JP5492824B2 - Ink jet head and method of manufacturing ink jet head - Google Patents

Description

  Embodiments described herein relate generally to an inkjet head and an inkjet head manufacturing method.

  In a so-called side shooter type ink jet head, an actuator for ejecting ink is attached to a base plate by an adhesive. This adhesive is uniformly applied to the bottom surface of the actuator facing the base plate.

  The actuator is provided with a plurality of grooves that form a plurality of pressure chambers. A continuous conductive pattern is formed in the groove, the side surface of the actuator in which the groove is opened, the adhesive interposed between the actuator and the base plate, and the base plate. By applying a voltage to this conductive pattern, the actuator is deformed in the shear mode, and ink in the pressure chamber is ejected.

Japanese Patent Laid-Open No. 2004-195689

  Before the above-described conductor pattern is formed, the side surface of the actuator is cut so as to be inclined. At the same time, the cured adhesive between the actuator and the base plate is also cut.

  The adhesive applied to the bottom surface of the actuator may take in air when the actuator is attached to the base plate. This air forms bubbles inside the adhesive. If there is a depression formed by bubbles on the outer surface of the cut adhesive, the formation of the conductive pattern can be affected.

  The objective of this invention is related with the manufacturing method of the inkjet head which can suppress that a hollow is formed in the outer surface of an adhesive agent by an air bubble, and an inkjet head.

An inkjet head according to one embodiment includes a substrate, an actuator, an adhesive, and a conductive pattern. The base material has a mounting surface. The actuator includes a main body, a plurality of grooves, and an adhesive filling portion. The main body includes a first surface facing the mounting surface of the base material, a second surface located on the opposite side of the first surface, and between the first surface and the second surface. And a pair of side surfaces that are inclined so that the angle with the second surface is an obtuse angle. The plurality of grooves open to the second surface and the pair of side surfaces of the main body and are arranged in the longitudinal direction of the main body. The adhesive filling portion is provided on a side surface of the main body and has an adhesive surface facing a mounting surface of the base material. The adhesive is filled in the adhesive filling portion to fix the actuator to the mounting surface of the base material and has an outer surface continuous with the side surface of the main body. The plurality of conductive patterns are continuously provided on a side surface of the main body, inner surfaces of the plurality of grooves, an outer surface of the adhesive, and a mounting surface of the base material .

1 is an exploded perspective view illustrating an inkjet head according to a first embodiment. FIG. Sectional drawing which shows the inkjet head of 1st Embodiment along the F2-F2 line | wire of FIG. The perspective view which expands and shows a part of base plate and actuator of 1st Embodiment. Sectional drawing which expands and shows the actuator mounted in the baseplate of 1st Embodiment. Sectional drawing which shows a part of base plate of 1st Embodiment, and the actuator before a process. Sectional drawing which shows the actuator before the process fixed to the base plate of 1st Embodiment. Sectional drawing which expands and shows a part of actuator before a process of 1st Embodiment. Sectional drawing which shows the processed actuator of 1st Embodiment. Sectional drawing which shows the actuator mounted in the baseplate which concerns on 2nd Embodiment. Sectional drawing which shows the actuator before a process fixed to the baseplate of 2nd Embodiment. Sectional drawing which shows the actuator mounted in the baseplate which concerns on 3rd Embodiment.

  The first embodiment will be described below with reference to FIGS. 1 to 8. FIG. 1 is an exploded perspective view showing the inkjet head 1. FIG. 2 is a cross-sectional view showing a part of the inkjet head 1 along the line F2-F2 of FIG.

  As shown in FIG. 1, the ink jet head 1 is a so-called side shooter type ink jet head, and is mounted on, for example, a carriage of a printer. The inkjet head 1 includes a base plate 11, a pair of actuators 12, a frame member 13, and a nozzle plate 14. The base plate 11 is an example of a base material. Further, as indicated by a two-dot chain line in FIG. 2, the inkjet head 1 includes a manifold 15 and a film carrier package (hereinafter referred to as FCP) 16.

  As shown in FIG. 2, the pair of actuators 12 and the frame member 13 are attached to the base plate 11. The nozzle plate 14 is attached to the frame member 13. An ink chamber 17 surrounded by the base plate 11, the frame member 13, and the nozzle plate 14 is formed inside the inkjet head 1.

  As shown in FIG. 1, the base plate 11 is formed in a rectangular plate shape by ceramics such as alumina. As shown in FIG. 2, the base plate 11 has a flat mounting surface 21, a mounting surface 22, and an outer edge 23. The mounting surface 22 is located on the opposite side of the mounting surface 21. The outer edge 23 straddles between the mounting surface 21 and the mounting surface 22. The mounting surface 22 is fixed to the manifold 15.

  A plurality of supply ports 26 and a plurality of discharge ports 27 are opened on the mounting surface 21 of the base plate 11. As shown in FIG. 1, the plurality of supply ports 26 are arranged in the longitudinal direction of the base plate 10 in the central portion of the base plate 10. The supply port 26 opens to the ink chamber 17 and is connected to the ink tank via the manifold 15. The ink stored in the ink tank is supplied from the supply port 26 to the ink chamber 17.

  The plurality of discharge ports 27 are arranged in two rows along the longitudinal direction of the base plate 11 so as to sandwich the supply ports 26 arranged in a row. The discharge port 27 opens to the ink chamber 17 and is connected to the ink tank via the manifold 15. The ink in the ink chamber 17 is collected in the ink tank through the discharge port 27.

  The frame member 13 is fixed to the mounting surface 21 with an adhesive, for example. The frame member 13 is formed in a rectangular frame shape. The frame member 13 surrounds the plurality of supply ports 26 and the plurality of discharge ports 27.

  The frame member 13 is formed, for example, by diffusion bonding a plurality of nickel alloy plates. The bonding is not limited to diffusion bonding, and other bonding methods such as anodic bonding and other vacuum bonding may be used.

  The nozzle plate 14 is formed of a rectangular film made of polyimide. The nozzle plate 14 is not limited to this, and may be formed of other resin materials capable of laser processing.

  The nozzle plate 14 is fixed to the frame member 13 with an adhesive, for example, and closes the ink chamber 17. The nozzle plate 14 faces the mounting surface 21 of the base plate 11.

  A plurality of nozzles 28 are provided on the nozzle plate 14. The nozzles 28 are holes opened in the ink chambers 17 respectively. The plurality of nozzles 28 are arranged in two rows along the longitudinal direction of the nozzle plate 14.

  FIG. 3 is an enlarged perspective view showing a part of the base plate 11 and one actuator 12. FIG. 4 is an enlarged cross-sectional view of the actuator 12 mounted on the base plate 11. In FIG. 3, a portion of the actuator 12 is shown cut away. Since the pair of actuators 12 have the same configuration and function as each other, a single actuator 12 will be described below as a representative.

  As shown in FIG. 1, the actuator 12 is sandwiched between a plurality of supply ports 26 arranged in a row and one row of a plurality of discharge ports 27. The actuator 12 is arranged corresponding to one row of the plurality of nozzles 28. As shown in FIG. 2, the actuator 12 is disposed inside the ink chamber 17 and is sandwiched between the base plate 11 and the nozzle plate 14.

  As shown in FIG. 3, the actuator 12 includes a main body 31, a plurality of grooves 32, and a pair of adhesive filling portions 33 and 34. In the present embodiment, the adhesive filling portions 33 and 34 are so-called notches.

  The main body 31 is formed of two plate-like piezoelectric bodies made of, for example, lead zirconate titanate (PZT). The two piezoelectric bodies are bonded so that the polarization directions are opposite to each other in the thickness direction.

  As shown in FIG. 2, the main body 31 has a first surface 35, a second surface 36, and a pair of side surfaces 37 and 38. The first surface 35 is a surface facing the mounting surface 21 of the base plate 11. The first surface 35 is formed flat and is in contact with the mounting surface 21.

  The second surface 36 is located on the opposite side of the first surface 35. The second surface 36 faces the nozzle plate 14. The second surface 36 is fixed to the nozzle plate 14 with, for example, an adhesive. The width of the second surface 36 is, for example, 1 mm. The height from the first surface 35 to the second surface 36 is, for example, 500 μm.

  The pair of side surfaces 37 and 38 are side surfaces of the main body 31 in the width direction. The pair of side surfaces 37 and 38 are inclined in a direction approaching each other as they proceed from the first surface 35 to the second surface 36. In other words, the pair of side surfaces 37 and 38 are inclined so that the angle between the pair of side surfaces 37 and 38 is an obtuse angle. The angle between the pair of side surfaces 37, 38 and the second surface 36 is, for example, 135 °. As shown in FIG. 2, the main body 31 has a substantially trapezoidal cross section.

  One side surface 37 is closer to the outer edge 23 of the base plate 11 and the frame member 13 than the other side surface 38. One side surface 37 straddles between one end portion in the width direction of the first surface 35 and one end portion in the width direction of the second surface 36.

  The other side surface 38 is closer to the center of the base plate 11 than the one side surface 37. The other side surface 38 straddles between the other end portion in the width direction of the first surface 35 and the other end portion in the width direction of the second surface 36.

  As shown in FIG. 3, the plurality of grooves 32 are provided side by side in the longitudinal direction of the main body 31. The plurality of grooves 32 open continuously to the second surface 36 of the main body 31 and the pair of side surfaces 37 and 38. The width of the groove 32 is, for example, 85 μm. The height from the bottom surface of the groove 32 to the second surface 36 is 300 μm. The groove 32 is formed so as to be slightly inclined with respect to the width direction of the main body 31, but the groove 32 is shown along the width direction of the main body 31 in FIG. 3.

  Since the actuator 12 is disposed between the supply port 26 and the discharge port 27, the ink supplied from the supply port 26 to the ink chamber 17 flows into the plurality of grooves 32. The ink flowing into each groove 32 is ejected by the actuator 12 or is collected from the discharge port 27 to the ink tank.

  A plurality of walls 41 are formed in the actuator 12 by the plurality of grooves 32. The wall portion 41 partitions adjacent grooves 32 and forms part of the inner surface of the groove 32.

  As shown in FIG. 2, the plurality of grooves 32 are provided corresponding to the plurality of nozzles 28. The nozzle 28 opens toward the corresponding groove 32. The number of grooves 32 and the number of nozzles 28 may be different. For example, the number of nozzles 28 is smaller than the number of grooves 32 of the pair of actuators 12.

  One adhesive filling portion 33 is provided on one side surface 37. The other adhesive filling portion 34 is provided on the other side surface 38. The pair of adhesive filling portions 33 and 34 extend from one end to the other end in the longitudinal direction of the actuator 12.

  As shown in FIG. 4, the pair of adhesive filling portions 33 and 34 is formed by an adhesive surface 43 and another adhesive surface 44. The bonding surface 43 and the other bonding surface 44 are each a part of the main body 31. The bonding surface 43 intersects with the pair of side surfaces 37 and 38, respectively. The bonding surface 43 is a flat surface facing the mounting surface 21 of the base plate 11. The height from the mounting surface 21 to the adhesion surface 43 is, for example, 5 to 10 μm. 2 to 8, the height from the mounting surface 21 to the bonding surface 43 is drawn large for convenience.

  The other bonding surface 44 is a flat surface provided between the bonding surface 43 and the first surface 35. The other bonding surface 44 is orthogonal to the bonding surface 43 and is also orthogonal to the first surface 35. The other bonding surface 44 may be inclined with respect to the first surface 35.

  The pair of adhesive filling portions 33 and 34 is filled with an adhesive 46, respectively. The adhesive 46 is, for example, a thermosetting epoxy adhesive. The adhesive 46 is attached to the adhesive surface 43 and the other adhesive surface 44 of the pair of adhesive filling portions 33 and 34 and the mounting surface 21 of the base plate 11. The adhesive 46 is cured, and fixes the main body 31 of the actuator 12 to the mounting surface 21 of the base plate 11.

  The adhesive 46 has a pair of outer surfaces 48 and 49. One outer surface 48 is formed continuously with one side surface 37 of the main body 31. The other outer surface 49 is formed continuously with the other side surface 38 of the main body 31. For this reason, the pair of outer surfaces 48 and 49 are inclined with respect to the second surface 36 of the main body 31, for example, by 135 °, like the pair of side surfaces 37 and 38 of the main body 31. The angle between the pair of outer surfaces 48 and 49 and the second surface 36 may be different from the angle between the pair of side surfaces 37 and 38 of the main body 31 and the mounting surface 21.

  A plurality of conductor patterns 51 are provided on the base plate 11 and the pair of actuators 12. The conductor pattern 51 is made of, for example, a nickel thin film formed by electroless plating. The plurality of conductor patterns 51 each have an electrode 52 and a wiring 53.

  The electrode 52 is provided on each inner surface of the plurality of grooves 32. The wiring 53 is continuously provided on one side surface 37 of the main body 31, one outer surface 48 of the adhesive 46, and the mounting surface 21 of the base plate 11. One end of the wiring 53 is connected to the electrode 52. As shown in FIG. 2, the wiring 53 extends between the mounting surface 21 of the base plate 11 and the frame member 13 and reaches the outer edge 23 of the base plate 11.

  The FCP 16 is connected to the wiring 53 on the mounting surface 21 of the base plate 11. The FCP 16 includes a film having a pattern and flexibility, and a driving IC mounted on the film.

  The driving IC of the FCP 16 applies a driving voltage to the electrode 52 through the wiring 53. Thereby, the wall 41 is deformed in the shear mode, and the volume of the groove 32 is increased. When the voltage applied to the electrode 52 is released, the wall portion 41 returns to the original position. For this reason, the ink flowing into the groove 32 is pressurized and discharged from the nozzle 28 corresponding to the groove 32.

  Hereinafter, a method for mounting the actuator 12 on the base plate 11, which is a part of the manufacturing process of the inkjet head 1, will be described with reference to FIGS. 5 to 8. FIG. 5 is a cross-sectional view showing a part of the base plate 11 and the actuator 12A before processing. FIG. 6 is a cross-sectional view showing the actuator 12 </ b> A before processing, which is fixed to the base plate 11. FIG. 7 is an enlarged cross-sectional view showing a part of the actuator 12A before processing. FIG. 8 is a cross-sectional view showing the processed actuator 12A. As described above, the actuator 12 in the middle of the manufacturing process is referred to as an actuator 12A.

  As shown in FIG. 5, the actuator 12 </ b> A includes a main body 31 </ b> A and an adhesive 46. Thus, the main body 31 in the middle of the manufacturing process is referred to as a main body 31A. The cross section of the main body 31A is formed in a substantially rectangular shape. The main body 31 </ b> A has a pair of side surfaces 55 and 56. The pair of side surfaces 55 and 56 straddles between the first surface 35 and the second surface 36. The pair of adhesive filling portions 33 and 34 are provided on the pair of side surfaces 55 and 56, respectively.

  First, the adhesive 46 is filled into the pair of adhesive filling portions 33 and 34. The adhesive 46 is filled slightly more than the respective volumes of the adhesive filling portions 33 and 34. For this reason, the adhesive 46 slightly protrudes from the first surface 35.

  Next, as shown by the arrow in FIG. 5, the first surface 35 of the main body 31 </ b> A is pressed against the mounting surface 21 of the base plate 11. As shown in FIG. 6, the adhesive 46 adheres to the mounting surface 21 when the first surface 35 is pressed against the mounting surface 21. As shown in FIG. 7, the adhesive 46 spreads on the mounting surface 21 due to the force pressing the first surface 35 against the mounting surface 21 and the wettability of the mounting surface 21. In this manner, the main body 31A is fixed to the mounting surface 21 by the adhesive 46 adhering to the mounting surface 21. Next, the adhesive 46 is thermally cured by heating at 120 ° C., for example.

  Next, the outside of the main body 31A and the cured adhesive 46 is cut. The main body 31A and the adhesive 46 are not limited to cutting, and may be ground. As shown in FIG. 8, the main body 31 </ b> A and the adhesive 46 are partly cut to form a pair of side surfaces 37, 38 and a pair of outer surfaces 48, 49. That is, by cutting the main body 31A and the adhesive 46, the pair of side surfaces 37 and 38 of the main body 31 are inclined so that the angle between the second surface 36 and the second surface 36 becomes an obtuse angle. In FIGS. 6 and 7, the positions of the pair of side surfaces 37 and 38 and the pair of outer surfaces 48 and 49 formed after processing are indicated by two-dot chain lines. That is, the two-dot chain line in FIGS. 6 and 7 delimits the portion P1 of the main body 31A and the adhesive 46 from the portion P1 that remains without being shaved. The part P1 to be cut is located outside the remaining part P2.

  As shown in FIG. 7, a plurality of bubbles B may exist in the adhesive 46. The bubble B can be formed, for example, when the adhesive 46 takes in air between the main body 31 and the base plate 11 when the main body 31A is pressed against the base plate 11. The bubbles B can be formed by air or water vapor contained in the adhesive 46.

  The bubble B moves outward as the adhesive 46 spreads. Further, the bubbles B move outward as the viscosity of the heated adhesive 46 decreases. That is, the bubble B moves toward the portion P1 where the adhesive 46 is scraped. The bubbles B located in the portion P1 to be cut are removed by cutting the adhesive 46 cured as described above.

  Next, as shown in FIG. 8, the main body 31A is cut by a diamond wheel of a dicing saw used for cutting an IC wafer, for example, to form a plurality of grooves 32. Subsequently, a nickel thin film is formed on the mounting surface 21 of the base plate 11 and the surface of the actuator 12A by electroless plating. For example, the nickel thin film is divided and unnecessary portions are removed by patterning by laser irradiation. Thereby, a plurality of conductor patterns 51 shown in FIG. 4 are formed. As described above, the actuator 12 is mounted on the base plate 11.

  According to the inkjet head 1 configured as described above, the adhesive 46 is filled in the pair of adhesive filling portions 33 and 34 of the actuator 12. The pair of adhesive filling portions 33 and 34 are provided on the pair of side surfaces 37 and 38, respectively. That is, the pair of adhesive filling portions 33 and 34 filled with the adhesive 46 are provided at positions close to the outside. The adhesive 46 is filled in a narrow range such as the adhesive filling portions 33 and 34.

  As shown in FIG. 7, in the process of mounting the actuator 12 on the base plate 11, the bubbles B present in the adhesive 46 move outward. That is, the bubble B moves toward the portion P1 where the adhesive 46 is scraped.

  The innermost portion of the adhesive filling portions 33 and 34 is another bonding surface 44. The distance from the other adhesive surface 44 to the portion P1 of the adhesive 46 to be scraped is shorter than the distance from the center of the first surface 35 to the portion P1 to be scraped. For this reason, compared with the case where the adhesive 46 is applied to the first surface 35, it is easier to move to the portion P <b> 1 where the bubbles B are cut.

  As described above, even if the air bubbles B exist in the adhesive 46, the air bubbles B move to the portion P1 where the adhesive 46 is scraped before the adhesive 46 is thermally cured. Therefore, since the bubbles B can be lost from the position where the outer surfaces 48 and 49 of the adhesive 46 are formed, it is possible to suppress the formation of depressions on the outer surfaces 48 and 49 of the adhesive 46 due to the bubbles B. Thereby, it is possible to prevent the wiring 53 from being lost in the middle or the adjacent wirings 53 from being short-circuited due to the depression of the bubbles B.

  The adhesive 46 is filled in the adhesive filling portions 33 and 34 formed by the adhesive surface 43 and the other adhesive surface 44. Accordingly, a large contact area between the adhesive 46 and the actuator 12 can be obtained, and the actuator 12 can be strongly fixed to the mounting surface 21 of the base plate 11.

  The first surface 35 of the main body 31 is in contact with the mounting surface 21 of the base plate 11. Thereby, it can suppress that it becomes difficult to move to the part P1 where the bubble B is scraped by the adhesive agent 46 entering between the first surface 35 and the mounting surface 21.

  Next, a second embodiment will be described with reference to FIGS. 9 and 10. Note that, in a plurality of embodiments disclosed below, the same reference numerals are assigned to components having the same functions as those of the inkjet head 1 of the first embodiment. Further, the description of the components may be partially or entirely omitted.

  FIG. 9 is a cross-sectional view showing the actuator 12 mounted on the base plate 11 of the second embodiment. FIG. 10 is a cross-sectional view showing the actuator 12 </ b> A before processing, which is fixed to the base plate 11.

  As shown in FIG. 9, the pair of adhesive filling portions 33 and 34 is formed by a pair of adhesive surfaces 61. One adhesive surface 61 is a flat surface straddling between one side surface 37 and one end portion in the width direction of the first surface 35. The other adhesive surface 61 straddles between the other side surface 38 and the other end portion in the width direction of the first surface 35.

  The pair of bonding surfaces 61 are inclined such that the angle between the pair of bonding surfaces 61 and the first surface 35 is an obtuse angle. The angle between the bonding surface 61 and the first surface 35 is, for example, 165 °. In other words, the angle between the mounting surface 21 of the base plate 11 and the bonding surface 61 is 15 °.

  In the step of mounting the actuator 12 of the second embodiment on the base plate 11, the first surface 35 of the main body 31 </ b> A is pressed against the mounting surface 21 of the base plate 11 as shown in FIG. 10. As shown by the arrow D in FIG. 10, the adhesive 46 filled in the pair of adhesive filling portions 33 and 34 is pushed outward by the adhesive surface 61.

  According to the inkjet head 1 having the above-described configuration, the pair of adhesive filling portions 33 and 34 is formed by the adhesive surface 61 that is a flat surface extending between the one side surface 37 and the first surface 35. That is, the adhesive filling portions 33 and 34 of the second embodiment are different from the adhesive filling portions 33 and 34 of the first embodiment formed by the adhesive surface 43 and the other adhesive surface 44 that are orthogonal to each other. There is no part to become. For this reason, when the adhesive agent filling portions 33 and 34 are filled with the adhesive 46, it is possible to prevent air from remaining between the adhesive filling portions 33 and 34 and the adhesive agent 46.

  The pair of bonding surfaces 61 are inclined such that the angle between the pair of bonding surfaces 61 and the first surface 35 is an obtuse angle. When the first surface 35 of the main body 31A is pressed against the mounting surface 21, the adhesive 46 is pressed outward. Thereby, the adhesive 46 can be prevented from entering between the first surface 35 and the mounting surface 21.

  Next, a third embodiment will be described with reference to FIG. FIG. 11 is a cross-sectional view showing the actuator 12 mounted on the base plate 11 of the third embodiment.

  As shown in FIG. 11, a part of the adhesive 46 according to the third embodiment is interposed between the first surface 35 of the main body 31 and the mounting surface 21 of the base plate 11. The thickness of a part of the adhesive 46 interposed between the first surface 35 and the mounting surface 21 is smaller than the thickness of a part of the adhesive 46 filled in the adhesive filling portions 33 and 34.

  A part of the adhesive 46 interposed between the first surface 35 and the mounting surface 21 is applied to the first surface 35 before the actuator 12 is mounted on the base plate 11. A part of the adhesive 46 interposed between the first surface 35 and the mounting surface 21 is a part of the adhesive 46 filled in the adhesive filling portions 33, 34. It may be formed by entering between the surfaces 21. The adhesive 46 is not limited to the entire area of the first surface 35, and may be attached to a part of the first surface 35.

  According to the inkjet head 1 configured as described above, a part of the adhesive 46 is interposed between the first surface 35 of the main body 31 and the mounting surface 21 of the base plate 11. Thereby, the actuator 12 can be firmly fixed to the base plate 11.

  In the above-described embodiment, the adhesive filling portions 33 and 34 are provided on the pair of side surfaces 37 and 38, respectively, but the adhesive filling portion is not limited thereto. The adhesive filling part may be provided only on one side surface of the main body of the actuator, or may be provided on the side surface in the longitudinal direction as well as the side surface in the width direction of the main body.

  According to the ink jet head of at least one embodiment described above, the actuator has the adhesive filling portion provided on the side surface of the main body. Furthermore, an adhesive is filled in the adhesive filling portion to fix the main body to the mounting surface of the base material, and has a pair of outer surfaces continuous to the side surfaces of the main body. Thereby, it can suppress that the hollow is formed in the said outer surface of the said adhesive agent by a bubble.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 1 ... Inkjet head, 11 ... Base plate, 12, 12A ... Actuator, 21 ... Mounting surface, 31, 31A ... Main body, 32 ... Groove, 33, 34 ... Adhesive filling part, 35 ... First surface, 36 ... Second , 37, 38, 55, 56 ... side face, 43, 61 ... adhesive face, 44 ... other adhesive face, 46 ... adhesive, 48, 49 ... outer face, 51 ... conductor pattern.

Claims (12)

A substrate having a mounting surface;
The first surface facing the mounting surface of the base material, the second surface located on the opposite side of the first surface, and straddling between the first surface and the second surface, and A main body having a pair of side surfaces that are inclined so that an angle with the second surface is an obtuse angle, and a plurality of openings that are open in the second surface and the pair of side surfaces of the main body and are aligned in the longitudinal direction of the main body An actuator having a groove and an adhesive filling portion provided on a side surface of the main body and having an adhesive surface facing the mounting surface of the base material;
An adhesive filled in the adhesive filling portion and fixing the actuator to the mounting surface of the base material and having an outer surface continuous with the side surface of the main body;
A plurality of conductive patterns continuously provided on the side surface of the main body, the inner surfaces of the plurality of grooves, the outer surface of the adhesive, and the mounting surface of the substrate ;
An inkjet head characterized by comprising: The adhesive surface intersects the side surface of the main body and faces the mounting surface of the base material,
The inkjet head according to claim 1, wherein the adhesive filling portion further includes another adhesive surface straddling between the adhesive surface and the first surface of the main body.   2. The inkjet head according to claim 1, wherein the adhesive surface extends between the side surface of the main body and the first surface and is inclined so that an angle with the first surface becomes an obtuse angle. .   The inkjet head according to any one of claims 1 to 3, wherein the first surface of the main body is in contact with a mounting surface of the base material.   The inkjet according to any one of claims 1 to 3, wherein a part of the adhesive is interposed between the first surface of the main body and the mounting surface of the base material. head.   The inkjet head according to claim 1, wherein the adhesive filling portion is provided on each of a pair of side surfaces of the main body. A substrate having a mounting surface;
A first surface facing the mounting surface of the substrate, a second surface located on the opposite side of the first surface, and a pair of layers straddling between the first surface and the second surface A main body having a side surface, a plurality of grooves opened in the second surface and the pair of side surfaces of the main body and arranged in the longitudinal direction of the main body, and provided on the side surface of the main body and facing the mounting surface of the base material An adhesive filling portion having an adhesive surface; and an actuator having:
An inkjet head manufacturing method comprising:
Filling the adhesive filling portion with an adhesive,
The actuator is fixed to the mounting surface of the base material by the adhesive by pressing the first surface of the main body against the mounting surface of the base material,
Curing the adhesive;
By scraping the main body and the adhesive, the pair of side surfaces of the main body are inclined so that the angle between the second surface and the second surface becomes an obtuse angle, and an outer surface continuous to the side surface is formed in the adhesive And
A method for manufacturing an ink jet head, comprising: forming a plurality of conductive patterns continuous on a side surface of the main body, an inner surface of each of the plurality of grooves, an outer surface of the adhesive, and a mounting surface of the base material . The adhesive surface intersects the side surface of the main body and faces the mounting surface of the base material,
The method for manufacturing an ink jet head according to claim 7, wherein the adhesive filling portion further includes another adhesive surface straddling between the adhesive surface and the first surface of the main body.   The inkjet head according to claim 7, wherein the bonding surface is inclined so as to straddle between a side surface of the main body and the first surface and to form an obtuse angle with the first surface. Manufacturing method.   The method for manufacturing an ink jet head according to claim 7, wherein the first surface of the main body is in contact with a mounting surface of the base material.   The inkjet according to any one of claims 7 to 9, wherein a part of the adhesive is interposed between the first surface of the main body and the mounting surface of the base material. Manufacturing method of the head.   The inkjet head according to any one of claims 7 to 9, wherein the adhesive filling portion is provided on each of a pair of side surfaces of the main body.

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