CN104192832B - A kind of method and the graphene film obtained by the method for transfer Graphene - Google Patents
A kind of method and the graphene film obtained by the method for transfer Graphene Download PDFInfo
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- CN104192832B CN104192832B CN201410401623.XA CN201410401623A CN104192832B CN 104192832 B CN104192832 B CN 104192832B CN 201410401623 A CN201410401623 A CN 201410401623A CN 104192832 B CN104192832 B CN 104192832B
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- graphene
- mould release
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Abstract
The invention discloses the method and the graphene film obtained by the method for a kind of transfer Graphene, the method is transferred to the Graphene being grown in growth substrate in target substrate using two-sided glued membrane.The present invention has the growth substrate of graphene film using very thin two-sided glued membrane rolling laminating length, the methods such as Jing burn intos stripping remove growth substrate, again in Graphene face membrane, the method of another side laminating target substrate realizes transfer of the Graphene from growth substrate to target substrate, process is simple, the cost of transfer Graphene can be greatly reduced, using the stickiness of double faced adhesive tape, obtain the graphene film good with target substrate adhesion, the adhesion of Graphene and target substrate is improve, perfect sunken high-quality graphene film can be obtained.
Description
Technical field
The present invention relates to the method and the graphene film obtained by the method for a kind of transfer Graphene.
Background technology
Graphene is two-dimentional into the monolayer of cellular character by regular hexagon close-packed arrays by the carbon atom of sp2 orbital hybridizations
Planar structure its thickness only has 0.3354nm.It is to find most thin material in the world at present.Graphene energy gap is almost nil,
Carrier mobility (1.5 × 104cm2/ (Vs)) ideal for replacing silicon to become nanometric circuit is expected to more than commercial silicon more than 10 times
Material.Graphene does not only have excellent electric property and perfect structure, and peculiar performance is also shown in terms of other, such as prominent
Heat conductivity, the light transmission of height, extraordinary specific surface area etc., this causes Graphene to lead in electronics, information, the energy and material etc.
Domain has broad application prospects.
Many applications of Graphene are which is transferred in target substrate by growth substrate, and currently for chemical vapor deposition
Graphene obtained by area method, has been developed using PMMA, heat release adhesive tape, polymer bonding agent, electrostatic protection film etc.
Transfer method is shifting graphene film.Or but some Graphene transfer techniques complex steps of employing, transfer area are received at present
Limit, or relatively costly, or through high temperature, so as to get Graphene performance it is impacted, or Graphene and target substrate
Adhesion is weaker, and the Graphene for finally giving is imperfect.
Such as Graphene is shifted as medium by the use of PMMA, the method easily makes Graphene damaged when Graphene is shifted,
Complete graphene film is hardly resulted in, operation is required accurate, it is also difficult to shift large-area Graphene.
Heat release adhesive tape transfer Graphene is that the growth substrate that length has Graphene is fitted on heat release adhesive tape, removes life
Long substrate, then will turn to have the heat release adhesive tape gluing of Graphene in target substrate, then using the heat release of heat release adhesive tape
Characteristic, heating make which lose stickiness, and Graphene has just been gone in target substrate.Electrostatic protection film transfer Graphene is to utilize electrostatic
Then growth substrates are removed, obtain Graphene/quiet by the electrostatic adsorption Graphene of the laminating comprising growth substrates of protecting film
Electric protection film combination body, finally shows consideration for Graphene/electrostatic protection film combination together in target substrate, and release electrostatic goes to destatic
Protecting film, obtains graphene film.The defect of both approaches is also apparent from：(1) heat release glued membrane or electrostatic protection film turn
When moving Graphene, when discharging glue or go to destatic using high-temperature heating, may result in release or go to destatic not exclusively,
Make the Graphene for obtaining imperfect, and heat release adhesive tape price is higher, increased production cost.Using the side of polymer bonding agent
Method shifts Graphene, it is difficult to the thickness of precise control adhesive layer, will solidify through the method for UV illumination or heating, take consumption
Electricity, increased production cost in continuous production；(2) using heat release adhesive tape transfer Graphene, heat release adhesive tape is expensive,
Cost increases, and the Graphene performance of transfer also through high-temperature baking, will be affected in degumming；(3) with electrostatic protection film transfer
The combination of Graphene, Graphene and target substrate is weaker, when going to destatic, or adopting high-temperature heating, or sub-cooled,
High temperature affects performance, and when going to destatic incomplete, the Graphene for obtaining has breakage.
The content of the invention
First purpose of the present invention is to solve the problems, such as prior art, there is provided a kind of technique simplifies, cost of transfer
Reduce, the method for the Graphene that obtain completely flawless transfer Graphene high with target substrate adhesion.
Realize the object of the invention technical scheme be it is a kind of transfer Graphene method, will be grown in using two-sided glued membrane
Graphene in long substrate is transferred in target substrate.
A kind of is the method for shifting a layer graphene：Step one：The upper mould release membrance of two-sided glued membrane is torn, double faced adhesive tape is left
Film body and lower mould release membrance；
Step 2：Preparing growth has the growth substrate of Graphene, fits with the two-sided glued membrane after step one process, Graphene
It is fitted on double faced adhesive tape film body；
Step 3：Remove growth substrate；
Step 4：Fit on Graphene layer protecting film；
Step 5：The lower mould release membrance of double faced adhesive tape film body is torn, by the Graphene with protecting film and double faced adhesive tape film body patch
Close in target substrate；
Step 6：Protecting film is torn, transfer of the Graphene by growth substrate to target substrate is completed.
Another kind is the method for shifting multi-layer graphene：Step one：The upper mould release membrance of two-sided glued membrane is torn, is stayed two-sided
Glued membrane body and lower mould release membrance；
Step 2：Preparing growth has the growth substrate of Graphene, fits with the two-sided glued membrane after step one process, Graphene
It is fitted on double faced adhesive tape film body；
Step 3：Remove growth substrate；
Step 4：Preparing growth has the growth substrate of Graphene, by the graphite in the Graphene in this step and the 3rd step
Alkene is fitted；Growth substrate is removed again；According to the number of plies of the Graphene of required transfer, this step is circulated；
Step 4：In layer protecting film of fitting on the Graphene of the superiors；
Step 5：The lower mould release membrance of double faced adhesive tape film body is torn, by the Graphene with protecting film and double faced adhesive tape film body patch
Close in target substrate；
Step 6：Protecting film is torn, transfer of the Graphene by growth substrate to target substrate is completed.
The rolling that fits into described in both approaches is fitted.The method of described removal growth substrate is chemical corrosion method
Or bubble stripping method.The protecting film is PE films or PET film or mould release membrance or electrostatic protection film.The double faced adhesive tape film body includes
Basement membrane, the upper glue layer being compounded in above basement membrane and the lower glue layer being compounded in below basement membrane；Upper glue layer and lower glue layer be silica gel or
Acrylate glue or PET glue, thickness are 2～6um, and viscosity scope is 1～500g；Basement membrane is PET film or PE films, and thickness is 1
～50um.Preferably, viscosity of the viscosity of the upper glue layer less than lower glue layer, the viscosity of lower glue layer is 10～450g；Gluing
The viscosity of layer is 1～100g.The upper mould release membrance be PET mould release membrances or PE mould release membrances or OPP mould release membrances or BOPET mould release membrances or
BOPP mould release membrances, thickness are 25～180um；The lower mould release membrance be PET mould release membrances or PE mould release membrances or OPP mould release membrances or
BOPET mould release membrances or BOPP mould release membrances, thickness are 50～180um.
Second object of the present invention is to provide a kind of graphene film.
Realization the technical scheme is that：A kind of graphene film, is followed successively by Graphene, double faced adhesive tape film body and target lining
Bottom；Double faced adhesive tape film body includes basement membrane, the upper glue layer being compounded in above basement membrane and the lower glue layer being compounded in below basement membrane；Upper glue layer and
The thickness of lower glue layer is identical or differs, and scope is 2～50um, and viscosity is identical or differs, and scope is 1～500g；
Basement membrane thickness is 1～180um.
After employing above-mentioned technical proposal, the present invention has following positive effect：(1) present invention is using very thin double
Face glued membrane rolling laminating length has the methods such as the growth substrate of graphene film, the stripping of Jing burn intos to remove growth substrate, then in Graphene
Face membrane, the method for another side laminating target substrate realize transfer of the Graphene from growth substrate to target substrate, process is simple,
The cost of transfer Graphene can be greatly reduced, using the stickiness of double faced adhesive tape, the Graphene good with target substrate adhesion is obtained
Film, improves the adhesion of Graphene and target substrate, can obtain perfect sunken high-quality graphene film.
(2) present invention uses double faced adhesive tape film transfer, it is possible to reduce the step of solidification, target substrate is not required, the side of making
The use of method is simpler.
(3) upper glue layer of two-sided glued membrane that the present invention is used and the viscosity of lower glue layer can with it is identical also can not with difference, when
When viscosity is differed, viscosity can be rationally controlled, preferably be fitted with target substrate using the big one side of viscosity.
(4) the method according to the invention can also obtain the target substrate for turning to have multiple graphene film.
Description of the drawings
In order that present disclosure is easier to be clearly understood, below according to specific embodiment and accompanying drawing is combined, it is right
The present invention is described in further detail, wherein
Fig. 1 is the structural representation of the two-sided glued membrane of the present invention.
Fig. 2 is the schematic diagram of each step of the invention.
It is numbered in accompanying drawing：Upper mould release membrance 1, double faced adhesive tape film body 2, basement membrane 21, upper glue layer 22, lower glue layer 23, lower mould release membrance
3rd, growth substrate 4, graphene film 5, protecting film 6, target substrate 7
Specific embodiment
(embodiment 1)
See Fig. 1, the two-sided glued membrane that the present embodiment is adopted be followed successively by from top to bottom mould release membrance 1, double faced adhesive tape film body 2 and under from
Type film 3.Under double faced adhesive tape film body 2 includes basement membrane 21, the upper glue layer 22 being compounded in above basement membrane 21 and is compounded in below basement membrane 21
Glue-line 23；Upper glue layer 22 and lower glue layer 23 are silica gel or acrylate glue or PET glue, and thickness is 2～50um, preferably 2-
6um, viscosity scope are 1～500g；In order to obtain more preferable effect, the viscosity of lower glue layer 23 is preferably 10～450g, most preferably
For 50-350g, the viscosity preferably 1～100g of upper glue layer 22, most preferably 10～50g, basement membrane are PET film or PE films, thick
Spend for 1～180um, most preferably preferably 1～50um, more preferably 1～25um, 2～6um.Upper mould release membrance 1 is that PET is release
Film or PE mould release membrances or OPP mould release membrances or BOPET mould release membrances or BOPP mould release membrances, thickness are 25～180um；Lower mould release membrance 3 is
PET mould release membrances or PE mould release membrances or OPP mould release membrances or BOPET mould release membrances or BOPP mould release membrances, thickness are 50～180um, preferably
For 100～180um, certain supporting role can be played when Graphene is shifted.
See Fig. 2, the step of the method for the transfer Graphene of the present embodiment be：
Step one：Upper mould release membrance 1 positioned at the less one side of two-sided glued membrane stickiness is torn, double faced adhesive tape film body 2 and position is left
Lower mould release membrance 3 in the larger one side of stickiness；
Step 2：Preparing growth has the growth substrate 4 of Graphene 5, fits with the two-sided glued membrane rolling after step one process,
Graphene 5 is fitted on double faced adhesive tape film body 2；
Step 3：Growth substrate 4 is removed with chemical corrosion method or bubble stripping method；
Step 4：The rolling laminating layer protecting film 6 on Graphene 5；Protecting film is PE films or PET film or mould release membrance or quiet
Electric protection film.
Step 5：Lower mould release membrance 3 in the larger one side of 2 stickiness of double faced adhesive tape film body is torn, protecting film 6 will be carried
Graphene 5 and the rolling of double faced adhesive tape film body 2 are fitted in target substrate 7；It is 91% for 120um, light transmittance that target substrate 7 is thickness
PET；
Step 6：Protecting film 6 is torn, transfer of the Graphene 5 by growth substrate 4 to target substrate 7 is completed.
Can certainly be upper glue layer 22 and lower glue layer 23 is same viscosity, mould release membrance is arbitrarily torn i.e. in operation
Can.
The finished product obtained by above-mentioned steps is followed successively by Graphene 5, upper glue layer 22, basement membrane 21, lower glue layer 23 and target substrate
7, sheet resistance is 430 Ω/, and light transmittance is 87.3%.
(embodiment 2)
The method of the present invention is identical with 1 principle of documents, but can shift multi-layer graphene as needed.
Step one：Upper mould release membrance 1 positioned at the less one side of two-sided glued membrane stickiness is torn, double faced adhesive tape film body 2 and position is left
Lower mould release membrance 3 in the larger one side of stickiness；
Step 2：Preparing growth has the growth substrate 4 of Graphene 5, fits with the two-sided glued membrane after step one process, graphite
Alkene 5 is fitted on double faced adhesive tape film body 2；
Step 3：Remove growth substrate 4；
Step 4：Preparing growth has the growth substrate 4 of Graphene 5, by the stone in the Graphene 5 and the 3rd step in this step
Black alkene 5 is fitted；Growth substrate 4 is removed again；According to the number of plies of the Graphene of required transfer, this step is circulated；
Step 4：In layer protecting film 6 of fitting on the Graphene 5 of the superiors；
Step 5：Lower mould release membrance 3 in the larger one side of 2 stickiness of double faced adhesive tape film body is torn, protecting film 6 will be carried
Graphene 5 and double faced adhesive tape film body 2 are fitted in target substrate 7；
Step 6：Protecting film 6 is torn, transfer of the Graphene 5 by growth substrate 4 to target substrate 7 is completed.
Particular embodiments described above, has been carried out to the purpose of the present invention, technical scheme and beneficial effect further in detail
Describe bright, the be should be understood that specific embodiment that the foregoing is only the present invention in detail, be not limited to the present invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc., should be included in the guarantor of the present invention
Within the scope of shield.
Claims (8)
1. it is a kind of transfer Graphene method, it is characterised in that：The graphite in growth substrate (4) will be grown in using two-sided glued membrane
Alkene (5) is transferred in target substrate (7), is comprised the following steps：
Step one：The upper mould release membrance (1) of two-sided glued membrane is torn, double faced adhesive tape film body (2) and lower mould release membrance (3) is left；
Step 2：Preparing growth has the growth substrate (4) of Graphene (5), fits with the two-sided glued membrane after step one process, graphite
Alkene (5) is fitted on double faced adhesive tape film body (2)；
Step 3：Remove growth substrate (4)；
Step 4：Laminating layer protecting film (6) on Graphene (5)；
Step 5：The lower mould release membrance (3) of double faced adhesive tape film body (2) is torn, will the Graphene with protecting film (6) (5) and two-sided
Glued membrane body (2) is fitted in target substrate (7)；
Step 6：Protecting film (6) is torn, transfer of the Graphene (5) by growth substrate (4) to target substrate (7) is completed.
2. it is a kind of transfer Graphene method, it is characterised in that：The graphite in growth substrate (4) will be grown in using two-sided glued membrane
Alkene (5) is transferred in target substrate (7), is comprised the following steps：
Step one：The upper mould release membrance (1) of two-sided glued membrane is torn, double faced adhesive tape film body (2) and lower mould release membrance (3) is left；
Step 2：Preparing growth has the growth substrate (4) of Graphene (5), fits with the two-sided glued membrane after step one process, graphite
Alkene (5) is fitted on double faced adhesive tape film body (2)；
Step 3：Remove growth substrate (4)；
Step 4：Preparing growth has the growth substrate (4) of Graphene (5), by the Graphene (5) in this step and step 3
Graphene (5) is fitted；Growth substrate (4) is removed again；According to the number of plies of the Graphene of required transfer, this step is circulated；
Step 5：In layer protecting film (6) of fitting on the Graphene (5) of the superiors；
Step 6：The lower mould release membrance (3) of double faced adhesive tape film body (2) is torn, will the Graphene with protecting film (6) (5) and two-sided
Glued membrane body (2) is fitted in target substrate (7)；
Step 7：Protecting film (6) is torn, transfer of the Graphene (5) by growth substrate (4) to target substrate (7) is completed.
3. it is according to claim 1 and 2 it is a kind of transfer Graphene method, it is characterised in that：Described fits into rolling
Laminating.
4. it is according to claim 1 and 2 it is a kind of transfer Graphene method, it is characterised in that：Described removal growth base
The method at bottom (4) is chemical corrosion method or electrolysis stripping method.
5. it is according to claim 1 and 2 it is a kind of transfer Graphene method, it is characterised in that：The protecting film is PE films
Or PET film or mould release membrance or electrostatic protection film.
6. it is according to claim 1 and 2 it is a kind of transfer Graphene method, it is characterised in that：The double faced adhesive tape film body (2)
Including basement membrane (21), it is compounded in basement membrane (21) upper glue layer (22) above and is compounded in basement membrane (21) lower glue layer (23) below；
Upper glue layer (22) and lower glue layer (23) are silica gel or acrylate glue or PET glue, and thickness is identical or differs, and scope is 2
～50um, viscosity scope are 1～500g；Basement membrane (21) is PET film or PE films, and thickness is 1～180um.
7. it is according to claim 6 it is a kind of transfer Graphene method, it is characterised in that：The viscosity of the upper glue layer (22)
Less than the viscosity of lower glue layer (23)；The viscosity of the lower glue layer (23) is 10～450g；The viscosity of upper glue layer (22) be 1～
100g。
8. it is according to claim 1 and 2 it is a kind of transfer Graphene method, it is characterised in that：The upper mould release membrance (1) is
PET mould release membrances or PE mould release membrances or OPP mould release membrances or BOPET mould release membrances or BOPP mould release membrances, thickness are 25～180um；It is described
Lower mould release membrance (3) is PET mould release membrances or PE mould release membrances or OPP mould release membrances or BOPET mould release membrances or BOPP mould release membrances, and thickness is 50
～180um.
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| CN104451592B (en) * | 2014-12-15 | 2017-02-22 | 中国科学院微电子研究所 | Method for nondestructively transferring graphene from metal surface to surface of target substrate |
| EP3344590A1 (en) * | 2015-09-01 | 2018-07-11 | Corning Incorporated | Methods for transferring graphene films and substrates comprising graphene films |
| CN105589598B (en) * | 2015-12-24 | 2019-05-17 | 无锡格菲电子薄膜科技有限公司 | A kind of manufacturing method of patterned Graphene |
| CN106347501B (en) * | 2016-08-22 | 2018-08-31 | 浙江威罗德汽配科技有限公司 | A kind of nonmetallic vehicle body of graphene overlay film |
| CN106672956A (en) * | 2017-01-21 | 2017-05-17 | 德阳烯碳科技有限公司 | Large-scale graphene transferring method |
| CN110607517B (en) * | 2018-06-14 | 2021-08-06 | 北京石墨烯研究院 | Method for cleaning graphene |
| CN109036713A (en) * | 2018-08-09 | 2018-12-18 | 苏州千层茧农业科技有限公司 | A kind of single side transfer-type graphene film structure and its technique |
| CN110038515A (en) * | 2019-04-28 | 2019-07-23 | 三峡大学 | GIS characteristic gas adsorbed film |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102616769B (en) * | 2012-03-19 | 2013-07-10 | 浙江大学 | Direct graphene film transfer method |
| CN102774118B (en) * | 2012-07-31 | 2015-05-13 | 无锡格菲电子薄膜科技有限公司 | Method for transferring graphene film with static protective film as medium |
| CN103935988B (en) * | 2014-03-24 | 2017-01-11 | 无锡格菲电子薄膜科技有限公司 | Graphene film transfer method |
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| A General Strategy for Hybrid Thin Film Fabrication and Transfer onto Arbitrary Substrates;Yong Zhang et al.;《SCIENTIFIC REPORTS》;20140428;第4卷;4822-2页第1栏第8行至第2栏第13行，图1，图2 * |
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