JP2014209056A - Heat recovery device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heat recovery device capable of improving heat recovery efficiency by implementing heat exchange between high-temperature gas and low-temperature gas and suppressing device manufacturing cost.SOLUTION: A heat recovery device 100 comprises: a main preheating chamber 12; and a sub preheating chamber 13, a high-temperature chamber 2 is provided in the main preheating chamber 12, and a low-temperature chamber 3 is provided in the sub preheating chamber 13. A heat exchange unit is provided in a heat absorption region 23 of the high-temperature chamber 2 and a heat radiation region of the low-temperature chamber 3 for recovering heat from the high-temperature chamber 2 and radiating the recovered heat to the low-temperature chamber 3. The sub preheating chamber 13 constitutes a stage in front of the low-temperature chamber 3 in a low-temperature gas path whereas the main preheating chamber 12 constitutes a stage in front of the sub preheating chamber 13 in the low-temperature gas path. In the main preheating chamber 12, low-temperature gas absorbs heat leaking from the high-temperature chamber 2.

Description

  The present invention relates to a heat recovery apparatus that recovers heat of a high-temperature gas and heats the low-temperature gas.

  A firing furnace is used in a manufacturing process of a liquid crystal display panel. In the firing furnace, the gas evaporated from the work contains an organic vapor. Vaporized gas can adversely affect the workpiece. For this reason, in the firing furnace, the inside of the furnace may be ventilated. Ventilation reduces the internal temperature of the firing furnace. For this reason, heat exchange is performed between the exhaust from the furnace and the intake air into the furnace.

  An apparatus for recovering the heat of such a high-temperature gas and heating the low-temperature gas is known (see, for example, Patent Documents 1 to 3).

JP 2002-191920 A Japanese Patent Laid-Open No. 2001-154739 Japanese Patent Application Laid-Open No. 2002-200473

  A heat recovery apparatus that recovers heat of a high-temperature gas and heats the low-temperature gas is desired to increase the efficiency of heat recovery. Moreover, suppression of the manufacturing cost is also desired.

  An object of the present invention is to provide a heat recovery apparatus that can increase the heat recovery efficiency as compared with the prior art and can suppress the manufacturing cost.

The heat recovery apparatus of the present invention includes a hot gas vent path,
A hot gas vent and a cold gas vent that is discontinuous;
A heat exchanger that absorbs heat from the high-temperature gas in a heat-absorbing region that is part of a high-temperature gas ventilation path, and dissipates heat to the low-temperature gas in a heat-dissipation region that is part of a low-temperature gas ventilation path;
With
The hot gas ventilation path is a member in which an endothermic region is provided, and includes a high temperature chamber.
The low-temperature gas ventilation path is a member in which a heat dissipation region is provided, and is provided in a stage preceding the low-temperature chamber and the low-temperature chamber. The low-temperature chamber is disposed inside and leaks from the outer wall surface of the low-temperature chamber. A sub-preheating chamber that absorbs heat into the low-temperature gas; a main preheating chamber that is provided upstream of the low-temperature chamber, the high-temperature chamber is disposed inside, and the heat leaked from the outer wall surface of the high-temperature chamber is absorbed into the low-temperature gas; With
A partition that divides the main preheating chamber and the auxiliary preheating chamber is provided inside, and a high temperature gas inlet, a high temperature gas outlet, and a low temperature gas inlet that communicate with the outside are provided in the main preheating chamber, and a low temperature gas exhaust that communicates with the outside. An exterior body in which a port is provided in the sub-preheating chamber, and a vent hole leading to the main pre-heating chamber and the sub-preheating chamber is provided in the partition wall;
The low temperature chamber has a cylindrical shape, and one end is opened out of the exterior body from the low temperature gas exhaust port, and the other end is opened inside the auxiliary preheating chamber,
The high temperature chamber has a cylindrical shape, and one end thereof is opened from the high temperature gas intake port to the outside of the exterior body, and the other end is connected to the high temperature gas exhaust port.

  According to the present invention, the heat recovery device can recover the heat leaked from the hot gas ventilation passage, and the heat recovery efficiency of the heat recovery device can be improved as compared with the conventional case. Therefore, a heat insulating material etc. can be suppressed and manufacturing cost can be reduced.

It is side surface sectional drawing which shows an example of a heat recovery apparatus. It is a perspective view which shows an example of the heat exchange unit of the heat recovery apparatus.

  Hereinafter, a configuration example of the heat recovery apparatus will be described with reference to the drawings. The heat recovery apparatus here is used for ventilation of a multi-stage firing furnace used in the manufacturing process of the liquid crystal display panel. The exhaust gas from the multi-stage firing furnace contains an organic component by transpiration of a binder or the like. The heat recovery device exhausts the exhaust gas to the outside of the furnace and sucks the outside air into the firing furnace.

  FIG. 1 is a side sectional view of the heat recovery apparatus. Here, a fixed arrangement type heat recovery apparatus 100 is shown. The heat recovery apparatus 100 may be movable by providing a moving roller on the bottom surface of the heat recovery apparatus 100.

  The heat recovery apparatus 100 includes an exterior body 1. The interior of the exterior body 1 is partitioned into a control chamber 11, a main preheating chamber 12, and a sub preheating chamber 13. The control room 11 includes a control unit 6. The main preheating chamber 12 includes a high temperature chamber 2 and a scavenging blower 5. The sub preheating chamber 13 includes the low temperature chamber 3. A high-temperature gas inlet 16, a high-temperature gas outlet 17, and a low-temperature gas inlet 18 are provided on the wall surface of the exterior body 1 constituting the main preheating chamber 12. A low-temperature gas exhaust port 19 is provided on the wall surface of the exterior body 1 constituting the auxiliary preheating chamber 13. A partition wall 14 is provided between the main preheating chamber 12 and the sub preheating chamber 13. The partition wall 14 is provided with a vent hole 15 for ventilating between the main preheating chamber 12 and the sub preheating chamber 13.

  The control chamber 11 is separated from the main preheating chamber 12 and the sub preheating chamber 13. The control chamber 11 is surrounded by a heat insulating material (not shown). Therefore, heat conduction from the main preheating chamber 12 and the sub preheating chamber 13 to the control chamber 11 is suppressed. The control unit 6 controls the scavenging blower 5 in order to maintain the ventilation capability of the heat recovery apparatus 100. Moreover, the control part 6 alert | reports the fall of the ventilation capability of the heat recovery apparatus 100 to an administrator in the form of a warning sound or a warning display.

  The low temperature chamber 3 is a cylindrical member having a rectangular cross section in the flow path direction. Both ends of the low temperature chamber 3 are open. Moreover, the cross-sectional area near both ends is made smaller than the center. One end of the low temperature chamber 3 exits from the low temperature gas exhaust port 19 to the outside of the exterior body 1. This one end exhausts outside air to a firing furnace (not shown). The other end of the low temperature chamber 3 is disposed inside the sub preheating chamber 13. Inside the low temperature chamber 3, a heat radiation area 31 is provided.

  The heat radiation area 31 radiates heat to the outside air sucked from the sub preheating chamber 13. Therefore, a part of the heat exchange unit 4 is arranged inside the heat radiation area 31. The configuration of the heat exchange unit 4 will be described later.

  The high temperature chamber 2 is a cylindrical member having a rectangular cross section in the flow path direction. Both ends of the high temperature chamber 2 are open. Moreover, the cross-sectional area near both ends is made smaller than the center. One end of the high temperature chamber 2 exits from the high temperature gas inlet 16 to the outside of the exterior body 1. At one end, exhaust gas is sucked from a firing furnace (not shown). The other end of the high temperature chamber 2 is disposed inside the main preheating chamber 12. Inside the high temperature chamber 2, a filter chamber 21, a purification unit 22, and an endothermic region 23 are provided.

  The filter chamber 21 removes dust and mist from the exhaust gas from the firing furnace. Therefore, a plurality of filter particles are deposited in the filter chamber 21. By using the filter particles, the filter particles can be exchanged even during operation of the heat recovery apparatus 100, and the cleanliness in the filter chamber 21 can be maintained high. Therefore, dust and mist do not adhere to the subsequent purification unit 22. For this reason, reduction of the organic substance resolution by the catalyst in the purification unit 22 due to adhesion of dust or mist can be prevented, and the number of maintenance of the purification unit 22 can be reduced.

  Although not shown, a pressure detector is provided immediately before and immediately after the filter chamber 21. The fluid pressure data of the exhaust gas detected by these pressure detectors is output to the controller 6. The control unit 6 detects clogging of the filter chamber 21 based on this pressure change. Then, when clogging occurs, a warning sound or warning display for informing that is output. Further, the scavenging ability of the scavenging blower 5 is adjusted to correct and stabilize the pressure change.

  The purification unit 22 decomposes organic components in the exhaust gas that has passed through the filter chamber 21. For this reason, a catalyst (in this case, a platinum catalyst with a heater) is provided inside the purification unit 22. With this catalyst, the organic component is oxidized and the organic component in the exhaust gas is decomposed into carbon dioxide. Therefore, the organic component does not flow into the latter endothermic region 23. Therefore, it is possible to prevent the heat exchange efficiency in the endothermic region 23 from being reduced by the organic component, and the maintenance frequency of the endothermic region 23 can be reduced. Further, the exhaust gas flowing into the purification unit 22 is heated by the catalyst. Specifically, the temperature of the exhaust gas is raised by about 10 ° C. to 100 ° C. by the heating by the heater and the heat generated by the decomposition reaction of the organic matter. Therefore, more heat exchange is performed in the heat absorption region 23 at the subsequent stage.

  Although not shown, a temperature detection unit is provided immediately before and immediately after the purification unit 22. The exhaust gas temperature data detected by these temperature detection units is output to the control unit 6. The controller 6 detects the organic matter resolution of the catalyst based on this temperature change. And when organic substance resolution falls below a predetermined value, the warning sound and warning display which alert | report that are output.

  The endothermic region 23 recovers heat from the exhaust gas that passes through the purification unit 22. Therefore, a part of the heat exchange unit 4 is arranged inside the endothermic region 23. Another part of the heat exchange unit 4 is also disposed in the heat radiation area 31 of the low temperature chamber 3.

  Here, the structural example of the heat exchange unit 4 is demonstrated based on FIG.

  FIG. 2 is a perspective view showing a part of the heat exchange unit 4. The heat exchange unit 4 includes a plurality of pipes 41 arranged two-dimensionally. Each pipe 41 has a hollow inside, and a working fluid is sealed in the hollow. Each pipe 41 is arranged so as to pass through holes provided in the partition wall 14 between the main preheating chamber 12 and the sub preheating chamber 13, the top surface of the high temperature chamber 2, and the bottom surface of the low temperature chamber 3. Is done. Therefore, one end side of each pipe 41 is disposed in the heat absorbing region 23 inside the high temperature chamber 2. The other end side of each pipe 41 is disposed in the heat radiation area 31 inside the low temperature chamber 3. Although not shown, each pipe 41 is formed with fins perpendicular to the respective axial directions. In addition, an airtight member is provided between each pipe 41 and the partition wall 14 to maintain the airtightness between the high temperature chamber 2 and the low temperature chamber 3.

  The working fluid inside the pipe 41 evaporates by absorbing the heat of the exhaust gas in the heat absorbing region 23 in the high temperature chamber 2. The working fluid is condensed and liquefied in the heat radiation area 31 in the low temperature chamber 3 to radiate heat to the outside air. Thereby, the high temperature gas in the high temperature chamber 2 is cooled, and the low temperature gas in the low temperature chamber 3 is heated. The heat exchange unit 4 can exchange heat energy with high efficiency even with a small temperature difference.

  The other end of the high temperature chamber 2 is connected to the scavenging blower 5. The scavenging blower 5 applies a negative pressure to the high temperature chamber 2 by adjusting the rotation speed of the rotating internal fins, and sucks the exhaust gas. The exhaust gas sucked into the scavenging blower 5 is exhausted to the outside of the heat recovery apparatus 100 from the high temperature gas exhaust port 17.

  The scavenging blower 5 exhausts the exhaust gas to the outside of the heat recovery apparatus 100 and applies a negative pressure in the high temperature chamber 2. The high temperature chamber 2 applies a negative pressure to a firing furnace (not shown) through the high temperature gas inlet 16. This firing furnace applies a negative pressure into the low temperature chamber 3 through the low temperature gas exhaust port 19. The low temperature chamber 3 applies a negative pressure in the auxiliary preheating chamber 13. The sub preheating chamber 13 applies a negative pressure to the main preheating chamber 12 through the vent 15. The main preheating chamber 12 draws outside air from the outside of the heat recovery apparatus 100 through the low temperature gas inlet 18.

  The outside air sucked from the low temperature gas inlet 18 flows along the scavenging blower 5 and the outer wall surface of the high temperature chamber 2. During this time, the outside air absorbs the leakage heat of the scavenging blower 5 and the high temperature chamber 2. Thereafter, outside air is sucked from the main preheating chamber 12 into the sub preheating chamber 13 through the vent 15. Thereafter, the outside air flows in the auxiliary preheating chamber 13 along the outer wall surface of the low temperature chamber 3. During this time, the outside air absorbs the heat leaked from the low temperature chamber 3. Thereafter, the outside air is sucked into the low temperature chamber 3. During this time, the outside air absorbs heat in the heat radiation area 31 inside the low temperature chamber 3. Thereafter, the outside air is exhausted from the low temperature gas exhaust port 19 to the firing furnace.

  Therefore, the heat recovery apparatus 100 can recover heat from the high-temperature exhaust gas from the firing furnace to the low-temperature outside air by the heat exchange unit 4 and also the leakage heat leaking from the outer wall surface of the high-temperature chamber 2. Therefore, the heat recovery efficiency of the heat recovery apparatus 100 is extremely high. Therefore, it is not necessary to provide a heat insulating material on the exterior surface of the high temperature chamber 2 or the low temperature chamber 3, and the manufacturing cost is reduced.

  Further, the organic component in the exhaust gas can be removed by the purification unit 22 so that the organic component can be prevented from polluting the outside air. At that time, thermal energy generated by the decomposition of the organic component also becomes a part of the recovered heat. Further, dust and mist in the exhaust gas are removed in the filter chamber 21. By using filter particles that can be replenished and taken out during operation, maintainability is improved, and the operation time and life of the heat recovery apparatus 100 can be increased. .

  Here, a vent 15 provided in the partition 14 is provided between the main preheating chamber 12 and the sub preheating chamber 13 away from the low temperature gas intake port 18 and close to the high temperature gas intake port 16 and the low temperature gas exhaust port 19. I am letting. This ensures a long passage for the low temperature gas in the main preheating chamber 12 and allows the outside air, which is a low temperature gas, to sufficiently absorb the leakage heat. The high temperature gas inlet 16 is provided on the same side as the low temperature gas outlet 19 of the exterior body 1. As a result, the intake port of the hot gas passage and the exhaust port of the cold gas passage are oriented in the same direction. Therefore, the piping connection to the firing furnace can be easily performed by directing the side surface of the exterior body 1 toward the firing furnace. The high temperature gas inlet 16 and the low temperature gas outlet 19 are not necessarily provided on the same side surface of the exterior body 1.

  The above description of the embodiment is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

    DESCRIPTION OF SYMBOLS 1 ... Exterior body 2 ... High temperature chamber 3 ... Low temperature chamber 4 ... Heat exchange unit 5 ... Scavenging blower 6 ... Control part 11 ... Control room 12 ... Main preheating room 13 ... Sub preheating room 14 ... Septum 15 ... Vent 16 ... High temperature gas Inlet 17 ... High-temperature gas outlet 18 ... Low-temperature gas inlet 19 ... Low-temperature gas outlet 21 ... Filter chamber 22 ... Purifying section 23 ... Endothermic region 31 ... Heat dissipation region 41 ... Pipe 100 ... Heat recovery device

Claims (1)

A hot gas vent,
A low-temperature gas ventilation path provided discontinuously with the high-temperature gas ventilation path;
A heat exchanger that absorbs heat from the high temperature gas in an endothermic region that is part of the hot gas vent, and radiates heat to the low temperature gas in a heat dissipating region that is part of the low temperature gas vent;
A heat recovery device comprising:
The hot gas vent is
A member in which the endothermic region is provided, comprising a high temperature chamber;
The air passage for the low temperature gas is
A member in which the heat dissipation region is provided; a low temperature chamber;
A sub-preheating chamber that is provided upstream of the low-temperature chamber, the low-temperature chamber is disposed inside, and the low-temperature gas absorbs heat leaked from an outer wall surface of the low-temperature chamber;
A main preheating chamber provided upstream of the low temperature chamber, the high temperature chamber being disposed therein, and the low temperature gas absorbing heat leaked from an outer wall surface of the high temperature chamber;
A partition that divides the main preheating chamber and the sub preheating chamber is provided inside, and a high temperature gas inlet, a high temperature gas outlet, and a low temperature gas inlet that communicate with the outside are provided in the main preheating chamber and communicate with the outside. A low-temperature gas exhaust port is provided in the sub-preheating chamber, and further includes an exterior body in which a vent hole communicating with the main pre-heating chamber and the sub-preheating chamber is provided in the partition wall,
The low temperature chamber has a cylindrical shape, and one end is opened out of the exterior body from the low temperature gas exhaust port, and the other end is opened inside the auxiliary preheating chamber,
The high temperature chamber has a cylindrical shape, and one end is opened out of the exterior body from the high temperature gas inlet, and the other end is connected to the high temperature gas outlet.
Heat recovery device.

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