JP2014192729A - Piezoelectric vibration element and piezoelectric vibration device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric vibration element and a piezoelectric vibration device which can ensure excellent characteristics by suppressing unnecessary vibration.SOLUTION: A first adhesive electrode 7a and a second adhesive electrode 7b are formed along the long sides L1 and L2 of a crystal diaphragm without overlapping in the plan view. A pair of first extraction electrodes 6a, 6a and a pair of second extraction electrodes 6b, 6b are formed in line symmetry with respect to both of two lines CL1, CL2 orthogonal to each other, while passing the centers of two sets of facing sides of excitation electrodes 5a, 5b. The region surrounded by one excitation electrode 5a and the pair of first extraction electrodes 6a, 6a and the first adhesive electrode 7a, and the region surrounded by the other excitation electrode 5b and the pair of second extraction electrodes 6b, 6b and the second adhesive electrode 7b are no electrode regions (11a, 11b) where the body of the crystal diaphragm is exposed.

Description

  The present invention relates to a piezoelectric vibration element and a piezoelectric vibration device using the piezoelectric vibration element.

  Piezoelectric vibration devices typified by quartz resonators are widely used in various fields such as mobile communication devices. For example, as shown in FIGS. 3 to 4, a conventional surface-mount type crystal resonator includes a crystal resonator element 15, a container 3 having a recess 19 that accommodates the crystal resonator element 15, and a recess 19 formed by joining the container 3. A flat lid (not shown) that hermetically seals is a main component. One end of the crystal resonator element 15 is cantilevered by a conductive adhesive 12 to a crystal resonator element mounting pad (electrode) 4 provided on a step inside the recess 19. Here, the crystal resonator element is a crystal resonator plate in a state where various electrodes are added to the crystal resonator plate, and an AT-cut crystal resonator plate having a substantially rectangular shape in plan view is used as the crystal resonator plate. A pair of excitation electrodes 16 (16a, 16b) having a rectangular shape in plan view are formed on the front and back main surfaces of the quartz diaphragm so as to face each other. Each of the pair of excitation electrodes 16a and 16b is connected to a pair of connection electrodes 18a and 18b on one short side of the quartz crystal plate via extraction electrodes 17a and 17b, respectively. The pair of excitation electrodes 16a and 16b are finally connected to the pair of connection electrodes 18a and 18b to the pair of crystal vibration element mounting pads 4 and 4 through the conductive adhesive 12 to form a container. It is electrically connected to an external connection terminal 9 provided on the outer bottom surface. For example, Patent Documents 1 and 2 disclose a crystal resonator having such a configuration.

Japanese Utility Model Publication No. 05-025827 JP 07-131279 A JP 2004-72676 A

  An AT-cut quartz diaphragm that performs thickness shear vibration has a plurality of unnecessary vibrations (so-called spurious) in addition to the main vibration. Each of these spurs has a corresponding vibration mode (hereinafter abbreviated as vibration mode). The appearance of the spurious depends on the shape of the excitation electrode, the position where the excitation electrode is formed on the quartz diaphragm, and the quartz vibration. It varies depending on the shape of the plate itself. It is preferable that such spurious by nature does not appear as much as possible.

  For example, when an excitation electrode having a rectangular shape in plan view is formed opposite to the front and back main surfaces of the quartz diaphragm, the vibration mode represented by (1, 3, 3) among the plurality of vibration modes is not particularly suitable for the excitation electrode. It is easily affected by the presence of parts. Here, the notation of (1, 3, 3) is a notation representing a vibration mode generally used in the literature and the like. In parentheses, the vibration order and the charge in the X-axis direction of the quartz crystal plate in order from the front. It is a number that represents the number of distributions and the number of charge distributions in the Z-axis direction of the crystal diaphragm (the X-axis direction and Z-axis direction may be reversed).

  It is known that the oscillation frequency of the AT-cut quartz diaphragm is inversely proportional to the thickness of the quartz diaphragm. As the oscillation frequency of the quartz diaphragm becomes a high frequency band, the oscillation frequency is lower than that of the low frequency band. The thickness becomes relatively thin. In particular, when the frequency band is 100 MHz or higher, the thickness of the quartz diaphragm is calculated to be as thin as about 0.01 mm in the fundamental wave vibration mode. As described above, when the quartz diaphragm is made extremely thin, spurious is likely to occur due to the processing accuracy of the quartz diaphragm, and the influence on the vibration characteristics of the quartz diaphragm becomes obvious.

  In the conventional crystal resonator shown in FIG. 3, the pair of lead electrodes 16a and 16b are led out only in the direction of one short side in the long side direction of the crystal plate on the front and back main surfaces of the crystal plate. . Further, the direction of the short side of the quartz crystal plate is derived from the region including one corner C1 of the rectangular excitation electrode to the short side of the quartz plate. That is, when the excitation electrode is used as a reference, the extraction electrode is formed on the front and back main surfaces of the piezoelectric diaphragm in an unbalanced state in both the long side and the short side of the quartz diaphragm. In such a configuration, of the four corners of the rectangular excitation electrode, the corner to which the extraction electrode is connected is likely to attenuate the vibration of the excitation electrode, whereas the corner to which the extraction electrode is not connected is The vibration of the excitation electrode is difficult to attenuate. As a result, the entire excitation electrode becomes unbalanced and spurious is likely to occur. That is, the spurious in the vibration mode (1, 3, 3), which is considered to be greatly affected by the presence of the corner portions of the excitation electrode, is likely to occur.

  On the other hand, Patent Document 3 discloses an excitation electrode, an extraction electrode, and a connection electrode that have symmetry with respect to each side of the crystal diaphragm. In such a form, although the unbalanced electrode formation state is eliminated, it is difficult to suppress the spurious vibration mode (1, 3, 3) described above.

  This invention is made | formed in view of this point, and it aims at providing the piezoelectric vibration element and piezoelectric vibration device which can suppress an unnecessary vibration and can acquire a favorable characteristic.

In order to achieve the above object, the present invention provides a piezoelectric vibration element in which an electrode is formed on a piezoelectric diaphragm having a substantially rectangular shape in plan view, and an excitation electrode having a substantially rectangular shape in plan view is formed at the center of the front and back main surfaces of the piezoelectric diaphragm. A first adhesive electrode and a second adhesive electrode which are formed as a pair and are one side of a pair of opposing sides that form a rectangle on each of the front and back main surfaces of the piezoelectric diaphragm and do not overlap each other in plan view Is formed along the entire one side of the front and back main surfaces of the piezoelectric diaphragm, and among the pair of excitation electrodes,
A pair of first extraction electrodes are formed from a region including both corners of one side facing the first adhesive electrode of one excitation electrode toward the first adhesive electrode, and the second adhesive electrode of the other excitation electrode A pair of second extraction electrodes are formed from a region including both corners on one side facing the second adhesive electrode toward the second adhesive electrode, and the pair of first extraction electrodes and the pair of second extraction electrodes are excitation electrodes. Are symmetrical with respect to any two straight lines that pass through the centers of the two opposing sides of the pair, and are surrounded by the one excitation electrode, the pair of first extraction electrodes, and the first adhesive electrode. The region surrounded by the other excitation electrode, the pair of second extraction electrodes, and the second adhesive electrode is an electrodeless region where the substrate of the piezoelectric diaphragm is exposed.

  According to the said structure, generation | occurrence | production of a spurious can be suppressed. This is because a pair of first extraction electrodes are formed from the region including both corners of one side facing the first adhesive electrode of one excitation electrode toward the first adhesive electrode, and the second adhesive electrode of the other excitation electrode This is because a pair of second extraction electrodes are formed toward the second adhesive electrode from a region including both corners on one side facing to each other. A region surrounded by one excitation electrode, a pair of first extraction electrodes, and a first bonding electrode, and a region surrounded by the other excitation electrode, a pair of second extraction electrodes, and a second bonding electrode are piezoelectric. This is because the diaphragm base is an exposed electrodeless region.

  With the arrangement of the pair of extraction electrodes and the non-electrode region, spurious vibration modes (1, 3, 3) that are particularly affected by extraction of the extraction electrode from the corners of the rectangular excitation electrode are provided. Occurrence can be suppressed.

  Furthermore, the pair of first extraction electrodes and the pair of second extraction electrodes are line symmetric with respect to any of two straight lines that pass through the centers of the two opposing sides of the excitation electrode and are orthogonal to each other. The lead electrodes are formed on the front and back main surfaces of the piezoelectric diaphragm in a well-balanced manner. Thereby, not only the spurious generation of the vibration mode (1, 3, 3) described above but also the spurious generation of other vibration modes can be suppressed.

  According to the above configuration, the first adhesive electrode and the second adhesive electrode are one side of a set of opposing sides constituting each rectangle of the front and back main surfaces of the piezoelectric diaphragm, and overlap each other in plan view. For example, when the excitation electrode and the extraction electrode are formed symmetrically with respect to the center of the long side and the center of the short side of the piezoelectric vibration plate, when the piezoelectric vibration element is mounted on the container, for example, Directionality can be recognized only by the outer shape of the piezoelectric vibration element. Accordingly, it is possible to identify the mounting direction of the piezoelectric vibration element more simply and more reliably than the conventional method of recognizing the shape of various electrodes of the piezoelectric vibration element and identifying the mounting direction of the piezoelectric vibration element. This is because when the electrode on the piezoelectric diaphragm is used as a reference for image recognition, the light emitted from the illumination unit during image recognition may be reflected on the electrode surface, which is a metal film, and may be difficult to recognize. This is because problems such as reflection can be suppressed by using the outer shape of the piezoelectric diaphragm, which is a non-metallic material, as a recognition standard. As a result, the time required for image recognition can be shortened, so that the production efficiency is improved.

  The shape of the piezoelectric diaphragm is a flat plate, the shape of which the end is chamfered, or the so-called inverted mesa shape in which the outer peripheral part of at least one main surface is thicker than the central part of the piezoelectric diaphragm. The present invention can also be applied to a so-called mesa shape in which at least the outer peripheral portion of one main surface is thinner than the central portion of the piezoelectric diaphragm.

  In order to achieve the above object, according to a second aspect of the present invention, the first adhesive electrode and the second adhesive electrode of the piezoelectric vibration element according to the first aspect are provided inside a container that accommodates the piezoelectric vibration element. The piezoelectric vibration device is bonded to the pair of piezoelectric vibration element mounting pads via a conductive adhesive, and the piezoelectric vibration element is hermetically sealed by bonding a lid to the container.

  According to the above invention, in addition to the above-described effects, it is possible to obtain a piezoelectric vibration device having good characteristics in which spurious generation is suppressed.

  As described above, according to the present invention, it is possible to provide a piezoelectric vibration element and a piezoelectric vibration device that can suppress unnecessary vibration and obtain good characteristics.

Schematic top view of a crystal resonator showing an embodiment of the present invention Schematic sectional view taken along line AA in FIG. Schematic top view of a conventional crystal unit Schematic cross-sectional view along line BB in FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings, taking a crystal resonator as an example of a piezoelectric vibration device. In the present embodiment, the crystal unit 1 is a surface-mount type crystal unit having a substantially rectangular parallelepiped shape. In FIG. 1 and FIG. 2, for convenience of explanation, it is shown in a state where a lid described later is removed. The crystal resonator 1 is mainly composed of a container 3 having a recess 19, a crystal resonator element 2, and a flat lid (not shown) that seals the recess 19. The crystal resonator element 2 is hermetically sealed in the recess 19 by joining the lid and the container 3 together. In this embodiment, the container 3 and the lid are joined by a seam welding method. In the present embodiment, the oscillation frequency (nominal frequency) of the crystal unit 1 is 150 MHz.

  1 and 2, a container 3 is a box-shaped body made of an insulating material mainly composed of ceramic such as alumina, and is formed by laminating ceramic green sheets and integrally firing them. The container 3 has a concave portion 19 having a rectangular shape in plan view inside the annular bank portion 30, and a step portion 31 is formed on one end side of the inner bottom surface 310 of the concave portion 19. A pair of crystal vibration element mounting pads (electrodes) 4 and 4 are formed in parallel on the upper surface of the step portion 31. The pair of quartz vibration element mounting pads 4 and 4 are formed by, for example, laminating a metal layer on the upper surface of the tungsten metallized layer by a technique such as plating in the order of nickel and gold. The pair of quartz vibration element mounting pads 4, 4 are electrically connected to some of the plurality of external connection terminals 9 provided on the outer bottom surface of the container 3 via internal wiring (not shown) formed inside the container. Connected.

  In FIG. 1, a bonding material (not shown) is formed in an annular shape on the upper surface 300 of the bank portion 30. In this embodiment, the bonding material is composed of three layers, and has a structure of a tungsten metallized layer, a nickel plating layer, and a gold plating layer in order from the bottom. Note that molybdenum may be used instead of tungsten. The bonding material corresponds to the outer peripheral portion of the lid (not shown).

  The above-described lid is a metallic lid body having a rectangular shape in a plan view using Kovar as a base, and nickel plating layers are formed on the front and back surfaces of the lid. Also, a brazing material (not shown) made of metal is formed on the entire surface of the nickel plating layer on the side of the lid that is to be joined to the container. In this embodiment, silver brazing is used as the brazing material.

  As shown in FIG. 2, the crystal resonator element 2 is a piezoelectric element in which various electrodes are added to the front and back main surfaces of the crystal resonator plate, and the crystal resonator plate is a so-called AT-cut crystal plate that performs thickness-shear vibration. The crystal diaphragm has a rectangular shape in plan view, and has two sets of sides (L1 and L2, W1 and W2) facing each other on the front and back main surfaces. The quartz diaphragm has a rectangular thin portion 8 in a plan view in which a central portion as a vibrating portion is processed to be thinner than the surroundings, and a bowl-like thick portion 10 formed outside the thin portion 8. An inclined surface 9 that gradually becomes thinner toward the thin portion 8 is formed between the thick portion 10 and the thin portion 8. The external shape of such a crystal diaphragm is formed by wet etching (wet etching), and the inclined surface 9 described above is a crystal plane that appears by wet etching of the crystal.

  In the present embodiment, the crystal resonator element 2 is conductively bonded to the crystal resonator element mounting pad 4 via the conductive adhesive 12 at one end side in the long side direction. In this embodiment, a silicone-based conductive resin adhesive is used as the conductive adhesive 12, but a conductive adhesive other than a silicone-based adhesive may be used.

  In FIG. 1, a pair of excitation electrodes 5a and 5b having a rectangular shape in plan view are formed facing each other at substantially the center of the front and back main surfaces of the thin portion 8 of the quartz diaphragm. A pair of adhesive electrodes 7a and 7b that do not overlap with each other in plan view are formed along the entire one side of a pair of opposing sides that form a rectangle on each of the front and back main surfaces of the crystal diaphragm. Specifically, the first adhesive electrode 7a extending over the entire length of L1 is formed along one long side L1 on one main surface 200 of the crystal diaphragm, and 1 on the other main surface 210 of the crystal diaphragm. A second adhesive electrode 7b extending over the entire length of L2 is formed along the long side L2.

  In the present embodiment, the first adhesive electrode 7a and the second adhesive electrode 7b are formed not only on the thick portion 10 but also on the inclined surface 9 and the thin portion 8 so as to partially extend. As shown in FIG. 1, the adhesive electrodes are not formed with the same width along the long sides L1 and L2 in the short-side direction of the crystal diaphragm, and the long sides of the crystal diaphragm serving as a region to be joined to the container The direction end portion is formed wider in the short side direction than the region other than the end portion of the long side. In this way, by forming a wide area as a fixed end of the crystal vibrating plate of the adhesive electrode, it is possible to secure an application region of the conductive adhesive even when the crystal vibrating plate is downsized. Note that the shape of the adhesive electrode is not limited to the shape shown in FIG. 1, and the present invention can be applied to other shapes.

  In FIG. 1, a pair of first extraction electrodes 6a and 6a are formed on the first adhesive electrode 7a from a region including both corners of one side of the excitation electrode 5a of the quartz vibrating plate facing the first adhesive electrode 7a. It is derived in an oblique direction. Similarly, the pair of second extraction electrodes 6b and 6b is directed to the second adhesive electrode 7b from a region including both corners of one side of the other main surface 210 of the quartz crystal plate facing the second adhesive electrode 7b of the excitation electrode 5b. Are derived in an oblique direction.

  The first extraction electrode 6a and the second extraction electrode 6b include a straight line CL1 passing through the center of each pair of sides facing each other in each of the excitation electrodes 5a and 5b, and another pair of sides facing each other of the excitation electrodes 5a and 5b. The straight line CL2 passing through each center is formed symmetrically with respect to any straight line.

  In the present embodiment, the pair of first extraction electrodes (6a, 6a) and the pair of second extraction electrodes (6b, 6b) are not formed with the same width, and the first electrode from the corner of the excitation electrode 5a or 5b. It is formed so as to gradually become wider toward the first adhesive electrode or the second adhesive electrode. With such a shape, spurious generation can be effectively suppressed. This is due to the following reason.

  In general, in a quartz plate with a pair of excitation electrodes formed on the front and back main surfaces, the vibration energy of the quartz plate is confined under the excitation electrode, and the displacement of the vibration energy is maximized at the center of the excitation electrode, and the outer periphery of the quartz plate It is known that it gradually attenuates as it approaches. The influence of the spurious in the vibration mode (1, 3, 3) becomes more apparent as the width of the extraction electrode connected to the corner of the excitation electrode increases. For this reason, the generation of spurious vibration modes (1, 3, 3) can be suppressed by relatively narrowing the formation width of the extraction electrode at the corner of the excitation electrode located near the center of the excitation electrode. . On the other hand, in the connection part with the adhesive electrode located at a position away from the excitation electrode, the formation width of the extraction electrode is made relatively wide, so that the electrical connection with the excitation electrode is improved and the vicinity of the outer periphery of the quartz diaphragm The displacement of the vibration energy at is suppressed, and the occurrence of spurious vibrations in other vibration modes can be suppressed. In particular, the effect becomes greater as the quartz diaphragm becomes smaller.

  In FIG. 1, the regions indicated by reference numerals 11a and 11b are non-electrode regions where no extraction electrode is formed. Specifically, the non-electrode region 11a is a region surrounded by the excitation electrode 5a, the pair of extraction electrodes 6a and 6a, and the first adhesive electrode 7a, and is a region where the substrate of the crystal diaphragm is exposed. Similarly, the non-electrode region 11b is a region surrounded by the excitation electrode 5b, the pair of extraction electrodes 6b and 6b, and the first adhesive electrode 7b, and is a region where the substrate of the crystal diaphragm is exposed.

  In the present embodiment, the excitation electrode, the extraction electrode, and the adhesive electrode described above are formed using a photolithography technique. By using the photolithography technique, it is possible to easily form the electrodeless regions 11a and 11b that are difficult to form by conventional vacuum vapor deposition or sputtering in which a film is formed using a metal mask. In addition, by using a photolithography technique, various electrodes can be formed with high accuracy even if the external size of the quartz crystal diaphragm is small.

  According to such a configuration, spurious generation can be suppressed. This is because a pair of lead electrodes 6 (6a, 6b) is connected from the region including both corners on one side of the excitation electrode 5 (5a, 5b) facing the adhesive electrode 7 (7a, 7b) toward the adhesive electrode. It depends on. The region surrounded by the excitation electrode 5a (5b), the pair of first extraction electrodes 6a (the pair of second extraction electrodes 6b), and the first adhesive electrodes 7a (second adhesive electrodes 7b) is the substrate of the crystal diaphragm. This is because the electrodeless region is exposed.

  By having such a pair of extraction electrodes and an electrodeless region, it is possible to suppress the occurrence of spurious vibration modes (1, 3, 3) that are particularly affected by the presence of corners in the excitation electrode. it can.

  Further, the pair of first extraction electrodes 6a, 6a and the pair of second extraction electrodes 6b, 6b pass through the centers of two opposing sides of the excitation electrodes 5a, 5b, and are orthogonal to each other with two straight lines CL1, CL2. Therefore, the extraction electrodes are formed on the front and back main surfaces of the crystal diaphragm in a well-balanced manner. Thereby, not only the spurious generation of the vibration mode (1, 3, 3) can be suppressed, but also the spurious generation of other vibration modes can be suppressed.

  In addition, according to the said structure, since the 1st adhesion electrode 7a and the 2nd adhesion electrode 7b are formed along the whole edge | side of L1 and L2 which are the edge | sides which do not mutually overlap by planar view, excitation electrode and extraction electrode are attached. When the crystal diaphragm is formed symmetrically with respect to the center of the long side and the center of the short side, the directionality when the crystal resonator element is mounted on the container can be recognized only by the outer shape of the crystal resonator element. This makes it possible to identify the mounting direction of the piezoelectric vibration element more simply and more reliably than the conventional method of recognizing the shape of the various electrodes of the piezoelectric vibration element and identifying the mounting direction of the piezoelectric vibration element. This is because when the electrode on the crystal plate is used as a reference for image recognition, the light emitted from the illumination unit during image recognition may be reflected by the electrode surface, which is a metal film, and may be difficult to recognize. This is because problems such as reflection can be suppressed by using the outer shape of the quartz diaphragm as a recognition standard. As a result, the time required for image recognition can be shortened, so that the production efficiency is improved.

  The quartz diaphragm has a structure having symmetry with respect to the center of the long side and the center of the short side, and the first adhesive electrode and the second adhesive electrode constitute a rectangle on each of the front and back main surfaces of the crystal diaphragm. Are formed along one entire side that does not overlap each other in plan view, and the excitation electrode and the extraction electrode are formed symmetrically with respect to the long side center and the short side center of the quartz diaphragm By doing so, when one end side in the long side direction of the crystal resonator element is cantilever-supported, any end of both ends of the crystal resonator element can be mounted on the container.

  In the embodiment of the present invention, the conductive bonding between the crystal resonator element and the crystal resonator element mounting pad is performed via a conductive adhesive. However, the bonding between the crystal resonator element and the crystal resonator element mounting pad is not limited to the conductive adhesive, and may be another bonding means. For example, the crystal resonator element and the crystal resonator element mounting pad may be conductively bonded via a conductive bump by thermocompression (so-called FCB method (Flip Chip Bonding)) to which an ultrasonic wave is applied. Further, not only the seam welding method but also other joining methods can be applied as a method for joining the lid and the container. For example, a method of melting a glass resin in a heating atmosphere to join the lid and the container, or a method of melting an alloy such as AuSn in a heating atmosphere and joining the lid to the container is also applicable.

  In the embodiment of the present invention, a surface-mounted crystal resonator is taken as an example, but the present invention can be applied to other piezoelectric vibration devices such as a crystal oscillator in addition to the crystal resonator.

  The present invention can be implemented in various other forms without departing from the spirit or main features thereof. Therefore, the above-described embodiment is merely an example in all respects and should not be interpreted in a limited manner. The scope of the present invention is indicated by the claims, and is not restricted by the text of the specification. Further, all modifications and changes belonging to the equivalent scope of the claims are within the scope of the present invention.

  It can be applied to mass production of piezoelectric vibration devices.

DESCRIPTION OF SYMBOLS 1 Crystal oscillator 2 Crystal oscillator 3 Container 4 Crystal oscillator mounting pad 5, 5a, 5b Excitation electrode 6 Extraction electrode 6a First extraction electrode 6b Second extraction electrode 7 Adhesive electrode 7a First adhesive electrode 7b Second adhesive electrode 11a, 11b No electrode area 12 Conductive adhesive

Claims (2)

A piezoelectric vibration element in which an electrode is formed on a substantially rectangular piezoelectric diaphragm in plan view
A pair of excitation electrodes having a substantially rectangular shape in plan view are formed oppositely in the center of the front and back main surfaces of the piezoelectric diaphragm,
A first adhesive electrode and a second adhesive electrode, which are one side of a set of opposing sides constituting each rectangle of the front and back main surfaces of the piezoelectric diaphragm and do not overlap each other in plan view, It is formed along the entire one side of the front and back main surfaces,
Of the pair of excitation electrodes,
A pair of first extraction electrodes are formed from a region including both corners of one side facing the first adhesive electrode of one excitation electrode toward the first adhesive electrode,
A pair of second extraction electrodes are formed from a region including both corners of one side facing the second adhesive electrode of the other excitation electrode toward the second adhesive electrode,
The pair of first extraction electrodes and the pair of second extraction electrodes are line symmetric with respect to any of two straight lines that pass through the centers of two opposing sides of the excitation electrode and are orthogonal to each other;
A region surrounded by the one excitation electrode, a pair of first extraction electrodes, and a first adhesive electrode;
The region surrounded by the other excitation electrode, the pair of second extraction electrodes, and the second adhesive electrode is:
A piezoelectric vibration element characterized in that the substrate of the piezoelectric vibration plate is an electrodeless region exposed.   The first adhesive electrode and the second adhesive electrode of the piezoelectric vibration element according to claim 1 are provided with a conductive adhesive on a pair of piezoelectric vibration element mounting pads provided inside a container housing the piezoelectric vibration element. And a piezoelectric vibration device in which the piezoelectric vibration element is hermetically sealed by bonding a lid to the container.

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