JP2014165267A5 - - Google Patents
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- Publication number
- JP2014165267A5 JP2014165267A5 JP2013033473A JP2013033473A JP2014165267A5 JP 2014165267 A5 JP2014165267 A5 JP 2014165267A5 JP 2013033473 A JP2013033473 A JP 2013033473A JP 2013033473 A JP2013033473 A JP 2013033473A JP 2014165267 A5 JP2014165267 A5 JP 2014165267A5
- Authority
- JP
- Japan
- Prior art keywords
- dam
- adhesive layer
- bonding surface
- composite
- cured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001070 adhesive Effects 0.000 claims description 11
- 239000000853 adhesive Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 4
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013033473A JP6110159B2 (ja) | 2013-02-22 | 2013-02-22 | 複合部材及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013033473A JP6110159B2 (ja) | 2013-02-22 | 2013-02-22 | 複合部材及びその製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014165267A JP2014165267A (ja) | 2014-09-08 |
JP2014165267A5 true JP2014165267A5 (es) | 2016-03-03 |
JP6110159B2 JP6110159B2 (ja) | 2017-04-05 |
Family
ID=51615631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013033473A Active JP6110159B2 (ja) | 2013-02-22 | 2013-02-22 | 複合部材及びその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6110159B2 (es) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6463938B2 (ja) | 2014-10-08 | 2019-02-06 | 日本特殊陶業株式会社 | 静電チャック |
US10688750B2 (en) | 2017-10-03 | 2020-06-23 | Applied Materials, Inc. | Bonding structure of E chuck to aluminum base configuration |
KR102176064B1 (ko) * | 2017-11-10 | 2020-11-09 | 주식회사 아이앤티 | 정전척 제조방법 및 정전척 |
US10847402B2 (en) | 2018-04-02 | 2020-11-24 | Applied Materials, Inc. | Bond protection around porous plugs |
US11456161B2 (en) | 2018-06-04 | 2022-09-27 | Applied Materials, Inc. | Substrate support pedestal |
JP7210192B2 (ja) * | 2018-08-30 | 2023-01-23 | 日本特殊陶業株式会社 | 保持装置の製造方法 |
CN113853672A (zh) | 2019-05-24 | 2021-12-28 | 应用材料公司 | 具有改良的接合层保护的基板支撑载体 |
TWI734377B (zh) | 2020-02-11 | 2021-07-21 | 光陽工業股份有限公司 | 機車 |
KR102341865B1 (ko) * | 2021-05-13 | 2021-12-21 | 고광노 | 수리가 용이한 정전척 |
KR102418014B1 (ko) * | 2021-08-27 | 2022-07-07 | 주식회사 동탄이엔지 | 홀이 구비되는 필름형 본딩층을 포함하는 정전척 및 정전척의 제조 방법 |
KR102592339B1 (ko) * | 2022-08-09 | 2023-10-23 | 주식회사 동탄이엔지 | 다공성 필터가 구비되는 정전척의 제조 방법 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1065047A (ja) * | 1996-08-20 | 1998-03-06 | Tokuyama Corp | 半導体素子搭載用パッケージの製造方法 |
JP5143184B2 (ja) * | 2010-05-07 | 2013-02-13 | 日本碍子株式会社 | ウエハー載置装置の製造方法 |
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2013
- 2013-02-22 JP JP2013033473A patent/JP6110159B2/ja active Active
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