JP2014074559A5 - - Google Patents

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Publication number
JP2014074559A5
JP2014074559A5 JP2012222863A JP2012222863A JP2014074559A5 JP 2014074559 A5 JP2014074559 A5 JP 2014074559A5 JP 2012222863 A JP2012222863 A JP 2012222863A JP 2012222863 A JP2012222863 A JP 2012222863A JP 2014074559 A5 JP2014074559 A5 JP 2014074559A5
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JP
Japan
Prior art keywords
thermoelectric conversion
conversion member
heat treatment
furnace
heat
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JP2012222863A
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Japanese (ja)
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JP5951438B2 (en
JP2014074559A (en
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Priority claimed from JP2012222863A external-priority patent/JP5951438B2/en
Priority to JP2012222863A priority Critical patent/JP5951438B2/en
Priority to TW102100529A priority patent/TWI492309B/en
Priority to KR1020130016932A priority patent/KR101429387B1/en
Priority to CN201610228229.XA priority patent/CN105758203B/en
Priority to CN201310064393.8A priority patent/CN103712465B/en
Publication of JP2014074559A publication Critical patent/JP2014074559A/en
Publication of JP2014074559A5 publication Critical patent/JP2014074559A5/ja
Publication of JP5951438B2 publication Critical patent/JP5951438B2/en
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また、熱処理装置１によると、熱処理炉２に付随して設置される補助機器としての弁２１、ロック機構２３、計測装置２４、及び表示装置２５は、それぞれ、動作に必要な電力が比較的小さくて済む。よって、これら補助機器としての弁２１、ロック機構２３、計測装置２４、及び表示装置２５に必要な電力を、熱電変換部材３によって、十分に供給することができる。
Further, according to the heat treatment apparatus 1, the valve 21, the lock mechanism 23, the measuring device 24, and the display device 25 as auxiliary devices installed in association with the heat treatment furnace 2 each require relatively small electric power for operation. I'll do it. Therefore, the electric power necessary for the valve 21, the lock mechanism 23, the measuring device 24, and the display device 25 as the auxiliary devices can be sufficiently supplied by the thermoelectric conversion member 3.

（４）また、上述の実施形態では、排気路１４に熱電変換部材３が取り付けられる形態を例に説明したけれども、この通りでなくてもよい。例えば、図３に示すように、炉本体１１の壁部１７に取り付けられる熱電変換部材３Ａが、設けられていてもよい。熱電変換部材３Ａは、熱電変換部材３と同様の構成を有している。尚、以下では、図１に示す実施形態と異なる構成を説明し、同様の構成には図に同様の符号を付して説明を省略する。この場合、熱電変換部材３Ａの表面３ａは、炉本体１１の壁部１７の外表面と面接触している。熱電変換部材３Ａは、第２導電部材２９に接続される。また、図４に示すように、熱電変換部材３，３Ａの双方が設けられていてもよい。また、熱電変換部材３は、熱処理炉２からの熱を受けることが可能な場所に配置されていればよい。したがって、熱電変換部材３は、熱処理炉２から離隔した状態で配置されていてもよい。
(4) In the above-described embodiment, the embodiment in which the thermoelectric conversion member 3 is attached to the exhaust path 14 has been described as an example, but this need not be the case. For example, as shown in FIG. 3, a thermoelectric conversion member 3 </ b> A attached to the wall portion 17 of the furnace body 11 may be provided. The thermoelectric conversion member 3 </ b> A has the same configuration as the thermoelectric conversion member 3. In the following description, configurations different from the embodiment shown in FIG. 1 will be described, and similar configurations will be denoted by the same reference numerals and description thereof will be omitted. In this case, the surface 3 a of the thermoelectric conversion member 3 </ b> A is in surface contact with the outer surface of the wall portion 17 of the furnace body 11. Thermoelectric conversion member 3A is coupled to the second conductive member 2 9. Moreover, as shown in FIG. 4, both the thermoelectric conversion members 3 and 3A may be provided. Moreover, the thermoelectric conversion member 3 should just be arrange | positioned in the place which can receive the heat from the heat processing furnace 2. FIG. Therefore, the thermoelectric conversion member 3 may be arranged in a state separated from the heat treatment furnace 2.

JP2012222863A 2012-10-05 2012-10-05 Heat treatment equipment Active JP5951438B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012222863A JP5951438B2 (en) 2012-10-05 2012-10-05 Heat treatment equipment
TW102100529A TWI492309B (en) 2012-10-05 2013-01-08 Heat treatment device
KR1020130016932A KR101429387B1 (en) 2012-10-05 2013-02-18 Heat treatment equipment
CN201310064393.8A CN103712465B (en) 2012-10-05 2013-02-28 Annealing device
CN201610228229.XA CN105758203B (en) 2012-10-05 2013-02-28 Annealing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012222863A JP5951438B2 (en) 2012-10-05 2012-10-05 Heat treatment equipment

Publications (3)

Publication Number Publication Date
JP2014074559A JP2014074559A (en) 2014-04-24
JP2014074559A5 true JP2014074559A5 (en) 2015-07-02
JP5951438B2 JP5951438B2 (en) 2016-07-13

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JP2012222863A Active JP5951438B2 (en) 2012-10-05 2012-10-05 Heat treatment equipment

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JP (1) JP5951438B2 (en)
KR (1) KR101429387B1 (en)
CN (2) CN105758203B (en)
TW (1) TWI492309B (en)

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JP6498060B2 (en) * 2015-07-01 2019-04-10 中外炉工業株式会社 Industrial furnace control method
KR102295852B1 (en) * 2018-06-21 2021-08-31 한국전기연구원 Multifunctional thermoelectric hybrid power generator
JP6925377B2 (en) * 2019-03-12 2021-08-25 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Substrate processing equipment, semiconductor equipment manufacturing methods and programs
CN111706843B (en) * 2020-07-01 2021-01-15 海南鸣川智能科技有限公司 Ship tail gas treatment device capable of recycling heat energy in multiple stages
JP2022049287A (en) * 2020-09-16 2022-03-29 高砂工業株式会社 Heat treatment furnace and heat treatment facility

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