JP2014124828A - Producing method of substrate for inkjet head and substrate for inkjet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate for an inkjet head capable of easily providing an embedding groove on a substrate main body, into which a piezoelectric is embedded.SOLUTION: On a substrate main body 31, it is provided: a straight embedding groove 32 comprising second side surfaces 34a, 34b facing first side surfaces 30a, 30b of a piezoelectric 7. On both side of a base part 38 extending in a longitudinal direction of the embedding groove, a spacer 37 comprising a pair of guide parts 39a, 39b is provided. After adhesive agent 44 is supplied to bottom section of the embedding groove, the spacer is arranged on the substrate main body in a manner a guide part bridges the embedding groove. When the piezoelectric is pushed into the embedding groove together with the spacer, a gap corresponding to the thickness of the guide part is provided between the first side surfaces of the piezoelectric and the second side surfaces of the embedding groove and the adhesive agent supplied to the bottom section of the embedding groove is introduced into the gap. Thereafter, the adhesive agent is hardened so as to fix the piezoelectric in the embedding groove of the substrate main body.

Description

  Embodiments described herein relate generally to a method for manufacturing an inkjet head substrate in which a piezoelectric body is embedded, and an inkjet head substrate.

  A substrate for an inkjet head in which a plurality of ink grooves is formed includes a substrate body in which a polarized piezoelectric material is embedded. The substrate body has a groove into which the piezoelectric body enters, and the piezoelectric body is bonded in the groove.

  In this type of substrate, it is known that the thickness of the adhesive layer formed between the side surface of the piezoelectric body and the side surface of the groove has a great influence on the performance of the inkjet head. For this reason, conventionally, in order to form an adhesive layer having an appropriate thickness, protrusions projecting from the side surface of the groove toward the side surface of the piezoelectric body are provided at both end portions along the longitudinal direction of the groove. Yes.

  Due to the presence of the convex portion, the position of embedding the piezoelectric body in the groove can be accurately determined, and the thickness of the adhesive layer formed between the side surface of the piezoelectric body and the side surface of the groove can be equalized for each product.

JP 2000-296618 A

  According to the conventional substrate, the groove in which the piezoelectric body is embedded is formed, for example, by cutting the substrate body using a machine tool. At this time, if a convex portion is present on the side surface of the groove, the shape of the groove becomes complicated, so it cannot be denied that a great deal of labor and labor is required for the processing of the groove. Therefore, it becomes one factor which causes the cost increase of a board | substrate.

  An object of the present invention is to obtain an ink jet head substrate that can easily form an embedding groove in a substrate body while accurately defining a position where a piezoelectric body is embedded in the substrate body, and can reduce manufacturing costs.

  According to the embodiment, to manufacture an inkjet head substrate, a rectangular piezoelectric body having a pair of flat first side surfaces is prepared, and a pair of flats facing the first side surface of the piezoelectric body. A substrate body in which a straight buried groove having a second side surface is formed is prepared. Further, a spacer is prepared in which a pair of foldable guide portions are formed at both ends of a base portion extending in the longitudinal direction of the embedded groove.

  After supplying the adhesive to the bottom of the embedded groove, the spacer is disposed on the substrate body so that the guide portion straddles the embedded groove. After the piezoelectric body is overlaid on the base portion of the spacer, the piezoelectric body is pushed into the embedded groove together with the spacer. By this pressing, a gap corresponding to the thickness of the guide portion is formed between the first side surface of the piezoelectric body and the second side surface of the embedded groove, and the supply to the embedded groove is performed. Adhesive is introduced into the gap from the bottom of the buried groove. Thereafter, the adhesive is cured to fix the piezoelectric body in the embedded groove of the substrate body.

1 is a perspective view of an ink jet head according to an embodiment. 1 is a cross-sectional view of an ink jet head according to an embodiment. Sectional drawing which follows the F3-F3 line | wire of FIG. The perspective view of the board | substrate body which has the straight embedding groove | channel where a piezoelectric material is embedded. The perspective view of a spacer. The perspective view of the board | substrate body which shows the state which apply | coated the adhesive agent to the bottom of the embedding groove | channel. The perspective view which shows the state which accumulated the spacer on the board | substrate body so that the guide part of a spacer might straddle a buried groove. The perspective view which shows the state which pushed the piezoelectric material into the embedding groove | channel of the board | substrate body with the spacer. The perspective view which shows the state which the excess part of the adhesive agent protruded on the board | substrate main body and the piezoelectric material, and the front-end | tip part of the guide part of the spacer protruded on the board | substrate main body and the piezoelectric material. The perspective view of the board | substrate for inkjet heads. Sectional drawing which shows the state which embedded and fixed the piezoelectric material in the embedding groove | channel of the board | substrate body. Sectional drawing which shows the state which formed the ink groove | channel in the surface of a board | substrate body, and a piezoelectric material. Sectional drawing which shows the state which formed the electrode in the inner surface of the ink groove, and covered the electrode with the electrode protective film. Sectional drawing which shows the state which adhere | attached the frame structure on the board | substrate for inkjet heads. Sectional drawing which shows the state which divided | segmented the board | substrate body with which the frame structure body was adhere | attached into two head blocks. Sectional drawing which shows the state which adhere | attached the nozzle plate on the end surface of a head block. Sectional drawing which shows the state which adhere | attached the cover board on the frame of a head block.

  Hereinafter, embodiments will be described with reference to the drawings.

  1 to 3 disclose an edge shooter-type inkjet head 1 mounted on an inkjet recording apparatus such as a printer. The inkjet head 1 includes a substrate 2, a frame body 3, a lid plate 4 and a nozzle plate 5 as main elements.

  As shown in FIG. 2, the substrate 2 has a rectangular shape having a surface 2a and an end surface 2b. As the substrate 2, for example, alumina, silicon nitride, silicon carbide, aluminum nitride, lead zirconate titanate, or the like can be used.

  A piezoelectric body 7 as an actuator is embedded in one end of the surface 2 a of the substrate 2. The piezoelectric body 7 has a rectangular plate shape along the edge of the substrate 2, and is composed of two piezoelectric plates 8 a and 8 b stacked on each other. The piezoelectric plates 8a and 8b are bonded in an overlapping manner in the thickness direction, and the polarization direction is reversed along the thickness direction of the piezoelectric plates 8a and 8b.

  As the piezoelectric plates 8a and 8b, for example, lead zirconate titanate, lithium niobate, lithium tantalate, or the like can be used. In this embodiment, PZT having a high piezoelectric constant is used as the piezoelectric plates 8a and 8b. Further, considering the difference in expansion coefficient between the substrate 2 and the piezoelectric plates 8a and 8b and the dielectric constant, PZT having a dielectric constant lower than that of the piezoelectric plates 8a and 8b is used as the material of the substrate 2. .

  The piezoelectric body 7 has a surface 7a and an end surface 7b. The surface 7 a of the piezoelectric body 7 is located on the same surface as the surface 2 a of the substrate 2 and is exposed to the outside of the substrate 2. The end surface 7 b of the piezoelectric body 7 is located on the same surface as the end surface 2 b of the substrate 2.

  As shown in FIGS. 2 and 3, a plurality of ink grooves 10 are formed in the piezoelectric body 7. The ink grooves 10 are opened in the surface 7 a and the end surface 7 b of the piezoelectric body 7, and are arranged in a line at intervals in the longitudinal direction of the piezoelectric body 7.

  Each ink groove 10 has an extension portion 11 extended from one end along the longitudinal direction toward the substrate 2. The extension portion 11 is opened in the surface 2 a of the substrate 2, and the depth dimension is gradually reduced as the distance from the piezoelectric body 7 increases. The tip of the extension 11 of the ink groove 10 is positioned on the surface 2 a of the substrate 2. Further, a portion of the piezoelectric body 7 and the substrate 2 positioned between the adjacent ink grooves 10 constitutes a partition wall 12 that separates the ink grooves 10.

  The frame 3 is bonded onto the surface 2 a of the substrate 2. The frame body 3 has a front frame portion 13. The front frame portion 13 is superimposed on the piezoelectric body 7 and extends along the arrangement direction of the ink grooves 10, and closes the opening end of the ink groove 10 from the direction of the surface 7 a of the piezoelectric body 7. Further, the front frame portion 13 has an end face 13a. The end surface 13 a is located on the same surface as the end surface 2 b of the substrate 2 and the end surface 7 b of the piezoelectric body 7.

  The lid plate 4 is fixed to the frame body 3 by means such as adhesion. A region surrounded by the surface 2 a of the substrate 2, the frame 3, and the lid plate 4 constitutes a common ink supply chamber 15. The extension 11 of the ink groove 10 opened in the surface 2 a of the substrate 2 faces the ink supply chamber 15. For this reason, the ink groove 10 communicates with the ink supply chamber 15 via the extension portion 11.

  The nozzle plate 5 is bonded to the end surface 2 b of the substrate 2, the end surface 7 b of the piezoelectric body 7, and the end surface 13 a of the front frame portion 13. The nozzle plate 5 closes the open end of the ink groove 10 from the direction of the end surface 7 b of the piezoelectric body 7.

  The area surrounded by the inner surface of the ink groove 10, the front frame portion 13 of the frame 3 and the nozzle plate 5 constitutes a plurality of pressure chambers 17. The pressure chambers 17 are arranged in a line at intervals in the longitudinal direction of the piezoelectric body 7 and communicate with the ink supply chamber 15 through the extension 11 of the ink groove 10.

  As shown in FIG. 1, the cover plate 4 of the inkjet head 1 has an ink supply port 18. The ink supply port 18 is open to the ink supply chamber 15 and is connected to an ink cartridge (not shown). Therefore, the ink stored in the ink cartridge is supplied from the ink supply port 18 to the ink supply chamber 15.

  As shown in FIGS. 1 to 3, the nozzle plate 5 has a plurality of nozzles 19. The nozzles 19 are arranged in a line at intervals in the longitudinal direction of the nozzle plate 5 so as to communicate with the pressure chambers 17 individually.

  Electrodes 21 are respectively provided on the inner surfaces of the ink grooves 10. The electrodes 21 of the adjacent ink grooves 10 are separated by the partition 12 so as to be electrically independent. Each electrode 21 is electrically connected to the wiring pattern 22. The wiring pattern 22 is formed on the surface 2 a of the substrate 2 and extends in the longitudinal direction of the ink groove 10. The electrode 21 and the wiring pattern 22 are continuously covered with the electrode protective film 23.

  The tape carrier package 25 is electrically connected to the tip end portion of the wiring pattern 22. The tape carrier package 25 is mounted with a drive circuit that controls the inkjet head 1. The drive circuit applies a drive voltage to the electrode 21 of the inkjet head 1.

  As a result, a potential difference is generated between the adjacent electrodes 21, and an electric field is generated in the partition 12 corresponding to these electrodes 21. Therefore, the adjacent partition walls 12 with the pressure chamber 17 interposed therebetween are bent in a direction to increase the capacity of the pressure chamber 17 due to the shear mode deformation.

  Thereafter, when the application of the driving voltage to the electrode 21 is canceled, the partition wall 12 is displaced so as to return to the initial shape. When the partition wall 12 is displaced, the ink supplied from the ink supply chamber 15 to the pressure chamber 17 is pressurized in the pressure chamber 17. Part of the pressurized ink is ejected from the nozzle 19 as ink droplets.

  The substrate 2 used in the inkjet head 1 having such a configuration is manufactured according to the procedure described below.

  4 to 10 show an example of a process for manufacturing the substrate 2. First, as shown in FIG. 4, the two piezoelectric plates 8a and 8b are overlapped and bonded so that their polarizations face each other. Thereafter, the bonded piezoelectric plates 8a and 8b are cut into a desired size to form a rectangular piezoelectric body 7. The piezoelectric body 7 has a pair of first side surfaces 30a and 30b. The first side surfaces 30 a and 30 b are flat surfaces extending in the longitudinal direction of the piezoelectric body 7, and are arranged in parallel with a gap in the width direction of the piezoelectric body 7.

  Subsequently, a substrate body 31 that is the basis of the substrate 2 is prepared. The substrate body 31 is a rectangular plate having a size twice that of the substrate 2, for example. The substrate body 31 has a flat surface 31a and a buried groove 32 in which the piezoelectric body 7 is embedded.

  The embedded groove 32 is formed by subjecting the substrate body 31 to cutting using a machine tool, for example. For this reason, the embedded groove 32 extends linearly along the longitudinal direction of the substrate body 31 so as to open at the center of the surface 31a.

  The embedded groove 32 is defined by a bottom surface 33 and a pair of second side surfaces 34 a and 34 b that rise from the edge of the bottom surface 33. The bottom surface 33 and the second side surfaces 34 a and 34 b are flat surfaces extending in the longitudinal direction of the embedded groove 32, respectively. The second side surfaces 34 a and 34 b are arranged in parallel to each other so as to face each other with a gap in the width direction of the buried groove 32. Therefore, the embedded groove 32 has a straight shape that divides the substrate body 31 into two regions 35a and 35b of equal size.

The width W of the embedded groove 32 is set such that the width of the piezoelectric body 7 is Wa, and a gap to be secured between the first side surfaces 30a and 30b of the piezoelectric body 7 and the second side surfaces 34a and 34b of the embedded groove 32 is Wb. When the clearance for incorporating the piezoelectric body 7 into the embedded groove 32 is Wc,
W = Wa + 2Wb + Wc
Can be displayed.

  Subsequently, a spacer 37 as shown in FIG. 5 is prepared. The spacer 37 is made of a sheet-like material that can be bent, such as a resin film or metal foil, and has a thickness t corresponding to the gap Wb.

  The spacer 37 includes a base portion 38 and a pair of guide portions 39a and 39b. The base portion 38 is formed in an elongated strip shape extending along the longitudinal direction of the embedded groove 32. The width W1 of the base portion 38 is narrower than the width W of the embedded groove 32 and the width Wa of the piezoelectric body 7. A plurality of through holes 40 are formed in the base portion 38. The through holes 40 penetrate the base portion 38 in the thickness direction, and are arranged in a line at intervals in the length direction of the base portion 38.

  The guide portions 39a and 39b are located at both end portions along the longitudinal direction of the base portion 38. The guide portions 39a and 39b are formed in an elongated strip shape extending in a direction orthogonal to the base portion 38. The guide portions 39a and 39b have a length L that extends over the two regions 35a and 35b of the substrate body 31 defined by the embedded grooves 32. In other words, the guide portions 39 a and 39 b are formed wider than the buried groove 32.

  Therefore, each guide part 39a, 39b has the 1st tongue piece 41 protruded in one along the width direction of the base part 38, and the 2nd tongue piece 42 protruded in the other along the width direction of the base part 38. And have.

  After the spacer 37 is prepared, an adhesive 44 is supplied to the embedded groove 32 as shown in FIG. The adhesive 44 is applied on the bottom surface 33 of the embedded groove 32 using, for example, a dispenser so as to be continuous in the longitudinal direction of the embedded groove 32.

  Thereafter, as shown in FIG. 7, the spacer 37 is arranged on the substrate body 31 so that the guide portions 39 a and 39 b of the spacer 37 straddle the embedded groove 32. In a state where the spacer 37 is disposed on the substrate body 31, the first tongue 41 of the guide portions 39 a and 39 b is in contact with the surface 31 a of one region 35 a of the substrate body 31. Similarly, the second tongue pieces 42 of the guide portions 39 a and 39 b are in contact with the surface 31 a of the other region 35 b of the substrate body 31. Further, the base portion 38 of the spacer 37 extends along the embedded groove 32 so as to face the bottom surface 33 of the embedded groove 32.

  Subsequently, as shown in FIGS. 7 and 8, after the piezoelectric material 7 cut into a rectangular shape is superimposed on the base portion 38 of the spacer 37, the piezoelectric material 7 is embedded in the embedded groove 32 together with the spacer 37. Push in.

  As a result, as best shown in FIG. 8, the guide portions 39 a and 39 b of the spacer 37 come into contact with the opening edge of the embedded groove 32 and are bent upward and enter the embedded groove 32.

  That is, with the pushing operation of the piezoelectric body 7, the first tongue piece 41 of the guide portions 39 a and 39 b is interposed between the first side face 30 a of the piezoelectric body 7 and the second side face 34 a of the embedded groove 32. The Similarly, the second tongue piece 42 of the guide portions 39 a and 39 b is interposed between the first side face 30 b of the piezoelectric body 7 and the second side face 34 b of the embedded groove 32.

  Therefore, the piezoelectric body 7 enters the embedded groove 32 using the guide portions 39a and 39b of the spacer 37 as a guide.

  At this time, the presence of the first tongue piece 41 and the second tongue piece 42 positions the piezoelectric body 7 along the width direction of the embedded groove 32. At the same time, a gap Wb corresponding to the thickness of the first tongue piece 41 is formed between the first side surface 30 a of the piezoelectric body 7 and the second side surface 34 a of the embedded groove 32. Similarly, a gap Wb corresponding to the thickness of the second tongue piece 42 is also formed between the second side surface 30 b of the piezoelectric body 7 and the second side surface 34 b of the embedded groove 32.

  Subsequently, when the piezoelectric body 7 is further pressurized toward the bottom surface 33 of the embedded groove 32, the base portion 38 of the spacer 37 is sandwiched between the bottom surface 33 of the embedded groove 32 and the piezoelectric body 7. As a result, the adhesive 44 applied to the bottom surface 33 of the embedded groove 32 protrudes from the side edge of the base portion 38 into the gap Wb. The protruding adhesive 44 is closely filled in the gap Wb to form the adhesive layer 45. At the same time, the surplus portion 44b of the adhesive 44 protrudes from the gap Wb onto the surface of the piezoelectric body 7 and the surface 31a of the substrate body 31 as shown in FIG.

  Furthermore, according to the present embodiment, a part of the adhesive 44 applied to the bottom surface 33 of the embedded groove 32 passes through the through hole 40 of the base portion 38 and fills the boundary between the base portion 38 and the piezoelectric body 7. Is done.

  Thereafter, the adhesive 44 is cured by, for example, heating the substrate body 31 while pressing the piezoelectric body 7 toward the bottom surface 33 of the embedded groove 32. As a result, the piezoelectric body 7 is fixed to the substrate body 31 while being embedded in the embedded groove 32.

  At the same time, during the period until the adhesive 44 is cured, the first tongue piece 41 and the second tongue piece 42 of the spacer 44 maintain the size of the gap Wb between the piezoelectric body 7 and the embedded groove 32. . Therefore, an adhesive layer 45 having an equal thickness is obtained between the first side surfaces 30 a and 30 b of the piezoelectric body 7 and the second side surfaces 34 a and 34 b of the embedded groove 32.

  When the adhesive 44 is cured, the first tongue piece 41 and the second tongue piece 42 of the spacer 37 protruding outside the substrate body 31 and the piezoelectric body 7 from the excess portion 44a of the adhesive 44 and the embedded groove 32 are polished. And remove.

  As a result, a substrate body 31 in which the piezoelectric body 7 as shown in FIGS. 10 and 11 is embedded is obtained.

  Next, a procedure for manufacturing the inkjet head 1 using the substrate body 31 in which the piezoelectric body 7 is embedded will be described with reference to FIGS.

  First, a plurality of ink grooves 10 as shown in FIG. 12 are formed in the piezoelectric body 7 by cutting the substrate body 31 using, for example, a disk-shaped diamond blade. The ink groove 10 is formed in a region of the piezoelectric body 7 located between the guide portions 39a and 39b of the spacer 37. When the ink groove 10 is formed in the piezoelectric body 7, the surface 31a of the substrate body 31 is cut into a groove shape by a diamond blade. The scraped portion functions as an extension portion 11 of the ink groove 10 in which the groove depth gradually decreases.

  Thereafter, as shown in FIG. 13, the electrodes 21 are formed on the inner surface of each ink groove 10 by using, for example, photolithography, and a plurality of wiring patterns 22 are formed on the surface 31 a of the substrate body 31. Subsequently, an electrode protective film 23 is formed on the electrode 21 and the wiring pattern 22. In forming the electrode protection film 23, masking is performed on the tip of the wiring pattern 22 so that the electrode protection film 23 is not formed on the tip of the wiring pattern 22.

  After that, as shown in FIG. 14, the frame structure 47 is fixed on the surface 31a of the substrate body 31 by means such as adhesion. The frame structure 47 includes a square frame portion 48 and a central portion 49. The frame portion 48 is positioned on the outer peripheral portion of the surface 31 a of the substrate body 31 and surrounds the extension portion 11 of the ink groove 10. The central portion 49 crosses the frame portion 48 and is laminated on the surface 7a of the piezoelectric body 7 on which the ink grooves 10 are formed. Therefore, the central portion 49 of the frame structure 47 covers the open end of the ink groove 10.

  Subsequently, the substrate body 31 to which the frame structure 47 is bonded is divided into two along a planned cutting line C <b> 1 extending in the longitudinal direction of the piezoelectric body 7 through the center along the width direction of the piezoelectric body 7. By this division, as shown in FIG. 15, a pair of head blocks 51a and 51b in which the substrate 2 and the frame 3 are integrated are formed. In each of the head blocks 51a and 51b, the end surface 2b of the substrate 2, the end surface 7b of the piezoelectric body 7, and the end surface 13a of the front frame portion 13 of the frame 3 are located at the divided ends of the head blocks 51a and 51b.

  Thereafter, as representatively showing one head block 51 a in FIG. 16, so as to straddle between the end surface 2 b of the substrate 2, the end surface 7 b of the piezoelectric body 7, and the end surface 13 a of the front frame portion 13 of the frame body 3, The nozzle plate 5 before nozzle formation is bonded. As a result, a plurality of pressure chambers 17 are formed between the ink groove 10 of the piezoelectric body 7 and the front frame portion 13 of the frame 3.

  After the nozzle 19 is formed on the nozzle plate 5, the lid plate 4 is bonded onto the frame 3. By this adhesion, an ink supply chamber 15 surrounded by the frame 3 is formed between the lid plate 4 and the substrate 2. The ink supply chamber 15 communicates with the pressure chamber 17 through the extension 11 of the ink groove 10.

  Thereafter, the tape carrier package 25 is connected to the tip end portion of the wiring pattern 22 located outside the ink supply chamber 15 by using, for example, an anisotropic conductive film or a bonding wire. Thereby, a series of manufacturing processes of the inkjet head 1 is completed.

  According to the embodiment, when the piezoelectric body 7 is pushed into the embedded groove 32 of the substrate body 31 together with the spacer 37, the first tongue 41 of the one guide portion 39 a is piezoelectric at one end along the longitudinal direction of the embedded groove 32. The second tongue piece 42 is interposed between the first side surface 30 a of the body 7 and the second side surface 34 a of the embedded groove 32, and the second side surface 42 b of the piezoelectric body 7 and the second side surface of the embedded groove 32. 34b.

  Similarly, at the other end along the longitudinal direction of the embedded groove 32, the first tongue piece 41 of the other guide portion 39 b is between the first side surface 30 a of the piezoelectric body 7 and the second side surface 34 a of the embedded groove 32. The second tongue piece 42 is interposed between the first side surface 30 b of the piezoelectric body 7 and the second side surface 34 b of the embedded groove 32.

  Therefore, the position of the piezoelectric body 7 along the width direction of the embedded groove 32 can be accurately defined by the spacer 37.

  Therefore, the gap Wb for obtaining the adhesive layer 45 having an appropriate thickness is accurately formed between the first side surfaces 30a and 30b of the piezoelectric body 7 and the second side surfaces 34a and 34b of the embedded groove 32. Can do.

  In addition, by using the spacer 37, the buried groove 32 can be formed into a straight shape in which the bottom surface 33 and the second side surfaces 34a and 34b are flat. For this reason, the shape of the buried groove 32 can be simplified. Therefore, the embedded groove 32 can be easily manufactured by machining, and the manufacturing cost of the substrate 2 can be reduced.

  Furthermore, according to the inkjet head 1 of the present embodiment, when the piezoelectric body 7 is pushed into the embedding groove 32 together with the spacer 37, the guide portions 39a and 39b of the spacer 37 follow the pushing operation and the first of the piezoelectric body 7 is moved. The side surfaces 30a and 30b of the embedded groove 32 and the second side surfaces 34a and 34b of the embedded groove 32 are bent.

  Therefore, a desired gap Wb between the piezoelectric body 7 and the embedded groove 32 can be formed by a simple operation of pushing the piezoelectric body 7 together with the spacer 37 into the embedded groove 32. Therefore, the position of the piezoelectric body 7 along the width direction of the embedded groove 32 can be easily defined, which also has the advantage of contributing to the improvement of the assembly of the inkjet head 1.

  In the embodiment, the substrate body in which the piezoelectric body is embedded is divided into two, but the substrate body may be divided into four, for example.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 1 ... Inkjet head, 2 ... Board | substrate, 7 ... Piezoelectric body, 10 ... Ink groove, 30a, 30b ... 1st side surface, 31 ... Substrate body, 32 ... Embedded groove | channel, 34a, 34b ... 2nd side surface, 37 ... Spacer 38 ... Base part, 39a, 39b ... Guide part, 44 ... Adhesive, 45 ... Adhesive layer.

Claims (6)

A method of manufacturing a substrate for an inkjet head in which a plurality of ink grooves are formed,
A rectangular piezoelectric body having a pair of flat first side faces and a polarization direction opposite to each other is prepared.
Preparing a substrate body in which a straight embedding groove having a pair of flat second side faces in which the piezoelectric body is embedded and facing the first side face of the piezoelectric body is formed;
A base part extending in the longitudinal direction of the embedded groove and narrower than the embedded groove, and a pair of foldable parts formed at both ends along the longitudinal direction of the base part and formed wider than the embedded groove A spacer having a guide portion;
After supplying the adhesive to the bottom of the embedded groove, the spacer is disposed on the substrate body so that the guide portion of the spacer straddles the embedded groove,
After the piezoelectric body is overlaid on the base portion of the spacer, the piezoelectric body is pushed into the embedded groove together with the spacer, whereby the first side surface of the piezoelectric body and the first side of the embedded groove. Forming a gap corresponding to the thickness of the guide portion between the two side surfaces, and introducing the adhesive supplied to the buried groove from the bottom of the buried groove to the gap,
A method of manufacturing a substrate for an ink jet head, wherein the piezoelectric body is fixed to the embedded groove of the substrate body by curing the adhesive.   The manufacturing method according to claim 1, wherein when the base portion of the spacer is pushed into the embedded groove together with the piezoelectric body, the adhesive supplied to the bottom of the embedded groove is the edge of the base portion. A method for manufacturing a substrate for an ink jet head, wherein the substrate is extruded into the gap and is closely filled in the gap.   3. The manufacturing method according to claim 1, wherein the spacer has a plurality of through holes penetrating the base portion, and the base portion of the spacer is pushed into the embedded groove together with the piezoelectric body. At this time, the method of manufacturing the substrate for an inkjet head, wherein the adhesive supplied to the bottom of the embedded groove is filled in the boundary between the base portion and the piezoelectric body through the through hole.   4. The manufacturing method according to claim 1, wherein after the piezoelectric body is fixed to the embedded groove as the adhesive is cured, the piezoelectric body and the substrate body are inserted from the gap. An excess portion of the adhesive that protrudes onto the substrate, and a tip portion of the guide portion of the spacer protruding above the piezoelectric body and the substrate body from the gap are removed. Manufacturing method.   5. The manufacturing method according to claim 1, wherein the piezoelectric body is fixed to the embedded groove as the adhesive is cured, and then orthogonal to the longitudinal direction of the piezoelectric body. The ink groove along the direction is formed on the surface of the piezoelectric body and the substrate body in which the piezoelectric body is embedded, and then extends in the longitudinal direction of the piezoelectric body through the center along the width direction of the piezoelectric body. A method for manufacturing a substrate for an inkjet head, wherein the substrate body in which the piezoelectric body is embedded is divided along a planned cutting line. A substrate body;
A rectangular piezoelectric body having a pair of flat first side surfaces and a polarization direction opposite to each other;
A straight embedding groove formed on the substrate main body and having a pair of flat second side faces facing the first side face of the piezoelectric body while being embedded with the piezoelectric body;
A spacer interposed between the embedded groove and the piezoelectric body, and configured to form an even gap between the first side surface of the piezoelectric body and the second side surface of the embedded groove; ,
An adhesive layer that is composed of an adhesive filled in the gap, and fixes the piezoelectric body to the substrate body;
An inkjet head substrate comprising:

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