JP2014092363A - Position determination device for processing hole - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a position determination device for a processing hole that has high profiling properties for a surface of a workpiece and can improve measurement precision of the position of the processing hole.SOLUTION: In a position determination device for a processing hole including a probe 20, a profiling mechanism 30, a scanning mechanism, and measurement control means, the profiling mechanism 30 includes at least two rotary shafts which are a first rotary shaft 32 for rotating the probe 20 in a vane length direction L and a second rotary shaft 34 for rotating the probe 20 in a vane width direction W orthogonal to the vane length direction L, a roller 36 which comes into contact with a surface of a workpiece together with a contact surface of the probe 20, and a second rotary support member 35 and a third rotary support member 38 which are provided at a center part between the contact surface of the probe 20 and the roller 36 and held by the scanning mechanism.

Description

  The present invention relates to an apparatus for measuring a position of a processed hole for measuring the position of a processed hole processed in a workpiece.

  Turbine blade surfaces of gas turbines and steam turbines are formed in a complicated three-dimensional shape, and a plurality of cooling holes for circulating a coolant for cooling the turbine blades are formed in the inside thereof. . In order to measure the position of the formed cooling hole, a flaw detection method using a UT (Ultrasonic Transducer) probe is used.

Japanese Patent Laid-Open No. 10-282069 JP 2006-308566 A

  In the flaw detection method using the UT probe, it is necessary to make the UT probe follow the turbine blade surface. However, since the turbine blade surface has a complicated three-dimensional shape, the UT probe is automatically scanned. It was difficult and was done manually. For this reason, the position of the cooling hole could not be measured in real time when the cooling hole of the turbine blade was processed.

  In addition, when detecting the position of the cooling hole close to the surface of the blade surface, the dead zone is wide in a UT probe using a single transducer. Therefore, if the dead zone and the detection signal of the cooling hole overlap, detection is difficult. Even if it is detected or detected, the measurement accuracy of the position of the cooling hole may be deteriorated.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a machining hole position measuring device that has high copyability to the surface of a workpiece and can improve the measurement accuracy of the machining hole position. And

A machined hole position measuring apparatus according to a first invention for solving the above-mentioned problems is as follows.
In a machined hole position measuring device that measures the position of a machined hole machined inside a workpiece or a machined hole being machined inside a workpiece,
A probe having a transducer for transmitting ultrasonic waves and another transducer for receiving the ultrasonic waves, and a probe for bringing a contact surface into contact with the surface of the workpiece;
A scanning mechanism that holds the probe and changes the angle of the probe to follow the surface of the workpiece to contact the contact surface of the probe;
A scanning mechanism for holding the copying mechanism and moving the probe along the surface of the workpiece;
A measurement control unit that acquires the position of the probe from the scanning mechanism and the scanning mechanism, acquires the reflected signal of the ultrasonic wave from the probe, and detects the position of the processing hole;
The copying mechanism includes at least two rotation axes of a first rotation axis that rotates the probe in a predetermined direction and a second rotation axis that rotates the probe in a direction orthogonal to the predetermined direction; A roller that contacts the surface of the workpiece together with the contact surface of the probe; and a support member that is provided on the contact surface of the probe and a central portion of the roller and is held by the scanning mechanism. It is characterized by that.

A machined hole position measuring apparatus according to a second invention for solving the above-mentioned problems is as follows.
In the machined hole position measuring apparatus according to the first invention,
The probe, the scanning mechanism, and the scanning mechanism are arranged on a predetermined surface side with respect to the workpiece, and the other probe on the surface side opposite to the predetermined surface side, A copying mechanism and the other scanning mechanism are arranged.

A machined hole position measuring apparatus according to a third invention for solving the above-described problems is
In the machined hole position measuring apparatus according to the first and second inventions,
The size of the contact surface of the probe is set so as not to be affected by the curvature of the surface of the workpiece.

A machined hole position measuring apparatus according to a fourth invention for solving the above-mentioned problems is as follows.
In the machined hole position measuring apparatus according to any one of the first to third inventions,
The measurement control means uses the scanning mechanism to scan the probe within the design path range of the specific processing hole, and when the ultrasonic reflected signal cannot be obtained from the design path range. Is characterized in that it is determined that the position of the processing hole is shifted.

A machined hole position measuring apparatus according to a fifth invention for solving the above-mentioned problems is as follows.
In a machined hole position measuring device that measures the position of a machined hole machined inside a workpiece or a machined hole being machined inside a workpiece,
A plurality of transducers that transmit ultrasonic waves and other transducers that receive the ultrasonic waves, and a large number of the transducers and the other transducers are arranged in a longitudinal direction of a substrate that can be elastically deformed; A flexible array probe for bringing the contact surface into contact with the surface;
A deformable member that holds the flexible array probe on the surface and deforms together with the flexible array probe following the surface of the workpiece.
A pressing mechanism that holds the deformable member and presses the flexible array probe together with the deformable member against the surface of the workpiece;
A scanning mechanism that holds the pressing mechanism and moves the flexible array probe along the surface of the workpiece;
Obtaining the position of the flexible array probe from the scanning mechanism, obtaining the position of the transducer from which the reflected signal of the ultrasonic wave is detected from the flexible array probe, and reflecting the ultrasonic wave from the transducer And a measurement control means for acquiring a signal and detecting the position of the processing hole.

A machined hole position measuring apparatus according to a sixth invention for solving the above-described problems is
In the machined hole position measuring apparatus according to the fifth invention,
The flexible array probe, the deformable member, the pressing mechanism, and the scanning mechanism are disposed on a predetermined surface side of the workpiece, and another flexible surface is disposed on the surface side opposite to the predetermined surface side. An array probe, the other deformation member, the other pressing mechanism, and the other scanning mechanism are arranged.

A machined hole position measuring apparatus according to a seventh invention for solving the above-mentioned problems is as follows.
In a machined hole position measuring device that measures the position of a machined hole machined inside a workpiece or a machined hole being machined inside a workpiece,
A plurality of transducers that transmit ultrasonic waves and other transducers that receive the ultrasonic waves, and a plurality of the transducers and the other transducers are arranged in a lattice on an elastically deformable substrate; A flexible matrix array probe for bringing the contact surface into contact with the surface;
A deformable member that holds the flexible matrix array probe on the surface and deforms with the flexible matrix array probe following the surface of the workpiece.
A pressing mechanism for holding the deformable member and pressing the flexible matrix array probe together with the deformable member against the surface of the workpiece;
A scanning mechanism that holds the pressing mechanism and moves the flexible matrix array probe along the surface of the workpiece;
The position of the flexible matrix array probe is acquired from the scanning mechanism, the position of the transducer from which the reflected signal of the ultrasonic wave is detected is acquired from the flexible matrix array probe, and the ultrasonic wave is acquired from the transducer. And a measurement control means for detecting the position of the processed hole.

An apparatus for measuring a position of a machined hole according to an eighth invention for solving the above-described problems is as follows.
In the machined hole position measuring apparatus according to the seventh invention,
The flexible matrix array probe, the deformable member, the pressing mechanism, and the scanning mechanism are disposed on a predetermined surface side of the workpiece, and the other surface side is opposite to the predetermined surface side. A flexible matrix array probe, the other deformation member, the other pressing mechanism, and the other scanning mechanism are arranged.

  According to the present invention, the scanning mechanism that holds the probe, or the elastically deformable probe and the deformable member are used, so that the surface has a high level of copying and the measurement accuracy of the position of the processing hole. Can be improved. As a result, automatic scanning on the surface of the workpiece becomes possible, and the position of the machining hole can be measured in real time even during machining.

  In addition, since a probe having a transducer that transmits ultrasonic waves and another transducer that receives reflected ultrasonic waves is used, the dead zone can be reduced and a machining hole close to the surface of the workpiece can be detected. it can.

  In addition, when the probe is disposed not only on the predetermined surface side but also on the surface side opposite to the predetermined surface side with respect to the work piece, with respect to the processing hole inside the work piece, Since the position is detected not only from the predetermined surface side but also from the opposite surface side, it is possible to further improve the detectability of the machining hole close to the surface of the workpiece.

It is a schematic block diagram which shows an example (Example 1) of embodiment of the position measuring apparatus of the processing hole which concerns on this invention. It is a schematic block diagram explaining the UT probe used with the position measuring apparatus of the processing hole shown in FIG. FIG. 3 is a perspective view for explaining a copying mechanism that holds the UT probe shown in FIG. 2 and causes the contact surface of the UT probe to follow the turbine blade surface. FIG. 4 is a schematic configuration diagram illustrating a scanning mechanism that holds the copying mechanism illustrated in FIG. 3 and moves a UT probe in a scanning direction. It is a figure explaining the scanning of the UT probe in the position measuring apparatus of the processing hole shown in FIG. FIG. 6 is an enlarged view for explaining scanning of the UT probe shown in FIG. 5. It is a figure explaining the measurement in the structure which has arrange | positioned the UT probe on both surfaces of the turbine blade surface as another example (Example 2) of embodiment of the position measuring apparatus of the processing hole which concerns on this invention. It is a figure explaining the scanning of the UT probe in a turbine blade surface as another example (Example 3) of embodiment of the position measuring apparatus of the processing hole which concerns on this invention. It is a schematic block diagram which shows another example (Example 4) of embodiment of the position measuring apparatus of the processing hole which concerns on this invention. It is a figure explaining the scanning of the flexible array probe in the position measuring apparatus of the processing hole shown in FIG. It is a figure explaining the structure which has arrange | positioned the flexible array probe in the position measuring apparatus of the processing hole shown in FIG. 9 on both surfaces of the turbine blade surface. It is a figure explaining other examples (Example 5) of embodiment of the position measuring apparatus of the processing hole which concerns on this invention.

  Hereinafter, with reference to FIGS. 1-12, embodiment of the position measuring apparatus of the processing hole which concerns on this invention is described. In the following description, a turbine blade is exemplified as the workpiece, but other workpieces may be used as long as the machining holes are drilled inside. In addition, a processed hole may be set as a measurement target, or a processed hole being processed may be set as a measurement target.

Example 1
FIG. 1 is a schematic configuration diagram illustrating a processing hole position measuring apparatus according to the present embodiment, and FIG. 2 is a schematic configuration diagram illustrating a UT probe used in the processing hole position measuring apparatus illustrated in FIG. FIG. 3 is a perspective view for explaining a copying mechanism for holding the UT probe shown in FIG. 2 and for causing the contact surface of the UT probe to follow the turbine blade surface. 4 is a schematic configuration diagram for explaining a scanning mechanism that holds the copying mechanism shown in FIG. 3 and moves a UT probe in a scanning direction. FIG. First, with reference to FIGS. 1-4, the structure of the position measurement apparatus of the process hole of a present Example is demonstrated.

  The processing hole position measuring apparatus 10 of the present embodiment holds a UT probe 20 using two vibrators and the UT probe 20, and the contact surface of the UT probe 20 is a blade of a turbine blade 60. The scanning mechanism 30 that follows the surface, the scanning mechanism 30 that holds the scanning mechanism 30, and the scanning mechanism 40 that moves the UT probe 20 in the scanning direction together with the scanning mechanism 30, the scanning mechanism 40, and the UT probe And a measurement control unit 50 that acquires position data of 20 positions and ultrasonic data measured using the UT probe 20.

  As shown in FIG. 2, the UT probe 20 includes two vibrators 21 for transmitting ultrasonic waves and another vibrator 22 for receiving reflected ultrasonic waves inside a casing 23. An acoustic separator 25 is provided between the element 21 and the vibrator 22 to prevent the entry signal 24 from the transmission vibrator 21 from being mixed. When the contact surface 26 of the UT probe 20 is brought into contact with the surface of the turbine blade 60 and ultrasonic waves are generated by the vibrator 21, the ultrasonic waves are reflected by the cooling holes 61 formed inside the turbine blade 60. The position of the cooling hole 61 is measured by being received by the vibrator 22. The contact surface 26 of the UT probe 20 preferably has a size of about 5 mm square or less or a diameter of about 5 mm or less.

  By using the UT probe 20 having the two vibrators 21 and 22, the focal position of the ultrasonic wave can be adjusted shallowly, thereby reducing the dead zone near the surface and cooling holes 61 near the surface. Therefore, the cooling hole 61 close to the blade surface can be detected. Further, since the turbine blade 60 has a complicated three-dimensional curved surface shape, the curvature varies depending on the location. However, the curvature of the contact surface 26 of the UT probe 20 is about 5 mm square or less or about 5 mm diameter or less. The contact surface 26 can be brought into contact with the blade surface of the turbine blade 60 without being affected by the above, and the UT probe 20 is scanned so as to follow the blade surface of the turbine blade 60 having a complicated three-dimensional shape. Can do.

  The UT probe 20 described above is held by the copying mechanism 30 shown in FIG. As shown in FIG. 3, the copying mechanism 30 includes a holder 31 that holds the periphery of the casing 23 of the UT probe 20, a first rotating shaft 32 that can rotate in the direction of the blade length L, and a UT probe. A first rotation support member 33 that rotatably supports the holder 31 together with the contact 20 by a first rotation shaft 32, and a second rotation shaft that can rotate in the direction of the blade width direction W perpendicular to the blade length direction L 34, a second rotation support member 35 that rotatably supports the first rotation support member 33 by the second rotation shaft 34, and a second rotation support member that is provided coaxially with the second rotation shaft 34. A roller 36 that is provided on the opposite side of the UT probe 20 with the member 35 interposed therebetween, and serves as a fulcrum that contacts the blade surface of the turbine blade 60 together with the contact surface 26 of the UT probe 20, and the blade length direction L The third rotation shaft 37 and the second rotation support member 35 that can rotate in the direction of And a third rotation supporting member 38 which rotatably supports the rotary shaft 37.

  Near the rotary shafts 32, 34, and 37, there is a supported member side (for example, the first rotary shaft 32 has the UT probe 20 and holder 31 side, and the second rotary shaft 34 has the first rotary support. When the member 33 side and the third rotation shaft 37 are rotated from the initial position (on the second rotation support member 35 side), an elastic member (not shown) such as a spring that applies a biasing force in a direction opposite to the rotation direction is provided. Each is provided. Further, by providing angle sensors (not shown), the angle of the UT probe 20 can be detected by these angle sensors and used for measuring the cooling hole position.

  The above-described copying mechanism 30 is a so-called gimbal mechanism having a plurality of rotating shafts 32, 34, and 37, thereby changing the angle of the UT probe 20 in accordance with the shape of the blade surface of the turbine blade 60. Thus, the contact surface 26 of the UT probe 20 is brought into contact with the blade surface of the turbine blade 60, and the followability (trackability) of the contact surface 26 of the small UT probe 20 to the blade surface of the turbine blade 60. ) Can be secured. In particular, the copying mechanism 30 includes two rotary shafts 32 and 37 that can rotate in the blade length direction L. The two rotary shafts 32 and 37 cause the turbine blade 60 to fall (in the blade length direction L). Corresponding to (inclination), the followability (following property) is improved.

  The roller 36 provided on the second rotating shaft 34 serves as one fulcrum that contacts the blade surface of the turbine blade 60, and at least two locations on the side end portion of the contact surface 26 of the UT probe 20 are the turbine blade. Since the two fulcrums are in contact with the blade surface of the turbine blade 60, the blade blade surface of the turbine blade 60 can be brought into contact with the blade blade surface of the turbine blade 60 in at least three locations.

  The second rotation support member 35 and the third rotation support member 38 are arranged at the center of the contact surface 26 of the UT probe 20 and the roller 36, that is, at the center of the three fulcrums described above. Thus, the contact surface 26 can be stably brought into contact with the blade surface of the turbine blade 60.

  By using such a copying mechanism 30, the unstable small UT probe 20 can be stably brought into contact with the blade surface of the turbine blade 60 and scanned. Further, by using such a scanning mechanism 30 and scanning with a scanning mechanism 40 described later, it becomes possible to automatically scan the blade surface of the turbine blade 60 and, further, in real time when the cooling hole 61 is processed. Thus, the position of the cooling hole 61 can also be measured.

  For example, FIG. 4 shows the state of the UT probe 20 and the copying mechanism 30 at each position on the turbine blade 60 as viewed from the front end side. In the position on the right side in the blade width direction W in FIG. 4, the first rotation support member 33 of the copying mechanism 30 together with the UT probe 20 follows the inclination of the blade surface of the turbine blade 60. Tilted to the right. On the other hand, at the position on the left side in the blade width direction W in FIG. 4, the first rotation support member 33 of the copying mechanism 30 together with the UT probe 20 follows the inclination of the blade surface of the turbine blade 60. Inclined to the left in the direction W. Further, in the vicinity of the center in the blade width direction W in FIG. 4, the blade surface of the turbine blade 60 is substantially perpendicular to the Z direction, so that the state of the copying mechanism 30 together with the UT probe 20 follows the state. The one rotation support member 33 is substantially perpendicular to the Z direction.

  The copying mechanism 30 described above is held by the scanning mechanism 40 shown in FIG. As shown in FIG. 4, the scanning mechanism 40 includes a first guide block 41 that fixes the third rotation support member 38 of the copying mechanism 30 and a first guide block 41 that supports the first guide block 41 so as to be movable in the Z direction. A first linear guide 43 comprising a plurality of guide rails 42, a second guide block 44 for fixing the first guide rail 42, and a second guide rail for supporting the second guide block 44 so as to be movable in the Y direction. 45, a second linear guide 46, a third guide block (not shown) for fixing the second guide rail 45, and a third guide rail for supporting the third guide block movably in the X direction ( And a third linear guide 47 made up of (not shown).

  The first linear guide 43, the second linear guide 46, and the third linear guide 47 are each provided with a motor and an encoder, and the position of the UT probe 20 can be detected by these encoders. It is like that. Using such a scanning mechanism 40, the UT probe 20 is moved along the surface of the turbine blade 60.

  Then, the measurement control unit 50 (measurement control means) controls the scanning mechanism 40 to scan the UT probe 20 along the blade surface of the turbine blade 60, and the position signal (X from the scanning mechanism 40). , Y, Z direction encoder signal) position data, and ultrasonic data of the ultrasonic reflection signal measured using the UT probe 20 are acquired to determine the position of the cooling hole 61 in the turbine blade 60. Will be measured.

  Next, scanning of the UT probe 20 in the processing hole position measuring apparatus 10 according to the present embodiment will be described with reference to FIGS. 5 and 6. Here, FIG. 5 is a diagram for explaining scanning of the UT probe 20 in the present embodiment, and FIG. 6 is a diagram for explaining scanning of the UT probe shown in FIG. It is an enlarged view.

  The turbine blade 60 has a plurality of cooling holes formed therein, and among them, the plurality of cooling holes 61 formed along the blade length direction L are required to increase their cooling efficiency. The position where they are formed is important. Therefore, in this embodiment, as shown in FIG. 6, a plurality of cooling holes 61 are to be scanned, and first, the space between the cooling holes 61 at both ends is in the direction of the blade width direction W (Y direction of the scanning mechanism 40). The UT probe 20 is scanned, and then the UT probe 20 is moved in the blade length direction L (the X direction of the scanning mechanism 40). Thereafter, the blade width is similarly changed between the cooling holes 61 at both ends. The UT probe 20 is scanned in the direction W, and such a scanning procedure is repeated from the tip side (upper side in the X direction) of the turbine blade 60 to the base 60a side (lower side in the X direction). ing.

  By performing such an operation procedure using the measurement control unit 50, it is possible to automatically measure the positions of the plurality of cooling holes 61 formed in the turbine blade 60 having a complicated three-dimensional shape. Furthermore, the processing hole position measuring apparatus 10 of the present embodiment can be used during the processing of the cooling hole 61. For example, the position of the cooling hole 61 acquired by the measurement control unit 50 is used as the cooling hole 61. The position of the cooling hole 61 can be measured and processed in real time by feeding back to the processing control device to be processed and calibrating the target position and the positional deviation.

(Example 2)
The processing hole position measuring device of the present embodiment has basically the same configuration as the processing hole position measuring device 10 described in the first embodiment, but in the first embodiment, the UT probe 20 is a turbine. In contrast to the configuration in which scanning is possible only on one blade surface side of the blade 60, in this embodiment, scanning is also possible on the other blade surface side (opposite side) of the turbine blade 60.

  Specifically, the UT probe 20, the copying mechanism 30, and the scanning mechanism 40 are arranged not only on one blade surface side of the turbine blade 60 but also on the other blade surface side on the opposite side. And the measurement control part 50 controls all the UT probe 20, the scanning mechanism 30, and the scanning mechanism 40 with respect to both wing surfaces, and acquires measurement data. In addition, although the number of the measurement control part 50 may be one, you may provide individually for every blade surface.

The present embodiment will be described with reference to FIG. Here, FIG. 7 is a diagram for explaining the measurement of the UT probe 20 in the present embodiment. In the present invention, since the UT probe 20 having the two vibrators 21 and 22 is used, the dead zone is small, and the cooling hole 61 near the surface of the blade surface can be measured to some extent. However, since the dead zone is not completely eliminated by the UT probe 20, the cooling hole 61 in the vicinity of the surface of the blade surface is too close to the surface, so that measurement may be difficult. For example, in FIG. 7, the UT probe 20a _{P1 at} the position for measuring the cooling hole 61 _P1 and the UT probe 20a _P2 at the position for measuring the cooling hole 61 _P2 are the cooling hole 61 _P1 and the cooling hole 61 _P2. Since the distance from the blade surface to the UT probe 20a _{P3 at} the position where the cooling hole 61 _P3 is measured is from the blade surface of the cooling hole 61 _P3. Because of the short distance, the measurement was difficult.

Therefore, in this embodiment, the same UT probe 20b is arranged not only on one blade surface side but also on the opposite blade surface side. In this case, for example, in FIG. 7, the cooling holes 61 _P1 measures the in position UT probe 20b _P1, UT probe 20b _P2 which is positioned to measure the cooling holes 61 _P2 are cooling holes 61 _P1, cooling Since the distance of the hole 61 _{P2 from} the blade surface is somewhat long, the positions thereof can be measured, and the UT probe 20b _{P3 at} the position where the cooling hole 61 _P3 is measured is also used for the blade surface of the cooling hole 61 _P3 . Since the distance from the surface is long to some extent, the measurement is possible. That is, by measuring the position of the cooling hole 61 from both blade surface sides, the cooling hole 61 in the vicinity of the surface of the blade surface can be detected, and the measurable area can be increased.

(Example 3)
The processing hole position measuring device of the present embodiment has the same configuration as the processing hole position measuring device 10 described in the first embodiment, but in the first embodiment, the UT probe is targeted for a plurality of cooling holes 61. In contrast to scanning 20, in this embodiment, one specific cooling hole 61 is targeted, and the design path range of the cooling hole 61 is scanned.

  The present embodiment will be described with reference to FIG. Here, FIG. 8 is a diagram for explaining scanning of the UT probe in the present embodiment, and corresponds to an enlarged view of a region A in FIG. In the first embodiment, a plurality of cooling holes 61 are targeted for scanning, but in this embodiment, attention is paid to one specific cooling hole 61 and the UT probe is within the design path of the focused cooling hole 61. 20 is scanned. For example, if the scanning range S is limited to a range of about 10 mm or less, the scanning can be simplified and the measurement time can be shortened. This is particularly effective when measuring in real time during processing and performing feedback control. . When a reflected signal (reflected echo) cannot be obtained from the scanning range, it can be easily determined that the position of the processed cooling hole 61 is shifted.

(Example 4)
FIG. 9 is a schematic configuration diagram showing the processing hole position measuring apparatus of the present embodiment, and FIG. 10 is a diagram for explaining scanning of the flexible array probe in the present embodiment. First, with reference to FIG. 9, the structure of the processing hole position measuring apparatus of a present Example is demonstrated.

  The processing hole position measuring device 70 of this embodiment is made of an elastically deformable material, and is a flexible array probe (hereinafter referred to as an FA probe) 71 in which a large number of transducers are arranged in the longitudinal direction. The FA probe 71 is held on the surface, and a deformable member 72 formed of an elastically deformable material (rubber or the like) is attached to the deformable member 72. The FA probe 71 and the deformable member 72 are connected to the turbine. The pressing mechanism 73 that presses against the blade surface of the blade 60, the scanning mechanism 74 that holds the pressing mechanism 73, and moves the FA probe 71 and the deformable member 72 in the scanning direction together with the pressing mechanism 73, and the scanning mechanism 47 are controlled. In addition, a measurement control unit 75 that acquires position data of the FA probe 71 and ultrasonic data measured using the FA probe 71 is provided.

  The FA probe 71 has a large number of transducers that transmit ultrasonic waves and other transducers that receive reflected ultrasonic waves. For example, a piezoelectric element serving as a transducer can be elastically deformed made of resin or the like. A large number of flexible substrates are arranged in the longitudinal direction. In the FA probe 71, the position of the cooling hole 61 can be calculated from the position of the transducer that has obtained the reflection signal from the cooling hole 61.

  Then, the FA probe 71 and the deformable member 72 are imprinted on the curved surface of the blade surface of the turbine blade 60 by pressing the FA probe 71 and the deformable member 72 against the blade surface of the turbine blade 60 using the pressing mechanism 73. The contact surface of the FA probe 71 comes into contact with the curved surface of the blade surface of the turbine blade 60.

  The scanning mechanism 74 has substantially the same configuration and function as the scanning mechanism 40 described in the first embodiment. However, the scanning mechanism 74 moves the FA probe 71 at least in the X direction and the Y direction. It suffices if the position signal in the Y direction can be acquired. In particular, in the case of the present embodiment, since a plurality of cooling holes 61 can be measured with one FA probe 71, scanning in only one direction, for example, as shown in FIG. ) Only scanning may be performed. In this case, since the FA probe 71 is scanned in only one direction, the scanning is simplified.

  Accordingly, the measurement control unit 75 controls the scanning mechanism 74 to scan the FA probe 71 along the blade surface of the turbine blade 60, and the position signal (X, Y direction encoder signal) from the scanning mechanism 74. ) And the ultrasonic data of the ultrasonic reflection signal measured using the FA probe 71 and the position data of the transducer are acquired, and the position of the cooling hole 61 inside the turbine blade 60 is measured. Will do.

  By using the machined hole position measuring device 70 of the present embodiment, the positions of a plurality of cooling holes 61 formed inside the turbine blade 60 having a complicated three-dimensional shape can be automatically measured. Furthermore, the processing hole position measuring device 70 of the present embodiment can also be used during the processing of the cooling hole 61. For example, the position of the cooling hole 61 acquired by the measurement control unit 75 is changed to the cooling hole 61. The position of the cooling hole 61 can be measured and processed in real time by feeding back to the processing control device to be processed and calibrating the target position and the positional deviation. In addition, since a plurality of cooling holes 61 can be measured with one FA probe 71, scanning in only one direction may be performed, the scanning becomes simple, and the measurement time can be shortened.

  9 and 10, the FA probe 71 can be scanned only on one blade surface side of the turbine blade 60, but as shown in FIG. 11, the other blade surface side of the turbine blade 60 is used. However, scanning may be possible. Specifically, the FA probe 71, the deformation member 72, the pressing mechanism 73, and the scanning mechanism 74 are arranged not only on one blade surface side of the turbine blade 60 but also on the other blade surface side on the opposite side. . And the measurement control part 75 controls all the FA probe 71 with respect to both wing surfaces, the deformation member 72, the pressing mechanism 73, and the scanning mechanism 74, and acquires the measurement data. One measurement control unit 75 may be provided, but may be provided for each blade surface.

  In this way, by detecting the reflected signal from the cooling hole 61 from both blade surface sides of the turbine blade 60, measurement with a reduced dead zone becomes possible. Also, the position of the cooling hole 61 is determined by detecting the transmitted wave, not the reflected wave of the ultrasonic wave, with one wing surface side of the FA probe 71 as the transmitting side and the other wing surface side as the receiving side. It can also be specified.

(Example 5)
The processing hole position measuring device of the present embodiment has basically the same configuration as the processing hole position measuring device 70 described in the fourth embodiment, but in the fourth embodiment, a large number of vibrators are arranged in the longitudinal direction. In this embodiment, as shown in FIG. 12, a flexible matrix array probe (hereinafter referred to as FMA) in which a large number of transducers are arranged in a grid pattern is used. This is called a probe.) 81 is used.

  Specifically, the processing hole position measuring apparatus according to the present embodiment is formed of an elastically deformable material and includes an FMA probe 81 in which a large number of vibrators are arranged in a lattice pattern, and the above-described deformation member 72, A pressing mechanism 73, a scanning mechanism 74, and a measurement control unit 75 are provided.

  In the processing hole position measuring apparatus according to the present embodiment, the FMA probe 81 has a large number of transducers that transmit ultrasonic waves and other transducers that receive reflected ultrasonic waves. A large number of piezoelectric elements are arranged in a lattice on a flexible substrate made of resin or the like. Also in the FMA probe 81, the detection of the position of the cooling hole 61 can be calculated from the position of the vibrator that has obtained the reflection signal from the cooling hole 61. Since the FMA probe 81 is held on the surface of the deformation member 72 described above, the deformation member 72 has a size corresponding to the FMA probe 81.

  Then, by pressing the FMA probe 81 and the deforming member 72 against the blade surface of the turbine blade 60 using the pressing mechanism 73, the FMA probe 81 and the deforming member 72 follow the curved surface of the blade surface of the turbine blade 60. Then, the contact surface of the FMA probe 81 comes into contact with the curved surface of the blade surface of the turbine blade 60.

  The scanning mechanism 74 has substantially the same configuration and function as the scanning mechanism 40 described in the first embodiment, but moves the FMA probe 81 at least in the X direction and the Y direction, It suffices if the position signal in the Y direction can be acquired. In particular, in the present embodiment, since a plurality of cooling holes 61 can be measured with a single FMA probe 81 over a wide range, for example, as shown in FIG. May be.

  Therefore, the measurement control unit 75 acquires the position data of the position signal (X, Y direction encoder signal) from the scanning mechanism 74, and the ultrasonic data of the ultrasonic reflection signal measured using the FMA probe 81 and The position data of the vibrator is acquired, and the position of the cooling hole 61 inside the turbine blade 60 is measured.

  By using the machined hole position measuring apparatus of the present embodiment, the positions of a plurality of cooling holes 61 formed in the turbine blade 60 having a complicated three-dimensional shape can be automatically measured. Further, the processing hole position measuring device of the present embodiment can also be used during the processing of the cooling hole 61. For example, the position of the cooling hole 61 acquired by the measurement control unit 75 is processed into the cooling hole 61. The position of the cooling hole 61 can be measured and processed in real time by feeding back to the processing control device and calibrating the target position and the positional deviation. In addition, since the plurality of cooling holes 61 can be measured with a single FMA probe 81 in a wide range, the measurement time can be shortened.

  In FIG. 12, the FMA probe 81 is disposed on one blade surface side of the turbine blade 60, but may be disposed on the other blade surface side of the turbine blade 60 (opposite side). Specifically, the FMA probe 81, the deformation member 72, the pressing mechanism 73, and the scanning mechanism 74 are arranged not only on one blade surface side of the turbine blade 60 but also on the other blade surface side on the opposite side. . And the measurement control part 75 controls all the FMA probe 81 with respect to both wing surfaces, the deformation member 72, the pressing mechanism 73, and the scanning mechanism 74, and acquires the measurement data. One measurement control unit 75 may be provided, but may be provided for each blade surface.

  In this way, by detecting the reflected signal from the cooling hole 61 from both blade surface sides of the turbine blade 60, measurement with a reduced dead zone becomes possible. Also, the position of the cooling hole 61 is determined by detecting the transmitted wave, not the reflected wave of the ultrasonic wave, with one wing surface side of the FMA probe 81 as the transmitting side and the other wing surface side as the receiving side. It can also be specified.

  The present invention is applied to measurement of the position of a processed hole processed in a workpiece, and is particularly suitable for measuring the position of a cooling hole processed into a turbine blade having a complicated three-dimensional shape.

10, 70 Processing hole position measuring device 20 UT probe 21, 22 Vibrator 26 Contact surface 30 Copying mechanism 32 First rotating shaft 33 First rotating support member 34 Second rotating shaft 35 Second rotating support Member 36 Roller 37 Third rotation shaft 38 Third rotation support member 40, 74 Scanning mechanism 43 First linear guide 46 Second linear guide 47 Third linear guide 50, 75 Measurement control unit (measurement control means)
60 Turbine blade 61 Cooling hole 71 Flexible array probe 72 Deformable member 73 Pressing mechanism 81 Flexible matrix array probe

Claims (8)

In a machined hole position measuring device that measures the position of a machined hole machined inside a workpiece or a machined hole being machined inside a workpiece,
A probe having a transducer for transmitting ultrasonic waves and another transducer for receiving the ultrasonic waves, and a probe for bringing a contact surface into contact with the surface of the workpiece;
A scanning mechanism that holds the probe and changes the angle of the probe to follow the surface of the workpiece to contact the contact surface of the probe;
A scanning mechanism for holding the copying mechanism and moving the probe along the surface of the workpiece;
A measurement control unit that acquires the position of the probe from the scanning mechanism and the scanning mechanism, acquires the reflected signal of the ultrasonic wave from the probe, and detects the position of the processing hole;
The copying mechanism includes at least two rotation axes of a first rotation axis that rotates the probe in a predetermined direction and a second rotation axis that rotates the probe in a direction orthogonal to the predetermined direction; A roller that contacts the surface of the workpiece together with the contact surface of the probe; and a support member that is provided on the contact surface of the probe and a central portion of the roller and is held by the scanning mechanism. An apparatus for measuring the position of a machined hole. In the processing hole position measuring device according to claim 1,
The probe, the scanning mechanism, and the scanning mechanism are arranged on a predetermined surface side with respect to the workpiece, and the other probe on the surface side opposite to the predetermined surface side, An apparatus for measuring a position of a machining hole, wherein a copying mechanism and the other scanning mechanism are arranged. In the processing hole position measuring device according to claim 1 or 2,
An apparatus for measuring a position of a processing hole, characterized in that the size of the contact surface of the probe is not affected by the curvature of the surface of the workpiece. In the machined hole position measuring device according to any one of claims 1 to 3,
The measurement control means uses the scanning mechanism to scan the probe within the design path range of the specific processing hole, and when the ultrasonic reflected signal cannot be obtained from the design path range. Determines that the position of the processing hole is shifted. In a machined hole position measuring device that measures the position of a machined hole machined inside a workpiece or a machined hole being machined inside a workpiece,
A plurality of transducers that transmit ultrasonic waves and other transducers that receive the ultrasonic waves, and a large number of the transducers and the other transducers are arranged in a longitudinal direction of a substrate that can be elastically deformed; A flexible array probe for bringing the contact surface into contact with the surface;
A deformable member that holds the flexible array probe on the surface and deforms together with the flexible array probe following the surface of the workpiece.
A pressing mechanism that holds the deformable member and presses the flexible array probe together with the deformable member against the surface of the workpiece;
A scanning mechanism that holds the pressing mechanism and moves the flexible array probe along the surface of the workpiece;
Obtaining the position of the flexible array probe from the scanning mechanism, obtaining the position of the transducer from which the reflected signal of the ultrasonic wave is detected from the flexible array probe, and reflecting the ultrasonic wave from the transducer A machined hole position measuring device comprising: a measurement control means for acquiring a signal and detecting the position of the machined hole. In the processing hole position measuring device according to claim 5,
The flexible array probe, the deformable member, the pressing mechanism, and the scanning mechanism are disposed on a predetermined surface side of the workpiece, and another flexible surface is disposed on the surface side opposite to the predetermined surface side. An array probe, another deforming member, another pressing mechanism, and another scanning mechanism are arranged. In a machined hole position measuring device that measures the position of a machined hole machined inside a workpiece or a machined hole being machined inside a workpiece,
A plurality of transducers that transmit ultrasonic waves and other transducers that receive the ultrasonic waves, and a plurality of the transducers and the other transducers are arranged in a lattice on an elastically deformable substrate; A flexible matrix array probe for bringing the contact surface into contact with the surface;
A deformable member that holds the flexible matrix array probe on the surface and deforms with the flexible matrix array probe following the surface of the workpiece.
A pressing mechanism for holding the deformable member and pressing the flexible matrix array probe together with the deformable member against the surface of the workpiece;
A scanning mechanism that holds the pressing mechanism and moves the flexible matrix array probe along the surface of the workpiece;
The position of the flexible matrix array probe is acquired from the scanning mechanism, the position of the transducer from which the reflected signal of the ultrasonic wave is detected is acquired from the flexible matrix array probe, and the ultrasonic wave is acquired from the transducer. And a measurement control means for detecting the position of the processing hole by acquiring a reflection signal of the processing hole. In the processing hole position measuring device according to claim 7,
The flexible matrix array probe, the deformable member, the pressing mechanism, and the scanning mechanism are disposed on a predetermined surface side of the workpiece, and the other surface side is opposite to the predetermined surface side. A machined hole position measuring apparatus comprising: a flexible matrix array probe; another deforming member; another pressing mechanism; and another scanning mechanism.

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