JP2014163779A - Environment resistance test method - Google Patents
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Abstract
Description
本発明は、電気部品、電子部品等の信頼性評価試験及び耐環境試験で用いる蒸気加圧式の環境試験装置に関する。 The present invention relates to a steam pressurization type environmental test apparatus used in reliability evaluation tests and environmental resistance tests of electrical parts, electronic parts and the like.
電気部品、電子部品やこれらの部品で組み立てられた製品の信頼性評価試験及び耐環境試験を行うために、温度と湿度が過酷な環境下に前記部品等を晒して、動作確認を実施したり寿命を推測する目的で、各種の環境試験装置が使用されている。この種の環境試験装置として、例えば、高度加速寿命試験装置（通称ＨＡＳＴ装置）や、例えば、85℃85％ＲＨなどの高温高湿の環境ができる環境試験装置がある。
この高度加速寿命試験装置では、温度と湿度で制御された大気圧以上の試験環境を試験槽内に形成することが多い。この場合、空気は排出され試験室内は水蒸気のみとなる。このときの湿度の定義は加湿水温度と試験室内温度のそれぞれの飽和蒸気圧の比としている。
相対湿度％＝（加湿水温度の飽和水蒸気圧)/(試験室内温度の飽和水蒸気圧)×100 ・・・(1)
この高度加速寿命試験装置には一槽式と二槽式の2タイプが知られている。一槽式は、一つの圧力容器内に水蒸気を発生する加湿水部と試験室があり、加湿水部からの水蒸気を加熱ヒータで再加熱し送風機により攪拌されるタイプである。二槽式は、一槽式の加湿水部と試験室を分離して、水蒸気を発生する加湿水槽と試験室槽が独立して接続されており、加湿水槽で発生した水蒸気を試験室槽に導入し加熱ヒータで再加熱するタイプである。
通常、高度加速寿命試験装置は、25℃前後の室温雰囲気に置かれ、圧力容器内は水の沸点以上つまり100℃以上で使用されるため、この温度差による圧力容器の外壁からの伝熱による自然放熱を利用して放冷するのが一般的で、冷却器等の冷却装置を具備していない。
この高度加速寿命試験装置では、圧力容器内の空気を排出し水蒸気で充満したのち気密にし、加湿水温度を上昇して加湿水温度に対応した飽和水蒸気圧となるよう圧力容器内の圧力を上げるとともに、試験室内の飽和水蒸気を加熱器で加熱することで、前記(1)式に示した相対湿度％の環境を作り出す。
一方、通常の大気圧環境下で利用され高温高湿の環境ができる環境試験装置は、試験室内が空気と水蒸気で混合されている。このときの湿度の定義は、試験室内に配置されている乾球温度と布等で覆われ水で湿らせた湿球温度の計測値から、よく知られているペルンターの式やスプルングの式などの関係補正式で相対湿度を求めて、試験室内の湿度を制御することが知られている。
相対湿度％＝（補正式で求める水蒸気圧)/(試験室内温度の飽和水蒸気圧)×100 ・・・(2)
この大気圧環境下で利用される環境試験装置の試験室の概略構造は図示しないが、加湿器、冷却器、加熱器、送風機で構成されていることが知られている。この環境試験装置は、冷却器による気体の冷却と水蒸気の除湿により低温と低湿状態を作りながら、加熱器による気体の再加熱と加湿器による加湿をするとともに、試験室の気体を送風機で循環しながら温湿度制御をすることが知られている。
また、室温より十分に高い、例えば、85℃85％ＲＨなどの高温高湿で使用する環境試験装置では、低温と低湿状態を作る冷却器を搭載しなくても、環境試験装置が常温常湿の大気圧下の雰囲気内に設置されておれば、外壁からの伝熱による自然放熱を利用して放冷し試験室内を温湿度制御することや、試験室内の高温高湿気体を部分的に排出し、常温常湿の気体を順次取り入れることで、試験室内を温湿度制御することが知られている。
In order to perform reliability evaluation tests and environmental resistance tests of electrical parts, electronic parts and products assembled with these parts, the above parts etc. are exposed to environments with severe temperature and humidity, and operation check is performed. Various environmental test devices are used for the purpose of estimating the service life. Examples of this type of environmental test apparatus include a highly accelerated life test apparatus (commonly referred to as a HAST apparatus) and an environmental test apparatus capable of creating a high-temperature and high-humidity environment such as 85 ° C. and 85% RH.
In this highly accelerated life test apparatus, a test environment of atmospheric pressure or higher controlled by temperature and humidity is often formed in the test tank. In this case, air is discharged and only the water vapor is present in the test chamber. The definition of humidity at this time is the ratio of the saturated vapor pressure between the humidified water temperature and the test chamber temperature.
Relative humidity% = (saturated water vapor pressure at humidified water temperature) / (saturated water vapor pressure at laboratory temperature) x 100 (1)
There are two types of high-acceleration life test equipment, one tank type and two tank type. The one-tank type is a type in which there are a humidified water section and a test chamber that generate water vapor in one pressure vessel, and the water vapor from the humidified water section is reheated by a heater and stirred by a blower. In the two-tank type, the humidifying water tank and the test chamber are separated from each other, and the humidifying water tank and the test chamber tank for generating water vapor are connected independently, and the water vapor generated in the humidifying water tank is supplied to the test chamber tank. This type is introduced and reheated with a heater.
Normally, the advanced accelerated life test equipment is placed in a room temperature atmosphere of around 25 ° C, and the pressure vessel is used at a temperature above the boiling point of water, that is, at 100 ° C or more, so heat transfer from the outer wall of the pressure vessel due to this temperature difference It is common to cool using natural heat radiation, and it does not have a cooling device such as a cooler.
In this advanced accelerated life test device, the air in the pressure vessel is discharged and filled with water vapor, and then airtight, and the pressure in the pressure vessel is increased to increase the humidified water temperature to the saturated water vapor pressure corresponding to the humidified water temperature. At the same time, the saturated water vapor in the test chamber is heated with a heater, thereby creating an environment of relative humidity% shown in the equation (1).
On the other hand, in an environmental test apparatus that can be used in a normal atmospheric pressure environment and can create a high-temperature and high-humidity environment, the test chamber is mixed with air and water vapor. The definition of humidity at this time is based on the measured values of the dry bulb temperature placed in the test chamber and the wet bulb temperature covered with cloth or the like and moistened with water. It is known that the relative humidity is obtained by the relationship correction formula, and the humidity in the test chamber is controlled.
Relative humidity% = (water vapor pressure determined by the correction formula) / (saturated water vapor pressure at the laboratory temperature) x 100 (2)
Although the schematic structure of the test chamber of the environmental test apparatus used under the atmospheric pressure environment is not shown, it is known that the test chamber is composed of a humidifier, a cooler, a heater, and a blower. This environmental test equipment reheats the gas with a heater and humidifies with a humidifier while creating a low temperature and low humidity state by cooling the gas with a cooler and dehumidifying water vapor, and circulates the gas in the test chamber with a blower. It is known to control temperature and humidity.
In addition, environmental test equipment used at high temperatures and high humidity, such as 85 ° C and 85% RH, which is sufficiently higher than room temperature, can be used at room temperature and humidity even without a cooler that creates low temperature and low humidity conditions. If it is installed in an atmosphere under atmospheric pressure, it can be cooled by using natural heat dissipation by heat transfer from the outer wall to control the temperature and humidity in the test chamber, or the high temperature and humidity gas in the test chamber can be partially It is known to control the temperature and humidity in the test chamber by exhausting and sequentially taking in gas at normal temperature and humidity.
普通、電気部品、電子部品等が使用される環境の空気には、窒素、酸素などの気体のほか、水蒸気を含んでいる。試料体として電気部品、電子部品等の信頼性評価試験及び耐環境試験をするとき、85℃85％ＲＨなどの高温高湿用環境試験装置や高度加速寿命試験装置を利用するが、大気圧環境で試験する高温高湿用環境試験装置の試験室内の気体は水蒸気と空気の混合状態であるのに対して、大気圧以上の環境で試験する高度加速寿命試験装置の試験室内の気体は加熱された水蒸気のみであり、これらの試験結果に空気の存在の有無の違いを考慮する必要があるという問題があった。
本発明が解決しようとする次の課題は、高度加速寿命試験は温度を上昇する過程で、圧力容器内の空気を排出するため加湿水を100℃の沸点で数分間沸騰させて水蒸気を多量に発生せて、圧力容器内の空気を排出する工程が必要であるという問題と、水蒸気が一時的に多量に発生するため、試験室内の試料体や内槽を結露させないように加湿水温度より十分に高い温度に温度差をつけて加熱しておく必要があるという問題があった。
本発明が解決しようとする次の課題は、不飽和加圧水蒸気試験をする高度加速寿命試験装置を用いて100℃以上の温度で湿度100％の環境に試料体を晒して信頼性評価試験及び耐環境試験をする場合、加湿水の沸点と飽和水蒸気圧が等しいため、試験室内が飽和水蒸気状態になり試験室内の試料体が結露してしまうことがあるという問題があった。
Usually, air in an environment where electric parts, electronic parts, etc. are used contains water vapor in addition to gases such as nitrogen and oxygen. When performing reliability evaluation tests and environmental resistance tests on electrical parts, electronic parts, etc. as specimens, use high-temperature and high-humidity environment test equipment and highly accelerated life test equipment such as 85 ° C and 85% RH. The gas in the test chamber of the high-temperature, high-humidity environmental test equipment tested in the above is a mixture of water vapor and air, whereas the gas in the test room of the advanced accelerated life test equipment tested in an environment of atmospheric pressure or higher is heated. There was a problem that it was necessary to consider the difference in the presence or absence of air in these test results.
The next problem to be solved by the present invention is that the advanced accelerated life test is a process in which the temperature rises.In order to discharge the air in the pressure vessel, the humidified water is boiled at a boiling point of 100 ° C. for several minutes to increase the amount of water vapor. The problem that the process of discharging and discharging the air in the pressure vessel is necessary, and because a large amount of water vapor is temporarily generated, it is sufficiently higher than the humidified water temperature so as not to condense the sample body and inner tank in the test chamber However, there is a problem that it is necessary to heat a high temperature with a temperature difference.
The next problem to be solved by the present invention is that the sample body is exposed to an environment with a humidity of 100% at a temperature of 100 ° C. or higher using a highly accelerated life test apparatus that performs an unsaturated pressurized steam test. When conducting an environmental test, the boiling point of the humidified water and the saturated water vapor pressure are equal to each other, so that there is a problem that the test chamber is in a saturated water vapor state and the sample body in the test chamber may be condensed.
本発明の第1の課題を解決するための解決手段は、空気を排除して大気圧以上の水蒸気のみで行われる高度加速寿命試験装置（通称ＨＡＳＴ装置）とは異なり、水蒸気と空気の混合状態で試験をするために、内部に加湿水を貯留するとともに試料体を設置可能な試験室を備えた密閉可能な圧力容器で構成されている環境試験装置において、この圧力容器内には気体の温度を計測する乾球温度センサと加湿水温度センサあるいは湿球温度センサか、乾球温度センサと加湿水温度センサと湿球温度センサ両方が備えられていて、気体を加熱制御する為の加熱ヒータ、加湿水を加熱制御する為の加湿水加熱ヒータを具備して、試験室内の気体の温度と湿度を制御して試料体を晒し試験するとき、試験室内の気体が空気と加湿水から蒸発する水蒸気の混合状態で、温湿度制御されているときに圧力容器を密閉し、加湿水を沸騰することなく、100℃以上の温度の環境で前記試験室内の湿度を制御する制御方法で、100℃以上の混合気体に晒した試料体の信頼性評価試験及び耐環境試験をする環境試験方法を提供することにある。
請求項2の本発明は、請求項1に記載の環境試験方法であって、試験室内の気体が空気と加湿水から蒸発する水蒸気の混合状態である温度85℃湿度85％のときに圧力容器を密閉し、気体と加湿水を加温して、温度100℃湿度85％、温度110℃湿度85％、温度120℃湿度85％、温度130℃湿度85％、温度140℃湿度85％、温度150℃湿度85％、温度160℃湿度85％のどれか1つ環境か、複数を組み合わせた環境で試料体を晒した後、温度85℃湿度85％に降下し圧力容器を開放して大気圧に戻し、信頼性評価試験及び耐環境試験を目的とする高温高湿試験と高温高湿加速寿命試験を関連させた環境試験方法を提供することにある。
請求項3の本発明を解決するための解決手段は、請求項1に記載の環境試験方法であって、試験室内の気体が空気と加湿水から蒸発する水蒸気の混合状態である温度85℃湿度85％のときに圧力容器を密閉し、気体と加湿水を沸騰することなく加温して、100℃以上の温度で湿度100％の環境で試料体を晒した不飽和加圧水蒸気による高温高湿加速寿命試験をする環境試験方法を提供することにある。
A solution means for solving the first problem of the present invention is a mixed state of water vapor and air, unlike a highly accelerated life test apparatus (commonly referred to as a HAST apparatus) in which only air vapor is excluded and air is excluded. In an environmental test apparatus configured with a sealable pressure vessel having a test chamber in which humidified water is stored and a sample body can be installed, the temperature of the gas is contained in the pressure vessel. A dry bulb temperature sensor and a humidified water temperature sensor or a wet bulb temperature sensor, a dry bulb temperature sensor, a humidified water temperature sensor and a wet bulb temperature sensor, and a heater for controlling the heating of the gas, Water vapor that evaporates from the air and humidified water when the sample body is exposed and tested by controlling the temperature and humidity of the gas in the test chamber with a humidifying water heater for controlling the heating of the humidified water Mix of When the temperature and humidity are controlled in a combined state, the pressure vessel is sealed, and the humidity in the test chamber is controlled in an environment at a temperature of 100 ° C or higher without boiling the humidified water. An object of the present invention is to provide an environmental test method for performing a reliability evaluation test and an environmental resistance test on a sample body exposed to a mixed gas.
The present invention of claim 2 is the environmental test method according to claim 1, wherein the pressure vessel is at a temperature of 85 ° C. and a humidity of 85%, in which the gas in the test chamber is a mixed state of water vapor evaporated from the humidified water. Sealed and heated with gas and humidified water, temperature 100 ℃ humidity 85%, temperature 110 ℃ humidity 85%, temperature 120 ℃ humidity 85%, temperature 130 ℃ humidity 85%, temperature 140 ℃ humidity 85%, temperature After exposing the sample body to one of 150 ° C humidity 85%, temperature 160 ° C humidity 85%, or a combination of multiple environments, the temperature drops to 85 ° C humidity 85% and the pressure vessel is opened to atmospheric pressure It is to provide an environmental test method in which a high-temperature and high-humidity test and a high-temperature and high-humidity accelerated life test for the purpose of reliability evaluation test and environmental resistance test are related.
The means for solving the present invention of claim 3 is the environmental test method according to claim 1, wherein the temperature in the test chamber is a mixed state of water vapor that evaporates from the humidified water and a temperature of 85 ° C humidity When the pressure is 85%, the pressure vessel is sealed, the gas and humidified water are heated without boiling, and the sample body is exposed to high temperature and humidity at a temperature of 100 ° C or higher in a 100% humidity environment. It is to provide an environmental test method for performing an accelerated life test.
従来の高度加速寿命試験（通称ＨＡＳＴ装置）は、加湿水を沸点の100℃で数分間沸騰させて圧力容器内を水蒸気で充満させ、圧力容器内の空気を排出する工程を必要とした。しかし、本発明は、試験室内の気体を加湿水沸点前の水蒸気と空気の混合状態で、温湿度制御されているときに圧力容器を密閉することで、圧力容器内の気体の圧力は空気圧と水蒸気圧の合計した圧力となる。密閉された圧力容器内の圧力は常に加湿水の飽和水蒸気圧より空気圧だけ高くなるため、加湿水は沸騰しない。従って、本発明は圧力容器内の空気を排出するための加湿水を数分間沸騰する工程を不要とし、その工程で消費する気化熱量を削減する利点がある。
従来の大気圧環境で試験する高温高湿用環境試験装置と同様に、本発明は、試験室内の気体を水蒸気と空気の混合状態で温湿度制御する。従って、本発明は、大気圧以上の、空気のある湿度制御試験の試験結果として扱うことができる。
本発明は、前記のように、密閉された圧力容器内の試験室内は水蒸気と空気の混合状態の気体である。100℃以上の温度で湿度100％の湿度制御をするときも、試験室内は飽加圧和水蒸気状態にならず、空気と水蒸気を加温制御するために不飽和加圧水蒸気状態となる。従って、本発明は、試験室内の試料体が結露することなく湿度制御できる。
本発明を実施した環境試験装置は、1台の同じ環境試験装置で高温高湿試験と高温高湿加速寿命試験ができる利点がある。
The conventional advanced accelerated life test (commonly referred to as HAST apparatus) required a step of boiling humidified water at a boiling point of 100 ° C. for several minutes, filling the pressure vessel with water vapor, and discharging the air in the pressure vessel. However, the present invention seals the pressure vessel when the temperature in the test chamber is a mixture of steam and air before the boiling point of humidified water and the temperature and humidity are controlled. This is the total pressure of the water vapor pressure. Since the pressure in the sealed pressure vessel is always higher than the saturated water vapor pressure of the humidified water by the air pressure, the humidified water does not boil. Therefore, the present invention eliminates the need for boiling the humidified water for discharging the air in the pressure vessel for several minutes, and has the advantage of reducing the amount of heat of vaporization consumed in that step.
Similar to a conventional high-temperature and high-humidity environment test apparatus for testing in an atmospheric pressure environment, the present invention controls the temperature and humidity of the gas in the test chamber in a mixed state of water vapor and air. Therefore, the present invention can be handled as a test result of a humidity control test with air at atmospheric pressure or higher.
In the present invention, as described above, the test chamber in the sealed pressure vessel is a gas in a mixed state of water vapor and air. Even when the humidity is controlled to 100% at a temperature of 100 ° C. or higher, the test chamber is not in a saturated pressurized water vapor state, but is in an unsaturated pressurized water vapor state to control the heating of air and water vapor. Therefore, according to the present invention, the humidity can be controlled without condensation on the sample body in the test chamber.
The environmental test apparatus embodying the present invention has an advantage that a high temperature and high humidity test and a high temperature and high humidity accelerated life test can be performed with the same environmental test apparatus.
以下、本発明の実施の形態を説明する。 Embodiments of the present invention will be described below.
図１は本発明の環境試験方法を実施して高温高湿試験と高温高湿加速寿命試験をする環境試験装置の簡略断面図及び簡略構成図である。
図1に示す簡略断面図及び簡略構成図の高温高湿試験と高温高湿加速寿命試験をする環境試験装置1は、一端を開口した圧力容器2と開口部を開閉できる開閉蓋3を備えている。
圧力容器2の内部には圧力容器2の開口側と同一側が開放された内槽4が設置され、この内槽4の内側に試験室5が構成されている。この試験室5には図示しないが棚を設置して試料体13を載置できるよう構成されている。圧力容器2の内部の内槽4の外側の下部には加湿水9が貯留されている。この加湿水9に浸漬されるように加湿水9を加熱する加湿水加熱ヒータ7と加湿水9の温度を計測する加湿水温度センサ12が設けられている。
前記圧力容器2内の試験室5には気体の温度と湿度を計測するために乾球温度センサ10と湿球温度センサ11が設けられている。湿球温度センサ11の球部には加湿水9を毛細管現象により吸い上げることができる繊維体、例えばガーゼが被せられており、この繊維体の下端は加湿水9に浸漬するよう構成されている。また、前記内槽4の開口側の反対側には貫通口が形成されており、内槽4と圧力容器2の間に設置された加熱ヒータ6で気体を加熱するよう構成されている。気体は攪拌器8で循環させることができるようになっている。
更に、圧力容器2には圧力容器2内を気密にする制御弁14が備えられている。また、この図1の環境試験装置1には図示しないが、温度湿度時間を設定し制御するための制御装置が備えられており、この制御装置で環境試験装置1を制御する。
湿度制御は湿球温度センサ11の計測温度に基づく湿度制御と、加湿水温度センサ12の計測温度に基づく湿度制御を選択して制御する。湿球温度センサ11の計測温度に基づく湿度制御は従来の恒温恒湿槽で使用され、加湿水温度センサ12の計測温度に基づく湿度制御は高度加速寿命試験装置で使用されている。試験開始前に基準となる湿球温度センサを湿球温度センサ11か加湿水温度センサ12かを選択する。
以上の構成において、制御弁14を開いた状態で、試料体13を載置して制御を開始する。実施例1として、請求項2の設定温度85℃→130℃、設定湿度85％を実施する。
設定温度85℃、設定湿度85％まで昇温する。設定温度85℃、設定湿度85％の高温高湿域に到達し安定するよう温湿度制御する。湿度制御するための湿球温度センサは加湿水温度センサ12を選択して実施する。
試験室5内の気体の温度に対応する乾球温度センサ10の温度は85℃、加湿水温度に対応する加湿水温度センサ12の温度は約80.9℃（飽和水蒸気圧0.049133ＭＰａ換算値、日本機械学会蒸気表より）である。また、湿球温度センサ11の温度は約81.1℃（弱風のペルンター式関係補正式による）である。大気圧を0.101325ＭＰａとしたとき、試験室5の空気圧は0.052192ＭＰａであり、水蒸気圧と空気圧はほぼ同じ割合で存在し、空気圧は大気圧の半分で約52％ある。高温高湿域での湿球温度センサ11の温度と加湿水温度センサ12の温度の温度差は僅かである。
次に、制御弁14を閉じて圧力容器2を気密したのち、湿度85％を保持しながら加温して試験室5の環境を設定温度130℃、設定湿度85％に到達し安定するように制御する。気密してから加温するので加湿水は沸騰することなく上昇するので省エネを図ることができる。
試験室内温度に対応する乾球温度センサ10の温度は130℃、加湿水温度に対応する加湿水温度センサ12の温度は約124.65℃（飽和水蒸気圧0.229613ＭＰａ換算値、日本機械学会蒸気表より）である。また、湿球温度センサ11の温度は約125.8℃であった。
圧力容器2内の空気分圧は0.058749ＭＰａで、水蒸気圧と空気圧の合計は0.288362ＭＰａである。空気圧は全圧力の約20％で残りは水蒸気圧である。
所定の時間経過して試料体13を晒したあと、湿度85％を保持しながら降下して試験室5の環境を設定温度85℃、設定湿度85％に到達するように制御する。
設定温度85℃、設定湿度85％に到達し圧力容器2内の圧力が、図示しない圧力検知器が大気圧値と同じになったら、制御弁14を開いて大気と同圧にする。その後、試料体13が結露しないように制御して取り出し可能な温度まで降下する。
FIG. 1 is a simplified cross-sectional view and a simplified configuration diagram of an environmental test apparatus for performing a high-temperature and high-humidity test and a high-temperature and high-humidity accelerated life test by implementing the environmental test method of the present invention.
The environmental test apparatus 1 for performing the high-temperature and high-humidity test and the high-temperature and high-humidity accelerated life test shown in the simplified cross-sectional view and simplified configuration diagram shown in FIG. 1 includes a pressure vessel 2 having one end opened and an opening / closing lid 3 capable of opening and closing the opening. Yes.
Inside the pressure vessel 2, an inner tank 4 that is open on the same side as the opening side of the pressure vessel 2 is installed, and a test chamber 5 is configured inside the inner vessel 4. Although not shown, the test chamber 5 is configured so that a sample body 13 can be placed by installing a shelf. The humidified water 9 is stored in the lower part outside the inner tank 4 inside the pressure vessel 2. A humidifying water heater 7 for heating the humidifying water 9 so as to be immersed in the humidifying water 9 and a humidifying water temperature sensor 12 for measuring the temperature of the humidifying water 9 are provided.
The test chamber 5 in the pressure vessel 2 is provided with a dry bulb temperature sensor 10 and a wet bulb temperature sensor 11 for measuring the temperature and humidity of the gas. The bulb portion of the wet bulb temperature sensor 11 is covered with a fibrous body that can suck up the humidified water 9 by capillary action, for example, gauze, and the lower end of the fibrous body is configured to be immersed in the humidified water 9. Further, a through-hole is formed on the side opposite to the opening side of the inner tank 4, and the gas is heated by the heater 6 installed between the inner tank 4 and the pressure vessel 2. The gas can be circulated by the stirrer 8.
Further, the pressure vessel 2 is provided with a control valve 14 for making the inside of the pressure vessel 2 airtight. Although not shown, the environmental test apparatus 1 in FIG. 1 includes a control device for setting and controlling the temperature and humidity time, and the environmental test apparatus 1 is controlled by this control device.
The humidity control is performed by selecting humidity control based on the measured temperature of the wet bulb temperature sensor 11 and humidity control based on the measured temperature of the humidified water temperature sensor 12. Humidity control based on the measured temperature of the wet bulb temperature sensor 11 is used in a conventional constant temperature and humidity chamber, and humidity control based on the measured temperature of the humidified water temperature sensor 12 is used in an advanced accelerated life test apparatus. Before the test is started, the wet bulb temperature sensor 11 or the humidified water temperature sensor 12 is selected as a reference wet bulb temperature sensor.
In the above configuration, with the control valve 14 opened, the sample body 13 is placed and control is started. As Example 1, a setting temperature of 85 ° C. → 130 ° C. and a setting humidity of 85% according to claim 2 is carried out.
The temperature rises to a set temperature of 85 ° C and a set humidity of 85%. Temperature and humidity control is performed so that the temperature reaches a high-temperature and high-humidity range with a set temperature of 85 ℃ and a set humidity of 85%. The wet bulb temperature sensor for controlling the humidity is selected by selecting the humidified water temperature sensor 12.
The temperature of the dry bulb temperature sensor 10 corresponding to the temperature of the gas in the test chamber 5 is 85 ° C., and the temperature of the humidified water temperature sensor 12 corresponding to the humidified water temperature is about 80.9 ° C. (saturated water vapor pressure 0.049133 MPa conversion value, Nippon Machinery) From the Society's Steam Table). Further, the temperature of the wet bulb temperature sensor 11 is about 81.1 ° C. (according to Pernter type correction formula for weak wind). When the atmospheric pressure is set to 0.103325 MPa, the air pressure in the test chamber 5 is 0.052192 MPa, the water vapor pressure and the air pressure are present at approximately the same ratio, and the air pressure is approximately 52%, which is half of the atmospheric pressure. The temperature difference between the temperature of the wet bulb temperature sensor 11 and the temperature of the humidified water temperature sensor 12 in a high temperature and high humidity region is slight.
Next, after closing the control valve 14 and sealing the pressure vessel 2, it is heated while maintaining a humidity of 85%, so that the environment of the test chamber 5 reaches a set temperature of 130 ° C. and a set humidity of 85% so as to be stable. Control. Since it heats after airtight, the humidified water rises without boiling, thus saving energy.
The temperature of the dry bulb temperature sensor 10 corresponding to the test room temperature is 130 ° C, and the temperature of the humidified water temperature sensor 12 corresponding to the humidified water temperature is about 124.65 ° C (saturated water vapor pressure 0.229613 MPa conversion value, from the Japan Society of Mechanical Engineers steam table) It is. The temperature of the wet bulb temperature sensor 11 was about 125.8 ° C.
The partial pressure of air in the pressure vessel 2 is 0.058749 MPa, and the sum of water vapor pressure and air pressure is 0.288362 MPa. The air pressure is about 20% of the total pressure and the rest is the water vapor pressure.
After the sample body 13 is exposed after a predetermined time has elapsed, the sample body 13 is lowered while maintaining a humidity of 85%, and the environment of the test chamber 5 is controlled to reach a set temperature of 85 ° C. and a set humidity of 85%.
When the set temperature reaches 85 ° C. and the set humidity reaches 85% and the pressure in the pressure vessel 2 becomes equal to the atmospheric pressure value by a pressure detector (not shown), the control valve 14 is opened to make the pressure the same as the atmosphere. Thereafter, the temperature of the sample body 13 is lowered to a temperature at which the sample body 13 can be taken out by controlling so as not to condense.
実施例2として、請求項3の設定温度85℃→130℃、設定湿度85％→100％を実施する。
実施例1と同様に、設定温度85℃、設定湿度85％まで昇温する。次に、制御弁14を閉じて圧力容器2を気密したのち、加温して試験室5の環境を設定温度130℃、設定湿度100％に到達し安定するように制御する。気密してから加温するので加湿水は沸騰することなく上昇するので省エネを図ることができる。
試験室内温度に対応する乾球温度センサ10の温度は130℃、加湿水温度に対応する加湿水温度センサ12の温度は130℃（飽和水蒸気圧0.270133ＭＰａ換算値、日本機械学会蒸気表より）である。また、湿球温度センサ11の温度は約130℃であった。圧力容器2内の空気分圧は0.058749ＭＰａで、水蒸気圧と空気圧の合計は0.328882ＭＰａである。空気圧は全圧力の約18％で残りは水蒸気圧である。乾球温度センサ10の温度が加湿水温度センサ12の温度より等しいか高いように温度制御することで、試験室内の気体は飽加圧和水蒸気状態にならず、空気と水蒸気の混合状態で不飽和加圧水蒸気状態となる。
As Example 2, a setting temperature of 85 ° C. → 130 ° C. and a setting humidity of 85% → 100% according to claim 3 is performed.
As in Example 1, the temperature is raised to a set temperature of 85 ° C. and a set humidity of 85%. Next, after the control valve 14 is closed and the pressure vessel 2 is airtight, it is heated and controlled so that the environment of the test chamber 5 reaches a set temperature of 130 ° C. and a set humidity of 100% and is stabilized. Since it heats after airtight, the humidified water rises without boiling, thus saving energy.
The temperature of the dry bulb temperature sensor 10 corresponding to the test room temperature is 130 ° C, and the temperature of the humidified water temperature sensor 12 corresponding to the humidified water temperature is 130 ° C (saturated water vapor pressure 0.270133 MPa conversion value, from the Japan Society of Mechanical Engineers steam table) is there. The temperature of the wet bulb temperature sensor 11 was about 130 ° C. The partial pressure of air in the pressure vessel 2 is 0.058749 MPa, and the sum of water vapor pressure and air pressure is 0.328882 MPa. The air pressure is about 18% of the total pressure, and the rest is the water vapor pressure. By controlling the temperature so that the temperature of the dry bulb temperature sensor 10 is equal to or higher than the temperature of the humidifying water temperature sensor 12, the gas in the test chamber is not in a saturated and pressurized water vapor state, but is in a mixed state of air and water vapor. It becomes a saturated pressurized steam state.
本発明の環境試験方法の高温高湿加速寿命試験は、従来の空気を除外して水蒸気のみの高度加速寿命試験と異なり、水蒸気と空気の混合状態の温度と湿度が過酷な試験環境を実現できる。このことは、通常酸素を含んだ空気の雰囲気内で使用する部品の耐環境試験として、現在利用されている高温高湿試験をより過酷にした高温高湿加速寿命試験ができる。
また、本発明の環境試験方法を可能にした環境試験装置は、1台の同じ環境試験装置で従来の85℃85％の高温高湿試験と高温高湿加速寿命試験ができる利点があり、電気部品、電子部品等の信頼性評価試験及び耐環境試験をする産業上で有利に利用することができる。
The high-temperature, high-humidity accelerated life test of the environmental test method of the present invention can realize a test environment where the temperature and humidity of the mixed state of water vapor and air are harsh, unlike the advanced accelerated life test using only water vapor, excluding conventional air. . This is a high temperature and high humidity accelerated life test that is a more severe high temperature and high humidity test that is currently used as an environmental resistance test for components that are normally used in an air atmosphere containing oxygen.
In addition, the environmental test apparatus that enables the environmental test method of the present invention has the advantage that the same high-temperature and high-humidity test at 85 ° C and 85% and the high-temperature and high-humidity accelerated life test can be performed with the same environmental test apparatus. It can be advantageously used in the industry for performing reliability evaluation tests and environmental resistance tests on parts, electronic parts and the like.
1 環境試験装置
2 圧力容器
3 蓋
4 内槽
5 試験室
6 加熱ヒータ
7 加湿水加熱ヒータ
8 攪拌器
9 加湿水
10 乾球温度センサ
11 湿球温度センサ
12 加湿水温度センサ
13 試料体
14 制御弁
1 Environmental test equipment
2 Pressure vessel
3 lid
4 Inner tank
5 Test room
6 Heater
7 Humidifying water heater
8 Stirrer
9 Humidified water
10 Dry bulb temperature sensor
11 Wet bulb temperature sensor
12 Humidification water temperature sensor
13 Sample body
14 Control valve
Claims (3)
2. The environmental test method according to claim 1, wherein the pressure vessel is sealed when the gas in the test chamber is in a mixed state of air and water vapor evaporating from the humidified water at a temperature of 85 ° C. and a humidity of 85%. This is an environmental test method that performs high-temperature, high-humidity accelerated life test using unsaturated pressurized steam in which the sample body is exposed to a 100% humidity environment at a temperature of 100 ° C or higher without boiling.
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