JP2014083522A - Cleaning device and square plate workpiece transfer method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow a transfer robot to hold a square plate workpiece and house it in a cassette, even if an angular deviation occurs in the square plate workpiece held by a holding table of a cleaning device.SOLUTION: A cleaning device includes a robot hand 50 with two positioning parts 502, and also includes position correction means 7 comprising a traveling direction position correction part 70a opposed to the two positioning parts 502 and for correcting the position of a square plate workpiece W in the traveling direction of the robot hand 50, and a perpendicular direction position correction part 70b for correcting the position of the square plate workpiece W in the direction perpendicular to the traveling direction. A position and an angle of the square plate workpiece W on a holding table 20 can be corrected when the robot hand 50 receives the square plate workpiece W from the holding table 20, and thereby the square plate workpiece W with the corrected position and angle is held by a transfer robot 5 and is transferred and housed in a cassette.

Description

  The present invention relates to a cleaning device for cleaning a square plate workpiece and a transport method for transporting the washed square plate workpiece.

  In various processing apparatuses such as a cutting apparatus and a grinding apparatus, a plate-shaped workpiece is held on a processing holding table, and the holding table rotates, and a tool acts on the rotating plate-shaped workpiece to perform processing. In addition, the plate-shaped workpiece that has been processed is transported to the cleaning step and held on the holding table for cleaning, the holding table is processed, and cleaning liquid is jetted onto the rotating plate-shaped workpiece to perform cleaning. Then, the cleaned plate-like workpiece is held by the transfer robot, transferred to the cassette, and stored.

  In order to reliably convey the plate-like workpiece, the plate-like workpiece is held at a predetermined position on the holding table. When a deviation occurs in the position of the plate-like workpiece, the deviation is corrected (for example, see Patent Document 1).

  In addition, when the plate-like workpiece is rectangular, if the orientation (angle) on the holding table is deviated, it is held and conveyed by the conveyance robot in the presence of the deviation, so the opening of the cassette When the plate-shaped workpiece is inserted from above, the plate-shaped workpiece may come into contact with the cassette and cannot be stored. Therefore, in the holding table, by stopping at a fixed point, the plate-shaped workpiece is prevented from being shifted in angle.

JP 2011-018794 A

  However, since the holding table holds the lower surface of the plate-like workpiece and the transfer robot holds the upper surface of the plate-like workpiece on the holding table, the position and angle of the plate-like workpiece are changed when the holding table is transferred to the transfer robot. Deviation may occur. With the technique disclosed in Patent Document 1, it is possible to correct the positional deviation, but it is not possible to correct the angular deviation.

  In particular, when the plate-like workpiece is a quadrangular shape, if it is held on the holding table in a state where the angle is shifted, it is held by the transfer robot and transferred to the cassette in the state where the shift is present. Therefore, it cannot enter the inside of the cassette from the opening of the cassette, and cannot be stored in the cassette.

  The present invention has been considered in view of such a problem, and even if the square plate-like workpiece held on the holding table has an angle shift, the transfer robot holds the plate-like workpiece and holds the cassette. It is an object to be able to be stored in a container.

  The first invention includes a holding means having a holding table for sucking and holding a square or rectangular square plate-like workpiece, a rotating means for rotating the holding table, and a cleaning means for washing the square plate-like workpiece held by the holding table. In a cleaning apparatus comprising at least a transfer robot for carrying out a square plate workpiece from a holding table, a cassette for storing a square plate workpiece transferred by the transfer robot, and a cassette stage on which the cassette is placed, The transfer robot includes a robot hand having a holding surface for holding a quadrangular workpiece and a mounting portion to which the robot hand is mounted, and at least two positioning portions for positioning the quadrangular workpiece are disposed on the holding surface, The straight line connecting the two positioning parts is perpendicular to the robot hand's forward / backward direction and around the holding table. , Position correction means for correcting the position of the rectangular workpiece held by the holding table is disposed, and the position correction means is one movement direction position arranged opposite to the movement direction of the robot hand with respect to the positioning unit. The correction unit and two orthogonal direction position correction units facing each other in the direction orthogonal to the traveling direction across the holding table, and the traveling direction position correction unit and the orthogonal direction position correction unit are in contact with the side surface of the rectangular workpiece. The robot hand is positioned at a receiving position where it can receive a rectangular workpiece held by the holding table. The pressing portion and an advancing / retreating drive unit that advances and retracts the pressing portion in the radial direction with respect to the center of the holding table. Then, the position and angle of the square plate workpiece are corrected by the position correction means, and the robot hand receives the square plate workpiece with the corrected position and angle. Remove characterized in that accommodated in the cassette.

  A second invention relates to a transport method in which a robot hand receives a square plate-like workpiece held by a holding table and stores the square plate-like workpiece in a cassette using the cleaning device, and the robot positions the robot hand in a receiving position. After the hand positioning step and the robot hand positioning step, the holding table releases the suction holding of the square plate workpiece, presses the pressing portion of the advancing direction position correction portion against the first side surface of the square plate workpiece, and faces the square A first position correction step of positioning the second side surface of the plate-shaped workpiece by contacting the positioning portion of the robot hand, and a direction orthogonal to the advancing direction of the robot hand after the first position correction step Two pressing portions constituting the orthogonal position correcting portion are respectively provided on the third side surface and the fourth side surface of the opposing quadrangular plate workpieces. The robot hand holds the square plate workpiece whose position and angle have been corrected by the second position correction step of pressing and correcting the position of the square plate workpiece, the first position correction step, and the second position correction step. It is composed of a carry-out process for holding the square plate-shaped workpiece from the holding table while holding it on the surface, and a storage step for storing the square plate-shaped workpiece carried out by the carry-out step and held by the robot hand in the cassette. The square plate workpiece to be stored is stored in the cassette.

  The cleaning device according to the present invention includes a traveling direction position correcting unit that corrects the position of the square plate workpiece in the traveling direction of the robot hand, and an orthogonal direction position that corrects the position of the square plate workpiece in the direction orthogonal to the traveling direction. Since the position correcting means including the correcting unit is provided around the holding table, the position and angle of the square plate workpiece can be corrected on the holding table. Therefore, since the square plate workpiece whose position and angle are corrected can be held by the transfer robot and transferred to the cassette, the square plate workpiece can be reliably stored in the cassette.

It is a front view which shows the structure of a washing | cleaning apparatus. It is a top view which shows the structure of the principal part of a washing | cleaning apparatus. It is a top view which shows the state by which the square-plate shaped workpiece | work was hold | maintained at the holding table in the state from which the angle shifted | deviated. It is a front view which shows the state which hold | maintains the square plate-shaped workpiece | work hold | maintained at the holding | maintenance table with the angle shifted by the robot hand. It is a top view which shows the state which corrects the position shift in the advancing direction of a robot hand about the square-plate shaped workpiece | work hold | maintained at the holding table. It is a front view which shows the state which corrects the position shift in the advancing direction of a robot hand about the square-plate shaped workpiece | work hold | maintained at the holding table. It is a top view which shows the state which corrects the position shift in the direction orthogonal to the advancing direction of a robot hand about the square-plate shaped workpiece | work hold | maintained at the holding table. It is a front view which shows the state which carries out the square plate-shaped workpiece | work in which the position and the angle were corrected from the holding table. It is a front view which shows the advancing direction position correction part provided with the spring in the advancing / retreating drive part which drives a pressing part, and an orthogonal direction position correction part. It is a front view which shows the state which the spring of the advancing / retreating drive part contracted. It is a top view which shows another example of the advancing / retreating drive part which comprises an advancing direction position correction part and an orthogonal direction position correction part. It is a top view which shows the 2nd example of a robot hand. It is a front view showing the state where the robot hand holds a square plate work.

A cleaning apparatus 1 shown in FIG. 1 includes a holding unit 2 that holds a plate-shaped workpiece when the plate-shaped workpiece is cleaned,
Cleaning means 3 for cleaning the plate-like workpiece held by the holding means 2, a cassette 4 for storing the plate-like workpiece after cleaning, and a transfer robot for transferring the plate-like workpiece held by the holding means 2 to the cassette 4 5 and a cassette stage 6 on which the cassette 4 is placed. In addition, although this washing | cleaning apparatus 1 may be used as an independent apparatus, it may be mounted and used for other apparatuses, such as a grinding apparatus.

  The holding means 2 includes a holding table 20 that sucks and holds the central part of the plate-like workpiece on the upper surface 200. The holding table 20 includes a suction portion 201 that opens at the upper surface 200.

  The holding table 20 is driven to rotate by a rotating means 21 disposed below the holding table 20. The rotating means 21 includes a rotating shaft 210, a motor 211 that rotates the rotating shaft 210, and a fixed point stopping means 212 that stops the rotating shaft 210 at a predetermined position. The fixed point stopping means 212 can stop the rotation so that the holding table 20 faces a predetermined direction by using, for example, an output from the encoder.

  Inside the rotating shaft 21, an air flow path 213 is formed that communicates with the suction portion 201 formed in the holding table 20 and serves as a passage for air. The air flow path 213 passes through the rotary shaft 21 and selectively communicates with the suction source 25 or the supply source 26 via the opening / closing valve 24. By switching the opening / closing valve 24, the suction source 25 communicates with the air flow path 213 when a suction force is applied to the holding surface 200 to hold the plate-like workpiece, and the supply source 26 is connected to the plate-like workpiece on the holding surface 200. When the suction is released and the plate-shaped workpiece is conveyed, the air flow path 213 communicates.

  The cleaning means 3 includes a cleaning liquid nozzle 30 that ejects the cleaning liquid. The cleaning liquid nozzle 30 has an open front end facing the holding table 20, and can eject the cleaning liquid toward the plate-like workpiece held by the holding table 20. Although not shown, an air nozzle that ejects high-pressure air for drying the plate-like workpiece may be provided separately from the cleaning liquid nozzle 30.

  The cassette 4 includes an opening 40 that opens to the side facing the transfer robot 5, and includes a plurality of slots 41 that are formed in the horizontal direction from the opening 40 toward the back side. Each slot 41 can accommodate a plate-like workpiece.

  The transfer robot 5 includes a robot hand 50 having a holding surface 500 for holding the plate-like workpiece W, a mounting unit 51 to which the robot hand 50 is mounted, an arm unit 52 for moving the robot hand, and moving the arm unit 52 up and down. And a control unit 53 for turning. The mounting portion 51 is rotatable with respect to the arm portion 52 about a horizontal (X-axis direction) axis.

  A suction path 501 that communicates with the suction source 55 via the valve 54 is formed inside the robot hand 50, and the suction path 501 opens at the opening 501 a of the holding surface 500.

  As shown in FIG. 2, the robot hand 50 is formed in a U shape with an opening on the distal end side, and two positioning portions 502 are formed on the base end portion 500 a of the holding surface 500. Each positioning portion 502 protrudes in a direction perpendicular to the holding surface 500, and a shaft portion 502a formed in a columnar shape and a rotation in which an inner peripheral surface is slidably contacted with an outer peripheral surface of the shaft portion 502a. Part 502b. A line connecting the centers of the two positioning portions 502 is directed in a direction (Y-axis direction) perpendicular to the horizontal direction with respect to the traveling direction (X-axis direction) of the robot hand 50.

  As shown in FIG. 2, around the holding table 20, position correcting means 7 for correcting the position of the rectangular workpiece W held on the holding table 20 is disposed. The position adjusting unit 7 is opposed to one positioning direction correction unit 70a disposed facing the positioning unit 502 in the X-axis direction, and the Y-axis direction orthogonal to the X-axis direction with the holding table 5 interposed therebetween. It is comprised from the two orthogonal direction position correction | amendment parts 70b.

  The advancing direction position correcting unit 70 a and the orthogonal direction position correcting unit 70 b are pressed in the radial direction with reference to the pressing unit 700 that contacts the side surface of the square plate-like workpiece W held by the holding table 20 and the center of the holding table 20. And an advancing / retreating drive unit 701 for advancing and retracting the unit 700.

  The pressing portion 700 includes a shaft portion 700a formed in a columnar shape and a rotating portion 700b that can rotate with respect to the shaft portion 700a. Further, the advancing / retreating drive unit 701 is configured to drive a piston 701a that supports the pressing unit 700 by a cylinder 701b.

  Hereinafter, a description will be given of a method in which the robot hand 50 of the transfer robot 5 receives the square plate-like workpiece W held on the holding table 20 as shown in FIG.

  This square plate-like workpiece W is formed in a square or a rectangle, and is composed of, for example, multilayer electronic components such as a multilayer thermistor, multilayer capacitor, multilayer varistor, and the material is ceramic. The square plate-like workpiece W is ground and formed to have a thickness of, for example, 1 mm, and is then transported and held by the holding table 20 of the cleaning apparatus 1. The cleaning liquid nozzle of the cleaning means 3 shown in FIG. The rectangular plate-like workpiece W is cleaned by ejecting the cleaning liquid from 30.

  The quadrangular plate workpiece W includes a first side surface W1 and a second side surface W2 that face each other, and a third side surface W3 and a fourth side surface that face each other in a direction orthogonal to the first side surface W1 and the second side surface W2. W4. In the rectangular plate-like workpiece W, the directions of the third side surface W3 and the fourth side surface W4 do not coincide with the X-axis direction that is the traveling direction of the robot hand 50, and the placement angle is shifted.

(1) Robot Hand Positioning Step As shown in FIG. 4, the robot hand 50 is moved in the X-axis direction to enter below the square plate workpiece W, and the square plate workpiece W held on the holding table 20 is moved. It is positioned at a receiving position that is a receivable position.

(2) First position correction process When the robot hand 50 moves to the receiving position in the robot hand positioning process, the open / close valve 24 is switched to the supply source 26 side as shown in FIGS. The suction holding of the square plate workpiece W on the surface 200 is released. Then, the pressing portion 700 of the advancing direction position correcting portion 70a constituting the position correcting means 7 is moved in a direction approaching the robot hand 50 to press the rotating portion 700b against the first side face W1 of the square plate workpiece, and the first The second side surface W2 opposite to the side surface W1 is brought into contact with the rotating portion 502b of the positioning unit 502 provided in the robot hand 50, so that the directions of the first side surface W1 and the second side surface W2 coincide with the Y-axis direction. The square plate workpiece W is positioned in the X-axis direction. At this time, the rotation unit 700b of the pressing unit 700 and the rotation unit 502b of the positioning unit 502 rotate, and the orientation is corrected so that the side surfaces W1 and W2 of the square plate workpiece W are oriented in the Y-axis direction.

(3) Second position correcting step After the rectangular plate-like workpiece W is positioned in the X-axis direction by the first position correcting step, as shown in FIG. By moving the two pressing portions 700 of the correcting portion 70b in a direction in which the two pressing portions 700 approach each other, the rectangular plate-like workpiece W facing the Y-axis direction that is a direction orthogonal to the X-axis direction that is the traveling direction of the robot hand 50. The rotating portions 700b of the two pressing portions 700 are pressed against the third side surface W3 and the fourth side surface W4, respectively, to correct the position of the square plate workpiece W in the Y-axis direction. In this way, the position and angle of the square plate workpiece W are corrected.

(4) Unloading process After the position and angle in the X-axis direction and the Y-axis direction are corrected by the first position correction process and the second position correction process, as shown in FIG. The source 55 and the holding surface 500 are communicated with each other, and a suction force is applied to the holding surface 500 of the robot hand 5 to suck and hold the lower surface W5 of the square plate workpiece W to receive the rectangular workpiece W. Then, the robot hand 5 is raised above the holding table 20 with the lower surface W5 of the square plate workpiece W sucked, and the arm portion 52 is swung and moved up and down, so that the square plate workpiece W is removed from the holding table 20. Take it out.

(5) Storage Step Next, as shown by a two-dot chain line in FIG. 8, the rectangular plate-like workpiece W carried out from the holding table 20 and held by the robot hand 50 is positioned in front of the opening 40 of the cassette 4 and is vacant. After the height of the square plate workpiece W is adjusted to the height of the slot 41, the robot hand 50 is moved into the cassette 4. Then, the valve 54 is closed to release the suction, and the robot hand 50 is retracted from the cassette 4. Then, the square plate workpiece W is stored in the cassette 4.

  As described above, in the present invention, since the position and angle of the square plate workpiece W on the holding table 20 are corrected in the first position correction step and the second position correction step, the square plate is surely included in the storage step. The workpiece W can be stored in the cassette 4.

  In addition to the piston 701a, a second piston 701c is provided in the cylinder 701b constituting the advance / retreat drive unit 701 as in the position correcting means 7a shown in FIG. 9, and between the piston 701a and the second piston 701c. A spring 701d may be interposed. In this case, when the valve 702 is opened and the supply source 703 serving as the air supply source and the cylinder 701 b communicate with each other, the piston 701 a and the second piston 701 c both move in a direction approaching the square plate workpiece W. Then, as shown in FIG. 10, when the pressing portion 700 supported by the piston 701a contacts the side surface W1 of the square plate workpiece W, the spring 701d can relieve the impact at that time. That is, the spring 701d serves as an impact reducing member.

  Moreover, the position correction means 8 shown in FIG. 11 can also be used. This position correcting means 8 is opposed to one traveling direction position correcting unit 80a disposed opposite to the positioning unit 502 in the X axis direction, and in the Y axis direction orthogonal to the X axis direction with the holding table 5 interposed therebetween. And two orthogonal direction position correcting portions 80b.

  The advancing direction position correcting unit 80 a and the orthogonal direction position correcting unit 80 b are pressed in the radial direction with reference to the pressing unit 800 that contacts the side surface of the square plate workpiece W held by the holding table 5 and the center of the holding table 5. And an advancing / retreating drive unit 801 for advancing and retracting the unit 800.

  The advancing / retreating drive unit 801 includes a ball screw 802 extending in the X-axis direction or the Y-axis direction, a motor 803 that rotates the ball screw 802, and a support member 804 that is screwed into the ball screw 802 and supports the pressing unit 800. When the ball screw 802 is driven by the motor 803 to rotate, the support member 804 moves in the X-axis direction or the Y-axis direction, and accordingly, the pressing portion 800 moves in the same direction.

  In this way, by adopting a configuration in which the pressing unit 800 is moved by driving the motor 803, the motor 803 can decelerate the movement of the pressing unit 800 immediately before the pressing unit 800 contacts the side surface of the square plate workpiece W. By performing the control, it is possible to mitigate the impact when the pressing portion 800 contacts the side surface of the square plate workpiece W.

  The robot hand 50 shown in FIGS. 1 to 11 is formed in a U shape with an opening on the tip side. However, like the robot hand 90 shown in FIG. May be.

  In this case, as shown in FIGS. 12 and 13, the holding surface 900 of the robot hand 90 faces downward, and the upper surface W <b> 6 of the square plate workpiece W is sucked and held by the holding surface 900. Then, the robot hand 900 is raised, and in that state, is moved into the cassette 4 and stored.

1: Cleaning device 2: Holding means 20: Holding table 200: Holding surface 201: Suction unit 21: Rotating means 210: Rotating shaft 211: Motor 212: Fixed point stopping means 213: Air flow path 24: Open / close valve 25: Suction source 26 : Supply source 3: Cleaning means 30: Cleaning liquid nozzle
4: Cassette 40: Opening 41: Slot 5: Transfer robot 50: Robot hand 500: Holding surface 500a: Base end portion 501: Suction path 502: Positioning portion 502a: Shaft portion 502b: Rotating portion 51: Mounting portion 52: Arm Unit 53: control unit 54: valve 55: suction source 6: cassette stage 7: position correcting means 70a: traveling direction position correcting unit 70b: orthogonal direction position correcting unit 700: pressing unit 701: advance / retreat driving unit

Claims (2)

Holding means having a holding table for sucking and holding a square or rectangular square plate work;
Rotating means for rotating the holding table;
Cleaning means for cleaning the square plate-like workpiece held by the holding table;
A transfer robot for unloading a square plate workpiece from the holding table;
A cassette for storing a square plate workpiece conveyed by the conveyance robot;
In a cleaning apparatus comprising at least a cassette stage on which the cassette is placed,
The transfer robot includes a robot hand having a holding surface for holding a quadrangular workpiece and a mounting portion on which the robot hand is mounted, and at least two positioning portions for positioning the quadrangular workpiece are provided on the holding surface. A straight line connecting the two positioning portions is orthogonal to the advancing / retreating direction of the robot hand,
Around the holding table, a position correcting means for correcting the position of the rectangular workpiece held on the holding table is disposed,
The position correcting means opposes the one moving direction position correcting unit disposed facing the positioning unit in the moving direction of the robot hand, and the direction orthogonal to the moving direction across the holding table. It consists of two orthogonal position correction parts,
The advancing direction position correcting unit and the orthogonal direction position correcting unit include a pressing unit that contacts a side surface of the rectangular workpiece, and an advancing / retreating driving unit that advances and retracts the pressing unit in a radial direction with respect to the center of the holding table. Consists of
After the robot hand is positioned at a receiving position where the rectangular workpiece held by the holding table can be received, the position and angle of the square plate workpiece are corrected by the position correcting means, and the position and angle are corrected. A cleaning device in which the robotic hand receives the square plate-shaped workpiece thus received and accommodates it in the cassette. A cleaning method according to claim 1, wherein the robot hand receives a square plate-like workpiece held by the holding table and stores the square plate-like workpiece in the cassette.
A robot hand positioning step of positioning the robot hand at the receiving position;
After the robot hand positioning step, the holding table releases suction holding of the square plate workpiece, presses the pressing portion of the advancing direction position correction portion against the first side surface of the square plate workpiece, and faces the square plate shape. A first position correcting step of positioning the second side surface of the workpiece by contacting the positioning portion of the robot hand;
After the first position correcting step, the orthogonal direction position correcting unit is configured on the third side surface and the fourth side surface of the quadrangular plate workpiece facing in the direction orthogonal to the traveling direction of the robot hand. A second position correcting step of correcting the position of the square plate workpiece by pressing the two pressing portions to
The square plate workpiece whose position and angle are corrected by the first position correction step and the second position correction step is held by the holding surface of the robot hand, and the square plate workpiece is unloaded from the holding table. An unloading process,
A storage step of storing in the cassette a square plate-like work that is unloaded by the unloading step and held by the robot hand,
A method of transporting a square plate workpiece by the transport robot that stores the square plate workpiece held by the holding table in the cassette.

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