JP2014127510A - Electrode member and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrode member including a refrigerant passage which is less likely to short-circuit via a refrigerant.SOLUTION: The heat generated by a power semiconductor element is delivered to an electrode member 3 through a bonding material. The heat delivered to the electrode member 3 is diffused in the atmosphere through a heat exchange or the like via a refrigerant circulating in a refrigerant passage 7. The electrode member 3 which supplies power to the power semiconductor element includes the refrigerant passage 7 in which the refrigerant circulates in the inside thereof, and an insulating layer 9 which electrically insulates the refrigerant and the electrode member 3 in an inner wall of the refrigerant passage 7.

Description

  The present invention relates to an electrode member for supplying electric power to an electronic component and a manufacturing method thereof.

  Conventionally, an electrode member for supplying electric power to an electronic component such as a power semiconductor chip in a semiconductor module also functions as a heat path for sending heat generated by the electronic component to a heat sink. For example, in a molded resin-encapsulated power semiconductor device described in Patent Document 1, a copper electrode as an electrode member has a power semiconductor chip fixed to its main surface with solder, and the surface opposite to the main surface is an epoxy resin It is joined to a heat radiating fin as a heat sink through an insulator such as a thermal compound.

JP 2004-165281 A

  However, in the power semiconductor device as described above, the insulator and the thermal compound have a relatively low thermal conductivity, but in order to maintain the structure of the device while suppressing the distortion of the structure due to the difference in linear expansion coefficient. It is necessary to have a thickness of As a result, the heat generated by the power semiconductor chip is not easily transmitted to the heat sink, and the size of the device is increased.

  Therefore, it is conceivable to remove the heat generated by the power semiconductor chip by providing a coolant passage in the electrode member and circulating coolant such as cooling water through the coolant passage. However, this may cause a short circuit from the electrode member via the refrigerant.

  In view of the problems of the related art, the present invention is to provide an electrode member having a refrigerant passage that does not cause a short circuit through the refrigerant and a method for manufacturing the electrode member.

  The electrode member of the present invention is an electrode member for supplying electric power to an electronic component, and has a refrigerant passage through which a refrigerant flows, and electrically connects the refrigerant and the electrode member to the inner wall of the refrigerant passage. An insulating layer for insulation is provided.

  According to the present invention, the heat generated by the electronic component is transmitted to the electrode member and further discharged through the refrigerant flowing in the refrigerant passage. During this time, the electrical conduction between the electrode member and the refrigerant is reliably prevented by the insulating layer on the inner wall of the refrigerant passage. Therefore, there is no possibility that a short circuit occurs from the electrode member via the refrigerant, and the electronic component can be effectively cooled.

  In the electrode member of the present invention, a first component member having a first wavy surface in which a plurality of first flat portions and first grooves are alternately arranged, and a plurality of second portions respectively corresponding to the plurality of first flat portions. A second component having a second wavy surface in which a flat portion and a plurality of second grooves respectively corresponding to the plurality of first grooves are alternately arranged, and each groove of the first groove and the second groove The surfaces are respectively covered with the first insulating film and the second insulating film, the corresponding first flat portion and the second flat portion are joined, and the corresponding first groove and the second groove form the refrigerant passage. The insulating layer may be formed of the corresponding first insulating film and second insulating film.

  According to this, after covering the groove surface of the first groove of the first component member and the groove surface of the second groove of the second component member with the first insulating film and the second insulating film, respectively, the corresponding first flat surface By joining the part and the second flat part, an electrode member in which the insulating layer of the refrigerant passage is reliably formed can be easily manufactured.

  Further, the corresponding edges of the first groove and the second groove along the length direction of the insulating film may be opposed to each other with a gap and bonded via an adhesive filled in the gap. Good.

  According to this, it is possible to prevent the refrigerant from leaking from between the end edges along the length direction of the respective insulating films of the corresponding first groove and second groove, and reliably maintain the function of the insulating layer. it can.

  Also, a first notch groove is provided between each first groove and each adjacent first flat portion, and a second notch groove is provided between each second groove and each adjacent second flat portion. And the corresponding first notch groove and second notch groove are bonded via an adhesive filled therebetween, and the adhesive is filled in the adjacent gap. And may be integrated.

  According to this, it is possible to prevent the adhesive filled in the gap described above from being peeled from the gap by the flow of the refrigerant, and to maintain the function of the insulating layer more reliably.

  The electrode member manufacturing method of the present invention is a method of manufacturing an electrode member for supplying electric power to an electronic component, and has a first corrugated surface in which a plurality of first flat portions and first grooves are alternately arranged. A first step of producing a first component member, a plurality of second flat portions respectively corresponding to the plurality of first flat portions, and a plurality of second grooves respectively corresponding to the plurality of first grooves are alternately arranged. A second step of producing a second constituent member having a second corrugated surface, and a first insulating film in a state where each first flat portion is masked with respect to the groove surface of each first groove of the first constituent member A third step of forming a second insulating film in a state where each second flat portion is masked with respect to the groove surface of each second groove of the second component member, and the third step And after a 4th process, the corresponding 1st flat part and 2nd flat part are joined, and said 1st component and said 2nd Characterized in that it comprises a fifth step of attaching the formed member.

  According to the present invention, the refrigerant passage for allowing the refrigerant to flow inside the electrode member is formed by the first groove and the second groove, and the insulating layer that insulates the refrigerant from the electrode member on the inner wall of the refrigerant passage. However, the electrode member formed of the first insulating film and the second insulating film can be easily manufactured.

  In the manufacturing method of the present invention, the masking in the third step and the fourth step is performed so as to cover edge portions along the length direction of the first grooves and the second grooves, and the fifth step. In the step, an adhesive may be applied to the edge along the length direction of each first groove and each second groove before joining the first flat part and the second flat part.

  According to this, when the first flat portion and the second flat portion are joined, the edge along the length direction of the corresponding first insulating film and second insulating film is bonded to the edge. It can be easily combined with an agent. This prevents the refrigerant from leaking out between the edge along the length direction of the corresponding first insulating film and the edge along the length direction of the second insulating film, and functions the insulating layer. It can be reliably maintained.

  In the first step, a first notch groove is provided between each first flat portion and each adjacent first groove. In the second step, each second flat portion and each adjacent next groove are provided. A second notch groove may be provided between the second groove, and the application of the adhesive in the fifth step may be performed on each of the first notch groove and the second notch groove. .

  According to this, each 1st adjacent to this from the clearance gap between the edge along the length direction of each corresponding 1st insulating film, and the edge along the length direction of each 2nd insulating film. An electrode member that is integrally filled with an adhesive can be easily manufactured over the space between the notch groove and the second notch groove. As a result, the adhesive filled in the gaps at the edges along the length direction of the first insulating film and the second insulating film is prevented from being peeled off from the gaps by the flow of the refrigerant, and the function of the insulating layer is improved. It can be maintained more reliably.

It is a figure which shows the principal part of a power module provided with the electrode member which concerns on one Embodiment of this invention. FIG. 2 is a partial cross-sectional view of an electrode member in the power module of FIG. 1. It is a flowchart which shows the manufacturing process of the electrode member which concerns on one Embodiment of this invention. It is a perspective view of the 1st component member and the 2nd component member part for demonstrating the manufacturing process of FIG. It is sectional drawing which shows a mode that a 1st insulating film is formed in the 1st groove | channel of the 1st structural member of FIG. It is a partial sectional view of an electrode member concerning a 2nd embodiment of the present invention. FIG. 7 is a partial cross-sectional view of the first component member that has been masked in the manufacturing process of the electrode member of FIG. 6. It is a partial sectional view of an electrode member concerning a 3rd embodiment of the present invention. It is sectional drawing of a part of 1st structural member by which masking was performed in the manufacturing process of the electrode member of FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig.1 (a) is a schematic plan view of the principal part of a power module provided with the electrode member which concerns on one Embodiment of this invention. FIG.1 (b) is the sectional view on the AA line of Fig.1 (a). FIG.1 (c) is the BB sectional drawing of FIG.1 (b). However, the resin mold is not shown in FIG.

  As shown in FIG. 1, the power module 1 includes a power semiconductor element 2 such as an IGBT or a power MOSFET, an electrode member 3 constituting each of an N electrode, an output electrode, and a P electrode, and a control signal to the power semiconductor element 2. A signal pin 4 for sending, a silver nano paste bonding material 5 for bonding the power semiconductor element 2 and the electrode member 3 or the signal pin 4, and a resin mold 6 for sealing them are provided. The power module 1 is used for, for example, an in-vehicle power conversion device.

  The electrode member 3 includes a refrigerant passage 7 provided therein and through which a refrigerant flows. The refrigerant is supplied to and discharged from the refrigerant passage 7 via a pipe line 8 connected to the inlet side and the outlet side thereof. As the refrigerant, for example, cooling water is used. An insulating layer 9 having high thermal conductivity that insulates the refrigerant from the electrode member 3 is provided on the inner wall of the refrigerant passage 7. The entrance / exit of the pipe line 8 is covered with an insulator 10 having high thermal conductivity.

  FIG. 2 is a cross-sectional view of a part of the electrode member 3. As shown in FIG. 2, the electrode member 3 includes a first component member 11 and a second component member 12 coupled thereto. The first component member 11 has a first wavy surface 15 in which a plurality of first flat portions 13 and first grooves 14 are alternately arranged. The second component member 12 is a second member in which a plurality of second flat portions 16 corresponding to the respective first flat portions 13 and a plurality of second grooves 17 corresponding to the respective first grooves 14 are alternately arranged. It has a wavy surface 18.

  The groove surfaces of the first groove 14 and the second groove 17 both have a semicircular cross section, and are covered with a first insulating film 19 and a second insulating film 20, respectively. The corresponding first flat portion 13 and second flat portion 16 are joined. The corresponding first groove 14 and second groove 17 form the refrigerant passage 7. The corresponding first insulating film 19 and second insulating film 20 form the insulating layer 9.

  When the power module 1 is driven, power is supplied to the power semiconductor element 2 through the electrode member 3. Further, the refrigerant flows through the refrigerant passage 7 in the electrode member 3. At this time, the heat generated by the power semiconductor element 2 is transmitted to the electrode member 3 through the bonding material 5. The heat transmitted to the electrode member 3 is dissipated into the atmosphere via a heat exchanger and the like through the refrigerant flowing in the refrigerant passage 7.

  In this way, the power semiconductor element 2 is effectively cooled via the refrigerant flowing through the electrode member 3. Further, during this time, the insulating layer 9 on the inner wall of the refrigerant passage 7 prevents conduction between the electrode member 3 and the refrigerant, so that there is no possibility that a short circuit will occur from the electrode member 3 through the refrigerant. Therefore, the power module 1 can be driven while maintaining high reliability without causing a problem due to heat generation or a short circuit through the refrigerant.

  FIG. 3 is a flowchart showing the manufacturing process of the electrode member 3. This manufacturing process includes the first to fifth steps. That is, as shown in FIG. 3, in the first step, the first component member 11 constituting the electrode member 3 is produced (step S1). In the second step, the second component member 12 constituting the electrode member 3 is produced (step S2).

  FIG. 4A is a perspective view of a main part of the first component member 11 and the second component member 12 produced in the first step and the second step. As shown to Fig.4 (a), the 1st structural member 11 has the 1st wavy surface 15 in which the some 1st flat part 13 and the 1st groove | channel 14 are alternately arrange | positioned. Further, in the second component member 12, a plurality of second flat portions 16 corresponding to the respective first flat portions 13 and a plurality of second grooves 17 corresponding to the respective first grooves 14 are alternately arranged. A second wavy surface 18 is provided.

  The first component member 11 and the second component member 12 can be produced by press working. This production may be performed by cutting, but in that case, the cost is higher than the production by press working.

  As shown in FIG. 4B, in the third step, the first insulating film 19 is formed on the groove surface of each first groove 14 of the first component 11 (step S3). In the fourth step, the second insulating film 20 is formed on the groove surface of each second groove 17 of the second component member 12 (step S4).

  FIG. 5 shows a state in which the first insulating film 19 is formed in the first groove 14 of the first component member 11. As shown in FIG. 5A, the first insulating film 19 is formed by masking a portion other than the region where the first insulating film 19 is formed, that is, the first flat portion 13 by using a masking material 21 such as a tape. Then, a coating agent such as aerosol is applied to the groove surface of the first groove 14 from the nozzle 22 of the coating film forming apparatus.

  As shown in FIG. 5B, the masking material 21 is covered so that the masking material 21 protrudes from the first groove 14 by the thickness of the first insulating film 19 to be formed. . Thus, a smooth surface can be formed from the first flat portion 13 to the edge of the first insulating film 19 as shown in FIG. 5C without polishing by lapping.

  The first insulating film 19 can be formed, for example, by forming an alumina insulating film by an AD (aerosol deposition) method or a sol-gel method. After the formation of the first insulating film 19, the masking material 21 is peeled off. Similarly, the formation of the second insulating film 20 on the second component 12 in the fourth step (step S4) is performed by masking the second flat portion 16.

  In the fifth step (step S5), as shown in FIG. 4C, the corresponding first flat member 13 and second flat member 16 are joined to join the first component member 11 and the second component member 12. . The first flat portion 13 and the second flat portion 16 can be joined by brazing, crimping, caulking, laser joining, or the like. Thereby, the manufacturing process of the electrode member 3 is complete | finished.

  According to this embodiment, the groove surface of the first groove 14 of the first component member 11 and the groove surface of the second groove 17 of the second component member 12 are respectively covered with the first insulating film 19 and the second insulating film 20. Since the corresponding first flat portion 13 and second flat portion 16 are joined to join the first constituent member 11 and the second constituent member 12, the insulating layer 9 of the refrigerant passage 7 is securely attached. The electrode member 3 can be manufactured while being easily formed so as to function.

  FIG. 6 is a partial cross-sectional view of an electrode member according to the second embodiment of the present invention. As shown in FIG. 6, the electrode member 23 includes a first insulating film 24 and a second insulating film instead of the insulating layer 9 constituted by the first insulating film 19 and the second insulating film 20 in the first embodiment. 25 is provided.

  The circumferential edges (edges along the length direction) of the corresponding first insulating film 24 and second insulating film 25 are opposed to each other with a gap, and are bonded by the adhesive 27 filled in the gap. ing. Other configurations and operations of the electrode member 23 are the same as those of the electrode member 3 of the first embodiment.

  The electrode member 23 is manufactured through the same process as the manufacturing process of FIG. 2 except for the following points. That is, the masking in the third step (step S3) is performed so as to cover the circumferential edge portions of the first grooves 14 with the masking material 21 in addition to the first flat portions 13 as shown in FIG. . Similarly, the masking in the fourth step (step S4) is performed so as to cover the circumferential edge portions of the second grooves 17 in addition to the second flat portions 16.

  In the fifth step (step S5), before the first flat portion 13 and the second flat portion 16 are joined, the circumferential edge of each first groove 14 and the circumferential edge of each second groove 17 are joined. Adhesive 27 is applied to the edges.

  As a result, when the first flat portion 13 and the second flat portion 16 are subsequently joined, as shown in FIG. 6, the circumferential edge of each first insulating film 24 and each second insulating film facing each other, as shown in FIG. It will be in the state by which the adhesive agent 27 was filled into the clearance gap between 25 circumferential direction edges.

  According to the second embodiment, the circumferential edge of each corresponding first insulating film 24 and the circumferential edge of each second insulating film 25 are bonded by the adhesive 27 filled in the gap between the edges. Can be easily combined. Thereby, the refrigerant is prevented from leaking from between the circumferential edge of each corresponding first insulating film 24 and the circumferential edge of each second insulating film 25, and the function of the insulating layer 26 is reliably maintained. can do.

  FIG. 8 is a partial cross-sectional view of an electrode member according to the third embodiment of the present invention. As shown in FIG. 8, the electrode member 30 includes a first component member 31 and a second component member 32 that are substantially the same as the first component member 11 and the second component member 12 of the electrode member 3 of the first embodiment. .

  The first component member 31 includes a first flat portion 33 and a first groove 34 that are substantially the same as the first flat portion 13 and the first groove 14 of the first component member 11. The second component member 32 includes a second flat portion 36 and a second groove 37 that are substantially the same as the second flat portion 16 and the second groove 17 of the second component member 12.

  Each of the first grooves 34 and the second grooves 37 is covered with the first insulating film 24 and the second insulating film 25, respectively, as in the case of the first grooves 14 and the second grooves 17 in the second embodiment. Further, the circumferential edges of the corresponding first insulating films 24 and second insulating films 25 are opposed to each other with a gap, and are bonded by an adhesive 27 filled in the gap. Each first insulating film 24 and each second insulating film 25 has the same function as the insulating layer 9 in the electrode member 3 in FIG. 2 on the inner wall of the refrigerant passage 7 constituted by the first groove 34 and the second groove 37. An insulating layer 26 is formed.

  However, a first notch groove 38 is provided between each first groove 34 and each adjacent first flat portion 33. A second notch groove 39 is provided between each second groove 37 and each adjacent second flat portion 36.

  Corresponding first notch groove 38 and second notch groove 39 are connected via an adhesive 27 filled therebetween. The adhesive 27 filled between the first notch groove 38 and the second notch groove 39 is surrounded by the periphery of the first insulating film 24 adjacent to the first notch groove 38 and the second notch groove 39, respectively. It is integrated with the adhesive 27 filled in the gap between the direction edge and the circumferential edge of the second insulating film 25.

  The electrode member 30 is manufactured through the same process as the manufacturing process of FIG. 2 except for the following points. That is, in the first step (step S1), the first notch groove 38 is provided between each first flat portion 33 and each adjacent first groove 34. In the second step (step S2), a second notch groove 39 is provided between each second flat portion 36 and each adjacent second groove 37.

  Masking in the third step (step S3) is performed so as to cover the peripheral edge portions of the first grooves 34 with the masking material 21 in addition to the first flat portions 33 as shown in FIG. Similarly, the masking in the fourth step (step S4) is performed so as to cover the circumferential edge portions of the second grooves 37 in addition to the second flat portions 36.

  Further, in the fifth step (step S5), before joining the first flat portion 33 and the second flat portion 36, the circumferential edge of each first groove 34 and the circumferential edge of each second groove 37 are joined. The adhesive 27 is applied from the edge onto the first notch grooves 38 and the second notch grooves 39 adjacent to the edges.

  Thereafter, the first flat portion 33 and the second flat portion 36 are joined. At this time, as shown in FIG. 8, the adhesive 27 is filled in the gap between the circumferential edge of each first insulating film 24 and the circumferential edge of each second insulating film 25 facing each other, and correspondingly. The adhesive 27 is also filled between the first notch grooves 38 and the second notch grooves 39.

  According to the third embodiment, from the gap between the circumferential edge of each first insulating film 24 and the circumferential edge of each second insulating film 25, each first notch groove 38 adjacent to this gap The electrode member 30 in which the adhesive 27 is integrally filled over the space between the second notch groove 39 can be easily manufactured. Thereby, in the electrode member 30, the adhesive 27 filled in the gap between the circumferential edge of the first insulating film 24 and the circumferential edge of each second insulating film 25 is removed by the flow of the refrigerant. Can be prevented from peeling off, and the function of the insulating layer 26 can be more reliably maintained.

  In addition, this invention is not limited to said embodiment. For example, in each of the above embodiments, the example in which the present invention is applied to the electrode members 3, 23, and 30 for supplying power to the power semiconductor element 2 has been described. However, the present invention is not limited to this, and heat generation is a problem. It can be applied to an electrode member for supplying electric power to various electronic components that can be used to exert its effect.

  In each of the above embodiments, the electrode members 3, 23, and 30 that are disposed so as to sandwich the semiconductor element 2 have been described. However, the present invention provides a copper in the power semiconductor device described in Patent Document 1 described above. Like an electrode, you may apply to the electrode member arrange | positioned only at one side of a semiconductor element.

  DESCRIPTION OF SYMBOLS 2 ... Power semiconductor element (electronic component), 3, 23, 30 ... Electrode member, 6 ... Insulating layer, 7 ... Refrigerant passage, 9, 211, 31 ... 1st structural member, 12, 32 ... 2nd structural member, 13 33, first flat portion, 14, 34, first groove, 15 ... first wavy surface, 16, 36, second flat portion, 17, 37 ... second groove, 18 ... second wavy surface, 19, 24. ... 1st insulating film, 20, 25 ... 2nd insulating film, 27 ... Adhesive, 38 ... 1st notch groove, 39 ... 2nd notch groove.

Claims (7)

An electrode member for supplying electric power to an electronic component,
Having a refrigerant passage through which the refrigerant flows,
An electrode member comprising an insulating layer that electrically insulates the refrigerant from the electrode member on an inner wall of the refrigerant passage. A first component member having a first wavy surface in which a plurality of first flat portions and first grooves are alternately arranged;
A second constituent member having a second wavy surface in which a plurality of second flat portions respectively corresponding to the plurality of first flat portions and a plurality of second grooves corresponding to the plurality of first grooves are alternately arranged. And
The groove surfaces of the first groove and the second groove are respectively covered with a first insulating film and a second insulating film,
The corresponding first flat part and the second flat part are joined, the corresponding first groove and the second groove form the refrigerant passage, and the corresponding first insulating film and the second insulating film The electrode member according to claim 1, wherein an insulating layer is formed.   The corresponding edges along the length direction of the first insulating film and the second insulating film are opposed to each other with a gap, and are bonded by an adhesive filled in the gap. Item 3. The electrode member according to Item 2. A first notch groove is provided between each first groove and each first flat portion adjacent thereto,
A second notch groove is provided between each second groove and each second flat portion adjacent thereto,
The corresponding first notch groove and second notch groove are bonded via an adhesive filled therebetween,
The electrode member according to claim 3, wherein the adhesive is integrated with an adhesive filled in the adjacent gap. A method of manufacturing an electrode member for supplying electric power to an electronic component,
A first step of producing a first component member having a first wavy surface in which a plurality of first flat portions and first grooves are alternately arranged;
A second constituent member having a second wavy surface in which a plurality of second flat portions respectively corresponding to the plurality of first flat portions and a plurality of second grooves corresponding to the plurality of first grooves are alternately arranged. A second step of producing
A third step of forming a first insulating film in a state where each first flat portion is masked with respect to a groove surface of each first groove of the first constituent member;
A fourth step of forming a second insulating film in a state where each second flat portion is masked with respect to the groove surface of each second groove of the second component member;
After the third step and the fourth step, a fifth step of joining the corresponding first flat part and the second flat part to join the first constituent member and the second constituent member is provided. A method for manufacturing an electrode member. Masking in the third step and the fourth step is performed so as to cover edge portions along the length direction of each first groove and each second groove,
In the fifth step, before joining the first flat part and the second flat part, an adhesive is applied to the edge along the length direction of each first groove and each second groove. The manufacturing method of the electrode member according to claim 5, wherein In the first step, a first notch groove is provided between each first flat portion and each adjacent first groove,
In the second step, a second notch groove is provided between each second flat portion and each adjacent second groove,
The method for manufacturing an electrode member according to claim 6, wherein the application of the adhesive in the fifth step is also performed on each of the first cutout grooves and the second cutout grooves.