JP2014146478A - Planar heater and device including the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a planar heater that is thin and includes a graphene film following a shape required for a device, and a device including the planar heater.SOLUTION: There is provided a planar heater that comprises: a first base material 1; a graphene film 3 disposed on the first base material 1; and an electrode 11. In the planar heater, the graphene film 3 has a thickness of 0.3 nm or more and 7.2 nm or less, and a sheet resistance of 1.0 kΩ/square or more and 24.0 kΩ/square or less. The planar heater further may include a second base material disposed on the graphene film 3.

Description

The present invention relates to a planar heater and a device using the same. In particular, the present invention relates to a planar heater including a graphene film that follows a shape required for a device and a device using the planar heater.

The graphene film is a planar crystalline carbon film with SP ₂ bonded carbon atoms, and is expected to be used in various industrial applications due to its high light transmittance and electrical conductivity. So far, many transparent conductive films and transparent electrodes have been reported as examples of using graphene films. Recently, an example of using a graphene film as a heating element has been reported. So far, ITO and metal nanowires have been mainly used as the heating element of the transparent film heater. However, in order to produce a heater having a high response speed, it is necessary to reduce the thickness of the heating element itself. Graphene is one of the materials that can solve this problem.

For example, Patent Document 1 includes a first region made of graphene, and at least one of a void surrounded by the first region and having higher light transmittance than the first region, graphene oxide, a transparent polymer material, and an inorganic material. The heater which pinched | interposed the 1st layer of 1st electroconductive graphene sheet containing the 2nd area | region which consists of two transparent base materials, such as a glass substrate, is described. However, in Patent Document 1, the transmittance of the entire conductive graphene sheet is defined by the ratio of two regions having different transmittances. Therefore, when a high-resistance graphene sheet such as a heating element of a heater is formed, transmission is performed. Unevenness of rate occurs. In addition, from the relationship between the conductive graphene sheet coverage and the sheet resistance described in Patent Document 1, it is necessary to reduce the coverage when attempting to form a high-resistance graphene sheet, and the heat generation efficiency on the entire heat generation surface is reduced. Resulting in.

Further, in Patent Document 2, heat rays etched from a graphene film formed on a transparent substrate are arranged on a substrate such as a vehicle windshield, side glass, rear glass, side mirror, architectural glass, or mirror, and frost or moisture. A heater that removes water is described. However, Patent Document 2 merely replaces the conventional heat ray with graphene, and does not describe the performance required for graphene. Moreover, since the heater is provided with wiring, the temperature distribution on the heat generation surface is difficult to be uniform. Any of the prior arts is applied to a planar substrate, and the application range of the film heater is greatly limited.

JP 2012-216497 A Korean Patent Registration No. 101147252

The present invention solves the above-described problems, and an object thereof is to provide a planar heater having a thin graphene film that follows a shape required for a device and a device using the same. .

According to an embodiment of the present invention, a first base material, a graphene film disposed on the first base material, and an electrode are provided, and the graphene film has a thickness of 0.3 nm or more 7 A planar heater having a sheet resistance of 1.0 kΩ / □ or more and 24.0 kΩ / □ or less is provided.

The planar heater may further include a second base material disposed on the graphene film.

In the planar heater, when a voltage of 5 V or more and 40 V or less is applied to the graphene film, a temperature rise temperature of 10 ° C. or more and 35 ° C. or less is applied, and power consumption is 300 W / m ² or more and 870 W / m ² or less. It may be.

In the planar heater, the graphene film may be formed by stacking 4 to 12 layers of graphene.

In the planar heater, a total thickness of the graphene film and the first substrate may be 100 μm or less.

In the planar heater, a total thickness of the graphene film and the first base material and / or the second base material may be 200 μm or less.

In the planar heater, the graphene film may be formed by a microwave surface wave plasma chemical vapor deposition method or a method of reducing graphene oxide.

In the planar heater, the first base material may be a transparent base material and may have a transmittance of 60% or more.

In the planar heater, the first base material may be a diamond thin film.

In the planar heater, the first base material and the second base material may be transparent base materials and may have a transmittance of 50% or more.

In the planar heater, the first base material and / or the second base material may be a diamond thin film.

In the planar heater, the first base material may have flexibility.

In the planar heater, the first base material and / or the second base material may have flexibility.

Moreover, according to one Embodiment of this invention, the device provided with the planar heater in any one of the said is provided.

According to the present invention, a planar heater including a thin graphene film that follows a shape required for a device and a device using the same are provided. In addition, a surface heater that can be driven with low power consumption can be provided. The planar heater according to the present invention is thin and includes a graphene film that follows the shape required for the device, and thus can be disposed in devices having various shapes.

It is a mimetic diagram showing sheet heater 10 concerning one embodiment of the present invention. It is a mimetic diagram showing sheet heater 20 concerning one embodiment of the present invention. It is a schematic diagram which shows the manufacturing method of the planar heater 10 which concerns on one Embodiment of this invention. It is a schematic diagram which shows the manufacturing method of the planar heater 10 which concerns on one Embodiment of this invention. It is a mimetic diagram of device 100 concerning one embodiment of the present invention. 1 is a schematic diagram illustrating a graphene film forming apparatus 1000 according to an embodiment of the present invention. It is a schematic diagram of the planar heater 200 which concerns on one Example of this invention. It is a Raman spectrum of the graphene film 3 which concerns on one Example of this invention. It is a Raman spectrum of the graphene film | membrane formed into a film by the conventional thermal CVD method. It is a schematic diagram of the planar heater 400 which concerns on one Example of this invention. It is a schematic diagram of the light control and color conversion device 500 which concerns on one Example of this invention.

As described above, a heater using a graphene film known so far as a heating element requires some patterning in order to ensure transmittance, and sufficient heating efficiency and uniformity of temperature distribution on the heating surface. It was difficult to ensure. As a result of intensive studies, the present inventors have found that these problems can be solved by using a high-resistance graphene film as a heating element, and have completed the present invention.

Hereinafter, a planar heater and a device using the same according to the present invention will be described with reference to the drawings. However, the planar heater and the device using the same according to the present invention are not construed as being limited to the description of the following embodiments and examples. Note that in the drawings referred to in this embodiment mode and examples, the same portions or portions having similar functions are denoted by the same reference numerals, and repetitive description thereof is omitted.

FIG. 1 is a schematic diagram showing a planar heater 10 according to an embodiment of the present invention. A planar heater 10 according to the present invention includes a base material 1 (first base material) and a graphene film 3 disposed on the base material 1. An electrode 11 is provided on the graphene film 3. The position where the electrode 11 is disposed is not particularly limited, but is preferably an end portion of the graphene film 3. In the present invention, the substrate 1 may be a transparent member or a highly light transmissive member, but is not particularly limited thereto, and may be a member that does not transmit light. Moreover, the base material 1 may be a member having flexibility or a member having high rigidity. For example, inorganic materials such as glass, silicon, sapphire, nanocrystalline diamond thin film, metal, phenol resin (PF), epoxy resin (EP), melamine resin (MF), urea resin (urea resin, UF), unsaturated polyester Resin (UP), alkyd resin, polyurethane (PUR), thermosetting polyimide (PI), polyethylene (PE), high density polyethylene (HDPE), medium density polyethylene (MDPE), low density polyethylene (LDPE), polypropylene (PP ), Polyvinyl chloride (PVC), polyvinylidene chloride, polystyrene (PS), polyvinyl acetate (PVAc), Teflon (registered trademark) (polytetrafluoroethylene, PTFE), ABS resin (acrylonitrile butadiene styrene resin), AS resin , Acrylic resin (PMMA , Polyamide (PA), nylon, polyacetal (POM), polycarbonate (PC), modified polyphenylene ether (m-PPE, modified PPE, PPO), polybutylene terephthalate (PBT), polyethylene terephthalate (PET), glass fiber reinforced polyethylene terephthalate Organic materials such as (GF-PET), cyclic polyolefin (COP), polydimethylsiloxane (PDMS), polyphenyl sulfide (PPS), polyethersulfone (PES), and polyethylene naphthalate (PEN) can be used. However, it is not limited to these. Further, when a metal such as gold, silver, copper, titanium, nickel, aluminum, iron, molybdenum, cobalt, iridium, or an alloy such as stainless steel or nickel chrome is used for the base material 1 or the base material 5, the present invention is used. Such graphene film 3 can be directly synthesized.

Since it uses for a planar heater, it is preferable that the base material 1 is formed with a material with high heat conductivity. Further, when the resin as described above is used, the base material 1 is formed with a thickness that can realize the predetermined thermal conductivity required for the device to be applied. Here, the thickness of the base material 1 can be arbitrarily set according to the material to be used and the required thermal conductivity. When the graphene film 3 disposed on the base material 1 is attached to another member and used, the base material 1 can be made thin as long as the strength necessary to protect the graphene film 3 can be secured. In one embodiment, the planar heater 10 has a total thickness of the graphene film 3 and the substrate 1 of 100 μm or less.

In the planar heater 10 according to this embodiment, the graphene film 3 is preferably disposed on the substrate 1 with a uniform thickness. In one embodiment, the graphene film 3 has a thickness of 0.3 nm to 7.2 nm, and preferably 1.2 nm to 3.6 nm. If the thickness is thinner than 0.3 nm, it may be difficult to obtain a sufficient calorific value. On the other hand, if the thickness exceeds 7.2 nm, it becomes difficult to impart sufficient light transmission to the planar heater. If the thickness of the graphene film 3 is uniform, the uniformity of the temperature distribution over the entire heat generating surface of the planar heater 10 can be obtained. The graphene film 3 has a sheet resistance of 1.0 kΩ / □ or more and 24.0 kΩ / □ or less, and preferably 2.0 kΩ / □ or more and 6.0 kΩ / □ or less. If the sheet resistance is less than 1.0 kΩ / □, it may be difficult to obtain a sufficient calorific value.

The planar heater 10 according to the present embodiment gives a temperature increase temperature of 10 ° C. or more and 35 ° C. or less when a voltage of 5 V or more and 40 V or less is applied to the graphene film 3, and at this time, power consumption is 300 W / m. ² or more and 870 W / m ² or less. Here, giving a temperature increase temperature of 10 ° C. or more and 35 ° C. or less means that the surface temperature of the substrate 1 of the planar heater 10 at 25 ° C. rises in the range of 35 ° C. to 60 ° C., for example.

In the planar heater 10 according to the present embodiment, the graphene film 3 has a structure in which graphene is stacked with four to twelve layers. Since the graphene film 3 according to the present embodiment has a structure in which a plurality of layers of graphene are stacked, even when a part of one layer has a defect, a current flows through the other layer. The overall amount of heat generation is maintained, and the uniformity of the temperature distribution is not impaired. If the graphene is less than four layers, it becomes difficult to maintain the amount of heat generated in the planar heater 10. The light transmittance of single-layer graphene is about 97.7%, and the light transmittance decreases as the power increases every time the total number increases by one layer. If the graphene exceeds 12 layers, it becomes difficult to obtain the light transmittance required for a transparent planar heater. When the planar heater 10 is a transparent planar heater, the graphene film 3 preferably has a transmittance of 75% or more, and preferably has a transmittance of 60% or more in the surface direction of the planar heater 10.

As another embodiment, a schematic diagram of a planar heater 20 is shown in FIG. The planar heater 20 includes a base material 1 (first base material) and a graphene film 3 disposed on the base material 1, and the base material 5 (second base material) disposed on the graphene film 3. A substrate). An electrode 11 is provided on the graphene film 3. The position where the electrode 11 is disposed is not particularly limited, but is preferably an end portion of the graphene film 3. For the base material 5, the same member as the base material 1 described above can be used, and detailed description thereof is omitted. Moreover, the base material 1 and the base material 5 may be the same member, and may differ. Moreover, it is good also considering the base material 1 or the base material 5 as a protective film. In this case, the base material 1 or the base material 5 can be made thin as long as the strength necessary to protect the graphene film 3 can be secured. In one embodiment, the sheet heater 20 has a total thickness of the graphene film 3 and the base material 1 and / or the base material 5 of 200 μm or less. Further, when the planar heater 20 is a transparent planar heater, it is preferable to have a transmittance of 50% or more in the surface direction of the planar heater 20. Since other configurations are the same as those of the above-described embodiment, detailed description thereof is omitted.

If the above-described characteristics can be obtained, it can be formed by a known method. For example, a microwave surface wave plasma chemical vapor deposition method, a method of reducing graphene oxide, or the like can be given. The graphene film 3 according to the present invention is particularly preferably formed by a microwave surface wave plasma chemical vapor deposition method. Furthermore, by using a roll-to-roll type microwave surface wave plasma chemical vapor deposition method, a large-area graphene film 3 can be produced in large quantities at low cost. As a method for forming a graphene film using a microwave surface wave plasma chemical vapor deposition method, for example, a method reported by the present inventors in International Publications WO2011 / 115197 and JP2012-162442A can be used. Further, as a method for forming a graphene film using a roll-to-roll method, for example, the method reported by the present inventors in International Publication WO2011 / 115197, JP2012-162442 and CARBON 50 (2012) 2615-2619 Can be used. Moreover, it can also manufacture using the method disclosed by Japanese Patent Application No. 2012-165690 by the present inventors. The method for reducing graphene oxide is described in J. Zhao et al, ACS Nano, 4, 5245 (2010) and JR Hauptmann, Phys. Chem. Chem. Phys., 14, 14277 (2012). The method can be used.

(Manufacturing method of planar heater)
A method for manufacturing the planar heater 10 using the substrate 1 to which the graphene film 3 is transferred will be described. FIG. 3 is a schematic diagram showing a method for manufacturing the planar heater 10 according to an embodiment of the present invention. When the base material 1 and / or the base material 5 is a base material having adhesiveness, the base material 5 is adhered to the graphene film 3 (FIG. 3A) transferred to the base material 1 to obtain a planar shape. The heater 10 can be manufactured (FIG. 3B).

Moreover, when the base material 1 or the base material 5 does not have adhesiveness, the graphene film 3 can be adhere | attached on the base material 5 through the resin layer 2 (FIG. 4). For example, a resin for forming a resin layer 2 for adhering the graphene film 3 is applied to one surface of the substrate 5, and the substrate 1 on which the graphene film 3 is formed is adhered to the resin 2; The resin 2 is cured to form the resin layer 2, and the graphene film 3 is adhered (FIG. 4B). As the resin used for the resin layer 2, a known resin can be used as long as the adhesiveness with the graphene film 3 can be obtained. In the present embodiment, it is preferable to use a photocurable resin. The thermosetting resin is not preferable because the solvent is vaporized during heating and air bubbles may be generated between the resin layer 2 and the graphene film 3.

In addition, also when one of the base material 1 and the base material 5 has adhesiveness and the other does not have adhesiveness, the planar heater 10 can be manufactured by any one of the adhesion processes described above. In the above-described embodiment, the case where the graphene film 3 is transferred to the base material 1 has been described. However, the graphene film 3 is also transferred to the base material 5, and the base material 1 and the graphene transferred with the graphene film 3 are transferred. The base material 5 to which the film 3 is transferred may be bonded to the base material 1 so that the graphene films 3 are in close contact with each other. Moreover, the planar heater 10 may be affixed to the support base material of a device, and the base material 1 which transferred the graphene film 3 may be affixed so that the graphene film 3 may contact | adhere to the support base material of a device. When the base material 1 and / or the base material 5 is a flexible member, it can be attached so as to follow the shape of the device.

(device)
A device can be manufactured using the planar heater 10 according to the present invention described above. FIG. 5 is a schematic diagram of a device 100 according to an embodiment of the present invention. The device 100 has, for example, a structure in which a part of the graphene film 3 of the planar heater 10 is exposed and two electrodes 11 are disposed. A power supply 15 is connected to the two electrodes 11 via a wiring 13.

In the device 100 having such a configuration, the graphene film 3 functions as a heating element, and can be used for various devices including a heating device. Specific examples will be described in Examples.

As described above, the planar heater according to the present invention is provided with a planar heater including a thin graphene film that follows the shape required for the device and a device using the planar heater. The planar heater according to the present invention is thin and includes a graphene film that follows the shape required for the device, and thus can be disposed in devices having various shapes.

Example 1
A graphene film was formed using the graphene film formation method described above. FIG. 3 is a schematic view showing a graphene film forming apparatus 1000 according to an embodiment of the present invention. In the film forming apparatus 1000, a rolled copper foil (A4 size, thickness 33 μm) manufactured by Fukuda Metal Co., Ltd. was disposed as the film forming base material 1010. As the microwave surface wave plasma generation unit 1300, a slot antenna type plasma apparatus in which four quartz plates are arranged is used. The inside of the vacuum chamber 1100 was exhausted to 10 ⁻⁴ Pa or less through the exhaust pipe 1500. The height of the sample stage 1200 was adjusted so that the distance between the quartz tube and the film forming substrate 1010 was 50 mm.

A gas containing carbon was introduced into the vacuum chamber 1100 through the gas supply pipe 1400. The gas containing carbon was methane gas 30 SCCM, argon gas 20 SCCM, and hydrogen gas 10 SCCM. Therefore, the concentration of each raw material gas was methane gas 30 mol%, argon gas 20 mol%, and hydrogen gas 10 mol%. . The pressure in the vacuum chamber 1100 was maintained at 3 Pa using a pressure adjusting valve (not shown) connected to the exhaust pipe 1500.

Plasma was generated at a microwave power of 18.0 kW, and graphene was deposited on the deposition base material 1010. The temperature of the film-forming substrate 1010 during the plasma treatment was measured by bringing an alumel-chromel thermocouple into contact with the sample table 1200. Through the plasma CVD process, the temperature of the film forming substrate 1010 was approximately 300 ° C.

A 50 μm thick silicon-based slightly adhesive sheet (E-Mask DM100, manufactured by Nitto Denko Corporation) was used as the substrate 1, and it was laminated to the graphene film 3 formed on the substrate 1010 for film formation. Thereafter, the film-forming substrate 1010 was etched using ammonium persulfate (0.5 mol / l), and the substrate 1 and the graphene film 3 were washed with running water. By these steps, a sheet of the graphene film 3 having a length of 6 cm and a width of 4 cm was obtained.

A base material 5 made of the same material as the base material 1 was prepared, and the graphene film 3 was transferred by the same process. Thereby, a sheet of the graphene film 3 having a length of 6 cm and a width of 3 cm was obtained. The base material 1 and the base material 5 were bonded together so that the two-layer graphene film 3 adhered. A silver paste (manufactured by Fujikura Kasei Co., Ltd., Dotite room temperature drying type) was applied onto the exposed graphene film 3 on the substrate 1 side. Preferably, a silver paste is applied so as to be in contact with the side of the graphene film. Two electrodes 11 were formed by natural drying in the air. The silver paste may be provided so as to hold the substrate 5. Through the above steps, the planar heater 200 of Example 1 was obtained. FIG. 7 is a schematic diagram of the planar heater 200. 7A shows a top view of the planar heater 200, and FIG. 7B shows a cross-sectional view of the planar heater 200 along AA 'in FIG. 7A. When the resistance value between the electrodes 11 of the planar heater 200 was measured, it was about 1 kΩ.

(Transmittance)
The transmittance of the planar heater 200 was measured. For the transmittance measurement, a haze meter (NDH5000SP) manufactured by Nippon Denshoku Industries Co., Ltd. was used. When the transmittance was measured at a plurality of measurement positions for a sample in which the two slightly adhesive sheets 1 and 5 were stacked, the average was 76.8%. When the transmittance of the planar heater 200 was measured at a plurality of measurement positions, the average was 57.6%. Since the transmittance of graphene decreases by 2.3% in one layer, the total of graphene included in the two graphene films 3 of the planar heater 200 was estimated to be 12 to 13 layers.

(Temperature measurement)
Temperature was measured by applying a voltage to the planar heater 200. Digital thermo labels (D-38, D-50) manufactured by NOF Engineering Co., Ltd. were used for temperature measurement. A digital thermo label was affixed on the substrate 5 of the planar heater 200, and the temperature was measured semi-quantitatively.

(Current value measurement)
A source meter (B2902) manufactured by Agilent Technologies was used as the power source, and the current flowing between the electrodes 11 during voltage application was detected.

When voltages of 10 V, 20 V, 30 V and 40 V were applied, the current values were 9.9 mA, 19.8 mA, 29.8 mA and 39.28 mA, respectively. When the voltage was 40 V, the digital thermolabel showed 60 ° C. From the difference from room temperature, the temperature rise was about 35 ° C. Moreover, from the obtained result, power consumption was about 870 W / m < ² >.

(Raman spectrum)
The Raman spectrum of the graphene film 3 used in Example 1 is shown in FIG. Further, FIG. 9 shows a Raman spectrum of a graphene film formed by a conventional general thermal CVD method. In addition, FIG. 9 was reproduced from X. Li et al, Science, 324, 1312 (2009). In the spectrum obtained by measurement by the resonance Raman scattering measurement method, the maximum peak intensity in the range of 1560 cm ^{−1 to} 1600 cm ⁻¹ is G, and the maximum peak intensity is in the range of 1310 cm ^{−1 to} 1350 cm ⁻¹ . When the maximum peak intensity is D, the G / D ratio of the graphene film formed by the thermal CVD method is larger than 1, whereas the G / D ratio of the graphene film 3 of Example 1 is 1 or less. Met. Such a graphene film 3 having a G / D ratio of 1 or less can be obtained by the above-described microwave surface wave plasma chemical vapor deposition method.

(Example 2)
A planar heater 300 having a different number of layers of the graphene film 3 from that of Example 1 was produced. From the result of transmittance measurement with a haze meter, the total graphene of the two graphene films 3 was estimated to be about four layers. The resistance measured by a tester was about 2 kΩ. When 5 V, 10 V, 20 V, 30 V and 40 V were applied by the source meter, the current values were 1.8 mA, 3.7 mA, 7.4 mA, 11.2 mA and 15 respectively. 0.0 mA. When the voltage was 40 V, the digital thermo label showed 40 ° C. From the difference from room temperature, the temperature rise was about 15 ° C. Moreover, from the obtained result, power consumption was about 300 W / m < ² >.

(Example 3)
As Example 3, an example in which a diamond thin film is stacked on a graphene film will be described. The diamond thin film was formed by, for example, the method disclosed by the present inventors in International Publication WO2005 / 103326. The laminated body thus produced is suitable for a device having a high response speed.

Various devices can be formed by producing a laminated heating element of a diamond thin film (for example, 20 W / mk) having high thermal conductivity and the graphene film 3 according to the present invention. For example, it is possible to produce a thermal cycler with a high response speed when DNA is amplified by polymerase chain reaction (PCR). FIG. 10 is a schematic diagram of a heat block 400 of a thermal cycler. FIG. 10A shows a top view of the heat block 400, and FIG. 10B shows a cross-sectional view of the heat block 400 along AA 'in FIG. The heat block 400 has, for example, a structure in which a diamond thin film 401 and a graphene film 3 are stacked. Electrodes 411 are provided at both ends of the graphene film 3 and function as a heating element. Further, it is preferable that a support body 420 having a hole 425 for supporting and heating the microtube is disposed on the diamond thin film 401. The support 420 is formed of a member having excellent thermal conductivity such as metal. The diamond thin film 401 can be either single crystal or polycrystalline (micro diamond, nano crystal diamond). Further, a heat insulating protective film 403 may be attached to the surface of the opposite graphene film 3 on which the diamond thin film 401 is formed.

In addition, although the example which arrange | positions the support body 420 separately on the diamond thin film 401 was shown in FIG. 10, it is not limited to this. For example, the diamond thin film 401 and the support 420 can be integrally formed by forming a thick diamond thin film and forming a hole 425 therein by etching or the like. However, in this case, the hole 425 formed in the diamond thin film 401 may have a depth that covers or accommodates the PCR reaction solution, and does not necessarily support the entire microtube.

(Example 4)
As Example 4, a device combining a planar heater according to the present invention and special ink will be described. Here, the special ink is one whose color and transmittance change depending on temperature. FIG. 11 is a schematic diagram of a light control / color conversion device 500. For example, the graphene film 3 is disposed between two substrates 501 and 505 made of PET film, and electrodes 511 using silver paste or the like are disposed on both ends of the graphene film 3. A special ink layer 520 is provided on the substrate 501 or below the substrate 505.

As the special ink, for example, a special ink (ST color: UV-SS35 black No. 4) manufactured by Kuboi Ink Co., Ltd. can be used. In this case, the special ink layer 520 can be formed by drying and drying the ink by ultraviolet irradiation. The dimming / color conversion device 500 having such a structure allows the special ink layer 520 to change color and transmittance in a temperature-dependent manner as the graphene film 3 generates heat. The dimming / color conversion device 500 can be used for, for example, a light shielding curtain attached to a window, a pixel of a display device, or the like.

The planar heater according to the present invention is provided with a planar heater having a thin graphene film that follows the shape required for the device and a device using the planar heater. In addition, a planar heater that can be driven with low power consumption can be provided. Therefore, the planar heater according to the present invention is thin and includes a graphene film that follows the shape required for the device, and thus can be disposed in devices having various shapes.

For example, the present invention can be applied to the following devices. For use as a heater, for example, heaters for anti-fogging / condensation prevention / melting snow, goggles, glasses, glass-covered buildings, helmets, heaters for anti-fogging / dew condensation prevention for washstands, auxiliary heaters for HID lamps, automobiles and trains (Front) glass anti-fogging / condensation prevention / snow melting heaters, building roofs, arcade and other snow melting heaters, heat insulation PET bottles, stage heating for microscope spectroscopic measurements Heater, glass slide with heater, pipette with heating function, food heating sheet, flexible portable heater, electric blanket, electric carpet, warm bench (bench for outdoor watching such as toilet seat, baseball, soccer, etc.) thermal cycler, hot plate, pot, OA machines such as cooking appliances such as electric rice cookers, copiers, fax machines, printers, etc. Preheating and drying heater, it is possible to use the heat-insulation device sealer or the like. In addition, examples of combinations with special inks include blackout curtains, vehicle privacy glass, sunglasses, electronic diffraction devices, blackout films, devices that change from transparent windows to mirrors due to temperature changes, display pixels, and surface changes due to temperature changes. The device etc. which the uneven | corrugated structure of this change are mentioned.

In addition, manufacturing of display devices and electronic devices, advanced industrial electric heating devices for semiconductor manufacturing, beauty-related devices such as hot colors and permanent devices, pellet manufacturing, molds, plastic manufacturing equipment such as heating and drying of adhesive effects, massage Machine, medical test equipment, medical / beauty related equipment such as bedrock bath, food processing equipment, food related equipment such as food tray heating / heat insulation, 24-hour bath, electric water heater, housing equipment such as panel heater, rubber tank Heat retention / condensation prevention heaters, food heat insulation heaters, railway traffic lights / point snow-melting / snow-prevention heaters, self-luminous delineators, snow-prevention heaters, rearview mirror heaters, anti-condensation heaters in fire alarms, change machines Inside anti-condensation heater, plastic model dryer heater, pet operating table warming heater, electric warmer, whole body shiatsu massage machine,
Home thermotherapy device, eye mask heater, light transmission type snow melting arcade snow melting heater, crossing obstacle detector snow melting heater, parabolic antenna snow melting heater, large parabolic antenna snow melting heater, pipe anti-freezing heater, cryopump heat insulation heater, It can be used as pet heater mats, beauty products (neck warmers), and far-infrared beam showers.

The planar heater according to the present invention can also be used as a ribbon heater. For example, ETC equipment snow-prevention heaters, coin-parking snow-melting heaters, Shinkansen platform roof snow-melting heaters, light oil solidification prevention heaters (for keeping oil oil tanks), pipes and piping freeze prevention heaters, mobile exhibition vehicle step section freeze preventions Heater, cleaning vehicle anti-freezing heater, outdoor stadium bench seat heating (bench heater), heat source sheet, bedrock bed heater, warmer heater for transporting stretcher to operating table, reptile pet heater, battery warmer , Heaters for heat insulation of lunchboxes, heaters for shruffs (sleeping bags), waist warmers, snow melting heaters for multi-story parking lots, snow melting heaters for roofs, anti-freezing heaters for scaffolding, water purifier anti-freezing heaters, concrete curing sheets, blades for wind power generation (FRP) repair Heater, chair with heater, slimming equipment for beauty, water base De heater, barber for treatment cap, thermal treatment device, far-infrared thermal therapy pad, cosmetic leg warmers, cosmetic hand warmer, can be applied to the seat heater and the sea urchin which was developed in space applications.

1: first substrate, 2: resin layer, 3: graphene film, 5: second substrate, 10: planar heater, 11: electrode, 13: wiring, 15: power supply, 20: planar heater, 100: Device, 200: Planar heater, 300: Planar heater, 400: Heat block, 401: Diamond thin film, 405: Protective film, 411: Electrode, 420: Support, 425: Hole, 500: Light control / color Conversion device, 501: substrate, 505: substrate, 511: electrode, 520: special ink layer, 1000: film forming apparatus, 1010: substrate for film formation, 1100: vacuum chamber, 1200: sample stage, 1300: micro Wave surface wave plasma generator, 1400: gas supply pipe, 1500: exhaust pipe, 1610: first roll, 1630: second roll

Claims (14)

A first base, a graphene film disposed on the first base, and an electrode;
The planar heater is characterized in that the graphene film has a thickness of 0.3 nm to 7.2 nm and a sheet resistance of 1.0 kΩ / □ to 24.0 kΩ / □. The planar heater according to claim 1, further comprising a second base material disposed on the graphene film. When a voltage of 5 V or more and 40 V or less is applied to the graphene film, a temperature increase temperature of 10 ° C. or more and 35 ° C. or less is applied, and power consumption is 300 W / m ² or more and 870 W / m ² or less. The planar heater according to claim 1 or 2. The planar heater according to any one of claims 1 to 3, wherein the graphene film is formed by stacking 4 to 12 layers of graphene. 2. The planar heater according to claim 1, wherein a total thickness of the graphene film and the first substrate is 100 μm or less. 3. The planar heater according to claim 2, wherein the total thickness of the graphene film and the thickness of the first base material and / or the second base material is 200 μm or less. The planar heater according to any one of claims 1 to 6, wherein the graphene film is formed by a microwave surface wave plasma chemical vapor deposition method or a method of reducing graphene oxide. The first substrate is a transparent substrate;
The planar heater according to claim 1, comprising a transmittance of 60% or more. The surface heater according to claim 8, wherein the first base material is a diamond thin film. The first substrate and the second substrate are transparent substrates;
The planar heater according to claim 2, which has a transmittance of 50% or more. The surface heater according to claim 10, wherein the first base material and / or the second base material is a diamond thin film. The planar heater according to claim 1, wherein the first base material has flexibility. The planar heater according to claim 2, wherein the first base material and / or the second base material has flexibility. A device comprising the planar heater according to any one of claims 1 to 13.