacuum chamber forming container 2. Then, the workpiece 20 is put inside the workpiece vacuum chamber forming container 2, that is, the workpiece vacuum chamber 2 x through the opening 2 e, and this is placed on the substantially central portion of the first wall surface 3 a of the lower partition plate 3 in the workpiece vacuum chamber forming container 2. It arranges (places) away from the inner surface of the peripheral side wall 2a. Thereafter, by moving the upper heater vacuum chamber forming container 4 downward, the seal portion 3 c of the upper partition plate 3 is pressed against the seal portion 2 c of the work vacuum chamber forming container 2 via the seal member 12 in the close contact direction. As a result, the opening 2 e of the work vacuum chamber forming container 2 is airtightly closed by the upper partition plate 3. This process is called “work placement process”. In this state, as shown in FIG. 1, the work 20 is not in contact with the inner surface of the peripheral side wall 2 a of the work vacuum chamber forming container 2 in the work vacuum chamber 2 x, and the first wall 3 a of the upper partition plate 3 and the lower surface It is in contact only with the first wall surface 3 a of the partition plate 3. Therefore, an annular cavity 2d centering on the workpiece 20 is formed between the workpiece 20 and the mutual seal portions 2c, 3c between the workpiece vacuum chamber forming container 2 and the partition plates 3 in the workpiece vacuum chamber 2x. Yes.

  In the work placement step, the work vacuum chamber 2x and the upper and lower heater vacuum chambers 4x and 4x are filled with air, respectively, and the pressure is atmospheric pressure (about 1 atm). Further, the first on-off valve 7e, the second upper and lower on-off valves 7f, 7f, and the third on-off valve 8d are all closed or open. Moreover, the heating surface 5a of each heater 5 is arrange | positioned spaced apart with respect to the 2nd wall surface 3b of the corresponding partition plate 3, for example.

  In addition, a coolant whose temperature is adjusted to room temperature or the like is circulated through the coolant flow path 10a of the work vacuum chamber forming container 2, whereby the seal portion 2c, the seal member 12, and the upper partition plate 3 of the work vacuum chamber forming container 2 are circulated. The seal portion 3c is cooled. It is particularly desirable that the cooling temperature be 100 ° C. or lower in that the thermal deterioration of the seal member 12 can be reliably prevented and the sealing state of the mutual seal portions 2c and 3c can be reliably maintained well.

  Next, the first on-off valve 7e and the second upper and lower on-off valves 7f, 7f are simultaneously opened, the third on-off valve 8d is closed, and the vacuum pump 7d is further operated. As a result, the work vacuum chamber 2x and the upper and lower heater vacuum chambers 4x, 4x are simultaneously evacuated so that the vacuum degrees (pressures) of these vacuum chambers 2x, 4x, 4x are the same predetermined vacuum degree. At this time, since the first on-off valve 7e and the second on-off valves 7f, 7f are both opened as described above and the third on-off valve 8d is closed, these vacuum chambers 2x 4x, 4x can be surely evacuated.

  Next, the temperature of the heating surface 5a of each heater 5 is raised to a predetermined brazing temperature. It is particularly desirable that the brazing temperature is in the range of 580 to 610 ° C. from the viewpoint of reliably and satisfactorily brazing the part to be brazed 21 of the workpiece 20.

  When the degree of vacuum in the work vacuum chamber 2x and the degree of vacuum in both heater vacuum chambers 4x and 4x reach a predetermined degree of vacuum, the second both on-off valves 2f and 2f are closed, respectively, while the first on-off valve 7e Leave it open as it is without closing it. Thereby, only the work vacuum chamber 2x of these vacuum chambers 2x, 4x, and 4x is maintained in a vacuum state by the vacuum pump 7d. Then, each heater moving mechanism 6 moves the heating surface 5a of each heater 5 in the approaching direction with respect to the corresponding second wall surface 3b of the partition wall plate 3, thereby, as shown in FIG. 5a is simultaneously pressed against the workpiece 20 via the corresponding partition plate 3 so that the workpiece 20 is sandwiched between the heating surfaces 5a and 5a. As a result, the heating surface 5 a of each heater 5 comes into pressure contact with the corresponding second wall surface 3 b of the partition plate 3, and the first wall surface 3 a of each partition plate 3 comes into pressure contact with the workpiece 20. In this state, the heat of each heater 5 is simultaneously transmitted from each heater 5 to the work 20 through the corresponding partition plate 3 by conduction heat transfer, and the brazing scheduled portion 21 of the work 20 is pressurized in the contact direction. The As a result, the temperature of the workpiece 20 rises from room temperature to the predetermined brazing temperature described above, and the brazing material (the brazing material layer 22) is heated and melted. This process is called “melting process”.

During the melting process (that is, when the brazing material is melted), the degree of vacuum P1 of the workpiece vacuum chamber 2x is set to a range of 1 × 10 ⁻³ to 1 × 10 ⁻⁴ Pa. This is particularly desirable in that the planned portion 21 can be reliably brazed reliably. Further, the degree of vacuum P2 of each heater vacuum chamber 4x is set substantially equal to the degree of vacuum P1 of the workpiece vacuum chamber 2x. However, in the present invention, it is not necessarily limited to such a setting, and the pressure difference ΔP (= | P1-P2) between the degree of vacuum P1 of the work vacuum chamber 2x and the degree of vacuum P2 of each heater vacuum chamber 4x. As long as each partition plate 3 is not plastically deformed by |), the degree of vacuum P2 of each heater vacuum chamber 4x may be lower than the degree of vacuum P1 of the work vacuum chamber 2x. This pressure difference ΔP is particularly preferably 0 to 0.1 Pa.

  In this melting step, each partition plate 3 is heated by the heat of the corresponding heater 5 and thermally expands in a direction parallel to the second wall surface 3b, but this thermal expansion is absorbed by the absorbing portion 3d. The

  If the temperature of the workpiece 20 is maintained at a predetermined brazing temperature for a predetermined time (for example, 0 to 10 minutes), then the temperature of each heater 5 is decreased. This stops the heating of the brazing material. The heating of the brazing material may be stopped by separating the heating surface 5 a of each heater 5 from the corresponding second wall surface 3 b of the partition plate 3 by each heater moving mechanism 6.

  When the temperature of the workpiece 20 is lowered to a predetermined temperature (for example, 550 ° C.) or less, the brazing material is solidified, and the brazing planned portion 21 of the workpiece 20 is brazed with the brazing material, the first on-off valve 7e is closed. And the third on-off valve 8d is opened. As a result, air is simultaneously supplied to the work vacuum chamber 2x and the heater vacuum chambers 4x and 4x, and the pressure in the work vacuum chamber 2x and the pressure in the heater vacuum chamber 4x are simultaneously set to atmospheric pressure (that is, about 1 atmosphere).

  When the temperature of the work 20 is sufficiently lowered, the upper partition plate 3 is separated from the work vacuum chamber forming container 2 by moving the upper heater vacuum chamber forming container 4 upward. Thereby, an opening 2e is formed on the upper surface side of the work vacuum chamber forming container 2. The workpiece 20 is taken out from the workpiece vacuum chamber 2x through the opening 2e. Thereby, the heat exchanger as a desired brazing product is obtained. Thereafter, the third on-off valve 8d is closed.

  Here, in the series of steps described above, the controller 9 automatically controls all of the operations of the first on-off valve 7e, the second on-off valves 7f, the third on-off valve 8d, the vacuum pump 7d, and the heaters 5. Done.

  The brazing method and brazing apparatus 1 of the present embodiment have the following advantages.

  In the melting process (that is, when the brazing material is melted), the heat of the heater 5 as a heat source is transferred to the work 20 by conductive heat transfer, and therefore the heat of the heat source is transferred to the work 20 by radiant heat transfer or convective heat transfer. As compared with the above, the heating rate of the workpiece 20 can be increased, and as a result, the time required for brazing (ie, brazing time) can be shortened, and the amount of heat required for brazing. Can be reduced.

  Further, since the work vacuum chamber 2x and the heater vacuum chambers 4x and 4x are each evacuated during the melting process, the vacuum state of the vacuum chambers 2x, 4x and 4x is maintained without increasing the thickness of each partition plate 3. Can be maintained. Therefore, the wall thickness of each partition plate 3 can be reduced. Thereby, the heat capacity of each partition plate 3 can be reduced, and as a result, the temperature increase rate of the workpiece 20 can be further increased.

  Of course, since the brazing material is melted in a state where the workpiece vacuum chamber 2x is evacuated, it is not always necessary to supply the flux to the brazing planned portion 21 or the brazing material (brazing material layer 22) of the workpiece 20 to be brazed. 21 can be brazed well. That is, the brazing method and the brazing apparatus 1 of the present embodiment are in the category of the vacuum brazing method and the vacuum brazing apparatus in that the planned brazing portion 21 of the workpiece 20 is brazed under a vacuum atmosphere. enter.

  Furthermore, the work vacuum chamber forming container 2 has an opening 2 e formed in the work vacuum chamber forming container 2 by separating the upper partition plate 3 from the work vacuum chamber forming container 2. Since the workpiece 20 is used as an entrance, the workpiece 20 can be easily put into the workpiece vacuum chamber 2x, and the workpiece 20 can be easily taken out from the workpiece vacuum chamber 2x.

  Further, since the brazing device 1 includes the heater moving mechanisms 6, the heating surface 5a of each heater 5 is connected to the corresponding partition plate 3 when the heating process is not performed (that is, when the brazing material is not melted). The two wall surfaces 3b can be separated from each other, and the heating surface 5a of each heater 5 can be brought into contact with the corresponding second wall surface 3b of the partition plate 3 during the melting process (that is, when the brazing material is melted). Further, the heating surface 5a of each heater 5 can be pressed against the workpiece 20 via the corresponding partition plate 3. Therefore, the heating surface 5 a of each heater 5 can be brought into close contact with the corresponding second wall surface 3 b of the partition plate 3, and the first wall surface 3 a of each partition plate 3 can be brought into close contact with the workpiece 20. Thereby, the heat of each heater 5 can be reliably transmitted from each heater 5 to the workpiece 20 through the corresponding partition plate 3.

  Further, since the workpiece 20 is disposed in the workpiece vacuum chamber 2x so that a cavity 2d is formed between the workpiece 20 and the mutual seal portions 2c, 3c between the workpiece vacuum chamber forming container 2 and each partition plate 3, During the melting step, the heat of the workpiece 20 is not easily transmitted to the seal member 12, thereby reliably preventing thermal deterioration of the seal member 12.

  Furthermore, since each heater 5 is covered with the heat insulating material 5b with its heating surface 5a exposed, the heat insulation is made when the heating surface 5a of each heater 5 is brought into contact with the corresponding second wall surface 3b of the partition plate 3. The material 5b can be prevented from interfering with each other, whereby the heating surface 5a of each heater 5 can be surely brought into direct contact with the corresponding second wall surface 3b of the partition plate 3, and each heater 5 5 is transmitted to each heater vacuum chamber forming container 4 by radiant heat transfer from a surface other than the heating surface 5a, and the temperature rise of the container 4 can be suppressed as much as possible.

  Further, since the brazing apparatus 1 includes the vacuum means 7, the work vacuum chamber 2x and the heater vacuum chamber 4x can be surely evacuated.

  Further, the vacuum means 7 has the first on-off valve 7e and the second on-off valves 7f and 7f simultaneously with the vacuum pump 7d operating when the work vacuum chamber 2x and the heater vacuum chambers 4x and 4x are evacuated. Since it is configured to be in an open state, the work vacuum chamber 2x and the heater vacuum chambers 4x, 4x can be evacuated simultaneously. Accordingly, it is possible to prevent the plastic deformation of the partition plate 3 that is generated when the vacuum degrees of the vacuum chambers 2x, 4x, and 4x are different. Therefore, the partition plate 3 can be repeatedly used.

  Moreover, the vacuum means 7 is configured such that the first on-off valve 7e is opened and the second both on-off valves 7f and 7f are closed with the vacuum pump 7d operating during the melting step. Of these vacuum chambers 2x, 4x, and 4x, the brazing material can be melted while only the work vacuum chamber 2x is evacuated by the vacuum pump 7d. Thereby, the evacuation speed of the gas in the workpiece vacuum chamber 2x by the vacuum pump 7d increases, and as a result, the gas generated from the workpiece 20 during the melting process can be quickly discharged from the workpiece vacuum chamber 2x. Therefore, it is possible to surely prevent the gas from adversely affecting the planned brazing portion 21, and as a result, it is possible to reliably braze the planned brazing portion 21 of the workpiece 20 reliably.

  Moreover, the partition plate in the direction parallel to the second wall surface 3b generated in the melting step (that is, when the brazing material is melted) is formed around the contact portion 3e of each partition plate 3 with the heating surface 5a of the corresponding heater 5. 3 is provided, which has the following advantages.

  That is, in the melting step, each partition plate 3 is heated by the heat of the corresponding heater 5 and is thermally expanded in a direction parallel to the second wall surface 3b. This thermal expansion causes the absorbing portion 3d to contract and deform. To be absorbed. Thereby, the deformation | transformation by the thermal expansion of each partition board 3 can be prevented. Therefore, the contact state between the heating surface 5a of the heater 5 and the second wall surface 3b of the partition plate 3 and the contact state between the first wall surface 3a of the partition plate 3 and the workpiece 20 can be satisfactorily maintained during the melting step. . On the other hand, when the melting step is finished (that is, the melting of the brazing material is finished), the temperature of each partition plate 3 is lowered from the brazing temperature, so that each partition plate 3 is in a direction parallel to the second wall surface 3b. Although heat shrinks, the heat shrinkage is absorbed (relaxed) when the absorbing portion 3d expands and deforms in a direction parallel to the second wall surface 3b. As a result, the absorbing portion 3d of each partition plate 3 returns to its original shape, and the overall shape and dimensions of each partition plate 3 do not change before and after the melting step. Therefore, each partition plate 3 can be used repeatedly with certainty.

  Further, a seal member 12 is interposed between the work vacuum chamber forming container 2 and the mutual seal portions 2c, 3c of each partition plate 3. Further, the seal portion 3c of each partition plate 3 serves as a work vacuum during the melting step. Since it is pressed against the seal portion 2c of the chamber forming container 2 via the seal member 12, the vacuum state of the work vacuum chamber 2x can be reliably maintained during the melting step.

  Moreover, since the sealing member 12 is cooled during the melting step, it is possible to prevent thermal deterioration of the sealing member 12, and as a result, to maintain a good sealing state of the mutual seal portions 2c and 3c. Can do. Further, the seal portion 3c of each partition plate 3 is fixed by being pressed against the seal portion 2c of the work vacuum chamber forming container 2 while the seal member 12 is cooled during the melting step as described above. Therefore, a large thermal expansion occurs in the partition plate 3 due to a large temperature difference between the temperature of the seal portion 3c of the partition plate 3 and the temperature of the contact portion 3e of the partition plate 3 with the heating surface 5a of the heater 5. However, since the absorbing portion 3d is provided inside the sealing portion 3c of the partition plate 3 and around the contact portion 3e with the heating surface 5a of the heater 5, even if such a large thermal expansion occurs. This can be reliably absorbed by the absorbing portion 3d.

  Moreover, since the absorbing portion 3d is formed by bending a part of the partition wall plate 3 into a corrugated cross section, it is possible to reliably absorb thermal expansion, and the absorbing portion 3d can be easily formed by press working or the like. Can be formed.

  In addition, when the number of heaters 5 is one because the heat of each heater 5 is transferred from each heater 5 to the workpiece 20 through the corresponding partition plate 3 by conductive heat transfer, the brazing material is melted. In comparison, the heating rate of the workpiece 20 can be further increased, and as a result, the time required for brazing can be further shortened.

  Furthermore, since the heating surface 5a of each heater 5 is pressed against the workpiece 20 via the corresponding partition plate 3 so as to sandwich the workpiece 20 between the two heating surfaces 5a, 5a, the workpiece 20 is subjected to the melting process. The brazing load can be applied to the planned brazing portion 21, and the brazing planned portion 21 of the workpiece 20 can be brazed more satisfactorily.

  Furthermore, in the brazing apparatus 1 of the present embodiment, since the absorbing portion 3d having a corrugated cross section is formed around the contact portion 3e of each partition plate 3 with the corresponding heating surface 5a of the heater 5, the workpiece 20 is Even when there is a gap between the first wall surface 3a of each partition plate 3 and the workpiece 20 in the state of being arranged in the work vacuum chamber 2x, the work surface is connected to the heating surface 5a of each heater 5 via the corresponding partition plate 3. By being pressed against 20, the absorbing portion 3d of the partition plate 3 is stretched and deformed, and the first wall surface 3a of the partition plate 3 can be brought into close contact with the workpiece 20. Thereby, it is not necessary to use the work vacuum chamber forming container 2 for forming the work vacuum chamber 2x strictly corresponding to the size of the work 20, and therefore the application range of the work vacuum chamber forming container 2 can be increased.

  Although one embodiment of the present invention has been described above, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention.

  For example, in the above embodiment, the brazing device 1 includes the upper heater 5 and the lower heater 5, but the brazing device 1 is not limited to this in the present invention. 5 may be provided. If the brazing device 1 includes only the upper heater 5, a receiving member that receives the workpiece 20 from the lower side via the lower partition plate 3 is disposed at the position of the lower heater 5 instead of the lower heater 5. It is desirable to be done. By doing so, the heating surface 5a of the upper heater 5 is pressed against the workpiece 20 via the upper partition plate 3 so as to sandwich the workpiece 20 between the heating surface 5a of the upper heater 5 and the receiving member in the melting step. Can do. If the brazing device 1 includes only the lower heater 5, a receiving member that receives the workpiece 20 from the upper side via the upper partition plate 3 is disposed at the position of the upper heater 5 instead of the upper heater 5. Is desirable. By doing so, the heating surface 5a of the lower heater 5 is pressed against the workpiece 20 via the lower partition plate 3 so that the workpiece 20 is sandwiched between the heating surface 5a of the lower heater 5 and the receiving member in the melting step. Can do. In any case, it is desirable that the receiving member is made of ceramic (eg, alumina) or metal that can withstand the heat when the brazing material is melted, and particularly has a heat insulating property such as ceramic. Desirably, this makes it possible to reduce the amount of heat loss flowing out of the receiving member during the melting step.

  Moreover, in the said embodiment, before pressing the heating surface 5a of each heater 5 against the workpiece | work 20 via the corresponding partition plate 3, the temperature of the heating surface 5a of each heater 5 is previously adjusted to predetermined brazing temperature. In the present invention, for example, after the heating surface 5a of each heater 5 is pressed against the work 20 via the corresponding partition plate 3, the temperature of the heating surface 5a of each heater 5 is adjusted to a predetermined brazing temperature. Also good.

  In the above embodiment, the lower partition plate 3 is bonded and fixed to the work vacuum chamber forming container 2 in an inseparable manner. However, in the present invention, for example, the lower partition plate 3 is a work vacuum like the upper partition plate 3. You may be comprised so that it can isolate | separate with respect to the chamber formation container 2, and both the partition plates 3 and 3 may be comprised so that it can isolate | separate with respect to the workpiece | work vacuum chamber formation container 2, respectively.

  Further, in this embodiment, each partition plate 3 is bonded and fixed to the corresponding heater vacuum chamber forming container 4 so as not to be separated, but in the present invention, for example, at least one of both partition plates 3 and 3 corresponds. The heater vacuum chamber forming container 4 may be configured to be separable.

  Furthermore, the brazing method and the brazing apparatus according to the present invention exclude the case where the number of the heater vacuum chamber forming containers 4 (that is, the heater vacuum chamber 4x and the heater 5) and the number of the partition plates 3 are only one, for example. It is not a thing.

  Further, in the present invention, the shapes of the work vacuum chamber forming container 2 and the heater vacuum chamber forming containers 4 are not limited. For example, the work vacuum chamber forming container 4 and the heater vacuum chamber forming container 4 may have a square shape such as a square shape as in the present embodiment. It can be circular or elliptical.

  The present invention is applicable to a brazing method and a brazing apparatus.

1: Brazing device 2: Work vacuum chamber forming container 2c: Work vacuum chamber forming container seal 2e: Work vacuum chamber forming container opening 2x: Work vacuum chamber 3: Partition wall 3a: First wall surface 3b: Second wall surface 3c: Sealing portion of partition plate 4: Heater vacuum chamber forming container 4c: Heater vacuum chamber forming container peripheral wall 4x: Heater vacuum chamber 5: Heater 5a: Heating surface 5b of heater: Heat insulating material 6: Heater moving mechanism 6a: Screw hole 6b: screw rod 6c: drive unit 7: vacuum means 7a: first intake pipe 7b: second intake pipe 7d: vacuum pump 7e: first on-off valve 7f: second on-off valve 8: gas supply means 12: seal member 20 : Work 21: Brazing planned part 22: Brazing material layer (brazing material)

Claims (20)

A workpiece vacuum chamber, a heater vacuum chamber, a heater disposed in the heater vacuum chamber and having a heating surface, and interposed between the workpiece vacuum chamber and the heater vacuum chamber and facing the workpiece vacuum chamber side A partition plate having a first wall surface and a second wall surface facing the heater vacuum chamber side, a work vacuum chamber forming container disposed on the first wall surface side of the partition plate, and the second wall surface side of the partition plate A heater vacuum chamber forming container disposed on the workpiece vacuum chamber, the work vacuum chamber being surrounded by the partition plate and the work vacuum chamber forming container, and the heater vacuum chamber being formed by the partition plate and the Preparing a brazing device formed by being surrounded by a heater vacuum chamber forming container;
A workpiece placement step of placing a workpiece having a brazing planned portion having a brazing material in the workpiece vacuum chamber of the brazing device;
After the work placement step, each of the work vacuum chamber and the heater vacuum chamber is evacuated, the heating surface of the heater is brought into contact with the second wall surface of the partition plate, and the first wall surface of the partition plate is contacted. A melting step of melting the brazing material by transferring heat of the heater from the heater to the workpiece through the partition plate in a state of being in contact with the workpiece;
The brazing method characterized by including. The partition plate is separable from at least the work vacuum chamber forming container among the work vacuum chamber forming container and the heater vacuum chamber forming container,
The work vacuum chamber forming container has an opening formed in the work vacuum chamber forming container by separating the partition plate from the work vacuum chamber forming container. The brazing method according to claim 1, wherein the brazing method is used as a slot.   The brazing method according to claim 1 or 2, wherein in the melting step, the brazing material is melted in a state where the heating surface of the heater is pressed against the workpiece via the partition plate.   The brazing method according to claim 1, wherein the heater is covered with a heat insulating material in a state where the heating surface is exposed.   5. The brazing method according to claim 1, wherein in the melting step, the brazing material is melted while evacuating only the workpiece vacuum chamber of the workpiece vacuum chamber and the heater vacuum chamber.   In the melting step, the thermal expansion of the partition plate in the direction parallel to the second wall surface generated during the melting step is absorbed around the contact portion of the partition plate with the heating surface of the heater. The brazing method according to any one of claims 1 to 5, wherein the brazing method is absorbed by the part. The heater vacuum chambers are respectively arranged on both outer sides across the work vacuum chamber,
The heater is disposed in each heater vacuum chamber,
The partition plate is interposed between the work vacuum chamber and each heater vacuum chamber,
7. The brazing material is melted in the melting step by transferring heat of the heaters from the heaters to the workpiece through the corresponding partition plates by conduction heat transfer. 8. Brazing method.   The brazing method according to claim 7, wherein in the melting step, the heating surface of each heater is relatively pressed against the workpiece via the corresponding partition plate so as to sandwich the workpiece between the two heating surfaces. A workpiece vacuum chamber in which a workpiece having a brazing portion having a brazing material is disposed;
A heater vacuum chamber;
A heater disposed in the heater vacuum chamber and having a heating surface;
A partition plate interposed between the workpiece vacuum chamber and the heater vacuum chamber and having a first wall surface facing the workpiece vacuum chamber side and a second wall surface facing the heater vacuum chamber side;
A work vacuum chamber forming container disposed on the first wall surface side of the partition plate;
A heater vacuum chamber forming container disposed on the second wall surface side of the partition plate;
Comprising
The work vacuum chamber is formed by being surrounded by the partition plate and the work vacuum chamber forming container,
The heater vacuum chamber is formed by being surrounded by the partition plate and the heater vacuum chamber forming container,
The work vacuum chamber and the heater vacuum chamber are each evacuated, the heating surface of the heater is in contact with the second wall surface of the partition plate, and the first wall surface of the partition plate is disposed in the work vacuum chamber. The heat of the heater is transferred from the heater through the partition plate to the work by conduction heat transfer while in contact with the work, thereby melting the brazing material. Brazing equipment. The partition plate is separable from at least the work vacuum chamber forming container among the work vacuum chamber forming container and the heater vacuum chamber forming container,
The work vacuum chamber forming container has an opening formed in the work vacuum chamber forming container by separating the partition plate from the work vacuum chamber forming container. The brazing apparatus according to claim 9, wherein the brazing apparatus is an inlet.   The heater further includes a heater moving mechanism that moves the heating surface of the heater so as to be able to come into contact with and separate from the second wall surface of the partition plate and to be pressed against the workpiece via the partition plate. Or the brazing apparatus of 10. The heater moving mechanism is
A screw hole provided in a peripheral wall of the heater vacuum chamber forming container, and a screw rod screwed into the screw hole in a state of airtightly penetrating the peripheral wall of the heater vacuum chamber forming container from the outside to the heater vacuum chamber side The heater is connected to one end of the screw rod disposed on the heater vacuum chamber side, and the other end of the screw rod disposed outside the heater vacuum chamber forming container. The brazing apparatus according to claim 11, wherein a driving unit that rotates the screw rod is provided, and the heater is moved by rotating the screw rod by the driving unit.   The brazing device according to any one of claims 9 to 12, wherein the heater is covered with a heat insulating material in a state where the heating surface is exposed. Furthermore, it comprises vacuum means for evacuating the work vacuum chamber and the heater vacuum chamber,
The vacuum means is
A first intake pipe that communicates with the work vacuum chamber and sucks the gas in the work vacuum chamber; a second intake pipe that communicates with the heater vacuum chamber and sucks the gas in the heater vacuum chamber; and the first intake pipe A vacuum pump for evacuating the work vacuum chamber and the heater vacuum chamber through a pipe and the second intake pipe, a first on-off valve provided in the first intake pipe and opening and closing the first intake pipe, The brazing device according to any one of claims 9 to 13, further comprising: a second on-off valve that is provided in the second intake pipe and opens and closes the second intake pipe.   The said vacuum means is comprised so that a said 1st on-off valve may be in an open state, and a said 2nd on-off valve may be in a closed state in the state which the said vacuum pump act | operated when melting the said brazing | wax material. The brazing device described.   An absorption part for absorbing thermal expansion of the partition plate in a direction parallel to the second wall surface generated when the brazing material is melted is provided around a contact portion of the partition plate with the heating surface of the heater. The brazing apparatus according to any one of claims 9 to 15. A seal member is interposed between the mutual seal portions of the work vacuum chamber forming container and the partition plate,
The seal portion of the partition plate is located on the outer peripheral portion of the partition plate, and further in a direction in which the seal portion is in close contact with the seal portion of the work vacuum chamber forming container when the brazing material is melted. Is relatively pressed,
The seal member is cooled when the brazing material is melted,
The contact portion of the partition plate with the heating surface of the heater is located at a substantially central portion of the partition plate,
The brazing device according to claim 16, wherein the absorbing portion is provided inside the seal portion of the partition plate and around the contact portion with the heating surface of the heater.   The brazing device according to claim 16 or 17, wherein the absorbing portion is formed by bending a part of the partition plate into a corrugated cross section. The heater vacuum chambers are respectively arranged on both outer sides across the work vacuum chamber,
The heater is disposed in each heater vacuum chamber,
The partition plate is interposed between the work vacuum chamber and each heater vacuum chamber,
The heat of each said heater is made to fuse | melt the said brazing | wax material by being transmitted to the said workpiece | work through the said partition plate corresponding from each said heater. The brazing device described.   The brazing apparatus according to claim 19, wherein the heating surface of each heater is relatively pressed against the workpiece via the corresponding partition plate so as to sandwich the workpiece between the two heating surfaces.

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