JP2014107143A5 - - Google Patents

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Publication number
JP2014107143A5
JP2014107143A5 JP2012259638A JP2012259638A JP2014107143A5 JP 2014107143 A5 JP2014107143 A5 JP 2014107143A5 JP 2012259638 A JP2012259638 A JP 2012259638A JP 2012259638 A JP2012259638 A JP 2012259638A JP 2014107143 A5 JP2014107143 A5 JP 2014107143A5
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JP
Japan
Prior art keywords
magnetic pole
charged particle
particle beam
beam apparatus
radial direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2012259638A
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English (en)
Japanese (ja)
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JP2014107143A (ja
JP6095338B2 (ja
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Publication date
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Priority to JP2012259638A priority Critical patent/JP6095338B2/ja
Priority claimed from JP2012259638A external-priority patent/JP6095338B2/ja
Publication of JP2014107143A publication Critical patent/JP2014107143A/ja
Publication of JP2014107143A5 publication Critical patent/JP2014107143A5/ja
Application granted granted Critical
Publication of JP6095338B2 publication Critical patent/JP6095338B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012259638A 2012-11-28 2012-11-28 電子銃および荷電粒子線装置 Active JP6095338B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012259638A JP6095338B2 (ja) 2012-11-28 2012-11-28 電子銃および荷電粒子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012259638A JP6095338B2 (ja) 2012-11-28 2012-11-28 電子銃および荷電粒子線装置

Publications (3)

Publication Number Publication Date
JP2014107143A JP2014107143A (ja) 2014-06-09
JP2014107143A5 true JP2014107143A5 (enExample) 2015-11-05
JP6095338B2 JP6095338B2 (ja) 2017-03-15

Family

ID=51028456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012259638A Active JP6095338B2 (ja) 2012-11-28 2012-11-28 電子銃および荷電粒子線装置

Country Status (1)

Country Link
JP (1) JP6095338B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7068117B2 (ja) * 2018-09-18 2022-05-16 株式会社日立ハイテク 荷電粒子線装置
CN112673449B (zh) * 2018-09-25 2024-08-23 株式会社日立高新技术 热场发射电子源以及电子束应用装置
US11894208B2 (en) 2020-11-15 2024-02-06 Elve Inc. Multi-layer vacuum electron device and method of manufacture
JP2024090094A (ja) 2022-12-22 2024-07-04 株式会社日立ハイテク 荷電粒子銃、及び荷電粒子ビーム装置
CN116230472A (zh) * 2023-02-06 2023-06-06 中国科学院上海硅酸盐研究所 一种小型可切换式电子-离子枪
JP7751929B1 (ja) * 2025-06-12 2025-10-09 中和科学株式会社 荷電粒子銃

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3900792B2 (ja) * 2000-04-26 2007-04-04 株式会社日立製作所 電子銃
JP2006324119A (ja) * 2005-05-19 2006-11-30 Hitachi Ltd 電子銃
JP5386229B2 (ja) * 2009-05-22 2014-01-15 株式会社日立ハイテクノロジーズ 電子銃

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