JP2014078585A - Coating unit, coating device and transfer coating method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating unit capable of dealing with narrow pitches, a coating device and a transfer coating method.SOLUTION: The coating unit comprises a transfer head 3 for coating, with a flux, a plurality of points on a coating surface of a substrate 4. The transfer head 3 includes: a planar head body 6 including a plurality of first holes 7 corresponding to the plurality of points, respectively; first base parts 8 provided within the first holes 7; a transfer needle 9 protruding from the first base part 8 closer to the substrate 4; and first elastic support parts 12 which position the first base parts 8 at the same level in surface inside and outside directions of the head body 6 and connect edges of the first holes 7 and the first base parts 8.

Description

  The present invention relates to a mechanism for transferring and applying a coating material, a transfer coating method, and a coating apparatus, and in particular, as a pretreatment for mounting a solder ball on a substrate such as a semiconductor package substrate or a semiconductor element, in advance at a solder ball mounting position. The present invention relates to a technique of applying a flux and an electrode forming technique of a three-dimensional laminated TSV (Through Silicon Via).

  In recent years, with the spread of smartphones and tablets, there is an increasing demand for miniaturization of a built-in semiconductor package for high-speed transfer of large-capacity data and miniaturization of a housing for the purpose of viewing moving images and the like.

  In order to meet this requirement, a three-dimensional stacking method in which semiconductor chips are stacked and stacked is adopted.

  For example, the mounting pitch of solder balls in a BGA (Ball Grid Array) package is narrowed to a few tens of μm, and the TSV method is proposed as a new three-dimensional stacking method. In the TSV method, the electrode pitch is 40 to 50 μm. The pitch is further narrowed.

  There is a need for a flux coating apparatus and a TSV-type electrode forming apparatus that can cope with the three-dimensional lamination with a narrow pitch.

  2. Description of the Related Art Conventionally, as a pretreatment for a soldering process, a flux application method in which a coating method as described below is adopted is known (see Patent Document 1).

  In this coating method, a plurality of elevating pins for transferring and applying the flux adhering to the tip is provided so as to be slidable along the axial direction so that it can be stably coated even on a curved coating surface. It has been.

  The upper and lower ends of these elevating pins are supported by spring members individually incorporated in the guide tubes.

  Then, when the lower end portion of the elevating pin comes into contact with the curved application surface of the coating object, the elevating pin moves in the vertical direction and follows the unevenness of the application surface. As a result, the force with which the lower end portion of the elevating pin comes into contact with the object to be coated is equalized, and transfer coating with the elevating pin can be performed stably.

JP-A-8-66650

  However, it is difficult to arrange a plurality of elevating pins at an interval of, for example, about 100 μm even in consideration of the incorporation of a spring member and the like, and there is a problem that it cannot cope with the recent narrow pitch. .

  An object of the present invention is to provide a coating unit, a coating apparatus, and a transfer coating method that can cope with a narrow pitch.

The coating apparatus of the present invention includes a coating unit that coats a liquid substance on the surface of an object to be coated.
The coating unit is provided so as to project from a flat plate portion having a first hole, a first base portion provided in the first hole, and a surface of the first base portion on the object to be coated side. A transfer needle for applying a liquid substance to the coated material, and a first connecting portion that extends from the flat plate portion into the first hole and connects the first base portion and the flat plate portion.

  More preferably, the first base portion is elastically supported by the first connecting portion so as to be displaceable along the protruding direction of the transfer needle.

  More preferably, the flat plate portion, the first base portion, the transfer needle, and the first connecting portion are formed of the same material.

  More preferably, the transfer needle is formed in a tapered shape that becomes thinner from the base end toward the tip, and a flat portion having a predetermined area is formed at the tip of the transfer needle.

  More preferably, it is provided around the transfer needle on the surface of the flat plate portion on the side of the object to be coated, and is predetermined between the flat plate portion and the surface of the surface of the object to be coated when the tip of the transfer needle is brought into contact with the surface of the object to be coated. A plurality of legs for forming the gaps.

  More preferably, the flat plate portion further includes a plurality of second holes respectively corresponding to the plurality of leg portions, and a plurality of second base portions provided in the plurality of second holes, respectively. And a second connecting portion that extends from the flat plate portion into the second hole and connects the second base portion and the flat plate portion.

The plurality of leg portions project from the surface of the plurality of second base portions on the object to be coated side.
More preferably, a groove for supplying a liquid substance from the base end to the tip end is formed on the side surface of the transfer needle.

  More preferably, a liquid substance is injected and a container having an opening is provided, and the tip of the transfer needle is immersed in the liquid substance in the container through the opening, and the liquid substance is attached to the tip of the transfer needle.

  More preferably, an atomizer that blows air in which a solvent of a liquid substance is atomized is provided around the transfer needle through a gap between the flat plate portion and the first base portion.

  More preferably, the transfer needle is formed with a supply hole penetrating from the first base portion to the tip to supply a liquid substance.

  More preferably, the flat plate portion is provided on the surface of the flat plate portion opposite to the object to be coated, and includes a deformable sheet that closes a gap between the flat plate portion and the first base portion.

And a container that is provided on the sheet and that supplies the liquid material to the supply hole.
More preferably, the container includes a sealed container into which a liquid material is injected, and further includes a pressure increasing / decreasing mechanism that adjusts the supply amount of the liquid substance by adjusting the pressure in the sealed container.

  More preferably, the coating apparatus includes a coating unit, an observation optical unit for observing the surface of the object to be coated, and a drive unit that moves the coating unit and the observation optical unit relative to the object to be coated. Prepare.

  In another aspect, the present invention is a transfer coating method using a coating unit that applies a liquid substance to a plurality of points on the surface of an object to be coated using a plurality of transfer needles.

  In the transfer coating method, a solvent for spraying atomized air is sprayed in order to prevent the liquid substance adhering to each transfer needle from drying.

  Preferably, a transfer coating method using a coating unit that applies a liquid substance to a plurality of points on the surface of an object to be coated using a plurality of transfer needles has a supply hole penetrating from the base end to the tip end of each transfer needle. A liquid container is injected and a sealed container connected to the supply hole is provided at the base end of each transfer needle, the pressure in the sealed container is controlled, and the liquid substance is transferred to the transfer needle through the supply hole of each transfer needle. Supply to the tip.

  According to the present invention, even if the interval between the transfer needles is set at a narrow interval, the first base portion is connected by the first connecting portion extending from the flat plate portion into the first hole, respectively. By doing so, a plurality of transfer needles can be arranged at desired intervals and individually elastically supported.

  For this reason, for example, each transfer needle can be processed so as to be integrated with each first base portion in a state where each first base portion is connected to the flat plate portion by the first connecting portion. .

  Therefore, a plurality of spring members that are conventionally provided for each transfer needle are not necessary, and the assembly process can be simplified.

  In addition, the installation space for the spring member is not required, and the adaptability to narrow pitch can be improved.

It is a perspective view explaining the structure of the transfer head of embodiment. It is a top view of one base part among transfer heads of an embodiment. FIG. 3 is a cross-sectional view taken along the line III-III in FIG. 2 for explaining the configuration of the base portion in the transfer head of the embodiment. FIG. 4 is a cross-sectional view taken along a line IV-IV in FIG. 2 for explaining the configuration of the base portion in the transfer head of the embodiment. It is a perspective view which shows the whole structure of the coating device in which the transfer head of embodiment is used. It is a conceptual diagram which shows a mode that transfer transfer is performed using the transfer unit of embodiment. It is a conceptual diagram explaining the transfer application process in which the process of immersing a transfer needle in a paste container interposes as an example which performs transfer application using the transfer unit of an embodiment. It is a conceptual side view of the transfer head used for the transfer unit of an embodiment. It is a conceptual side view which shows a mode when the unevenness | corrugation exists in the surface of a to-be-coated article with the transfer head used for the transfer unit of embodiment. FIG. 4 is a conceptual side view showing a relationship with a substrate when the transfer head of the embodiment has an inclination. FIG. 3 is a conceptual side view showing a state in which the transfer head of the embodiment is in contact with a substrate in a tilted state. FIG. 6 is a perspective view illustrating a configuration of a transfer head according to a first modification of the embodiment. It is the top view which showed the structure of the transfer head of the modification 1, and was seen from the arrow XIII direction in FIG. FIG. 10 is a conceptual side view showing a state in which the transfer head of Modification 1 is brought into contact with the substrate in parallel while the inclination is corrected by the legs. FIG. 10 is a conceptual side view and an enlarged view of a main part showing a state in which an atomizing solvent is sprayed from a gap of a transfer head used in a transfer unit of Modification 2 of the embodiment. In the transfer head of the modification 3 of embodiment, it is the conceptual side view which shows a structure, and the enlarged view of the principal part. FIG. 17 is a cross-sectional view at a position along a line XVII-XVII in FIG. It is a top view which shows the structure of the sheet | seat which closes a hole with the transfer head of the modification 4 of embodiment. FIG. 19 is a cross-sectional view at a position along the line IXX-IXX in FIG. FIG. 10 shows an example of a transfer head of Modification 4 and is a conceptual side view showing the configuration and an enlarged view of the main part. FIG. 21 is a cross-sectional view at a position along line XXI-XXI in FIG. In the transfer head of the modification 5 of embodiment, it is the conceptual side view which shows a structure, and the enlarged view of the principal part. In the transfer head of the modification 5, it is the conceptual side view which shows a structure, and the enlarged view of the principal part. In the transfer head of the modification 5, it is the conceptual side view which shows a structure, and the enlarged view of the principal part. In the transfer head of the modification 5, it is the conceptual side view which shows a structure, and the enlarged view of the principal part.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the same parts are denoted by the same reference numerals. Their names and functions are also the same. Therefore, detailed description thereof will not be repeated.

  1 to 25 show a coating unit, a coating apparatus, and a transfer coating method according to an embodiment of the present invention.

[Basic configuration of transfer head]
The transfer head 3 shown in FIG. 1 has a frame frame member 5 attached to the lower end portion of the coating unit 2 (see FIG. 5) so as to face the workpiece (coating object). ) Used in the coating process.

  For example, in a pretreatment process of mounting solder balls on the surface of the substrate 4 as an object to be coated, there is a process in which a flux, which is a liquid material, is applied in advance corresponding to the position where the solder balls will be provided. Exists.

  At this time, the transfer head 3 mounted on the coating unit 2 is used to apply a flux, which is a liquid material, to a plurality of points on the surface of the substrate 4.

  Returning to FIG. 1, first, the configuration of the main part of the transfer head 3 will be described. The transfer head 3 according to this embodiment is obtained by processing a single plate material inside a frame frame material 5 having a square shape in plan view. The produced flat plate-like head body 6 is engaged.

  The head main body 6 of the transfer head 3 has a substantially square flat plate shape in plan view, and a plurality of first holes 7 respectively corresponding to a plurality of points to which a flux provided on the substrate 4 is applied are vertically and horizontally. They are arranged at a pitch (equal intervals).

  Each of the first holes 7 has a square shape when viewed from above, and a corresponding first base portion 8 is provided in each of the first holes 7 of the head body 6. ing.

  In this embodiment, as shown in FIG. 2, the outer peripheral edge of the first base portion 8 is set to be smaller than the inner peripheral edge of each first hole 7.

  Further, each side of the outer peripheral edge of the first base portion 8 and each side of the inner peripheral edge of the first hole 7 are provided in parallel. Moreover, in the in-plane and out-of-plane direction of the first base portion 8, the position in the in-plane and out-of-plane direction of the flat plate portion 6 a of the head body 6 and the position in the in-plane and out-of-plane direction of each first base portion 8 are substantially the same height. It is set to be flush (hereinafter referred to as the same level).

  And the elastic support part 12 as a 1st connection part extended from the flat plate part 6a in the state which has located the 1st base part 8 in the same level in the in-plane direction of the flat plate part 6a of the head main body 6. FIG. Thus, the first base portion 8 is connected as a part of the head body 6.

  Four elastic support portions 12 are provided independently between the four corner portions of the inner periphery of the first hole 7 and the four corner portions of the outer periphery of the first base portion 8, respectively. The first base portion 8 is connected and supported at the same level.

  The elastic support portions 12 each have an S shape and are connected at the four corners of the first base portion 8 by extending the direction of the meandering central axis from the four sides along the diagonal line of the first hole 7. It is elastically supported evenly in all directions.

  When a force in the in-plane direction is applied to the first base portion 8, each elastic support portion 12 is elastically deformed while bending its shape. The elastic support portion 12 is easy to set a long stroke as compared to a long piece-like leaf spring member having a central axis of the same length.

  In addition, even if the first base portion 8 itself is deformed, it is difficult to cause deformation such as bending. For this reason, the first base portion 8 does not incline due to this elastic deformation and remains in a parallel state with respect to the flat plate portion 6a toward the in-plane direction (the direction along the central axis in FIG. 3). It is configured to be capable of relative displacement.

  And since each elastic support part 12 is exhibiting S shape, when displacing the 1st base part 8 with the same stroke, the longitudinal direction dimension of a meandering center axis is set to a long piece-like leaf | plate spring member etc. Compared to, it can be set shorter. For this reason, the pitch can be further narrowed easily.

  Further, transfer needles 9 project from the surface of the first base portion 8 on the substrate 4 side toward the substrate 4 (in this embodiment, the same direction as the in-plane / out-of-plane direction).

  In this embodiment, one first base portion 8 is provided for one first hole 7, and one transfer needle 9 protrudes from one first base portion 8. ing.

  The number of transfer needles 9 of the head body 6 is 12 × 12 = 144, which is the same as the number of the first base portions 8.

  Each of these transfer needles 9 has a taper shape from a proximal end located on the first base portion 8 side toward a distal end located on the substrate 4 side, and a side surface portion 10 is formed on each of the transfer needles 9. A flat portion 11 having a predetermined area is formed at the end portion on the substrate 4 side.

  The amount of flux that can be held by each transfer needle 9 can be set by setting the area of the flat portion 11. Therefore, the fine flux 21 can be applied by processing the flat portion 11 to have a small area.

In addition, the transfer needle 9 of the first base portion 8 supported by the elastic support portions 12 extending from the four corners of the peripheral portion of the first hole 7 can be relatively displaced in the in-plane direction of the plate surface of the head body 6. The thickness (width and thickness) of the elastic support 12 and the S-shaped meandering amount are set so that

  As shown in FIG. 4, a gap 15 is formed between the first base portion 8 and the elastic support portion 12 so as to communicate in the in-plane and outward directions. The gap 15 may be used when a flux described later is supplied from above the transfer head 3 to the transfer needle 9 via the first base portion 8.

  Moreover, in this embodiment, the head main body 6 and the first base portion 8 are formed by processing a single plate material, and each elastic support for connecting the head main body 6 and the first base portion 8 to each other. Together with the part 12, it is composed of one member.

  Further, the transfer needle 9 provided in the first base portion 8 is processed from one metal plate member (one member made of the same material) constituting the head main body 6 and the first base portion 8 so as to be integrated. Is formed.

  As a processing method, for example, a method of processing by photolithography and etching is known. In this method, it is possible to integrally form the transfer needle 9 on the first base portion 8 with a fine pitch (for example, a narrow interval such as 100 μm or less).

  Therefore, in this embodiment, a plurality of first base portions 8 in which the flat plate portion 6a and the transfer needle 9 of the head main body 6 are individually formed by processing one plate material by photolithography and etching. The spaces are connected by the respective elastic support portions 12 and are integrally formed by a single member.

  In this embodiment, one first base portion 8 is provided for one first hole 7, and one transfer needle 9 protrudes from one first base portion 8. It is installed.

  That is, the first base portion 8 is provided in each first hole 7 of the head body 6 corresponding to each first hole 7, but not limited thereto. Two or more first base portions 8 may be provided corresponding to one hole.

  For example, a relatively large first hole 7 having a single opening is formed in the flat plate portion 6 a of the head body 6, a plurality of first base portions 8 are arranged, and the inner peripheral edge of the first hole 7 Similarly, the elastic support portions 12 may be connected to each other.

Further, two or more transfer needles 9 may protrude from one first base portion 8.
[Configuration of coating equipment]
FIG. 5 is a perspective view showing the overall configuration of the coating apparatus 1 including the coating unit 2.

  The coating unit 2 having the transfer head 3 described above is attached to the coating apparatus 1 (see FIG. 5). Such a transfer head 3 is mounted on the tip of the coating unit 2 on the coating object side so as to face the substrate 4 as the coating object to be placed on the coating apparatus 1.

  In addition, the coating apparatus 1 has an observation optical mechanism 101 for observing a portion to which a flux on the surface of the substrate 4 as an object to be coated is applied, the coating unit 2 and the observation optical mechanism 101 relative to the substrate 4. A drive mechanism 102 is provided as a drive unit that can be moved.

  The drive mechanism 102 mainly includes a Y-axis table 103, a Z-axis table 105, and an X-axis table 106.

  Among them, the Y-axis table 103 on which the substrate 4 is placed is configured to be able to move the substrate 4 in the Y-axis direction along the slide guide rails 104 and 104.

  Above the Y-axis table 103, a Z-axis table 105 on which the observation optical mechanism 101 and the coating unit 2 are mounted is provided so as to face the surface side of the substrate 4.

  The Z-axis table 105 is configured to allow the observation optical mechanism 101 including the CCD camera 109 and the like and the coating unit 2 to move in the Z-axis direction.

  Further, the Z-axis table 105 is configured to be movable along the X-axis direction by the X-axis table 106.

  In these drive mechanisms 102, the operations of the Y-axis table 103, the Z-axis table 105, and the X-axis table 106 are controlled by a control computer 107 serving as a control unit.

  The control computer 107 is connected to an operation panel 108 or the like as an input unit for inputting a drive command, and enables a drive operation in a desired process together with an image processing apparatus (not shown).

[Basic operation of dispensing unit]
FIG. 6 is a conceptual diagram for explaining the basic operation of the coating apparatus 1 using the coating unit 2 of this embodiment.

  In FIG. 6, first, as shown in FIG. 6A, when the transfer head 3 is mounted on the coating unit 2 of the coating apparatus 1, the tip of the transfer needle 9 is positioned so as to face the surface of the substrate 4. Set.

  As shown in FIG. 6 (b), the flux 21 is attached to the tip of the transfer needle 9 and held for a predetermined amount.

  As shown in FIG. 6C, when the Z-axis table 105 of the drive mechanism 102 is driven to lower the transfer head 3, the tip of the transfer needle 9 comes into contact with the surface 14 of the substrate 4, and the flux 21 Is transferred and applied to the surface 14.

  At this time, the elastic support portions 12 and 12 that elastically support the first base portion 8 are bent and deformed to absorb the force applied to the tip of the transfer needle 9. Therefore, the possibility that the tip of the transfer needle 9 is deformed due to the offset load can be reduced.

  As shown in FIG. 6D, when the Z-axis table 105 of the drive mechanism 102 is driven to raise the transfer head 3, the flux 21 remains on the surface 14 of the substrate 4 and the transfer is completed.

  Since the flat portion 11 having a predetermined area is formed at the tip of the transfer needle 9, the amount of the flux 21 transferred to the surface 14 of the substrate 4 can be adjusted.

[When using an external flux tank]
FIG. 7 shows an example of performing transfer coating using the transfer unit according to the embodiment. The tip of the transfer needle 9 is immersed in the flux 21 in the separately prepared flux tank 20, and the flux 21 is placed at the tip. It is a conceptual diagram which shows the mode of the process of performing transfer coating by being attached.

  As shown in FIG. 7A, when the driving mechanism 102 is driven to lower the transfer head 3 from the upper position of the flux tank 20, the liquid substance in which the tip of the transfer needle 9 is injected into the flux tank 20. Is immersed in the liquid surface of the flux 21 through the opening, and the amount of flux 21 required for transfer coating is adhered.

  At this time, the flux 21 is simultaneously held on the tips of the plurality of transfer needles 9 of the head body 6.

  As shown in FIG. 7B, with the flux attached to the tip of each transfer needle 9, the Z-axis table 105 of the drive mechanism 102 is driven to raise the transfer head 3, or Y At least one of the axis table 103 and the X axis table 106 is driven to retract the flux tank 20.

  In the head body 6 relatively moved from the upper position of the flux tank 20, the flux 21 is held at the tip of each transfer needle 9.

  Next, as shown in FIG. 7C, the Z-axis table 105 of the drive mechanism 102 is driven, and each transfer needle 9 lowered along with the transfer head 3 toward the surface 14 of the substrate 4 is moved to the substrate 4. The respective needle tips are brought into contact with the positions of a plurality of desired points provided on the surface 14.

  The flux 21 held at the tip of each transfer needle 9 is transferred to a desired position on the surface of the substrate 4 as shown in FIG.

  FIG. 8 is a conceptual side view of the transfer head 3 used in the transfer unit of the embodiment. In FIG. 8, in order to facilitate understanding together with FIG. 9 described later, the number of transfer needles 9 is actually smaller than the number of transfer needles 9 provided on one head body 6.

  The interval between the adjacent transfer needles 9 and 9 is set to a predetermined dimension W (for example, W = 100 μm here). Further, some or all of the surface of the substrate 4 is uneven (hereinafter referred to as unevenness).

  FIG. 9 is a conceptual side view showing a state in which the transfer head 3 used in the transfer unit of the embodiment has irregularities on the surface of the substrate 4.

  When the Z-axis table 105 of the drive mechanism 102 is driven and the transfer head 3 is lowered, the tips of the transfer needles 9 provided on the first base portions 8 of the head body 6 are respectively brought into contact with the surface of the substrate 4. The flux is transferred and applied to the surface of the substrate 4 in contact therewith.

  When the surface of the substrate 4 has irregularities, each first base portion 8 bends and deforms the elastic support portions 12 and 12 connected to the flat plate portion 6a of the head body 6 to transfer the transfer needle 9 in the in-plane and outward directions. The force applied by moving the tip of is absorbed.

  At this time, the first base portion 8 of this embodiment is equally elastically supported by the four elastic support portions 12 whose axial directions are along the diagonal lines from four directions. For this reason, the transfer needle 9 is moved along the axis so as to be perpendicular to the in-plane and out-of-plane directions, and the flat portion 11 at the tip is always brought into contact with each other at the same angle close to parallel.

  Moreover, there is little possibility that each 1st base part 8 inclines. Therefore, the position of the flux 21 to be transferred and applied by each transfer needle 9 can be transferred and applied to the desired position with good accuracy without causing a positional shift.

  In this way, the respective first base portions 8 are relatively displaced in the in-plane / outward direction (the direction along the central axis in FIG. 3) with respect to the flat plate portion 6a.

  For this reason, the transfer needle 9 provided integrally with the first base portion 8 has the area of each flat portion 11 in contact with each other, and the amount and shape of each flux 21 transferred and applied to the surface of the substrate 4 by the contact. It can be as desired.

  Further, for example, even when the interval between the adjacent transfer needles 9 and the transfer needles 9 is set to a narrow interval such as a predetermined dimension W = 100 μm, S-shapes respectively extended from the flat plate portion 6a of the head body 6 are provided. The first base portions 8 are connected at predetermined intervals by the elastic support portions 12 having a shape.

  Thereby, each transfer needle 9 of each first base portion 8 is arranged at a desired narrow interval and is individually elastically supported.

  For this reason, for example, each first base portion 8 connected to the flat plate portion 6a by the elastic support portion 12 and each transfer needle 9 provided integrally with the first base portion 8 are connected to one metal plate or the like. It can be easily processed from the member.

  Therefore, separate members such as a plurality of spring members conventionally provided for each transfer needle 9 are not required, and the number of parts can be reduced to simplify the assembling process.

In addition, the installation space for the spring member is not required, and the adaptability to narrow pitch can be improved.
[Correct tilt]
FIG. 10 is a conceptual side view showing the relationship with the substrate when the transfer head 3 of the embodiment has an inclination.

  For example, when the flat plate portion 6a of the head body 6 of the transfer head 3 is not parallel to the surface 14 of the substrate 4 (in the figure, the angle θ is about 0.1 to 10 degrees, and from 0.1 degrees) (Including a small angle θ), the transfer needle 9 located on one side of the flat plate portion 6a of the head body 6 is located at the lowest position in the movement direction of the Z-axis table 105.

FIG. 11 is a conceptual side view showing a state in which the transfer needle 9 of the embodiment moves in the direction of the substrate 4 while being tilted while maintaining the angle θ and the transfer needle 9 is brought into contact therewith. In this state, the tip of the transfer needle 9 located on one side of the flat plate portion 6 a of the head body 6 is positioned at the lowest position in the movement direction of the Z-axis table 105, and is in contact alone.
[Modification 1]
FIG. 12 is a perspective view illustrating the configuration of the transfer head 13 according to the first modification of the embodiment. Note that portions similar to those in the embodiment are denoted by the same reference numerals and description thereof will not be repeated.

  In the transfer head 13 according to the first modified example, four leg portions 18 are further provided on the outer peripheral portion of the surface of the flat plate portion 16a of the head body 16 on the substrate 4 side where the transfer needle 9 is provided. It has been.

  These leg portions 18 are provided around the transfer needle 9. When the tip of the transfer needle 9 is brought into contact with the surface of the substrate 4, the leg portions 18 have a predetermined height dimension, and the flat plate portion 6 a and the substrate The lower limit position in the moving direction of the transfer head 3 is regulated so as to be within a certain range so as to form a predetermined gap with the surface 4.

  FIG. 13 is a plan view showing the configuration of the transfer head according to the first modification of the embodiment, viewed from the direction of arrow XIII in FIG. In the vicinity of the four corners of the head body 16, the leg portions 18 provided around the transfer needle 9 are respectively provided with inclination correction pins 18a projecting from the center of the second base portion 18b.

  The second base portion 18b is elastically supported as four second connecting portions respectively extending from the inner edge of the leg hole 18d as the second hole formed in the flat plate portion 16a. The portion 18c is connected to be displaceable in the in-plane direction.

  FIG. 14 is a conceptual side view showing how the transfer needles 9 are brought into contact with the substrate 4 while the inclination is corrected in parallel by the leg portions 18 in the transfer head 13 of the first modification.

  As shown in FIG. 14A, the flat plate portion 16a of the head body 16 of the transfer head 13 is inclined with respect to the surface 14 of the substrate 4 at an angle θ of about 0.1 to 10 degrees.

  As shown in FIG. 14B, when the tilt angle θ is present, the transfer needle 9 positioned on one side of the flat plate portion 16a of the head main body 16 has a plurality of transfer needles 9, and the Z-axis table 105 moves in the moving direction. At the bottom.

  However, on one side of the head main body 16 of the modified example 1, a leg portion 18 having a relatively large height dimension from the flat plate portion 16a is located further outside.

Therefore, first, the leg portion 18 comes into contact with the surface of the substrate 4.
Next, as shown in FIG. 14C, the leg 18 provided on the opposite side comes into contact with the surface of the substrate 4 while the inclination angle θ is corrected.

  The leg portion 18 has a predetermined height direction dimension from the head body 16 to the tip of the inclination correction pin 18 a, and a predetermined gap is formed between the flat plate portion 6 a and the surface of the substrate 4.

  For this reason, the lower limit position in the moving direction of the transfer head 13 is regulated to fall within a certain range.

  As a result, the surface of the substrate 4 and the flat plate portion 16a of the head main body 16 are in a parallel state, and an uneven load is not easily applied to the head main body 6.

  Then, as shown in FIG. 14D, when the Z-axis table 105 is further driven and controlled, and the transfer head 13 is further lowered, the tips of the transfer needles 9 are almost simultaneously with the surface of the substrate 4, Contact with almost the same contact force.

  For this reason, even if the transfer head 13 mounted on the coating unit 2 is tilted, it is corrected to the parallel state by the plurality of leg portions 18, and the tips of the transfer needles 9 are brought into contact with each other equally and elastically deformed. The pressing force can be absorbed.

  Therefore, it is possible to prevent the elastic support portion 12 connecting the first base portion 8 from being deformed due to bending or the like. In addition, since the tips of the transfer needles 9 are in reliable contact with each other, the fluxes 21 that are transferred and applied to the surface of the substrate 4 can be made substantially uniform and more uniform.

  That is, in the first modification, even when the transfer head 13 is moved in the direction of the substrate 4 while the angle θ is maintained, the state is in contact with and parallel to the tip of the transfer needle 9 located on one side of the flat plate portion 16a. It can be.

  From the parallel state, the force applied to lower the transfer head 13 is deformed from the four second elastic support portions 18c respectively extending from the inner edge of the second hole of the leg portion. By setting the force equivalent to the force to be applied, the tips of the plurality of transfer needles 9 can be brought into contact with the surface of the substrate 4 at the same time and with the same force.

  Further, in the first modification, the leg portion 18 is formed by the same processing method as that of the first base portion 8 provided with the transfer needle 9 and without generating another additional part or assembly work.

Other configurations and operational effects are the same as those of the transfer head 3 of the embodiment, and therefore description thereof will not be repeated.
[Modification 2]
FIG. 15 is a conceptual side view showing an appearance of spraying the atomizing solvent 25 from the gap of the transfer head 23 used in the coating unit 2 in the transfer unit of Modification 2 of the embodiment and an enlarged view of the main part. is there. Note that portions similar to those in the embodiment are denoted by the same reference numerals and description thereof will not be repeated.

  First, the difference in configuration will be mainly described. In the transfer unit of the second modification, a supply chamber 24 is further provided inside the coating unit 22 to which the transfer head 23 is mounted.

  An atomizer 30 is connected to the supply chamber 24 located above the transfer head 23 so that the atomizing solvent 25 is supplied via a pipe 29.

  The atomizer 30 is provided with a tank 27. A solvent 26 is accommodated in the tank 27.

  An air nozzle 28 is connected to the tank 27. By the air supplied through the air nozzle 28, the solvent 26 inside the tank 27 is generated as the atomizing solvent 25.

  The generated atomizing solvent 25 is supplied into the supply chamber 24 through a path in the pipe 29 as indicated by an arrow in FIG.

  The atomizing solvent 25 supplied to the supply chamber 24 is sprayed around the plurality of transfer needles 9 through the gaps 17 between the flat plate portion 16 a of the head body 13 and the plurality of first base portions 8.

  In the transfer head 23 described in the second modification configured as described above, the atomizing solvent 25 supplied from the atomizer 30 is ejected around the transfer needle 9 through the gap 17.

  Due to the ejection of the atomizing solvent 25, the atmosphere around the transfer needle 9 is maintained in a predetermined wet state. Thereby, drying of the flux 21 adhering to the tip of the transfer needle 9 can be delayed. Therefore, for example, even a liquid substance such as a transfer material containing a highly volatile solvent can be stably transferred and applied.

  In the second modification, the solvent 26 accommodated in the tank 27 has been described using the atomizer 30 that is generated as the atomizing solvent 25 by the air sent through the air nozzle 28. For example, the atomizer which produces | generates the atomization solvent 25 using an ultrasonic transducer | vibrator may be sufficient.

Since other configurations and operational effects are the same as those of the transfer head 3 of the embodiment and the transfer head 13 of the first modification, description thereof will not be repeated.
[Modification 3]
FIG. 16 is a conceptual side view showing the configuration and an enlarged view of the main part of the transfer unit according to the third modification of the embodiment. FIG. 17 is a cross-sectional view at a position along the line XVII-XVII in FIG.

Note that portions similar to those in the embodiment are denoted by the same reference numerals and description thereof will not be repeated.
In the transfer unit of the third modification, a groove 40 communicating with the groove for supplying the flux 21 from the base end to the tip provided on the side surface of the transfer needle 39 is formed.

  Further, on the head main body 36 of the transfer head 33, a flux reservoir 32 surrounded by a partition wall 32a having a predetermined height direction dimension is provided.

  The flux reservoir 32 has a structure in which the upper surface portion is opened, and serves as a container for supplying the flux 21 to the tip of the head body 36 through the groove formed on the side surface of the transfer needle 39 from the groove 40. It is configured to supply the flux 21.

  The supply passage that penetrates the head main body 36 in the in-plane direction may be a round hole or a gap 17 as shown in FIG.

  In the transfer unit according to the third modification configured as described above, the flux 21 is supplied from the base end to the tip end of the transfer needle 39 by a groove formed on the side surface of the transfer needle 39.

  For this reason, the flux 21 can be continuously supplied from the flux reservoir 32 provided on the head main body 36 to shorten the tact time of the transfer coating process and improve efficiency.

Since other configurations and operational effects are the same as those of the transfer head 3 of the embodiment and the transfer head 13 of the first modification, description thereof will not be repeated.
[Modification 4]
FIG. 18 is a plan view showing a transfer head according to Modification 4 of the embodiment of the present invention.

Note that portions similar to those in the embodiment are denoted by the same reference numerals and description thereof will not be repeated.
In the first hole 7 of the head body 6, a sealing sheet 50 is attached to close the gap 17 between the elastic support portion 12, the first base portion 8, and the periphery of the first hole 7.

  The sealing sheet 50 is mainly composed of a film-like sheet that can be deformed following the movement of the first base portion 8. The sealing sheet 50 has an outer edge 50b which is sealed in a watertight state by sealing the peripheral edge 7a of the first hole 7 over the entire circumference, and is formed in a square shape.

  Further, except for the central portion of the first base portion 8, the sealing sheet 50 is provided with a square-shaped opening 50 a.

  The inner edge of the opening 50 a of the sealing sheet 50 is sealed over the entire circumference so as to be in a watertight state with the outer edge of the first base portion 8.

  Further, as indicated by a broken line in FIG. 18, a groove 40 is formed in a part of the first base portion 8 covered with the sealing sheet 50.

  The groove 40 is formed in a recessed manner on the side surface of the transfer needle 49 and communicates with a groove (not shown) that supplies the flux 21 from the base end to the tip end. And the groove | channel 40 is extended so that a part of sealing sheet 50 may be crossed from the groove | channel of the base end vicinity of this side surface to the inner edge of the opening part 50a.

  For this reason, the flux 21 on the first base portion 8 is supplied from the groove 40 to the tip of the transfer needle 49 through a groove located on the side surface of the transfer needle 49.

  FIG. 19 is a cross-sectional view at a position along the line XIX-XIX in FIG.

  In the fourth modification, the flux 21 on the first base portion 8 is transmitted to the tip of the transfer needle 49 through the groove 40.

  However, the present invention is not limited to this. For example, instead of the groove 40 or together with the groove 40, a supply hole 51 for supplying the flux 21 on the first base portion 8 is formed from the proximal end to the distal end of the transfer needle 49. May be.

  In this case, the supply hole 51 provided in the central portion of each first base portion 8 is formed so as to penetrate to the flat portion 11 at the tip along the center axis position of each transfer needle 49. The flux 21 on the first base portion 8 is supplied to the tip of the transfer needle 49 through the supply hole 51.

  In the transfer head of Modification 4 configured as described above, each gap 17 of the first hole 7 formed to open along the four sides of the head body 6 is covered with a single flexible sealing sheet 50. Yes.

  Therefore, even if the first base portion 8 is displaced in the in-plane direction with respect to the flat plate portion 6a of the head body 6, the sealing sheet 50 is deformed and follows. Therefore, the watertight state of each gap 17 of the first hole 7 is maintained, and there is no possibility that the flux 21 leaks from above the first base portion 8 toward the lower substrate 4 via the gap 17.

  In the fourth modification, a flux reservoir portion 32 is provided on the head main body 36 and is surrounded by a partition wall portion 32a having a predetermined height direction dimension.

However, the present invention is not limited to this, as long as the flux 21 is supplied from above the first base portion 8. A flux tank into which the flux 21 is injected is provided separately from the first base portion 8. Also good. In this case, you may comprise so that the flux 21 may be sent to the coating unit 2 via piping from the other place in which the flux tank was provided.
[Integrated flux tank]
FIG. 20 is a conceptual side view showing the configuration of the transfer head 53 as an example of the fourth modification and an enlarged view of the main part. Note that the description of the same parts as those of Modification 4 will not be repeated.

  In the transfer head 53, a flux reservoir portion 32 as a flux tank surrounded by a peripheral wall portion is provided directly on the first base portion 8.

  And even if the 1st base part 8 moves to an in-plane outward direction, a seal | sticker is maintained and there is no possibility that the flux 21 may leak from the clearance gap 17. FIG. For this reason, space efficiency is favorable compared with what employ | adopts the another structure which isolate | separated the flux tank in which the flux 21 is inject | poured from the 1st base part 8. FIG.

  FIG. 21 shows an example of a transfer head of Modification Example 4, and is a cross-sectional view at a position along the line XXI-XXI in FIG.

  The amount of flux 21 required for transfer coating is continuously supplied from the first base portion 8 to the flat portion 11 at the tip through the supply hole 51 of the transfer needle 49.

  For this reason, since the flux 21 does not touch the air in the supply hole 51 until the tip of the transfer needle 49 is reached, drying is suppressed.

Since other configurations and operational effects are the same as those of the transfer head 3 of the embodiment and the transfer head 13 of the first modification, description thereof will not be repeated.
[Modification 5]
FIG. 22 is a conceptual side view and an enlarged view of the main part showing the configuration of a transfer head 63 according to the fifth modification of the embodiment of the present invention.

Note that portions similar to those in the embodiment are denoted by the same reference numerals and description thereof will not be repeated.
The flux tank 20 of Modification 5 includes a sealed container 62 whose upper surface is covered, and the flux 21 is injected into the sealed container 62.

  The sealed container 62 is communicated with a vacuum pump P as a pressure increasing / decreasing mechanism capable of pressure increasing / decreasing operation via a pipe 66. The vacuum pump P is configured to adjust the supply amount of the flux 21 supplied to the transfer needle 49 by adjusting the pressure in the sealed container 62 by driving.

  In this embodiment, the pressure increasing / decreasing force of the flux 21 in the sealed container 62 is adjusted by being controlled from the control computer 107 or the operation panel 108 shown in FIG.

  Then, when the pressure in the sealed container 62 is increased or decreased with respect to the atmospheric pressure, the flux 21 in the sealed container 62 is pushed out or pulled back from the supply hole 51 in the direction of the substrate 4. It is configured.

  FIG. 23 is a conceptual side view showing a state where the vacuum pump P is not driven in the transfer head of Modification Example 5, and an enlarged view of the main part.

  In this state, the flux 21 is held thinly on the flat portion 11 at the tip of the transfer needle 49.

  FIG. 24 is a conceptual side view and an enlarged view of a main part showing a state in which the vacuum pump P is driven to the pressure side in the transfer head of the fifth modification.

  When the vacuum pump P is driven to the pressurizing side, the flux 21 in the sealed container 62 is pushed out from the first hole 7 of the transfer needle 9. In this state, the pressure in the sealed container 62 rises, and the flux 21 having a high viscosity can also be extruded.

  The continuously extruded flux 21 is supplied over the entire transfer needle 49 and is held in a nearly circular state due to surface tension. For this reason, a sufficient amount of the flux 21 can be transferred to the surface of the substrate 4.

  FIG. 25 is a conceptual side view and an enlarged view of a main part showing a state in which the vacuum pump P is driven to the pressure reducing side in the transfer head of the fifth modification.

  In this state, the pressure in the sealed container 62 decreases, the flux 21 is pulled back from the tip of the transfer needle 49, is accommodated in the sealed container 62, and the flux 21 remaining at the tip of the transfer needle 49 is retained. It is held in a state where it is thinly covered again.

  In this way, by adjusting the pressure in the sealed container 62, excess flux 21 adhering to the periphery of the transfer needle 9 is pulled back into the sealed container 62, and an appropriate amount of flux 21 remains at the tip of the transfer needle 49. be able to.

  Therefore, since the usage efficiency of the flux 21 is improved, the amount of decrease of the flux 21 is suppressed, and the number of times of continuous transfer coating can be increased.

  The present invention is not limited to the case where flux is applied as a pretreatment of the soldering process described above in the embodiment. For example, it is possible to transfer and apply an electrode paste as in the case of TSV electrode formation in the same manner as the flux. is there.

  Further, other materials such as bio-related reagents can be applied by transfer.

  The coated object is not limited to the substrate 4 and may be any coated material that is required to cope with a narrow pitch in any field such as transfer to a biochip.

  In the embodiment, the first hole 7 has a square shape in a top view, but is not limited to this, and may have any shape such as a circular shape or an oval shape.

  Further, each of the first holes 7 of the head body 6 is provided with a square-shaped first base portion 8 one by one. However, the present invention is not limited to this, and the first base portion is not limited thereto. 8 may have any shape such as a circular shape or an oval shape.

  Further, the shape and quantity of the first base portion 8 and the combination with the first hole 7 such as providing two or more first base portions 8 in each first hole 7 and the arrangement of the transfer needle 9 Is not particularly limited.

  The transfer unit according to the second modification is described with the atomizer 30 and the supply chamber 24 provided inside the coating unit 22 to which the transfer head 23 is mounted. The present invention is not limited to this, as long as the solvent of the flux 21 is sprayed around the plurality of transfer needles 9 through the gaps 17.

  For example, if the air in which the solvent of the flux 21 is atomized is sprayed around the plurality of transfer needles 9, the shape, quantity and material of the atomizer 30 and the supply chamber 24 for atomizing the solvent of the liquid substance Any location may be used.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  DESCRIPTION OF SYMBOLS 1 Application | coating apparatus, 2 Application | coating unit, 3 Transfer head, 4 Substrate, 5 Frame frame material, 6 Head main body, 7 1st hole part, 8 1st base part, 9 Transfer needle, 10 Side surface part, 11 Flat part, 12 elastic support part, 18 leg part, 18b second base part, 18d leg hole part, 101 observation optical mechanism, 102 drive mechanism, 103, 105, 106 X, Y, Z axis table, 104, 104 slide guide rail, 107 Control computer.

Claims (15)

An application unit for applying a liquid substance to the surface of an object to be applied,
A flat plate portion having a first hole formed therein;
A first base provided in the first hole;
A transfer needle that protrudes from the surface of the first base portion on the object to be coated and for applying the liquid substance to the object to be coated;
An application unit comprising: a first connecting portion that extends from the flat plate portion into the first hole and connects the first base portion and the flat plate portion.   The coating unit according to claim 1, wherein the first base portion is elastically supported by the first connecting portion so as to be displaceable along a protruding direction of the transfer needle.   The coating unit according to claim 1, wherein the flat plate portion, the first base portion, the transfer needle, and the first connection portion are formed of the same material. The transfer needle is formed in a tapered shape that narrows from the proximal end toward the distal end,
The coating unit according to any one of claims 1 to 3, wherein a flat portion having a predetermined area is formed at a tip of the transfer needle.   Further, the flat plate portion is provided around the transfer needle on the surface of the coated object side, and when the tip of the transfer needle is brought into contact with the surface of the coated object, the flat plate portion and the coated object The coating unit according to any one of claims 1 to 4, further comprising a plurality of legs for forming a predetermined gap between the surfaces. The flat plate portion is further provided with a plurality of second holes respectively corresponding to the plurality of leg portions,
And a plurality of second base portions respectively provided in the plurality of second holes,
A second connecting portion that extends from the flat plate portion into the second hole and connects the second base portion and the flat plate portion;
The coating unit according to claim 5, wherein the plurality of leg portions project from the surface of the plurality of second base portions on the object side.   The application unit according to any one of claims 1 to 6, wherein a groove for supplying the liquid substance from a proximal end to a distal end is formed on a side surface of the transfer needle. Furthermore, the liquid substance is injected, and includes a container having an opening,
The tip of the transfer needle is immersed in the liquid substance in the container through the opening, and the liquid substance is attached to the tip of the transfer needle. The coating unit described.   Furthermore, the atomizer which blows the air which atomized the solvent of the said liquid substance around the said transfer needle through the clearance gap between the said flat plate part and the said 1st base part is provided. The coating unit according to any one of the above.   The supply needle for penetrating from the 1st base part to a tip and supplying the liquid substance is formed in the transfer needle. Application unit. Further, provided on the surface of the flat plate portion on the opposite side to the object to be coated, the gap between the flat plate portion and the first base portion is closed, and a deformable sheet is provided,
The coating unit according to claim 10, further comprising a container that is provided on the sheet and supplies the liquid material to the supply hole. The container includes a sealed container filled with the liquid material,
Furthermore, the coating unit of Claim 11 provided with the pressure-intensification mechanism which adjusts the pressure in the said airtight container, and adjusts the supply amount of the said liquid substance. The coating unit according to any one of claims 1 to 12,
An observation optical unit for observing the surface of the object to be coated;
A coating apparatus comprising: a drive unit that moves the coating unit and the observation optical unit relative to the object to be coated. A transfer coating method using a coating unit that applies a liquid substance to a plurality of points on the surface of an object using a plurality of transfer needles,
A transfer coating method in which air in which a solvent is atomized is sprayed in order to prevent the liquid substance adhering to each transfer needle from drying. A transfer coating method using a coating unit that applies a liquid substance to a plurality of points on the surface of an object using a plurality of transfer needles,
Provide a feed hole that penetrates from the base end to the tip of each transfer needle,
The liquid substance is injected, and a sealed container connected to the supply hole is provided at the base end of each transfer needle,
A transfer coating method in which the pressure in the sealed container is controlled and the liquid substance is supplied to the tip of the transfer needle through a supply hole of each transfer needle.

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