JP2014160733A - Actuator, transfer head having actuator, component mounting apparatus and component mounting method using transfer head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an actuator capable of increasing the component mounting speed using a compact transfer head.SOLUTION: An actuator 22 is mounted on a transfer head 10 of a component mounting apparatus to move plural nozzles 12 in one direction. The actuator 22 comprises: plural rods 24 each of which extends in a nozzle movement direction in which the nozzle 12 moves in one direction, and which includes plural magnets 32 being aligned in the nozzle movement direction and has the nozzle 12 connected to one end; plural coils 26 each wound on the rod 24 and disposed being aligned in the nozzle movement direction; and plural linear motors 18 each of which includes an encoder 30 for detecting the position of the rod 24 in the nozzle movement direction. Plural linear motors 18 are stored in one housing 20 being aligned in a direction perpendicular to the nozzle movement direction in a state that the one end of the rod 24 connected to the nozzle 12 is exposed to the outside so as to allow the rod 24 to slide in the nozzle movement direction.

Description

  The present invention relates to an actuator mounted on a transfer head that sucks and conveys a component, a transfer head mounted with the actuator, a component mounting apparatus and a component mounting method using the transfer head.

  2. Description of the Related Art Conventionally, a component mounting apparatus having a transfer head provided with a plurality of nozzles that suck and hold components from above is known. When the mounting head with the nozzle holding the component moves, the component is transported and mounted on the substrate.

  For example, in the component mounting apparatus described in Patent Document 1, a plurality of nozzles are mounted on a transfer head in a state where they are arranged in two rows. Each nozzle is arranged above the nozzle in the vertical direction, and is moved (moved up and down) in the vertical direction by an actuator mounted on the transfer head. Thereby, each nozzle is selectively moved relative to the transfer head in the vertical direction.

JP 2011-82242 A

  Incidentally, in recent years, in order to realize high-speed component mounting, it is desired to increase the number of nozzles mounted on the transfer head and to make the transfer head compact. In order to increase the number of nozzles mounted on a compact transfer head, it is necessary to reduce the horizontal pitch interval of the plurality of nozzles as much as possible. For example, when a plurality of nozzles are mounted on a mounting head in a straight line in two rows, the nozzle pitch interval in the row direction and the pitch interval in the direction in which the two rows are arranged need to be as small as possible. is there.

  However, when the actuator is arranged vertically above the nozzle as in the transfer head described in Patent Document 1, the size of the actuator is larger than the size of the nozzle. Determined by the size of That is, the horizontal pitch interval of the actuator is the nozzle pitch interval. As a result, reducing the horizontal pitch interval of the nozzles as much as possible is limited by the actuator disposed above the nozzles in the vertical direction.

  Accordingly, an object of the present invention is to make the transfer head compact by reducing the horizontal pitch interval between a plurality of nozzles, thereby speeding up component mounting using the transfer head.

In order to solve the above-mentioned problem, according to the first aspect of the present invention,
An actuator that is mounted on a transfer head of a component mounting apparatus and moves a plurality of nozzles in one direction,
The nozzle extends in the nozzle movement direction in which the nozzle moves in one direction, and is provided with a plurality of magnets arranged in the nozzle movement direction, a rod connected to the nozzle at one end, and arranged in a state arranged in the nozzle movement direction, respectively Has a plurality of linear motors including a plurality of coils that circulate around the rod and an encoder that detects the position of the rod in the nozzle movement direction,
In a state where a plurality of linear motors are arranged in a direction orthogonal to the nozzle movement direction, one end of a rod to which the nozzle is connected is exposed to the outside, and the rod is slidable in the nozzle movement direction. An actuator is provided that is housed in one housing.

According to a second aspect of the invention,
The actuator according to the first aspect, wherein the housing has a first space that houses a coil of each linear motor, and a second space that is separated from the first space and houses an encoder of each linear motor. Provided.

According to a third aspect of the invention,
The actuator according to the second aspect is provided, wherein an opening that communicates between the outside and the first space is formed in the housing.

According to a fourth aspect of the invention,
The actuator according to any one of the first to third aspects, in which linear motors are arranged in a staggered pattern when viewed in the nozzle movement direction, is provided.

According to a fifth aspect of the present invention,
A transfer head of a component mounting apparatus including the actuator according to any one of the first to fourth aspects is provided.

According to a sixth aspect of the present invention,
A component mounting apparatus including the transfer head according to the fifth aspect is provided.

According to a seventh aspect of the present invention,
A component mounting method for mounting a component by using a plurality of nozzles that pick up the component and move in one direction,
The nozzle extends in the nozzle movement direction in which the nozzle moves in one direction, and is provided with a plurality of magnets arranged in the nozzle movement direction, a rod connected to the nozzle at one end, and arranged in a state arranged in the nozzle movement direction, respectively Has a plurality of linear motors including a plurality of coils that circulate around the rod and an encoder that detects a position of the rod in the nozzle movement direction, and the plurality of linear motors are arranged in a direction perpendicular to the nozzle movement direction. A transfer head including an actuator accommodated in one housing in a state where one end of a rod to which the rod is connected is exposed to the outside and the rod is slidable in the nozzle movement direction,
A component mounting method is provided in which component mounting is performed by moving the transfer head in a direction orthogonal to the nozzle movement direction and moving the nozzle in the nozzle movement direction via an actuator.

  According to the present invention, it is possible to make the transfer head compact by reducing the pitch interval of the plurality of nozzles, thereby speeding up component mounting using the transfer head.

The perspective view of a part of transfer head of the component mounting apparatus which concerns on one embodiment of this invention A perspective view of a plurality of nozzle units mounted on the transfer head A perspective view of the first nozzle unit Exploded view of the first nozzle unit Perspective view of the second nozzle unit Exploded view of the second nozzle unit Cross section of actuator unit

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a perspective view showing a part of a transfer head of a component mounting apparatus according to an embodiment of the present invention.

  As shown in FIG. 1, the transfer head 10 has a plurality of nozzles 12 that suck and hold components. The transfer head 10 is also mounted on a component mounting apparatus that mounts components on a substrate or the like, and is driven by an actuator (not shown) such as a linear motor in the horizontal X-axis direction and the Y-axis direction (the third direction and the third direction). 2 direction).

In the component mounting apparatus, the transfer head 10 holds a component supplied from a component supply device (not shown) such as a tape feeder by a nozzle 12, and the component held by the nozzle 12 is located at a predetermined mounting position on the substrate. It moves in the horizontal direction so as to be positioned above, and the nozzle 12 is lowered to mount the component held by the nozzle 12 at a predetermined mounting position on the board.

  In order to lower the nozzle 12, the transfer head 10, as shown in FIG. 1, moves the plurality of nozzles 12 in the vertical Z-axis direction (first direction), as shown in FIG. Units 14A and 14B. Note that the drawings attached to this specification show only the components related to the present invention. Therefore, not all the components necessary for the transfer head 10 are shown in the drawing.

  FIG. 2 is a perspective view of the plurality of first and second nozzle units 14 </ b> A and 14 </ b> B mounted on the transfer head 10. FIG. 3A is a perspective view of the first nozzle unit 14A, and FIG. 3B is an exploded view of the first nozzle unit 14A. FIG. 4A is a perspective view of the second nozzle unit 14B, and FIG. 4B is an exploded view of the second nozzle unit 14B.

  As shown in FIGS. 3A and 3B, the first nozzle unit 14A extends in the Z-axis direction (first direction), and the nozzle 12 is detachably attached to one end (lower end) in the Z-axis direction. It has a nozzle shaft (first nozzle shaft) 16 and an actuator (first actuator) 18 for moving the nozzle shaft 16 in the Z-axis direction.

  Similarly, as shown in FIGS. 4A and 4B, the second nozzle unit 14B is a nozzle that extends in the Z-axis direction (first direction) and has a nozzle 12 removably attached to one end (lower end). It has a shaft (second nozzle shaft) 16 and an actuator (second actuator) 18 for moving the nozzle shaft 16 in the Z-axis direction. In the present embodiment, the nozzle shaft 16 and the actuator 18 of each of the first and second nozzle units 14A and 14B are the same.

  The nozzle shafts 16 of the first and second nozzle units 14A and 14B are supported by the transfer head 10 so as to be movable in the Z-axis direction (first direction).

  In the present embodiment, each of the actuators 18 of the first and second nozzle units 14A and 14B is a linear motor, and is housed and integrated in one housing 20 as shown in FIG. . Thus, an actuator unit 22 is configured that can selectively lift and lower the plurality of nozzles 12 in the Z-axis direction.

  FIG. 5 is a sectional view of the actuator unit 22 (cross section parallel to the ZX plane). As shown in FIGS. 3A to 5, the actuators 18 of the first and second nozzle units 14 </ b> A and 14 </ b> B extend in the Z-axis direction, which is the direction in which the nozzle 12 moves, and the nozzle shaft 16 (nozzle 12). A rod 24 of the actuator 18 to be connected, a coil holder 28 including a coil 26 for moving the rod 24 back and forth in the Z-axis direction, and an encoder 30 for detecting the position of the rod 24 in the Z-axis direction.

  As shown in FIG. 5, each of the rods 24 of the actuator 18 of the actuator unit 22 (that is, the first and second nozzle units 14A and 14B) has a plurality of magnets accommodated therein in a state aligned in the Z-axis direction. 32. The coil holder 28 has a cylindrical shape, and holds a plurality of coils 26 that circulate around the rod 24 in a state of being arranged in the Z-axis direction. By controlling the current flowing through each of the coils 26 held by the coil holder 28, the position in the Z-axis direction of the rod 24 in which the plurality of magnets 32 are accommodated is controlled.

  The encoder 30 that detects the position of the rod 24 in the Z-axis direction is a linear encoder, and includes a linear scale 34 having a scale, and a rod position detection device that reads the scale of the linear scale 34 and detects the position of the rod 30 in the Z-axis direction. (Not shown). The linear scale 34 of the encoder 30 is held by a bracket 36 attached to the side opposite to the nozzle 12 of the rod 24 that is opposite to the side to which the nozzle 12 is attached with respect to the rod 24. The rod position detection device of the encoder 30 includes, for example, a light emitting element (not shown) that projects light onto the linear scale 34 and a light receiving element (not shown) that receives reflected light from the linear scale 34. As shown in FIG. 1, it is mounted on a linear scale substrate 38 disposed so as to face the linear scale 34. In this embodiment, the rod position detection devices of the encoders 30 of the plurality of actuators 18 are mounted on a common linear scale substrate 38.

  As shown in FIGS. 1 and 5, the housing 20 of the actuator unit 22 that houses the plurality of actuators 18 has two spaces 40 and 42 that are aligned in the Z-axis direction. The two spaces 40 and 42 are independent spaces, and the coil holder 28 of the actuator 18 is accommodated in the lower space 40. On the other hand, the upper space 42 accommodates the encoder 30 of the actuator 18 (the linear scale substrate 38 on which the linear scale 34 and the rod position detection device are mounted). As shown in FIG. 5, a through hole 20 b through which the rod 24 of the actuator 22 passes is formed in the partition wall 20 a of the housing 20 that separates the lower space 40 and the upper space 42.

  Since the coil holder 28 and the encoder 30 of the actuator 18 are separately accommodated in the independent spaces 40 and 42, the encoder 30 is not easily affected by the heat generated from the coil 26 held by the coil holder 28. . As a result, the encoder 30 can detect the position of the rod 24 in the Z-axis direction with high accuracy.

  In order to cool the coil 26 (coil holder 28), the housing 20 of the actuator unit 22 preferably includes an opening 20c that allows the lower space 40 in which the coil holder 28 is accommodated to communicate with the outside. Thereby, the heat generated from the coil 26 can be released to the outside, and the coil 26 can be cooled. Further, when the coil 26 needs to be cooled, a fan (not shown) that blows outside air toward the coil holder 28 may be attached to the opening 20 c of the housing 20.

  As described above, the actuator (linear motor) 18 for raising and lowering the plurality of nozzle shafts 16 (nozzles 12) in the Z-axis direction (first direction) is accommodated in one housing 20 and integrated. The space occupied by the actuator 18 in the transfer head 10 can be reduced as compared with the case where the actuator 18 is provided in the transfer head 10 independently without being integrated.

  Further, when a plurality of actuators (linear motors) 18 are housed and integrated in one housing 20, the plurality of actuators 18 are compared with the case where each actuator 18 is independently provided on the transfer head 10. The pitch interval in the horizontal direction (X-axis direction and Y-axis direction) of the rod 24 can be reduced. Thereby, the horizontal pitch interval of the nozzle shaft 16 connected to the rod 24 can be reduced, and as a result, the horizontal pitch interval of the plurality of nozzles 12 is reduced.

  Such an actuator unit 22 makes the transfer head 10 compact (lightweight) and enables high-speed movement. As a result, component mounting using the transfer head 10 is accelerated.

  One end of the rod 24 of each actuator 18 of the actuator unit 22 (the end opposite to the end on which the encoder 30 is provided) is independent of the housing 20 in the Z-axis direction (first direction). It is exposed to be slidable and connected to the upper end of the nozzle shaft 16.

  Specifically, the rod 24 of the actuator 18 of the first nozzle unit 14A is connected to the nozzle shaft 16 via the first connecting member 60 as shown in FIG. 3A. As shown in FIG. 3A, in the first nozzle unit 14A, the first connecting member 60 is configured to connect the nozzle shaft 16 and the rod 24 of the actuator 18 coaxially.

  On the other hand, the rod 24 of the actuator 18 of the second nozzle unit 14B is connected to the nozzle shaft 16 via the second connecting member 62 as shown in FIG. 4A. As shown in FIG. 4A, in the second nozzle unit 14B, the second connecting member 62 connects the nozzle shaft 16 and the rod 24 of the actuator 18 in an offset state in the Y-axis direction (second direction). It is configured as follows. As described above, the configuration of the second connecting member 62 and the configuration of the first connecting member 60 are different, whereby the first nozzle unit 14A and the second nozzle unit 14B are different.

  The nozzle shaft 16 and the rod 24 of the actuator 18 are connected coaxially via the first connecting member 60 in the first nozzle unit 14A, and offset in the Y-axis direction in the second nozzle unit 14B. The reason for being connected via the second connecting member 62 in the state will be described.

  In a component mounting apparatus that mounts components using the transfer head 10, in order to perform high-speed component mounting, a plurality of nozzles 12 are mounted on the transfer head 10 and the nozzles 12 are arranged in one direction (X (Axial direction) It is preferable to arrange in a line or a plurality of lines linearly.

  Further, in order to move the transfer head 10 at high speed in the horizontal direction (X-axis direction and Y-axis direction), it is preferable that the transfer head 10 is configured as compact as possible. Therefore, it is preferable to make the pitch interval of the plurality of nozzles 12 in the row direction (X-axis direction) as small as possible.

  However, as shown in FIG. 2, the size of the nozzle 12 in the X-axis direction (third direction) is smaller than the size of the actuator 18 in the X-axis direction (third direction), and the first nozzle unit 14A Thus, when the nozzle shaft 16 and the rod 24 of the actuator 18 are connected coaxially, the pitch interval in the X-axis direction of the plurality of nozzles 12 arranged linearly in the X-axis direction is the same as that in the X-axis direction of the actuator 18. Determined by size. That is, the pitch interval in the X-axis direction of the nozzle 12 is made the same as the pitch interval in the X-axis direction of the actuator 18 positioned above the nozzle 12. Therefore, the compact transfer head 10 in which the pitch interval of the nozzles 12 in the X-axis direction is small cannot be realized.

  Therefore, in the case of the present embodiment, as shown in FIG. 2, the first nozzle unit 14 </ b> A in which the nozzle shaft 16 and the rod 24 of the actuator 18 are coaxially connected, and the rod of the nozzle shaft 16 and the actuator 18. The second nozzle units 14 </ b> B connected in a state where they are offset in the Y-axis direction (second direction) are alternately arranged in the X-axis direction (third direction). Thereby, the plurality of nozzles 12 are arranged in two rows in a straight line in the X-axis direction with the pitch interval of the nozzles 12 in the X-axis direction being as small as possible.

  Specifically, as shown in FIG. 2, the actuator is arranged such that a plurality of nozzle shafts 16 are arranged in a straight line in the X-axis direction (third direction) on the positive side in the Y-axis direction (second direction). The first nozzle unit 14 </ b> A in which the 18 rods 24 and the nozzle shaft 16 are coaxially connected, and the rod 24 of the actuator 18 is offset to the Y axis direction (second direction) positive side with respect to the nozzle shaft 16. The second nozzle units 14 </ b> B connected in the connected state are alternately arranged in the X-axis direction (third direction).

  On the other hand, the rod 24 and the nozzle shaft 16 of the actuator 18 are arranged so that the plurality of nozzle shafts 16 are arranged in a straight line in the X-axis direction (third direction) on the negative side in the Y-axis direction (second direction). The first nozzle unit 14 </ b> A connected coaxially and the rod 24 of the actuator 18 are connected to the nozzle shaft 16 in a state of being offset to the negative side in the Y-axis direction (second direction). Nozzle units 14B are alternately arranged in the X-axis direction (third direction).

  Thus, in each nozzle row, when the nozzle shaft 16 of the first nozzle unit 14A and the nozzle shaft 16 of the second nozzle unit 14B are alternately arranged linearly in the X-axis direction (third direction), FIG. As shown in FIG. 2, the actuators 18 of the first nozzle unit 14A and the actuators 18 of the second nozzle unit 14B are arranged in a staggered manner when viewed in the Z-axis direction (first direction).

  Specifically, in order to reduce the pitch interval of the plurality of nozzles 12 in the Y-axis direction, as shown in FIG. 2, the actuator 18 of the first nozzle unit 14A is located above the nozzles 12 and in the Y-axis direction (first In the Y direction (second direction) with respect to the actuator 18 of the first nozzle unit 14A. On both outsides, the actuators 18 of the second nozzle unit 14B are arranged in a straight line in the X-axis direction (third direction). In addition, when viewed in the Z-axis direction (first direction), the actuator 18 of the first nozzle unit 14A is outside the Y-axis direction (second direction) of each actuator 18 and in the offset direction (Y-axis direction). When viewed in the above, the actuator 18 of the second nozzle unit 14B is arranged so as to overlap the actuator 18 of the first nozzle unit 14A.

  Thus, the first nozzle unit 14A in which the nozzle shaft 16 and the rod 24 of the actuator 18 are coaxially connected, and the nozzle shaft 16 and the rod 24 of the actuator 18 are in the Y-axis direction (second direction). By alternately arranging the second nozzle units 14B connected in an offset state in the X-axis direction (third direction), the respective nozzles 12 can be moved to the X-direction without being restricted by the actuator 18. In a state in which the pitch interval of the nozzles 12 in the axial direction is made as small as possible, or in a state in which the intervals between the actuators 18 arranged in a row in the X-axis direction (third direction) are made as small as possible, a straight line toward the X-axis direction Can be arranged in two rows. Thereby, the pitch interval of the plurality of nozzles 12 in the X-axis direction can be reduced as compared with the case where only the first nozzle units 14A are arranged linearly in the X-axis direction. Further, the size of the housing 20 of the actuator unit 22 that accommodates the plurality of actuators 18 in the X-axis direction can be reduced. As a result, the transfer head 10 having a plurality of actuators 18 can be made compact, and component mounting using the transfer head 10 can be speeded up.

  Of course, the first connecting member 60 of the first nozzle unit 14A and the connecting member 62 of the second nozzle unit 14B are also arranged in two lines in a straight line in the X-axis direction. Therefore, in order to make the pitch interval of the nozzle 12 in the X-axis direction as small as possible, it is preferable to make the size of the first and second connecting members 60 and 62 in the X-axis direction as small as possible.

  From here, the first and second connecting members 60 and 62 of the first and second nozzle units 14A and 14B will be described.

  As shown in FIG. 3A, in the first nozzle unit 14A, the first connecting member 60 removably connects the nozzle shaft 16 and the rod 24 of the actuator 18 in a coaxial manner. Specifically, as shown in FIG. 3B, the first connecting member 60 includes an actuator side connecting portion 60 a fixed to the rod 24 of the actuator 18 and a nozzle side connecting portion 60 b fixed to the nozzle shaft 16. It can be divided in the Y-axis direction.

  For example, as shown in FIGS. 3A and 3B, in the first nozzle unit 14A, the actuator-side connecting portion 60a and the nozzle-side connecting portion 60b of the first connecting member 60 have shapes that can be engaged with each other in the Y-axis direction. Prepare. Moreover, the nozzle side connection part 60b is fixed to the Y-axis direction with respect to the actuator side connection part 60a of the 1st connection member 60, for example with a volt | bolt (not shown).

  Similar to the first connecting member 60 of the first nozzle unit 14A, as shown in FIG. 4A, in the second nozzle unit 14B, the second connecting member 62 includes the nozzle shaft 16 and the rod 24 of the actuator 18. Are detachably connected in the Y-axis direction. Specifically, as shown in FIG. 4B, the second connecting member 62 includes an actuator side connecting portion 62 a fixed to the rod 24 of the actuator 18 and a nozzle side connecting portion 62 b fixed to the nozzle shaft 16. It can be divided in the Y-axis direction.

  With such first and second connecting members 60 and 62, the nozzle shaft 16 can be attached to and detached from the rod 24 of the actuator 18 in the Y-axis direction in each of the first and second nozzle units 14A and 14B. it can. Thereby, for example, the nozzle shaft 16 of the first nozzle unit 14A can be attached and detached without being interfered with the second nozzle unit 14B adjacent to both sides in the X-axis direction of the first nozzle unit 14A. As a result, the nozzle 12 can be easily replaced.

  In the case of this embodiment, as shown in FIG. 2, the nozzles 12 are arranged in two lines in a straight line in the X-axis direction. Therefore, the first and second nozzle units 14A and 14B corresponding to the Y-axis direction positive side nozzle row are alternately arranged in the X-axis direction so that the nozzle shaft 16 can be removed to the Y-axis direction positive side. On the other hand, the first and second nozzle units 14A and 14B corresponding to the Y-axis direction negative side nozzle row are alternately arranged in the X-axis direction so that the nozzle shaft 16 can be removed to the Y-axis direction negative side. That is, the postures of the first and second nozzle units 14A and 14B corresponding to the Y axis direction positive side nozzle row, and the first and second nozzle units 14A and 14B corresponding to the Y axis direction negative side nozzle row. These postures are symmetrical with each other in the ZX plane.

  Further, as shown in FIGS. 3B and 4B, the nozzle side connection portion 60b of the first connection member 60 of the first nozzle unit 14A and the nozzle side connection of the second connection member 62 of the second nozzle unit 14B. It is preferable that the part 62b is the same shape. For example, in the case of the present embodiment, the nozzle side connecting portion 60b of the first connecting member 60 and the nozzle side connecting portion 62b of the second connecting member 62 are L-shaped blocks.

  Thereby, the nozzle 12, the nozzle shaft 16, and the nozzle side connection part 60b (62b) can be handled as a common unit. Thereby, the nozzle shaft 16 (nozzle 12) can be managed without distinguishing between the first nozzle unit 14A and the second nozzle unit 14B. In addition, since the nozzle shaft 16 can be attached to both the first and second nozzle units 14A and 14B, the replacement of the nozzle 12 is simplified.

  Furthermore, as described above, the nozzle-side connecting portion 60b of the first connecting member 60 of the first nozzle unit 14A and the nozzle-side connecting portion 62b of the second connecting member 62 of the second nozzle unit 14B have the same shape. In the case of the configuration, as shown in FIG. 2, it is preferable that the nozzle side connecting portions 60b and 62b are arranged in a straight line in the X-axis direction in the same posture. That is, in order to realize this, it is preferable to configure the actuator side coupling portions 60a and 62a that engage with the nozzle side coupling portions 60b and 60a, respectively.

  Thereby, for example, the first connection member 60 of the first nozzle unit 14A is interfered by the nozzle side connection portion 62b of the second connection member 62 of the second nozzle unit 14B adjacent to both sides in the X-axis direction. The nozzle-side connecting portion 60b can be attached to and detached from the actuator-side connecting portion 60a of the first connecting member 60 of the first nozzle unit 14A. As a result, the nozzle 12 can be replaced more easily.

  According to the present embodiment, the transfer head can be made compact by reducing the pitch interval of the plurality of nozzles 12 in the horizontal direction (X-axis direction and Y-axis direction), thereby using the transfer head 10. Component mounting can be speeded up.

  Although the present invention has been described with reference to the above-described embodiments, the present invention is not limited to the above-described embodiments.

  For example, in the above-described embodiment, the plurality of nozzles 12 are linearly arranged in two rows in the X-axis direction, but the present invention is not limited to this. For example, the plurality of nozzles 12 may be aligned in a straight line in the X-axis direction.

  In the case of the above-described embodiment, as shown in FIG. 2, the plurality of actuators (linear motors) 18 are accommodated in one housing 20 in a zigzag manner when viewed in the Z direction. The present invention is not limited to this. For example, by arranging only the first nozzle units 14A in a line or a plurality of lines linearly in the X-axis direction, one actuator (linear motor) 18 arranged in a line or a plurality of lines linearly in the X-axis direction You may accommodate in the housing 20. FIG. In a broad sense, the linear motor of the present invention may be accommodated in one housing in a state of being aligned in a direction (for example, the X-axis direction) orthogonal to the nozzle movement direction (for example, the Z-axis direction). However, when the number of nozzles is large as in the above-described embodiment, in order to make the transfer head compact, a plurality of linear motors are accommodated in one housing so as to be arranged in a zigzag shape when viewed in the Z direction. It is preferable.

  The present invention is applicable to any mounting head in which a plurality of nozzles that suck and hold components from above are mounted in a linear state.

10 Transfer head 12 Nozzle 18 Linear motor (actuator)
20 Housing 24 Rod 26 Coil 30 Encoder 32 Magnet

Claims (7)

An actuator that is mounted on a transfer head of a component mounting apparatus and moves a plurality of nozzles in one direction,
The nozzle extends in the nozzle movement direction in which the nozzle moves in one direction, and is provided with a plurality of magnets arranged in the nozzle movement direction, a rod connected to the nozzle at one end, and arranged in a state arranged in the nozzle movement direction, respectively Has a plurality of linear motors including a plurality of coils that circulate around the rod and an encoder that detects the position of the rod in the nozzle movement direction,
In a state where a plurality of linear motors are arranged in a direction orthogonal to the nozzle movement direction, one end of a rod to which the nozzle is connected is exposed to the outside, and the rod is slidable in the nozzle movement direction. Actuator housed in two housings.   2. The actuator according to claim 1, wherein the housing has a first space that houses a coil of each linear motor, and a second space that is separated from the first space and houses an encoder of each linear motor.   The actuator according to claim 2, wherein an opening that communicates between the outside and the first space is formed in the housing.   The actuator according to any one of claims 1 to 3, wherein the linear motors are arranged in a staggered pattern when viewed in the nozzle movement direction.   The transfer head of the component mounting apparatus provided with the actuator as described in any one of Claim 1 to 4.   A component mounting apparatus comprising the transfer head according to claim 5. A component mounting method for mounting a component by using a plurality of nozzles that pick up the component and move in one direction,
The nozzle extends in the nozzle movement direction in which the nozzle moves in one direction, and is provided with a plurality of magnets arranged in the nozzle movement direction, a rod connected to the nozzle at one end, and arranged in a state arranged in the nozzle movement direction, respectively Has a plurality of linear motors including a plurality of coils that circulate around the rod and an encoder that detects a position of the rod in the nozzle movement direction, and the plurality of linear motors are arranged in a direction perpendicular to the nozzle movement direction. A transfer head including an actuator accommodated in one housing in a state where one end of a rod to which the rod is connected is exposed to the outside and the rod is slidable in the nozzle movement direction,
A component mounting method in which component mounting is performed by moving the transfer head in a direction orthogonal to the nozzle movement direction and moving the nozzle in the nozzle movement direction via an actuator.

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