JP2014078905A - 振動子、電子機器および振動子の製造方法 - Google Patents

振動子、電子機器および振動子の製造方法 Download PDF

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Publication number
JP2014078905A
JP2014078905A JP2012226670A JP2012226670A JP2014078905A JP 2014078905 A JP2014078905 A JP 2014078905A JP 2012226670 A JP2012226670 A JP 2012226670A JP 2012226670 A JP2012226670 A JP 2012226670A JP 2014078905 A JP2014078905 A JP 2014078905A
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Japan
Prior art keywords
support member
electrode
vibrator
upper electrode
conductive layer
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Pending
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JP2012226670A
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English (en)
Japanese (ja)
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JP2014078905A5 (enrdf_load_stackoverflow
Inventor
Shogo Inaba
正吾 稲葉
Masahiro Fujii
正寛 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2012226670A priority Critical patent/JP2014078905A/ja
Priority to CN201310459275.7A priority patent/CN103731116A/zh
Priority to US14/047,302 priority patent/US20140103778A1/en
Publication of JP2014078905A publication Critical patent/JP2014078905A/ja
Publication of JP2014078905A5 publication Critical patent/JP2014078905A5/ja
Pending legal-status Critical Current

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  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2012226670A 2012-10-12 2012-10-12 振動子、電子機器および振動子の製造方法 Pending JP2014078905A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012226670A JP2014078905A (ja) 2012-10-12 2012-10-12 振動子、電子機器および振動子の製造方法
CN201310459275.7A CN103731116A (zh) 2012-10-12 2013-09-23 振子、振子的制造方法、电子设备以及移动体
US14/047,302 US20140103778A1 (en) 2012-10-12 2013-10-07 Vibrator, manufacturing method of vibrator, electronic apparatus, and mobile unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012226670A JP2014078905A (ja) 2012-10-12 2012-10-12 振動子、電子機器および振動子の製造方法

Publications (2)

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JP2014078905A true JP2014078905A (ja) 2014-05-01
JP2014078905A5 JP2014078905A5 (enrdf_load_stackoverflow) 2014-06-19

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JP2012226670A Pending JP2014078905A (ja) 2012-10-12 2012-10-12 振動子、電子機器および振動子の製造方法

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JP (1) JP2014078905A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022123816A1 (ja) * 2020-12-11 2022-06-16 株式会社村田製作所 圧電振動子、圧電発振器、及び圧電振動子製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022123816A1 (ja) * 2020-12-11 2022-06-16 株式会社村田製作所 圧電振動子、圧電発振器、及び圧電振動子製造方法
JPWO2022123816A1 (enrdf_load_stackoverflow) * 2020-12-11 2022-06-16
JP7491408B2 (ja) 2020-12-11 2024-05-28 株式会社村田製作所 圧電振動子、圧電発振器、及び圧電振動子製造方法

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