CN103997881A - Brake, transferring head possessing the brake, and installation device for part using the transferring head and method - Google Patents

Brake, transferring head possessing the brake, and installation device for part using the transferring head and method Download PDF

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Publication number
CN103997881A
CN103997881A CN201410049598.3A CN201410049598A CN103997881A CN 103997881 A CN103997881 A CN 103997881A CN 201410049598 A CN201410049598 A CN 201410049598A CN 103997881 A CN103997881 A CN 103997881A
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CN
China
Prior art keywords
nozzle
actuator
bar
moving direction
nozzle moving
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Pending
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CN201410049598.3A
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Chinese (zh)
Inventor
奥田修
壁下朗
大野英明
深美尚树
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Panasonic Intellectual Property Management Co Ltd
Original Assignee
Matsushita Electric Industrial Co Ltd
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Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of CN103997881A publication Critical patent/CN103997881A/en
Pending legal-status Critical Current

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Abstract

The invention uses a compact transferring head so that the installation speed of part can be increased. The invention discloses a brake which is installed on the transferring head of the part installation device and enables the plurality of nozzles to move in a same direction. The brake possesses a plurality of linear motors; the linear motor comprises a rod which extends along the nozzle movement direction to enable the plurality of magnets to be connected to the nozzle, a plurality of coils and coder. The plurality of coils are arranged along the movement direction of the nozzle and distributed on the periphery of the rod. The coder is used for detecting the position of the movement of the nozzle. The plurality of linear motors are in the direction of the direction orthogonal to the nozzle arrangement on state and are connected with one end of the nozzle of the rod to outside to show. The rod can be received in the housing in a manner that rod can slide along the movement direction of the nozzle.

Description

Apparatus for mounting component and the method for actuator, the transfer head that possesses it, use transfer head
Technical field
Apparatus for mounting component and the component mounting method of the actuator of the transfer head that the present invention relates to be equipped on adsorption element and carry, the transfer head that carries actuator, use transfer head.
Background technology
All the time, known have an apparatus for mounting component with transfer head, and this transfer head possesses the multiple nozzles that keep from top adsorption element and to these parts.Maintain the transfer head under the state of parts by moving nozzle, parts are handled upside down and are installed on substrate.
For example, in the apparatus for mounting component described in patent documentation 1, multiple nozzles are equipped on transfer head to be arranged in the state of two row.In addition, utilize the vertical top that is disposed at nozzle and the actuator that is equipped on transfer head, nozzle moves respectively (lifting) in vertical.Thus, each nozzle optionally relatively moves in vertical with respect to transfer head.
Formerly technical literature:
Patent documentation:
Patent documentation 1: TOHKEMY 2011-82242 communique
Brief summary of the invention
The problem that invention will solve
But, in recent years, the high speed of installing in order to realize parts, expecting increases the quantity of the nozzle that is equipped on transfer head and makes a transfer miniaturization.The nozzle quantity that is equipped on small-sized transfer head in increase, need to dwindle as much as possible the intervals in the horizontal direction of multiple nozzles.For example, be equipped on transfer head with linearly the state that is arranged in two row at multiple nozzles, need to dwindle as much as possible the intervals in the intervals of the nozzle on column direction and direction that two row are arranged.
But owing to disposing actuator above the vertical at nozzle as the transfer head as described in patent documentation 1, the size of actuator is larger than the size of nozzle, therefore the intervals in the horizontal direction of nozzle is decided by the size of actuator., the intervals in the horizontal direction of actuator is set to the intervals of nozzle.Consequently, although dwindle as much as possible the intervals in the horizontal direction of nozzle, be subject to the restriction of the actuator of the vertical top that is disposed at nozzle.
Summary of the invention
Therefore, problem of the present invention is, dwindles the intervals in the horizontal direction of multiple nozzles and makes a transfer miniaturization, uses thus the parts of transfer head to install and realizes high speed.
Solution
In order to solve above-mentioned problem, according to the first technical scheme of the present invention, this actuator is equipped on the transfer head of apparatus for mounting component, and for multiple nozzles are moved along a direction, wherein,
Described actuator has multiple linear motors, this linear motor comprises: bar, on the nozzle moving direction that it moves along a direction at nozzle, extend, possess multiple magnet with the state that multiple magnet is arranged on nozzle moving direction, and be at one end linked with nozzle; Multiple coils, its state configuration to arrange on nozzle moving direction, and respectively round bar; And encoder, it is for detection of the position on the nozzle moving direction of bar,
Multiple linear motors with the orthogonal direction of nozzle moving direction on the state that exposes to outside of the state arranged and one end of being linked with the bar of nozzle and the mode that can slide on nozzle moving direction respectively with bar be accommodated in a shell.
According to a second technical aspect of the present invention, provide the actuator described in the first technical scheme, wherein,
Shell has that the first space of the coil for receiving each linear motor separates with the first space and for receiving the second space of encoder of each linear motor.
According to a third technical aspect of the present invention, provide the actuator described in the second technical scheme, wherein,
The opening that connects outside and the first space is formed at shell.
According to a fourth technical aspect of the present invention, provide the actuator described in any one in the first~three technical scheme, wherein,
In the situation that observing along nozzle moving direction, multiple linear motors are staggeredly to be arranged.
According to the 5th technical scheme of the present invention, a kind of transfer head of apparatus for mounting component is provided, wherein,
The transfer head of described apparatus for mounting component possesses the actuator described in any one in the first~three technical scheme.
According to the 6th technical scheme of the present invention, a kind of apparatus for mounting component is provided, wherein,
Described apparatus for mounting component possesses the transfer head described in the 5th technical scheme.
According to the 7th technical scheme of the present invention, a kind of component mounting method is provided, this component mounting method carries out parts installation by the multiple nozzles that move with adsorption element and along a direction, wherein,
Preparation has the transfer head of actuator, described actuator has multiple linear motors, this linear motor comprises: bar, on the nozzle moving direction that it moves along a direction at nozzle, extend, possess multiple magnet with the state that multiple magnet is arranged on nozzle moving direction, and be at one end linked with nozzle; Multiple coils, its state configuration to arrange on nozzle moving direction, and respectively round bar; And encoder, it is for detection of the position on the nozzle moving direction of bar, multiple linear motors with the orthogonal direction of nozzle moving direction on the state that exposes to outside of the state arranged and one end of being linked with the bar of nozzle and the mode that can slide on nozzle moving direction respectively with bar be accommodated in a shell
Transfer head is being moved up with the orthogonal side of nozzle moving direction, and by actuator, nozzle is moved on nozzle moving direction, carry out thus parts installation.
Invention effect
According to the present invention, can dwindle the intervals of multiple nozzles and make a transfer miniaturization, use thus the parts of transfer head to install and can realize high speed.
Brief description of the drawings
Fig. 1 is the partial perspective view of the transfer head of the apparatus for mounting component of one embodiment of the present invention.
Fig. 2 is the stereogram that is equipped on the multiple nozzle units under the state of transfer head.
Fig. 3 A is the stereogram of the first nozzle unit.
Fig. 3 B is the exploded view of the first nozzle unit.
Fig. 4 A is the stereogram of second nozzle unit.
Fig. 4 B is the exploded view of second nozzle unit.
Fig. 5 is the cutaway view of actuating unit.
Description of reference numerals is as follows:
10 transfer heads
12 nozzles
18 linear motors (actuator)
20 shells
24 bars
26 coils
30 encoders
32 magnet
Embodiment
Below, with reference to the accompanying drawings of embodiments of the present invention.
Fig. 1 is the partial perspective view that represents the transfer head of the apparatus for mounting component of one embodiment of the present invention.
As shown in Figure 1, transfer 10 has for adsorbing and multiple nozzles 12 of holding member.In addition, transfer 10 is equipped on to the apparatus for mounting component of the installing components such as substrate, and mobile along horizontal direction, i.e. X-direction and Y direction (third direction and second direction) by the actuators such as linear motor (not shown).
In apparatus for mounting component, transfer 10 utilizes nozzle 12 to keep the parts that wait assembly supply device (not shown) to supply with from supplying with band, and make the parts that kept by nozzle 12 move the top of the installation site of the regulation that is located at substrate along horizontal direction, nozzle 12 is declined and the parts that kept by this nozzle 12 are installed on to the installation site of the regulation of substrate.
For nozzle 12 is declined, as shown in Figure 1, transfer 10 has makes respectively multiple nozzles 12 along vertical, i.e. mobile the first nozzle unit 14A and the second nozzle unit 14B of Z-direction (first direction).It should be noted that, the accompanying drawing in this specification only represents inscape related to the present invention.Thereby, in accompanying drawing and not shown transfer 10 necessary whole inscapes.
Fig. 2 is equipped on multiple the first nozzle unit 14A under the state of transfer 10 and the stereogram of second nozzle unit 14B.Fig. 3 A is the stereogram of the first nozzle unit 14A, and Fig. 3 B is the exploded view of the first nozzle unit 14A.Fig. 4 A is the stereogram of second nozzle unit 14B, and Fig. 4 B is the exploded view of second nozzle unit 14B.
As shown in Figure 3A and 3B, the first nozzle unit 14A has: nozzle shaft (the first nozzle shaft) 16, it extends along Z-direction (first direction), and in one end (lower end) of Z-direction, removably nozzle 12 is installed; And actuator (the first actuator) 18, it is for making nozzle shaft 16 move along Z-direction.
In the same manner, as shown in Figure 4 A and 4 B shown in FIG., second nozzle unit 14B possesses: nozzle shaft (second nozzle axle) 16, and it extends along Z-direction (first direction), and at one end (lower end) is provided with removably nozzle 12; And actuator (the second actuator) 18, it is for making nozzle shaft 16 move along Z-direction.It should be noted that, the in the situation that of present embodiment, the first nozzle unit 14A and second nozzle unit 14B nozzle shaft 16 and actuator 18 is separately all identical.
The first nozzle unit 14A and second nozzle unit 14B nozzle shaft 16 are separately being supported on transfer 10 along the mobile mode of Z-direction (first direction).
The in the situation that of present embodiment, the first nozzle unit 14A and second nozzle unit 14B actuator 18 is separately linear motor, and by being accommodated in as illustrated in fig. 1 a shell 20 interior form as one (protected).Thus, formation can make multiple nozzles 12 optionally along the actuating unit 22 of Z-direction lifting.
Fig. 5 is the cutaway view (with the parallel plane section of Z-X) of actuating unit 22.As shown in Fig. 3 A~Fig. 5, the actuator 18 of the first nozzle unit 14A and second nozzle unit 14B has: bar 24, and its direction moving along nozzle 12 is that Z-direction is extended, and is linked with nozzle shaft 16 (nozzle 12); Coil brace 28, it comprises for making the coil 26 of bar 24 along Z-direction advance and retreat; And encoder 30, it is for detection of the Z-direction position of bar 24.
As shown in Figure 5, the actuator 18 of actuating unit 22 (i.e. the first nozzle unit 14A and second nozzle unit 14B) bar 24 separately has and is the state of arranging along Z-direction and is accommodated in multiple magnet 32 of bar 24 inside.Coil brace 28 is drum, and will be held in the state of arranging along Z-direction round multiple coils 26 of bar 24.By being controlled at the electric current of circulation in the each coil 26 being kept by coil brace 28, control the Z-direction position of the bar 24 that is accommodated with multiple magnet 32.
Encoder 30 for detection of the position in the Z-direction of bar 24 is linear encoder, comprises the bar position detection device (not shown) that possesses the linear scale 34 of scale and come the Z-direction position of test rod 30 by reading the scale of linear scale 34.The linear scale 34 of encoder 30 is kept by bracket 36, the other end that it is bar 24 in a contrary side that this bracket 36 is arranged on one end of bar 24 that nozzle 12 is installed.The bar position detection device of encoder 30 for example comprises for light being projeced into the light-emitting component (not shown) of linear scale 34 and for receiving the catoptrical photo detector (not shown) from linear scale 34, and is equipped on as shown in Figure 1 on the substrate 38 configuring in the mode relative with linear scale 34.It should be noted that, the in the situation that of present embodiment, the bar position detection device of the encoder 30 of multiple actuators 18 is equipped on shared substrate 38.
As shown in Figure 1 and Figure 5, receive and protect the shell 20 of the actuating unit 22 of multiple actuators 18 to possess two spaces 40,42 of arranging along Z-direction.Two spaces 40,42 are space independently, are accommodated with the coil brace 28 of actuator 18 in lower side space 40.On the other hand, in upside space 42, be accommodated with the encoder 30 (being equipped with the substrate 38 of linear scale 34 and bar position detection device) of actuator 18.It should be noted that, as shown in Figure 5, be formed with at the next door 20a of the shell 20 of separating lower side space 40 and upside space 42 the through hole 20b passing through for the bar 24 of actuator 22.
By the coil brace of actuator 18 28 being accommodated in independently in space 40, encoder 30 is accommodated in independently in space 42 to the impact of the heat that the coil 26 that encoder 30 is not vulnerable to be kept by coil brace 28 produces.Consequently, encoder 30 can detect the Z-direction position of rod 24 accurately.
It should be noted that, for cooling coil 26 (coil brace 28), preferably the shell 20 of actuating unit 22 possesses the lower side space 40 and the outside opening 20c being communicated with for making to be accommodated with coil brace 28.Thus, the heat that can make coil 26 produce spreads to outside, thus cooling coil 26.The in the situation that of the further cooling coil of needs 26, also can will carry the fan (not shown) of extraneous air to be installed on the opening 20c of shell 20 towards coil brace 28.
So, by forming as one being used for making multiple nozzle shafts 16 (nozzle 12) be accommodated in a shell 20 along multiple actuators (linear motor) 18 of Z-direction (first direction) lifting, be arranged at independently of one another with not making multiple actuators 18 form as one compared with the situation of transfer 10, can dwindle the space of occupying of actuator 18 in transfer 10.In addition; in the situation that multiple actuators (linear motor) 18 being arranged at respectively independently to transfer 10; for each actuator 18, need to such as,, for the protection of the shell of its inscape (encoder 30 etc.), need multiple shells.Consequently, because causing the space of occupying of the actuator 18 in transfer 10, multiple shells increase.
In addition, the in the situation that of forming as one multiple actuators (linear motor) 18 are accommodated in to a shell 20, compared with the situation that is arranged at independently of one another transfer 10 with actuator 18, can dwindle the intervals in the horizontal direction (X-direction and Y direction) of the bar 24 of multiple actuators 18.Thus, can dwindle the intervals in the horizontal direction of the nozzle shaft 16 linking with bar 24, consequently, dwindle the intervals in the horizontal direction of multiple nozzles 12.
Utilize such actuating unit 22, transfer 10 realizes miniaturization (lightness), thereby makes high-speed mobile become possibility, consequently, uses the parts of transfer 10 to install and becomes high speed.
One end (being provided with one end of the opposition side of one end of encoder 30) of the bar 24 of each actuator 18 of such actuating unit 22 with can along Z-direction (first direction) independently of one another the mode of sliding action expose to the outside of shell 20, and be linked to the upper end of nozzle shaft 16.
Specifically, as shown in Figure 3A, the bar 24 of the actuator 18 of the first nozzle unit 14A is linked to nozzle shaft 16 by the first coupling member 60.As shown in Figure 3A, in the first nozzle unit 14A, the first coupling member 60 is configured to and nozzle shaft 16 is to coaxial shape with the bar 24 of actuator 18 links.
On the other hand, as shown in Figure 4 A, the bar 24 of the actuator 18 of second nozzle unit 14B is linked to nozzle shaft 16 by the second coupling member 62.As shown in Figure 4 A, in second nozzle unit 14B, the second coupling member 62 is configured to the state of Y direction (second direction) skew, the bar 24 of nozzle shaft 16 and actuator 18 to be linked up.So, by making the structure of the second coupling member 62 different from the structure of the first coupling member 60, the first nozzle unit 14A is different from second nozzle unit 14B.
The reason that the bar 24 of nozzle shaft 16 and actuator 18 is to coaxial shape by the first coupling member 60 in the first nozzle unit 14A links, links with the state to Y direction skew by the second coupling member 62 in second nozzle unit 14B describes.
Coming in the apparatus for mounting component of installing component with transfer 10, install in order to carry out parts at a high speed, preferably multiple nozzles 12 are equipped on to transfer 10, and the plurality of nozzle 12 are arranged in to row or multiple row along a direction (X-direction) linearlyly.
In addition, in order to make transfer 10 along horizontal direction (X-direction and Y direction) high-speed mobile, preferably form as far as possible compactly transfer 10.Thereby, the intervals on the preferred column direction (X-direction) that dwindles as much as possible multiple nozzles 12.
But, as shown in Figure 2, size in the X-direction (third direction) of nozzle 12 is less than the size in the X-direction of actuator 18 (third direction), and in the situation that as the first nozzle unit 14A, all nozzle shafts 16 and the bar 24 of all actuator 18 is to coaxial shape and links, the intervals in the X-direction of multiple nozzles 12 of arranging along X-direction is determined by the size in the X-direction of actuator 18 linearlyly., the intervals in the X-direction of nozzle 12 is with to be positioned at intervals in the X-direction of actuator 18 of top of nozzle 12 identical.Thereby, cannot realize intervals in the X-direction of nozzle 12 less, compact transfer 10.
Therefore, the in the situation that of present embodiment, as shown in Figure 2, the first nozzle unit 14A linking and the second nozzle unit 14B that the bar 24 of nozzle shaft 16 and actuator 18 is linked with the state being offset along Y direction (second direction) go up alternative arrangement in X-direction (third direction) nozzle shaft 16 and the bar 24 of actuator 18 to be to coaxial shape.Thus, the state of having realized the intervals to dwindle as much as possible the nozzle 12 in X-direction by multiple nozzles 12 along X-direction linearly be arranged in two row.
Specifically, as shown in Figure 2, with in the positive side of Y direction (second direction) along X-direction (third direction) by linearly multiple nozzle shafts 16 the mode that is arranged in row, the second nozzle unit 14B of the first nozzle unit 14A that the bar of actuator 18 24 and nozzle shaft 16 are to coaxial shape and link and the state link that the bar of actuator 18 24 and nozzle shaft 16 are being moved to the positive lateral deviation of Y direction (second direction) with respect to nozzle shaft 16 with the bar 24 of actuator 18 is along X-direction (third direction) alternative arrangement.
On the other hand, with at Y direction (second direction) minus side along X-direction (third direction) by linearly multiple nozzle shafts 16 the mode that is arranged in row, the first nozzle unit 14A that the bar of actuator 18 24 and nozzle shaft 16 are to coaxial shape and link and by the bar of actuator 18 24 with nozzle shaft 16 so that the second nozzle unit 14B that the bar 24 of actuator 18 links to the state of Y direction (second direction) minus side skew with respect to nozzle shaft 16 along X-direction (third direction) alternative arrangement.
So, when in each nozzle rows during along the nozzle shaft 16 of linearly ground of X-direction (third direction) alternative arrangement the first nozzle unit 14A and the nozzle shaft 16 of second nozzle unit 14B, as shown in Figure 2, the actuator 18 of the actuator 18 of the first nozzle unit 14A and second nozzle unit 14B is observed to be under (first direction observation) staggered (word shape) in Z-direction and is configured.
Specifically, in order to dwindle the intervals in the Y direction of multiple nozzles 12, as shown in Figure 2, above nozzle 12 and the inner side of Y direction (second direction), the actuator 18 of the first nozzle unit 14A with the mode towards X-direction (third direction) linearly be arranged in two row, with respect to the actuator 18 of this first nozzle unit 14A, in two sides' of Y direction (second direction) outside, the actuator 18 of second nozzle unit 14B respectively along X-direction (third direction) linearly be arranged in row.In addition, the actuator 18 of configuration second nozzle unit 14B, make it in the situation that observing along Z-direction (first direction), overlapping in the outside of Y direction (second direction) separately with the actuator 18 of the first nozzle unit 14A, and in the situation that along offset direction, (Y direction) observes, overlapping with the actuator 18 of the first nozzle unit 14A.
So, by alternately arrange the first nozzle unit 14A that nozzle shaft 16 and the bar 24 of actuator 18 are to coaxial shape and link along X-direction (third direction), with the second nozzle unit 14B that nozzle shaft 16 and the bar 24 of actuator 18 are linked with the state being offset to Y direction (second direction), can be in the situation that not limited by actuator 18, with dwindle as much as possible the nozzle 12 in X-direction intervals state or dwindle as much as possible along X-direction (third direction) be arranged in the actuator 18 of row interval state by each nozzle 12 towards X-direction ground linearly two row that are arranged in.Thus, with only along X-direction linearly arrange compared with the situation of the first nozzle unit 14A, can dwindle the intervals in the X-direction of multiple nozzles 12.In addition, can dwindle the size in the X-direction of shell 20 of actuating unit 22 of the multiple actuators 18 of storage.Consequently, can make to have transfer 10 miniaturization of multiple actuators 18, use the parts of this transfer 10 to install and realize high speed.
It should be noted that, the first coupling member 60 of the first nozzle unit 14A and the coupling member 62 of second nozzle unit 14B also inevitable along X-direction linearly be arranged in two row.Thereby, in order to dwindle as much as possible the intervals in the X-direction of nozzle 12, also preferably dwindle as much as possible the size in the first coupling member 60 and the second coupling member 62 X-direction separately.
At this, the first coupling member 60 of the first nozzle unit 14A and the second coupling member 62 of second nozzle unit 14B are described.
As shown in Figure 3A, in the first nozzle unit 14A, the first coupling member 60 can be coaxial shape by the bar 24 of nozzle shaft 16 and actuator 18 with loading and unloading and link.Specifically, as shown in Figure 3 B, the actuator side linking part 60a that the first coupling member 60 is configured to the bar 24 that is fixed on actuator 18 and the nozzle side linking part 60b that is fixed on nozzle shaft 16 can be cut apart in Y direction.
For example, as shown in Figure 3 A and Figure 3 B, in the first nozzle unit 14A, the actuator side linking part 60a of the first coupling member 60 and nozzle side linking part 60b possess each other can be along the shape of Y direction engaging.In addition, nozzle side linking part 60b is for example fixed on the actuator side linking part 60a of the first coupling member 60 along Y direction by bolt (not shown).
With the first coupling member 60 of the first nozzle unit 14A in the same manner, as shown in Figure 4 A, in second nozzle unit 14B, the second coupling member 62 by the bar 24 of nozzle shaft 16 and actuator 18 can load and unload and link to the state of Y direction skew.Specifically, as shown in Figure 4 B, the actuator side linking part 62a that the second coupling member 62 is configured to the bar 24 that is fixed on actuator 18 and the nozzle side linking part 62b that is fixed on nozzle shaft 16 can be cut apart in Y direction.
According to the first such coupling member 60 and the second coupling member 62, can be respectively in the first nozzle unit 14A and second nozzle unit 14B with respect to the bar 24 of actuator 18 and along Y direction handling nozzle shaft 16.Thus, for example, can in the case of not interfering with the second nozzle unit 14B of X-direction both sides that is adjacent to the first nozzle unit 14A, load and unload the nozzle shaft 16 of the first nozzle unit 14A.Consequently, make the replacing of nozzle 12 become easy.
It should be noted that, the in the situation that of present embodiment, as shown in Figure 2, nozzle 12 along X-direction linearly be arranged in two row.Thereby, the first nozzle unit 14A corresponding with the nozzle rows of the positive side of Y direction and second nozzle unit 14B with can be under the positive side dumping of Y direction the attitude of nozzle shaft 16 along X-direction alternative arrangement.On the other hand, the first nozzle unit 14A corresponding with the nozzle rows of Y direction minus side and second nozzle unit 14B with the attitude that can unload nozzle shaft 16 at Y direction minus side along X-direction alternative arrangement., the attitude of the first nozzle unit 14A corresponding with the nozzle rows of the positive side of Y direction and second nozzle unit 14B and be each other Z-X plane symmetry with corresponding the first nozzle unit 14A of the nozzle rows of Y direction minus side and the attitude of second nozzle unit 14B.
In addition, as shown in Fig. 3 B and Fig. 4 B, preferably the nozzle side linking part 62b shape of the nozzle side linking part 60b of the first coupling member 60 of the first nozzle unit 14A and the second coupling member 62 of second nozzle unit 14B is identical.For example, the in the situation that of present embodiment, the nozzle side linking part 62b of the nozzle side linking part 60b of the first coupling member 60 and the second coupling member 62 is the module of L word shape.
Thus, nozzle 12, nozzle shaft 16 and nozzle side linking part 60b (62b) can be processed as sharing unit.Thus, can do not distinguish the first nozzle unit 14A with or second nozzle unit 14B managing nozzle axle 16 (nozzles 12) use in the situation that.In addition, owing to nozzle shaft 16 can being installed on to any one in the first nozzle unit 14A and second nozzle unit 14B, therefore make the replacing of nozzle 12 simplify.
And then, as mentioned above, in the case of forming with same shape the nozzle side linking part 60b of the first coupling member 60 of the first nozzle unit 14A and the nozzle side linking part 62b of the second coupling member 62 of second nozzle unit 14B, as shown in Figure 2, preferably by this nozzle side linking part 60b, 62b with identical attitude along X-direction linearly arrange.,, in order to realize this structure, preferably form respectively the actuator side linking part 60a, the 62a that engage with nozzle side linking part 60b, 60a.
Thus, for example, can not with interfere with the nozzle side linking part 62b of the second coupling member 62 of the second nozzle unit 14B of the first coupling member 60 adjacency of the first nozzle unit 14A in X-direction both sides, load and unload nozzle side linking part 60b with respect to the actuator side linking part 60a of the first coupling member 60 of the first nozzle unit 14A.Consequently, can make the replacing of nozzle 12 become is more prone to.
According to present embodiment, can make a transfer miniaturization by the intervals of dwindling in the horizontal direction (X-direction and Y direction) of multiple nozzles 12, thus, use the parts of transfer 10 to install and can realize high speed.
Above, by enumerating above-mentioned execution mode, the present invention is described, but the present invention is not limited to above-mentioned execution mode.
For example, the in the situation that of above-mentioned execution mode, multiple nozzles 12 with the mode towards X-direction linearly be arranged in two row, but the present invention is not limited thereto.For example, multiple nozzles 12 also can towards X-direction linearly be arranged in row.
In addition, the in the situation that of above-mentioned execution mode, as shown in Figure 2, multiple actuators (linear motor) 18 are accommodated in a shell 20 to be configured to staggered state under Z direction is observed, but the present invention is not limited thereto.For example, also can by only by the first nozzle unit 14A along X-direction linearly be arranged in row or multiple row and by along X-direction linearly be configured to row or multiple row actuator (linear motor) 18 be accommodated in a shell 20.Broadly say, as long as linear motor of the present invention is to be accommodated in a shell along the state of for example, for example, arranging with the orthogonal direction (X-direction) of nozzle moving direction (Z-direction).But in the situation that nozzle is more as embodiment described above, in order to make a transfer miniaturization, preferred multiple linear motors are accommodated in a shell to be configured to staggered mode under Z direction is observed.
Industrial applicibility
The present invention can be applied to the mounting head that the multiple nozzles from top absorption holding member are carried with linearly the state of arranging.

Claims (7)

1. an actuator, this actuator is equipped on the transfer head of apparatus for mounting component, and for multiple nozzles are moved along a direction, wherein,
Described actuator has multiple linear motors, this linear motor comprises: bar, on the nozzle moving direction that it moves along a direction at nozzle, extend, possess multiple magnet with the state that multiple magnet is arranged on nozzle moving direction, and be at one end linked with nozzle; Multiple coils, its state configuration to arrange on nozzle moving direction, and respectively round bar; And encoder, it is for detection of the position on the nozzle moving direction of bar,
Multiple linear motors with the orthogonal direction of nozzle moving direction on the state that exposes to outside of the state arranged and one end of being linked with the bar of nozzle and the mode that can slide on nozzle moving direction respectively with bar be accommodated in a shell.
2. actuator according to claim 1, wherein,
Shell has that the first space of the coil for receiving each linear motor separates with the first space and for receiving the second space of encoder of each linear motor.
3. actuator according to claim 2, wherein,
The opening that connects outside and the first space is formed at shell.
4. according to the actuator described in any one in claims 1 to 3, wherein,
In the situation that observing along nozzle moving direction, multiple linear motors are staggeredly to be arranged.
5. a transfer head for apparatus for mounting component, wherein,
The transfer head of described apparatus for mounting component possesses the actuator described in any one in claim 1 to 4.
6. an apparatus for mounting component, wherein,
Described apparatus for mounting component possesses transfer head claimed in claim 5.
7. a component mounting method, this component mounting method carries out parts installation by the multiple nozzles that move with adsorption element and along a direction, wherein,
Preparation has the transfer head of actuator, described actuator has multiple linear motors, this linear motor comprises: bar, on the nozzle moving direction that it moves along a direction at nozzle, extend, possess multiple magnet with the state that multiple magnet is arranged on nozzle moving direction, and be at one end linked with nozzle; Multiple coils, its state configuration to arrange on nozzle moving direction, and respectively round bar; And encoder, it is for detection of the position on the nozzle moving direction of bar, multiple linear motors with the orthogonal direction of nozzle moving direction on the state that exposes to outside of the state arranged and one end of being linked with the bar of nozzle and the mode that can slide on nozzle moving direction respectively with bar be accommodated in a shell
Transfer head is being moved up with the orthogonal side of nozzle moving direction, and by actuator, nozzle is moved on nozzle moving direction, carry out thus parts installation.
CN201410049598.3A 2013-02-19 2014-02-13 Brake, transferring head possessing the brake, and installation device for part using the transferring head and method Pending CN103997881A (en)

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JP2013-030316 2013-02-19
JP2013030316A JP2014160733A (en) 2013-02-19 2013-02-19 Actuator, transfer head having actuator, component mounting apparatus and component mounting method using transfer head

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JP7503833B2 (en) 2020-09-11 2024-06-21 日本パルスモーター株式会社 Multi-axis linear motor actuator

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