JP2014078585A5 - - Google Patents

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Publication number
JP2014078585A5
JP2014078585A5 JP2012224925A JP2012224925A JP2014078585A5 JP 2014078585 A5 JP2014078585 A5 JP 2014078585A5 JP 2012224925 A JP2012224925 A JP 2012224925A JP 2012224925 A JP2012224925 A JP 2012224925A JP 2014078585 A5 JP2014078585 A5 JP 2014078585A5
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Japan
Prior art keywords
liquid substance
transfer needle
flat plate
transfer
plate portion
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JP2012224925A
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Japanese (ja)
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JP6013862B2 (en
JP2014078585A (en
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Priority to JP2012224925A priority Critical patent/JP6013862B2/en
Priority claimed from JP2012224925A external-priority patent/JP6013862B2/en
Publication of JP2014078585A publication Critical patent/JP2014078585A/en
Publication of JP2014078585A5 publication Critical patent/JP2014078585A5/ja
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Publication of JP6013862B2 publication Critical patent/JP6013862B2/en
Expired - Fee Related legal-status Critical Current
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Claims (15)

被塗布物の表面に液状物質を塗布する塗布ユニットであって、
第1の孔が開けられた平板部と、
前記第1の孔内に設けられた第1のベース部と、
前記第1のベース部の前記被塗布物側の表面から突設され、前記被塗布物に前記液状物質を塗布するための転写針と、
前記平板部から前記第1の孔内へ延設され、前記第1のベース部と前記平板部を連結する第1の連結部とを備える、塗布ユニット。
An application unit for applying a liquid substance to the surface of an object to be applied,
A flat plate portion having a first hole formed therein;
A first base provided in the first hole;
A transfer needle that protrudes from the surface of the first base portion on the object to be coated and for applying the liquid substance to the object to be coated;
An application unit comprising: a first connecting portion that extends from the flat plate portion into the first hole and connects the first base portion and the flat plate portion.
前記第1のベース部は、前記第1の連結部によって、前記転写針の突設方向に沿って変位可能となるように弾性的に支持されている、請求項1に記載の塗布ユニット。   The coating unit according to claim 1, wherein the first base portion is elastically supported by the first connecting portion so as to be displaceable along a protruding direction of the transfer needle. 前記平板部、前記第1のベース部、前記転写針および前記第1の連結部は、同じ材料で形成されている、請求項1または請求項2に記載の塗布ユニット。   The coating unit according to claim 1, wherein the flat plate portion, the first base portion, the transfer needle, and the first connection portion are formed of the same material. 前記転写針は基端から先端に向けて細くなるテーパ状に形成され、
前記転写針の先端には所定の面積の平坦部が形成されている、請求項1から請求項3のうちいずれか一項に記載の塗布ユニット。
The transfer needle is formed in a tapered shape that narrows from the proximal end toward the distal end,
The coating unit according to any one of claims 1 to 3, wherein a flat portion having a predetermined area is formed at a tip of the transfer needle.
さらに、前記平板部の前記被塗布物側の表面において前記転写針の周りに設けられ、前記転写針の先端を前記被塗布物の表面に接触させたときに前記平板部と前記被塗布物の表面の間に所定の隙間を形成するための複数の脚部を備える、請求項1から請求項4のうちいずれか一項に記載の塗布ユニット。   Further, the flat plate portion is provided around the transfer needle on the surface of the coated object side, and when the tip of the transfer needle is brought into contact with the surface of the coated object, the flat plate portion and the coated object The coating unit according to any one of claims 1 to 4, further comprising a plurality of legs for forming a predetermined gap between the surfaces. 前記平板部には、さらに、それぞれ前記複数の脚部に対応する複数の第2の孔が開けられており、
さらに、それぞれ前記複数の第2の孔内に設けられた複数の第2のベース部と、
前記平板部から前記第2の孔内へ延設され、前記第2のベース部と前記平板部を連結する第2の連結部とを備え、
前記複数の脚部は、それぞれ前記複数の第2のベース部の前記被塗布物側の表面に突設されている、請求項5に記載の塗布ユニット。
The flat plate portion is further provided with a plurality of second holes respectively corresponding to the plurality of leg portions,
And a plurality of second base portions respectively provided in the plurality of second holes,
A second connecting portion that extends from the flat plate portion into the second hole and connects the second base portion and the flat plate portion;
The coating unit according to claim 5, wherein the plurality of leg portions project from the surface of the plurality of second base portions on the object side.
前記転写針の側面には、基端から先端に向けて前記液状物質を供給するための溝が形成されている、請求項1から請求項6のうちいずれか一項に記載の塗布ユニット。   The application unit according to any one of claims 1 to 6, wherein a groove for supplying the liquid substance from a proximal end to a distal end is formed on a side surface of the transfer needle. さらに、前記液状物質が注入され、開口部を有する容器を備え、
前記転写針の先端を前記開口部を介して前記容器内の前記液状物質に浸漬させ、前記転写針の先端に前記液状物質を付着させる、請求項1から請求項7のうちいずれか一項に記載の塗布ユニット。
Furthermore, the liquid substance is injected, and includes a container having an opening,
The tip of the transfer needle is immersed in the liquid substance in the container through the opening, and the liquid substance is attached to the tip of the transfer needle. The coating unit described.
さらに、前記平板部と前記第1のベース部との隙間を介して前記転写針の周囲に前記液状物質の溶剤を霧化したエアーを吹きつける霧化器を備える、請求項1から請求項8のうちいずれか一項に記載の塗布ユニット。   Furthermore, the atomizer which blows the air which atomized the solvent of the said liquid substance around the said transfer needle through the clearance gap between the said flat plate part and the said 1st base part is provided. The coating unit according to any one of the above. 前記転写針には、前記第1のベース部から先端まで貫通し、前記液状物質を供給するための供給孔が形成されている、請求項1から請求項7のうちいずれか一項に記載の塗布ユニット。   The supply needle for penetrating from the 1st base part to a tip and supplying the liquid substance is formed in the transfer needle. Application unit. さらに、前記平板部の前記被塗布物と反対側の表面に設けられ、前記平板部と前記第1のベース部との隙間を閉塞し、変形可能なシートを備え、
前記シートの上に設けられ、前記供給孔に前記液状物質を供給する容器とを備える、請求項10に記載の塗布ユニット。
Further, provided on the surface of the flat plate portion on the opposite side to the object to be coated, the gap between the flat plate portion and the first base portion is closed, and a deformable sheet is provided,
The coating unit according to claim 10, further comprising a container provided on the sheet and configured to supply the liquid substance to the supply hole.
前記容器は、前記液状物質が注入された密閉容器を含み、
さらに、前記密閉容器内の圧力を調整して、前記液状物質の供給量を調整する加減圧機構を備える、請求項11に記載の塗布ユニット。
The container includes a sealed container filled with the liquid substance ,
Furthermore, the coating unit of Claim 11 provided with the pressure-intensification mechanism which adjusts the pressure in the said airtight container, and adjusts the supply amount of the said liquid substance.
請求項1から請求項12のうちいずれか一項に記載の塗布ユニットと、
前記被塗布物の表面を観察するための観察光学部と、
前記被塗布物に対して、前記塗布ユニットおよび前記観察光学部を相対的に移動させる駆動部とを備える、塗布装置。
The coating unit according to any one of claims 1 to 12 ,
An observation optical unit for observing the surface of the object to be coated;
A coating apparatus comprising: a drive unit that moves the coating unit and the observation optical unit relative to the object to be coated.
被塗布物の表面の複数の点に、複数の転写針を用いて液状物質を塗布する塗布ユニットを用いた転写塗布方法であって、
各転写針に付着した前記液状物質の乾燥を防止するため、溶剤を霧化したエアーを噴きつける、転写塗布方法。
A transfer coating method using a coating unit that applies a liquid substance to a plurality of points on the surface of an object using a plurality of transfer needles,
A transfer coating method in which air in which a solvent is atomized is sprayed in order to prevent the liquid substance adhering to each transfer needle from drying.
被塗布物の表面の複数の点に、複数の転写針を用いて液状物質を塗布する塗布ユニットを用いた転写塗布方法であって、
各転写針の基端から先端に貫通する供給孔を設け、
前記液状物質が注入され、各転写針の基端において前記供給孔に接続された密閉容器を設け、
前記密閉容器内の圧力を制御し、前記液状物質を各転写針の供給孔を介して前記転写針の先端に供給する、転写塗布方法。
A transfer coating method using a coating unit that applies a liquid substance to a plurality of points on the surface of an object using a plurality of transfer needles,
Provide a feed hole that penetrates from the base end to the tip of each transfer needle,
The liquid substance is injected, and a sealed container connected to the supply hole is provided at the base end of each transfer needle,
A transfer coating method in which the pressure in the sealed container is controlled and the liquid substance is supplied to the tip of the transfer needle through a supply hole of each transfer needle.
JP2012224925A 2012-10-10 2012-10-10 Coating unit and coating device Expired - Fee Related JP6013862B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012224925A JP6013862B2 (en) 2012-10-10 2012-10-10 Coating unit and coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012224925A JP6013862B2 (en) 2012-10-10 2012-10-10 Coating unit and coating device

Publications (3)

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JP2014078585A JP2014078585A (en) 2014-05-01
JP2014078585A5 true JP2014078585A5 (en) 2015-11-12
JP6013862B2 JP6013862B2 (en) 2016-10-25

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110976186B (en) * 2019-12-13 2022-08-05 新昌中国计量大学企业创新研究院有限公司 Electrode coating device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06226172A (en) * 1993-02-05 1994-08-16 Sony Corp Liquid transfer apparatus and method
JP3540901B2 (en) * 1995-07-11 2004-07-07 新日本製鐵株式会社 Method of transferring flux to electrode and method of manufacturing bump
JP4045517B2 (en) * 1998-09-25 2008-02-13 澁谷工業株式会社 Flux transfer device
JP4174920B2 (en) * 1999-07-09 2008-11-05 澁谷工業株式会社 Transfer head
JP4586583B2 (en) * 2005-03-10 2010-11-24 ソニー株式会社 Semiconductor device bonding method
JP2007090188A (en) * 2005-09-28 2007-04-12 Hitachi Metals Ltd Printing material coating method and printing material coater
JP4702237B2 (en) * 2006-09-15 2011-06-15 パナソニック株式会社 Electronic component mounting apparatus and electronic component mounting method

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