JP2014076443A - Fine bubble generator, minute discharge hole nozzle, and method for manufacturing the minute discharge hole nozzle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fine bubble generator which can improve a degree of freedom of controlling the generation of fine bubbles, and a minute discharge hole nozzle and a method for forming the minute discharge hole nozzle.SOLUTION: A fine bubble generator 1 sends pressurized gas through a discharge hole 23 having a minute diameter to generate fine bubbles. The discharge hole 23 is formed in a piezoelectric element 9 which receives pressure of the pressurized gas. The fine bubble generator 1 includes: a gas supply source 11 which sets the pressure of the pressurized gas; a piezoelectric element 9 which vibrates the discharge hole 23 in the hole axis direction; and a voltage generating part 15 which controls the amplitude and frequency of the piezoelectric element 9. Fine bubbles are formed by the setting of the minute diameter of the discharge hole 23, the setting of the pressure of the pressurized gas, and the control of the amplitude and frequency by the voltage generating part 15.

Description

  The present invention relates to a microbubble generator for generating microbubbles such as a microvalve used for decontamination, a microdischarge hole nozzle used for the microbubble generator, and a method for manufacturing the same.

 Micro bubbles are microbubbles of several tens of micrometers or less. The size of bubbles that are normally generated in water is about a few millimeters in diameter.Comparing micro bubbles with normal bubbles, normal bubbles are generated in water, then rise to the surface of the water and burst and disappear. Since the volume of micro bubbles is very small, the rising speed is slow and the residence time in water is long.

  Micro bubbles have a self-pressurizing effect. The self-pressurizing effect is a phenomenon in which the pressure inside the bubble rises due to the surface tension acting on the gas-liquid interface of the bubble, aggregates, and compresses and disappears before reaching the water surface. It is said that the gas-liquid interface is pressurized to several tens of atmospheres or more.

  In addition, since the micro bubbles have a charge of about −30 mV to −50 mV, the micro bubbles repel each other and stay in water until the bubbles disappear without being bonded.

  Microbubbles use their unusual ability to stay in water while being charged and self-extinguish, and examples of their applications include water quality improvement, capillary contrast agents, and cell activation.

In order to generate such micro bubbles, there have been several methods in the past.

  As one method, it is described in Patent Document 1 and is a method of blowing a gas into a liquid through a porous body. In this method, gas is supplied from a gas supply device such as a compressor to a pipe through which water flows through a porous body to generate micro bubbles.

  As another method, which is precious in Patent Document 2, a shearing force is applied to the bubble surface to tear off the bubble.

  However, in the micro-bubble generating device using a porous body, since bubbles are difficult to separate from the porous body, the generated bubbles are larger than the pore size of the porous body, and it is a problem that minute bubbles cannot be generated Met.

  In addition, in the method using the shearing force on the bubble surface, by giving a swirl flow to the liquid, the pressure loss increases and the ratio of the gas in the liquid is lower than that in the case of using the porous body. It was a problem.

  In order to solve these problems, there is a method described in Patent Document 3, and a tubular body having an outlet opening smaller than the diameter of a micro bubble is vibrated in a tube axis direction or a tube axis orthogonal direction with respect to a liquid. Microbubbles are generated in such a manner that bubbles adjacent to the outlet opening are torn before they grow and become too large.

  However, since the bubble at the outlet opening is simply broken by the vibration of the tubular body, there is a limit to the degree of freedom of control such as how to generate micro bubbles such as micro bubbles.

JP-A-8-2225094 JP 2003-205228 A JP 2007-253000 A

  The problem to be solved is that it limits the degree of freedom of control such as how to generate microbubbles.

  The present invention is a microbubble generator for generating microbubbles by sending pressurized gas into a liquid from a microdiameter discharge hole formed in a plate-like body in order to improve the degree of freedom in controlling microbubble generation. A gas pressure setting unit that sets the pressure of the pressurized gas, a vibration generating unit that vibrates the plate-like body in the direction of the hole axis of the discharge hole, and a vibration generator that controls the amplitude and frequency of the vibration generating unit A feature of the microbubble generator, comprising: a control unit, wherein the microbubbles are formed by setting the microdiameter of the discharge hole, setting the pressure of the pressurized gas, and controlling the amplitude and frequency of the vibration generating unit. And

  The present invention is a micro discharge hole nozzle for sending pressurized gas into a liquid from a micro diameter discharge hole formed in a plate-like body to generate micro bubbles, and the plate-like body is disposed in the discharge hole. A feature of the minute discharge hole nozzle is that it includes a vibration generating portion that vibrates in the direction of the hole axis.

  The present invention relates to a method of manufacturing a fine discharge hole nozzle for generating a fine bubble by sending pressurized gas from a fine diameter discharge hole formed in a plate-like body into a liquid. And the discharge hole is formed across the plate and the metal foil so that the metal foil side has a smaller diameter and constitutes the discharge front end side. To do.

  Since the microbubble generator of the present invention is configured as described above, by forming microbubbles by setting the microdiameter of the discharge hole, setting the pressure of the pressurized gas, and controlling the amplitude and frequency of the vibration generating unit, The degree of freedom in controlling the generation of microbubbles can be improved, for example, by ejecting microbubbles in a straight line at regular intervals.

  Since the micro discharge hole nozzle of the present invention has the above-described configuration, it can be used in a micro bubble generator to contribute to improving the degree of freedom in controlling micro bubble generation.

  Since the manufacturing method of the micro discharge hole nozzle of this invention is the said structure, the nozzle which has a micro diameter discharge hole used for a micro bubble generator can be formed.

It is the schematic which has arrange | positioned the microbubble generator to the liquid tank. Example 1 It is the schematic of a microbubble generator. Example 1 (A) is sectional drawing of a micro discharge hole nozzle, (B) is a principal part top view which shows the inner surface of a micro discharge hole nozzle. Example 1 (A)-(L) are explanatory drawings which show the variation of discharge hole shape. Example 1 (A) is a schematic cross-sectional view of a piezoelectric element, (B) is a schematic cross-sectional view of a piezoelectric element having a discharge hole, and (C) is a schematic cross-sectional view of a piezoelectric element in which a discharge tip hole is formed in the discharge hole. is there. Example 1 It is a schematic sectional drawing of the piezoelectric element seen from the discharge front end side. Example 1 (A) is a cross-sectional view of a state in which a laser beam is irradiated to the central part of a unimorph-structured piezoelectric element, (B) is a cross-sectional view showing a state in which the same discharge hole is formed, and (C) is a discharge hole. It is a principal part front image shown. Example 1 (A) is a cross-sectional view showing a state in which a metal foil is bonded to a piezoelectric element having a unimorph structure, (B) is a cross-sectional view showing a state in which discharge holes are formed in the metal foil by a focused ion beam, and (C) is a cross-sectional view. Sectional drawing which shows the state by which the discharge hole was formed in metal foil, (D) is a principal part front image which shows the discharge hole of metal foil. Example 1 (A) is explanatory drawing which shows the state which forms the deposit which made the ion beam and carbon gas react on the metal foil side, (B) is the discharge tip side by the side of metal foil and is made into a smaller diameter by deposit. It is a principal part front image which shows the formed state. Example 1 It is the image of the result of having raised the frequency in order from (A) to (D), showing the state of occurrence due to the frequency change of microbubbles by the microejection hole nozzle provided with the ejection holes of FIG. Example 1 It is the image of the result of having raised gas pressure in order of (A) and (B), which shows the generation situation by the frequency change of the micro bubble by the micro discharge hole nozzle provided with the discharge hole of FIG. Example 1 It is the image of the result of having raised the frequency in order of (A) and (B), which shows the occurrence state by the frequency change of the micro bubble by the micro discharge hole nozzle provided with the discharge hole of FIG. Example 1 It is the image of the result of having raised the frequency in order of (A) and (B) rather than FIG. 12 (B), showing the generation | occurrence | production state by the frequency change of the micro bubble by the micro discharge hole nozzle provided with the discharge hole of FIG. Example 1 The generation of microbubbles is shown. (A) shows the situation of microbubbles with a size of several hundred μm discharged obliquely upward from the microdischarge hole nozzle, and (B) shows that the microdischarge hole nozzle goes straight to the water surface. It is an image which shows the condition of the bubble to discharge | release. It is a graph which shows the number of bubbles with respect to the change of gas pressure from 10 kPa to 100 kPa. It is an image which shows the behavior of the micro bubble discharge | released from a micro discharge hole nozzle by gas pressure 5kPa. It is an image which shows the frequency dependence of the micro bubble discharge | released from a micro discharge hole nozzle. It is a graph which shows the generation amount of the micro bubble with respect to frequency. It is a graph which shows the speed of the micro bubble discharge | released from a micro discharge hole nozzle. It is a graph of the resonant frequency by the frequency-admittance measurement of the fine discharge hole nozzle. It is explanatory drawing which shows the drive mode measurement result of the micro discharge hole nozzle by a laser Doppler. It is a schematic front view which shows the state which formed multiple discharge holes in the piezoelectric element of a unimorph structure. Example 1 It is a schematic sectional drawing of the fine discharge hole nozzle which piled up the piezoelectric element and was used as the vibration generation part. Example 1 It is a schematic sectional drawing of the fine discharge hole nozzle which used the Langevin vibrator as the vibration generation part. Example 1 It is a schematic sectional drawing of the fine discharge hole nozzle which piled up the piezoelectric element and was used as the vibration generation part. Example 1 It is a schematic sectional drawing of the fine discharge hole nozzle which used the electromagnetic coil and the magnet as the vibration generation part. Example 1 It is a schematic sectional drawing of the fine discharge hole nozzle which used the impulse discharge device as the vibration generation part. Example 1 It is a schematic sectional drawing of the fine discharge hole nozzle using a needle-shaped nozzle. Example 1 It is a perspective view of the state where the needle-shaped nozzle was attached to the plate-shaped body. Example 1 It is a perspective view of a piezoelectric element. Example 1 It is explanatory drawing which shows manufacture of a needle-shaped nozzle. Example 1 It is explanatory drawing of extending of a plastic circular pipe body. Example 1 It is a principal part schematic sectional drawing which shows the state by which the discharge front end side of the needle-shaped nozzle was formed in the small diameter with the deposit. Example 1 It is an image which shows the generation | occurrence | production state of the micro bubble by the micro discharge hole nozzle provided with the needle-shaped nozzle, and shows the result of an oscillation. Example 1 It is an image which shows the generation | occurrence | production state of the micro bubble by the micro discharge hole nozzle provided with the needle-shaped nozzle, and shows the result after an oscillation. Example 1 (A) is a schematic sectional view of the micro discharge hole nozzle shown together with the needle-like tool, and (B) is an inner surface view of the micro discharge hole nozzle as viewed from the piezoelectric element side. Example 1 (A)-(C) are explanatory drawings which show the variation of discharge hole shape. Example 1 (A) is a schematic sectional view of the micro discharge hole nozzle shown together with the needle-like tool, and (B) is an inner surface view of the micro discharge hole nozzle as viewed from the piezoelectric element side. Example 1 (A) is a schematic sectional view of a minute discharge hole nozzle, and (B) is an inner surface view of the minute discharge hole nozzle as viewed from the piezoelectric element side. Example 1 1 shows a structure including an auxiliary vibration generating unit that vibrates in a direction intersecting with the vibration of the discharge hole, (A) is a schematic cross-sectional view of the main part, and (B) is a plurality of discharge holes in a unimorph piezoelectric element. It is a schematic front view which shows the state formed. (Example 2) 1 shows a structure including an auxiliary vibration generating unit that vibrates in a direction crossing the vibration of the discharge hole, (A) is a schematic cross-sectional view of the main part, and (B) is a state in which the discharge hole is formed in the piezoelectric element. It is a schematic front view shown. (Example 2) The structure provided with the auxiliary | assistant vibration generation part made to vibrate in the direction which cross | intersects with the vibration of a discharge hole is shown, (A) is principal part schematic sectional drawing, (B) is a principal part schematic front view. (Example 2) It is a schematic sectional drawing which shows the vibration generation part formed with the concave curved surface centering on the discharge hole. (Example 3) It is a schematic sectional drawing which shows the vibration generation part formed with the concave curved surface centering on the discharge hole. (Example 3) It is a schematic block diagram which shows the structure which provided the external force provision part which applies external force to the micro bubble discharged from a discharge hole, and grind | pulverizes it smaller. Example 4 It is a schematic block diagram which shows the structure which provided the external force provision part which applies external force to the micro bubble discharged from a discharge hole, and grind | pulverizes it smaller. Example 4 It is a schematic block diagram which shows the structure which provided the external force provision part which applies external force to the micro bubble discharged from a discharge hole, and grind | pulverizes it smaller. Example 4

  In order to improve the degree of freedom in controlling the generation of microbubbles, the microbubble generating device 1 generates microbubbles by sending pressurized gas from a microdiameter discharge hole 23 into the liquid. A piezoelectric element 9 that is a plate-like body that receives the pressure of pressurized gas, a gas supply source 11 that sets the pressure of the pressurized gas, a piezoelectric element 9 that vibrates the discharge hole 23 in the axial direction of the hole, and a piezoelectric element 9 and a voltage generator 15 for controlling the amplitude and frequency of the nozzle 9, and by setting the minute diameter of the discharge hole 23, setting the pressure of the pressurized gas, and controlling the amplitude and frequency of the piezoelectric element 9 by the voltage generator 15 Realized by forming a bubble.

[Microbubble generator]
FIG. 1 is a schematic view of a microbubble generator arranged in a liquid tank, and FIG. 2 is a schematic view of the microbubble generator.

  As shown in FIG. 1, a tube body 5 to which a minute discharge hole nozzle 3 of a minute bubble generator 1 is attached is disposed in a liquid tank 7 in which a liquid such as water is accommodated.

  As shown in FIG. 2, in the microbubble generator 1, a micro discharge hole nozzle 3 is attached to the tip of a tube body 5, and a piezoelectric element 9 having, for example, a unimorph structure is attached to the micro discharge hole nozzle 3 as a plate-like body. It has been.

  A gas supply source 11 is connected to the tube body 5 so that pressurized gas can be controlled and supplied into the tube body 5. The gas supply source 11 constitutes a gas pressure setting unit that sets the pressure of the pressurized gas.

  A voltage generator 15 is connected to the piezoelectric element 9 via an amplifier 13 so that a voltage having a set cycle in which amplitude and frequency are set can be applied to the piezoelectric element 9. When a voltage having a set period and amplitude is applied to the piezoelectric element 9, the piezoelectric element 9 including the discharge hole 23 of the minute discharge hole nozzle 3 vibrates in the hole axis direction. This vibration is bending vibration of the piezoelectric element 9 in this embodiment, and vibrates the discharge hole 23 in the hole axis direction.

  Accordingly, the piezoelectric element 9 constitutes a vibration generation unit, and the voltage generation unit 15 constitutes a vibration generation control unit that controls the amplitude and frequency of the voltage applied to the piezoelectric element 9.

  With such a microbubble generator 1, it is possible to generate a microbubble by sending pressurized gas from the micro discharge hole nozzle 3 into the liquid. The microbubbles are formed by setting the micro diameter of the discharge hole of the micro discharge hole nozzle 3, setting the pressure of the pressurized gas by the gas supply source 11, and controlling the amplitude and frequency of the piezoelectric element 9 by the voltage generator 15. And done. The pressure of the pressurized gas is set in accordance with the diameter and shape of the discharge hole 23 and the excitation amount in the pressure range of several kPa to several MPa to adjust the diameter of the microbubbles. In this embodiment, the set pressure of the pressurized gas is a positive pressure such that the pressurized gas is not discharged from the discharge hole 23 having a small diameter. However, the pressurized gas may be discharged from the discharge hole 23 by setting the pressure of the pressurized gas.

  3A is a cross-sectional view of the minute discharge hole nozzle, and FIG. 3B is a plan view of the main part showing the inner surface of the minute discharge hole nozzle.

  As shown in FIG. 3, the piezoelectric element 9 is formed in a circular shape, for example, and the piezoelectric ceramic 17 is bonded to a metal plate 19 such as SUS, and the outer peripheral portion of the metal plate 19 is supported by the nozzle body 3 a of the micro discharge hole nozzle 3. Has been. With this support, the piezoelectric element 9 bends and vibrates in the hole axial direction with respect to the discharge hole 23.

  A metal foil 21 such as a molybdenum foil is bonded to the discharge side of the piezoelectric element 9 to form a plate-like body accompanying the piezoelectric element 9.

  The piezoelectric element 9 can employ a ceramic or quartz plate-shaped piezoelectric element or a bimorph structure, and can similarly form discharge holes. In addition, the Langevin vibrator will be described later.

  In the piezoelectric element 9, a discharge hole 23 having a small diameter is formed in the center portion over the metal foil 21. In the discharge hole 23, an inner discharge hole 23a from the metal plate 19 to the piezoelectric ceramic 17 and an outer discharge hole 23b on the discharge tip side of the metal foil 21 are formed concentrically or substantially concentrically.

  Thus, the discharge hole 23 extends over the piezoelectric element 9 and the metal foil 21, and the outer discharge hole 23 b on the metal foil 21 side has a smaller diameter than the inner discharge hole 23 a and constitutes the discharge tip side. The inner discharge hole 23a is formed to have a minimum diameter of several μm to several tens of μm, and has a maximum diameter of several tens of μm to several mm. The outer discharge hole 23b is formed to have a diameter of several nanometers to several micrometers including formation of deposits to be described later.

  The inner discharge hole 23a is formed in a horn shape that gradually decreases in diameter toward the outer discharge hole 23b, and guide grooves 23aa are formed radially on the inner surface. The guide groove 23aa is formed in a somewhat spiral shape. The horn shape and the spiral guide groove 23aa of the outer discharge hole 23b make it easy to focus the pressurized gas toward the outer discharge hole 23b.

The outer discharge hole 23b can be formed straight, and the guide groove 23aa can be omitted.
[Formation of discharge hole of minute discharge hole nozzle]
The discharge hole 23 of the minute discharge hole nozzle 3 in FIG. 3 is formed by forming a laser beam in the range of several μm to several tens of μm of the inner discharge hole 23a, and three-dimensionally cutting the same range of several tens of μm to several mm. By processing with a rapid prototype machine, the range of several nm to several μm of the outer discharge hole 23b can be formed with a focused ion beam.

  4A to 4L are explanatory views showing variations of the discharge hole shape.

  As shown in FIGS. 4 (A) to 4 (L), the inner discharge hole 23a is processed by a three-dimensional cutting rapid prototype machine, in addition to a circle, an ellipse, polygon, star, tachibana, cross, Y It can be formed in an arbitrary shape such as a letter shape, and can be easily formed into a three-dimensional shape such as a spiral shape of the guide groove 23aa.

  The discharge holes 23 can also be formed as follows.

  5A is a schematic cross-sectional view of a piezoelectric element, FIG. 5B is a schematic cross-sectional view of a piezoelectric element having a discharge hole, and FIG. 5C is a schematic cross-section of a piezoelectric element in which a discharge tip hole is formed in the discharge hole. FIG. FIG. 6 is a schematic cross-sectional view of the piezoelectric element viewed from the ejection tip side.

  As shown in FIG. 5B, ejection holes 23 are formed on the piezoelectric element 9 shown in FIG. 5A by a laser beam. Next, as shown in FIG. 5C, a deposit 25 is formed on the piezoelectric element 9 on the tip side of the discharge hole 23 by reacting the ion beam with the carbon gas. With this deposit 25, a discharge tip hole 23c having a small diameter is formed in the discharge hole 23 as shown in FIGS.

  FIG. 7A is a cross-sectional view showing a state in which a laser beam is irradiated to the central portion of a unimorph-structure piezoelectric element, FIG. 7B is a cross-sectional view showing a state in which the discharge holes are formed, and FIG. It is a principal part front image which shows a hole.

  As shown in FIG. 7A, the piezoelectric element 9 is irradiated with a laser beam 27 to form a small-diameter ejection hole 23 in the piezoelectric element 9 as shown in FIGS. 7B and 7C.

  8A is a cross-sectional view showing a state in which a metal foil is bonded to a unimorph piezoelectric element, and FIG. 8B is a cross-sectional view showing a state in which discharge holes are formed in the metal foil by a focused ion beam. ) Is a cross-sectional view showing a state in which discharge holes are formed in the metal foil, and (D) is a main part front image showing the discharge holes of the metal foil.

  As shown in FIG. 8A, a metal foil 21 such as molybdenum is fixed to the piezoelectric element 9 in which the inner discharge hole 23a is formed by laser beam irradiation. The metal plate 19 is bonded to the nozzle body 3a. In the figure, a portion surrounded by a circle indicates an adhesion portion, and a chemical reaction adhesive or the like is used as the adhesive.

  The focused ion beam 29 is irradiated through the inner discharge hole 23a as shown in FIG. 8B, and the outer discharge hole 23b is concentrically or substantially concentrically formed in the metal foil 21 as shown in FIGS. 8C and 8D. Form concentric.

  As shown in FIG. 8, the discharge hole 23 was formed across the piezoelectric element 9 and the metal foil 21 which are plate-like bodies so that the metal foil 21 side has a smaller diameter and constitutes the discharge front end side.

  FIG. 9A is an explanatory diagram showing a state in which a deposit is formed by reacting an ion beam and carbon gas on the metal foil side, and FIG. 9B is a diagram in which the discharge tip side on the metal foil side is a deposit. It is a principal part front image which shows the state formed in the small diameter.

  As shown in FIG. 9A, with respect to the piezoelectric element 9 in which the outer discharge hole 23b is formed in the metal foil 21, a focused ion beam and carbon gas (on the discharge tip side of the outer discharge hole 23b in the discharge hole 23). The deposit 25 was reacted with the phenanthrene gas (31) to form a smaller diameter.

  FIG. 10 shows the state of occurrence due to the frequency change of the microbubbles by the microdischarge hole nozzle having the discharge holes of FIG. 7, and is an image as a result of increasing the frequency in order from (A) to (D). FIG. 11 shows the state of occurrence due to the frequency change of the microbubbles by the microdischarge hole nozzle provided with the discharge holes of FIG. 8, and is an image of the result of increasing the gas pressure in order of (A) and (B). FIG. 12 shows the state of occurrence due to the frequency change of the microbubbles by the microdischarge hole nozzle having the discharge holes of FIG. 9, and is an image of the result of increasing the frequency in order of (A) and (B). FIG. 13 shows a state of occurrence due to a change in the frequency of micro bubbles by the micro discharge hole nozzle having the discharge hole of FIG. 9, and the results of increasing the frequency in order of (A) and (B) than in FIG. 12 (B). It is an image.

  In the case of the minute discharge hole nozzle 3 in FIG. 7, minute bubbles can be generated as shown in FIG. 10, and the generation of the minute bubbles can be changed by frequency control or the like.

  In the case of the fine discharge hole nozzle 3 in FIG. 8 in which the outer discharge hole 23b having a smaller diameter is further formed in the metal foil 21, it is possible to generate a fine bubble as shown in FIG. Was able to change.

  In the case of the minute discharge hole nozzle 3 of FIG. 9 in which the deposit 25 is formed on the discharge tip side of the outer discharge hole 23b and further reduced in diameter, as shown in FIGS. 12 and 13, minute bubbles can be generated, It was possible to change the generation of microbubbles by frequency control.

In particular, in the case of the fine discharge hole nozzle 3 of FIG. 9, the diameter of the discharge hole 23 is set to several nanometers to several micrometers by the deposit 25, and the generation state of the fine bubbles and the diameter of the bubbles can be accurately controlled. .
[Experiment]
14A and 14B show the generation of microbubbles, where FIG. 14A shows the situation of microbubbles of several hundred μm size discharged obliquely from the microdischarge hole nozzle, and FIG. 14B shows the state from the microdischarge hole nozzle to the water surface. It is an image which shows the condition of the bubble discharge | released so that it may go straight.

(experimental method)
・ Production of piezoelectric element nozzle
The micro discharge hole nozzle (hereinafter also referred to as a piezoelectric element nozzle) is a piezoelectric element (Murata Manufacturing Co., Ltd .: 7BB-12-9, resonance frequency: 9.0 ± 1.0 kHz, diameter: 12 mm, thickness: 0.22 mm) laser (LOTIS) It was manufactured in two steps: TII LS2147, wavelength: 1064 nm, 250 mJ / Pulse) and carbon deposition by focused ion beam (Seiko Instruments: SMI2200).

  First, as explained in FIG. 5, two shots of YAG laser focused on the central portion of the piezoelectric element are irradiated, and a hole of several hundred μm is penetrated by a depth method. Next, the focused ion beam and carbon gas (phenanthrene C14H10) are reacted to deposit a fine carbon product with an accuracy of several μm. The hole diameter, which was several hundred μm, was reduced to about 30 μm by covering the periphery of the hole that penetrated this deposit with a laser.

  The processed piezoelectric element nozzle was bonded to a flange and installed in a water tank filled with pure water as shown in FIG. FIG. 9B shows an image of a hole micro-processed in the piezoelectric element.

-Observation of bubble behavior generated under pipe pressure (10 kPa to 100 kPa) A pressure of 10 kPa to 100 kPa with nitrogen gas is applied to the piezoelectric element nozzle to generate bubbles from the nozzle part. In addition, the bubble behavior when 150 V and a frequency of 12 kHz are applied to the piezoelectric element is observed with a high speed camera (manufactured by KEYENCE: VW50). The bubble size and generation amount are obtained from the observed image.

・ Observation of micro-bubble behavior generated under pipe pressure of 5 kPa
A pressure of 5 kPa is applied to the piezoelectric element nozzle with nitrogen gas. Since bubbles are not observed at 5 kPa, in this state, 75, 100, to 150 V and 10 k, 11 k, to 16 kHz are applied to the piezoelectric element to eject the bubbles. The bubble behavior was observed with a high-speed camera.

(Experimental result)
・ In-pipe pressure (observation of bubble behavior generated under 10 kPa to 100 kPa
An optical image is shown about the bubble generation state at the time of pipe | tube internal pressure 200kPa (no piezoelectric element drive). Bubble generation can be roughly divided into two areas. The first region of several hundred μm-sized microbubbles (FIG. 14A) discharged diagonally upward from the piezoelectric element nozzle, and the bubble diameter discharged from the piezoelectric element nozzle so as to go straight to the water surface is less than several millimeters in size. The second region of the bubble (FIG. 14B). The image in FIG. 14 was taken with a high speed camera.

  Regarding the first region, when the pressure inside the tube was 10 kPa, no microbubbles were observed as shown in FIG. On the other hand, when the pressure inside the tube was set to 2 kPa, a plurality of microbubbles could be confirmed. The bubble particle size was estimated to be several hundred μm or less when a bubble having a size that can be measured was selected from the image. The number of bubbles of several hundred μm or less increased when the pressure inside the tube was increased to 40 kPa and 80 kPa.

  FIG. 15 is a graph showing the number of bubbles with respect to a change in gas pressure from 10 kPa to 100 kPa. Regarding the state of bubble emission in the first region, the result of graphing the number of bubbles that can be counted from the image when the tube pressure is changed from 10 kPa to 100 kPa is shown.

  When the pressure inside the tube was 20 kPa, about 20 microbubbles of several hundred μm or less could be confirmed in the image. By increasing the pressure inside the tube from 20 kPa to 80 kPa, the number of bubbles in the image increased linearly. When the pressure in the pipe was 100 kPa, the linearity was lost, the rate of increase in the number of bubbles was reduced, and there was a tendency for saturation.

  A voltage was applied to the piezoelectric element nozzles under the conditions of these internal pressures of 10 kPa to 100 kPa, and images were confirmed with a high speed camera. No unusual change was observed in the state of occurrence of bubbles in the first region. Regarding the bubbles in the second region, the behavior was such that the bubbles scattered from the piezoelectric element.

・ Observation of micro-bubble behavior generated under pipe pressure of 5 kPa
When the pressure in the tube is 5 kPa, no bubbles are emitted from the piezoelectric element nozzle. It is considered that this cannot be released because the surface tension acting on the nozzle surface exceeds the pressure in the tube. When the piezoelectric element nozzle was operated in this state, it was confirmed that bubbles were released, and the experimental results will be described.

  FIG. 16 is an image showing the behavior of micro bubbles emitted from the micro discharge hole nozzle at a gas pressure of 5 kPa.

  The behavior of the micro bubble was observed in the high-speed camera image when the pressure inside the tube was set to 5 kPa and a voltage was applied to the piezoelectric element nozzle. At 0 sec, 150 V and 13 kHz are applied to the piezoelectric element. After 4 seconds from the application, micro-bubble particle groups were confirmed in the vertical direction from the surface of the piezoelectric element.

  The micro bubble particle group has directivity, and after 8 sec, the leading micro bubble particle group diffused. From then on, micro-bubble particles were always released from the piezoelectric element nozzle, and continued to diffuse when traveling to a certain distance. The size of this bubble does not rise to the surface after 20 seconds. Furthermore, since it keeps drifting in the water tank for several tens of seconds thereafter, the generated bubble is a nano-micro bubble.

  FIG. 17 is an image showing the frequency dependence of the micro bubbles emitted from the micro discharge hole nozzle.

  125V was applied to the piezoelectric element nozzle at a different frequency at an internal pressure of 5 kPa, and the image was taken with a high-speed camera after 30 seconds. The state of the emission of microbubble particles was greatly different depending on the frequency.

  Specifically, in the case of 11 kHz, the amount of emitted microbubbles is small, but the directivity is high compared to other images. In the case of 13 kHz, the generation amount of micro bubbles is higher than that in 11 kHz, but particles having a high image contrast ratio can be confirmed. Therefore, it is considered that the bubble size uniformity is poor. In the case of 15 kHz, the directivity is poor, but it can be said that microbubbles are emitted so as to diffuse from the piezoelectric element nozzle.

  FIG. 8 is a graph showing the amount of microbubbles generated with respect to frequency.

  The amount of micro bubbles generated at each frequency when the applied voltage of the piezoelectric element was 125 V was estimated from the contrast ratio of the high-speed camera image. As a result, generation of bubbles could not be confirmed at 10 kHz or less and 16 kHz or more, and generation of micro-bubble particles was confirmed only within a frequency range of 11 kHz to 15 kHz.

  Among them, when the frequency was 12, 13, and 14 kHz, a large amount of micro bubble particle groups appeared, and at the same time, micro bubble groups having directivity in the direction perpendicular to the piezoelectric element nozzle surface were confirmed. The consideration on this result will be described together with the vibration mode and resonance frequency of the piezoelectric element described later.

  FIG. 19 is a graph showing the speed of micro bubbles emitted from the micro discharge hole nozzle.

  The input voltage of the piezoelectric element nozzle and the moving speed of the micro-bubble particles were derived from images taken with a high-speed camera. The frequency is 12 kHz. The moving speed of the micro-bubble particles increased as the input voltage value increased. This is thought to be due to an increase in the moving speed because the effectiveness of discharging bubbles from the inside of the gas pipe increases because the amplitude of the piezoelectric element increases as the input voltage increases.

  FIG. 20 is a graph of resonance frequency by frequency-admittance measurement of the fine ejection hole nozzle.

  It is the resonance frequency derivation | leading-out result of the piezoelectric element by the admittance measurement result with respect to the frequency of a piezoelectric element when a piezoelectric element nozzle is immersed under a water tank and it drives by 10V. The pressure in the tube was 5 kPa where micro bubbles were generated.

  In the reduced view in the figure, the admittance value increases linearly with respect to the frequency, but the numerical value fluctuated from 10.0 kHz to 12.5 kHz and from 22 kHz to 24 kHz. When the measurement was expanded from 10.0 kHz to 12.5 kHz, it was not clear from 10.5 kHz to 11.0 kHz, but had a peak in the admittance value. Similarly, there were a plurality of peaks from 11.5 kHz to 12.0 kHz.

  On the other hand, resonance was not confirmed in the frequency band from 12.0 kHz to 14.0 kHz where the generation amount of micro bubbles was abundant in this experiment. This is because, in the experiment of FIG. 20, the piezoelectric element is driven at 10 V, whereas when micro bubbles are generated, heat is generated in the element because several hundred V is applied to the piezoelectric element. It is presumed that the resonance frequency has shifted due to the heat generation.

  The resonance frequency of the piezoelectric element used in this experiment is around 9 kHz ± 1 kHz in the atmosphere. However, this piezoelectric element is drilled by a focused ion beam, the piezoelectric nozzle is adhered to the flange, and the resonance frequency is affected by the pressure of water and gas pressure received because it is immersed in water. Seems to have fluctuated.

  It was confirmed that a clear resonance frequency was possessed from 22 kHz to 24 kHz. When driven at this frequency, the generation of micro bubbles could not be confirmed. Therefore, it is considered that the vibration mode of the piezoelectric element affects the generation of micro bubbles.

  FIG. 21 is an explanatory view showing the drive mode measurement result of the micro discharge hole nozzle by the laser Doppler.

  In the experiment according to FIG. 21, external factors such as water pressure and gas pressure are not applied to the piezoelectric element. The vibration is larger in the region near the coordinates (0, 5) (numerical value = 1.0) on the lower side of the figure, and the vibration is smaller in the dense part (numerical value = 0.0). The piezoelectric element is driven at about 10 kHz. About 10 kHz is the resonance frequency of the specification of this piezoelectric element. Since the vibration is strong near the coordinates (11, 10) and (6, 1) near the edge of the piezoelectric element, the piezoelectric element is flexibly vibrated. Since this frequency is close to the frequency when the micro bubble is generated, bending vibration occurs when the micro bubble is generated.

  Similarly, by increasing the amplitude of the bending motion, the initial velocity of bubbles emitted from the nozzle surface increased. From this, it can be explained that the bubble speed increases as the applied voltage increases.

  Therefore, it is considered that the micro-bubble in this experiment works like a piston due to the bending of the piezoelectric element and discharges the bubble.

As described above, the behavior of bubbles generated by using a piezoelectric nozzle produced by laser irradiation and focused ion beam processing has been investigated. As a result, when the pressure inside the tube was 10 kPa to 100 kPa, two oscillation modes were confirmed, and each bubble size could be several hundred mm or less than several mm, but a voltage was applied to the piezoelectric element nozzle. When driven, there was no clear difference in bubble behavior before and after driving. Subsequently, when the pressure inside the tube was 5 kPa, the generation of directional micro bubbles could be confirmed by applying the voltage of the piezoelectric element nozzle. In addition, the behavior of micro-bubbles was changed by the applied frequency, and the moving speed of the bubbles was improved by increasing the applied voltage. The resonance frequency was different from the specified resonance frequency of the piezoelectric element, but from the measurement result of the vibration mode by laser Doppler, the micro-bubble is bent and the surface of the piezoelectric element acts as a pump. Is considered to be released.
[Function and effect]
The embodiment of the present invention is a microbubble generator 1 that generates microbubbles by sending pressurized gas into a liquid from a micro-diameter discharge hole 23 formed in a piezoelectric element 9 that is a plate-like body, A gas supply source 11 as a gas pressure setting unit for setting a gas pressure, a piezoelectric element 9 that bends and vibrates forward and backward in the axial direction of the discharge hole 23, and a vibration generation control unit that controls the amplitude and frequency of the piezoelectric element 9. The frequency transmitter 15 is formed, and microbubbles are formed by setting the minute diameter of the discharge hole 23, setting the pressure of the pressurized gas, and controlling the amplitude and frequency of the piezoelectric element 9.

  For this reason, the generation | occurrence | production state of a microbubble and the diameter of a bubble are controllable. For example, microbubbles having a particle size of several tens of nm to several hundreds of μm can be controlled and discharged with a uniform particle size and a constant repetition frequency.

  The ejection amount of microbubbles can be easily adjusted by adapting the amplitude and frequency of vibration to the shape of the nozzle and the pressure of the gas, and a diaphragm (plate-like body, piezoelectric element) having a plurality of nozzles in an arbitrary pattern It is possible to increase the amount of ejection by installing a plurality of sheets.

  The pressure of the pressurized gas is set to a positive pressure such that the pressurized gas is not discharged from the discharge hole 23 having a small diameter.

  For this reason, the generation | occurrence | production state of a microbubble and the diameter of a bubble can be controlled accurately and reliably.

  The metal foil 21 was joined to the piezoelectric element 9, and the small-diameter discharge hole 23 was formed across the piezoelectric element 9 and the metal foil 21 so that the metal foil 21 side had a smaller diameter and constituted the discharge front end side.

  For this reason, the discharge hole 23 with a small diameter can be reliably formed.

  A deposit 25 obtained by reacting an ion beam and carbon gas was formed on the discharge tip side of the discharge hole 23 to have a smaller diameter.

  For this reason, the small diameter discharge hole 23 can be surely made smaller.

  The micro discharge hole nozzle 3 is a micro discharge hole nozzle 3 for generating a micro bubble by sending pressurized gas into a liquid from a discharge hole 23 having a small diameter formed in the piezoelectric element 9. The micro discharge hole nozzle 3 is bent and vibrated back and forth in the axial direction.

  For this reason, it is possible to reliably generate micro bubbles by the micro discharge hole nozzle 3.

  The metal foil 21 was joined to the piezoelectric element 9, and the discharge hole 23 was formed across the piezoelectric element 9 and the metal foil 21 so that the metal foil 21 side had a smaller diameter and constituted the discharge front end side.

  For this reason, it is possible to surely generate micro bubbles by the micro discharge hole nozzle 3 in which the discharge hole 23 is reliably made to have a small diameter.

  A deposit obtained by reacting an ion beam and carbon gas was formed on the discharge tip side of the discharge hole to reduce the diameter.

  For this reason, it is possible to reliably generate micro bubbles by the micro discharge hole nozzle 3 in which the discharge hole 23 has a small diameter.

  A method for manufacturing a micro discharge hole nozzle 3 for generating a micro bubble by sending pressurized gas into a liquid from a micro diameter discharge hole formed in a plate-like body, and bonding a metal foil 21 to a piezoelectric element 9 Then, the discharge hole 23 was formed over the piezoelectric element 9 and the metal foil 21 so that the metal foil 21 side had a smaller diameter and constituted the discharge front end side.

  For this reason, the micro discharge hole nozzle 3 which has the discharge hole 23 of a micro diameter can be obtained reliably.

  A deposit 17 obtained by reacting an ion beam and carbon gas was formed on the discharge tip side of the discharge hole 21 to reduce the diameter.

  For this reason, the micro discharge hole nozzle 3 which has the discharge hole 23 of a micro diameter can be obtained reliably.

  FIG. 22 is a schematic front view showing a state where a plurality of ejection holes are formed in a unimorph piezoelectric element.

  Although the piezoelectric element 9 has a single discharge hole 23, a plurality of discharge holes 23A can be formed in a radial shape or a circular shape as in the piezoelectric element 9A of FIG.

  In the above embodiment, bending vibration is taken as an example, but the amplitude and frequency of vibration such as length vibration, spread vibration, thickness shear vibration, thickness longitudinal vibration, surface wave vibration, BGS wave vibration, etc. The diameter of the microbubbles can be selectively and arbitrarily controlled according to the pressure of the gas.

[Modified example of micro discharge hole nozzle]
FIG. 23 to FIG. 39 relate to a modification of the minute discharge hole nozzle, FIG. 23 is a schematic cross-sectional view of the main part of the minute discharge hole nozzle which is a vibration generating part by overlapping piezoelectric elements, and FIG. FIG. 25 is a schematic cross-sectional view of a main part of a minute discharge hole nozzle used as a vibration generating part. FIG. 25 is a schematic cross-sectional view of a main part of a minute discharge hole nozzle used as a vibration generation part by overlapping piezoelectric elements. 27 is a schematic cross-sectional view of a main part of a minute discharge hole nozzle used as a vibration generating unit, FIG. 27 is a schematic cross-sectional view of a main part of a fine discharge hole nozzle using an impulse discharge device as a vibration generation unit, and FIG. 28 uses a needle-like nozzle. FIG. 29 is a perspective view of a state in which a needle-like nozzle is attached to a plate-like body, FIG. 30 is a perspective view of a piezoelectric element, and FIG. 31 is an illustration showing manufacture of the needle-like nozzle. FIG. 32 and FIG. 32 are explanatory views of stretching of a plastic circular pipe body, 33 is a schematic cross-sectional view of a main part showing a state in which the discharge tip side of the needle-like nozzle is formed of a deposit with a smaller diameter, and FIG. , An image showing a result before oscillation, FIG. 35 shows an occurrence state of microbubbles by a micro discharge hole nozzle provided with a needle-like nozzle, an image showing a result after oscillation, and FIG. 36A shows a needle-like tool FIG. 37B is a schematic cross-sectional view of the fine discharge hole nozzle, FIG. 37B is an internal view of the fine discharge hole nozzle as viewed from the piezoelectric element side, and FIGS. 37A to 37C are explanatory views showing variations of the discharge hole shape. 38A is a schematic cross-sectional view of the micro discharge hole nozzle shown together with the needle-like tool, FIG. 38B is an inner view of the micro discharge hole nozzle viewed from the piezoelectric element side, and FIG. Schematic cross-sectional view of the hole nozzle, (B) is a micro discharge hole nozzle It is a interior view as viewed from the electric element side.

  The micro discharge hole nozzles 3B, 3C, 3D, 3E, 3F, 3P, 3Q, 3R, and 3S in FIGS. 23 to 28, 36, 38, and 39 are the micro discharge hole nozzles 3 shown in FIGS. Applies instead.

  In the minute discharge hole nozzle 3B of FIG. 23, a piezoelectric element 9B made of ceramic or quartz is laminated to form a vibration generating portion, and this piezoelectric element 9 is bonded to both sides of the metal plate 19B to form the discharge hole 23B. The piezoelectric elements 9B and the metal plate 19B on both sides constitute a plate-like body.

  Therefore, the plate-like body can be vibrated in the hole axial direction with respect to the discharge hole 23B by the piezoelectric element 9B.

  In the minute discharge hole nozzle 3C of FIG. 24, a Langevin vibrator is used as a vibration generating unit. The laminated piezoelectric elements 9C were joined to a horn-shaped main body 3Ca, and a metal plate 19C (plate) was attached to the tip of the main body 3Ca to form a discharge hole 23C. The metal plate 19C constitutes a plate-like body.

  Therefore, the metal plate 19C can be vibrated in the hole axis direction by the piezoelectric element 9C.

  In the minute ejection hole nozzle 3D of FIG. 25, the laminated actuator is a vibration generating unit. The laminated circular piezoelectric element 9D was joined to the main body 3Da as a vibration generating portion, and a metal plate 19D was provided at the tip of the piezoelectric element 9D, and an ejection hole 23D was formed in the metal plate 19D (plate). The metal plate 19D constitutes a plate-like body.

  Therefore, the metal plate 19D can be vibrated in the hole axis direction by the piezoelectric element 9D.

  In the minute discharge hole nozzle 3E of FIG. 26, the electromagnetic coil vibrator is a vibration generating unit 9E. An electromagnetic coil 9Ea is provided in the main body 3Ea, and a metal plate 19E is provided at the tip of the main body 3Ea. An inner plate 19Ea is provided on the inner surface of the metal plate 19E, and a plate-like magnet 9Eb is joined to the outer surface.

  The discharge hole 23E includes an inner discharge hole 23Ea extending over the metal plate 19E and the inner plate 19Ea and an outer discharge hole 23Eb of the magnet 9Eb. A combination of the metal plate 19E, the inner plate 19Ea, and the magnet 9Eb constitutes a plate-like body.

  Therefore, the magnet 9Eb can be vibrated by the energization control of the electromagnetic coil 9Ea, and both the metal plates 19E can be vibrated in the hole axis direction.

  In the minute discharge hole nozzle 3F of FIG. 27, the impulse discharge part 9F is a vibration generating part. An impulse discharge portion 9F is provided in the main body 3Fa, and a metal plate 19F is provided at the tip of the main body 3Fa. The discharge holes 23F are formed in the metal plate 19F (plate), and the metal plate 19F constitutes a plate-like body.

  Therefore, the metal plate 19F can be vibrated in the hole axis direction by the discharge control of the impulse discharge portion 9F. Moreover, the ion active species can be introduced into the microbubbles by impulse discharge.

  In the minute discharge hole nozzle 3P of FIG. 28, the discharge hole 23P is provided in a needle-like nor 3Pa. The needle-like nozzle 3Pa is made of quartz, glass, or metal, and is attached to a disk-shaped ceramic plate 19P that is a plate-like body, and the ceramic plate 19P is attached to the piezoelectric element 9P.

  As shown in FIG. 29, the needle-like nozzle 3Pa is fitted into the hole 19Pa at the center of the ceramic plate 19P, and the needle-like portion 3Paa protrudes from the ceramic plate 19P. The needle nozzle 3Pa is fixed to the ceramic plate 19P with an adhesive.

  As shown in FIG. 30, the piezoelectric element 9P has, for example, a cylindrical shape, and has an outer diameter of 13.6 mm, an inner diameter of 10.0 mm, and a length of 10.0 mm.

  As shown in FIG. 31, the needle-like nozzle 3Pa is formed by, for example, extending a quartz tube 3PaA to form a needle-like part 3Paa and cutting the tip of the needle-like part 3Paa. For cutting the tip, a focused ion beam (FIB “Focused ion beam”) was used.

  As shown in FIG. 32, the quartz tube 3PaA is extended by attaching a weight W to the lower end and heating the tip with a burner B, for example. The quartz tube 3PaA softened by heating is stretched by the weight of the weight W, and the needle-like portion 3Paa of FIG. 31 is formed.

  As shown in FIG. 33, a deposit 25P obtained by reacting a focused ion beam and carbon gas (phenanthrene gas) is formed in the discharge hole 23P at the tip of the cut needle-like portion 3Paa so as to have a smaller diameter. You can also.

  As shown in FIG. 34 and FIG. 35, the minute bubble generating apparatus using the minute discharge hole nozzle 3P can generate minute bubbles, and the generation of the minute bubbles can be changed by frequency control or the like. Even before the oscillation of the piezoelectric element 9P, nano bubbles are generated from the minute ejection hole nozzle 3P as shown in FIG. 34, and after the oscillation of the piezoelectric element 9P, the nano bubbles from the minute ejection hole nozzle 3P are stabilized as shown in FIG. Occurred.

  The minute discharge hole nozzle 3Q in FIG. 36 is formed by penetrating a circular discharge hole 23Q by inserting, for example, a super steel needle-like tool T1 into a metal plate 19Q. In the discharge hole 23Q, a burr 23Qaa is formed on the surface of the plate-like body 19Q to reduce the diameter of the discharge hole 23Q.

  As shown in FIG. 37, the discharge hole 23Q can be formed in an arbitrary shape such as (A) to (C) in addition to a circle by selecting the shape of the needle tool T1.

  The micro discharge hole nozzle 3R in FIG. 38 is formed, for example, by inserting a needle screw tool T2 made of, for example, super steel into a metal plate body 19R to penetrate a spiral discharge hole 23R. In the discharge hole 23R, a burr 23Raa is formed on the surface of the plate-like body 19R, thereby reducing the diameter of the discharge hole 23R.

  The micro discharge hole nozzle 3S of FIG. 39 includes a porous body 23Sb in which a through-hole 23Sa is formed in the plate-like body 19S and covers the front surface of the plate-like body 19S. In FIG. 39 (B), it seems that holes are formed in the porous body 23Sb, but no holes are formed in the porous body 23Sb, and the through-holes 23Sa correspond to the plate-like body 19S for convenience. It is shown. In this example, the through hole 23Sa and the porous body 23Sb cooperate to form the discharge hole 23S, and bubbles discharged from the through hole 23a can be made into small nano bubbles by passing through the porous body 23Sb. .

  40 to 42 relate to the second embodiment of the present invention, and FIG. 40 shows a structure including an auxiliary vibration generating section that vibrates in a direction intersecting with the vibration of the discharge hole. (B) is a schematic front view showing a state in which a plurality of ejection holes are formed in a unimorph piezoelectric element, FIG. 41 (A) is a schematic cross-sectional view of the main part, and (B) is a piezoelectric element. FIG. 42 (A) is a schematic cross-sectional view of the main part, and FIG. 42 (B) is a schematic front view of the main part.

  The micro discharge hole nozzle 3G of FIG. 40 includes a laminated actuator 33 as an auxiliary vibration generating unit that vibrates the discharge hole 23G in an inclined direction that intersects with the vibration controlled by the piezoelectric element 9G. A plurality of piezoelectric elements 9G in which the discharge holes 23G are formed are attached to the main body 3Ga in an inclined manner, and the laminated actuator 33 is attached to the main body 3Ga. The piezoelectric element 9G has a unimorph structure and includes a plurality of discharge holes 23G.

  Therefore, the discharge hole 23G of the piezoelectric element 9G can be further vibrated in the tilt direction of the hole axis with respect to the vibration in the hole axis direction of the discharge hole 23G by the piezoelectric element 9G, and the generation of bubbles generated in the discharge hole 23G is promoted. be able to.

  A micro discharge hole nozzle 3H in FIG. 41 is obtained by providing a single discharge hole 23H in a single piezoelectric element 9H with respect to the micro discharge hole nozzle 3G in FIG. The piezoelectric element 9H has, for example, a bimorph structure.

  Therefore, the discharge hole 23H of the piezoelectric element 9H can be further vibrated in the hole axis inclination direction with respect to the vibration in the hole axis direction of the discharge hole 23H by the piezoelectric element 9H, and the generation of bubbles generated in the discharge hole 23H is promoted. be able to.

  The micro discharge hole nozzle 3I of FIG. 42 includes an auxiliary vibration generating unit 33 that vibrates the discharge hole 23I in a direction intersecting with the vibration controlled by the piezoelectric element 9I. The piezoelectric element 9I constitutes a vibration generating portion that is a plate-like body, and a plurality of ejection holes 23I are formed. The vibration by the control of the piezoelectric element 9I is the vibration in the hole axis direction of the discharge hole 23I, and the vibration in the intersecting direction by the auxiliary vibration generating unit 33 is the vibration in the arrow direction perpendicular to the hole axis. As the auxiliary vibration generating unit 33, various types such as those using a piezoelectric element can be applied.

  Therefore, against the generation of microbubbles by the control of the piezoelectric element 9I, the vibration of the auxiliary vibration generating unit 33 can promote the clearance of the generated bubbles with respect to the discharge hole 23I.

  The piezoelectric elements 9G, 9H, and 9I can apply the above-described various elements. Instead of the piezoelectric elements 9G, 9H, and 9I, a metal plate having a discharge hole is used, and the metal plate is configured to vibrate by a vibration generating unit. You can also.

  FIGS. 43 and 44 relate to the third embodiment of the present invention, and FIGS. 43 and 44 are schematic cross-sectional views showing a vibration generating portion formed of a concave curved surface with the discharge hole at the center.

  The piezoelectric element 9J as a plate-like body that is the vibration generating portion in FIG. 43 is formed in a semicircular shape with a concave cross section, and the discharge hole 23J is formed in the center of the semicircular shape. The concave curved surface of the piezoelectric element 9J is directed on the hole axis extension line of the discharge hole 23J, and the center of curvature is located on the hole axis extension line.

  Therefore, when the piezoelectric element 9J vibrates, microbubbles are generated in the same manner as described above, and a vibration wave toward the center of curvature is formed so that the generated microbubbles can be easily collected on the hole axis of the discharge hole 23J and the direction of the hole axis. A driving force can be imparted to.

  The piezoelectric element 9K as the vibration generating unit in FIG. 44 is formed in a semi-elliptical shape as a curved surface having a concave cross section, and the discharge hole 23K is formed in the center of the semi-elliptical shape. The concave curved surface of the piezoelectric element 9K is directed on the hole axis extension line of the discharge hole 23K.

  Therefore, when the piezoelectric element 9K vibrates, microbubbles are generated in the same manner as described above, and a vibration wave directed toward the hole axis is formed, and the generated microbubbles are collected on the hole axis of the discharge hole 23K according to a semi-elliptical shape. While making it easy, a propulsive force can be given to a hole axial direction.

  As the piezoelectric elements 9J and 9K, the above-described various elements can be applied. Instead of the piezoelectric elements 9J and 9K, a metal plate having discharge holes can be used, and the metal plate can be vibrated by a vibration generating unit. A plurality of discharge holes can also be formed.

  FIGS. 45 to 47 are schematic configuration diagrams showing a structure according to the fourth embodiment of the present invention, in which an external force applying unit that applies an external force to the microbubbles discharged from the discharge holes and pulverizes them to a smaller size is provided.

  In the structure of FIG. 45, the external force applying part 35 is provided that applies an external force to the microbubbles discharged from the discharge hole 23L of the piezoelectric element 9L in front of the discharge port 23L in the discharge direction to pulverize it to a smaller size. The external force imparting unit 35 focuses the ultrasonic wave 37 with the lens 39 and the horn 41, and irradiates the microbubble as a powerful ultrasonic wave, thereby reducing the bubble diameter.

  The structure of FIG. 46 is also provided with an external force applying portion 35M that applies an external force to the microbubbles discharged from the discharge hole 23M of the piezoelectric element 9M in front of the discharge direction of the discharge port 23M to pulverize it to a smaller size. The external force imparting unit 35M refines the bubble diameter by applying an electric field by the electric field generating unit 43.

  The structure of FIG. 47 is also provided with an external force applying portion 35N that applies an external force to the microbubbles discharged from the discharge hole 23N of the piezoelectric element 9N in front of the discharge direction of the discharge port 23N to pulverize it to a smaller size. The external force imparting unit 35N refines the bubble diameter by local discharge by the local discharge unit 45.

  In addition, the external force imparting unit only needs to be able to miniaturize the microbubbles, and has various structures such as cutting with a micro water wheel installed in the micro bubble ejection path and miniaturization by irradiation with strong ultrasonic waves focused by the sound collecting plate. Can be applied.

  Then, fine bubbles ejected at a constant repetition frequency with a uniform particle size are sprayed from the outside with a flow of water, electric field applied, local discharge of bubbles in the liquid, cutting with a micro water wheel installed in the bubble ejection path, It can be formed by selectively controlling the further refinement of the bubble diameter by irradiating with strong ultrasonic waves focused by a horn, a lens and a sound collecting plate in water from the outside. Moreover, ion active species can be introduced into the microbubbles by local discharge of bubbles in the liquid.

1 Microbubble generator 3, 3C, 3D, 3E, 3F, 3G, 3H, 3I, 3P, 3Q, 3R, 3S Micro discharge hole nozzle 3Pa needle-shaped nozzle 9, 9A, 9B, 9C, 9D, 9G, 9H, 9I, 9J, 9K, 9L, 9M, 9N, 9P, 9Q, 9R, 9S Piezoelectric elements (plate-like body, vibration generating part)
9E Vibration generator (plate)
9Ea Electromagnetic coil 9Eb Magnet 9F Impulse discharge part (vibration generating part)
11 Gas supply source (gas pressure setting part)
15 Voltage generator (vibration controller)
17Ea Electromagnetic coil (vibration generator)
17Eb magnet (plate, vibration generator)
19, 19C, 19E, 19F, 19P, 19Q, 19R, 19S Metal plate (plate-like body)
19Ea inner plate (plate)
21 Metal foil 23, 23A, 23B, 23C, 23D, 23E, 23F, 23G, 23H, 23I, 23J, 23K, 23L, 23M, 23N, 23P, 23Q, 23R, 23S Discharge hole 23Sa Through hole 23Sb Porous body 25 Deposit 33 Auxiliary vibration generating part 35, 35M External force applying part T1 Needle-like tool T2 Needle-like screw tool

Claims (24)

A microbubble generator for generating microbubbles by sending pressurized gas into a liquid from a micro-diameter discharge hole provided in a plate-like body,
A gas pressure setting unit for setting the pressure of the pressurized gas;
A vibration generating unit that vibrates the plate-like body in the hole axial direction of the discharge hole;
A vibration generation control unit that controls the amplitude and frequency of the vibration generation unit,
The fine bubbles are formed by setting the minute diameter of the discharge hole, setting the pressure of the pressurized gas, and controlling the amplitude and frequency of the vibration generating unit.
A microbubble generator characterized by that. The microbubble generator according to claim 1,
The plate-like body is the vibration generating unit,
The vibration generator is a bending vibration of the plate-like body.
A microbubble generator characterized by that. The microbubble generator according to claim 1 or 2,
The setting of the pressure of the pressurized gas is a positive pressure such that the pressurized gas is not discharged from the discharge hole having a small diameter.
A microbubble generator characterized by that. The microbubble generator according to any one of claims 1 to 3,
Bonding a metal foil to the plate-like body,
The small-diameter discharge hole was formed across the plate-like body and the metal foil so that the metal foil side had a smaller diameter and constituted the discharge front end side,
A microbubble generator characterized by that. A microbubble generator according to any one of claims 1 to 4,
On the discharge tip side of the discharge hole, a deposit obtained by reacting an ion beam and carbon gas was formed to have a smaller diameter.
A microbubble generator characterized by that. A microbubble generator according to any one of claims 1 to 5,
The plate-like body is formed of a concave curved surface with the discharge hole at the center,
The curved surface is oriented on a hole axis extension line of the discharge hole,
A microbubble generator characterized by that. The microbubble generator according to any one of claims 1 to 6,
The vibration generating unit is a ceramic or quartz plate-like piezoelectric element constituting the plate-like body, a unimorph structure or a bimorph structure piezoelectric element,
A microbubble generator characterized by that. It is a microbubble generator in any one of Claims 1-6,
The vibration generating unit is an electromagnetic coil vibrator including a plate-shaped magnet,
The small-diameter discharge hole is formed in a plate-like magnet of the electromagnetic coil vibrator constituting the plate-like body.
A microbubble generator characterized by that. It is a microbubble generator in any one of Claims 1-6,
The vibration generator is composed of any one of a laminated actuator, a Langevin vibrator, a magnetostrictive vibrator, and an impulse discharge part,
The small-diameter discharge hole is formed in a plate constituting the plate-like body,
A microbubble generator characterized by that. It is a microbubble generator of any one of Claims 1-9,
An auxiliary vibration generating unit that vibrates the discharge hole in a direction intersecting with the vibration generated by the vibration generating unit;
A microbubble generator characterized by that. It is a microbubble generator in any one of Claims 1-10,
A plurality of the discharge holes are provided,
A microbubble generator characterized by that. The microbubble generator according to any one of claims 1 to 11,
An external force imparting portion that pulverizes smaller by applying an external force to the microbubbles ejected from the ejection holes in front of the ejection direction of the ejection ports is provided.
A microbubble generator characterized by that. A fine discharge hole nozzle for generating a fine bubble by sending pressurized gas into a liquid from a fine diameter discharge hole provided in a plate-like body,
Comprising a vibration generating section that vibrates the plate-like body in the direction of the hole axis of the discharge hole;
A fine discharge hole nozzle. The fine discharge hole nozzle according to claim 13,
The plate-like body is the vibration generating unit,
The vibration generator is a bending vibration of the plate-like body.
A fine discharge hole nozzle. The fine discharge hole nozzle according to claim 13 or 14,
Join metal foil to the plate,
The discharge hole was formed across the plate and the metal foil so that the metal foil side had a smaller diameter and constituted the discharge front end side.
A fine discharge hole nozzle. The micro discharge hole nozzle according to any one of claims 13 to 15,
On the discharge tip side of the discharge hole, a deposit obtained by reacting an ion beam and carbon gas was formed to have a smaller diameter.
A fine discharge hole nozzle. The micro discharge hole nozzle according to any one of claims 13 to 16,
The vibration generating unit is a ceramic or quartz plate-like piezoelectric element constituting the plate-like body, a unimorph structure or a bimorph structure piezoelectric element,
A fine discharge hole nozzle. The fine discharge hole nozzle according to claim 13,
The discharge hole is provided in a needle-like nozzle formed to protrude from the plate-like body.
A fine discharge hole nozzle. The fine discharge hole nozzle according to claim 13,
The discharge hole is composed of a through-hole formed in the plate-like body and a porous body covering the through-hole,
A fine discharge hole nozzle. A method for producing a micro discharge hole nozzle according to claim 18,
The tip of the thermoplastic cylindrical tube is heated and stretched to form a needle-like part,
Cutting the tip of the needle-like part to form a needle-like nozzle,
The needle-like nozzle was attached to the plate-like body,
A manufacturing method of a fine discharge hole nozzle. A method of manufacturing a micro discharge hole nozzle for generating a micro bubble by sending pressurized gas into a liquid from a micro diameter discharge hole provided in a plate-shaped body,
Inserting a needle-like tool into the plate-like body to form the discharge hole,
A manufacturing method of a fine discharge hole nozzle. A method of manufacturing a micro discharge hole nozzle for generating a micro bubble by sending pressurized gas into a liquid from a micro diameter discharge hole provided in a plate-shaped body,
In the plate-like body, a needle-like screw tool was screwed to form the discharge hole,
A manufacturing method of a fine discharge hole nozzle. A method of manufacturing a micro discharge hole nozzle for generating a micro bubble by sending pressurized gas into a liquid from a micro diameter discharge hole provided in a plate-shaped body,
Bonding a metal foil to the plate-like body,
The discharge hole was formed across the plate and the metal foil so that the metal foil side had a smaller diameter and constituted the discharge front end side.
A manufacturing method of a fine discharge hole nozzle. It is a manufacturing method of the fine discharge hole nozzle of any one of Claims 20-23,
On the discharge tip side of the discharge hole, a deposit obtained by reacting an ion beam and carbon gas was formed to have a smaller diameter.
A manufacturing method of a fine discharge hole nozzle.