JP2014187459A - Quantum interference device, atomic oscillator, electronic apparatus and mobile body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a quantum interference device and an atomic oscillator that prevent an optical axis deviation of a light emission part and exert an excellent temperature characteristic while ensuring a compact size (especially, a low height), and provide a reliable electronic apparatus and mobile body that include the atomic oscillator.SOLUTION: An atomic oscillator 1 includes: a gas cell 31 housing metal atoms; a light emission part 21 for emitting light for exciting the metal atoms; a light detection part 32 for detecting light passed through the metal atoms; a holding member 5 holding the gas cell 31, the light emission part 21 and the light detection part 32; a plurality of terminals 223, 363 projecting from the holding member 5; and a wiring board 6 having a through hole 61 in which the holding member 5 is inserted, and joined to the plurality of terminals 223, 363 to support the holding member 5 and electrically connect to the plurality of terminals 223, 363.

Description

  The present invention relates to a quantum interference device, an atomic oscillator, an electronic device, and a moving object.

2. Description of the Related Art An atomic oscillator that oscillates based on energy transition of an alkali metal atom such as rubidium or cesium is known (see, for example, Patent Document 1).
Such an atomic oscillator generally includes a gas cell in which an alkali metal is enclosed with a buffer gas, a light emitting unit that emits excitation light that excites the alkali metal in the gas cell, and a light detection unit that detects excitation light that has passed through the gas cell. With.
For example, the atomic oscillator according to Patent Document 1 includes a gas cell, a light source (light emitting unit), and a photodetector (light detecting unit), which are each fixed to a substrate.
However, in the atomic oscillator according to Patent Document 1, there is a problem that the optical axis of the light source is shifted from a desired position due to the deformation of the substrate, and the oscillation characteristics are deteriorated.

Further, in the atomic oscillator according to Patent Document 1, since the contact area between the gas cell, the light source and the photodetector and the substrate is large, thermal interference between the gas cell, the light source and the photodetector and the substrate is large. For this reason, the gas cell, the light source, and the photodetector are easily affected by heat from the outside via the substrate, and there is a problem that the oscillation characteristics are deteriorated due to an external temperature change.
In recent years, atomic oscillators using the quantum interference effect are particularly easy to miniaturize compared to atomic oscillators using the double resonance phenomenon. (Especially low profile) is required.

JP 2009-231688 A

  An object of the present invention is to provide a quantum interference device and an atomic oscillator that can prevent downsizing of the optical axis of a light emitting part and achieve excellent temperature characteristics while achieving downsizing (particularly, low profile). Another object of the present invention is to provide a highly reliable electronic device and a moving body including the atomic oscillator.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1]
The quantum interference device of this application example includes a gas cell containing metal atoms,
A light emitting portion that emits light that excites the metal atoms;
A light detection unit for detecting the light that has passed through the metal atom;
A holding member for holding the gas cell, the light emitting portion, and the light detecting portion;
A plurality of terminals protruding from the holding member;
A substrate having a through-hole into which the holding member is inserted and supporting the holding member by being joined to the plurality of terminals and electrically connected to the plurality of terminals; It is characterized by providing.

  According to such a quantum interference device, the plurality of terminals are bonded to the substrate, so that the holding member can be supported with respect to the substrate and the substrate and the plurality of terminals can be electrically connected. . Therefore, by separating the holding member and the substrate, it is possible to suppress heat interference between the gas cell, the light emitting unit, the light detection unit, and the substrate held by the holding member. Therefore, the temperature characteristics of the quantum interference device can be made excellent.

In addition, since the gas cell, the light emitting part, and the light detecting part are held by the holding member, the optical axis of the light emitting part is prevented from being shifted from the gas cell and the light detecting part even when an external force is applied to the substrate. Can do.
Further, since the holding member is inserted into the through hole of the substrate, the overall height of the apparatus can be reduced.

[Application Example 2]
In the quantum interference device according to this application example, it is preferable that the plurality of terminals are arranged along the surface of the substrate.
Thereby, a board | substrate and a some terminal can be joined, reducing the stress which arises in a some terminal. Therefore, the reliability of the quantum interference device can be improved.

[Application Example 3]
In the quantum interference device of this application example, a light emitting side package that houses the light emitting unit, and
A light detection side package containing the gas cell and the light detection unit,
The holding member preferably holds the light emitting side package and the light detecting side package in a non-contact manner.
Thereby, since the light emission part and the gas cell are accommodated in separate non-contact packages, thermal interference between the light emission part and the gas cell is prevented or suppressed, and the light emission part and the gas cell are independently provided. The temperature can be controlled with high accuracy.

[Application Example 4]
In the quantum interference device according to this application example, the light emitting side package covers at least a part of the light emitting side base on which the light emitting unit is installed and the light emitting unit, and has transparency to the light. A light emitting side lid provided with a window,
The light detection side package includes a light detection side base on which the gas cell and the light detection unit are installed, and a window portion that covers at least a part of the gas cell and the light detection unit, and is transparent to the light. It is preferable to have a light detection side lid provided.
As a result, the light emitting part and the gas cell can be housed in separate packages that are not in contact with each other, while ensuring an optical path of light from the light emitting part to the light detecting part via the gas cell.

[Application Example 5]
In the quantum interference device according to this application example, it is preferable that the plurality of terminals protrude from at least one of the light emission side base and the light detection side base and pass through the holding member.
Thereby, the reliability of the electrical connection of a some terminal can be improved.
[Application Example 6]
The atomic oscillator of this application example includes the quantum interference device of this application example.
As a result, it is possible to provide an atomic oscillator capable of reducing the height and exhibiting excellent oscillation characteristics.

[Application Example 7]
An electronic apparatus according to this application example includes the atomic oscillator according to this application example.
Thereby, an electronic device having excellent reliability can be provided.
[Application Example 8]
The moving body of this application example includes the atomic oscillator of this application example.
Thereby, the mobile body which has the outstanding reliability can be provided.

1 is a perspective view showing an atomic oscillator according to a first embodiment of the present invention. It is a schematic diagram which shows schematic structure of the atomic oscillator shown in FIG. It is a figure for demonstrating the energy state of the alkali metal in the gas cell with which the atomic oscillator shown in FIG. 1 was equipped. 2 is a graph showing a relationship between a frequency difference between two lights from a light emitting unit and a detection intensity at the light detecting unit for the light emitting unit and the light detecting unit provided in the atomic oscillator shown in FIG. 1. It is a longitudinal cross-sectional view of the atomic oscillator shown in FIG. (A) is a figure which shows the base | substrate of the light emission side package of the atomic oscillator shown in FIG. 1, (b) is a figure which shows the edge part by the side of the light emission side package of the holding member of the atomic oscillator shown in FIG. . It is a longitudinal cross-sectional view of the atomic oscillator which concerns on 2nd Embodiment of this invention. (A) is a figure which shows the base | substrate of the light emission side package of the atomic oscillator shown in FIG. 7, (b) is a figure which shows the edge part by the side of the light emission side package of the holding member of the atomic oscillator shown in FIG. . It is a longitudinal cross-sectional view of the atomic oscillator which concerns on 3rd Embodiment of this invention. It is a system configuration | structure schematic diagram at the time of using the atomic oscillator of this invention for the positioning system using a GPS satellite. It is a schematic block diagram which shows an example of the clock transmission system using the atomic oscillator of this invention. It is a perspective view which shows the structure of a mobile body (automobile) provided with the atomic oscillator of this invention.

Hereinafter, an atomic oscillator and an electronic apparatus of the present invention will be described in detail based on embodiments shown in the accompanying drawings.
1. Atomic oscillator (quantum interference device)
First, the atomic oscillator of the present invention (the atomic oscillator including the quantum interference device of the present invention) will be described. In the following, an example in which the quantum interference device of the present invention is applied to an atomic oscillator will be described. However, the quantum interference device of the present invention is not limited to this, for example, a magnetic sensor, a quantum memory, etc. It is also applicable to.

<First Embodiment>
FIG. 1 is a perspective view showing the atomic oscillator according to the first embodiment of the present invention, and FIG. 2 is a schematic diagram showing a schematic configuration of the atomic oscillator shown in FIG. 3 is a diagram for explaining the energy state of the alkali metal in the gas cell provided in the atomic oscillator shown in FIG. 1, and FIG. 4 is a diagram illustrating the light emitting unit and the light provided in the atomic oscillator shown in FIG. It is a graph which shows the relationship between the frequency difference of the two lights from a light-projection part, and the detection intensity in a light detection part about a detection part. 5 is a longitudinal sectional view of the atomic oscillator shown in FIG. 1, FIG. 6 (a) is a diagram showing a substrate of a light emitting side package of the atomic oscillator shown in FIG. 1, and FIG. 6 (b) is a diagram of FIG. It is a figure which shows the edge part by the side of the light-projection side package of the holding member of the atomic oscillator shown in FIG.

  1, 5, and 6, for convenience of explanation, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other, and the tip side of each illustrated arrow is indicated by “+ (plus ) Side ”and the base end side as“ − (minus) side ”. In the following, for convenience of explanation, a direction parallel to the X axis is referred to as “X axis direction”, a direction parallel to the Y axis is referred to as “Y axis direction”, and a direction parallel to the Z axis is referred to as “Z axis direction”. Further, the + Z direction side (upper side in FIG. 5) is referred to as “upper”, and the −Z direction side (lower side in FIG. 5) is referred to as “lower”.

An atomic oscillator 1 shown in FIG. 1 is an atomic oscillator using a quantum interference effect.
As shown in FIG. 1, the atomic oscillator 1 holds a first unit 2 (light emission side unit), a second unit 3 (light detection side unit), optical components 41, 42, and 43, and these components. A holding member 5, a wiring board 6 (board) that supports the holding member 5, and a control unit 7 mounted on the wiring board 6 are provided.

Here, as shown in FIGS. 1 and 2, the first unit 2 includes a light emitting portion 21 and a first package 22 (light emitting side package) that houses the light emitting portion 21.
The second unit 3 includes a gas cell 31, a light detection unit 32, a heater 33, a temperature sensor 34, a coil 35, and a second package 36 (light detection side package) that houses these.

The first unit 2 and the second unit 3 are electrically connected to the control unit 7 via wiring (not shown) of the wiring board 6 and are driven and controlled by the control unit 7.
First, the principle of the atomic oscillator 1 will be briefly described.
In the atomic oscillator 1, gaseous metal such as rubidium, cesium, and sodium (metal atom) is enclosed in a gas cell 31.

As shown in FIG. 3, the alkali metal has a three-level energy level, and is in three states, two ground states (ground states 1 and 2) having different energy levels, and an excited state. Can take. Here, the ground state 1 is a lower energy state than the ground state 2.
When two types of resonant lights 1 and 2 having different frequencies are irradiated onto such a gaseous alkali metal, the above-described gaseous alkali metal is irradiated with the frequency ω 1 of the resonant light 1 and the frequency ω 2 of the resonant light 2. In accordance with the difference (ω1-ω2), the light absorptivity (light transmittance) of the resonance lights 1 and 2 in the alkali metal changes.

When the difference (ω1−ω2) between the frequency ω1 of the resonant light 1 and the frequency ω2 of the resonant light 2 matches the frequency corresponding to the energy difference between the ground state 1 and the ground state 2, the ground states 1 and 2 Each excitation to the excited state stops. At this time, both the resonant lights 1 and 2 are transmitted without being absorbed by the alkali metal. Such a phenomenon is called a CPT phenomenon or an electromagnetically induced transparency (EIT) phenomenon.
The light emitting unit 21 emits two types of light (resonant light 1 and resonant light 2) having different frequencies as described above toward the gas cell 31.

  For example, when the light emitting unit 21 fixes the frequency ω1 of the resonant light 1 and changes the frequency ω2 of the resonant light 2, the difference between the frequency ω1 of the resonant light 1 and the frequency ω2 of the resonant light 2 (ω1-ω2). ) Coincides with the frequency ω 0 corresponding to the energy difference between the ground state 1 and the ground state 2, the detection intensity of the light detection unit 32 rises sharply as shown in FIG. Such a steep signal is detected as an EIT signal. This EIT signal has an eigenvalue determined by the type of alkali metal. Therefore, by using such an EIT signal as a reference, a highly accurate oscillator can be realized.

Hereinafter, each part of the atomic oscillator 1 will be described in detail sequentially.
(First unit)
As described above, the first unit 2 includes the light emitting unit 21 and the first package 22 that houses the light emitting unit 21.
[Light emitting part]
The light emitting unit 21 has a function of emitting excitation light that excites alkali metal atoms in the gas cell 31.

More specifically, the light emitting unit 21 emits two types of light (resonant light 1 and resonant light 2) having different frequencies as described above.
The frequency ω1 of the resonant light 1 can excite the alkali metal in the gas cell 31 from the ground state 1 to the excited state.
Further, the frequency ω2 of the resonance light 2 can excite the alkali metal in the gas cell 31 from the ground state 2 to the excited state.

The light emitting unit 21 is not particularly limited as long as it can emit the excitation light as described above. For example, a semiconductor laser such as a vertical cavity surface emitting laser (VCSEL) can be used.
Further, such a light emitting unit 21 is temperature-adjusted to a temperature different from a gas cell 31 described later, for example, about 30 ° C., by a temperature adjusting element (a heating resistor, a Peltier element, etc.) not shown.

[First package (light emitting side package)]
The first package 22 houses the light emitting unit 21 described above.
As shown in FIG. 5, the first package 22 includes a base 221 (light emitting side base) and a lid 222 (light emitting side lid).
The base 221 supports the light emitting unit 21 directly or indirectly. In the present embodiment, the base body 221 has a plate shape and a circular shape in plan view.

The light emitting portion 21 (mounting component) is installed (mounted) on one surface (mounting surface) of the base 221. Further, as shown in FIG. 5, a plurality of terminals 223 (leads) protrude in the −X-axis direction on the other surface of the base 221. The plurality of terminals 223 are electrically connected to the light emitting unit 21 via wiring not shown.
As shown in FIGS. 5 and 6A, each of the plurality of terminals 223 extends in the X-axis direction, and is arranged in one direction (Y-axis direction in the present embodiment) so as to be parallel to each other. It is out.

A lid body 222 that covers at least a part of the light emitting portion 21 on the base body 221 is joined to the base body 221.
The lid 222 has a bottomed cylindrical shape with one end opened. In the present embodiment, the cylindrical portion of the lid 222 has a cylindrical shape.
The opening at one end of the lid 222 is closed by the base 221 described above.

A window 23 is provided at the other end of the lid 222, that is, at the bottom opposite to the opening of the lid 222.
The window portion 23 is provided on the optical axis a between the gas cell 31 and the light emitting portion 21.
And the window part 23 has transparency with respect to the excitation light mentioned above.
In this embodiment, the window part 23 is comprised with the lens. Thereby, the excitation light LL can be irradiated to the gas cell 31 without waste.

Moreover, the window part 23 has a function which makes the excitation light LL parallel light. Thereby, it is possible to easily and reliably prevent the excitation light LL from being reflected by the inner wall of the gas cell 31. Therefore, resonance of excitation light in the gas cell 31 is preferably generated, and as a result, the oscillation characteristics of the atomic oscillator 1 can be enhanced.
The window 23 is not limited to a lens as long as it has transparency to excitation light, and may be, for example, an optical component other than a lens, or a simple light-transmissive plate member. Also good. Further, the lens having the function as described above may be provided between the first package 22 and the second package 36 as in the optical components 41, 42, and 43 described later.

The constituent material of the lid body 222 other than the window portion 23 is not particularly limited, and for example, ceramic, metal, resin, or the like can be used.
Here, when a portion other than the window portion 23 of the lid 222 is made of a material that is transparent to excitation light, the portion other than the window portion 23 of the lid 222 and the window portion 23 are formed integrally. can do. Further, when the portion other than the window portion 23 of the lid 222 is made of a material that is not transmissive to the excitation light, the portion other than the window portion 23 of the lid 222 and the window portion 23 are separated. These may be formed and bonded by a known bonding method.

Moreover, it is preferable that the base body 221 and the lid 222 are airtightly joined. That is, it is preferable that the inside of the first package 22 is an airtight space. Thereby, the inside of the 1st package 22 can be made into a pressure-reduced state (state decompressed from atmospheric pressure) or an inert gas enclosure state, As a result, the characteristic of the atomic oscillator 1 can be improved.
The method for joining the base 221 and the lid 222 is not particularly limited, and for example, brazing, seam welding, energy beam welding (laser welding, electron beam welding, etc.), and the like can be used.

A joining member for joining these may be interposed between the base 221 and the lid 222.
In addition, the first package 22 may contain components other than the light emitting unit 21 described above.
For example, the first package 22 may contain a temperature adjustment element, a temperature sensor, or the like that adjusts the temperature of the light emitting unit 21. Examples of such temperature adjusting elements include heating resistors (heaters), Peltier elements, and the like.

According to the first package 22 configured to include the base body 221 and the lid 222, the light emitting unit 21 can be disposed while allowing the excitation light to be emitted from the light emitting unit 21 to the outside of the first package 22. It can be stored in the first package 22.
Further, the first package 22 is held by a holding member 5 to be described later so that the base 221 is disposed on the side opposite to the second package 36.

(Second unit)
As described above, the second unit 3 includes the gas cell 31, the light detection unit 32, the heater 33, the temperature sensor 34, the coil 35, and the second package 36 that houses them.
[Gas cell]
The gas cell 31 is filled with gaseous alkali metals such as rubidium, cesium, and sodium.

For example, although not shown, the gas cell 31 includes a main body portion having a columnar through hole and a pair of window portions that block both openings of the through hole. Thereby, the internal space in which the alkali metal is enclosed as described above is formed.
Here, each window part of the gas cell 31 has the permeability | transmittance with respect to the excitation light from the light emission part 21 mentioned above. One of the windows transmits the excitation light incident into the gas cell 31, and the other window transmits the excitation light emitted from the gas cell 31.

Therefore, the material constituting the window portion of the gas cell 31 is not particularly limited as long as it has transparency to the excitation light as described above, and examples thereof include glass materials and quartz.
Moreover, the material which comprises the main-body part of the gas cell 31 is not specifically limited, A metal material, a resin material, etc. may be sufficient and a glass material, a crystal | crystallization, etc. may be sufficient like a window part.

And each window part is airtightly joined with respect to the main-body part. Thereby, the internal space of the gas cell 31 can be made into an airtight space.
The method for joining the main body portion and the window portion of the gas cell 31 is determined according to these constituent materials and is not particularly limited. For example, a joining method using an adhesive, a direct joining method, an anodic joining method, etc. Can be used.
Further, the temperature of the gas cell 31 is adjusted by the heater 33 to a temperature different from that of the light emitting unit 21 described above, for example, about 70 ° C.

[Photodetection section]
The light detection unit 32 has a function of detecting the intensity of the excitation light LL (resonance light 1 and 2) transmitted through the gas cell 31.
The light detector 32 is not particularly limited as long as it can detect the excitation light as described above. For example, a photodetector (light receiving element) such as a solar cell or a photodiode can be used.

[heater]
The heater 33 has a function of heating the above-described gas cell 31 (more specifically, an alkali metal in the gas cell 31). Thereby, the alkali metal in the gas cell 31 can be maintained in a gaseous state.
The heater 33 generates heat when energized. For example, the heater 33 includes a heating resistor provided on the outer surface of the gas cell 31. Such a heating resistor is formed using, for example, a chemical vapor deposition method (CVD) such as plasma CVD or thermal CVD, a dry plating method such as vacuum deposition, a sol-gel method, or the like.

Here, when the heating resistor is provided in the incident portion or the emitting portion of the excitation light of the gas cell 31, a material having transparency to the excitation light, specifically, for example, ITO (Indium Tin Oxide), IZO (IZO ( Indium Zinc Oxide), In ₃ O ₃ , SnO ₂ , Sb-containing SnO ₂ , and transparent electrode materials such as oxides such as Al-containing ZnO.

The heater 33 is not particularly limited as long as it can heat the gas cell 31, and may be non-contact with the gas cell 31. Further, the gas cell 31 may be heated using a Peltier element instead of the heater 33 or in combination with the heater 33.
Such a heater 33 is electrically connected to a temperature control unit 72 of the control unit 7 to be described later and energized.

[Temperature sensor]
The temperature sensor 34 detects the temperature of the heater 33 or the gas cell 31. Based on the detection result of the temperature sensor 34, the amount of heat generated by the heater 33 is controlled. Thereby, the alkali metal atom in the gas cell 31 can be maintained at a desired temperature.

The installation position of the temperature sensor 34 is not particularly limited, and may be, for example, on the heater 33 or on the outer surface of the gas cell 31.
The temperature sensor 34 is not particularly limited, and various known temperature sensors such as a thermistor and a thermocouple can be used.
Such a temperature sensor 34 is electrically connected to a temperature control unit 72 of the control unit 7 which will be described later via a wiring (not shown).

[coil]
The coil 35 has a function of generating a magnetic field when energized. Thereby, by applying a magnetic field to the alkali metal in the gas cell 31, a gap between different energy levels in which the alkali metal is degenerated can be widened by Zeeman splitting to improve resolution. As a result, the accuracy of the oscillation frequency of the atomic oscillator 1 can be increased.

The magnetic field generated by the coil 35 may be either a DC magnetic field or an AC magnetic field, or may be a magnetic field in which a DC magnetic field and an AC magnetic field are superimposed.
The installation position of the coil 35 is not particularly limited and is not shown. For example, the coil 35 may be wound around the outer periphery of the gas cell 31 so as to constitute a solenoid type, or may constitute a Helmholtz type. A pair of coils may be opposed to each other via the gas cell 31.

The coil 35 is electrically connected to a magnetic field control unit 73 of the control unit 7 which will be described later via a wiring (not shown). Thereby, the coil 35 can be energized.
The constituent material of the coil 35 is not particularly limited, and examples thereof include silver, copper, palladium, platinum, gold, and alloys thereof, and one or a combination of two or more of these may be used. Can be used.

[Second package (light detection side package)]
The second package 36 houses the gas cell 31, the light detection unit 32, the heater 33, the temperature sensor 34, and the coil 35 described above.
The second package 36 is configured in the same manner as the first package 22 of the first unit 2 described above.

Specifically, as shown in FIG. 5, the second package 36 includes a base 361 (light detection side base) and a lid 362 (light detection side lid).
The base 361 directly or indirectly supports the gas cell 31, the light detection unit 32, the heater 33, the temperature sensor 34, and the coil 35. In the present embodiment, the base body 361 has a plate shape, and has a circular shape in plan view.

  On one surface (mounting surface) of the base 361, the gas cell 31, the light detection unit 32, the heater 33, the temperature sensor 34, and the coil 35 (a plurality of mounting components) are installed (mounted). Further, as shown in FIG. 5, a plurality of terminals 363 (leads) protrude in the + X-axis direction on the other surface of the base 361. The plurality of terminals 363 are electrically connected to the light detection unit 32, the heater 33, the temperature sensor 34, and the coil 35 through a wiring (not shown).

As shown in FIG. 5, each of the plurality of terminals 363 extends in the X-axis direction, and is arranged in one direction (in this embodiment, the Y-axis direction) so as to be parallel to each other.
A lid 362 that covers at least a part of the gas cell 31, the light detection unit 32, the heater 33, the temperature sensor 34, and the coil 35 on the base 361 is joined to the base 361.

The lid body 362 has a bottomed cylindrical shape with one end opened. In the present embodiment, the cylindrical part of the lid 362 has a cylindrical shape.
The opening at one end of the lid 362 is closed by the base 361 described above.
A window 37 is provided at the other end of the lid 362, that is, at the bottom opposite to the opening of the lid 362.

This window part 37 is provided on the optical axis a between the gas cell 31 and the light emitting part 21.
And the window part 37 has transparency with respect to the excitation light mentioned above.
In this embodiment, the window part 37 is comprised with the plate-shaped member which has a light transmittance.
The window portion 37 is not limited to a light-transmitting plate member as long as it has transparency to excitation light. For example, the window portion 37 is an optical component such as a lens, a polarizing plate, or a λ / 4 wavelength plate. May be.
The constituent material other than the window portion 37 of the lid 362 is not particularly limited, and for example, ceramic, metal, resin, or the like can be used.

  Here, when the portion other than the window portion 37 of the lid 362 is made of a material that is transparent to excitation light, the portion other than the window portion 37 of the lid 362 and the window portion 37 are formed integrally. can do. Moreover, when parts other than the window part 37 of the cover body 362 are comprised with the material which does not have a transmittance | permeability with respect to excitation light, parts other than the window part 37 and the window part 37 of the cover body 362 are separated. These may be formed and bonded by a known bonding method.

The base 361 and the lid 362 are preferably joined in an airtight manner. That is, it is preferable that the inside of the second package 36 is an airtight space. Thereby, the inside of the 2nd package 36 can be made into a pressure reduction state (state pressure-reduced from atmospheric pressure) or an inert gas enclosure state, As a result, the characteristic of the atomic oscillator 1 can be improved.
The method for joining the base 361 and the lid 362 is not particularly limited, and for example, brazing, seam welding, energy beam welding (laser welding, electron beam welding, etc.), and the like can be used.

Note that a bonding member for bonding them may be interposed between the base 361 and the lid 362.
Further, at least the gas cell 31 and the light detector 32 need only be housed in the second package 36, and components other than the gas cell 31, the light detector 32, the heater 33, the temperature sensor 34, and the coil 35 described above. May be stored.

According to the second package 36 having the base 361 and the lid 362 as described above, the gas cell 31 and the light can be emitted while allowing the excitation light from the light emitting portion 21 to enter the second package 36. The detection unit 32 can be stored in the second package 36. Therefore, by using the second package 36 in combination with the first package 22 as described above, the light emitting part is secured while securing the optical path of the excitation light from the light emitting part 21 to the light detecting part 32 via the gas cell 31. 21 and the gas cell 31 can be housed in separate packages that are not in contact with each other.
The second package 36 is held by a holding member 5 described later so that the base 361 is disposed on the side opposite to the first package 22.

(Optical parts)
A plurality of optical components 41, 42, 43 are arranged between the first package 22 and the second package 36 as described above. The plurality of optical components 41, 42, 43 are respectively provided on the optical axis a between the light emitting portion 21 in the first package 22 described above and the gas cell 31 in the second package 36 described above. Yes.

In this embodiment, the optical component 41, the optical component 42, and the optical component 43 are arranged in this order from the first package 22 side to the second package 36 side.
The optical component 41 is a λ / 4 wavelength plate. Thereby, for example, when the excitation light from the light emitting unit 21 is linearly polarized light, the excitation light can be converted into circularly polarized light (right circularly polarized light or left circularly polarized light).

  As described above, in the state where the alkali metal atoms in the gas cell 31 are Zeeman split by the magnetic field of the coil 35, if the alkali metal atoms are irradiated with excitation light of linearly polarized light, the interaction between the excitation light and the alkali metal atoms causes an alkali. This means that metal atoms are evenly distributed in a plurality of levels where Zeeman splits. As a result, the number of alkali metal atoms at a desired energy level is relatively small with respect to the number of alkali metal atoms at other energy levels, so that the number of atoms that develop a desired EIT phenomenon is reduced and desired. As a result, the oscillation characteristic of the atomic oscillator 1 is deteriorated.

  On the other hand, when the alkali metal atom is irradiated with the circularly polarized excitation light in the state where the alkali metal atom in the gas cell 31 is Zeeman split by the magnetic field of the coil 35 as described above, the interaction between the excitation light and the alkali metal atom. Thus, the number of alkali metal atoms having a desired energy level among the plurality of levels in which the alkali metal atom is Zeeman split can be relatively increased with respect to the number of alkali metal atoms having other energy levels. . Therefore, the number of atoms that express the desired EIT phenomenon increases and the desired EIT signal increases, and as a result, the oscillation characteristics of the atomic oscillator 1 can be improved.

In the present embodiment, the optical component 41 has a disk shape. Therefore, the optical component 41 can be rotated around an axis parallel to the optical axis a while being engaged with a groove 511 (see FIG. 5) of the holding member 5 as described later. In addition, the planar view shape of the optical component 41 is not limited to this, For example, you may comprise polygons, such as a square and a pentagon.
Optical components 42 and 43 are arranged on the second unit 3 side with respect to such an optical component 41.

  Each of the optical components 42 and 43 is a neutral density filter (ND filter). As a result, the intensity of the excitation light LL incident on the gas cell 31 can be adjusted (decreased). Therefore, even when the output of the light emitting unit 21 is large, the excitation light incident on the gas cell 31 can be set to a desired light amount. In the present embodiment, the optical components 42 and 43 adjust the intensity of the excitation light converted into circularly polarized light by the optical component 41 described above.

In the present embodiment, the optical components 42 and 43 each have a plate shape. Moreover, the planar view shapes of the optical components 42 and 43 are each rectangular.
In addition, the planar view shape of the optical components 42 and 43 is not limited to this, For example, you may comprise circular. When the planar view shape of the optical components 42 and 43 is a circle, the optical components 42 and 43 are rotated around an axis parallel to the optical axis a while being engaged with grooves 512 and 513 of the holding member 5 as described later. be able to.

The optical component 42 and the optical component 43 may have the same or different dimming ratio.
Moreover, the optical components 42 and 43 may have portions where the light attenuation rates are different continuously or stepwise on the upper side and the lower side, respectively. In this case, the attenuation ratio of the excitation light can be adjusted by adjusting the positions of the optical components 42 and 43 in the vertical direction with respect to the wiring board 6.

Moreover, the optical components 42 and 43 may each have a portion in which the light attenuation rate varies continuously or intermittently in the circumferential direction. In this case, the attenuation ratio of the excitation light can be adjusted by rotating the optical components 42 and 43. In this case, the center of rotation of the optical components 42 and 43 only needs to be shifted with respect to the optical axis a.
One of the optical components 42 and 43 may be omitted. Moreover, when the output of the light emission part 21 is moderate, both the optical components 42 and 43 can be abbreviate | omitted.
Further, the optical components 41, 42, and 43 are not limited to the type, arrangement order, number, and the like described above. For example, the optical components 41, 42, and 43 are not limited to λ / 4 wavelength plates or neutral density filters, but may be lenses, polarizing plates, or the like.

(Holding member)
The holding member 5 has a function of holding the first package 22, the second package 36, and the plurality of optical components 41, 42, 43 described above. Here, the holding member 5 holds the light emitting unit 21 via the first package 22 and holds the gas cell 31, the light detection unit 32, and the like via the second package 36.

The holding member 5 holds the first package 22 and the second package 36 with a space therebetween and the first package 22 and the second package 36 are not in contact with each other.
Thereby, the thermal interference between the light emission part 21 and the gas cell 31 can be prevented or suppressed, and the temperature of the light emission part 21 and the gas cell 31 can be independently controlled with high accuracy.

If it demonstrates concretely, as shown in FIG. 5, the holding member 5 has the recessed part 51 opened to upper side. In the present embodiment, each of the pair of side walls arranged in the Y-axis direction of the recess 51 is provided with a plurality of through holes.
In the recess 51, the first package 22, the second package 36, and a plurality of optical components 41, 42, and 43 are installed. In the present embodiment, the lower portions of the first package 22, the second package 36, and the plurality of optical components 41, 42, 43 are respectively located in the recesses 51.

  The recess 51 has a shape that regulates the positions and postures of the first package 22 and the second package 36. Thereby, by positioning the first package 22 and the second package 36 in the recess 51 of the holding member 5, the optical system including the light emitting unit 21 and the light detecting unit 32 can be positioned. Therefore, the installation of the first package 22 and the second package 36 with respect to the holding member 5 can be facilitated.

Here, the recess 51 extends in the X-axis direction, the first package 22 is disposed on one end side (left side in FIG. 5), and on the other end side (right side in FIG. 5). The second package 36 is disposed.
In addition, the first package 22 and the second package 36 are arranged so that the axis of the cylindrical lid body 222 and the lid body 362 are parallel to the extending direction of the recess 51 (X-axis direction). Thereby, the first package 22 and the second package 36 are arranged such that the axes of the lid 222 and the lid 362 are aligned or parallel to each other.

In this embodiment, the cross section of the recess 51 is rectangular.
Further, a support portion 52 (first support portion) that supports the base 221 of the first package 22 is provided on one end portion side (left side in FIG. 5) of the holding member 5, and the other end portion ( On the right side in FIG. 5, a support portion 53 (second support portion) that supports the base body 361 of the second package 36 is provided.

  As described above, the support portion 52 supports the base body 221, and the support portion 53 facing the support portion 52 supports the base body 361, whereby the contact portion between the first package 22 and the holding member 5, and the second package. The distance between the contact portion between 36 and the holding member 5 can be increased. Therefore, heat conduction through the holding member 5 between the first package 22 and the second package 36 can be more effectively suppressed.

  Further, the lid body 222 and the lid body 362 are not in contact with the holding member 5. Thereby, the heat conduction through the holding member 5 between the first package 22 and the second package 36 can be more effectively suppressed. In particular, the cross section of the recess 51 is rectangular, whereas the cylindrical portions of the lids 222 and 362 are respectively cylindrical, so that the comparison is made between the side surfaces of the lids 222 and 362 and the holding member 5. Large gaps can be formed. As a result, heat conduction from the lids 222 and 362 to the holding member 5 can be suppressed to an extremely low level. Even if the side surfaces of the lids 222 and 362 and the holding member 5 are in contact with each other, the contact area can be reduced.

  Here, the support part 52 has an installation surface parallel to the Y axis and the Z axis. The surface opposite to the lid 222 of the base body 221 of the first package 22 is in contact with or close to the installation surface. Thereby, the position and attitude | position of the 1st package 22 with respect to the holding member 5 can be controlled. The base body 221 can be fixed to the support portion 52 using an adhesive, for example.

  Further, the support portion 52 is formed with a plurality of through holes 521 through which the plurality of terminals 223 of the first package 22 described above are inserted. That is, the support part 52 has a shape like a socket to which the first package 22 is attached. Also by this, the position and posture of the first package 22 with respect to the holding member 5 can be regulated. The plurality of terminals 223 can be fixed to the support portion 52 by, for example, solder.

The plurality of terminals 223 pass through the plurality of through holes 521. Thereby, the tip of each terminal 223 protrudes from the holding member 5.
Here, the plurality of through holes 521 are provided corresponding to the plurality of terminals 223, respectively, extend in the X-axis direction, and are aligned in the Y-axis direction as shown in FIG. 6B. Therefore, the part which protruded from the holding member 5 of the some terminal 223 is also located in a line with the Y-axis direction.

  Similarly, the support part 53 has an installation surface parallel to the Y axis and the Z axis. The surface opposite to the lid 362 of the base body 361 of the second package 36 is in contact with or close to this installation surface. Thereby, the position and attitude | position of the 2nd package 36 with respect to the holding member 5 can be controlled. Note that the base 361 can be fixed to the support 53 using an adhesive, for example.

  The support portion 53 has a plurality of through holes 531 through which the plurality of terminals 363 of the second package 36 described above are inserted. That is, the support portion 53 has a shape like a socket to which the second package 36 is attached. Also by this, the position and posture of the second package 36 with respect to the holding member 5 can be regulated. The plurality of terminals 363 can be fixed to the support portion 53 by, for example, solder.

Further, the plurality of terminals 363 are inserted into the plurality of through holes 531, whereby a plurality of terminals (not shown) provided on the lower surface or side surface of the outer surface of the holding member 5 are connected to a plurality of wires (not shown). ) Through an electrical connection.
The plurality of terminals 363 pass through the plurality of through holes 531. Thereby, the tip of each terminal 363 protrudes from the holding member 5.

Here, the plurality of through holes 531 are provided corresponding to the plurality of terminals 363, respectively, extend in the X-axis direction, and are arranged in the Y-axis direction. Accordingly, the portions of the plurality of terminals 363 protruding from the holding member 5 are also arranged in the Y-axis direction.
As described above, the holding member 5 holds the first package 22 and the second package 36.

Further, as described above, the holding member 5 holds the optical components 41, 42, and 43, respectively. Thereby, when attaching each component to the holding member 5 at the time of manufacturing the atomic oscillator 1, the optical components 41, 42, and 43 are moved to their positions or in a state where the first package 22 and the second package 36 are held by the holding member 5. It can be installed on the holding member 5 while adjusting its posture.
Specifically, a groove 511 that holds the optical component 41, a groove 512 that holds the optical component 42, and a groove 513 that holds the optical component 43 are formed on the wall surface of the recess 51 of the holding member 5. Yes.

  In the present embodiment, the grooves 511, 512, and 513 are formed so that the plate surfaces of the optical components 41, 42, and 43 are parallel to each other. The grooves 511, 512, and 513 are formed such that the plate surfaces of the optical components 41, 42, and 43 are perpendicular to the optical axis a. The grooves 511, 512, and 513 may be formed such that the plate surfaces of the optical components 41, 42, and 43 are not parallel to each other, and the plate surfaces of the optical components 41, 42, and 43 are respectively optical axes a. It may be formed so as to be inclined with respect to.

The groove 511 can rotatably hold the optical component 41 around an axis (for example, the optical axis a) along a line segment connecting the first package 22 and the second package 36. Accordingly, the posture of the optical component 41 around the optical axis a can be adjusted in a state where the optical component 41 is engaged with the groove 511 of the holding member 5 and positioned in a direction parallel to the optical axis a.
Here, as described above, since the optical component 41 is a λ / 4 wavelength plate, the light emitting unit can be adjusted by adjusting the posture of the optical component 41 by rotation regardless of the posture of the first package 22 with respect to the holding member 5. The excitation light from 21 can be converted from linearly polarized light to circularly polarized light.
Further, since the optical component 41 has a disk shape, the optical component 41 comes into contact with the wall surface of the concave portion 51 having a rectangular cross section at three places. Thereby, the optical component 41 can be positioned with respect to the holding member 5.

  When installing the optical components 41, 42, 43 on the holding member 5, for example, first, the first unit 2 and the second unit 3 are first installed and fixed on the holding member 5. After that, with the optical components 41, 42, 43 engaged with the corresponding grooves 511, 512, 513, while checking the EIT signal, etc., the position and orientation of each optical component 41, 42, 43 Change at least one. When the desired EIT signal is confirmed, the optical components 41, 42, 43 are fixed to the holding member 5 in that state. Such fixing is not particularly limited, but for example, it is preferable to use a photocurable adhesive. The photo-curing adhesive can change the position or posture of each optical component 41, 42, 43 even if it is supplied to each groove 511, 512, 513 before curing, and in a short time when desired. Can be fixed by curing.

The constituent material of the holding member 5 is not particularly limited, but is preferably a nonmetal such as a resin material or a ceramic material.
Thereby, the heat conduction through the holding member 5 between the first package 22 and the second package 36 can be reduced. As a result, thermal interference between the light emitting part 21 and the gas cell 31 can be effectively prevented or suppressed.

  Although it does not specifically limit as resin material which comprises the holding member 5, For example, polyolefin, such as polyethylene and ethylene-vinyl acetate copolymer (EVA), acrylic resin, acrylonitrile-butadiene-styrene copolymer (ABS resin) , Acrylonitrile-styrene copolymer (AS resin), polyethylene terephthalate (PET), polyether, polyether ketone (PEK), polyether ether ketone (PEEK), styrene, polyolefin, polyvinyl chloride, polyurethane, Various thermoplastic elastomers such as polyester, polyamide, polybutadiene, trans polyisoprene, fluoro rubber, and chlorinated polyethylene, epoxy resin, phenol resin, urea resin, melamine resin, unsaturated polyester, Examples thereof include corn resin, polyurethane and the like, and copolymers, blends, polymer alloys and the like mainly containing these, and one or more of these are used in combination (for example, as a laminate of two or more layers). be able to.

  Further, the ceramic material constituting the holding member 5 is not particularly limited. For example, various glasses, and oxide ceramics such as alumina, silica, titania, zirconia, yttria, calcium phosphate, silicon nitride, aluminum nitride, Nitride ceramics such as titanium nitride and boron nitride; carbide ceramics such as graphite and tungsten carbide; and other ferroelectric materials such as barium titanate, strontium titanate, PZT, PLZT, and PLLZT .

In addition, the thermal conductivity of the holding member 5 is preferably 0.1 W · m ⁻¹ · K ⁻¹ or more and 40 W · m ⁻¹ · K ⁻¹ or less, and 0.1 W · m ⁻¹ · K ^−1. More preferably, it is 0.5 W · m ⁻¹ · K ⁻¹ or less. Thereby, the heat conduction through the holding member 5 between the first package 22 and the second package 36 can be more effectively suppressed. That is, the heat insulating property of the holding member 5 can be improved, and the effect of thermally separating the first package 22 and the second package 36 can be made remarkable.

  On the other hand, when the thermal conductivity is too low, it is difficult to select a material that can secure the rigidity necessary for the holding member 5 depending on the shape, size, and the like of the holding member 5, while the thermal conductivity is too high. In this case, depending on the distance between the contact portion between the first package 22 and the holding member 5 and the contact portion between the second package 36 and the holding member 5, the holding member 5 between the first package 22 and the second package 36. It is difficult to suppress heat conduction through

(Wiring board)
The wiring board 6 has wiring (not shown), and through such wiring, electronic components such as the control unit 7 mounted on the wiring board 6, the plurality of terminals 223 of the first package 22, and the plurality of terminals of the second package. A function of electrically connecting the terminal 363 is provided.
The wiring board 6 also has a function of supporting the holding member 5 through the plurality of terminals 223 and the plurality of terminals 363.

More specifically, as shown in FIG. 5, the wiring board 6 has a through hole 61 penetrating in the thickness direction.
The holding member 5 is inserted into the through hole 61. Thereby, compared with the case where the holding member 5 is mounted on the surface of the wiring board 6, the height of the entire apparatus can be reduced.
In the present embodiment, the through hole 61 has a shape similar to the outer shape of the holding member 5 in a plan view, that is, a quadrangle (more specifically, a rectangle whose longitudinal direction is the X-axis direction).

The through hole 61 is formed larger than the outer shape of the holding member 5 in plan view. That is, the through-hole 61 has a length that is large in the X-axis direction of the holding member 5 and has a width that is larger than the length (width) of the holding member 5 in the Y-axis direction in plan view. Have.
Therefore, the holding member 5 inserted into the through hole 61 is separated from the wiring board 6. Thereby, the heat interference between the gas substrate 31 held by the holding member 5, the light emitting part 21 and the light detecting part 32, and the wiring board 6 can be suppressed.

A plurality of terminals 62 and a plurality of terminals 63 are provided on one surface of the wiring board 6 around the through hole 61.
In the present embodiment, the plurality of terminals 62 are provided in the vicinity of one end portion in the longitudinal direction of the through hole 61, while the plurality of terminals 63 are provided in the vicinity of the other end portion in the longitudinal direction of the through hole 61. Yes.
The plurality of terminals 62 are provided corresponding to the plurality of terminals 223 of the first package 22 described above. A plurality of corresponding terminals 223 are joined to the plurality of terminals 62, respectively.

The plurality of terminals 63 are provided corresponding to the plurality of terminals 363 of the second package 36 described above. A plurality of corresponding terminals 363 are joined to the plurality of terminals 63, respectively.
By these joining, the holding member 5 is supported by the wiring board 6 via the plurality of terminals 223 and the plurality of terminals 363, and the plurality of terminals 223 are electrically connected to the plurality of terminals 62, respectively. 363 is electrically connected to the plurality of terminals 63, respectively.

Here, the surface of the wiring board 6 is a surface parallel to the Y axis and the Y axis, and as described above, the plurality of terminals 223 are arranged in the Y axis direction. Therefore, the plurality of terminals 223 are arranged along the surface of the wiring board 6. Similarly, the plurality of terminals 363 are arranged along the surface of the wiring board 6.
Thereby, the wiring board 6 and the plurality of terminals 223 and 363 can be joined while reducing the stress generated in the plurality of terminals 223 and 363. Therefore, the reliability of the atomic oscillator 1 can be improved.

  In addition, by performing electrical connection between the first package 22 and the wiring board 6 and supporting the holding member 5 with respect to the wiring board 6 through the plurality of terminals 223 penetrating the holding member 5 in this way, Compared with the case where the plurality of terminals of the first package 22 and the plurality of terminals of the holding member 5 are configured as separate bodies, the number of contacts between the terminals is reduced, so that the reliability of electrical connection of the plurality of terminals 223 is improved. Can be increased.

  The joining method between the terminal 223 and the terminal 62 and the joining method between the terminal 363 and the terminal 63 are not particularly limited as long as they can be joined while ensuring the electrical continuity of the joint portion. And a joining method using a solder, a joining method using an anisotropic conductive adhesive, and the like. Moreover, when the terminal 223 and the terminal 62 are comprised like a crimp terminal, the terminal 223 and the terminal 62 can also be joined by crimping. Similarly, when the terminal 363 and the terminal 63 are configured as a crimp terminal, the terminal 363 and the terminal 63 can be joined by crimping.

Such a plurality of terminals 223 and 363 are each electrically connected to the control unit 7 via wiring not shown.
Various printed wiring boards can be used as the wiring board 6, but from the viewpoint of securing rigidity necessary to support the holding member 5, a board having a rigid portion, such as a rigid board or a rigid flexible board. It is preferable to use a substrate or the like.

Even when a wiring board having no rigid portion (for example, a flexible board) is used as the wiring board 6, for example, by bonding a reinforcing member for improving rigidity to the wiring board, The rigidity necessary for supporting the holding member 5 can be ensured.
A control unit 7 is installed on one surface of the wiring board 6. Note that electronic components other than the control unit 7 may be mounted on the wiring board 6.

[Control unit]
The control unit 7 illustrated in FIG. 2 has a function of controlling the heater 33, the coil 35, and the light emitting unit 21, respectively.
In the present embodiment, the control unit 7 is configured by an IC (Integrated Circuit) chip mounted on the wiring board 6.
Such a control unit 7 includes an excitation light control unit 71 that controls the frequencies of the resonance lights 1 and 2 of the light emitting unit 21, a temperature control unit 72 that controls the temperature of the alkali metal in the gas cell 31, and the gas cell 31. And a magnetic field control unit 73 that controls the magnetic field to be applied.

  The excitation light control unit 71 controls the frequencies of the resonance lights 1 and 2 emitted from the light emission unit 21 based on the detection result of the light detection unit 32 described above. More specifically, the excitation light control unit 71 emits light from the light emitting unit 21 so that (ω1-ω2) detected by the light detection unit 32 described above becomes the frequency ω0 specific to the alkali metal described above. The frequency of the resonant lights 1 and 2 is controlled. Further, the excitation light control unit 71 controls the center frequency of the resonance lights 1 and 2 emitted from the light emitting unit 21.

Further, the temperature control unit 72 controls energization to the heater 33 based on the detection result of the temperature sensor 34. Thereby, the gas cell 31 can be maintained within a desired temperature range. Here, the temperature sensor 34 constitutes temperature detection means for detecting the temperature of the gas cell 31.
The magnetic field control unit 73 controls energization to the coil 35 so that the magnetic field generated by the coil 35 is constant.

  According to the atomic oscillator 1 of the present embodiment as described above, the plurality of terminals 223 and 363 are joined to the wiring board 6, thereby supporting the holding member 5 with respect to the wiring board 6 and the wiring board. 6 and a plurality of terminals 223 and 363 can be electrically connected. Therefore, by separating the holding member 5 and the wiring board 6, it is possible to suppress heat interference between the gas cell 31, the light emitting unit 21, the light detection unit 32, and the wiring board 6 held by the holding member 5. Can do. Therefore, the temperature characteristics of the atomic oscillator 1 can be made excellent.

In addition, since the gas cell 31, the light emitting unit 21, and the light detecting unit 32 are held by the holding member 5, even if an external force is applied to the wiring board 6, the optical axis of the light emitting unit 21 is the gas cell 31 and the light detecting unit 32. Can be prevented from shifting.
Further, since the holding member 5 is inserted into the through hole 61 of the wiring board 6, the overall height of the apparatus can be reduced.
As described above, it is possible to provide the atomic oscillator 1 that can be reduced in height and can exhibit excellent oscillation characteristics.

Second Embodiment
Next, a second embodiment of the present invention will be described.
7 is a longitudinal sectional view of an atomic oscillator according to the second embodiment of the present invention, FIG. 8A is a view showing a substrate of a light emitting side package of the atomic oscillator shown in FIG. 7, and FIG. FIG. 8 is a view showing an end portion of the holding member of the atomic oscillator shown in FIG. 7 on the light emission side package side.

The atomic oscillator according to this embodiment is different from the first embodiment described above except that the arrangement of the plurality of terminals protruding from the light emitting side package and the light detection side package and the configuration of the plurality of terminals protruding from the holding member are different. It is the same as that of the atomic oscillator concerning.
In the following description, the atomic oscillator according to the second embodiment will be described with a focus on differences from the first embodiment, and description of similar matters will be omitted. 7 and 8, the same reference numerals are given to the same configurations as those in the above-described embodiment.

An atomic oscillator 1A shown in FIG. 7 includes a first unit 2A (light emission side unit), a second unit 3A (light detection side unit), optical components 41, 42, and 43, and a holding member 5A that holds them. A wiring board 6 (board) that supports the holding member 5A and a control unit 7 mounted on the wiring board 6 are provided.
Here, as shown in FIGS. 7 and 8, the first unit 2 </ b> A includes a light emitting portion 21 and a first package 22 </ b> A (light emitting side package) that houses the light emitting portion 21.

The second unit 3A includes a gas cell 31, a light detection unit 32, a heater 33, a temperature sensor 34, a coil 35, and a second package 36A (light detection side package) that houses these.
As shown in FIG. 7, the first package 22A includes a base 221A (light emission side base) and a lid 222 (light emission side lid).

On one surface (mounting surface) of the base 221A, the light emitting portion 21 (mounting component) is installed (mounted). Further, as shown in FIG. 7, a plurality of terminals 223A (leads) protrude in the −X-axis direction on the other surface of the base 221A. The plurality of terminals 223A are electrically connected to the light emitting unit 21 via wiring (not shown).
As shown in FIGS. 7 and 8A, each of the plurality of terminals 223A extends in the X-axis direction, and is arranged in the circumferential direction around an axis parallel to the X-axis so as to be parallel to each other. Yes.

A lid 222 that covers the light emitting portion 21 on the base 221A is joined to the base 221A.
The second package 36A is configured in the same manner as the first package 22A of the first unit 2A described above.
Specifically, as shown in FIG. 7, the second package 36A includes a base 361A (light detection side base) and a lid 362 (light detection side lid).

  The gas cell 31, the light detection unit 32, the heater 33, the temperature sensor 34, and the coil 35 (a plurality of mounting parts) are installed (mounted) on one surface (mounting surface) of the base 361A. Further, as shown in FIG. 7, a plurality of terminals 363A (leads) protrude in the + X-axis direction on the other surface of the base 361A. The plurality of terminals 363 </ b> A are electrically connected to the light detection unit 32, the heater 33, the temperature sensor 34, and the coil 35 through a wiring (not shown).

As shown in FIG. 7, each of the plurality of terminals 363A extends in the X-axis direction, and is arranged in the circumferential direction around an axis parallel to the X-axis so as to be parallel to each other.
The holding member 5A has a recess 51 that opens upward.
In the recess 51, the first package 22A, the second package 36A, and a plurality of optical components 41, 42, 43 are installed.

Further, a support portion 52A (first support portion) that supports the base 221A of the first package 22A is provided on one end portion side (left side in FIG. 7) of the holding member 5A, and the other end portion ( On the right side in FIG. 7, a support portion 53A (second support portion) that supports the base body 361A of the second package 36A is provided.
A plurality of through holes 521A through which the plurality of terminals 223A of the first package 22A described above are inserted are formed in the support portion 52A.

Here, the plurality of through-holes 521A are provided corresponding to the plurality of terminals 223A, respectively, and extend in the X-axis direction. As shown in FIG. 8B, the plurality of through-holes 521A are arranged around an axis parallel to the X-axis. It is lined up in the direction.
A plurality of terminals 522 provided corresponding to the plurality of terminals 223A protrude in the −X axis direction on the surface of the support portion 52A opposite to the concave portion 51.

Each of the plurality of terminals 522 extends in the X-axis direction, and is arranged in the Y-axis direction so as to be parallel to each other. The plurality of terminals 522 are electrically connected to the plurality of terminals 223A via wiring (not shown). That is, the support portion 52A has a function of electrically connecting a plurality of terminals 223A and a plurality of terminals 522 that are different in arrangement.
Similarly, a plurality of through holes 531A into which the plurality of terminals 363A of the second package 36A described above are inserted are formed in the support portion 53A.

Here, the plurality of through holes 531A are provided corresponding to the plurality of terminals 363A, respectively, extend in the X-axis direction, and are arranged in the circumferential direction around an axis parallel to the X-axis.
A plurality of terminals 532 provided corresponding to the plurality of terminals 363A protrude in the + X-axis direction on the surface of the support portion 53A opposite to the concave portion 51.
The plurality of terminals 532 extend in the X-axis direction, and are arranged in the Y-axis direction so as to be parallel to each other. The plurality of terminals 532 are electrically connected to the plurality of terminals 363A via wiring (not shown). That is, the support portion 53 </ b> A has a function of electrically connecting a plurality of terminals 363 </ b> A and a plurality of terminals 532 having different arrangements.

Such a plurality of terminals 522 are arranged along the surface of the wiring board 6. Similarly, the plurality of terminals 532 are arranged along the surface of the wiring board 6.
A plurality of corresponding terminals 522 are bonded to the plurality of terminals 62 of the wiring board 6, respectively. Similarly, a plurality of corresponding terminals 532 are joined to the plurality of terminals 63, respectively.

By these joining, the holding member 5A is supported on the wiring board 6 via the plurality of terminals 522 and the plurality of terminals 532, and the plurality of terminals 522 are electrically connected to the plurality of terminals 62, respectively. 532 are electrically connected to the plurality of terminals 63, respectively.
Even with the atomic oscillator 1A according to the second embodiment as described above, the optical axis shift of the light emitting portion 21 is prevented and excellent temperature characteristics are exhibited while achieving downsizing (particularly low profile). Can do.

<Third Embodiment>
Next, a third embodiment of the present invention will be described.
FIG. 9 is a longitudinal sectional view of an atomic oscillator according to the third embodiment of the invention.
The atomic oscillator according to the present embodiment is the same as the atomic oscillator according to the first embodiment described above except that the configuration of the holding member is different.

In the following description, the atomic oscillator according to the third embodiment will be described with a focus on differences from the first embodiment, and description of similar matters will be omitted. In FIG. 9, the same reference numerals are given to the same configurations as those in the above-described embodiment.
An atomic oscillator 1B shown in FIG. 9 includes a first unit 2 (light emission side unit), a second unit 3 (light detection side unit), and a holding member 5B that holds optical components 41, 42, and 43.

The holding member 5 </ b> A houses the gas cell 31, the light emitting part 21, and the light detecting part 32 and constitutes a sealed package. Thereby, the reliability of the atomic oscillator 1B can be improved.
Specifically, the holding member 5B includes a main body 50 having a recess 51B and a lid 54 that seals the recess 51B.

The first package 22, the second package 36, and the plurality of optical components 41, 42, 43 are installed in the recess 51 </ b> B of the main body 50.
Further, a support portion 52 (first support portion) that supports the base body 221 of the first package 22 is provided on one end portion side (left side in FIG. 9) of the main body 50, and the other end portion (FIG. 9) of the main body 50 is provided. A support portion 53 (second support portion) that supports the base 361 of the second package 36 is provided on the right side in the middle.

In addition, a groove 511B for holding the optical component 41, a groove 512B for holding the optical component 42, and a groove 513B for holding the optical component 43 are formed on the wall surface of the recess 51B of the main body 50.
A lid 54 that closes the opening of the recess 51 </ b> B is joined to the main body 50.
The lid 54 has a flat plate shape.

Moreover, it is preferable that the main body 50 and the cover body 54 are airtightly joined. That is, the inside of the holding member 5B is preferably an airtight space. Thereby, the inside of holding member 5B can be made into a decompressed state (state decompressed from atmospheric pressure) or an inert gas enclosure state, and as a result, the characteristic of atomic oscillator 1B can be improved.
The method for joining the main body 50 and the lid 54 is not particularly limited, and for example, brazing, seam welding, energy beam welding (laser welding, electron beam welding, etc.), and the like can be used.

In the present embodiment, the light emitting part 21 is accommodated in the first package 22 and the gas cell 31 and the light detection part 32 are accommodated in the second package 36. However, the inside of the holding member 5B is an airtight space. In this case, the light emitting unit 21, the gas cell 31, and the light detecting unit 32 may be exposed in the holding member 5. For example, the lid 222 of the first package 22 and the lid 362 of the second package 36 may be omitted.
Even with the atomic oscillator 1B according to the third embodiment as described above, it is possible to reduce the optical axis of the light emitting portion 21 and to exhibit excellent temperature characteristics while reducing the size (particularly, the height). Can do.

2. Electronic equipment The atomic oscillator described above can be incorporated into various electronic equipment.
Hereinafter, the electronic apparatus of the present invention will be described.
FIG. 10 is a system configuration schematic diagram when the atomic oscillator of the present invention is used in a positioning system using a GPS satellite.

The positioning system 100 shown in FIG. 10 includes a GPS satellite 200, a base station device 300, and a GPS receiver 400.
The GPS satellite 200 transmits positioning information (GPS signal).
The base station device 300 receives the positioning information from the GPS satellite 200 with high accuracy via, for example, an antenna 301 installed at an electronic reference point (GPS continuous observation station), and the reception device 302 receives the positioning information. And a transmission device 304 that transmits positioning information via the antenna 303.

Here, the receiving device 302 is an electronic device provided with the above-described atomic oscillator 1 of the present invention as its reference frequency oscillation source. Such a receiving apparatus 302 has excellent reliability. In addition, the positioning information received by the receiving device 302 is transmitted by the transmitting device 304 in real time.
The GPS receiver 400 includes a satellite receiver 402 that receives positioning information from the GPS satellite 200 via the antenna 401, and a base station receiver 404 that receives positioning information from the base station device 300 via the antenna 403. Prepare.

FIG. 11 is a schematic configuration diagram showing an example of a clock transmission system using the atomic oscillator of the present invention.
A clock transmission system 500 shown in FIG. 11 matches the clocks of the devices in the time division multiplexing network, and has a redundant configuration of N (Normal) system and E (Emergency) system.

The clock transmission system 500 includes a clock supply device (CSM: Clock Supply Module) 501 and an SDH (Synchronous Digital Hierarchy) device 502 of station A (upper (N system)), and a clock of station B (upper (E system)). A supply device 503 and an SDH device 504, and a clock supply device 505 and SDH devices 506 and 507 of a station C (lower level) are provided.
The clock supply device 501 has an atomic oscillator 1 and generates an N-system clock signal. The atomic oscillator 1 in the clock supply device 501 generates a clock signal in synchronization with higher-precision clock signals from master clocks 508 and 509 including an atomic oscillator using cesium.

The SDH device 502 transmits and receives the main signal based on the clock signal from the clock supply device 501, superimposes the N-system clock signal on the main signal, and transmits it to the lower clock supply device 505.
The clock supply device 503 includes the atomic oscillator 1 and generates an E-system clock signal. The atomic oscillator 1 in the clock supply device 503 generates a clock signal in synchronization with higher-precision clock signals from master clocks 508 and 509 including an atomic oscillator using cesium.

The SDH device 504 transmits and receives the main signal based on the clock signal from the clock supply device 503, superimposes the E-system clock signal on the main signal, and transmits it to the lower clock supply device 505.
The clock supply device 505 receives the clock signals from the clock supply devices 501 and 503, and generates a clock signal in synchronization with the received clock signals.

Here, the clock supply device 505 normally generates a clock signal in synchronization with the N-system clock signal from the clock supply device 501. When an abnormality occurs in the N system, the clock supply device 505 generates a clock signal in synchronization with the E system clock signal from the clock supply device 503. By switching from the N system to the E system in this way, stable clock supply can be ensured and the reliability of the clock path network can be improved.
The SDH device 506 transmits and receives the main signal based on the clock signal from the clock supply device 505. Similarly, the SDH device 507 transmits and receives the main signal based on the clock signal from the clock supply device 505. As a result, the C station apparatus can be synchronized with the A station or B station apparatus.

3. Mobile Object The atomic oscillator of the present invention as described above can be incorporated into various mobile objects. Such a moving body including the atomic oscillator of the present invention has excellent reliability.
Hereinafter, an example of the moving body of the present invention will be described.
FIG. 12 is a perspective view showing a configuration of a moving object (automobile) provided with the atomic oscillator of the present invention.

  A moving body 1500 shown in FIG. 12 has a vehicle body 1501 and four wheels 1502, and is configured to rotate the wheels 1502 by a power source (engine) (not shown) provided in the vehicle body 1501. In such a moving body 1500, the atomic oscillator 1 is built. Based on the oscillation signal from the atomic oscillator 1, for example, a control unit (not shown) controls driving of the power source.

  Note that the electronic apparatus or the moving body of the present invention is not limited to the above-described one, and for example, a mobile phone, a digital still camera, an ink jet type ejection device (for example, an ink jet printer), a personal computer (a mobile personal computer, a laptop type). Personal computers), TVs, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, videophones, security TV monitors , Electronic binoculars, POS terminals, medical devices (eg, electronic thermometers, blood pressure meters, blood glucose meters, electrocardiogram measuring devices, ultrasonic diagnostic devices, electronic endoscopes), fish detectors, various measuring devices, instruments (eg, vehicles, Aircraft, ship Vessels acids), it can be applied to a flight simulator or the like.

As described above, the quantum interference device, the atomic oscillator, the electronic device, and the moving body of the present invention have been described based on the illustrated embodiments, but the present invention is not limited to these.
In addition, the configuration of each part in the present invention can be replaced with an arbitrary configuration that exhibits the same function as the configuration of the above-described embodiment, and an arbitrary configuration can be added.
Moreover, you may make it this invention combine arbitrary structures of each embodiment mentioned above. For example, the atomic oscillator (quantum interference device) of the present invention is configured such that in the above-described embodiment, the configuration on one side in the X-axis direction is the first embodiment and the configuration on the other side is the second embodiment. It may be.

  DESCRIPTION OF SYMBOLS 1 ...... Atomic oscillator 1A ... Atomic oscillator 1B ... Atomic oscillator 2 ... 1st unit 2A ... 1st unit 3 ... 2nd unit 3A ... 2nd unit 5 ... Holding member 5A ... Holding member 5B ··· Holding member 6 ··· Wiring board 7 ··· Control portion 21 · · · Light emitting portion 22 · · · First package (light emitting side package) 22A · · · First package (light emitting side package) 23 · · · Window portion 31 Gas cell 32 Light detector 33 Heater 34 Temperature sensor 35 Coil 36 Second package (light detection side package) 36A Second package (light detection side package) 37 Window Part 41 ... Optical part 42 ... Optical part 43 ... Optical part 50 ... Body 51 ... Recess 51B ... Recess 52 ... Support part 52A ... Support part 53 ... Support part 53A ... Support part 54 ... Cover body 61 ... Through hole 62 ... Terminal 63 ... Terminal 71 ... Excitation light control part 72 ... Temperature control part 73 ... Magnetic field control part 100 ... Positioning system 200 ... Satellite 221 ... Base (light emitting side base) 221A ... Base (light emitting side base) 222 ... Lid (light emitting side lid) 223 ... Terminal 223A ... Terminal 300 ... Base station equipment 301 ... Antenna 302 ... Receiver 303 ... Antenna 304 ... Transmitter 361 ... Base (light detection side base) 361A ... Base (light detection side base) 362 ... Cover (light detection side lid) 363 ... Terminal 363A ... Terminal 400 ... Receiver 401 ... Antenna 402 ... Satellite receiver 403 ... Antenna 404 ... Base station receiver 500 ... Clock transmission system 501 ... Clock supply device 502 ... SDH device 503 ... Clock supply device 504 ... SDH device 505 ... Clock supply device 506 ... SDH device 507 ... SDH device 508 ... Master clock 509 ... Master clock 511 ... groove 511B ... groove 512 ... groove 512B ... groove 513 ... groove 513B ... groove 521 ... through hole 521A ... through hole 522 ... terminal 531 ... through hole 531A ... through hole 532 ... Terminal 1500 ... Moving object 1501 ... Car body 1502 ... Wheel

Claims (8)

A gas cell containing metal atoms;
A light emitting portion that emits light that excites the metal atoms;
A light detection unit for detecting the light that has passed through the metal atom;
A holding member for holding the gas cell, the light emitting portion, and the light detecting portion;
A plurality of terminals protruding from the holding member;
A substrate having a through-hole into which the holding member is inserted and supporting the holding member by being joined to the plurality of terminals and electrically connected to the plurality of terminals; A quantum interference device comprising:   The quantum interference device according to claim 1, wherein the plurality of terminals are arranged along a surface of the substrate. A light emitting side package containing the light emitting portion;
A light detection side package containing the gas cell and the light detection unit,
The quantum interference device according to claim 1, wherein the holding member holds the light emitting side package and the light detecting side package in a non-contact manner. The light emitting side package includes a light emitting side base on which the light emitting unit is installed, and a light emitting side provided with a window portion that covers at least a part of the light emitting unit and is transparent to the light. A lid,
The light detection side package includes a light detection side base on which the gas cell and the light detection unit are installed, and a window portion that covers at least a part of the gas cell and the light detection unit, and is transparent to the light. The quantum interference device according to claim 3, further comprising: a light detection side lid provided.   5. The quantum interference device according to claim 4, wherein the plurality of terminals protrude from at least one of the light emission side base and the light detection side base and pass through the holding member.   An atomic oscillator comprising the quantum interference device according to claim 1.   An electronic apparatus comprising the atomic oscillator according to claim 6.   A moving body comprising the atomic oscillator according to claim 6.

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