JP2014200049A - Vibration piece, vibrator, oscillator, electronic apparatus and moving body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration piece capable of suppressing a CI value low by preventing vibration leakage even when small-sized, and also to provide a vibrator including the vibration piece, an oscillator, an electronic apparatus and a moving body.SOLUTION: A vibration piece 200 includes: a base part 220; a pair of vibration arms 230 and 240 which extends in the +Y-axis direction from one end of the base part 220 and arrays in the X-axis direction; and a support arm 250 which protrudes to the same side as the vibration arms 230 and 240 between the pair of vibration arms 230 and 240 from the base part 220. The base part 220 includes a reduced width part 222 whose width in the X-axis direction of the other end of the base part 220 is gradually reduced as it goes away from the central part of the base part 220. Since the thickness in the Z-axis direction is thicker than the end of the base part 220 side of the vibration arms 230 and 240, the support arm 250 includes a thick wall part 251 having a protrusion which further protrudes to the -Z-axis direction side than the end of the base part 220 side of the vibration arms 230 and 240.

Description

  The present invention relates to a resonator element, a vibrator, an oscillator, an electronic device, and a moving object.

As a vibrating device such as a crystal oscillator, a vibrating device including a tuning fork type vibrating piece including a plurality of vibrating arms is known (for example, see Patent Document 1). The vibration piece of Patent Document 1 is a base portion having a substantially rectangular shape in plan view, two vibration arms extending side by side so as to be parallel to each other, and a position extending between the base portion and the two vibration arms. And a supporting portion. In such a resonator element, there is a problem in that the base portion is easily deformed by bending vibration in the in-plane direction of the two vibrating arms, vibration leakage occurs due to this deformation, and the Q value is lowered.
Further, in recent years, with the progress of miniaturization of various devices on which such a resonator element is mounted, it is required that the resonator element itself be miniaturized as much as possible.

JP 2002-141770 A

  An object of the present invention is to provide a resonator element that can suppress vibration leakage and suppress a CI value even if the size is reduced, and a vibrator, an oscillator, an electronic device, and a movement including the resonator element To provide a body.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1]
The resonator element according to this application example includes a base portion including one end portion and the other end portion arranged along the first direction;
A pair of vibrating arms extending from the one end of the base portion along the first direction and arranged along a second direction orthogonal to the first direction;
A support arm protruding from the one end of the base to the same side as the vibrating arm between the pair of vibrating arms;
With
The base portion includes a reduced width portion in which the width along the second direction of the other end portion is gradually reduced as the distance from the center portion of the base portion increases.
The support arm is
A thickness along a third direction orthogonal to both the first direction and the second direction is thicker than an end of the vibrating arm on the base side;
It includes a thick portion including a protruding portion protruding to at least one side in the third direction from an end portion on the base portion side of the vibrating arm.

According to such a resonator element, even when the length of the base portion along the first direction is shortened, the deformation of the base portion due to the bending vibration of the pair of vibrating arms approaching or separating from each other in a substantially plane is reduced. It can suppress by a width | variety part and can suppress the vibration leakage from a base to the exterior.
In addition, since the support arm has a protruding portion, for example, by using the distal end surface of the protruding portion as a fixing portion that fixes the package, the pair of vibrating arms repeatedly approach and separate from each other within a substantially plane. The fixed portion can be moved away from the region where the base vibrates with bending vibration. Therefore, vibration leakage can be effectively suppressed.

In particular, since the fixed portion can be set at a position close to the center of gravity of the resonator element, posture control when fixed is facilitated. In addition, the space between the pair of vibrating arms can be effectively used as the space for arranging the support arms, and as a result, the size of the vibrating piece can be prevented from being increased.
For this reason, the resonator element according to this application example can suppress vibration leakage and reduce the CI value even if the resonator element is downsized.

[Application Example 2]
In the resonator element according to this application example, the width of the reduced width portion along the second direction is
It is preferable that the width gradually decreases as the distance from the central portion of the base portion increases along the virtual line segment along the first direction through the center of the base portion.
Thereby, the deformation | transformation of the base accompanying the bending vibration which a pair of vibration arm approaches or separates mutually can be suppressed effectively.

[Application Example 3]
In the resonator element according to this application example, it is preferable that a length of the thick portion along the first direction is shorter than a length of the support arm along the first direction.
Thereby, the thickness (length along the third direction) of the portion between the base portion and the thick portion of the support arm can be reduced. As a result, transmission of vibration from the base portion to the thick portion can be suppressed.

[Application Example 4]
In the resonator element according to this application example, it is preferable that the thick portion is provided to protrude from both sides of the support arm along the third direction of the support arm.
Thereby, the mass of the support arm can be increased while reducing the length of the support arm along the first direction and the second direction. Therefore, the vibration of the support arm can be suppressed while reducing the size of the vibration piece.

[Application Example 5]
In the resonator element of this application example, the support arm is
A first portion extending from the base and having a thickness along the third direction equal to the vibrating arm;
A second portion joined to one surface of the first portion in the third direction and constituting the protruding portion;
It is preferable to contain.
Thereby, a thick part can be formed comparatively easily while making the dimensional accuracy of a vibrating arm excellent.

[Application Example 6]
The vibrator of this application example includes the resonator element of this application example,
A package containing the vibrating piece;
With
The front end surface of the projecting portion is fixed to the package.
Thereby, it is possible to provide a small-sized vibrator having excellent vibration characteristics.

[Application Example 7]
In the vibrator according to this application example, the front end surface of the protruding portion located on one side of the support arm in the third direction is connected to the package via two joining members arranged in the first direction. It is preferable to be fixed to.
Thereby, the width | variety along the 2nd direction of the fixing | fixed part of a vibration piece and a package can be made small. Further, when a conductive adhesive or a metal bump is used as the joining member, the resonator element can be driven by inputting a drive signal via the two joining members.

[Application Example 8]
In the vibrator according to this application example, a tip end surface of the projecting portion located on one side of the support arm in the third direction is fixed to the package via one joining member,
A pad electrode is provided on the other side surface of the support arm in the third direction,
The package is provided with a connection electrode,
It is preferable that the pad electrode and the connection electrode are connected via a wiring.
Thereby, the area of the fixing part between the resonator element and the package can be reduced. Therefore, vibration leakage from the support arm to the package can be suppressed. Further, when a conductive adhesive or a metal bump is used as the joining member, the resonator element can be driven by inputting a drive signal through the joining member and the wiring.

[Application Example 9]
The oscillator of this application example includes the resonator element of this application example,
And an oscillation circuit electrically connected to the vibration piece.
Thereby, a small-sized oscillator having excellent oscillation characteristics can be provided.
[Application Example 10]
The electronic apparatus according to this application example includes the resonator element according to this application example.
Thereby, an electronic device having excellent reliability can be provided.
[Application Example 11]
The moving body of this application example includes the resonator element of this application example.
Thereby, the mobile body which has the outstanding reliability can be provided.

FIG. 3 is a plan view showing the resonator element according to the first embodiment of the invention. It is the sectional view on the AA line in FIG. FIG. 2 is a rear view of the resonator element shown in FIG. 1. FIG. 5 is a sectional view taken along line BB in FIG. 3. It is a top view explaining the principle of vibration leak suppression. FIG. 6 is a plan view showing a resonator element according to a second embodiment of the invention. FIG. 7 is a rear view of the resonator element shown in FIG. 6. It is the BB sectional view taken on the line in FIG. It is sectional drawing which shows the vibration piece which concerns on 3rd Embodiment of this invention. FIG. 9 is a plan view of a resonator element according to a fourth embodiment of the invention. FIG. 10 is a plan view of a resonator element according to a fifth embodiment of the invention. FIG. 10 is a plan view of a resonator element according to a sixth embodiment of the invention. FIG. 10 is a plan view of a resonator element according to a seventh embodiment of the invention. It is a figure which shows the 1st example of the vibrator | oscillator of this invention. It is a figure which shows the 2nd example of the vibrator | oscillator of this invention. It is a figure which shows an example of the oscillator of this invention. 1 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer that is a first example of an electronic apparatus according to the invention. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) which is the 2nd example of the electronic device of this invention. It is a perspective view which shows the structure of the digital still camera which is the 3rd example of the electronic device of this invention. It is a perspective view which shows the structure of the motor vehicle which is an example of the mobile body of this invention.

Hereinafter, a resonator element, a vibrator, an oscillator, an electronic device, and a moving body according to the present invention will be described in detail based on embodiments shown in the accompanying drawings.
1. Vibrating piece <First embodiment>
1 is a plan view showing a resonator element according to the first embodiment of the present invention, FIG. 2 is a cross-sectional view taken along line AA in FIG. 1, and FIG. 3 is a rear view of the resonator element shown in FIG. 4 is a cross-sectional view taken along line B-B in FIG. 3. FIG. 5 is a plan view for explaining the principle of vibration leakage suppression.

  In each figure, for convenience of explanation, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other. In the following description, the direction parallel to the X axis (second direction) is the “X axis direction”, the direction parallel to the Y axis (first direction) is the “Y axis direction”, and is parallel to the Z axis. The direction (third direction) is referred to as the “Z-axis direction”, and the tip side of the X-axis, Y-axis, and Z-axis arrows shown in each figure is “+ (plus)”, and the base end side is “−”. (Minus) ". In the following description, for the sake of convenience of explanation, the plan view when viewed from the Z-axis direction is also simply referred to as “plan view”. For convenience of explanation, the upper side in FIG. 1 is also referred to as “upper” and the lower side is also referred to as “lower”.

1 and 2 includes a vibration substrate 210, and a first drive electrode 280 and a second drive electrode 290 (see FIG. 2) formed on the vibration substrate 210. .
The vibration substrate 210 is made of, for example, quartz, particularly a Z-cut quartz plate. Thereby, the resonator element 200 can exhibit excellent vibration characteristics. A Z-cut quartz plate is a quartz substrate whose thickness direction is the Z axis (optical axis) of quartz. The Z-axis preferably coincides with the thickness direction of the vibration substrate 210, but is slightly inclined (for example, less than about 15 °) with respect to the thickness direction from the viewpoint of reducing the frequency temperature change near normal temperature. It will be.

The vibration substrate 210 protrudes from the base 220, the base 220 in the + Y-axis direction, and is arranged side by side in the X direction, and protrudes from the base 220 to the + Y-axis direction side, and 2 And a support arm 250 positioned between the two vibrating arms 230 and 240. Such a vibration substrate 210 is formed to be symmetric with respect to a symmetry axis Y1 parallel to the Y axis.
The base portion 220 extends along an XY plane including the X axis and the Y axis, and has a substantially plate shape having a thickness direction in the Z axis direction. Such a base portion 220 has a main body portion 221 that supports and connects the arms 230, 240, and 250, and a reduced width portion 222 (first reduced width portion) that suppresses vibration leakage.

  As shown in FIG. 1, the main body 221 has a width (length along the X-axis direction) W that is substantially constant along the Y-axis direction. That is, the main body 221 has a substantially rectangular plan view shape. The reduced width portion 222 is connected to the outer edge of the main body portion 221 on the −Y axis direction side. That is, the reduced width portion 222 is provided on the side opposite to the arms 230, 240, 250 via the main body portion 221.

  The outline of the reduced width portion 222 is composed of linear inclined portions 222a and 222b that are inclined with respect to both the X axis and the Y axis in plan view. One ends (ends on the −Y axis direction side) of these inclined portions 222a and 222b are connected on the symmetry axis Y1. That is, the inclined portions 222a and 222b are substantially symmetrical with respect to a symmetry axis Y1 passing through the center between the vibrating arm 230 and the vibrating arm 240, for example. For this reason, the reduced width portion 222 has a corner with a slanted portion 222a, 222b as a side and is sharp at the tip.

  The width of the reduced width portion 222 along the X-axis direction is toward the symmetry axis Y1 (virtual center line) passing through the center of the base 220 in parallel with the Y-axis as the distance from the center of the base 220 increases. It is gradually decreasing. Thereby, it is possible to effectively suppress the deformation of the base 220 due to the bending vibration of the pair of vibrating arms 230 and 240 that repeatedly approach and separate from each other in a substantially plane. As a result, even when the length of the base 220 along the Y-axis direction is shortened, the deformation of the base 220 due to the bending vibration of the pair of vibrating arms 230 and 240 approaching or separating from each other is suppressed. The vibration leakage to the can be suppressed. The principle of suppressing vibration leakage by the reduced width portion 222 will be described in detail later.

The angle θ formed by the inclined portions 222a and 222b and the X axis is not particularly limited. For example, from the viewpoint of suppressing excessive enlargement of the reduced width portion 222, the angle θ is about 5 ° or more and 70 ° or less. It is preferable that it is about 10 ° or more and 50 ° or less.
Further, the maximum width (length at the proximal end in the protruding direction) Wmax of the reduced width portion 222 is substantially equal to the width W of the main body portion 221, and the reduced width portion 222 is the end (corner) of the main body portion 221 on the −Y axis direction side. Part) and is formed continuously without a step.

Further, when the vibration substrate 210 is patterned by wet etching the crystal substrate, a crystal surface of the crystal appears on the contour of the vibration substrate 210. Therefore, the inclined portions 222a and 222b parallel to the crystal surface are formed on the photomask. If formed and patterned, variations in shape are reduced, and stable performance can be obtained. In particular, it may be parallel to the crystal plane forming 30 ° or 60 ° with respect to the X axis of the crystal.
The support arm 250 extends in the + Y-axis direction from the base 220 and is positioned between the vibrating arms 230 and 240.
The support arm 250 includes a thick part 251 and a connection part 252 that connects the thick part 251 and the base part 220.

As shown in FIG. 4, the thickness T <b> 1 along the Z-axis direction of the thick portion 251 is thicker than the thickness T <b> 2 of the ends of the vibrating arms 230 and 2430 on the base 220 side.
Such a thick portion 251 has a protruding portion 254 protruding in the −Z-axis direction from a portion 253 having a thickness equal to the thickness T2 of the vibrating arms 230 and 240.
The protruding portion 254 protrudes in the −Z-axis direction from the ends of the vibrating arms 230 and 240 on the base 220 side. Thereby, for example, by using the front end surface (end surface on the −Z axis direction side) of the projecting portion 254 as a fixing portion that fixes the package, the pair of vibrating arms 230 and 240 approach and move away from each other within a substantially plane. The fixed portion can be moved away from the region where the base portion 220 vibrates with the bending vibration. Therefore, vibration leakage from the support arm 250 to the package can be suppressed. The fixing of the projecting portion 254 to the package will be described in detail later together with the first and second examples of the vibrator to be described later.

  In addition, the thick portion 251 includes the center of gravity G of the resonator element 200 in plan view. Thereby, since the fixing portion can be set at a position close to the center of gravity G of the resonator element 200, posture control at the time of fixing becomes easy. In addition, the space between the pair of vibrating arms 230 and 240 can be effectively used as an arrangement space for the support arm 250, and as a result, an increase in size of the vibrating piece 200 can be prevented.

The protruding portion 254 and the thick portion 251 have a longitudinal shape along the Y-axis direction. Thereby, the area of the front end surface of the protrusion 254 can be increased while reducing the width along the X-axis direction of the resonator element 200. Therefore, the degree of freedom of the fixing part of the vibrating piece 200 with respect to the package is increased, and the vibrating piece 200 can be stably fixed to the package.
In this embodiment, the planar view shapes of the protruding portion 254 and the thick wall portion 251 are the same as the planar view shape of the support arm 250 other than the connection portion 252, but are different from the planar view shape of the portion. It may be optional. However, it is preferable to make the thick part 251 as large as possible in that the center of gravity G of the resonator element 200 can be easily brought close to the thick part 251.

  The thickness T3 (height) along the Z-axis direction of the protruding portion 254 is not particularly limited, but is 0.1 or more and 1.5 or less with respect to the thickness T2 of the vibrating arms 230 and 240. preferable. Accordingly, the distal end surface of the projecting portion 254 is stably fixed to the package, and is fixed to a region in which the base portion 220 vibrates due to bending vibration of the pair of vibrating arms 230 and 240 approaching or separating from each other. The part can be kept away.

In the present embodiment, the protruding portion 254 is formed integrally with the portion 253. That is, the portion 253 and the protruding portion 254 are formed from the same substrate. Therefore, the mechanical strength of the thick portion 251 can be made relatively easy. In order to form such a protruding portion 254, before forming the outer shape of the vibration substrate 210 by wet etching the quartz substrate, a portion other than the portion corresponding to the thick portion 251 of the quartz substrate is placed on one surface. It can be thinned by processing from the side.
Further, the surface on the + Z-axis direction side of the thick portion 251 and the surface on the + Z-axis direction side of the end portions on the base 220 side of the vibrating arms 230 and 240 are located on the same plane. Thereby, when the crystal substrate is processed to form the vibration substrate 210, it is not necessary to process the surface on the side opposite to the protruding portion 254 of the crystal substrate.

In the present embodiment, the length of the thick portion 251 along the Y-axis direction is shorter than the length of the vibrating arms 230 and 240 along the Y-axis direction. Thereby, it is possible to prevent the support arm 250 from protruding in the + Y-axis direction from the ends of the vibrating arms 230 and 240, and as a result, it is possible to prevent the vibrating piece 200 from being enlarged.
In particular, the distal end of the thick portion 251 (the distal end of the support arm 250 in this embodiment) is located on the −Y axis direction side from the hammer heads 260 and 270 of the vibrating arms 230 and 240 described later. Therefore, the space between the vibrating arms 230 and 240 can be effectively used as the arrangement space for the support arm 250. Note that the length of the support arm 250 along the Y-axis direction may be equal to the length of the vibrating arms 230 and 240 along the Y-axis direction, or from the length of the vibrating arms 230 and 240 along the Y-axis direction. May be longer.

  In the present embodiment, the length of the thick portion 251 along the Y-axis direction is smaller than the length of the support arm 250 along the Y-axis direction. Thereby, the thickness along the Z-axis direction of the connection part 252 (the part between the base 220 and the thick part 251) is thinner than the thickness along the Z-axis direction of the thick part 251. Therefore, transmission of vibration from the base part 220 to the thick part 251 can be suppressed, and as a result, vibration leakage can be further reduced. In addition, the thickness along the Z-axis direction of the connecting portion 252 is equal to the thickness along the Z-axis direction of the ends of the vibrating arms 230 and 240 on the base 220 side. Thereby, formation of the connection part 252 becomes easy. The thick portion 251 may be formed over the entire area of the support arm 250 in the Y-axis direction, and also on the base portion 220 across the boundary between the support arm 250 and the base portion 220. It may be formed.

  In the present embodiment, the width of the connecting portion 252 along the X-axis direction is smaller than the width of the thick portion 251 along the X-axis direction. Thereby, transmission of vibration from the base 220 to the thick part 251 can be suppressed, and as a result, vibration leakage can be further reduced. The width of the connecting portion 252 along the X-axis direction may be the same as the width of the thick portion 251 along the X-axis direction, or may be larger than the width of the thick portion 251 along the X-axis direction. You may have a big part.

  The vibrating arms 230 and 240 are provided side by side in the X direction with a predetermined distance, and each protrudes from the base 220 in the + Y direction. In addition, the vibrating arms 230 and 240 have hammer heads 260 and 270 provided at the tips thereof, respectively. By providing the hammer heads 260 and 270, it is possible to reduce the size of the vibrating piece 200 and reduce the frequency of flexural vibration of the vibrating arms 230 and 240. The hammer heads 260 and 270 may have a plurality of widths as necessary and may be omitted. Furthermore, when the hammer heads 260 and 270 are provided, the length of the support arm 250 described above should be shorter than the length obtained by subtracting the length of the hammer heads 260 and 270 from the length of the vibrating arms 230 and 240. Thus, the distance between the hammer head 260 and the hammer head 270 can be shortened, which is advantageous for downsizing.

  In addition, the vibrating arm 230 is formed with a bottomed groove 235 that opens to one main surface 231 and a bottomed groove 236 that opens to the other main surface 232. Similarly, the vibrating arm 240 is formed with a bottomed groove 245 that opens to one main surface 241 and a bottomed groove 246 that opens to the other main surface 242. These grooves 235, 236, 245, and 246 are provided extending in the Y-axis direction and have the same shape. Therefore, the vibrating arms 230 and 240 have a substantially “H” cross-sectional shape. By forming such grooves 235, 236, 245, 246, it becomes difficult for heat generated by bending vibration to diffuse (heat conduction), and the bending vibration frequency (mechanical bending vibration frequency) f is greater than the thermal relaxation frequency f 0. In the adiabatic region that is a large region (f> f0), thermoelastic loss can be suppressed. The grooves 235, 236, 245, and 246 may be provided as necessary and may be omitted.

  As shown in FIG. 2, the vibrating arm 230 is formed with a first driving electrode 280 and a second driving electrode 290. The first driving electrode 280 is formed on the inner surfaces of the grooves 235 and 236, and the second driving electrode 290 is formed on the side surfaces 233 and 234. Similarly, a first driving electrode 280 and a second driving electrode 290 are also formed on the vibrating arm 240. The first driving electrode 280 is formed on the side surfaces 243 and 244, and the second driving electrode 290 is formed on the inner surfaces of the grooves 245 and 246. When an alternating voltage is applied between the first and second driving electrodes 280 and 290, the vibrating arms 230 and 240 vibrate at a predetermined frequency in the in-plane direction (XY plane direction) so as to repeatedly approach and separate from each other.

The constituent materials of the first and second driving electrodes 280 and 290 are not particularly limited, and are gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), and silver alloy. , Chromium (Cr), chromium alloy, copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), zinc (Zn), zirconium A metal material such as (Zr) or a conductive material such as indium tin oxide (ITO) can be used.
Although not shown, the first driving electrode 280 and the second driving electrode 290 are drawn out to the support arm 250 through the base 220, and are formed in the package 300, which will be described later, by the support arm 250, for example. Conduction with the connected electrode is achieved.
The configuration of the resonator element 200 has been described above.

(Principle of vibration leakage suppression by the reduced width part)
Here, the principle of suppression of vibration leakage by the reduced width portion 222 will be described. Hereinafter, in order to simplify the description, it is assumed that the shape of the resonator element is symmetric with respect to a predetermined axis parallel to the Y axis.
First, as shown in FIG. 5A, the base 220X in which the reduced width portion 222 is not provided will be described.

When the vibrating arms 230 and 240 are bent and deformed so as to be separated from each other, a displacement close to a clockwise rotational movement occurs in the main body portion 221 near the vibrating arm 230 as shown by an arrow. On the other hand, in the main body portion 221 near the vibrating arm 240, a displacement close to a counterclockwise rotational movement occurs as indicated by an arrow. However, since these displacements are not strictly movements that can be called rotational movements, they are expressed as being close to rotational movements for convenience.
Since the X-axis direction components of these displacements are opposite to each other, they are canceled out at the central portion of the main body portion 221 in the X-axis direction, and the + Y-axis direction displacement remains. However, strictly speaking, displacement in the Z-axis direction remains, but is omitted here.

  That is, the main body portion 221 is bent and deformed such that the central portion in the X-axis direction is displaced in the + Y-axis direction. When an adhesive is formed at the center in the Y-axis direction of the main body part 221 having the displacement in the + Y-axis direction and fixed to the package via the adhesive, the elastic energy accompanying the displacement in the + Y-axis direction is externally applied via the adhesive. To leak. This is a loss of vibration leakage and causes deterioration of the Q value (resulting in deterioration of the CI value).

On the other hand, as shown in FIG. 5 (b), in the base 220 provided with the reduced width portion 222, the reduced width portion 222 has a convex outline, so that Close displacements are replaced with each other in the reduced width portion 222.
That is, in the X-axis direction central portion of the reduced width portion 222, the displacement in the X-axis direction is canceled similarly to the X-axis direction central portion of the main body portion 221, and at the same time, the displacement in the Y-axis direction is suppressed. Become.

Furthermore, since the contour of the reduced width portion 222 is convex, the displacement in the + Y-axis direction that is to occur in the main body portion 221 is also suppressed. As a result, the displacement in the + Y-axis direction at the central portion in the X-axis direction of the base portion 220 provided with the reduced width portion 222 is much smaller than that in the base portion 220X where the reduced width portion 222 is not provided. That is, the vibration piece 200 with small vibration leakage can be obtained.
As described above, vibration leakage can be suppressed by the reduced width portion 222.
In addition, since the vibrating piece 200 is provided with the thick portion 251 on the support arm 250 as described above, even if it is downsized, the suppression of vibration leakage is extremely reduced and the CI value is extremely low. be able to.

Second Embodiment
Next, a second embodiment of the present invention will be described.
6 is a plan view showing the resonator element according to the second embodiment of the invention, FIG. 7 is a back view of the resonator element shown in FIG. 6, and FIG. 8 is a cross-sectional view taken along line BB in FIG. .
Hereinafter, the second embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The second embodiment is substantially the same as the first embodiment except that the configuration (shape) of the thick portion is different. 6-8, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above.

A support arm 250A included in the resonator element 200A illustrated in FIG. 6 includes a thick portion 251A as illustrated in FIG. The thickness T1 along the Z-axis direction of the thick portion 251A is thicker than the thickness T2 of the ends of the vibrating arms 230 and 240 on the base 220 side.
The thick portion 251A has a protruding portion 254 protruding in the −Z-axis direction from the portion 253 and a protruding portion 255 protruding in the + Z-axis direction from the portion 253.

  Thus, by providing the protrusions 254 and 255 on both sides in the Z-axis direction of the thick part 251A, while reducing the length along the Y-axis direction and the X-axis direction of the support arm 250A, The mass of the support arm 250A can be increased. Therefore, vibration of the support arm 250A can be suppressed while reducing the size of the vibration piece 200A. Further, the center of gravity G of the vibrating piece 200A can be easily brought close to the thick portion 251A.

The thickness T4 (height) along the Z-axis direction of the protruding portion 255 is not particularly limited, but may be 0.1 or more and 1.5 or less with respect to the thickness T2 of the vibrating arms 230 and 240. preferable. Thereby, it is possible to increase the mass of the support arm 250A while reducing the size of the support arm 250A.
In the present embodiment, the protruding portion 255 is formed integrally with the portion 253. That is, the part 253 and the protrusion 255 are formed from the same substrate. Therefore, the mechanical strength of the thick portion 251A can be made relatively easy.

Further, the width of the protrusion 255 along the X-axis direction is equal to the width of the protrusion 254 along the X-axis direction. Note that the width of the protrusion 255 along the X-axis direction may be different from the width of the protrusion 254 along the X-axis direction.
Moreover, in this embodiment, the protrusion part 255 is formed over the whole region in the Y-axis direction of the thick part 251A. Thereby, even if the width along the X-axis direction of the thick portion 251A is small, the mass of the support arm 250A can be effectively increased.

Note that the plan view shape of the protruding portion 255 has a constant width along the X-axis direction over the entire region in the Y-axis direction in the drawing, but is not limited to this, for example, in the middle in the Y-axis direction. A shape having a constricted portion inside may be used, or a shape having a portion protruding outward in the middle in the Y-axis direction may be used.
Even with the resonator element 200 </ b> A according to the second embodiment as described above, vibration leakage can be suppressed and the CI value can be kept low even if the size is reduced.

<Third Embodiment>
Next, a third embodiment of the present invention will be described.
FIG. 9 is a cross-sectional view showing a resonator element according to the third embodiment of the invention.
Hereinafter, the third embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The third embodiment is substantially the same as the first embodiment except that the configuration of the thick portion is different. In FIG. 9, the same reference numerals are given to the same configurations as those in the above-described embodiment.

A support arm 250B included in the resonator element 200B illustrated in FIG. 9 includes a thick portion 251B. The thickness T1 along the Z-axis direction of the thick portion 251B is thicker than the thickness T2 of the ends of the vibrating arms 230 and 240 on the base 220 side.
The thick portion 251B has a protruding portion 254B (second portion) protruding in the −Z-axis direction from the portion 253 (first portion).

  The protruding portion 254B is joined to the surface of the portion 253 on the −Z axis direction side. This eliminates the need to thin the quartz substrate. Therefore, it is possible to form the thick portion 251B relatively easily while making the dimensional accuracy of the vibrating arms 230 and 240 excellent. The protrusion 254B may be bonded to the portion 253 before or after the step of forming the vibrating arms 230 and 240 and the portion 253 by etching the quartz substrate.

The constituent material of the projecting portion 254B is not particularly limited, but when electrical conduction is achieved through the fixed portion, an insulating material such as quartz, silicon, a resin material, a ceramic material, a glass material, or the like is used. Is preferred.
The constituent material of the protruding portion 254B may be the same as the constituent material (quartz) of the portion 253, but the characteristics of the protruding portion 254B can be adjusted by making it different from the constituent material of the portion 253.

The Young's modulus (longitudinal elastic modulus) of the protruding portion 254B is preferably lower than the Young's modulus of the portion 253 (quartz). Thereby, it can suppress that a vibration leaks outside from the part 253 via the protrusion part 254B.
Moreover, it is preferable that the thermal expansion coefficient of the constituent material of the protrusion 254 </ b> B is in the range of 0.5 to 2 times the thermal expansion coefficient of the constituent material of the portion 253. By doing so, the thermal stress generated at the interface between the protruding portion 254B and the portion 253 does not increase, so that stable vibration characteristics can be obtained.

The method of joining the protruding portion 254B and the portion 253 differs depending on the constituent material of the protruding portion 254B and the portion 253, and is not particularly limited. For example, a bonding method using an adhesive, anodic bonding, direct bonding, or the like can be used. .
Even with the resonator element 200B according to the third embodiment as described above, vibration leakage can be suppressed and the CI value can be kept low, even if the size is reduced.

<Fourth embodiment>
Next, a fourth embodiment of the present invention will be described.
FIG. 10 is a plan view of a resonator element according to the fourth embodiment of the invention.
Hereinafter, the fourth embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The fourth embodiment is substantially the same as the first embodiment except that the configuration (shape) of the reduced width portion is different. In FIG. 10, the same components as those in the first embodiment described above are denoted by the same reference numerals.

In the base 220C included in the resonator element 200C illustrated in FIG. 10, the contour of the reduced width portion 222C is configured by an arcuate arc portion 222c that is symmetrical with respect to the symmetry axis Y1, and both ends of the arc portion 222c are The main body 221 is connected to each corner on the −Y axis direction side.
The curvature radius of the arc portion 222c is constant over the entire area. In addition, the curvature radius of the circular arc part 222c is not limited to a fixed case, For example, you may increase gradually toward the-Y-axis direction, and conversely may decrease gradually. Further, when a vibrating substrate including the vibrating arms 230 and 240 and the base portion 220C is formed by wet etching the quartz substrate, a crystal plane of the crystal appears in the outline of the vibrating substrate. It can be said that the arc portion 222c is an assembly of short linear portions, but such a case is also included in the “arc shape”. Further, in this case, an arc is formed by additionally performing wet etching so that a crystal plane does not appear on the inner side (main body part 221 side) of the arc part 222c that is an aggregate of short linear parts. May be.
It has been confirmed by simulation that the vibration characteristics are improved by providing the reduced width portion 222C having such a shape as in the first embodiment.
Even with the resonator element 200 </ b> C according to the fourth embodiment as described above, it is possible to suppress vibration leakage and reduce the CI value even if the size is reduced.

<Fifth Embodiment>
Next, a fifth embodiment of the present invention will be described.
FIG. 11 is a plan view of a resonator element according to the fifth embodiment of the invention.
Hereinafter, the fifth embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

The fifth embodiment is substantially the same as the first embodiment except that the configuration (shape) of the reduced width portion is different. In FIG. 11, the same reference numerals are given to the same components as those in the first embodiment described above.
In the base portion 220D provided in the resonator element 200D illustrated in FIG. 11, the maximum width Wmax (the maximum length in the X-axis direction) Wmax of the reduced width portion 222D is smaller than the width W of the main body portion 221. Therefore, the reduced width portion 222D is formed so as to be connected to the central portion excluding both ends of the edge (side) on the −Y axis direction side of the main body portion 221.
It is confirmed by simulation that the vibration characteristics are improved by providing the reduced width portion 222D as in the first embodiment.
Even with the resonator element 200 </ b> D according to the fifth embodiment as described above, it is possible to suppress vibration leakage and reduce the CI value even if the size is reduced.

<Sixth Embodiment>
Next, a sixth embodiment of the present invention will be described.
FIG. 12 is a plan view of a resonator element according to the sixth embodiment of the invention.
Hereinafter, the sixth embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The sixth embodiment is substantially the same as the first embodiment except that the configuration (shape) of the reduced width portion is different. In FIG. 12, the same reference numerals are given to the same components as those in the first embodiment described above.

In the base portion 220E provided in the resonator element 200E shown in FIG. 12, the contour of the reduced width portion 222E is linearly inclined portions 222d and 222e that are inclined with respect to both the X axis and the Y axis in plan view. The ends of the portions 222d and 222e on the −Y axis direction side are connected to each other, and a connecting portion 222f parallel to the X axis is provided.
It is confirmed by simulation that the vibration characteristics are improved by providing such a reduced width portion 222E as in the first embodiment.
Even with the resonator element 200E according to the sixth embodiment as described above, it is possible to suppress vibration leakage and reduce the CI value even if the size is reduced.

<Seventh embodiment>
Next, a seventh embodiment of the present invention will be described.
FIG. 13 is a plan view of a resonator element according to the seventh embodiment of the invention.
Hereinafter, the seventh embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The seventh embodiment is substantially the same as the first embodiment described above except that the configuration (shape) of the base is different. In FIG. 13, the same components as those in the first embodiment described above are denoted by the same reference numerals.

  A base 220F included in the resonator element 200F illustrated in FIG. 13 is positioned on the + Y axis direction side of the main body part 221, the reduced width part 222 positioned on the −Y axis direction side of the main body part 221, and the vibrating arm. 230 and a reduced width portion 223 located between 240 and 240. In other words, the base portion 220F of the present embodiment has two reduced width portions 222 and 223 that are disposed to face each other with the main body portion 221 interposed therebetween.

  Further, the reduced width portion 223 is provided between the main body portion 221 and the support arm 250. In other words, the support arm 250 protrudes from the reduced width portion 223. By providing the reduced width portion 223 with such an arrangement, vibrations of the vibrating arms 230 and 240 can be prevented from being transmitted to the support arm 250 via the base portion 220, and vibration leakage can be more effectively suppressed. can do. Specifically, the vibrating arms 230 and 240 are being bent and deformed so as to be separated from each other in the plane, and in the vibration in the deformed state, in particular, they are canceled (relaxed / absorbed) by the reduced width portion 222. However, since the vibrating arms 230 and 240 are bending and deforming so as to be close to each other in the plane, the vibration in the deformed state can be canceled (relaxed and absorbed) by the reduced width portion 223 in particular. Thus, vibration leakage can be suppressed more efficiently.

In the present embodiment, the outline of the reduced width portion 223 is configured by linear inclined portions 223a and 223b that are opposed to each other in the X-axis direction and are inclined with respect to both the X-axis and the Y-axis. By forming the reduced width portion 223 in such a shape, the configuration of the reduced width portion 223 can be simplified. The angle θ1 formed between the inclined portions 223a and 223b and the X axis is not particularly limited, but is preferably substantially equal to the angle θ formed between the inclined portions 222a and 222b and the X axis.
Even with the resonator element 200F according to the seventh embodiment as described above, even when the size is reduced, vibration leakage can be suppressed and the CI value can be suppressed low.

2. Next, a vibrator (vibrator of the present invention) to which the resonator element of the present invention is applied will be described.
<First example>
First, a first example of the vibrator of the present invention will be described.
FIG. 14 is a diagram showing a first example of a vibrator according to the present invention.

A vibrator 100 illustrated in FIG. 14 includes a vibrating piece 200 and a package 300 that houses the vibrating piece 200.
The package 300 includes a cavity-type base substrate 310 having a recess 311 opened on the upper surface, and a lid (lid body) 320 joined to the base substrate 310 so as to cover the opening of the recess 311. The vibrating piece 200 is accommodated. The internal space is formed airtight.

The base substrate 310 is made of an insulating material. Such a material is not particularly limited, and for example, various ceramics such as oxide ceramics, nitride ceramics, carbide ceramics, and the like can be used. On the other hand, the lid 320 is formed of a member whose linear expansion coefficient approximates that of the constituent material of the base substrate 310. As such a material, for example, when the constituent material of the base substrate 310 is ceramic as described above, an alloy such as Kovar can be used.
Two connection electrodes 331 and 332 are formed on the bottom surface of the recess 311, and these connection electrodes 331 and 332 are formed on the lower surface of the base substrate 310 via through electrodes and interlayer wirings (not shown), respectively. It is electrically connected to a mounting electrode (not shown).

  The vibrating piece 200 stored in the storage space is supported and fixed to the base substrate 310 in the support arm 250 via two pairs of conductive adhesives 351 and 352 (joining members) in two fixing regions of the support arm 250. ing. One conductive adhesive 351 is provided so as to electrically connect the connection electrode 331 and the first drive electrode 280, and the other conductive adhesive 352 is connected to the connection electrode 332 and the second drive electrode 280. An electrode 290 is provided so as to be electrically connected.

  Here, the front end surface of the protruding portion 254 located on the −Z-axis direction side of the support arm 250 of the first embodiment described above is interposed via two conductive adhesives 351 and 352 arranged along the Y-axis direction. The package 300 is fixed. Thereby, the width along the X-axis direction of the fixing portion between the resonator element 200 and the package 300 can be reduced. In addition, the resonator element 200 can be driven by input of a drive signal through the two conductive adhesives 351 and 352. In place of the conductive adhesives 351 and 352, metal bumps may be used.

<Second example>
Next, a second example of the vibrator of the present invention will be described.
FIG. 15 is a diagram illustrating a second example of the vibrator according to the invention. In the following, the vibrator of the second example will be described focusing on the differences from the vibrator 100 according to the first example described above, and description of similar matters will be omitted. Further, in FIG. 15, the same reference numerals are given to the same configurations as those of the vibrator of the first example described above.

A vibrator 100 </ b> A illustrated in FIG. 15 includes a vibrating piece 200 and a package 300 </ b> A that houses the vibrating piece 200.
In the package 300A, two connection electrodes 331A and 332A are formed on the bottom surface of the recess 311. These connection electrodes 331A and 332A are respectively formed on the bottom surface of the base substrate 310 via a through electrode and an interlayer wiring (not shown). It is electrically connected to the formed mounting electrode (not shown).

And the front end surface of the protrusion part 254 located in the Z-axis direction one side of the support arm 250 of 1st Embodiment mentioned above is being fixed to the package 300A via one conductive adhesive 351A.
In addition, a pad electrode (not shown) is provided on the other side surface of the support arm 250 in the Z-axis direction, and the pad electrode is connected to the connection electrode 332A via a wiring 353 constituted by a bonding wire. Yes.

In this way, by using the conductive adhesive 351A and the wiring 353, the area of the fixing portion between the vibrating piece 200 and the package 300A can be reduced. Therefore, vibration leakage from the support arm 250 to the package 300A can be suppressed. In particular, since the fixed portion can be set at a position close to the center of gravity G of the resonator element 200, posture control when the resonator element 200 is mounted on the package 300A is facilitated. Further, the resonator element 200 can be driven by input of a drive signal via the conductive adhesive 351 </ b> A and the wiring 353.
The vibrator as described above is small and has excellent vibration characteristics.

3. Next, an example of an oscillator to which the resonator element according to the invention is applied (an oscillator according to the invention) will be described.
FIG. 16 is a diagram illustrating an example of an oscillator according to the present invention.
An oscillator 900 illustrated in FIG. 16 includes a resonator element 200, a package 400 that houses the resonator element 200, and an IC chip (chip component) 500 for driving the resonator element 200.

The package 400 includes a base substrate 410 and a lid (lid body) 420 bonded to the base substrate 410.
The base substrate 410 has a first recess 411 that opens to the upper surface and a second recess 412 that opens to the lower surface.
The opening of the first recess 411 is closed by a lid 420, and the resonator element 200 is housed inside the opening. Two connection electrodes 431 and 432 are formed in the first recess 411. The vibrating piece 200 in the first recess 411 is supported and fixed to the base substrate 410 by a support arm 250 via a pair of conductive adhesives 451 and 452. One conductive adhesive 451 is provided so as to electrically connect the connection electrode 431 and the first drive electrode 280, and the other conductive adhesive 452 is connected to the connection electrode 432 and the second electrode. A drive electrode 290 is provided so as to be electrically connected.

On the other hand, an IC chip 500 is accommodated in the second recess 412, and the IC chip 500 is fixed to the base substrate 410 via an adhesive. In addition, at least two IC connection electrodes 433 and 434 are formed in the second recess 412. The IC connection electrode 433 is electrically connected to the IC chip 500 by a bonding wire, and is also electrically connected to the connection electrode 431 through a through electrode and an interlayer wiring (not shown). Similarly, the IC connection electrode 434 is electrically connected to the IC chip 500 by a bonding wire, and is also electrically connected to the connection electrode 432 through a through electrode or an interlayer wiring (not shown). The second recess 412 is filled with a sealing material 700 made of a resin composition, and the IC chip 500 is sealed with the sealing material 700.
The IC chip 500 has a drive circuit (oscillation circuit) for controlling the drive of the resonator element 200. When the resonator element 200 is driven by the IC chip 500, a signal having a predetermined frequency can be extracted.
The oscillator as described above is small and has excellent oscillation characteristics.

4). Electronic Device Next, an electronic device (electronic device of the present invention) to which the resonator element of the present invention is applied will be described in detail with reference to FIGS.
FIG. 17 is a perspective view showing the configuration of a mobile (or notebook) personal computer which is a first example of the electronic apparatus of the present invention.

  In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 2000. The display unit 1106 rotates with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 incorporates an oscillator 900 (vibrating piece 200).

FIG. 18 is a perspective view showing a configuration of a mobile phone (including PHS) which is a second example of the electronic apparatus of the invention.
In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, a earpiece 1204, and a mouthpiece 1206, and a display unit 2000 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates an oscillator 900 (vibrating piece 200).

  FIG. 19 is a perspective view showing the configuration of a digital still camera which is a third example of the electronic apparatus of the invention. In this figure, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit is a finder that displays an object as an electronic image. Function. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital still camera 1300 incorporates an oscillator 900 (vibrating piece 200).
The electronic device as described above has excellent reliability.

  In addition to the personal computer (mobile personal computer) shown in FIG. 17, the mobile phone shown in FIG. 18, and the digital still camera shown in FIG. Inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, televisions Telephone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments (E.g., vehicle, aircraft, Instruments of 舶), can be applied to a flight simulator or the like.

5. FIG. 20 is a perspective view showing the configuration of an automobile that is an example of the mobile object of the present invention.
In this figure, a moving body 1500 has a vehicle body 1501 and four wheels 1502, and is configured to rotate the wheels 1502 by a power source (engine) (not shown) provided in the vehicle body 1501. Such a moving body 1500 incorporates an oscillator 900 (vibrating piece 200).
The moving body as described above has excellent reliability. In addition, the mobile body of this invention is not limited to a motor vehicle, For example, it can apply to various mobile bodies, such as an aircraft, a ship, a motorcycle.

As described above, the resonator element, the vibrator, the oscillator, the electronic device, and the moving body of the present invention have been described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each part is the same. It can be replaced with any configuration having the above function. In addition, any other component may be added to the present invention. Moreover, you may combine each embodiment suitably.
Further, a protrusion or a depression (notch) may be formed in the outline of the reduced width portion of the above-described embodiment.

100... Vibrator 100 A... Vibrator 200... Vibrating piece 200 A ... Vibrating piece 200 B ... Vibrating piece 200 C ... Vibrating piece 200 D ... Vibrating piece 200 E ... Vibrating piece 200 F ... Vibrating piece 210 ... Vibrating substrate 220 ... Base 220C ... Base 220D ... Base 220E ... Base 220F ... Base 220X ... Base 221 ... Main body 222 ... Reduced width section 222A ... Reduced width section 222C ... Reduced width section 222D ... Reduced width portion 222E ... Reduced width portion 222a ... Inclined portion 222b ... Inclined portion 222c ... Arc portion 222d ... Inclined portion 222e ... Inclined portion 222f ... Connection portion 223 ... Reduced width portion 223a ... Inclined portion 223b ... Inclined part 230 ... Vibration arm 231 ... Main surface 232 ... Main surface 233 ... Side surface 234 ... Side surface 235 ... Groove 236 ... groove 240 ... vibration arm 241 ... main surface 242 ... main surface 243 ... side surface 244 ... side surface 245 ... groove 246 ... groove 250 ... support arm 250A ... support arm 250B ... support arm 251 ... Thick part 251A ... Thick part 251B ... Thick part 252 ... Connection part 253 ... Part (first part) 254 ... Projection part 254B ... Projection part (second part) 255 Protruding part 260 ... Hammer head 270 ... Hammer head 280 ... Drive electrode 290 ... Drive electrode 300 ... Package 300A ... Package 310 ... Base substrate 311 ... Recess 320 ... Lid 331 ... Connection electrode 331A ... Connection electrode 332 ... Connection electrode 332A ... Connection electrode 351 ... Conductive adhesive 351A ... Conductive adhesive 35 2 ... Conductive adhesive 353 ... Wiring 400 ... Package 410 ... Base substrate 411 ... Recess 412 ... Recess 420 ... Lid 431 ... Connection electrode 432 ... Connection electrode 433 ... IC connection electrode 434 IC connection electrode 451 Conductive adhesive 452 Conductive adhesive 500 IC chip 700 Sealing material 900 Oscillator 1100 Personal computer 1102 Keyboard 1104 Main unit 1106 Display unit 1200 ... mobile phone 1202 ... operation buttons 1204 ... earpiece 1206 ... mouthpiece 1300 ... digital still camera 1302 ... case 1304 ... light receiving unit 1306 ... shutter button 1308 ... memory 1312 ... Video signal output terminal 1 14 Input / output terminal 1430 Television monitor 1440 Personal computer 1500 Mobile body 1501 Car body 1502 Wheel 2000 Display area G Center of gravity Y1 Symmetry axis (virtual line segment) θ Angle θ1 Angle

Claims (11)

A base including one end and the other end aligned along the first direction;
A pair of vibrating arms extending from the one end of the base portion along the first direction and arranged along a second direction orthogonal to the first direction;
A support arm protruding from the one end of the base to the same side as the vibrating arm between the pair of vibrating arms;
With
The base portion includes a reduced width portion in which the width along the second direction of the other end portion is gradually reduced as the distance from the center portion of the base portion increases.
The support arm is
A thickness along a third direction orthogonal to both the first direction and the second direction is thicker than an end of the vibrating arm on the base side;
A vibrating piece including a thick portion including a protruding portion protruding to at least one side in the third direction from an end portion on the base side of the vibrating arm. The width along the second direction of the reduced width portion is:
2. The resonator element according to claim 1, wherein the resonator element gradually decreases along the imaginary line segment along the first direction as the distance from the center portion of the base portion increases.   3. The resonator element according to claim 1, wherein a length of the thick portion along the first direction is shorter than a length of the support arm along the first direction.   4. The resonator element according to claim 1, wherein the thick portion is provided so as to protrude from both sides of the support arm along the third direction of the support arm. 5. The support arm is
A first portion extending from the base and having a thickness along the third direction equal to the vibrating arm;
A second portion joined to one surface of the first portion in the third direction and constituting the protruding portion;
The resonator element according to claim 1, comprising: The resonator element according to any one of claims 1 to 5,
A package containing the vibrating piece;
With
A vibrator, wherein a tip end surface of the projecting portion is fixed to the package.   The front end surface of the projecting portion located on one side of the support arm in the third direction is fixed to the package via two joining members arranged along the first direction. The vibrator described in 1. A tip end surface of the projecting portion located on one side of the support arm in the third direction is fixed to the package via one joining member;
A pad electrode is provided on the other side surface of the support arm in the third direction,
The package is provided with a connection electrode,
The vibrator according to claim 6, wherein the pad electrode and the connection electrode are connected via a wiring. The resonator element according to any one of claims 1 to 5,
And an oscillation circuit electrically connected to the resonator element.   An electronic apparatus comprising the resonator element according to claim 1.   A moving body comprising the resonator element according to claim 1.

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