JP2014145640A - Diameter measuring method and diameter measuring apparatus of circular workpiece - Google Patents

Diameter measuring method and diameter measuring apparatus of circular workpiece Download PDF

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JP2014145640A
JP2014145640A JP2013013982A JP2013013982A JP2014145640A JP 2014145640 A JP2014145640 A JP 2014145640A JP 2013013982 A JP2013013982 A JP 2013013982A JP 2013013982 A JP2013013982 A JP 2013013982A JP 2014145640 A JP2014145640 A JP 2014145640A
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circular workpiece
rotary table
diameter
straight line
workpiece
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JP6131610B2 (en
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Yuji Okamoto
有史 岡本
Kenichi Kaneshige
健一 兼重
Tatsuya Saito
達也 齋藤
Hiroyuki Watanabe
裕之 渡邊
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Daido Steel Co Ltd
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Daido Steel Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To prevent vibration from reducing the measurement accuracy, and to accurately measure the inner diameter or outer diameter of a circular workpiece, or both of them even if the position of the circular workpiece deviates from a predetermined position.SOLUTION: The diameter measuring method includes the steps of: detecting positional deviations E1-E4 of a circular workpiece W in the direction linearly crossing the peripheral surface at a plurality of circumferential positions of the circular workpiece W; determining the center O position of the circular workpiece W on the basis of the deviation amounts of the detected positional deviations E1-E4; and measuring at least one of the inner diameter D1 and outer diameter D2 of the circular workpiece W on the straight line passing the determined center O position.

Description

本発明は円形ワークの径測定方法及び径測定装置に関し、特に径方向に位置ずれを生じている円形ワークの内径や外径を精度良く測定できる円形ワークの径測定方法及び径測定装置に関する。   The present invention relates to a diameter measuring method and a diameter measuring apparatus for a circular workpiece, and more particularly, to a diameter measuring method and a diameter measuring apparatus for a circular workpiece capable of accurately measuring an inner diameter and an outer diameter of a circular workpiece that is displaced in the radial direction.

この種の径測定方法としては例えば特許文献1に示された方法がある。これは円形ワーク内でその内周面に向けて変位センサを旋回させてワーク内周の全周形状を得、全周形状からワーク中心位置や内径を算出するものである。   As this type of diameter measuring method, for example, there is a method disclosed in Patent Document 1. In this method, the displacement sensor is turned toward the inner peripheral surface of the circular workpiece to obtain the entire circumference shape of the workpiece inner circumference, and the workpiece center position and inner diameter are calculated from the entire circumference shape.

特開2003−254742JP 2003-254742 A

しかし、上記従来の方法では、円形ワークの中心と変位センサの旋回中心がずれていると、すなわち円形ワークが正確に位置決めされていないと測定誤差を生じ、また変位センサを旋回作動させる際の振動によっても測定誤差を生じるという問題があった。   However, in the above-described conventional method, if the center of the circular workpiece is displaced from the turning center of the displacement sensor, that is, if the circular workpiece is not positioned accurately, a measurement error occurs, and vibration occurs when the displacement sensor is turned. There is also a problem that a measurement error occurs.

そこで、本発明はこのような課題を解決するもので、検出部を旋回させることなく、したがって振動による測定精度の低下を回避でき、しかも円形ワークの位置が所定の位置からずれていても高精度に円形ワークの内径ないし外径、あるいはその両方を測定することが可能な円形ワークの径測定方法および径測定装置を提供することを目的とする。   Accordingly, the present invention solves such a problem, and can prevent a decrease in measurement accuracy due to vibration without turning the detection unit, and can achieve high accuracy even when the position of the circular workpiece is deviated from a predetermined position. Another object of the present invention is to provide a diameter measuring method and diameter measuring apparatus for a circular workpiece capable of measuring the inner diameter and / or the outer diameter of the circular workpiece.

上記目的を達成するために、本第1発明の径測定方法では、円形ワーク(W)の周方向の複数位置で周面を直線的に横切る方向で前記円形ワーク(W)の位置ずれ(E1〜E4)を検出するステップと、検出された位置ずれ(E1〜E4)のずれ量に基づいて前記円形ワーク(W)の中心(O)位置を決定するステップと、決定された中心(O)位置を通る直線上で前記円形ワーク(W)の内径(D1)及び外径(D2)の少なくとも一方を測定するステップとを備える。   In order to achieve the above object, in the diameter measuring method according to the first aspect of the present invention, the positional deviation (E1) of the circular workpiece (W) in a direction linearly crossing the circumferential surface at a plurality of circumferential positions of the circular workpiece (W). To E4), determining the center (O) position of the circular workpiece (W) based on the detected displacements (E1 to E4), and the determined center (O). Measuring at least one of an inner diameter (D1) and an outer diameter (D2) of the circular workpiece (W) on a straight line passing through the position.

本第1発明においては、検出部を旋回させる必要が無いから振動による測定精度の低下を回避できる。また、検出された位置ずれのずれ量に基づいて円形ワークの中心位置を決定しているから、円形ワークの位置が所定の位置からずれていても高精度に円形ワークの内径ないし外径、あるいはその両方を測定することができる。   In the first aspect of the present invention, it is not necessary to turn the detection unit, so that a reduction in measurement accuracy due to vibration can be avoided. Further, since the center position of the circular workpiece is determined based on the detected displacement amount, even if the position of the circular workpiece is deviated from the predetermined position, the inner diameter or outer diameter of the circular workpiece is accurately determined. Both can be measured.

本第2発明の径測定方法では、前記円形ワーク(W)を回転テーブル(1)上に載置して当該回転テーブル(1)の回転軸(Ax)周りに旋回させることで前記円形ワーク(W)の周方向の複数位置で、径方向の位置ずれ(E1〜E4)を検出するようにする。   In the diameter measuring method according to the second aspect of the invention, the circular workpiece (W) is placed on the rotary table (1) and swiveled around the rotation axis (Ax) of the rotary table (1), whereby the circular workpiece (W) is rotated. The positional deviations (E1 to E4) in the radial direction are detected at a plurality of positions in the circumferential direction W).

本第2発明においては、回転テーブルによって円形ワークを旋回させることで、円形ワークの周方向複数位置で、前記回転テーブルの径方向での前記円形ワークの位置ずれ検出を、円形ワークの周方向の同一箇所で行うことができる。   In the second aspect of the invention, the circular workpiece is swung by the rotary table to detect the positional deviation of the circular workpiece in the radial direction of the rotary table at a plurality of positions in the circumferential direction of the circular workpiece. Can be done in the same place.

本第3発明の径測定方法では、前記回転テーブル(W)の回転軸(Ax)周りの周方向の一箇所に、回転テーブル(W)の径方向における一定長さの直線上の各点の変位を検出する二次元変位センサ(2)を配設し、前記円形ワーク(W)の表面の特徴点(Wp)位置の、前記直線の中央位置(As)からのずれを前記径方向の位置ずれ(E1〜E4)とする。   In the diameter measuring method of the third invention, each point on a straight line of a certain length in the radial direction of the rotary table (W) is provided at one place in the circumferential direction around the rotary axis (Ax) of the rotary table (W). A two-dimensional displacement sensor (2) for detecting displacement is disposed, and a deviation of the position of the feature point (Wp) on the surface of the circular workpiece (W) from the center position (As) of the straight line is determined as the radial position. Deviations (E1 to E4) are assumed.

本第3発明においては、円形ワークの表面の特徴点位置の、前記直線の中央位置からのずれを簡易に検出することができる。   In the third aspect of the invention, it is possible to easily detect the deviation of the feature point position on the surface of the circular workpiece from the center position of the straight line.

本第4発明の径測定装置では、円形ワーク(W)を載置してこれを旋回移動させる回転テーブル(1)と、回転テーブル(1)の周方向の一箇所に設けられて前記回転テーブル(1)の径方向に沿う一定長さの直線(l)上の各点の変位を検出する二次元変位センサ(2)と、前記円径ワーク(W)の表面の特徴点(Wp)位置の、前記直線(l)の中央位置からのずれを、前記回転テーブル(1)の径方向での前記円形ワーク(W)の位置ずれとして、当該位置ずれのずれ量に基づいて前記円形ワーク(W)の中心(O)位置を決定する演算器と、決定された中心位置を通る直線上で前記円形ワーク(W)の内径及び外径の少なくとも一方を測定する径測定器(3)とを備える。   In the diameter measuring apparatus according to the fourth aspect of the present invention, the rotary table (1) on which the circular workpiece (W) is placed and turned, and the rotary table provided at one place in the circumferential direction of the rotary table (1). A two-dimensional displacement sensor (2) for detecting the displacement of each point on the straight line (1) of a certain length along the radial direction of (1), and the characteristic point (Wp) position of the surface of the circular workpiece (W) The deviation of the straight line (l) from the center position is taken as the positional deviation of the circular workpiece (W) in the radial direction of the rotary table (1), and the circular workpiece ( A calculator for determining the center (O) position of W) and a diameter measuring instrument (3) for measuring at least one of the inner and outer diameters of the circular workpiece (W) on a straight line passing through the determined center position. Prepare.

本第4発明によれば、上記第1発明ないし第3発明の作用効果を得ることができる。   According to the fourth aspect of the invention, the operational effects of the first to third aspects of the invention can be obtained.

上記カッコ内の符号は、後述する実施形態に記載の具体的手段との対応関係を示すものである。   The reference numerals in the parentheses indicate the correspondence with specific means described in the embodiments described later.

以上のように、本発明の円形ワークの径測定方法によれば、検出部を旋回させることなく、したがって振動による測定精度の低下を回避でき、しかも円形ワークの位置が所定の位置からずれていても高精度に円形ワークの内径ないし外径、あるいはその両方を測定することができる。   As described above, according to the method for measuring a diameter of a circular workpiece of the present invention, it is possible to avoid a decrease in measurement accuracy due to vibration without turning the detection unit, and the position of the circular workpiece is deviated from a predetermined position. In addition, the inner diameter and / or outer diameter of the circular workpiece can be measured with high accuracy.

本発明の一実施形態を示す、位置ずれ検出時の円形ワークの垂直断面図である。It is a vertical sectional view of a circular work at the time of position shift detection showing one embodiment of the present invention. 本発明の一実施形態を示す、ワーク中心位置決定方法を説明する円形ワークの平面図である。It is a top view of the circular workpiece | work explaining the workpiece center position determination method which shows one Embodiment of this invention. 本発明の一実施形態を示す、ワーク中心位置決定方法を説明する円形ワークの平面図である。It is a top view of the circular workpiece | work explaining the workpiece center position determination method which shows one Embodiment of this invention. 本発明の一実施形態を示す、内外径測定時の円形ワークの垂直断面図である。It is a vertical sectional view of a circular work at the time of measuring inner and outer diameters showing one embodiment of the present invention.

なお、以下に説明する実施形態はあくまで一例であり、本発明の要旨を逸脱しない範囲で当業者が行う種々の設計的改良も本発明の範囲に含まれる。   The embodiment described below is merely an example, and various design improvements made by those skilled in the art without departing from the gist of the present invention are also included in the scope of the present invention.

図1において、断面同一のリング状の円形ワークWが回転テーブル1上に置かれており、回転テーブル1の上方位置には下方に向けて二次元レーザ変位センサ2が配設されている。当該変位センサ2は一定長さlの直線上でレーザ光Lを走査して三角測量の原理で当該直線上の各点の変位(本実施形態では高さ)を検出するものである。本実施形態では、テーブル周面に対向する上方位置で回転テーブル1の回転軸Axから一定距離離れて設けられた単一のレーザ変位センサ2によって、回転テーブル1の径方向の一定長さlの直線上で、円形ワークWの上側表面上の各点の高さを検出している。   In FIG. 1, a ring-shaped circular workpiece W having the same cross section is placed on a rotary table 1, and a two-dimensional laser displacement sensor 2 is disposed at an upper position of the rotary table 1 downward. The displacement sensor 2 scans the laser beam L on a straight line having a fixed length l and detects the displacement (height in this embodiment) of each point on the straight line based on the principle of triangulation. In the present embodiment, a fixed length l in the radial direction of the rotary table 1 is provided by a single laser displacement sensor 2 provided at a fixed distance from the rotation axis Ax of the rotary table 1 at an upper position facing the peripheral surface of the table. The height of each point on the upper surface of the circular workpiece W is detected on a straight line.

そして、本実施形態では特徴点として円形ワーク1の上側表面上の最高点Wpによって円形ワークWの位置ずれを検出している。すなわち、レーザ変位センサ2の走査中央位置を通る垂線As上に上記最高点Wpが位置する時を位置のずれ量E=0とし、最高点Wpが垂線Asよりも外径側に位置する時を正のずれ量、内径側に位置する時を負のずれ量とする。このようなずれ量Eの測定を、回転テーブル1を回転させて図2に示すように回転テーブル1の互に直交する径方向の対称位置である四点で行う。   And in this embodiment, the position shift of the circular workpiece | work W is detected by the highest point Wp on the upper surface of the circular workpiece | work 1 as a feature point. That is, when the highest point Wp is positioned on the vertical line As passing through the scanning center position of the laser displacement sensor 2, the positional deviation amount E = 0, and when the highest point Wp is positioned on the outer diameter side of the vertical line As. The amount of positive deviation is the negative deviation when it is located on the inner diameter side. The measurement of the deviation amount E is performed at four points which are symmetrical positions in the radial direction perpendicular to each other as shown in FIG. 2 by rotating the rotary table 1.

図2は、円形ワークWの中心Oと回転テーブル1の回転軸Axが一致している場合を示しており、回転テーブル1を回転させて円形ワークWを旋回させ、その周方向のいずれの四点で位置ずれを測定しても、これらのずれ量E1,E2,E3,E4は同一値である。したがって下式(1)で円形ワークWの中心位置Oを求めると、そのX座標、Y座標は0となって、円形ワークWの中心Oは回転テーブル1の回転軸Axに一致している。
X=(E1−E2)/2 …(1)
Y=(E3−E4)/2
FIG. 2 shows a case where the center O of the circular workpiece W and the rotation axis Ax of the rotary table 1 coincide with each other. The rotary table 1 is rotated to turn the circular workpiece W, and any one of the four circumferential directions is rotated. Even if the positional deviation is measured at points, these deviation amounts E1, E2, E3, and E4 are the same value. Therefore, when the center position O of the circular workpiece W is obtained by the following expression (1), the X coordinate and Y coordinate thereof are 0, and the center O of the circular workpiece W coincides with the rotation axis Ax of the rotary table 1.
X = (E1-E2) / 2 (1)
Y = (E3-E4) / 2

円形ワークWはロボットアーム等で回転テーブル1上に搬送されてくるため、通常は図3に示すように、円形ワークWの中心Oは回転テーブル1の回転軸Axからずれる。この場合にも、回転テーブル1を回転させて円形ワークWを旋回させ、その周方向の四点でそれぞれ垂線Asと最高点Wpの位置のずれ量E1,E2,E3,E4を測定すれば、上式より円形ワークWの中心位置OのX座標、Y座標を求めることができる。なお、回転テーブル1を設けず、レーザ変位センサ2を四箇所に設ける構成としても良い。   Since the circular workpiece W is conveyed onto the rotary table 1 by a robot arm or the like, the center O of the circular workpiece W is usually deviated from the rotation axis Ax of the rotary table 1 as shown in FIG. Also in this case, if the rotary table 1 is rotated to turn the circular workpiece W and the deviations E1, E2, E3, E4 of the positions of the perpendicular line As and the highest point Wp are measured at four points in the circumferential direction, From the above equation, the X coordinate and Y coordinate of the center position O of the circular workpiece W can be obtained. In addition, it is good also as a structure which provides the laser displacement sensor 2 in four places, without providing the rotary table 1. FIG.

このようにして円形ワークWの中心Oの位置を定めた後は、図4に示すように、径測定器3を構成するリニアスケール31を、その中央Osの位置が円形ワークWの中心Oに一致するように移動させる。なお、測定する径方向において中央Osの位置を中心Oに正確に一致させる必要はない。リニアスケール31には一対のスライダ32,33がこれに沿って移動可能に設けられており、これらスライダ32,33には下端部にリニアスケール31に沿う内方側を測定領域Z1とするレーザ変位計34,35と、外方側を測定領域Z2とするレーザ変位計36,37が上下位置にそれぞれ設けられている。   After the position of the center O of the circular workpiece W is determined in this way, the position of the center Os of the linear scale 31 constituting the diameter measuring device 3 is set to the center O of the circular workpiece W as shown in FIG. Move to match. It is not necessary to make the position of the center Os exactly coincide with the center O in the radial direction to be measured. The linear scale 31 is provided with a pair of sliders 32 and 33 so as to be movable along the sliders 32 and 33. The sliders 32 and 33 have a laser displacement in which the inner side along the linear scale 31 is the measurement region Z1 at the lower end. A total of 34 and 35, and laser displacement meters 36 and 37 having a measurement area Z2 on the outer side are provided at the vertical positions, respectively.

そこで、円形ワークWの外径を測定する場合には図4(1)に示すように各レーザ変位計34,35を円形ワークWの外周に向けて位置させて、レーザ変位計34,35の測定領域Z1までスライダ32,33を移動させる。スライダ32,33の移動位置はリニアスケール31によって検出されているから、既知のリニアスケール31の全長、スライド量、および変位測定値から公知の方法で円形ワークWの中心Oを通る径方向の直線上での外周面間の距離、すなわち円形ワークWの外径D1を算出測定することができる。   Therefore, when measuring the outer diameter of the circular workpiece W, the laser displacement meters 34, 35 are positioned toward the outer periphery of the circular workpiece W as shown in FIG. The sliders 32 and 33 are moved to the measurement area Z1. Since the movement positions of the sliders 32 and 33 are detected by the linear scale 31, the radial straight line passing through the center O of the circular workpiece W by a known method from the total length of the known linear scale 31, the slide amount, and the measured displacement value. The distance between the outer peripheral surfaces above, that is, the outer diameter D1 of the circular workpiece W can be calculated and measured.

円形ワークWの内径を測定する場合には図4(2)に示すように各レーザ変位計36,37を円形ワークWの内周に向けて位置させて、レーザ変位計36,37の測定領域Z2までスライダ32,33を移動させる。スライダ32,33の移動位置はリニアスケール31によって検出されているから、既知のリニアスケール31の全長、スライド量、および変位測定値から公知の方法で円形ワークWの中心Oを通る直線上での内周面間の距離、すなわち円形ワークWの内径を算出測定することができる。なお、以上の手順のうち、演算を要する部分は図略のコンピュータのような演算器で実行される。   When measuring the inner diameter of the circular workpiece W, the laser displacement meters 36 and 37 are positioned toward the inner periphery of the circular workpiece W as shown in FIG. The sliders 32 and 33 are moved to Z2. Since the movement positions of the sliders 32 and 33 are detected by the linear scale 31, the movement of the sliders 32 and 33 on the straight line passing through the center O of the circular workpiece W by a known method from the total length of the known linear scale 31, the slide amount, and the displacement measurement value. The distance between the inner peripheral surfaces, that is, the inner diameter of the circular workpiece W can be calculated and measured. Note that, in the above procedure, a portion requiring calculation is executed by a calculator such as a computer (not shown).

上記実施形態において、変位測定はレーザ等を使用した非接触式に限られず、タッチプローブのような接触式で行ってももちろん良い。また、内外径が既知の校正用ワークに対して予め上記手順で内外径を測定しておけば、その後の円形ワークの内外径の測定において正確な絶対値を得ることができる。   In the above embodiment, the displacement measurement is not limited to the non-contact type using a laser or the like, and may be performed by a contact type such as a touch probe. Further, if the inner and outer diameters are measured in advance for the calibration work having a known inner and outer diameter by the above procedure, an accurate absolute value can be obtained in the subsequent measurement of the inner and outer diameters of the circular work.

上記径測定器のレーザ変位計を、円形ワークを挟むように上下位置に設けて、上下のワーク表面の各最高点を検出することで円形ワークの厚みを測定することが可能であり、この厚み測定の一環として上側表面の最高点に基づく上述の円形ワークの位置ずれ検出を行うようにしても良い。なお、ずれ量の検出は必ずしも円形ワーク表面の最高点によって行う必要はなく、他の目印になる特徴点を使用しても良い。また、円形ワークはリング状のものには限られない。   It is possible to measure the thickness of the circular workpiece by providing the laser displacement meter of the above diameter measuring device in the vertical position so that the circular workpiece is sandwiched, and detecting the highest points on the upper and lower workpiece surfaces. As part of the measurement, the above-described position detection of the circular workpiece based on the highest point on the upper surface may be detected. It is not always necessary to detect the deviation amount based on the highest point on the surface of the circular workpiece, and a feature point that is another mark may be used. Further, the circular workpiece is not limited to a ring shape.

1…回転テーブル、2…二次元レーザ変位センサ(二次元変位センサ)、3…径測定器、As…中央位置、Ax…回転軸、D1…内径、D2…外径、E,E1,E2,E3,E4…位置ずれ、O…中心、W…円形ワーク、Wp…最高点(特徴点)。 DESCRIPTION OF SYMBOLS 1 ... Rotary table, 2 ... Two-dimensional laser displacement sensor (two-dimensional displacement sensor), 3 ... Diameter measuring device, As ... Center position, Ax ... Rotating shaft, D1 ... Inner diameter, D2 ... Outer diameter, E, E1, E2, E3, E4 ... misalignment, O ... center, W ... circular workpiece, Wp ... highest point (feature point).

Claims (4)

円形ワークの周方向の複数位置で周面を直線的に横切る方向で前記円形ワークの位置ずれを検出するステップと、検出された位置ずれのずれ量に基づいて前記円形ワークの中心位置を決定するステップと、決定された中心位置を通る直線上で前記円形ワークの内径及び外径の少なくとも一方を測定するステップとを備える円形ワークの径測定方法。 A step of detecting a positional deviation of the circular workpiece in a direction that linearly crosses the circumferential surface at a plurality of circumferential positions of the circular workpiece, and a center position of the circular workpiece is determined based on the detected deviation amount of the positional deviation. And a step of measuring at least one of an inner diameter and an outer diameter of the circular workpiece on a straight line passing through the determined center position. 前記円形ワークを回転テーブル上に載置して当該回転テーブルの回転軸周りに旋回させることで前記円形ワークの周方向の複数位置で、前記回転テーブルの径方向での前記円形ワークの位置ずれを検出するようにした請求項1に記載の円形ワークの径測定方法。 The circular workpiece is placed on the rotary table and swiveled around the rotation axis of the rotary table, thereby shifting the position of the circular workpiece in the radial direction of the rotary table at a plurality of circumferential positions of the circular workpiece. The method for measuring a diameter of a circular workpiece according to claim 1, wherein the diameter is detected. 前記回転テーブルの回転軸周りの周方向の一箇所に、回転テーブルの径方向において一定長さの直線上の各点の変位を検出する二次元変位センサを配設し、前記円径ワークの表面の特徴点位置の、前記直線の中央位置からのずれを前記径方向の位置ずれとする請求項2に記載の円形ワークの径測定方法。 A two-dimensional displacement sensor for detecting the displacement of each point on a straight line of a certain length in the radial direction of the rotary table is disposed at one place in the circumferential direction around the rotary axis of the rotary table, and the surface of the circular workpiece The diameter measurement method of the circular workpiece | work of Claim 2 which makes the shift | offset | difference from the center position of the said straight line of said feature point position the said radial position shift. 円形ワークを載置してこれを旋回移動させる回転テーブルと、回転テーブルの周方向の一箇所に設けられて前記回転テーブルの径方向に沿う一定長さの直線上の各点の変位を検出する二次元変位センサと、前記円径ワークの表面の特徴点位置の、前記直線の中央位置からのずれを、前記回転テーブルの径方向での前記円形ワークの位置ずれとして、当該位置ずれのずれ量に基づいて前記円形ワークの中心位置を決定する演算器と、決定された中心位置を通る直線上で前記円形ワークの内径及び外径の少なくとも一方を測定する径測定器とを備える円形ワークの径測定装置。 A rotary table on which a circular workpiece is placed and rotated, and a displacement of each point on a straight line of a certain length along the radial direction of the rotary table provided in one circumferential direction of the rotary table is detected. The deviation of the feature point position on the surface of the two-dimensional displacement sensor and the circular workpiece from the center position of the straight line is the positional deviation of the circular workpiece in the radial direction of the rotary table. The diameter of the circular workpiece comprising: an arithmetic unit that determines the center position of the circular workpiece based on the same; and a diameter measuring instrument that measures at least one of an inner diameter and an outer diameter of the circular workpiece on a straight line passing through the determined center position. measuring device.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110108181A (en) * 2019-06-05 2019-08-09 上海市东方医院(同济大学附属东方医院) Stoma measuring device
CN113532359A (en) * 2021-08-31 2021-10-22 六安江淮永达机械制造有限公司 Axle type part external diameter detection device
CN116336949A (en) * 2022-12-29 2023-06-27 深圳市志奋领科技有限公司 Measurement method, device, equipment and medium based on laser displacement

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55152411A (en) * 1979-05-17 1980-11-27 Sanyo Kiko Kk Method and apparatus for determining position and diameter of hole
JPH06213652A (en) * 1993-01-21 1994-08-05 Tatsumo Kk Measuring method of form of semiconductor wafer and device thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55152411A (en) * 1979-05-17 1980-11-27 Sanyo Kiko Kk Method and apparatus for determining position and diameter of hole
JPH06213652A (en) * 1993-01-21 1994-08-05 Tatsumo Kk Measuring method of form of semiconductor wafer and device thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110108181A (en) * 2019-06-05 2019-08-09 上海市东方医院(同济大学附属东方医院) Stoma measuring device
CN113532359A (en) * 2021-08-31 2021-10-22 六安江淮永达机械制造有限公司 Axle type part external diameter detection device
CN116336949A (en) * 2022-12-29 2023-06-27 深圳市志奋领科技有限公司 Measurement method, device, equipment and medium based on laser displacement
CN116336949B (en) * 2022-12-29 2024-02-13 深圳市志奋领科技有限公司 Measurement method, device, equipment and medium based on laser displacement

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