JP2014142186A - センサー及びセンサーの製造方法 - Google Patents
センサー及びセンサーの製造方法 Download PDFInfo
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Abstract
【解決手段】半導体回路6を有する能動チップ4が設置された基板2と、厚い部分と薄い部分とを有し厚い部分が基板2に接するように設置され加速度センサーを有する受動チップ10と、を備え、能動チップ4には能動チップ端子9が設置され、受動チップ10には薄い部分に受動チップ端子18が設置され、受動チップ端子18と能動チップ端子9とが対向しバンプ20を介して接続される。
【選択図】図2
Description
本適用例にかかるセンサーであって、能動素子を有する能動チップが載置された基板と、受動素子を有する板状の受動チップと、を備え、前記能動チップには前記能動素子と接続する能動チップ端子が設置され、前記受動チップは厚み方向で第1の厚みを有する部分と前記第1の厚みよりも厚い第2の厚みを有する部分とを有し、前記第2の厚みを有する部分が前記基板に載置され、前記受動チップには前記第1の厚みを有する部分に前記受動素子と接続する受動チップ端子が設置され、前記受動チップ端子と前記能動チップ端子とが対向しバンプを介して接続されていることを特徴とする。
上記適用例にかかるセンサーにおいて、前記能動チップと前記受動チップとは熱硬化型接着剤を介して前記基板に載置されていることを特徴とする。
上記適用例にかかるセンサーにおいて、前記能動チップには出力端子が設置され、前記基板には入力端子が設置され、前記出力端子と前記入力端子とはワイヤーを介して接続されていることを特徴とする。
上記適用例にかかるセンサーにおいて、前記能動チップは前記能動チップ端子が設置された面の反対側の面に出力端子が設置され、前記能動素子と前記出力端子とは貫通電極を介して接続され、前記基板には入力端子が設置され、前記出力端子と前記入力端子とが接続されていることを特徴とする。
上記適用例にかかるセンサーにおいて、前記バンプの材質は金を含む金属であることを特徴とする。
本適用例にかかるセンサーの製造方法であって、熱硬化型接着剤を用いて能動素子と能動チップ端子とを有する能動チップを基板に接着する能動チップ接着工程と、熱硬化型接着剤を用いて受動素子と受動チップ端子とを有する受動チップを前記基板に接着する受動チップ接着工程と、を有し、前記受動チップは板状であり厚み方向で第1の厚みを有する部分と前記第1の厚みよりも厚い第2の厚みを有する部分とを有し、前記第1の厚みを有する部分に前記受動チップ端子が設置され、前記能動チップ接着工程では前記能動チップ端子を前記基板の反対側に向けて配置し、前記受動チップ接着工程では前記受動チップ端子と前記能動チップ端子とをバンプを介して配置し、前記第2の厚みを有する部分を前記基板に接着することを特徴とする。
(第1の実施形態)
第1の実施形態にかかわるセンサーとセンサーの製造方法について図1〜図6に従って説明する。図1(a)は、センサーの構造を示す概略斜視図であり、図1(b)はセンサーの構造を示す模式底面図である。図1(a)に示すように、センサー1は長方形の基板2を備えている。基板2の長手方向をY方向とし、基板2の平面方向においてY方向と直交する方向をX方向とする。基板2の厚み方向をZ方向とする。
(1)本実施形態によれば、能動チップ4は受動チップ10に微弱な電流を供給し、加速度センサー素子21は微弱な電流によって駆動される。能動チップ4と受動チップ10との間で電流が流れる距離が長いと電磁ノイズの影響を受け易くなる。本実施形態では受動チップ端子18と能動チップ端子9とが対向して配置されバンプ20を介して接続されている。従って、能動チップ4と受動チップ10との間はワイヤーボンディングを用いたときに比べて短い構造にすることができる。従って、能動チップ4と受動チップ10との間で交信される電気信号にノイズが付加されて電気信号のS/N比が低下することを防止することができる。
次に、センサーの一実施形態について図7のセンサーの要部模式側面図を用いて説明する。本実施形態が第1の実施形態と異なるところは、能動チップの能動チップ基板に貫通電極が設置されている点にある。尚、第1の実施形態と同じ点については説明を省略する。
(1)本実施形態によれば、能動チップ31には出力端子34が設置され、中間端子33と出力端子34とは貫通電極35により接続されている。基板2には入力端子3が設置されている。そして、出力端子34と入力端子3とはバンプ36を介して接続されている。能動チップ31はノイズの影響を受け難い量の電流を流す。貫通電極35は大きな電流を流すことが可能であるので、能動チップ31では能動チップ基板32の表面32aと裏面32bと基板2との間で大きな電流を流すことができる。その結果、センサー30は半導体回路6が出力端子12に出力する電気信号にノイズの影響を受け難くすることができる。
(変形例1)
前記第1の実施形態では、熱硬化型接着剤15を用いて基板2と受動チップ10とを接着した。さらに、熱硬化型接着剤14を用いて基板2と能動チップ4とを接着した。熱硬化型接着剤の代わりにダイヤタッチシートを用いても良い。ダイヤタッチシートは熱硬化型接着剤の1つである。ダイヤタッチシートを用いることにより作業性良く基板2上に能動チップ4や受動チップ10を固定することができる。
前記第1の実施形態では、受動チップ10に加速度センサー素子21が設置された。受動チップ10には他の種類のセンサーを設置しても良い。例えば、受動素子にジャイロセンサー、温度センサー、磁気センサー、湿度センサー等の各種の素子を適用することができる。変形例1及び変形例2の内容は前記第2の実施形態にも適用しても良い。
Claims (6)
- 能動素子を有する能動チップが載置された基板と、
受動素子を有する板状の受動チップと、を備え、
前記能動チップには前記能動素子と接続する能動チップ端子が設置され、
前記受動チップは厚み方向で第1の厚みを有する部分と前記第1の厚みよりも厚い第2の厚みを有する部分とを有し、前記第2の厚みを有する部分が前記基板に載置され、
前記受動チップには前記第1の厚みを有する部分に前記受動素子と接続する受動チップ端子が設置され、
前記受動チップ端子と前記能動チップ端子とが対向しバンプを介して接続されていることを特徴とするセンサー。 - 請求項1に記載のセンサーであって、
前記能動チップと前記受動チップとは熱硬化型接着剤を介して前記基板に載置されていることを特徴とするセンサー。 - 請求項1または2に記載のセンサーであって、
前記能動チップには出力端子が設置され、
前記基板には入力端子が設置され、
前記出力端子と前記入力端子とはワイヤーを介して接続されていることを特徴とするセンサー。 - 請求項1または2に記載のセンサーであって、
前記能動チップは前記能動チップ端子が設置された面の反対側の面に出力端子が設置され、前記能動素子と前記出力端子とは貫通電極を介して接続され、
前記基板には入力端子が設置され、
前記出力端子と前記入力端子とが接続されていることを特徴とするセンサー。 - 請求項1〜4のいずれか一項に記載のセンサーであって、
前記バンプの材質は金を含む金属であることを特徴とするセンサー。 - 熱硬化型接着剤を用いて能動素子と能動チップ端子とを有する能動チップを基板に接着する能動チップ接着工程と、
熱硬化型接着剤を用いて受動素子と受動チップ端子とを有する受動チップを前記基板に接着する受動チップ接着工程と、を有し、
前記受動チップは板状であり厚み方向で第1の厚みを有する部分と前記第1の厚みよりも厚い第2の厚みを有する部分とを有し、前記第1の厚みを有する部分に前記受動チップ端子が設置され、
前記能動チップ接着工程では前記能動チップ端子を前記基板の反対側に向けて配置し、
前記受動チップ接着工程では前記受動チップ端子と前記能動チップ端子とをバンプを介して配置し、前記第2の厚みを有する部分を前記基板に接着することを特徴とするセンサーの製造方法。
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