JP2014090153A - Formation method of surface coating film and solar cell having the surface coating film - Google Patents
Formation method of surface coating film and solar cell having the surface coating film Download PDFInfo
- Publication number
- JP2014090153A JP2014090153A JP2013033036A JP2013033036A JP2014090153A JP 2014090153 A JP2014090153 A JP 2014090153A JP 2013033036 A JP2013033036 A JP 2013033036A JP 2013033036 A JP2013033036 A JP 2013033036A JP 2014090153 A JP2014090153 A JP 2014090153A
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- Prior art keywords
- coating film
- surface coating
- film
- forming
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000000576 coating method Methods 0.000 title claims abstract description 161
- 239000011248 coating agent Substances 0.000 title claims abstract description 158
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- 238000000034 method Methods 0.000 title claims abstract description 34
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- 229910052719 titanium Inorganic materials 0.000 claims abstract description 19
- 239000000203 mixture Substances 0.000 claims abstract description 15
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- 150000001875 compounds Chemical class 0.000 claims abstract description 13
- 239000003960 organic solvent Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 7
- 238000002161 passivation Methods 0.000 claims description 16
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- 238000004519 manufacturing process Methods 0.000 abstract description 4
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- 239000010703 silicon Substances 0.000 description 42
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- 125000005595 acetylacetonate group Chemical group 0.000 description 3
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- 239000011261 inert gas Substances 0.000 description 3
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 3
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- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 125000002947 alkylene group Chemical group 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- BSDOQSMQCZQLDV-UHFFFAOYSA-N butan-1-olate;zirconium(4+) Chemical compound [Zr+4].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-] BSDOQSMQCZQLDV-UHFFFAOYSA-N 0.000 description 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
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- 229910017604 nitric acid Inorganic materials 0.000 description 2
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- 238000010248 power generation Methods 0.000 description 2
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- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 1
- 125000006325 2-propenyl amino group Chemical group [H]C([H])=C([H])C([H])([H])N([H])* 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
- UUEWCQRISZBELL-UHFFFAOYSA-N 3-trimethoxysilylpropane-1-thiol Chemical compound CO[Si](OC)(OC)CCCS UUEWCQRISZBELL-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- KBQVDAIIQCXKPI-UHFFFAOYSA-N 3-trimethoxysilylpropyl prop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C=C KBQVDAIIQCXKPI-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- NROTXOGDXQYBEH-UHFFFAOYSA-N C(C)(C)(C)O[Zr](OC(C)C)(OC(C)C)OC(C)(C)C Chemical compound C(C)(C)(C)O[Zr](OC(C)C)(OC(C)C)OC(C)(C)C NROTXOGDXQYBEH-UHFFFAOYSA-N 0.000 description 1
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- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- FPCJKVGGYOAWIZ-UHFFFAOYSA-N butan-1-ol;titanium Chemical compound [Ti].CCCCO.CCCCO.CCCCO.CCCCO FPCJKVGGYOAWIZ-UHFFFAOYSA-N 0.000 description 1
- QWJLLDFFAFDUHM-UHFFFAOYSA-N butan-1-olate;propan-2-olate;titanium(4+) Chemical compound [Ti+4].CC(C)[O-].CC(C)[O-].CCCC[O-].CCCC[O-] QWJLLDFFAFDUHM-UHFFFAOYSA-N 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
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- SEEJFOLTHUDOEA-UHFFFAOYSA-N dibutyl dipropan-2-yl silicate Chemical compound CCCCO[Si](OC(C)C)(OC(C)C)OCCCC SEEJFOLTHUDOEA-UHFFFAOYSA-N 0.000 description 1
- NWQIWFOQNHTTIA-UHFFFAOYSA-N diethoxy-bis(prop-2-enyl)silane Chemical compound CCO[Si](CC=C)(CC=C)OCC NWQIWFOQNHTTIA-UHFFFAOYSA-N 0.000 description 1
- WERMRYHPOOABQT-UHFFFAOYSA-N dimethoxy-bis(prop-2-enyl)silane Chemical compound C=CC[Si](OC)(CC=C)OC WERMRYHPOOABQT-UHFFFAOYSA-N 0.000 description 1
- WHGNXNCOTZPEEK-UHFFFAOYSA-N dimethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](C)(OC)CCCOCC1CO1 WHGNXNCOTZPEEK-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- XGZNHFPFJRZBBT-UHFFFAOYSA-N ethanol;titanium Chemical compound [Ti].CCO.CCO.CCO.CCO XGZNHFPFJRZBBT-UHFFFAOYSA-N 0.000 description 1
- UARGAUQGVANXCB-UHFFFAOYSA-N ethanol;zirconium Chemical compound [Zr].CCO.CCO.CCO.CCO UARGAUQGVANXCB-UHFFFAOYSA-N 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
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- 125000001033 ether group Chemical group 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 235000011087 fumaric acid Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229940093915 gynecological organic acid Drugs 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
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- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
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- 150000002576 ketones Chemical class 0.000 description 1
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- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- YLBPOJLDZXHVRR-UHFFFAOYSA-N n'-[3-[diethoxy(methyl)silyl]propyl]ethane-1,2-diamine Chemical compound CCO[Si](C)(OCC)CCCNCCN YLBPOJLDZXHVRR-UHFFFAOYSA-N 0.000 description 1
- 125000006606 n-butoxy group Chemical group 0.000 description 1
- 125000003506 n-propoxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- CMWTZPSULFXXJA-VIFPVBQESA-N naproxen Chemical compound C1=C([C@H](C)C(O)=O)C=CC2=CC(OC)=CC=C21 CMWTZPSULFXXJA-VIFPVBQESA-N 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000004028 organic sulfates Chemical class 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000001443 photoexcitation Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- XPGAWFIWCWKDDL-UHFFFAOYSA-N propan-1-olate;zirconium(4+) Chemical compound [Zr+4].CCC[O-].CCC[O-].CCC[O-].CCC[O-] XPGAWFIWCWKDDL-UHFFFAOYSA-N 0.000 description 1
- BCWYYHBWCZYDNB-UHFFFAOYSA-N propan-2-ol;zirconium Chemical compound [Zr].CC(C)O.CC(C)O.CC(C)O.CC(C)O BCWYYHBWCZYDNB-UHFFFAOYSA-N 0.000 description 1
- HCOKJWUULRTBRS-UHFFFAOYSA-N propan-2-yloxysilane Chemical compound CC(C)O[SiH3] HCOKJWUULRTBRS-UHFFFAOYSA-N 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
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- 125000005920 sec-butoxy group Chemical group 0.000 description 1
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- 239000007921 spray Substances 0.000 description 1
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- 150000003460 sulfonic acids Chemical class 0.000 description 1
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 description 1
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 1
- ZUEKXCXHTXJYAR-UHFFFAOYSA-N tetrapropan-2-yl silicate Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)OC(C)C ZUEKXCXHTXJYAR-UHFFFAOYSA-N 0.000 description 1
- ZQZCOBSUOFHDEE-UHFFFAOYSA-N tetrapropyl silicate Chemical compound CCCO[Si](OCCC)(OCCC)OCCC ZQZCOBSUOFHDEE-UHFFFAOYSA-N 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- UMFJXASDGBJDEB-UHFFFAOYSA-N triethoxy(prop-2-enyl)silane Chemical compound CCO[Si](CC=C)(OCC)OCC UMFJXASDGBJDEB-UHFFFAOYSA-N 0.000 description 1
- LFRDHGNFBLIJIY-UHFFFAOYSA-N trimethoxy(prop-2-enyl)silane Chemical compound CO[Si](OC)(OC)CC=C LFRDHGNFBLIJIY-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Electromagnetism (AREA)
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Abstract
Description
本発明は、表面被覆膜の形成方法、及び該方法により形成された表面被覆膜を有する太陽電池に関する。 The present invention relates to a method for forming a surface coating film and a solar cell having a surface coating film formed by the method.
太陽電池は、光エネルギーを電力に変換する半導体素子であり、p−n接合型、pin型、ショットキー型などがあり、特にp−n接合型が広く用いられている。これらシリコン結晶系太陽電池においては、太陽光の入射光による光励起によって生成した少数キャリアがp−n接合面へ到達した後、受光面及び裏面に取り付けられた電極から多数キャリアとして外部へ取り出されて電気エネルギーとなる。 A solar cell is a semiconductor element that converts light energy into electric power, and includes a pn junction type, a pin type, a Schottky type, and the pn junction type is widely used. In these silicon crystal solar cells, after the minority carriers generated by photoexcitation with sunlight incident light reach the pn junction surface, they are taken out as majority carriers from the electrodes attached to the light receiving surface and the back surface. It becomes electric energy.
太陽電池には高いエネルギーの変換効率が求められているが、電極面以外の基板表面に存在する界面準位を介して、本来電流として取り出すことのできるキャリアが再結合をして失われることがあり、変換効率の低下に繋がっていた。 Solar cells are required to have high energy conversion efficiency, but carriers that can be taken out as current can be lost due to recombination via interface states existing on the substrate surface other than the electrode surface. Yes, leading to a decrease in conversion efficiency.
そこで、高効率太陽電池においては、シリコン基板の表面に、電極とのコンタクト部を除いて窒化珪素(SiNx:H)膜や酸化珪素(SiO2)膜からなるパッシベーション膜を形成し、シリコン基板とパッシベーション膜との界面におけるキャリア再結合を抑制することで、変換効率の向上が図られている。なかでも、パッシベーション膜として、窒化珪素膜を設けることが主流となっている。 Therefore, in a high efficiency solar cell, a passivation film made of a silicon nitride (SiN x : H) film or a silicon oxide (SiO 2 ) film is formed on the surface of the silicon substrate except for a contact portion with the electrode, and the silicon substrate By suppressing carrier recombination at the interface between the passivation film and the passivation film, conversion efficiency is improved. In particular, a silicon nitride film is mainly used as a passivation film.
上記窒化珪素膜は、太陽電池の光の入射損を低減させるための表面反射を抑制する反射防止膜としても利用できる。一方、酸化珪素膜からなるパッシベーション膜を設ける場合には、反射防止性の観点からその外側に酸化チタン(TiO2)膜などの屈折率が高い膜を設ける必要があった(特許文献1、非特許文献1)。 The silicon nitride film can also be used as an antireflection film that suppresses surface reflection for reducing the incidence loss of light of the solar cell. On the other hand, in the case of providing a passivation film made of a silicon oxide film, it is necessary to provide a film having a high refractive index such as a titanium oxide (TiO 2 ) film on the outer side from the viewpoint of antireflection properties (Patent Document 1, Non-Patent Document 1). Patent Document 1).
しかしながら、上記の窒化珪素膜は、例えばマイクロ波プラズマCVD法、RFプラズマCVD法、光CVD法、熱CVD法、MOCVD法などの各種CVD法によって、あるいはEB蒸着、MBE、イオンプレーティング、イオンビーム法などの各種蒸着法、スパッタリング法など、真空装置を用いて形成される。このため、膜を設けた最終製品のコストの上昇につながっていた。 However, the silicon nitride film is formed by various CVD methods such as microwave plasma CVD method, RF plasma CVD method, photo CVD method, thermal CVD method, MOCVD method, or EB deposition, MBE, ion plating, ion beam. It is formed by using a vacuum apparatus such as various vapor deposition methods such as a sputtering method and a sputtering method. This led to an increase in the cost of the final product provided with a film.
本発明は、上記の課題に鑑みてなされたものであり、簡易な形成方法で特性に優れる表面被覆膜を形成し、最終製品の製造コストを低減することを可能とする表面被覆膜の形成方法を提供することを目的とする。また、本発明は、このような方法により形成された表面被覆膜を有する太陽電池を提供することを目的とする。 The present invention has been made in view of the above-described problems, and is a surface coating film capable of forming a surface coating film having excellent characteristics by a simple forming method and reducing the manufacturing cost of the final product. An object is to provide a forming method. Moreover, an object of this invention is to provide the solar cell which has the surface coating film formed by such a method.
本発明者らは、Si、Ti、Zrの元素から選択される2種以上の元素を有する表面被覆膜が太陽電池の反射防止膜やパッシベーション膜として有効であることを見出し、本発明を完成するに至った。より具体的には、本発明は以下のようなものを提供する。 The present inventors have found that a surface coating film having two or more elements selected from Si, Ti, and Zr elements is effective as an antireflection film or a passivation film for solar cells, and has completed the present invention. It came to do. More specifically, the present invention provides the following.
本発明の第1の態様は、Si、Ti、Zrの元素から選択される2種以上の元素を有する表面被覆膜形成用化合物成分と有機溶剤成分とを含む表面被覆膜形成用組成物を被覆対象母材に塗布して塗布膜を形成する塗布工程と、前記塗布膜を焼成する焼成工程とを有する、Si、Ti、Zrの元素から選択される2種以上の元素を有する表面被覆膜の形成方法である。 A first aspect of the present invention is a composition for forming a surface coating film comprising a compound component for forming a surface coating film having two or more elements selected from Si, Ti, and Zr and an organic solvent component A surface coating having two or more elements selected from Si, Ti, and Zr, each of which includes a coating process for coating a base material to be coated to form a coating film, and a firing process for firing the coating film. This is a method of forming a covering film.
本発明の第2の態様は、本発明の第1の態様に係る表面被覆膜の形成方法により形成された表面被覆膜を有する太陽電池である。 A second aspect of the present invention is a solar cell having a surface coating film formed by the method for forming a surface coating film according to the first aspect of the present invention.
本発明によれば、簡易な形成方法で特性に優れる表面被覆膜を形成でき、太陽電池などの最終製品の製造コストを低減することができる。また、本発明の形成方法で、表面被覆膜を太陽電池の表面に設けた場合に、パッシベーション膜と反射防止膜とを兼ねた表面被覆膜とすることができる。 According to the present invention, a surface coating film having excellent characteristics can be formed by a simple forming method, and the manufacturing cost of a final product such as a solar cell can be reduced. Moreover, when the surface coating film is provided on the surface of the solar cell by the formation method of the present invention, a surface coating film serving as both a passivation film and an antireflection film can be obtained.
以下、本発明の実施形態を説明するが、これらに本発明が限定されるものではない。 Hereinafter, although embodiment of this invention is described, this invention is not limited to these.
〔1〕表面被覆膜形成用組成物
本発明の形成方法に用いられる表面被覆膜形成用組成物は、有機溶剤に可溶で、加熱することにより酸化物に変化するSi、Ti、Zrの元素の化合物類(それぞれ、シラン化合物、チタン化合物、ジルコニウム化合物という。)を特に限定なく含有する。そのような化合物類としては、例えば、上記各元素の硝酸塩、塩化物、アルコラート及びアセチルアセトナート、アルコラート及びアセチルアセトナートの部分加水分解物などを挙げることができる。これらのなかでも、上記各元素のアルコラート及びアセチルアセトナート、それらの部分加水分解物を採用することが好ましい。
[1] Composition for forming a surface coating film The composition for forming a surface coating film used in the forming method of the present invention is soluble in an organic solvent and changes into an oxide by heating, Si, Ti, Zr The compounds of these elements (referred to as silane compounds, titanium compounds, and zirconium compounds, respectively) are not particularly limited. Examples of such compounds include nitrates, chlorides, alcoholates and acetylacetonates of the respective elements, partial hydrolysates of alcoholates and acetylacetonates, and the like. Among these, it is preferable to employ alcoholates and acetylacetonates of the above elements and partial hydrolysates thereof.
アルコラートとしては、例えば、下記の一般式(1)〜(3)で表される化合物を使用することができる。
R1 4−nSiX1 n・・・・・(1)
(nは、2〜4の整数を表す。R1は有機基を表し、X1はアルコキシ基を表す。)
R2 4−nTiX2 n・・・・・(2)
(nは、2〜4の整数を表す。R2は有機基を表し、X2はアルコキシ基を表す。)
R3 4−nZrX3 n・・・・・(3)
(nは、2〜4の整数を表す。R3は有機基を表し、X3はアルコキシ基を表す。)
As the alcoholate, for example, compounds represented by the following general formulas (1) to (3) can be used.
R 1 4-n SiX 1 n (1)
(N represents an integer of 2 to 4. R 1 represents an organic group, and X 1 represents an alkoxy group.)
R 2 4-n TiX 2 n (2)
(N represents an integer of 2 to 4. R 2 represents an organic group, and X 2 represents an alkoxy group.)
R 3 4-n ZrX 3 n (3)
(N represents an integer of 2 to 4. R 3 represents an organic group, and X 3 represents an alkoxy group.)
R1〜R3の有機基としては、特に限定なく広い範囲のものが使用可能であり、例えば、直鎖又は分岐鎖のアルキル基、アルケニル基、アルキニル基又は親水性基を有するものが挙げられる。アルキル基、アルケニル基、アルキニル基としては、後述のR4と同様のものが挙げられる。また親水性基を有する有機基としては、例えば、以下の一般式(4)で表されるものが例示できる。
R4−ES−R5−・・・・・(4)
ここで、R4は直鎖又は分岐鎖のアルキル基、アルケニル基、アルキニル基を表し、ESはエステル結合を表し、R5はアルキレン基を表す。上記アルキル基、アルケニル基、アルキニル基は、炭素数1〜10が好ましく、炭素数2〜6がより好ましい。また。上記アルキレン基は、炭素数1〜10が好ましく、炭素数2〜6がより好ましい。
As the organic group for R 1 to R 3 , those in a wide range can be used without any particular limitation, and examples thereof include those having a linear or branched alkyl group, alkenyl group, alkynyl group or hydrophilic group. . Examples of the alkyl group, alkenyl group and alkynyl group include the same groups as those described later for R 4 . Moreover, as an organic group which has a hydrophilic group, what is represented by the following general formula (4) can be illustrated, for example.
R 4 -ES-R 5- (4)
Here, R 4 represents a linear or branched alkyl group, alkenyl group, or alkynyl group, ES represents an ester bond, and R 5 represents an alkylene group. The alkyl group, alkenyl group, and alkynyl group preferably have 1 to 10 carbon atoms, and more preferably have 2 to 6 carbon atoms. Also. The alkylene group preferably has 1 to 10 carbon atoms, and more preferably has 2 to 6 carbon atoms.
前記親水性基としては例えば、水酸基、カルボニル基、エーテル基、特にカルボニル基の中でもエステル基(エステル結合)が挙げられる。また、R1〜R3の炭素数は1〜20が好ましく、1〜6がより好ましい。 Examples of the hydrophilic group include a hydroxyl group, a carbonyl group, an ether group, and particularly an ester group (ester bond) among carbonyl groups. The number of carbon atoms of R 1 to R 3 is preferably 1 to 20, 1 to 6 is more preferable.
一般式(1)〜(3)で表される化合物各々に、有機基R1〜R3が2つ存在する場合には、各有機基は相互に同一であっても異なっていてもよい。 When two organic groups R 1 to R 3 are present in each of the compounds represented by the general formulas (1) to (3), the organic groups may be the same as or different from each other.
X1〜X3はアルコキシ基であり、特に炭素数1〜5のアルコキシ基が好ましい。炭素数1〜5のアルコキシ基としては、例えば、メトキシ基、エトキシ基、n−プロポキシ基、i−プロポキシ基、n−ブトキシ基、i−ブトキシ基、sec−ブトキシ基、t−ブトキシ基などの直鎖又は分岐鎖のアルコキシ基を挙げることができる。式中にX1〜X3が2つ以上存在する場合には、X1〜X3は各々同一でも異なっていてもよい。 X 1 to X 3 are alkoxy groups, and an alkoxy group having 1 to 5 carbon atoms is particularly preferable. Examples of the alkoxy group having 1 to 5 carbon atoms include a methoxy group, an ethoxy group, an n-propoxy group, an i-propoxy group, an n-butoxy group, an i-butoxy group, a sec-butoxy group, and a t-butoxy group. A linear or branched alkoxy group can be mentioned. When X 1 to X 3 in the formula there are two or more, X 1 to X 3 may each be the same or different.
一般式(1)で表されるシラン化合物としては、例えば、ビニルトリメトキシシラン、ビニルトリエトキシシラン、アリルトリメトキシシラン、アリルトリエトキシシラン、3−グリシドキシプロピルトリメトキシシラン、2−(3,4−エポキシシクロヘキシル)エチルトリメトキシシラン、3−アミノプロピルトリエトキシシラン、3−アミノプロピルトリメトキシシラン、N−(2−アミノエチル)−3−アミノプロピルメチルジエトキシシラン、3−メルカプトプロピルトリメトキシシラン、ジアリルジメトキシシラン、ジアリルジエトキシシラン、3−グリシドキシプロピルメチルジメトキシシラン、アリルアミノトリメトキシシラン、3−メタクリロキシプロピルトリメトキシシラン、3−アクリロキシプロピルトリメトキシシラン、テトラメトキシシラン、テトラエトキシシラン、テトラ−n−プロポキシシラン、テトライソプロポキシシラン、テトラ−n−ブトキシシラン、テトライソブトキシシラン、ジイソプロポキシジ−n−ブトキシシラン、ジ−t−ブトキシジイソプロポキシシラン、テトラ−t−ブトキシシラン、テトライソオクチルオキシシラン、テトラステアリルオキシシランなどが挙げられる。
などが挙げられる。
Examples of the silane compound represented by the general formula (1) include vinyltrimethoxysilane, vinyltriethoxysilane, allyltrimethoxysilane, allyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, 2- (3 , 4-epoxycyclohexyl) ethyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-aminopropyltrimethoxysilane, N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane, 3-mercaptopropyltri Methoxysilane, diallyldimethoxysilane, diallyldiethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, allylaminotrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-acryloxypropyltrimethoxysilane , Tetramethoxysilane, tetraethoxysilane, tetra-n-propoxysilane, tetraisopropoxysilane, tetra-n-butoxysilane, tetraisobutoxysilane, diisopropoxydi-n-butoxysilane, di-t-butoxydi Examples include isopropoxysilane, tetra-t-butoxysilane, tetraisooctyloxysilane, and tetrastearyloxysilane.
Etc.
一般式(2)で表されるチタン化合物としては、例えば、アリルトリメトキシチタン、アリルトリエトキシチタン、ジアリルジメトキシチタン、ジアリルジエトキシチタン、アリルアミノトリメトキシチタン、テトラメトキシチタン、テトラエトキシチタン、テトラ−n−プロポキシチタン、テトライソプロポキシチタン、テトラ−n−ブトキシチタン、テトライソブトキシチタン、ジイソプロポキシジ−n−ブトキシチタン、ジ−t−ブトキシジイソプロポキシチタン、テトラ−t−ブトキシチタン、テトライソオクチルオキシチタン、テトラステアリルオキシチタンなどが挙げられる。 Examples of the titanium compound represented by the general formula (2) include allyl trimethoxy titanium, allyl triethoxy titanium, diallyl dimethoxy titanium, diallyl diethoxy titanium, allyl amino trimethoxy titanium, tetramethoxy titanium, tetraethoxy titanium, tetra -N-propoxy titanium, tetraisopropoxy titanium, tetra-n-butoxy titanium, tetraisobutoxy titanium, diisopropoxy di-n-butoxy titanium, di-t-butoxy diisopropoxy titanium, tetra-t-butoxy titanium, Examples include tetraisooctyloxytitanium and tetrastearyloxytitanium.
一般式(3)で表されるジルコニウム化合物としては、例えば、アリルトリメトキシジルコニウム、アリルトリエトキシジルコニウム、ジアリルジメトキシジルコニウム、ジアリルジエトキシジルコニウム、アリルアミノトリメトキシジルコニウム、テトラメトキシジルコニウム、テトラエトキシジルコニウム、テトラ−n−プロポキシジルコニウム、テトライソプロポキシジルコニウム、テトラ−n−ブトキシジルコニウム、テトライソブトキシジルコニウム、ジイソプロポキシジ−n−ブトキシジルコニウム、ジ−t−ブトキシジイソプロポキシジルコニウム、テトラ−t−ブトキシジルコニウム、テトライソオクチルオキシジルコニウム、テトラステアリルオキシジルコニウムなどが挙げられる。 Examples of the zirconium compound represented by the general formula (3) include allyltrimethoxyzirconium, allyltriethoxyzirconium, diallyldimethoxyzirconium, diallyldiethoxyzirconium, allylaminotrimethoxyzirconium, tetramethoxyzirconium, tetraethoxyzirconium, tetra -N-propoxyzirconium, tetraisopropoxyzirconium, tetra-n-butoxyzirconium, tetraisobutoxyzirconium, diisopropoxydi-n-butoxyzirconium, di-t-butoxydiisopropoxyzirconium, tetra-t-butoxyzirconium, Examples thereof include tetraisooctyloxyzirconium and tetrastearyloxyzirconium.
本発明において用いられる表面被覆膜形成用組成物は、Si、Ti、Zrの元素の化合物類のいずれか2種以上を用いることを要する。これらのうち、特に、シラン化合物とチタン化合物、あるいは、シラン化合物とジルコニウム化合物を組み合わせて用いることが好ましい。 The composition for forming a surface coating film used in the present invention needs to use any two or more of elemental compounds of Si, Ti, and Zr. Of these, it is particularly preferable to use a silane compound and a titanium compound or a combination of a silane compound and a zirconium compound.
シラン化合物とチタン化合物との比は、それぞれが酸化物となった際の質量比、すなわち、SiO2換算とTiO2換算での質量比で、1:99〜97:3となるようにして使用することが好ましく、3:97〜80:20とすることがより好ましく、5:95〜75:25とすることがさらに好ましく、10:90〜60:40とすることが特に好ましい。
また、シラン化合物とジルコニウム化合物との比は、それぞれが酸化物となった際の質量比、すなわち、SiO2換算とZrO2換算での質量比で、1:99〜97:3となるようにして使用することが好ましく、3:97〜97:3とすることがより好ましく、5:95〜95:5とすることがさらに好ましく、10:90〜80:20とすることが特に好ましい。
The ratio of the silane compound to the titanium compound is such that the mass ratio when each becomes an oxide, that is, the mass ratio in terms of SiO 2 and TiO 2 is 1:99 to 97: 3. Preferably, it is set to 3:97 to 80:20, more preferably 5:95 to 75:25, still more preferably 10:90 to 60:40.
The ratio of the silane compound to the zirconium compound is 1:99 to 97: 3 in terms of the mass ratio when each becomes an oxide, that is, the mass ratio in terms of SiO 2 and ZrO 2. Are preferably used, more preferably 3:97 to 97: 3, still more preferably 5:95 to 95: 5, and particularly preferably 10:90 to 80:20.
上記加水分解生成物は、Si、Ti、Zrの元素の化合物類を混合し、水及び酸触媒の存在下で加水分解することにより得ることができる。酸触媒は有機酸、無機酸のいずれも使用できる。
なお、本発明においては、Si、Ti、Zrのうちいずれか1つを有する加水分解生成物を用い、その他の金属化合物については加水分解生成物以外の上記化合物類を添加したものを用いることができる。
The hydrolysis product can be obtained by mixing Si, Ti and Zr element compounds and hydrolyzing them in the presence of water and an acid catalyst. As the acid catalyst, either an organic acid or an inorganic acid can be used.
In the present invention, a hydrolysis product having any one of Si, Ti, and Zr is used, and other metal compounds to which the above compounds other than the hydrolysis product are added are used. it can.
無機酸としては、硫酸、リン酸、硝酸、塩酸などが使用でき、中でも、塩酸、硝酸が好適である。 As the inorganic acid, sulfuric acid, phosphoric acid, nitric acid, hydrochloric acid and the like can be used, and among them, hydrochloric acid and nitric acid are preferable.
有機酸としては、ギ酸、シュウ酸、フマル酸、マレイン酸、氷酢酸、無水酢酸、プロピオン酸、n−酪酸などのカルボン酸及び硫黄含有酸残基をもつ有機酸が用いられる。上記硫黄含有酸残基をもつ有機酸としては、有機スルホン酸が挙げられ、それらのエステル化物としては有機硫酸エステル、有機亜硫酸エステルなどが挙げられる。 As the organic acid, carboxylic acids such as formic acid, oxalic acid, fumaric acid, maleic acid, glacial acetic acid, acetic anhydride, propionic acid, n-butyric acid, and organic acids having a sulfur-containing acid residue are used. Examples of the organic acid having a sulfur-containing acid residue include organic sulfonic acids, and examples of esterified products thereof include organic sulfates and organic sulfites.
使用する酸触媒の量は、例えば、加水分解反応の反応系中の濃度が1〜1000ppm、特に5〜800ppmの範囲になるように調製すればよい。この範囲にすることにより、加水分解生成物の析出及び経時変化を抑制することができる。また、水の添加量は、加水分解させるシラン化合物、チタン化合物、及び/又はジルコニウム化合物の合計1モル当たり、0.2〜4.0モルの範囲が好ましい。酸触媒は水を添加した後に加えてもよいし、あるいは、酸触媒と水とを予め混合してなる酸水溶液として加えてもよい。 What is necessary is just to prepare the quantity of the acid catalyst to be used, for example so that the density | concentration in the reaction system of a hydrolysis reaction may become the range of 1-1000 ppm, especially 5-800 ppm. By setting it as this range, precipitation of a hydrolysis product and a time-dependent change can be suppressed. Further, the amount of water added is preferably in the range of 0.2 to 4.0 moles per mole of the total of the silane compound, titanium compound, and / or zirconium compound to be hydrolyzed. The acid catalyst may be added after adding water, or may be added as an acid aqueous solution obtained by previously mixing the acid catalyst and water.
この加水分解は、上記シラン化合物、チタン化合物及びジルコニウム化合物の他に、適宜必要量の有機溶剤を混合して行われる。この有機溶剤としては、後述のエチルアルコールなどのアルコール類を用いることができる。 This hydrolysis is performed by appropriately mixing a necessary amount of an organic solvent in addition to the silane compound, titanium compound and zirconium compound. As the organic solvent, alcohols such as ethyl alcohol described later can be used.
また、表面被覆膜形成用組成物中の固形分濃度を調整するため、さらに、従来公知の有機溶剤で希釈してもよい。それらの中でも例えば、メチルアルコール、エチルアルコール、プロピルアルコール、ブチルアルコールのような一価アルコール類や、アセトン、アセチルアセトン、メチルエチルケトン、メチルイソアミルケトンのようなケトン類が好適に挙げられる。上記有機溶剤は単独でも、2種以上を組み合わせて用いてもよい。 Moreover, in order to adjust the solid content concentration in the composition for forming a surface coating film, it may be further diluted with a conventionally known organic solvent. Among them, for example, monohydric alcohols such as methyl alcohol, ethyl alcohol, propyl alcohol, and butyl alcohol, and ketones such as acetone, acetylacetone, methyl ethyl ketone, and methyl isoamyl ketone are preferable. The above organic solvents may be used alone or in combination of two or more.
表面被覆膜形成用組成物におけるシラン化合物、チタン化合物、ジルコニウム化合物及びこれらの加水分解生成物の固形分濃度(Si、Ti、Zrの元素の化合物類それぞれの酸化物換算質量の合計)は、1〜20質量%、好ましくは2〜15質量%となるようにするのが好ましい。 The solid content concentration of the silane compound, titanium compound, zirconium compound, and hydrolysis products thereof in the composition for forming a surface coating film (total of oxide equivalent masses of each of Si, Ti, and Zr element compounds) is: It is preferable to be 1 to 20% by mass, preferably 2 to 15% by mass.
〔2〕表面被覆膜形成方法
本発明の表面被覆膜形成用組成物を用いて表面被覆膜を形成するには、被覆対象母材上に本発明の表面被覆膜形成用組成物を塗布し、焼成すればよい。この表面被覆膜形成方法は、高価な真空装置を必要とせず、作業も簡易に行うことができるため、最終製品のコストを低減できる。
[2] Method for forming surface coating film In order to form a surface coating film using the composition for forming a surface coating film of the present invention, the composition for forming a surface coating film of the present invention is formed on a base material to be coated. May be applied and fired. Since this surface coating film forming method does not require an expensive vacuum apparatus and can be easily performed, the cost of the final product can be reduced.
具体的には、例えば、本発明の表面被覆膜形成用組成物を所定の膜厚となるように、被覆対象母材上に、スピンコート法、スプレー法、インクジェット法、スクリーン印刷法、転写印刷法などの塗布又は印刷方法を用いる。その際、塗布膜の膜厚は、適用するデバイスにより焼成後に必要な膜厚を考慮して適宜選択される。 Specifically, for example, a spin coating method, a spray method, an ink jet method, a screen printing method, and a transfer are performed on a base material to be coated so that the composition for forming a surface coating film of the present invention has a predetermined film thickness. A coating or printing method such as a printing method is used. At that time, the film thickness of the coating film is appropriately selected in consideration of the film thickness required after firing depending on the device to be applied.
次いで、塗布された表面被覆膜形成用組成物を、ホットプレート、加熱乾燥炉などで加熱して溶剤を揮発させた後、さらに焼成炉中で焼成して、有機基の脱離及びSi、TiあるいはZrの酸化物を生成させる。この際の焼成温度は、例えば、200℃以上、好ましくは、250〜1000℃程度で行う。通常、焼成に要する時間は、1秒〜180分の広い範囲で選ぶことが可能であるが、太陽電池などの量産性が要求されるプロセスでは、3秒〜30分の範囲が望ましい。 Next, the applied composition for forming a surface coating film is heated in a hot plate, a heating and drying furnace or the like to volatilize the solvent, and further baked in a baking furnace to remove organic groups and Si, Ti or Zr oxide is formed. The firing temperature at this time is, for example, 200 ° C. or higher, preferably about 250 to 1000 ° C. Usually, the time required for firing can be selected in a wide range of 1 second to 180 minutes, but in a process requiring mass productivity such as a solar cell, a range of 3 seconds to 30 minutes is desirable.
また、焼成の際、上記塗布膜を真空又はガス雰囲気下で加熱することが好ましい。用いるガスとしては、酸素、窒素、水素、アルゴン及びこれらの混合雰囲気など、特に限定されることなく、目的に応じ使用できる。窒素、アルゴンなどの不活性ガスを用いると、表面被覆膜に欠陥が生じにくいため好ましい。特に、表面被覆膜を半導体のパッシベーション膜として設ける場合には、不活性ガス中で焼成を行うことは膜の特性が向上するために好ましい。また、混合雰囲気の場合は、上記不活性ガスと水素ガス又は酸素ガスなどの活性ガスを混合することが好ましく、活性ガスを全体の1〜10%の範囲で混合させることが好ましい。 Moreover, it is preferable to heat the said coating film in a vacuum or gas atmosphere in the case of baking. The gas to be used is not particularly limited, such as oxygen, nitrogen, hydrogen, argon, and a mixed atmosphere thereof, and can be used according to the purpose. It is preferable to use an inert gas such as nitrogen or argon because defects hardly occur in the surface coating film. In particular, when the surface coating film is provided as a semiconductor passivation film, firing in an inert gas is preferable because the characteristics of the film are improved. Moreover, in the case of a mixed atmosphere, it is preferable to mix the inert gas and an active gas such as hydrogen gas or oxygen gas, and it is preferable to mix the active gas in a range of 1 to 10% of the whole.
〔3〕表面被覆膜の適用先
被覆対象母材としては、樹脂、ガラス、半導体など、様々なものが特に制限なく使用でき、適用される最終製品も様々である。表面被覆膜の使用目的としては、絶縁膜、反射防止膜、半導体のパッシベーション膜としての使用が考えられるが、特に太陽電池の反射防止膜やパッシベーション膜として適用すると有効である。
[3] Application destination of surface coating film As a base material to be coated, various materials such as resin, glass, and semiconductor can be used without particular limitation, and various end products are applied. The surface coating film can be used as an insulating film, an antireflection film, or a semiconductor passivation film, but is particularly effective when applied as an antireflection film or a passivation film for solar cells.
上記太陽電池は、シリコン基板と、シリコン基板の受光面(太陽光が入射する側の表面)上、あるいは、反対面に形成されたSi、TiあるいはZrの元素から選択される2種以上の元素を有するパッシベーション膜とを含む。 The solar cell is composed of a silicon substrate and two or more elements selected from Si, Ti, and Zr elements formed on the light receiving surface of the silicon substrate (the surface on which sunlight is incident) or on the opposite surface. And a passivation film.
このような構成をとることにより、シリコン基板表面に存在する界面準位を介して、キャリアが再結合をして失われることを防止し、太陽電池の最大電力を向上させることができる。また、その高い屈折率から、シリコン基板の受光面に複合膜が設けられた場合には、反射防止膜としても機能することができるので、太陽光の反射を防止し、結果として、太陽電池の最大電力をさらに向上させることができる。また、表面の保護や反射防止能を向上するために、本発明の作成方法を用いて設けた表面被覆膜の外側に、他の膜をさらに設けてもよい。 By adopting such a configuration, it is possible to prevent carriers from being recombined and lost through the interface states existing on the silicon substrate surface, and to improve the maximum power of the solar cell. In addition, because of its high refractive index, when a composite film is provided on the light receiving surface of the silicon substrate, it can also function as an antireflection film, thus preventing reflection of sunlight and, as a result, of the solar cell. The maximum power can be further improved. Further, in order to improve the surface protection and antireflection ability, another film may be further provided outside the surface coating film provided by using the production method of the present invention.
次に、本発明を実施例に基づいてさらに詳細に説明するが、本発明はこれに限定されるものではない。 Next, the present invention will be described in more detail based on examples, but the present invention is not limited thereto.
<塗布液合成例1>
テトライソプロポキシチタン284gと氷酢酸90gとエチルアルコール1795gとを室温で攪拌しながら混合した。混合してすぐに若干の発熱が発生し、反応が進む。そのまま3時間攪拌をつづけ、ついでアセチルアセトン480gを加え、さらに攪拌をつづけ、3時間攪拌した。このようにして固形分濃度3質量%の酸化チタン被膜形成用塗布液を得た。
<Coating liquid synthesis example 1>
284 g of tetraisopropoxy titanium, 90 g of glacial acetic acid and 1795 g of ethyl alcohol were mixed at room temperature with stirring. Immediately after mixing, a slight exotherm occurs and the reaction proceeds. Stirring was continued for 3 hours, and then 480 g of acetylacetone was added, followed by further stirring and stirring for 3 hours. In this way, a coating solution for forming a titanium oxide film having a solid content concentration of 3% by mass was obtained.
<塗布液合成例2>
テトラエトキシシラン208gとエチルアルコール700gと氷酢酸228gを室温で攪拌しながら混合した。攪拌しながら純水17gと濃塩酸1.7gを加え、さらに攪拌をつづけ、3時間攪拌した。1日室温で放置した後、さらにエチルアルコール1039gを攪拌しながら混合した。このようにして固形分濃度3質量%の酸化ケイ素被膜形成用塗布液を得た。
<Coating liquid synthesis example 2>
208 g of tetraethoxysilane, 700 g of ethyl alcohol and 228 g of glacial acetic acid were mixed at room temperature with stirring. While stirring, 17 g of pure water and 1.7 g of concentrated hydrochloric acid were added, and stirring was continued, followed by stirring for 3 hours. After leaving at room temperature for 1 day, 1039 g of ethyl alcohol was further mixed with stirring. In this way, a coating solution for forming a silicon oxide film having a solid content concentration of 3% by mass was obtained.
<塗布液合成例3>
テトライソプロポキシチタンの代わりにテトラ−n−ブトキシジルコニウムを用いた以外は塗布液合成例1と同様にして、固形分濃度3質量%の酸化ジルコニウム被膜形成用塗布液を得た。
<Coating liquid synthesis example 3>
A coating solution for forming a zirconium oxide film having a solid content concentration of 3% by mass was obtained in the same manner as in Coating solution synthesis example 1 except that tetra-n-butoxyzirconium was used instead of tetraisopropoxytitanium.
以下の実施例、比較例における少数キャリアのライフタイム、表面再結合速度の評価条件を記載する。
(ライフタイム)
ライフタイムは擬定常状態光導電法(QSSPC法)により測定した。測定器にはSinton社製の測定器を用いた。なお、実施例、比較例におけるライフタイムは、過剰キャリア密度が1015cm−3での値である。
(表面再結合速度)
上記(ライフタイムの測定)で測定した値に基づき、以下の式に従って表面再結合速度Sを求めた。式中、Wはウェハー厚を示し、τeffは実効ライフタイムを示し、τbulkはバルクライフタイムを示す。なお、実効ライフタイムが大きいほど、表面再結合速度Sは小さくなる。
The evaluation conditions of the minority carrier lifetime and surface recombination velocity in the following examples and comparative examples are described.
(lifetime)
The lifetime was measured by a quasi-steady state photoconductive method (QSSPC method). A measuring instrument manufactured by Sinton was used as the measuring instrument. In addition, the lifetime in an Example and a comparative example is a value in which excess carrier density is 10 < 15 > cm <-3> .
(Surface recombination speed)
Based on the value measured in the above (lifetime measurement), the surface recombination velocity S was determined according to the following equation. In the equation, W represents the wafer thickness, τ eff represents the effective lifetime, and τ bulk represents the bulk lifetime. Note that the surface recombination velocity S decreases as the effective lifetime increases.
(実施例1)
塗布液合成例1で得られた塗布液800gと塗布液合成例2で得られた塗布液200gとを攪拌しながら混合して、二酸化チタン及び二酸化ケイ素換算で8:2(質量比)の塗布液を得た。
Example 1
The coating liquid 800 g obtained in the coating liquid synthesis example 1 and the coating liquid 200 g obtained in the coating liquid synthesis example 2 are mixed with stirring, and the coating is 8: 2 (mass ratio) in terms of titanium dioxide and silicon dioxide. A liquid was obtained.
このようにして得られた実施例1の塗布液を、p型シリコンウェハーの両面にスピンコーターにて4000rpmで塗布し、140℃で1分間ホットプレートにて乾燥し、加熱炉にて窒素雰囲気下、600℃、15分間の焼成を行った。その結果、膜厚48nm、屈折率2.07の酸化チタン及び酸化ケイ素の複合被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、312μsであった。また、表面再結合速度Sは99cm/sであった。 The coating solution of Example 1 thus obtained was applied to both sides of a p-type silicon wafer at 4000 rpm with a spin coater, dried on a hot plate at 140 ° C. for 1 minute, and then in a nitrogen atmosphere in a heating furnace. And baking at 600 ° C. for 15 minutes. As a result, a composite coating of titanium oxide and silicon oxide having a film thickness of 48 nm and a refractive index of 2.07 was obtained. It was 312 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Moreover, the surface recombination velocity S was 99 cm / s.
また、実施例1の塗布液を、n型シリコンウェハーの両面にスピンコーターにて4000rpmで塗布し、140℃で1分間ホットプレートにて乾燥し、加熱炉にて窒素雰囲気下、600℃、15分間の焼成を行った。その結果、膜厚49nm、屈折率2.08の酸化チタン及び酸化ケイ素の複合被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、1030μsであった。また、表面再結合速度Sは30cm/sであった。 Further, the coating liquid of Example 1 was applied to both surfaces of an n-type silicon wafer at 4000 rpm with a spin coater, dried on a hot plate at 140 ° C. for 1 minute, and 600 ° C., 15 in a heating furnace under a nitrogen atmosphere. Baked for minutes. As a result, a composite coating of titanium oxide and silicon oxide having a film thickness of 49 nm and a refractive index of 2.08 was obtained. It was 1030 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Further, the surface recombination speed S was 30 cm / s.
(実施例2)
塗布液合成例1で得られた塗布液500gと塗布液合成例2で得られた塗布液500gとを混合した以外は実施例1と同様にして、二酸化チタン及び二酸化ケイ素換算で5:5(質量比)の塗布液を得た。
(Example 2)
5: 5 in terms of titanium dioxide and silicon dioxide in the same manner as in Example 1 except that 500 g of the coating liquid obtained in Synthesis Example 1 of the coating solution and 500 g of the coating solution obtained in Synthesis Example 2 of the coating solution were mixed. (Mass ratio) coating solution was obtained.
続いて、実施例2の塗布液を、実施例1と同様にしてp型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚52nm、屈折率1.74の酸化チタンと酸化ケイ素の複合被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、267μsであった。また、表面再結合速度Sは116cm/sであった。 Subsequently, the coating liquid of Example 2 was applied to both sides of the p-type silicon wafer in the same manner as in Example 1, and then baked to form a composite of titanium oxide and silicon oxide having a film thickness of 52 nm and a refractive index of 1.74. A coating was obtained. It was 267 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Further, the surface recombination velocity S was 116 cm / s.
また、実施例2の塗布液を、実施例1と同様にしてn型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚51nm、屈折率1.73の酸化チタン及び酸化ケイ素の複合被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、852μsであった。また、表面再結合速度Sは36cm/sであった。 In addition, the coating liquid of Example 2 was applied to both surfaces of an n-type silicon wafer in the same manner as in Example 1, and then baked to form a composite film of titanium oxide and silicon oxide having a film thickness of 51 nm and a refractive index of 1.73. Got. It was 852 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. The surface recombination velocity S was 36 cm / s.
(実施例3)
塗布液合成例1で得られた塗布液900gと塗布液合成例2で得られた塗布液100gとを混合した以外は実施例1と同様にして、二酸化チタン及び二酸化ケイ素換算で9:1(質量比)の塗布液を得た。
(Example 3)
9: 1 (in terms of titanium dioxide and silicon dioxide) in the same manner as in Example 1 except that 900 g of the coating solution obtained in Coating Solution Synthesis Example 1 and 100 g of the coating solution obtained in Coating Solution Synthesis Example 2 were mixed. (Mass ratio) coating solution was obtained.
続いて、実施例3の塗布液を、実施例1と同様にしてp型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚48nm、屈折率2.18の酸化チタン及び酸化ケイ素の複合被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、245μsであった。また、表面再結合速度Sは127cm/sであった。 Subsequently, the coating liquid of Example 3 was applied to both sides of the p-type silicon wafer in the same manner as in Example 1, and then baked to form a composite of titanium oxide and silicon oxide having a film thickness of 48 nm and a refractive index of 2.18. A coating was obtained. It was 245 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Further, the surface recombination velocity S was 127 cm / s.
また、実施例3の塗布液を、実施例1と同様にしてn型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚49nm、屈折率2.17の酸化チタン及び酸化ケイ素の複合被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、897μsであった。また、表面再結合速度Sは34cm/sであった。 In addition, the coating liquid of Example 3 was applied to both surfaces of an n-type silicon wafer in the same manner as in Example 1, and then baked to form a composite film of titanium oxide and silicon oxide having a film thickness of 49 nm and a refractive index of 2.17. Got. It was 897 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Further, the surface recombination velocity S was 34 cm / s.
(実施例4)
塗布液合成例1で得られた塗布液600gと塗布液合成例2で得られた塗布液400gとを混合した以外は実施例1と同様にして、二酸化チタン及び二酸化ケイ素換算で6:4(質量比)の塗布液を得た。
(Example 4)
Except for mixing 600 g of the coating liquid obtained in the coating liquid synthesis example 1 and 400 g of the coating liquid obtained in the coating liquid synthesis example 2, 6: 4 (in terms of titanium dioxide and silicon dioxide) in the same manner as in Example 1. (Mass ratio) coating solution was obtained.
続いて、実施例4の塗布液を、実施例1と同様にしてp型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚48nm、屈折率1.83の酸化チタン及び酸化ケイ素の複合被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、296μsであった。また、表面再結合速度Sは105cm/sであった。 Subsequently, the coating liquid of Example 4 was applied to both sides of the p-type silicon wafer in the same manner as in Example 1, and then baked to form a composite of titanium oxide and silicon oxide having a film thickness of 48 nm and a refractive index of 1.83. A coating was obtained. It was 296 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Further, the surface recombination velocity S was 105 cm / s.
また、実施例4の塗布液を、実施例1と同様にしてn型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚48nm、屈折率1.83の酸化チタン及び酸化ケイ素の複合被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、1090μsであった。また、表面再結合速度Sは27cm/sであった。 In addition, the coating solution of Example 4 was applied to both sides of an n-type silicon wafer in the same manner as in Example 1, and then baked to form a composite film of titanium oxide and silicon oxide having a film thickness of 48 nm and a refractive index of 1.83. Got. It was 1090 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Further, the surface recombination velocity S was 27 cm / s.
(実施例5)
塗布液合成例1で得られた塗布液400gと塗布液合成例2で得られた塗布液600gとを混合した以外は実施例1と同様にして、二酸化チタン及び二酸化ケイ素換算で4:6(質量比)の塗布液を得た。
(Example 5)
4: 6 (in terms of titanium dioxide and silicon dioxide) in the same manner as in Example 1, except that 400 g of the coating liquid obtained in Coating Solution Synthesis Example 1 and 600 g of the coating solution obtained in Coating Solution Synthesis Example 2 were mixed. (Mass ratio) coating solution was obtained.
続いて、実施例5の塗布液を、実施例1と同様にしてp型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚62nm、屈折率1.66の酸化チタン及び酸化ケイ素の複合被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、203μsであった。また、表面再結合速度Sは153cm/sであった。 Subsequently, the coating solution of Example 5 was applied to both sides of the p-type silicon wafer in the same manner as in Example 1, and then baked to form a composite of titanium oxide and silicon oxide having a film thickness of 62 nm and a refractive index of 1.66. A coating was obtained. It was 203 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Further, the surface recombination velocity S was 153 cm / s.
また、実施例5の塗布液を、実施例1と同様にしてn型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚60nm、屈折率1.66の酸化チタン及び酸化ケイ素の複合被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、688μsであった。また、表面再結合速度Sは45cm/sであった。 Further, the coating liquid of Example 5 was applied to both surfaces of an n-type silicon wafer in the same manner as in Example 1, and then baked to form a composite film of titanium oxide and silicon oxide having a film thickness of 60 nm and a refractive index of 1.66. Got. It was 688 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Further, the surface recombination velocity S was 45 cm / s.
(比較例1)
塗布液合成例1で得られた塗布液を、実施例1と同様にしてp型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚50nm、屈折率2.19の酸化チタン(TiO2(100%))被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、42μsであった。また、表面再結合速度Sは743cm/sであった。
(Comparative Example 1)
The coating solution obtained in Coating Solution Synthesis Example 1 was applied to both sides of a p-type silicon wafer in the same manner as in Example 1, and then baked to form titanium oxide (TiO 2 having a thickness of 50 nm and a refractive index of 2.19). (100%)) A coating was obtained. It was 42 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Further, the surface recombination velocity S was 743 cm / s.
また、塗布液合成例1で得られた塗布液を、実施例1と同様にしてn型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚49nm、屈折率2.19の酸化チタン(TiO2(100%))被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、61μsであった。また、表面再結合速度Sは509cm/sであった。 In addition, the coating liquid obtained in the coating liquid synthesis example 1 was applied to both surfaces of an n-type silicon wafer in the same manner as in Example 1, and then baked to form a titanium oxide having a film thickness of 49 nm and a refractive index of 2.19 ( A TiO 2 (100%)) coating was obtained. It was 61 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Further, the surface recombination velocity S was 509 cm / s.
(比較例2)
塗布液合成例2で得られた塗布液を、実施例1と同様にしてp型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚74nm、屈折率1.43の酸化ケイ素(SiO2(100%))被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、10μsであった。また、表面再結合速度Sは3124cm/sであった。
(Comparative Example 2)
The coating liquid obtained in coating liquid synthesis example 2 was applied to both sides of a p-type silicon wafer in the same manner as in Example 1, and then baked to form silicon oxide (SiO 2 having a film thickness of 74 nm and a refractive index of 1.43. (100%)) A coating was obtained. It was 10 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. The surface recombination speed S was 3124 cm / s.
また、塗布液合成例2で得られた塗布液を、実施例1と同様にしてn型シリコンウェハーの両面に塗布した後、焼成を行い、膜厚71nm、屈折率1.42の酸化ケイ素(SiO2(100%))被膜を得た。表面被覆膜形成後のシリコンウェハーを用いてライフタイムを測定したところ、34μsであった。また、表面再結合速度Sは910cm/sであった。 In addition, the coating liquid obtained in the coating liquid synthesis example 2 was applied to both surfaces of the n-type silicon wafer in the same manner as in Example 1, and then baked to form silicon oxide having a film thickness of 71 nm and a refractive index of 1.42 ( It was obtained SiO 2 (100%)) coating. It was 34 microseconds when the lifetime was measured using the silicon wafer after surface coating film formation. Further, the surface recombination velocity S was 910 cm / s.
上記の結果をまとめて表1、2に示す。 The above results are summarized in Tables 1 and 2.
表1に示すとおり、p型シリコンウェハー上の評価において、酸化チタン単独被膜や酸化ケイ素単独被膜ではライフタイムが50μs以下であったが、酸化チタン及び酸化ケイ素の複合被膜では、二酸化チタン:二酸化ケイ素の比率が4:6〜9:1(中でも6:4〜8:2)の範囲で大幅なライフタイムの向上がみられた。特に、二酸化チタン:二酸化ケイ素=8:2の比率では300μsを超える値を示し、半導体のパッシベーション膜としての特性に優れることが判明した。
また、表2に示すとおり、n型シリコンウェハー上の評価においては、ライフタイムの向上がさらに顕著であることが分かり、二酸化チタン:二酸化ケイ素の比率が4:6〜9:1の範囲で大幅なライフタイムの向上がみられ、特に6:4〜8:2の範囲で1000μsを超える値を示した。
したがって、この表面被覆膜を太陽電池のパッシベーション膜として適用した場合には、発電効率の向上を図ることができると期待できる。
As shown in Table 1, in the evaluation on the p-type silicon wafer, the lifetime of the titanium oxide single coating or the silicon oxide single coating was 50 μs or less. However, in the composite coating of titanium oxide and silicon oxide, the titanium dioxide: silicon dioxide In the range of 4: 6 to 9: 1 (in particular, 6: 4 to 8: 2), the lifetime was significantly improved. In particular, the ratio of titanium dioxide: silicon dioxide = 8: 2 shows a value exceeding 300 μs, and it has been found that the characteristics as a semiconductor passivation film are excellent.
Moreover, as shown in Table 2, in the evaluation on the n-type silicon wafer, it was found that the improvement of the lifetime was more remarkable, and the ratio of titanium dioxide: silicon dioxide was greatly increased in the range of 4: 6 to 9: 1. Lifetime improvement was observed, and a value exceeding 1000 μs was shown particularly in the range of 6: 4 to 8: 2.
Therefore, when this surface coating film is applied as a passivation film of a solar cell, it can be expected that the power generation efficiency can be improved.
(実施例6〜8、比較例3〜8)
つづいて、p型シリコンウェハー上の評価においてライフタイムの測定結果が良好であったもののうち上記実施例1について、焼成雰囲気をArガス、Ar+H2(3%)の混合ガス、N2+O2(5%)の混合ガス、にそれぞれ変更した他は同様にしてライフタイムを測定した。上記比較例1,2の被膜についてもそれぞれ同様に焼成雰囲気を変更してライフタイムを測定した。それらの結果を表3に示す。
(Examples 6-8, Comparative Examples 3-8)
Continuing, with respect to the above-mentioned Example 1 in which the lifetime measurement result was good in the evaluation on the p-type silicon wafer, the firing atmosphere was Ar gas, Ar + H 2 (3%) mixed gas, N 2 + O 2 ( The lifetime was measured in the same manner except that the gas mixture was changed to 5%). For the coating films of Comparative Examples 1 and 2, the lifetime was measured by changing the firing atmosphere in the same manner. The results are shown in Table 3.
以上の結果より、焼成雰囲気を変更しても、酸化チタン及び酸化ケイ素の複合被膜では大幅なライフタイムの向上がみられることが確認できた。 From the above results, it was confirmed that even if the firing atmosphere was changed, the composite coating of titanium oxide and silicon oxide showed a significant improvement in lifetime.
(実施例9〜14、比較例9〜10)
塗布液合成例2で得られた塗布液と塗布液合成例3で得られた塗布液とを用いて、上記実施例1〜5と同様にして、表4〜5に示す各質量比の実施例9〜14の塗布液を得た。また、比較例9としては塗布液合成例3の塗布液を用い、比較例10としては塗布液合成例2の塗布液を用いた。なお、質量比については、二酸化ジルコニア及び二酸化ケイ素換算とする。
(Examples 9-14, Comparative Examples 9-10)
Using the coating solution obtained in Coating Solution Synthesis Example 2 and the coating solution obtained in Coating Solution Synthesis Example 3, the mass ratios shown in Tables 4 to 5 were carried out in the same manner as in Examples 1 to 5 above. The coating liquid of Examples 9-14 was obtained. Further, as the comparative example 9, the coating liquid of the coating liquid synthesis example 3 was used, and as the comparative example 10, the coating liquid of the coating liquid synthesis example 2 was used. In addition, about mass ratio, it is set as zirconia dioxide and silicon dioxide conversion.
続いて、各例の塗布液を、実施例1と同様にしてp型シリコンウェハー又はn型シリコンウェハーの両面に塗布した後、焼成を行い、表面被覆膜を形成した。表面被覆膜の膜厚、屈折率、ライフタイム、表面再結合速度Sの結果を表4、5に示す。 Then, after apply | coating the coating liquid of each example to both surfaces of a p-type silicon wafer or an n-type silicon wafer like Example 1, it baked and formed the surface coating film. Tables 4 and 5 show the results of the film thickness, refractive index, lifetime, and surface recombination velocity S of the surface coating film.
表4、5に示すとおり、酸化ジルコニウム及び酸化ケイ素の複合被膜とした場合も、酸化ジルコニウム単独被膜や酸化ケイ素単独被膜と比べてライフタイムが向上することが確認できた。特に、二酸化ジルコニウム:二酸化ケイ素の比率が、p型シリコンウェハーの場合は8:2〜2:8の範囲、n型シリコンウェハーの場合は9:1〜2:8の範囲で大幅なライフタイムの向上がみられ、半導体のパッシベーション膜としての特性に優れることが判明した。
したがって、この表面被覆膜を太陽電池のパッシベーション膜として適用した場合には、発電効率の向上を図ることができると期待できる。
As shown in Tables 4 and 5, it was confirmed that the lifetime was improved in the composite coating of zirconium oxide and silicon oxide as compared with the zirconium oxide single coating and the silicon oxide single coating. In particular, the ratio of zirconium dioxide: silicon dioxide is in the range of 8: 2 to 2: 8 in the case of p-type silicon wafers, and in the range of 9: 1 to 2: 8 in the case of n-type silicon wafers. The improvement was observed, and it was found that the characteristics as a semiconductor passivation film were excellent.
Therefore, when this surface coating film is applied as a passivation film of a solar cell, it can be expected that the power generation efficiency can be improved.
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Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5583272A (en) * | 1978-12-19 | 1980-06-23 | Nec Corp | Solar battery unit and method of manufacturing the same |
JPS57162472A (en) * | 1981-03-31 | 1982-10-06 | Matsushita Electric Ind Co Ltd | Solar battery and manufacture thereof |
JPH05315628A (en) * | 1992-05-08 | 1993-11-26 | Sharp Corp | Manufacture of photoelectric conversion device |
JPH07325201A (en) * | 1994-04-08 | 1995-12-12 | Nippon Ee R C Kk | High refractive index coating composition and coated article obtained by the same |
JP2003179240A (en) * | 2001-12-10 | 2003-06-27 | Sharp Corp | Solar battery and manufacturing method thereof |
JP2004050138A (en) * | 2002-07-24 | 2004-02-19 | Taki Chem Co Ltd | Application method of coating composition |
JP2006287027A (en) * | 2005-04-01 | 2006-10-19 | Sharp Corp | Solar cell |
JP2006330742A (en) * | 2006-06-09 | 2006-12-07 | Dainippon Printing Co Ltd | Antireflection film |
US20070116966A1 (en) * | 2005-11-22 | 2007-05-24 | Guardian Industries Corp. | Solar cell with antireflective coating with graded layer including mixture of titanium oxide and silicon oxide |
JP2008202033A (en) * | 2007-01-26 | 2008-09-04 | Toray Ind Inc | Siloxane-based resin composition, optical device using the same and method for preparing siloxane-based resin composition |
JP2011077306A (en) * | 2009-09-30 | 2011-04-14 | Ulvac Japan Ltd | Solar cell and manufacturing method of the same |
JP2011082247A (en) * | 2009-10-05 | 2011-04-21 | Tokyo Ohka Kogyo Co Ltd | Diffusing agent composition, method of forming impurity diffusion layer, and solar battery |
JP2013197556A (en) * | 2012-03-23 | 2013-09-30 | Panasonic Corp | Solar battery and method for manufacturing the same |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6768048B2 (en) * | 2002-12-04 | 2004-07-27 | The Boeing Company | Sol-gel coatings for solar cells |
US20090181256A1 (en) * | 2008-01-14 | 2009-07-16 | Guardian Industries Corp. | Methods of making silica-titania coatings, and products containing the same |
CN103081112B (en) * | 2010-09-30 | 2016-08-17 | 三菱综合材料株式会社 | The antireflection film composition of solaode, the antireflection film of solaode, the manufacture method of antireflection film of solaode and solaode |
-
2013
- 2013-02-22 JP JP2013033036A patent/JP2014090153A/en active Pending
- 2013-09-03 CN CN201380050849.3A patent/CN104685611B/en active Active
- 2013-09-03 WO PCT/JP2013/073719 patent/WO2014054372A1/en active Application Filing
- 2013-09-17 TW TW102133667A patent/TWI630725B/en active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5583272A (en) * | 1978-12-19 | 1980-06-23 | Nec Corp | Solar battery unit and method of manufacturing the same |
JPS57162472A (en) * | 1981-03-31 | 1982-10-06 | Matsushita Electric Ind Co Ltd | Solar battery and manufacture thereof |
JPH05315628A (en) * | 1992-05-08 | 1993-11-26 | Sharp Corp | Manufacture of photoelectric conversion device |
JPH07325201A (en) * | 1994-04-08 | 1995-12-12 | Nippon Ee R C Kk | High refractive index coating composition and coated article obtained by the same |
JP2003179240A (en) * | 2001-12-10 | 2003-06-27 | Sharp Corp | Solar battery and manufacturing method thereof |
JP2004050138A (en) * | 2002-07-24 | 2004-02-19 | Taki Chem Co Ltd | Application method of coating composition |
JP2006287027A (en) * | 2005-04-01 | 2006-10-19 | Sharp Corp | Solar cell |
US20070116966A1 (en) * | 2005-11-22 | 2007-05-24 | Guardian Industries Corp. | Solar cell with antireflective coating with graded layer including mixture of titanium oxide and silicon oxide |
JP2006330742A (en) * | 2006-06-09 | 2006-12-07 | Dainippon Printing Co Ltd | Antireflection film |
JP2008202033A (en) * | 2007-01-26 | 2008-09-04 | Toray Ind Inc | Siloxane-based resin composition, optical device using the same and method for preparing siloxane-based resin composition |
JP2011077306A (en) * | 2009-09-30 | 2011-04-14 | Ulvac Japan Ltd | Solar cell and manufacturing method of the same |
JP2011082247A (en) * | 2009-10-05 | 2011-04-21 | Tokyo Ohka Kogyo Co Ltd | Diffusing agent composition, method of forming impurity diffusion layer, and solar battery |
JP2013197556A (en) * | 2012-03-23 | 2013-09-30 | Panasonic Corp | Solar battery and method for manufacturing the same |
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