JP2014175446A5 - - Google Patents
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- Publication number
- JP2014175446A5 JP2014175446A5 JP2013046299A JP2013046299A JP2014175446A5 JP 2014175446 A5 JP2014175446 A5 JP 2014175446A5 JP 2013046299 A JP2013046299 A JP 2013046299A JP 2013046299 A JP2013046299 A JP 2013046299A JP 2014175446 A5 JP2014175446 A5 JP 2014175446A5
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- JP
- Japan
- Prior art keywords
- atoms
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910044991 metal oxide Inorganic materials 0.000 claims 5
- 150000004706 metal oxides Chemical class 0.000 claims 5
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013046299A JP6199581B2 (ja) | 2013-03-08 | 2013-03-08 | 金属酸化物膜、及び半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013046299A JP6199581B2 (ja) | 2013-03-08 | 2013-03-08 | 金属酸化物膜、及び半導体装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017160954A Division JP6392955B2 (ja) | 2017-08-24 | 2017-08-24 | 金属酸化物膜 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014175446A JP2014175446A (ja) | 2014-09-22 |
| JP2014175446A5 true JP2014175446A5 (enrdf_load_stackoverflow) | 2016-03-31 |
| JP6199581B2 JP6199581B2 (ja) | 2017-09-20 |
Family
ID=51696394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013046299A Expired - Fee Related JP6199581B2 (ja) | 2013-03-08 | 2013-03-08 | 金属酸化物膜、及び半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6199581B2 (enrdf_load_stackoverflow) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017037564A1 (en) * | 2015-08-28 | 2017-03-09 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, transistor, and semiconductor device |
| WO2017168283A1 (ja) | 2016-04-01 | 2017-10-05 | 株式会社半導体エネルギー研究所 | 複合酸化物半導体、当該複合酸化物半導体を用いた半導体装置、当該半導体装置を有する表示装置 |
| US10388738B2 (en) * | 2016-04-01 | 2019-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Composite oxide semiconductor and method for manufacturing the same |
| WO2017199130A1 (en) * | 2016-05-19 | 2017-11-23 | Semiconductor Energy Laboratory Co., Ltd. | Composite oxide semiconductor and transistor |
| US10043659B2 (en) * | 2016-05-20 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device or display device including the same |
| JP6800092B2 (ja) * | 2016-06-24 | 2020-12-16 | 株式会社半導体エネルギー研究所 | トランジスタ及び表示装置 |
| US20170373195A1 (en) * | 2016-06-27 | 2017-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
| US20170373194A1 (en) * | 2016-06-27 | 2017-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Transistor |
| TW202224189A (zh) * | 2016-10-21 | 2022-06-16 | 日商半導體能源研究所股份有限公司 | 複合氧化物及電晶體 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102484139B (zh) * | 2009-10-08 | 2016-07-06 | 株式会社半导体能源研究所 | 氧化物半导体层及半导体装置 |
| KR101995082B1 (ko) * | 2010-12-03 | 2019-07-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막 및 반도체 장치 |
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2013
- 2013-03-08 JP JP2013046299A patent/JP6199581B2/ja not_active Expired - Fee Related