JP2014130130A5 - - Google Patents

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Publication number
JP2014130130A5
JP2014130130A5 JP2013202854A JP2013202854A JP2014130130A5 JP 2014130130 A5 JP2014130130 A5 JP 2014130130A5 JP 2013202854 A JP2013202854 A JP 2013202854A JP 2013202854 A JP2013202854 A JP 2013202854A JP 2014130130 A5 JP2014130130 A5 JP 2014130130A5
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JP
Japan
Prior art keywords
imaging
light
reflected light
receives
dimensional image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013202854A
Other languages
English (en)
Japanese (ja)
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JP5890953B2 (ja
JP2014130130A (ja
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Publication date
Application filed filed Critical
Priority to JP2013202854A priority Critical patent/JP5890953B2/ja
Priority claimed from JP2013202854A external-priority patent/JP5890953B2/ja
Priority to PCT/JP2013/085285 priority patent/WO2014104375A1/ja
Publication of JP2014130130A publication Critical patent/JP2014130130A/ja
Publication of JP2014130130A5 publication Critical patent/JP2014130130A5/ja
Application granted granted Critical
Publication of JP5890953B2 publication Critical patent/JP5890953B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013202854A 2012-12-31 2013-09-30 検査装置 Expired - Fee Related JP5890953B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013202854A JP5890953B2 (ja) 2013-09-30 2013-09-30 検査装置
PCT/JP2013/085285 WO2014104375A1 (ja) 2012-12-31 2013-12-29 検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013202854A JP5890953B2 (ja) 2013-09-30 2013-09-30 検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2012289279 Division 2012-12-31 2012-12-31

Publications (3)

Publication Number Publication Date
JP2014130130A JP2014130130A (ja) 2014-07-10
JP2014130130A5 true JP2014130130A5 (cg-RX-API-DMAC10.html) 2015-04-02
JP5890953B2 JP5890953B2 (ja) 2016-03-22

Family

ID=51408615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013202854A Expired - Fee Related JP5890953B2 (ja) 2012-12-31 2013-09-30 検査装置

Country Status (1)

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JP (1) JP5890953B2 (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170107952A (ko) * 2015-01-29 2017-09-26 가부시키가이샤 데크시스 광학식 외관 검사 장치 및 이를 이용한 광학식 외관 검사 시스템
TW201942604A (zh) * 2018-04-01 2019-11-01 香港商印芯科技股份有限公司 光學識別模組
US11974046B2 (en) 2018-09-06 2024-04-30 Orbotech Ltd. Multimodality multiplexed illumination for optical inspection systems
JP2021018079A (ja) * 2019-07-17 2021-02-15 株式会社リコー 撮像装置、計測装置、及び、計測方法
KR102321662B1 (ko) * 2020-08-14 2021-11-05 광운대학교 산학협력단 이미지 백화를 이용한 미소유체 반응 관찰용 마이크로 플랫폼 시스템 및 이를 이용한 미소유체 반응 관찰 방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6134011A (en) * 1997-09-22 2000-10-17 Hdi Instrumentation Optical measurement system using polarized light
JP2001089939A (ja) * 1999-09-20 2001-04-03 Toray Ind Inc 潜在高捲縮性ポリエステル系複合糸
JP2004279273A (ja) * 2003-03-17 2004-10-07 Food Safety Innovation Gijutsu Kenkyu Kumiai 異物混入検査方法及びこれに用いる異物混入検査装置
JP5135544B2 (ja) * 2008-03-31 2013-02-06 新日鐵住金株式会社 下面検査装置および下面検査方法

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