CN104192832A - Method for transferring graphene and graphene film obtained by method - Google Patents
Method for transferring graphene and graphene film obtained by method Download PDFInfo
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- CN104192832A CN104192832A CN201410401623.XA CN201410401623A CN104192832A CN 104192832 A CN104192832 A CN 104192832A CN 201410401623 A CN201410401623 A CN 201410401623A CN 104192832 A CN104192832 A CN 104192832A
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Abstract
The invention discloses a method for transferring graphene and a graphene film obtained by the method. According to the method, graphene growing on a growth substrate is transferred to a target substrate by virtue of a double-sided adhesive film. The method comprises the steps that the growth substrate on which the graphene film grows is rolled and fitted by virtue of a thin double-sided adhesive film; the growth substrate is removed by the methods such as corrosion and stripping; the film is attached to the surface of the graphene; and the other surface is fitted with the target substrate, so that graphene is transferred to the target substrate from the growth substrate. The method has the advantages that the process is simple, the cost of transferring graphene can be greatly reduced, the graphene film with good binding force with the target substrate is obtained by using the viscosity of the double-sided adhesive tape, the binding force of graphene and the target substrate is improved, and the intact high-quality graphene film free of defects can be obtained.
Description
Technical field
The present invention relates to a kind of graphene film that shifts the method for Graphene and obtained by the method.
Background technology
Graphene is to become its thickness of individual layer two-dimension plane structure of cellular character to only have 0.3354nm by the carbon atom of sp2 orbital hybridization by regular hexagon close-packed arrays.To find in the world at present the thinnest material.Graphene energy gap is almost nil, carrier mobility (1.5 × 10
4cm
2/ (Vs)) and exceed commercial silicon more than 10 times, being expected to replace silicon becomes the ideal material of nanometer circuit.Graphene not only has excellent electric property and perfect structure, other aspects also show peculiar performance, as outstanding thermal conductivity, and the light transmission of height, extraordinary specific surface areas etc., this makes Graphene have broad application prospects in fields such as electronics, information, the energy and materials.
A lot of application of Graphene are that it is transferred in target substrate by growing substrate; and at present for the Graphene of chemical Vapor deposition process gained, developed such as the transfer method that adopts PMMA, heat to discharge adhesive tape, polymer bonding agent, electrostatic protection film etc. and shifted graphene film.But some Graphene transfer techniques that adopt at present or complex steps, to shift area limited, cost is higher, or through high temperature, makes the Graphene performance that obtains influenced, the bonding force of Graphene and target substrate a little less than, the Graphene finally obtaining is imperfect.
Such as utilizing PMMA to shift Graphene as medium, the method easily makes Graphene breakage in the time shifting Graphene, is difficult to obtain complete graphene film, accurate to operational requirement, is also difficult to shift large-area Graphene.
It is that the long growth substrate that has Graphene is fitted in to hot release on adhesive tape that heat discharges adhesive tape transfer Graphene, remove growth substrate, there is the heat of Graphene to discharge adhesive tape gluing in target substrate by turning again, then utilize heat to discharge the hot release characteristics of adhesive tape, heating makes it lose stickiness, and Graphene has just forwarded in target substrate.It is to utilize the electrostatic adsorption of the electrostatic protection film Graphene that comprises growth substrates of fitting that electrostatic protection film shifts Graphene; then growth substrates is removed; obtain Graphene/electrostatic protection film combination; finally Graphene/electrostatic protection film combination is fitted in target substrate; release electrostatic is removed electrostatic protection film, obtains graphene film.The defect of these two kinds of methods is also clearly: when (1) heat discharges glued membrane or electrostatic protection film and shifts Graphene; while utilizing heat discharge glue or remove static; may cause release or remove static incomplete; make the Graphene that obtains imperfect; and it is higher that heat discharges adhesive tape price, increased production cost.Adopt the method for polymer bonding agent to shift Graphene, be difficult to accurately control the thickness of tamanori layer, solidify through the method for UV illumination or heating, power consumption consuming time has increased production cost in the time producing continuously; (2) utilize heat to discharge adhesive tape and shift Graphene, it is expensive that heat discharges adhesive tape, and cost increases, and also will pass through high bake in the time coming unstuck, the Graphene performance that impact is shifted; (3) Graphene shifting with electrostatic protection film, a little less than the combination of Graphene and target substrate, in the time removing static, or adopts heat, or subcooling, temperatures involved performance, and when removal static is incomplete, the Graphene obtaining has breakage.
Summary of the invention
First object of the present invention is to solve the problem that prior art exists, and provides a kind of work simplification, cost of transfer to reduce, high with target substrate bonding force, the method for the complete flawless transfer Graphene of Graphene obtaining.
The technical scheme that realizes the object of the invention is a kind of method that shifts Graphene, utilizes two-sided glued membrane that the Graphene being grown on growing substrate is transferred in target substrate.
A kind of is the method that shifts a layer graphene: step 1: the upper release film of two-sided glued membrane is torn, leave double faced adhesive tape film body and lower release film;
Step 2: preparing growth has the growing substrate of Graphene, with step 1 two-sided glued membrane laminating after treatment, Graphene is fitted on double faced adhesive tape film body;
Step 3: remove growing substrate;
Step 4: the layer protecting film of fitting on Graphene;
Step 5: the lower release film of double faced adhesive tape film body is torn, the Graphene with protective membrane and double faced adhesive tape film body are fitted in target substrate;
Step 6: tear protective membrane, complete Graphene transfer to target substrate by growth substrate.
Another kind is the method that shifts multi-layer graphene: step 1: the upper release film of two-sided glued membrane is torn, leave double faced adhesive tape film body and lower release film;
Step 2: preparing growth has the growing substrate of Graphene, with step 1 two-sided glued membrane laminating after treatment, Graphene is fitted on double faced adhesive tape film body;
Step 3: remove growing substrate;
Step 4: preparing growth has the growing substrate of Graphene, by the Graphene laminating in the Graphene in this step and the 3rd step; Remove again growing substrate; According to the number of plies of the Graphene of required transfer, this step circulates;
Step 4: the layer protecting film of fitting on the Graphene that is positioned at the superiors;
Step 5: the lower release film of double faced adhesive tape film body is torn, the Graphene with protective membrane and double faced adhesive tape film body are fitted in target substrate;
Step 6: tear protective membrane, complete Graphene transfer to target substrate by growth substrate.
The roll extrusion that fits into described in these two kinds of methods is fitted.The method of described removal growing substrate is chemical corrosion method or bubble stripping method.Described protective membrane is PE film or PET film or release film or electrostatic protection film.Described double faced adhesive tape film body comprises basement membrane, be compounded in the upper glue layer above basement membrane and be compounded in the lower glue layer below basement membrane; Upper glue layer and lower glue layer are silica gel or acrylate glue or PET glue, and thickness is 2～6um, and viscosity scope is 1～500g; Basement membrane is PET film or PE film, and thickness is 1～50um.As preferably, the viscosity of described upper glue layer is less than the viscosity of lower glue layer, and the viscosity of lower glue layer is 10～450g; The viscosity of upper glue layer is 1～100g.Described upper release film is PET release film or PE release film or OPP release film or BOPET release film or BOPP release film, and thickness is 25～180um; Described lower release film is PET release film or PE release film or OPP release film or BOPET release film or BOPP release film, and thickness is 50～180um.
Second object of the present invention is to provide a kind of graphene film.
Realizing technical scheme of the present invention is: a kind of graphene film, is followed successively by Graphene, double faced adhesive tape film body and target substrate; Double faced adhesive tape film body comprises basement membrane, be compounded in the upper glue layer above basement membrane and be compounded in the lower glue layer below basement membrane; The thickness of upper glue layer and lower glue layer is identical or not identical, and scope is 2～50um, and viscosity is identical or not identical, and scope is 1～500g; Basement membrane thickness is 1～180um.
Adopt after technique scheme, the present invention has following positive effect: the long growing substrate that has graphene film of two-sided glued membrane roll extrusion laminating that (1) utilization of the present invention is very thin, through corrosion, the method such as peel off is removed growing substrate, again at Graphene face membrane, the method of another side laminating target substrate realizes the transfer of Graphene from growing substrate to target substrate, technique is simple, can greatly reduce the cost that shifts Graphene, utilize the stickiness of double faced adhesive tape, obtain the graphene film good with target substrate bonding force, improve the bonding force of Graphene and target substrate, can obtain perfect sunken high-quality graphene film.
(2) the present invention uses two-sided glued membrane to shift, and can reduce curing step, to not requirement of target substrate, makes the use of method simpler.
(3) the present invention uses the upper glue layer of two-sided glued membrane and the viscosity of lower glue layer can identical also can, not with difference, in the time that viscosity is not identical, can rationally be controlled viscosity, and the one side that better utilised viscosity is large is fitted with target substrate.
(4) the method according to this invention can also obtain turning the target substrate that has repeatedly graphene film.
Brief description of the drawings
For content of the present invention is more easily expressly understood, according to specific embodiment also by reference to the accompanying drawings, the present invention is further detailed explanation, wherein below
Fig. 1 is the structural representation of the two-sided glued membrane used of the present invention.
Fig. 2 is the schematic diagram of the each step of the present invention.
Attached number in the figure is: upper release film 1, double faced adhesive tape film body 2, basement membrane 21, upper glue layer 22, lower glue layer 23, lower release film 3, growing substrate 4, graphene film 5, protective membrane 6, target substrate 7
Embodiment
(embodiment 1)
See Fig. 1, the two-sided glued membrane that the present embodiment adopts is followed successively by release film 1, double faced adhesive tape film body 2 and lower release film 3 from top to bottom.Double faced adhesive tape film body 2 comprises basement membrane 21, is compounded in the upper glue layer 22 above basement membrane 21 and is compounded in basement membrane 21 lower glue layer 23 below; Upper glue layer 22 and lower glue layer 23 are silica gel or acrylate glue or PET glue, and thickness is 2～50um, is preferably 2-6um, and viscosity scope is 1～500g; In order to obtain better effect, the viscosity of lower glue layer 23 is preferably 10～450g, most preferably be 50-350g, the viscosity of upper glue layer 22 is preferably 1～100g, most preferably is 10～50g, and basement membrane is PET film or PE film, thickness is 1～180um, be preferably 1～50um, more preferably 1～25um, most preferably is 2～6um.Upper release film 1 is PET release film or PE release film or OPP release film or BOPET release film or BOPP release film, and thickness is 25～180um; Lower release film 3 is PET release film or PE release film or OPP release film or BOPET release film or BOPP release film, and thickness is 50～180um, is preferably 100～180um, can in the time shifting Graphene, play certain supporting role.
See Fig. 2, the step of the method for the transfer Graphene of the present embodiment is:
Step 1: the upper release film 1 that is positioned at the less one side of two-sided glued membrane stickiness is torn, leave double faced adhesive tape film body 2 and be positioned at the lower release film 3 in the larger one side of stickiness;
Step 2: preparing growth has the growing substrate 4 of Graphene 5, with step 1 two-sided glued membrane roll extrusion laminating after treatment, Graphene 5 is fitted on double faced adhesive tape film body 2;
Step 3: with chemical corrosion method or bubble stripping method removal growing substrate 4;
Step 4: roll extrusion laminating layer protecting film 6 on Graphene 5; Protective membrane is PE film or PET film or release film or electrostatic protection film.
Step 5: the lower release film 3 being positioned in the larger one side of double faced adhesive tape film body 2 stickiness is torn, the Graphene with protective membrane 65 and 2 roll extrusion of double faced adhesive tape film body are fitted in target substrate 7; Target substrate 7 is that thickness is the PET that 120um, transmittance are 91%;
Step 6: tear protective membrane 6, complete Graphene 5 transfer to target substrate 7 by growth substrate 4.
Can certainly be that upper glue layer 22 and lower glue layer 23 are same viscositys, in the time of operation, tear arbitrarily release film.
The finished product being obtained by above-mentioned steps is followed successively by Graphene 5, upper glue layer 22, basement membrane 21, lower glue layer 23 and target substrate 7, and sheet resistance is 430 Ω/, and transmittance is 87.3%.
(embodiment 2)
Method of the present invention is identical with documents 1 principle, but can shift as required multi-layer graphene.
Step 1: the upper release film 1 that is positioned at the less one side of two-sided glued membrane stickiness is torn, leave double faced adhesive tape film body 2 and be positioned at the lower release film 3 in the larger one side of stickiness;
Step 2: preparing growth has the growing substrate 4 of Graphene 5, with step 1 two-sided glued membrane laminating after treatment, Graphene 5 is fitted on double faced adhesive tape film body 2;
Step 3: remove growing substrate 4;
Step 4: preparing growth has the growing substrate 4 of Graphene 5, and the Graphene 5 in the Graphene in this step 5 and the 3rd step is fitted; Remove again growing substrate 4; According to the number of plies of the Graphene of required transfer, this step circulates;
Step 4: the layer protecting film 6 of fitting on the Graphene 5 that is positioned at the superiors;
Step 5: the lower release film 3 being positioned in the larger one side of double faced adhesive tape film body 2 stickiness is torn, the Graphene with protective membrane 65 and double faced adhesive tape film body 2 are fitted in target substrate 7;
Step 6: tear protective membrane 6, complete Graphene 5 transfer to target substrate 7 by growth substrate 4.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (10)
1. a method that shifts Graphene, is characterized in that: utilize two-sided glued membrane that the Graphene (5) being grown in growth substrate (4) is transferred in target substrate (7).
2. a kind of method that shifts Graphene according to claim 1, is characterized in that comprising the following steps:
Step 1: the upper release film (1) of two-sided glued membrane is torn, leave double faced adhesive tape film body (2) and lower release film (3);
Step 2: preparing growth has the growing substrate (4) of Graphene (5), with step 1 two-sided glued membrane laminating after treatment, Graphene (5) is fitted on double faced adhesive tape film body (2);
Step 3: remove growing substrate (4);
Step 4: at Graphene (5) upper laminating layer protecting film (6);
Step 5: the lower release film (3) of double faced adhesive tape film body (2) is torn, the Graphene with protective membrane (6) (5) and double faced adhesive tape film body (2) are fitted in target substrate (7);
Step 6: tear protective membrane (6), complete Graphene (5) transfer to target substrate (7) by growth substrate (4).
3. a kind of method that shifts Graphene according to claim 1, is characterized in that comprising the following steps:
Step 1: the upper release film (1) of two-sided glued membrane is torn, leave double faced adhesive tape film body (2) and lower release film (3);
Step 2: preparing growth has the growing substrate (4) of Graphene (5), with step 1 two-sided glued membrane laminating after treatment, Graphene (5) is fitted on double faced adhesive tape film body (2);
Step 3: remove growing substrate (4);
Step 4: preparing growth has the growth substrate (4) of Graphene (5), fits the Graphene in this step (5) and the Graphene (5) in step 3; Remove again growing substrate (4); According to the number of plies of the Graphene of required transfer, this step circulates;
Step 5: be positioned at the Graphene of the superiors (5) upper laminating layer protecting film (6);
Step 6: the lower release film (3) of double faced adhesive tape film body (2) is torn, the Graphene with protective membrane (6) (5) and double faced adhesive tape film body (2) are fitted in target substrate (7);
Step 7: tear protective membrane (6), complete Graphene (5) transfer to target substrate (7) by growth substrate (4).
4. according to a kind of method that shifts Graphene described in claim 2 or 3, it is characterized in that: the described roll extrusion that fits into is fitted.
5. according to a kind of method that shifts Graphene described in claim 2 or 3, it is characterized in that: the method for described removal growing substrate (4) is chemical corrosion method or electrolytic stripping method.
6. according to a kind of method that shifts Graphene described in claim 2 or 3, it is characterized in that: described protective membrane is PE film or PET film or release film or electrostatic protection film.
7. according to a kind of method that shifts Graphene described in claim 2 or 3, it is characterized in that: described double faced adhesive tape film body (2) comprises basement membrane (21), be compounded in upper glue layer (22) above of basement membrane (21) and be compounded in basement membrane (21) lower glue layer (23) below; Upper glue layer (22) and lower glue layer (23) are silica gel or acrylate glue or PET glue, and thickness is identical or not identical, and scope is 2～50um, and viscosity scope is 1～500g; Basement membrane (21) is PET film or PE film, and thickness is 1～180um.
8. a kind of method that shifts Graphene according to claim 7, is characterized in that: the viscosity of described upper glue layer (22) is less than the viscosity of lower glue layer (23); The viscosity of described lower glue layer (23) is 10～450g; The viscosity of upper glue layer (22) is 1～100g.
9. according to a kind of method that shifts Graphene described in claim 2 or 3, it is characterized in that: described upper release film (1) is PET release film or PE release film or OPP release film or BOPET release film or BOPP release film, and thickness is 25～180um; Described lower release film (3) is PET release film or PE release film or OPP release film or BOPET release film or BOPP release film, and thickness is 50～180um.
10. a graphene film, is characterized in that: be followed successively by Graphene (5), double faced adhesive tape film body (2) and target substrate (7); Double faced adhesive tape film body (2) comprises basement membrane (21), be compounded in upper glue layer (22) above of basement membrane (21) and be compounded in basement membrane (21) lower glue layer (23) below; Upper glue layer (22) is identical or different with lower glue layer (23) thickness, and thickness range is 2～50um, and viscosity is identical or different, and viscosity scope is 1～500g; Basement membrane (21) thickness is 1～180um.
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Cited By (8)
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| CN104451592A (en) * | 2014-12-15 | 2015-03-25 | 中国科学院微电子研究所 | Method for nondestructively transferring graphene from metal surface to surface of target substrate |
| CN105589598A (en) * | 2015-12-24 | 2016-05-18 | 无锡格菲电子薄膜科技有限公司 | Manufacturing method of patterned graphene |
| CN106347501A (en) * | 2016-08-22 | 2017-01-25 | 浙江威罗德汽配科技有限公司 | Graphene-laminated nonmetal vehicle body and laminating method |
| WO2017040469A1 (en) * | 2015-09-01 | 2017-03-09 | Corning Incorporated | Methods for transferring graphene films and substrates comprising graphene films |
| CN106672956A (en) * | 2017-01-21 | 2017-05-17 | 德阳烯碳科技有限公司 | Large-scale graphene transferring method |
| CN109036713A (en) * | 2018-08-09 | 2018-12-18 | 苏州千层茧农业科技有限公司 | A kind of single side transfer-type graphene film structure and its technique |
| CN110038515A (en) * | 2019-04-28 | 2019-07-23 | 三峡大学 | GIS characteristic gas adsorbed film |
| CN110607517A (en) * | 2018-06-14 | 2019-12-24 | 北京石墨烯研究院 | Method for cleaning graphene |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104451592A (en) * | 2014-12-15 | 2015-03-25 | 中国科学院微电子研究所 | Method for nondestructively transferring graphene from metal surface to surface of target substrate |
| WO2017040469A1 (en) * | 2015-09-01 | 2017-03-09 | Corning Incorporated | Methods for transferring graphene films and substrates comprising graphene films |
| US20180257359A1 (en) * | 2015-09-01 | 2018-09-13 | Corning Incorporated | Methods for transferring graphene films and substrates comprising graphene films |
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| CN105589598A (en) * | 2015-12-24 | 2016-05-18 | 无锡格菲电子薄膜科技有限公司 | Manufacturing method of patterned graphene |
| CN106347501A (en) * | 2016-08-22 | 2017-01-25 | 浙江威罗德汽配科技有限公司 | Graphene-laminated nonmetal vehicle body and laminating method |
| CN106672956A (en) * | 2017-01-21 | 2017-05-17 | 德阳烯碳科技有限公司 | Large-scale graphene transferring method |
| CN110607517A (en) * | 2018-06-14 | 2019-12-24 | 北京石墨烯研究院 | Method for cleaning graphene |
| CN110607517B (en) * | 2018-06-14 | 2021-08-06 | 北京石墨烯研究院 | Method for cleaning graphene |
| CN109036713A (en) * | 2018-08-09 | 2018-12-18 | 苏州千层茧农业科技有限公司 | A kind of single side transfer-type graphene film structure and its technique |
| CN110038515A (en) * | 2019-04-28 | 2019-07-23 | 三峡大学 | GIS characteristic gas adsorbed film |
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