JP4943357B2 - Inkjet head manufacturing apparatus and inkjet head manufacturing method - Google Patents

Description

  The present invention relates to an inkjet head manufacturing apparatus that records by discharging fine ink droplets, and an inkjet head manufacturing method.

  Conventionally, as an ink jet head, a plurality of grooves serving as ink flow paths are formed on a PZT substrate, an electrode film serving as a drive electrode is formed on the inner surface of each groove, and the surface of the electrode film is covered with an insulating film or the like. An ink jet head that protects a film is known (for example, see Patent Document 1).

  When covering the surface of the electrode film with an insulating film, the assembled head on which the electrode film is formed is immersed in the electrodeposition paint, and similarly between the electrode member of the head and the anode side conductive member immersed in the electrodeposition paint. DC voltage is applied to As a result, the electrodeposition paint is deposited on the electrode film surface to form an insulating film.

  However, since the groove formed with the electrode film has a width of 80 [μm] and a depth of 300 [μm], it is difficult to form a uniform film on the inner surface of such a fine groove. For example, according to the dipping method described above, when the head is lifted from the electrodeposition paint after film formation, there is a high possibility that liquid dripping occurs and the film thickness becomes non-uniform.

Moreover, if the head is simply immersed in the electrodeposition paint, the electrodeposition paint does not sufficiently enter the fine groove, and bubbles tend to remain. If bubbles remain in the groove, a pinhole is formed in the insulating film.
Japanese Patent Laying-Open No. 2004-122684 (paragraphs [0034] and [0045], FIG. 3)

  An object of the present invention is to provide an inkjet head manufacturing apparatus and an inkjet head manufacturing method capable of forming a uniform insulating film on the surface of a drive electrode.

  In order to achieve the above object, an inkjet head manufacturing apparatus according to the present invention has a plurality of flow paths for circulating ink, and has thin-film drive electrodes on the inner surfaces of the flow paths. An apparatus for manufacturing an ink jet head having an ink discharge port corresponding to each path, wherein a circulation device that circulates and circulates an electrodeposition liquid for forming an insulating film in the plurality of flow paths, and the plurality of drives A power supply device that applies a bias voltage to the electrodes and forms an insulating film of the electrodeposition liquid on the surface of each drive electrode.

  In addition, the method for manufacturing an ink jet head of the present invention has a plurality of flow paths for circulating ink, and has a thin film-like drive electrode on the inner surface of each flow path, corresponding to each of the plurality of flow paths. A method of manufacturing an ink jet head having an ink discharge port, wherein a circulation step of circulating an electrodeposition liquid for forming an insulating film in the plurality of flow paths, and applying a bias voltage to the plurality of drive electrodes A film forming step of forming an insulating film by the electrodeposition liquid on the surface of each drive electrode.

  According to the above invention, the electrodeposition liquid is circulated through the plurality of flow paths for circulating the ink, and the bias voltage is applied to the drive electrodes on the inner surface of each flow path, so that the surface of each drive electrode is insulated. Since the film is formed, the electrodeposition liquid can be uniformly distributed to every corner of the flow path even in a fine flow path having a diameter of about several tens [μm]. Air bubbles do not remain, and a uniform insulating film can be formed on the surfaces of the plurality of drive electrodes.

  Since the inkjet head manufacturing apparatus of the present invention has the above-described configuration and operation, a uniform insulating film can be formed on the surface of the drive electrode.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is an external perspective view of an inkjet head 11 manufactured using a manufacturing apparatus according to an embodiment of the present invention. In FIG. 1, in order to explain the internal structure of the inkjet head 11, a part of the head is partially cut away. 2 shows a cross-sectional view of the inkjet head 11 shown in FIG. 1 taken along II-II. FIG. 2 shows a cross-sectional view of the head cut along a pressure chamber 24 described later. Here, before describing the manufacturing apparatus according to the embodiment of the present invention, first, the inkjet head 11 will be described in detail.

  As shown in FIGS. 1 and 2, the inkjet head 11 includes a substantially rectangular plate-like substrate 12, a frame member 13 bonded on the surface of the substrate 12, and an end of the frame member 13 that is spaced from the substrate 12. A substantially rectangular plate-shaped cover member 14 bonded to the portion, a pair of piezoelectric members 15 bonded to the surface of the substrate 12 inside the frame member 13, and a head drive for driving the pair of piezoelectric members 15. And a plurality of ICs 16 for use. The IC 16 is shown only in FIG. The ink jet head 11 is a so-called ink circulation type side shooter type ink jet head.

  The substrate 12 is made of a ceramic material such as alumina or PZT. In the substrate 12, a plurality of supply ports 31 and a plurality of discharge ports 32 are formed through the substrate 12. The plurality of supply ports 31 are formed so as to be arranged substantially at the center along the longitudinal direction of the substrate 12, and the plurality of discharge ports 32 are formed so as to be arranged closer to the edge along the longitudinal direction of the substrate 12.

  The frame member 13 is formed of a ceramic material or a metal material, and the surface is covered with an insulating material. As shown in FIG. 1, the inner peripheral wall of the frame member 13 is curved in a wave shape so as not to block the discharge port 32 formed in the substrate 12.

  The cover member 14 is formed of a rectangular polyimide plate member. A pair of nozzle rows 21 is formed on the cover member 14. In each nozzle row 21, a plurality of nozzles 22 each functioning as an ink droplet ejection hole are formed through the cover member 14 at equal intervals.

  The cover member 14 may be formed of another resin film, and may be any material that can easily form the nozzle 22 using a laser as will be described later. Further, a water repellent film 43 is formed of a fluororesin or the like on the surface of the cover member 14 on the ink droplet discharge side. As shown in FIG. 2, the cover member 14 preferably has a two-layer structure of a resin film layer 42 and a metal foil layer 44 to increase the strength in the surface direction.

  Each of the pair of piezoelectric members 15 is formed by bonding two piezoelectric plates 23 made of, for example, PZT (lead zirconate titanate) so that their polarization directions are opposed to each other. Each piezoelectric member 15 has a trapezoidal cross section and is formed in a rod shape extending in the main scanning direction. The plurality of supply ports 31 described above are provided side by side in the main scanning direction between the two piezoelectric members 15, and the plurality of discharge ports 32 are mainly positioned at positions where each piezoelectric member 15 is sandwiched between the supply ports 31. They are formed side by side along the scanning direction.

  Each piezoelectric member 15 is cut and formed with a plurality of fine grooves extending in a direction (sub-scanning direction) intersecting the longitudinal direction (main scanning direction) from the side away from the substrate 12. A plurality of elongated pressure chambers 24 arranged at equal intervals in the direction are formed. In this way, by forming a plurality of pressure chambers 24 arranged in the main scanning direction, each piezoelectric member 15 has both side portions of each pressure chamber 24 so as to partition the pressure chambers 24 adjacent to each other in the main scanning direction. A plurality of walls 25 which are drive elements provided in the are formed.

  In addition, a drive electrode 26 is formed continuously from the side surface where two adjacent walls 25 face the pressure chamber 24 and the bottom of the pressure chamber 24 therebetween (that is, on the inner surface of each pressure chamber 24). The drive electrode 26 is provided for each pressure chamber 24.

  Each piezoelectric member 15 is positioned so as to correspond to the nozzle row 21 formed on the cover member 14, and is adhered to the surface of the substrate 12. At this time, the cover member 14 is positioned with respect to the piezoelectric member 15 so that the plurality of nozzles 22 of each nozzle row 21 and the plurality of pressure chambers 24 of each piezoelectric member 15 face each other. That is, the pressure chambers 24 and the walls 25 are formed at the same pitch as the nozzles 22.

  At this time, the peripheral edge portion of the cover member 14 is bonded to the end portion of the frame member 13 that is separated from the substrate 12, thereby forming the ink chamber 40 surrounded by the substrate 12, the frame member 13, and the cover member 14. At this time, the cover member 14 is bonded to the ends of the plurality of walls of the piezoelectric member 15 that are separated from the substrate 12.

  In addition, a plurality of electrical wirings 27 are provided on the substrate 12. Each electrical wiring 27 is connected to the driving electrode 26 described above at one end and to the head driving IC 16 at the other end. That is, the electric wiring 27 is also formed at the same pitch as the nozzle 22, the pressure chamber 24, and the wall 25 described above.

  When a printing process is executed by a printer (not shown) equipped with the inkjet head 11 having the above structure, first, ink is supplied to the inkjet head 11 from an ink tank (not shown) of the printer. At this time, the ink is supplied to the inkjet head 11 through a plurality of supply ports 31 formed in the substrate 12.

  The ink supplied to the head 11 through the plurality of supply ports 31 flows into a chamber 40 that is generally sealed by the substrate 12, the frame member 13, and the cover member 14. At this time, the ink that has flowed in through the supply port 31 flows toward the outside of the substrate 12 through the plurality of pressure chambers 24 formed in the two piezoelectric members 15, and near the edge of the substrate 12. It is discharged from the head 11 through a plurality of discharge ports 32 formed in.

  At this time, the supply pressure and the discharge amount of the ink supplied to the inkjet head 11 can push the bubbles adhering to the inner wall of the chamber 40 and the ink is not pushed out from the plurality of nozzles 22 of the cover member 14. Set to an appropriate value. That is, the ink supplied to the head 11 is circulated so as to substantially fill the chamber 40 and not stay. Ink that has not been used in the head 11 is discharged through the discharge port 32 and collected in an ink tank (not shown).

  In this state, when the user instructs printing to the printer, a control unit (not shown) of the printer outputs a print signal to the head driving IC 16 of the inkjet head 11. Upon receiving the print signal, the head driving IC 16 applies a driving pulse voltage to the driving electrode 26 via the electric wiring 27. Accordingly, the pair of left and right walls 25 on both sides of the pressure chamber 24 selected to eject ink droplets are separated so as to be curved by performing shear mode deformation. Then, by returning these to the initial position and increasing the pressure in the pressure chamber 24, ink droplets are ejected vigorously from the opposed nozzles 22.

Next, a method for manufacturing the above-described inkjet head 11 will be described with reference to FIGS. 4 to 8 together with the flowchart shown in FIG.
First, the plurality of supply ports 31 and discharge ports 32 described above are formed by press molding on the substrate 12 made of a ceramic sheet before firing (FIG. 3, step 1). Alternatively, the rectangular plate-like substrate 12 is prepared, and the supply port 31 and the discharge port 32 are formed by machining. The positional accuracy of the supply port 31 and the discharge port 32 may be low. The substrate 12 is fired.

  Subsequently, a pair of piezoelectric members 15 are bonded to the surface of the substrate 12 (step 2). Each piezoelectric member 15 is bonded to the discharge port 32 on both sides of the supply port 31 described above. At this time, the pair of piezoelectric members 15 is held by a jig (not shown) and positioned with high accuracy. A state in which the pair of piezoelectric members 15 is bonded to the substrate 12 is shown in FIG.

  As shown in FIG. 4, the piezoelectric member 15 is formed by bonding two piezoelectric plates 23 with an adhesive 51 interposed therebetween so that the polarization directions are opposite to each other. The adhesive 51 for bonding the two piezoelectric plates 23 and the adhesive 51 for bonding the piezoelectric member 15 to the substrate 12 are epoxy adhesives that are cured by heating, and in this embodiment, 120 [° C.]. And 2 [h] to cure by heating. In addition, it is desirable that the adhesive 51 does not leave bubbles between the members to be bonded.

  After the piezoelectric member 15 is bonded to the substrate 12, both side surfaces 15a along the longitudinal direction of each piezoelectric member 15 are cut obliquely as shown in FIG. At this time, the surface of the substrate 12 is also slightly scraped off so as to be continuous with the side surfaces 15a. Thereby, the excess part of the adhesive agent 51 which adhere | attached the board | substrate 12 and the piezoelectric member 15 can be scraped off. Alternatively, when the adhesive 51 is insufficient between the substrate 12 and the piezoelectric member 15, the insufficient cavity portion can be scraped off.

  Thereafter, as shown in FIG. 5, a plurality of grooves 24 (pressure chambers 24) are formed from above in the figure separated from the substrate 12 of the piezoelectric member 15 having a trapezoidal cross section (step 3). This groove processing uses, for example, a diamond wheel of a dicing saw used for cutting an IC wafer or the like. As shown in FIG. 1, the plurality of pressure chambers 24 are formed at equal intervals along the longitudinal direction of the piezoelectric member 15. As a result, walls 25 are formed between the adjacent pressure chambers 24, respectively.

  Then, as shown in FIG. 6, the drive electrodes 26 are formed on the inner surfaces of the plurality of pressure chambers 24, and the electrical wiring 27 is formed on the substrate 12 (step 4). The drive electrode 26 and the electrical wiring 27 are made of, for example, a nickel thin film formed by electroless plating. When forming the drive electrode 26 and the electrical wiring 27, first, a nickel thin film is plated on the entire surface of the substrate 12 and the piezoelectric member 15, and patterned with a laser to form a nickel thin film at a portion other than the drive electrode 26 and the electrical wiring 27. Remove. An insulating film is coated on the surfaces of the drive electrode 26 and the electric wiring 27.

  Thereafter, as shown in FIG. 6, the frame member 13 is bonded to the surface of the substrate 12 so as to surround the pair of piezoelectric members 15 (step 5), and as shown in FIG. 7, the frame member 13 and the piezoelectric member 15. The cover member 14 is bonded so as to cover (step 6). As described above, the cover member 14 is bonded to the end portion 13 a of the frame member 13 and the end portions 25 a of the plurality of walls 25 of the piezoelectric member 15.

  Thereafter, the cover member 14 is irradiated with laser to form a plurality of nozzles 22 (step 7). Each nozzle 22 is formed so as to form a circular discharge port on the surface of the cover member 14 and communicate with a plurality of pressure chambers 24.

  At this time, the insulating layer coated on the surface of the drive electrode 26 by laser irradiation may be partially broken. For this reason, it is necessary to repair the insulating layer before attaching the IC 16 to the wiring 27 of the substrate 12.

  That is, after the nozzle 22 is formed in step 7, the inkjet head 11 in the state shown in FIG. 1 in which the IC 16 is not mounted is set in the electrodeposition apparatus 50 (manufacturing apparatus) shown in FIG. Then, an electrodeposition paint (electrodeposition liquid) is poured into the chamber 40 through the supply port 31 of the inkjet head 11, the electrodeposition paint is discharged through the discharge port 32, and the electrodeposition paint is circulated in the head 11. . In this state, a bias voltage is applied to the plurality of drive electrodes 26 via the electric wiring 27, and an electrodeposition paint is attached to the surface of the drive electrodes 26, thereby repairing the portion of the insulating layer destroyed by the laser irradiation (step). 8).

  Then, the inkjet head 11 that has been repaired is taken out from the electrodeposition apparatus 50, and a drive circuit (head drive IC 16) is attached so as to be connected to the electrical wiring 27 on the substrate 12 (step 9). Further, an ink case (not shown) is bonded to the substrate 12 (step 10), and the manufacturing process of the inkjet head 11 is completed.

  Hereinafter, the repair process in Step 8 described above will be described in more detail with reference to FIGS. 8 to 10 together with the structure of the electrodeposition apparatus 50. FIG. 8 shows an external perspective view of the electrodeposition apparatus 50, and FIG. 9 shows an exploded perspective view for explaining a jig for setting the inkjet head 11 in the electrodeposition apparatus 50. In FIG. 10, the schematic diagram for demonstrating the function of the electrodeposition apparatus 50 is shown. In FIG. 10, only one of the pair of piezoelectric members 15 is shown for easy understanding.

  As shown in FIGS. 8 and 9, the electrodeposition apparatus 50 has a base member 52 provided with a plurality of pins 51 for positioning (shown only in FIG. 8) and a position sandwiching the inkjet head 11 from both upper and lower surfaces. Position where the lower elastic member 53 and the upper elastic member 54, the lower elastic member 53, the ink jet head 11, and the upper elastic member 54 set on the base member 52 are sandwiched between the base member 52 And a toggle mechanism 56 for pressing the pressing block 55 from above to press the jigs 52, 53, 54, 55 together with the inkjet head 11.

  Note that a plurality of holes 52a for press-fitting a plurality of (six in this embodiment) pins 51 are formed on the upper surface of the base member 52 as shown in FIG. The lower elastic member 53 and the upper elastic member 54 are made of a rubber material.

  Further, as shown in FIG. 10, the electrodeposition apparatus 50 includes a pump 62 for distributing the electrodeposition paint to the inkjet head 11 set in the electrodeposition apparatus 50, and operates the pump 62 to distribute it through the distribution pipe 61. Through a valve 64 for discharging the electrodeposition paint, a deaeration device 66 for removing bubbles contained in the electrodeposition paint flowing through the flow pipe 61, and an electric wiring 27 led out to the surface of the substrate 12 of the inkjet head 11. A power supply device 68 for applying a bias voltage to the plurality of drive electrodes 26 is provided.

  The flow pipe 61 is made of a conductive material and is grounded. Then, the power supply device 68 biases a bias voltage with a clip (not shown) for energization sandwiched between portions of the substrate 12 of the inkjet head 11 exposed at the two cutout portions formed in the jigs 52, 53, 54, and 55, respectively. Apply.

  When the inkjet head 11 is set in the electrodeposition apparatus 50 having the above structure, first, as shown in FIG. 8, the lower elastic member 53 is set between a plurality of pins 51 erected on the base member 52. . Then, the inkjet head 11, the upper elastic member 54, and the holding block 55 are stacked in this order on the lower elastic member 53 and set between the pins 51. Further, all the members 52, 53, 11, 54, 55 are provided by the toggle mechanism 56 so that the lower elastic member 53, the inkjet head 11, and the upper elastic member 54 are sandwiched between the base member 52 and the pressing block 55. Adhere. At this time, the jigs 52, 53, 54, 55 and the inkjet head 11 may be appropriately positioned in the surface direction, and may be simply overlapped by guiding the six pins 51.

  As shown in FIG. 9, the lower elastic member 53 communicates with the elongated slits 53 a extending in the longitudinal direction so as to communicate with the plurality of supply ports 31 of the inkjet head 11 and the plurality of discharge ports 32 of the inkjet head 11. The lower elastic member 53 has two slits 53b extending in the longitudinal direction and arranged on both sides of the slit 53a.

  On the other hand, on the upper surface on which the lower elastic member 53 of the base member 52 is placed, as shown in FIG. 9, an elongated groove 52b having a shape substantially matching the central slit 53a of the lower elastic member 53, and the lower Two elongated grooves 52c having a shape substantially coinciding with the two slits 53b for discharging the side elastic member 53 are formed. That is, when the lower elastic member 53 is guided by the plurality of pins 51 and placed on the upper surface of the base member 52, the central slit 53a of the lower elastic member 53 and the central groove 52b of the base member 52 face each other. In addition, the slits 53b on both sides of the lower elastic member 53 and the grooves 52c on both sides of the base member 52 are opposed to each other.

  As shown in FIG. 9, a supply-side hole 71 for connecting a flow pipe 61 for flowing the electrodeposition paint is formed on the front surface of the base member 52 in the drawing. A discharge-side hole 72 for connecting the flow pipe 61 is formed on the right side surface of the base member 52 in the drawing. The supply-side hole 71 passes through the base member 52 and communicates with the above-described central groove 52b, and the discharge-side hole 72 passes through the base member 52 and includes the two grooves 52c described above. Communicate.

  In other words, the electrodeposition paint that has flowed into the base member 52 from the hole 71 through the flow pipe 61 sequentially fills the central groove 52b on the upper surface of the base member 52 and the central slit 53a of the lower elastic member 53, and thereby the inkjet head. 11 into the chamber 40 through a plurality of supply ports 31. The electrodeposition paint discharged from the chamber 40 through the plurality of discharge ports 32 of the inkjet head 11 sequentially fills the two slits 53 of the lower elastic member 53 and the two grooves 52c of the base member 52, thereby It flows out to the flow pipe 61 connected to the hole 72 of the member 52. Thus, the electrodeposition paint is circulated in the inkjet head 11.

  At this time, it is conceivable that the electrodeposition paint circulated in the chamber 40 slightly flows out through the plurality of nozzles 22 formed corresponding to the plurality of pressure chambers 24. However, the electrodeposition paint that has flowed out of the inkjet head 11 from the nozzles 22 accumulates in a space defined between the relatively large opening 54a of the upper elastic member 54, the pressing block 55, and the cover member 14, and then goes to the outside. There is no worry of leaking. Further, it is conceivable that the electrodeposition paint accumulated in this space returns to the chamber 40 again in the course of the distribution of the electrodeposition paint. That is, by providing this space, the electrodeposition paint can be circulated through the nozzle 22.

  As described above, when a bias voltage is applied to the plurality of drive electrodes 26 via the power supply device 68 in a state where the ink-jet head 11 is set in the electrodeposition apparatus 50 and the electrodeposition paint is distributed, the electrodeposition paint is driven. The portion of the insulating layer deposited on the electrode 26 and destroyed by the laser irradiation is repaired.

  As described above, according to the present embodiment, the bias voltage is applied to the plurality of drive electrodes 26 while the electrodeposition coating material is circulated through the plurality of pressure chambers 24 (flow paths) of the inkjet head 11. The electrodeposition paint can be spread to every corner of the pressure chamber 24 as fine as [μm], and an insulating layer having a uniform and stable film thickness can be coated on the surface of the drive electrode 26. In particular, according to the present embodiment, since the electrodeposition paint is electrodeposited while flowing, the bubbles contained in the electrodeposition paint do not stay in the pressure chamber 24, and the presence of the bubbles at the site of the drive electrode 26 No pinhole is formed in the insulating layer. Since a part of the electrodeposition paint flowing in the pressure chamber 24 flows out through the nozzle 22, the bubbles in the pressure chamber 24 can be discharged through the nozzle 22.

  Moreover, since the electrodeposition apparatus 50 of this Embodiment has the deaeration apparatus 66 in the middle of the distribution | circulation pipe | tube 61 which distribute | circulates an electrodeposition paint, the electrodeposition paint which removed the bubble with the deaeration apparatus 66 is used for the distribution pipe 61. Therefore, the bubbles contained in the electrodeposition paint can be more effectively removed. Furthermore, the electrodeposition apparatus 50 of this Embodiment has the valve | bulb 64 in the middle of the distribution pipe 61, and can also discharge the electrodeposition paint containing a bubble.

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above-described embodiments. For example, you may delete some components from all the components shown by embodiment mentioned above.

  For example, in the above-described embodiment, the case where a certain amount of electrodeposition paint is supplied to the inkjet head 11 and distributed in one direction has been described. However, the present invention is not limited to this, and the distribution direction of the electrodeposition paint is changed every certain time. You may make it reverse. In this case, the electrodeposition paint may be vibrated by alternately switching the flow direction of the electrodeposition paint by the pump 62 disposed in the middle of the flow pipe 61.

  Thereby, the bubble which cannot be removed only by distribute | circulating an electrodeposition coating material like embodiment mentioned above can also be removed. In other words, even when air bubbles adhere to the inner wall of the path through which the electrodeposition paint circulates, the air bubbles can be surely removed from the flow path, and the pinhole is formed more in the insulating layer. It can be surely prevented.

  In this case, if the electrodeposition paint is simply vibrated, the electrodeposition paint containing bubbles stays in the ink-jet head 11. Therefore, the valve 64 is opened after the pump 62 is operated for a certain period of time. It is desirable that all the electrodeposition paints in the distribution path are washed away and new electrodeposition paints free of bubbles are supplied to the distribution pipe 61.

  Further, instead of vibrating the electrodeposition paint in this way, the electrodeposition paint may be pulsated and circulated in one direction, or the flow direction may be switched alternately while pulsating the electrodeposition paint. . In this case, as in the case where the electrodeposition paint is vibrated as described above, bubbles attached to the inner wall of the flow path of the electrodeposition paint can be effectively removed, and pinholes in the insulating layer can be eliminated.

  In the above-described embodiment, the case where the electrodeposition paint is circulated in the inkjet head 11 and a constant bias voltage is applied to the plurality of drive electrodes 26 has been described. However, the present invention is not limited to this. You may make it apply the bias voltage which has. In this case, a bias voltage having an oscillating waveform may be applied to the plurality of drive electrodes 26 by the power supply device 68, but the drive voltage for printing an actual pattern via the inkjet head 11 is set to the plurality of drive electrodes 26. You may make it apply to.

  Thereby, the walls 25 of the plurality of pressure chambers 24 are deformed, and in particular, bubbles attached to the inner walls of the pressure chambers 24 can be effectively removed. In other words, by applying a bias voltage of the vibration waveform to the drive electrode while circulating the electrodeposition paint, it is possible to remove bubbles that cannot be removed only by applying a certain bias voltage, and pinholes in the insulating layer can be removed. It can be eliminated more reliably.

  Further, in the above-described embodiment, the case where the electrodeposition apparatus 50 is used to repair the portion where the insulating layer covering the drive electrode 26 is destroyed by laser irradiation has been described. The electrodeposition apparatus 50 according to the present embodiment may be used in another process for manufacturing 11.

  For example, a plurality of grooves (pressure chambers) 24 are formed in the piezoelectric member 15 in Step 3 of FIG. 3, a plurality of drive electrodes 26 are formed in Step 4, and then the substrate 12 in a state where the piezoelectric member 15 is bonded is electrically connected. It may be set in the deposition apparatus 50 so that the surface of the drive electrode 26 is covered with an insulating layer. In addition, after the insulating layer is coated in this way, a cleaning process for cleaning the chamber 40 and the pressure chamber 24 by flowing pure water through the flow pipe 61 while the substrate is set in the electrodeposition apparatus 50 may be performed. good. Furthermore, this cleaning process may be performed after the repair process in Step 8 described above.

1 is an external perspective view showing an inkjet head according to an embodiment of the present invention. Sectional drawing which cut | disconnected the inkjet head of FIG. 1 by II-II. 2 is a flowchart for explaining a method of manufacturing the ink jet head of FIG. 1. Sectional drawing which shows the state which adhered the piezoelectric member to the board | substrate. Sectional drawing which shows the state which cut the side surface of the piezoelectric member. Sectional drawing which shows the state which formed the electrode and wiring and adhere | attached the frame member. Sectional drawing which shows the state which adhere | attached the cover member on the edge part of a frame member, and the edge part of a wall. FIG. 8 is an external perspective view showing a schematic structure of an electrodeposition apparatus for setting the ink jet head in the state of FIG. 7 and repairing the insulating layer on the surface of the drive electrode. The disassembled perspective view which shows the jig | tool of the electrodeposition apparatus of FIG. The schematic diagram for demonstrating the function of the electrodeposition apparatus of FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 11 ... Inkjet head, 12 ... Board | substrate, 13 ... Frame member, 14 ... Cover member, 15 ... Piezoelectric member, 16 ... IC, 21 ... Nozzle row, 22 ... Nozzle, 24 ... Pressure chamber, 25 ... Wall, 26 ... Drive electrode 27 ... Electric wiring, 31 ... Supply port, 32 ... Discharge port, 40 ... Ink chamber, 50 ... Electrodeposition device, 51 ... Pin, 52 ... Base member, 52b, 52c ... Groove, 53 ... Lower elastic member, 53a 53b ... slit, 54 ... upper elastic member, 54a ... opening, 55 ... pressing block, 61 ... flow pipe, 62 ... pump, 64 ... valve, 66 ... deaeration device, 68 ... power supply device.

Claims (11)

An inkjet head manufacturing apparatus having a plurality of flow paths for circulating ink, thin film drive electrodes on the inner surfaces of the flow paths, and ink discharge ports corresponding to the plurality of flow paths. And
A circulation device for circulating and circulating an electrodeposition liquid for forming an insulating film in the plurality of flow paths;
A power supply device that applies a bias voltage to the plurality of drive electrodes to form an insulating film of the electrodeposition liquid on the surface of each drive electrode;
An ink jet head manufacturing apparatus comprising:   The inkjet head manufacturing apparatus according to claim 1, wherein the circulation device includes a pump that alternately switches a flow direction of the electrodeposition liquid.   The inkjet head manufacturing apparatus according to claim 1, wherein the circulation device includes a pump that circulates the plurality of flow paths while pulsating the electrodeposition liquid.   The said circulation apparatus has a deaeration apparatus for removing the bubble contained in the electrodeposition liquid which distribute | circulates these several flow paths, The any one of Claim 1 thru | or 3 characterized by the above-mentioned. Inkjet head manufacturing equipment.   5. The inkjet head manufacturing apparatus according to claim 1, wherein the power supply device applies a bias voltage having a vibration waveform to the plurality of drive electrodes. 6. A method of manufacturing an inkjet head having a plurality of flow paths for circulating ink, each having a thin film-like drive electrode on the inner surface of each flow path, and having ink discharge ports corresponding to the plurality of flow paths. And
A distribution step for distributing an electrodeposition liquid for forming an insulating film in the plurality of flow paths;
A film forming step of applying a bias voltage to the plurality of drive electrodes to form an insulating film with the electrodeposition liquid on the surface of each drive electrode;
A method of manufacturing an ink jet head, comprising:   7. The method of manufacturing an ink jet head according to claim 6, wherein in the flow step, the flow direction of the electrodeposition liquid is alternately switched and vibrated.   10. The method of manufacturing an ink jet head according to claim 9, wherein, in the distribution step, after the electrodeposition liquid is vibrated, the vibrated electrodeposition liquid is swept away by a new electrodeposition liquid that does not contain bubbles. .   The method of manufacturing an ink jet head according to claim 6, wherein in the distribution step, the electrodeposition liquid is circulated through the plurality of flow paths while being pulsated.   10. The method of manufacturing an ink jet head according to claim 6, wherein in the distribution step, bubbles contained in the electrodeposition liquid flowing through the plurality of flow paths are removed.   11. The method of manufacturing an ink jet head according to claim 6, wherein in the film forming step, a bias voltage having a vibration waveform is applied to the plurality of drive electrodes.

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