JP2014073454A - Vacuum washing device and method for operation of vacuum washing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a heat medium in a liquid state from entering into a compressor and to protect the compressor from damage.SOLUTION: A vacuum washing device 100 includes a heat pump unit 300 for driving rotation of a compressor 340 to circulate a heat medium between a steam chamber heat exchanger 320 for heating a steam chamber in which steam of a hydrocarbon detergent is generated and a condensation chamber heat exchanger 310 provided in a condensation chamber which is connected to the steam chamber. In stopping the heat pump unit 300, a decompression part 350 on the upstream side of the compressor 340 is valve-closed to drive the compressor 340, and then, an on-off valve 370 on the downstream side of the compressor 340 is closed, whereby the heat medium in a liquid state is kept to be resident in the decompression part 350 and the on-off valve 370. In start processing, the rotation of the compressor 340 is started in valve-closed state of the decompression part 350, and when the overheat at an inlet of the compressor 340 is beyond a predetermined value, the opening degree of the decompression part 350 is regulated.

Description

  The present invention relates to a vacuum cleaning apparatus for cleaning a workpiece by supplying a vapor of a hydrocarbon-based cleaning agent to a cleaning chamber under reduced pressure, and a method for operating the vacuum cleaning apparatus.

  Conventionally, for example, a vacuum cleaning apparatus disclosed in Patent Document 1 is known. According to this vacuum cleaning apparatus, first, a depressurization step is performed to depressurize the steam cleaning / drying chamber into which the work has been carried in by a vacuum pump, and then the hydrocarbon-based cleaning agent vapor generated in the steam chamber is transferred to the steam cleaning / drying chamber. A steam cleaning process for supplying and cleaning the workpiece is performed. Next, spray the hydrocarbon-based cleaning agent on the workpiece, or immerse the workpiece in the hydrocarbon-based cleaning agent stored in the immersion chamber. A spray dip cleaning process is performed to clean the components. When cleaning of the workpiece is completed in this way, after the workpiece is transferred again to the steam cleaning / drying chamber, a drying process is performed in which the steam cleaning / drying chamber is further depressurized to evaporate the cleaning agent attached to the workpiece surface. And after a drying process is complete | finished, after returning a steam washing drying chamber to atmospheric pressure, a workpiece | work is carried out and a series of processes are complete | finished.

  In such a vacuum cleaning apparatus, used hydrocarbon cleaners (contaminants adhering to the workpiece and hydrocarbon cleaners, hereinafter referred to as used cleaners) are sent to the steam chamber for regeneration. . More specifically, the used cleaning agent sent to the steam chamber is heated by an electric heater or the like to become substantially hydrocarbon-based cleaning vapor (distillation). And the vapor | steam of only the produced | generated hydrocarbon type cleaning agent is utilized again in a vapor | steam washing process, or after being condensed with the cooler using cooling water, it is utilized in a spray immersion washing process.

  However, in the technique of Patent Document 1, the heat used for generating the steam of the hydrocarbon-based cleaning agent in the steam chamber is recovered by the cooler and discarded. Further, in order to cool the steam, a large amount of cooling water such as about 200 L / min is required, and a water storage tank, a cooling tower, and the like are also required, so that the apparatus is enlarged.

  Therefore, in the atmospheric pressure steam cleaning apparatus, the used cleaning agent in a vapor state generated in the steam cleaning / drying chamber is cooled by the first heat exchanging unit using water (liquid) as a heat medium, and the first heat exchange is performed. Technology is disclosed in which heat exchange is performed in two stages of a second heat exchange unit that indirectly recovers heat obtained by the unit, and sensible heat obtained by water (liquid) is supplied to the vapor chamber (for example, Patent Document 2).

JP-A-7-166385 Japanese Patent Publication No. 3-31113

  In the technique of Patent Document 2, a compressor is used to circulate the heat medium in the second heat exchange unit, but the state of the heat medium circulated through the second heat exchange unit is not managed. . Therefore, there is a possibility that the liquid heat medium is introduced into the compressor during the start-up or operation of the compressor and the compressor is damaged.

  The objective of this invention is providing the operating method of the vacuum cleaning apparatus which can avoid the introduction | transduction to the compressor of the heat medium of a liquid state, and can prevent the damage of a compressor.

  In order to solve the above-mentioned problems, a vacuum cleaning apparatus according to the present invention includes a vapor chamber for generating a vapor of a hydrocarbon-based cleaning agent, a condensation chamber connected to the vapor chamber, and a condensation supplied from the condensation chamber. The steam is condensed by performing heat exchange between the steam introduced from the steam chamber and the heat medium in the cleaning chamber capable of cleaning the workpiece under reduced pressure by the hydrocarbon-based cleaning agent. A hydrocarbon-based cleaning agent, a first heat exchanger that heats the heat medium, a compressor that adiabatically compresses the heat medium heated by the first heat exchanger, and further raises the temperature; In the steam chamber, heat exchange is performed between the heat medium heated by the compressor and the hydrocarbon-based cleaning agent to vaporize the hydrocarbon-based cleaning agent to generate steam, and the heat medium A second heat exchanger for cooling the second heat exchanger and the second heat exchanger The decompression unit that expands the heat medium cooled by the cooler under reduced pressure, further cools and returns the heat medium to the first heat exchanger, and communicates the compressor and the second heat exchanger, or An on-off valve that shuts off, and a control unit that drives the compressor and controls the opening of the decompression unit and the on-off valve to control the circulation amount of the heat medium. When executing the stop process of the compressor, the pressure reducing unit is closed and the flow of the heat medium to the compressor through the pressure reducing unit is shut off, and then the on-off valve is closed, and the downstream of the on-off valve When the heat medium is retained between the on-off valve and the decompression unit on the side and the compressor start-up process is executed, the on-off valve is opened while the decompression unit is closed, and the compression is performed. The machine starts rotating.

  In addition, a third heat that performs heat exchange between the heat medium that flows between the first heat exchanger and the compressor and the heat medium that flows between the second heat exchanger and the decompression unit. The compressor includes an unloader, and the control means rotates the compressor with the unloader activated to execute the start-up process, and the third heat exchanger. The degree of superheat of the heat medium between the compressor and the compressor is derived, and the degree of opening of the decompression unit is adjusted so as to maintain the derived degree of superheat to a predetermined first threshold value or more, and the first The unloader may be stopped when the temperature of the heat medium between the heat exchanger and the third heat exchanger becomes equal to or higher than a predetermined second threshold value.

  In addition, a third heat that performs heat exchange between the heat medium that flows between the first heat exchanger and the compressor and the heat medium that flows between the second heat exchanger and the decompression unit. When performing the start-up process, the control means rotates the compressor at a first rotational speed that is lower than the rotational speed during rated operation, and performs the third heat exchanger and the compression. Deriving the superheat degree of the heat medium between the compressor and the derived superheat degree is equal to or greater than a predetermined first threshold value, the rotation speed of the compressor is determined from the first rotation speed during the rated operation. While increasing the rotation speed to a second rotation speed lower than the rotation speed and adjusting the degree of opening of the decompression unit so as to maintain the derived degree of superheat above the first threshold, the first heat exchanger and the first heat exchanger When the temperature of the heat medium between the heat exchanger 3 and the heat exchanger 3 is equal to or higher than a predetermined second threshold value, the compression is performed. The rotation speed may be increased to speed during the rated operation.

  In addition, the apparatus includes a measuring unit that measures the pressure and temperature of the heat medium downstream of the third heat exchanger and upstream of the compressor, and the control unit measures the third heat The degree of superheat may be derived based on the pressure and temperature of the heat medium downstream of the heat exchanger and upstream of the compressor.

  Further, the temperature of the heat medium downstream of the first heat exchanger and upstream of the third heat exchanger, and the downstream of the third heat exchanger and of the compressor Measuring means for measuring the temperature of the upstream heat medium, wherein the control means is a measured heat medium downstream of the first heat exchanger and upstream of the third heat exchanger And the degree of superheat may be derived based on the temperature of the heat medium on the downstream side of the third heat exchanger and the upstream side of the compressor.

  In addition, the compressor includes an unloader, and the control unit operates the unloader of the compressor as the decompression unit is closed to execute the stop process, and the first heat exchanger. The pressure of the heat medium between the first heat exchanger and the compressor is less than a predetermined third threshold, or the temperature of the heat medium between the first heat exchanger and the compressor is predetermined. If it becomes less than the fourth threshold value, the rotation of the compressor may be stopped, and the on-off valve may be closed to block the flow of the heat medium into the compressor.

  Further, when executing the stop process, the control means lowers the rotational speed of the compressor from the rotational speed during rated operation as the decompression unit is closed, and the first heat exchanger and the compression The pressure of the heat medium between the compressor and the compressor becomes less than a predetermined third threshold value, or the temperature of the heat medium between the first heat exchanger and the compressor is determined as a fourth threshold value. If it is less than the value, the rotation of the compressor may be stopped, and the on-off valve may be closed to block the flow of the heat medium into the compressor.

  In order to solve the above problems, an operation method of a vacuum cleaning apparatus of the present invention includes a steam chamber that generates a vapor of a hydrocarbon-based cleaning agent, a condensation chamber connected to the steam chamber, and a supply from the condensation chamber. In the cleaning chamber capable of cleaning the workpiece under reduced pressure by the condensed hydrocarbon-based cleaning agent, and in the condensation chamber, heat is exchanged between the steam introduced from the steam chamber and the heat medium, thereby A first heat exchanger that condenses into a hydrocarbon-based cleaning agent, heats the heat medium, and a compressor that adiabatically compresses the heat medium heated by the first heat exchanger and further increases the temperature And in the steam chamber, by performing heat exchange between the heat medium heated by the compressor and the hydrocarbon-based cleaning agent, the hydrocarbon-based cleaning agent is vaporized to generate steam, A second heat exchanger for cooling the heat medium; A decompression unit that decompresses and expands the heat medium cooled by the heat exchanger of 2 and returns the heat medium to the first heat exchanger, and communicates the compressor and the second heat exchanger, or An operation method of a vacuum cleaning apparatus comprising an on-off valve that cuts off the communication, and when the compressor stop process is executed, the decompression unit is closed and the compressor is passed through the decompression unit. Shuts in the heat medium, closes the on-off valve, causes the heat medium to stay between the on-off valve and the pressure reducing unit on the downstream side of the on-off valve, and executes the start-up process of the compressor In this case, the on-off valve is opened while the decompression unit is closed, and the rotation of the compressor is started.

  In addition, the vacuum cleaning apparatus performs heat exchange between a heat medium that flows between the first heat exchanger and the compressor, and a heat medium that flows between the second heat exchanger and the decompression unit. The compressor includes an unloader, and when performing the start-up process of the compressor, the compressor is rotated while the unloader is operated, and the third loader is operated. The degree of superheat of the heat medium between the heat exchanger and the compressor is derived, and the opening degree of the decompression unit is adjusted so as to maintain the derived degree of superheat to a predetermined first threshold value or more, The unloader may be stopped when the temperature of the heat medium between the first heat exchanger and the third heat exchanger becomes equal to or higher than a predetermined second threshold value.

  In addition, the vacuum cleaning apparatus performs heat exchange between a heat medium that flows between the first heat exchanger and the compressor, and a heat medium that flows between the second heat exchanger and the decompression unit. When performing the start-up process of the compressor, the compressor is rotated at a first rotational speed lower than the rotational speed during rated operation, and the third heat exchange is performed. When the superheat degree of the heat medium between the compressor and the compressor is derived, and the derived superheat degree is equal to or greater than a predetermined first threshold, the rotation speed of the compressor is calculated from the first rotation speed, The first heat exchange is performed by adjusting the degree of opening of the decompression unit so as to increase to a second rotational speed lower than the rotational speed during rated operation, and to maintain the derived degree of superheat above the first threshold. The temperature of the heat medium between the heater and the third heat exchanger is equal to or higher than a predetermined second threshold value. It may be increasing the rotational speed of the compressor speed during the rated operation.

  The degree of superheat of the heat medium between the third heat exchanger and the compressor is the pressure of the heat medium downstream of the third heat exchanger and upstream of the compressor, and It may be derived based on the temperature.

  In addition, the degree of superheat of the heat medium between the third heat exchanger and the compressor is a heat medium downstream of the first heat exchanger and upstream of the third heat exchanger. And the temperature of the heat medium downstream of the third heat exchanger and upstream of the compressor.

  In addition, the compressor includes an unloader, and when the compressor stop process is executed, the unloader of the compressor is operated along with closing the decompression unit, and the first heat exchanger and the The pressure of the heat medium between the compressor is less than a predetermined third threshold value, or the temperature of the heat medium between the first heat exchanger and the compressor is a predetermined fourth value. When it becomes less than the threshold value, the rotation of the compressor may be stopped, and the on-off valve may be closed to block the flow of the heat medium into the compressor.

  Further, when executing the stop process of the compressor, the rotation speed of the compressor is lowered from the rotation speed at the rated operation as the decompression unit is closed, and the first heat exchanger, the compressor, The pressure of the heat medium between the first heat exchanger and the compressor is less than a predetermined fourth threshold value. Then, the rotation of the compressor may be stopped, and the on-off valve may be closed to block the flow of the heat medium into the compressor.

  According to the present invention, introduction of a liquid heat medium into a compressor can be avoided, and damage to the compressor can be prevented.

It is a conceptual diagram for demonstrating a vacuum cleaning apparatus. It is a flowchart for demonstrating the flow of control of the heat pump unit by a control means. It is a flowchart for demonstrating the normal driving | running process concerning 1st Embodiment. It is a flowchart for demonstrating the stop process concerning 1st Embodiment. It is a flowchart for demonstrating the starting process concerning 1st Embodiment. It is a flowchart explaining each process regarding the washing | cleaning of the workpiece | work using a vacuum cleaning apparatus. It is a flowchart for demonstrating the normal driving | running process concerning 2nd Embodiment. It is a flowchart for demonstrating the stop process concerning 2nd Embodiment. It is a flowchart for demonstrating the starting process concerning 2nd Embodiment.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The dimensions, materials, and other specific numerical values shown in the embodiments are merely examples for facilitating the understanding of the invention, and do not limit the present invention unless otherwise specified. In the present specification and drawings, elements having substantially the same function and configuration are denoted by the same reference numerals, and redundant description is omitted, and elements not directly related to the present invention are not illustrated. To do.

(First embodiment: vacuum cleaning apparatus 100)
FIG. 1 is a conceptual diagram for explaining the vacuum cleaning apparatus 100. In FIG. 1, the flow of the hydrocarbon-based cleaning agent is indicated by solid arrows, the flow of the heat medium is indicated by broken arrows, and the flow of signals is indicated by dashed-dotted arrows. As shown in this figure, the vacuum cleaning apparatus 100 includes a vacuum container 104 in which a cleaning chamber 102 is provided. An opening (not shown) of the vacuum container 104 can be opened and closed by an opening / closing door. When cleaning the workpiece W, the opening / closing door is opened and the workpiece W is loaded into the cleaning chamber 102 through the opening and placed on the mounting unit 108, and the opening / closing door is closed to clean the workpiece W. Then, the opening / closing door is opened again, and the workpiece W is carried out from the opening.

  In the cleaning chamber 102, a shower unit 110 is provided. The shower unit 110 is connected to the vapor chamber 200 via a vapor supply pipe 114, a condensation chamber 120, a condensed cleaning agent supply pipe 122, a cleaning agent storage unit 124, and a condensed cleaning agent supply pipe 126.

  The cleaning chamber 102 is provided with a steam supply unit 130. The steam supply unit 130 is connected to the steam chamber 200 via a steam supply pipe 114.

  The steam chamber 200 includes a heater 202 and a steam chamber heat exchanger 320 (second heat exchanger), and a hydrocarbon-based cleaning agent (solvent) is, for example, about 80 ° C. to 140 ° C., preferably 120 ° C. By heating to a certain degree, steam of hydrocarbon-based cleaning agent (hereinafter simply referred to as steam) is generated. The steam generated in the steam chamber 200 is introduced into the condensation chamber 120 via the steam supply pipe 114 or supplied to the cleaning chamber 102 through the steam supply unit 130. The steam supplied by the steam supply unit 130 is condensed by adhering to the workpiece W.

  The type of the hydrocarbon-based cleaning agent is not particularly limited, but it is desirable to use a third petroleum cleaning agent from the viewpoint of safety. For example, normal paraffinic, isoparaffinic, naphthenic, aromatic These hydrocarbon-based cleaning agents are listed. Specifically, Teclean (registered trademark) N20, a clean solvent G, a Daphne solvent, or the like called a cleaning solvent may be used as the third petroleum cleaning agent.

  The condensation chamber 120 includes a condensation chamber heat exchanger 310 (first heat exchanger), and the steam introduced into the condensation chamber 120 is cooled by the condensation chamber heat exchanger 310 to be a liquid hydrocarbon system. It is condensed into a cleaning agent (hereinafter simply referred to as a condensed cleaning agent). The condensed cleaning agent is stored in the cleaning agent storage unit 124 through the condensed cleaning agent supply pipe 122 and then supplied to the cleaning chamber 102 through the condensed cleaning agent supply pipe 126 and the shower unit 110. It becomes. The cooling mechanism by the condensation chamber heat exchanger 310 and the heating mechanism by the steam chamber heat exchanger 320 will be described in detail later.

  In the vacuum vessel 104, an immersion chamber 140 disposed below the cleaning chamber 102 is provided. The immersion chamber 140 stores an amount of hydrocarbon-based cleaning agent (liquid) in which the workpiece W can be completely immersed, and is provided with a heater 140a for heating the hydrocarbon-based cleaning agent. Further, an intermediate door 142 is provided between the cleaning chamber 102 and the immersion chamber 140, and the intermediate door 142 allows the cleaning chamber 102 and the immersion chamber 140 to communicate with each other or the communication to be interrupted. It has become.

  The hydrocarbon-based cleaning agent stored in the immersion chamber 140 includes the condensed cleaning agent supplied from the shower unit 110 and the condensed cleaning supplied from the cleaning agent storage unit 124 via the condensed cleaning agent supply pipe 128. Either one or both of the agents. Moreover, in this embodiment, the mounting part 108 is provided with an elevator device (not shown), and the mounting part 108 is configured to be movable in the vertical direction. Therefore, by driving the lifting device in a state where the intermediate door 142 is opened and the cleaning chamber 102 and the immersion chamber 140 are in communication with each other, the workpiece W is moved from the cleaning chamber 102 to the immersion chamber 140 as indicated by a broken line in the figure. The workpiece W can be moved from the immersion chamber 140 to the cleaning chamber 102.

  Then, the condensed cleaning agent supplied from the shower unit 110 to clean the workpiece W, the condensed cleaning agent supplied from the vapor supply unit 130 and condensed by the workpiece W, and the condensation cleaning the workpiece W in the immersion chamber 140. The cleaning agent (used cleaning agent) is re-introduced into the steam chamber 200 through the used cleaning agent introduction pipe 150 and is heated again by the heater 202 and the steam chamber heat exchanger 320 described above to become steam. (Regeneration).

  Further, a vacuum pump (not shown) is connected to the cleaning chamber 102 and the vapor chamber 200. This vacuum pump is for reducing the pressure in the vacuum vessel 104 and the vapor chamber 200 by evacuation (initial vacuum) (for example, 6 kPa) in the pressure reducing step before starting the cleaning of the workpiece W. Further, a pipe (not shown) for opening the cleaning chamber 102 to the atmosphere is connected to the cleaning chamber 102. This piping is provided with an air release valve that shuts off or opens the atmosphere and the cleaning chamber 102, and the cleaning chamber 102 is opened to the atmosphere in the unloading process after the cleaning process and the drying process of the workpiece W are completed. It returns to atmospheric pressure.

(Heat pump unit 300)
The heat pump unit 300 includes a condensation chamber heat exchanger 310, a steam chamber heat exchanger 320, a heat medium circulation line 330 (shown as 330a to 330f in FIG. 1), a compressor 340, a decompression unit 350, an intermediate A heat exchanger (third heat exchanger) 360, an on-off valve 370, a measuring unit 410, and a control unit 420 are configured.

  In the heat pump unit 300, the control means 420 controls the driving of the compressor 340, so that the heat medium circulates through the heat medium circulation line 330 as indicated by the broken arrow in FIG. The condensation chamber heat exchanger 310, the intermediate heat exchanger 360, the compressor 340, the open / close valve 370, the steam chamber heat exchanger 320, the intermediate heat exchanger 360, and the decompression unit 350 are provided. Will be introduced again. The type of the heat medium is not particularly limited, and a fluorocarbon heat medium that is liquid at room temperature and atmospheric pressure and that can use the latent heat of the heat medium in the condensing chamber heat exchanger 310 may be used. Here, the normal temperature is, for example, 25 ° C.

  The condensing chamber heat exchanger 310 performs heat exchange between the heat medium and the steam introduced from the steam chamber 200 in the condensing chamber 120, thereby condensing by cooling the steam into a condensed cleaning agent, Heat the heating medium. Here, the heat medium becomes a gas (indicated by G in FIG. 1) by being heated by the condensation chamber heat exchanger 310. The heat medium heated by the condensation chamber heat exchanger 310 is further heated by the intermediate heat exchanger 360. The heating mechanism by the intermediate heat exchanger 360 will be described in detail later.

  The compressor 340 adiabatically compresses the heat medium heated by the intermediate heat exchanger 360 and further raises the temperature. In the present embodiment, the compressor 340 includes an unloader.

  The steam chamber heat exchanger 320 heats the hydrocarbon-based cleaning agent by performing heat exchange between the heat medium heated by the compressor 340 and the liquid hydrocarbon-based cleaning agent in the steam chamber 200. Steam is generated and the heat medium is cooled. Here, by being cooled by the steam chamber heat exchanger 320, the heat medium is in a gas-liquid mixed state (indicated by G and L in FIG. 1). The heat medium cooled by the steam chamber heat exchanger 320 is further cooled by the intermediate heat exchanger 360. The cooling mechanism by the intermediate heat exchanger 360 will be described in detail later.

  The decompression unit 350 includes an expansion valve that is a valve that causes a pressure drop of the fluid, and further decompresses and expands the heat medium cooled by the steam chamber heat exchanger 320. Here, by being cooled by the decompression unit 350, the heat medium becomes a liquid (indicated by L in FIG. 1). Then, the heat medium cooled in the decompression unit 350 is again introduced into the condensation chamber heat exchanger 310 through the heat medium circulation line 330f.

  The intermediate heat exchanger 360 includes a heat medium that circulates through the heat medium circulation lines 330a and 330b (between the condensation chamber heat exchanger 310 and the compressor 340), and heat medium circulation lines 330d and 330e (the steam chamber heat exchanger 320 and Heat exchange is performed with a heat medium flowing between the decompression unit 350). The heat medium heated by the condensing chamber heat exchanger 310 and flowing through the heat medium circulation line 330a may not be completely vaporized but may be a gas-liquid mixed fluid. In this case, if the heat medium in the liquid state is introduced into the compressor 340, there is a possibility that a problem occurs in the compressor 340.

  Therefore, the configuration including the intermediate heat exchanger 360 heats the heat medium flowing through the heat medium circulation line 330a to a temperature higher than the saturation temperature, thereby introducing the heat medium (heat medium circulation line) introduced into the compressor 340. It is possible to ensure that only the gas is used as the heat medium flowing through 330b. Thereby, the situation where a malfunction arises in the compressor 340 can be avoided.

  The on-off valve 370 communicates with the compressor 340 and the steam chamber heat exchanger 320 by opening the valve, and shuts off the communication by closing the valve.

  The measuring means 410 includes a heat medium temperature TA in the heat medium circulation line 330b (downstream of the intermediate heat exchanger 360 and upstream of the compressor 340), a pressure PA of the heat medium flowing through the heat medium circulation line 330b, The pressure PC of the heat medium downstream of the compressor 340 and upstream of the on-off valve 370, the heat medium circulation line 330a (downstream of the condensation chamber heat exchanger 310 and upstream of the intermediate heat exchanger 360). The temperature TB of the heat medium is measured.

  The control unit 420 controls the driving of the compressor 340 and the opening degrees of the decompression unit 350 and the on-off valve 370 to control the circulation amount of the heat medium. More specifically, the control means 420 is composed of a semiconductor integrated circuit including a CPU (Central Processing Unit), reads a program, parameters, etc. for operating the CPU itself from the ROM, reads a RAM as a work area, and other The entire heat pump unit 300 is managed and controlled in cooperation with the electronic circuit. In the present embodiment, the control unit 420 controls the compressor 340, the decompression unit 350, and the on-off valve 370 based on the temperature TB, TA, pressure PA, and PC measured by the measurement unit 410.

  Next, operation control of the compressor 340, the decompression unit 350, and the on-off valve 370 by the control unit 420 (operation method of the vacuum cleaning device) will be described. FIG. 2 is a flowchart for explaining a method of operating the vacuum cleaning apparatus (control of the heat pump unit 300) by the control means 420. As shown in FIG. 2, the control means 420 includes a heat pump in order of a start process S210 for starting the rotation of the compressor 340, a normal operation process S220 for rated operation of the compressor 340, and a stop process S230 for stopping the rotation of the compressor 340. The unit 300 is controlled. In the present embodiment, when an instruction to start operation of the heat pump unit 300 is received from the user, the activation process S210 is started. Hereinafter, in order to facilitate understanding, the process will be described in the order of the normal operation process S220, the stop process S230, and the start process S210 by the control unit 420.

(Normal operation process S220)
FIG. 3 is a flowchart for explaining the normal operation processing S220 according to the first embodiment. When performing the normal operation process S220, the control unit 420 opens the decompression unit 350 and the on-off valve 370, and operates at the rated capacity without operating the unloader of the compressor 340.

  Then, as shown in FIG. 3, the control unit 420 determines that the pressure PC measured by the measurement unit 410 is equal to or higher than a predetermined pressure P1 (for example, 2.4 MPa), or the measurement unit 410 measures. It is determined whether the temperature TB is lower than a predetermined temperature T1 (for example, 65 ° C.) (S220-1).

  When the pressure PC is not equal to or higher than P1 and the temperature TB is not less than T1 (NO in S220-1), the control unit 420 maintains the unloader of the compressor 340 without operating (S220-2).

  On the other hand, when the pressure PC is equal to or higher than P1 or the temperature TB is lower than T1 (YES in S220-1), the control unit 420 operates the unloader of the compressor 340 (S220-3). Here, the capacity of the compressor when the unloader is operated is, for example, 50% of the rated capacity.

  As described above, when the pressure PC becomes too high, the control unit 420 operates the unloader of the compressor 340, so that excessive compression of the heat medium by the compressor 340 can be avoided. Further, when the temperature TB is too low, the control unit 420 operates the unloader of the compressor 340 to avoid a situation where the temperature of the condensed cleaning agent stored in the cleaning agent storage unit 124 is too low. Can do. As a result, it is possible to appropriately maintain the shower cleaning capability of the condensed cleaning agent supplied from the shower unit 110 and the immersion cleaning capability in the immersion chamber 140.

  Then, the control means 420 derives the degree of superheat of the heat medium in the heat medium circulation line 330b from the temperature TA of the heat medium in the heat medium circulation line 330b and the pressure PA measured by the measurement means 410 (S220-4). Specifically, the control unit 420 calculates the saturation temperature of the heat medium in the heat medium circulation line 330b based on the pressure PA and the saturation vapor pressure curve of the heat medium. Then, the degree of superheat is derived by subtracting the calculated saturation temperature from the temperature TA.

  Next, the control means 420 determines whether or not the derived superheat degree is equal to or higher than a predetermined temperature T2 (for example, 30 ° C.) (S220-5), and if it is lower than the temperature T2 (S220-5) NO), the opening degree of the decompression unit 350 is adjusted (S220-6). Thereby, the heating of the hydrocarbon-based cleaning agent can be properly maintained in the steam chamber 200.

  Then, the control means 420 repeats the processing from S220-1 to S220-6 until a stop instruction is received (NO in S220-7), and when the stop instruction is received (YES in S220-7), the normal operation process S220. And the process proceeds to the stop process S230.

(Stop processing S230)
FIG. 4 is a flowchart for explaining the stop process S230 according to the first embodiment. When receiving a stop instruction in the stop instruction determination process S220-7, as shown in FIG. 4, the control means 420 determines whether or not the current unloader of the compressor 340 is operating (S230-1). If the unloader is not operating (NO in S230-1), the unloader of the compressor 340 is operated (S230-2). Then, the control unit 420 closes the decompression unit 350 (S230-3).

  When the unloader of the compressor 340 is operating (YES in S230-1), the operation of the unloader is maintained, and the control unit 420 closes the decompression unit 350 (S230-3).

  Subsequently, the control unit 420 determines whether or not the pressure PA measured by the measurement unit 410 has decreased to less than a predetermined pressure P2 (third threshold, for example, atmospheric pressure) (S230-4). Control means 420 keeps the unloader of compressor 340 operating until pressure PA drops below P2 (NO in S230-4).

  When the pressure PA becomes less than P2 (YES in S230-4), the control means 420 stops the rotation of the compressor 340 and closes the on-off valve 370 (S230-5).

  With the pressure reducing unit 350 closed as described above, the compressor 340 is rotated until the pressure PA decreases to less than P2 (NO in S230-4), so that the on-off valve is downstream of the compressor 340. A compressed heat medium, that is, a liquid heat medium can be retained between 370 and the decompression unit 350 (heat medium circulation lines 330c, 330d, and 330e). As a result, it is possible to reduce the remaining heat medium between the condensing chamber heat exchanger 310 and the compressor 340 (heat medium circulation lines 330a and 330b), and liquid from the upstream side of the compressor 340 at the next start-up. It is possible to avoid the situation where the heat medium in the state is introduced.

(Startup process S210)
FIG. 5 is a flowchart for explaining the activation process S210 according to the first embodiment. When the control unit 420 accepts the start instruction, as shown in FIG. 5, the control unit 420 opens the on-off valve 370 while operating the unloader of the compressor 340 while keeping the decompression unit 350 closed, and rotates the compressor 340. Is started (S210-1).

  Subsequently, the control means 420 derives the degree of superheat of the heat medium in the heat medium circulation line 330b from the temperature TA of the heat medium circulation line 330b measured by the measurement means 410 and the pressure PA (S210-2). . Specifically, the control unit 420 calculates the saturation temperature of the heat medium in the heat medium circulation line 330b based on the pressure PA and the saturation vapor pressure curve of the heat medium. Then, the degree of superheat is derived by subtracting the calculated saturation temperature from the temperature TA.

  Next, the control means 420 determines whether or not the derived superheat degree is equal to or higher than a predetermined temperature T3 (first threshold, for example, 30 ° C.) (S210-3). Then, until the degree of superheat becomes equal to or higher than the temperature T3 (NO in S210-3), the processes of S210-2 and S210-3 are repeated, and when the degree of superheat becomes equal to or higher than the temperature T3 (YES in S210-3), control means. 420 opens the decompression section 350 and adjusts the opening degree of the decompression section 350 so that the degree of superheat does not fall below the temperature T3 (S210-4).

  Subsequently, the control unit 420 determines whether the temperature TB of the heat medium in the heat medium circulation line 330a is equal to or higher than a predetermined temperature T4 (second threshold, for example, 70 ° C.) (S210-5). When the temperature TB becomes equal to or higher than the temperature T4 (YES in S210-5), the unloader of the compressor 340 is stopped (S210-6).

  As described above, in the above-described stop process S230, the liquid heat medium is removed from the upstream side of the compressor 340, and the compressor 340 is driven in the start-up process S210 with the decompression unit 350 closed. As a result, the liquid heat medium is not introduced into the compressor 340. Therefore, damage to the compressor 340 due to the introduction of the liquid heat medium can be avoided.

  Further, even if a liquid heat medium remains on the upstream side of the compressor 340, the unloader is operated, so that damage to the compressor 340 can be avoided.

  Furthermore, since the decompression unit 350 is adjusted so that the degree of superheat does not fall below the temperature T3, that is, the temperature TA is maintained at a temperature higher than the saturation temperature, a liquid heat medium is introduced into the compressor 340. Can be avoided.

  Next, a vacuum cleaning method for the workpiece W in the vacuum cleaning apparatus 100 will be described with reference to FIGS. 1 and 6.

  FIG. 6 is a flowchart for explaining each process related to the cleaning of the workpiece using the vacuum cleaning apparatus 100. In using the vacuum cleaning apparatus 100, first, the preparation process (step S310) is performed once, and then, for one workpiece W, a carry-in process (step S320), a decompression process (step S330), and a steam cleaning process. (Step S340), a shower cleaning process (Step S350), an immersion cleaning process (Step S360), a drying process (Step S370), and an unloading process (Step S380). Then, the steps of loading step S320 to unloading step S380 are performed on the workpieces W sequentially loaded. Hereinafter, the respective steps will be described with reference to FIG.

(Preparation process: Step S310)
First, when operating the vacuum cleaning apparatus 100, the open / close door is closed to shut off the inside of the vacuum vessel 104 from the outside. Then, the intermediate door 142 is opened to allow the immersion chamber 140 to communicate with the cleaning chamber 102. Next, the vacuum pump is driven, and the cleaning chamber 102 and the immersion chamber 140 are decompressed to, for example, 10 kPa or less by evacuation. When the cleaning chamber 102 and the immersion chamber 140 are thus reduced to a desired pressure, the intermediate door 142 is closed and the immersion chamber 140 is shut off from the cleaning chamber 102. Then, after shutting off, the atmosphere release valve is opened to open the cleaning chamber 102 to the atmosphere.

  Then, the heater 202 and the heat pump unit 300 are driven, and the hydrocarbon-based cleaning agent stored in the steam chamber 200 is heated by the heater 202 and the steam chamber heat exchanger 320 to generate steam. Then, the steam generated in the steam chamber 200 is introduced into the condensing chamber 120, cooled by the condensing chamber heat exchanger 310, condensed into the condensed cleaning agent, and stored in the cleaning agent storage unit 124, or condensed. It is stored in the immersion chamber 140 through the cleaning agent supply pipe 128.

  Further, the heater 140a is driven to heat the hydrocarbon-based cleaning agent stored in the immersion chamber 140 to generate steam. At this time, since the intermediate door 142 is closed, the steam generated in the immersion chamber 140 is filled in the immersion chamber 140. Thereby, the preparatory process S310 of the vacuum cleaning apparatus 100 is completed, and the workpiece W can be cleaned by the vacuum cleaning apparatus 100.

(Transportation process: Step S320)
When the workpiece W is cleaned by the vacuum cleaning apparatus 100, first, the open / close door is opened, and the workpiece W is loaded into the cleaning chamber 102 through the opening and placed on the placement unit 108. When the loading of the workpiece W is completed, the opening / closing door is closed and the cleaning chamber 102 is sealed. In addition, the temperature of the workpiece | work W is normal temperature (about 15 to 40 degreeC) at this time.

(Decompression step: Step S330)
Next, the vacuum pump is driven to depressurize the cleaning chamber 102 and the vapor chamber 200 to 10 kPa or less by evacuation.

(Vapor cleaning process: Step S340)
Next, the open / close valve 132 is opened to supply the steam generated in the steam chamber 200 to the cleaning chamber 102. At this time, the temperature of the steam is controlled to 80 ° C. to 140 ° C., and the high temperature steam fills the cleaning chamber 102.

  When the vapor supplied to the cleaning chamber 102 adheres to the surface of the workpiece W, the temperature of the workpiece W is lower than the temperature of the vapor, so that the vapor is condensed on the surface of the workpiece W and adheres to the surface of the workpiece W. The oils and fats are dissolved and flowed down by the condensed hydrocarbon cleaning agent, and the workpiece W is cleaned. This steam cleaning step S340 is performed until the temperature of the work W reaches 80 ° C. to 140 ° C., which is the temperature of the steam (boiling point of the hydrocarbon-based cleaning agent), and the temperature of the work W reaches the temperature of the steam. Then, the steam cleaning step S340 is completed.

(Shower washing process: Step S350)
When the steam cleaning step S340 ends, the shower unit 110 opens the opening / closing valve 126a and injects the condensed cleaning agent stored in the cleaning agent storage unit 124 onto the workpiece W. In this way, oils and fats and the like adhering to the details of the workpiece W that could not be cleaned in the steam cleaning step S340 are cleaned.

(Immersion cleaning process: Step S360)
When the shower cleaning step S350 is completed, the intermediate door 142 is opened, and the placement unit 108 is lowered by an elevating device (not shown), and the workpiece W is immersed in the hydrocarbon-based cleaning agent stored in the immersion chamber 140. . At this time, the workpiece W repeatedly moves up and down in the vertical direction a plurality of times by the lifting device, and the fats and oils attached to the details of the workpiece W that could not be cleaned in the steam cleaning step S340 or the shower cleaning step S350 are cleaned. When the cleaning of the workpiece W is completed in this manner, the placement unit 108 is raised to transport the workpiece W to the cleaning chamber 102, the intermediate door 142 is closed, and the cleaning chamber 102 and the immersion chamber 140 are shut off.

(Drying process: Step S370)
When the immersion cleaning process in step S360 is completed, a drying process S370 for drying the hydrocarbon-based cleaning agent attached to the workpiece W at the time of cleaning is performed. This drying step S370 is performed by driving a vacuum pump.

(Unloading process: Step S380)
As described above, when the drying of the cleaning chamber 102 and the workpiece W is completed, the atmosphere release valve is opened to release the cleaning chamber 102 to the atmosphere, and when the cleaning chamber 102 is restored to atmospheric pressure, the door is opened. Then, the work W is carried out from the opening, and all processes for the work W are completed.

  On the other hand, when the vacuum cleaning apparatus 100 receives a stop instruction for the vacuum cleaning apparatus 100 by the user, the vacuum cleaning apparatus 100 starts a stop interrupt process.

(Stop processing: Step S390)
When an instruction to stop the vacuum cleaning apparatus 100 is input by the user, the vacuum cleaning apparatus 100 stops or drives the currently driven functional units (for example, the shower unit 110, the heaters 202 and 140a, and the lifting device). The unit (for example, a lifting device or the like) is returned to a predetermined position and the stop process is performed. In addition, about the heat pump unit 300, a stop process is performed according to stop process S230 shown in FIG. 4 mentioned above.

(Second Embodiment)
In the first embodiment described above, the control unit 420 controls the unloader of the compressor 340 when operating the heat pump unit 300. However, the control means 420 can operate the heat pump unit 300 by controlling the rotation speed of the compressor 340 instead of controlling the unloader. Therefore, in the present embodiment, a configuration in which the control unit 420 controls the rotation speed of the compressor 340 will be described. In addition, about the process substantially equal to the process in 1st Embodiment mentioned above, the same code | symbol is attached | subjected and duplication description is abbreviate | omitted.

  The control means 420 controls the heat pump unit 300 in the order of a start process S210 for starting rotation of the compressor 340, a normal operation process S220 for rated operation of the compressor 340, and a stop process S230 for stopping rotation of the compressor 340 (FIG. 2). In the present embodiment, when an instruction to start operation of the heat pump unit 300 is received from the user, the activation process S210 is started. Hereinafter, in order to facilitate understanding, the process will be described in the order of the normal operation process S220, the stop process S230, and the start process S210 by the control unit 420.

(Normal operation process S220)
FIG. 7 is a flowchart for explaining the normal operation processing S220 according to the second embodiment. When performing the normal operation process S220, the control unit 420 opens the decompression unit 350 and the on-off valve 370, and drives the compressor 340 at the rated operation speed (hereinafter simply referred to as the rated speed). doing.

  Then, as shown in FIG. 7, the control means 420 is configured such that the pressure PC measured by the measurement means 410 is equal to or higher than a predetermined pressure P10 (for example, 2.6 MPa) or measured by the measurement means 410. It is determined whether the temperature TB is lower than a predetermined temperature T10 (for example, 60 ° C.) (S420-1).

  When the pressure PC is not equal to or higher than the pressure P10 and the temperature TB is not lower than T10 (NO in S420-1), the control means 420 determines that the pressure PC measured by the measuring means 410 is lower than the pressure P10. It is determined whether it is P1 (for example, 2.4 MPa) or higher, or whether the temperature TB measured by the measuring unit 410 is lower than a predetermined temperature T1 (for example, 65 ° C.) higher than the temperature T10 (S220). -1).

  When the pressure PC is not equal to or higher than P1 and the temperature TB is not less than T1 (NO in S220-1), the control unit 420 maintains the rotation speed of the compressor 340 at the rated rotation speed (S420-3).

  On the other hand, when pressure PC is equal to or higher than P10, or temperature TB is lower than T10 (YES in S420-1), control means 420 sets the rotational speed of compressor 340 to a rotational speed lower than the rated rotational speed. The speed is reduced to the first rotation speed (S420-4). Here, the first rotational speed is, for example, a rotational speed that is low enough to prevent the compressor 340 from being broken even if liquid is introduced into the compressor 340.

  When the pressure PC is equal to or higher than P1 or the temperature TB is lower than T1 (YES in S220-1), the control unit 420 sets the rotational speed of the compressor 340 to be lower than the rated rotational speed, but the first speed. The rotation speed is lowered to a second rotation speed that is higher than the rotation speed (S420-5). Here, the second rotational speed is, for example, a rotational speed that is 50% of the rated rotational speed.

  Thus, when the pressure PC becomes too high, the control means 420 can avoid excessive compression of the heat medium by the compressor 340 by reducing the rotational speed of the compressor 340. In addition, when the temperature TB is excessively lowered, the controller 420 reduces the rotational speed of the compressor 340, thereby avoiding a situation where the temperature of the condensed cleaning agent stored in the cleaning agent storage unit 124 is excessively reduced. Can do. As a result, it is possible to appropriately maintain the shower cleaning capability of the condensed cleaning agent supplied from the shower unit 110 and the immersion cleaning capability in the immersion chamber 140.

  Then, the control means 420 derives the degree of superheat of the heat medium in the heat medium circulation line 330b from the temperature TA of the heat medium in the heat medium circulation line 330b and the pressure PA measured by the measurement means 410 (S220-4). Specifically, the control unit 420 calculates the saturation temperature of the heat medium in the heat medium circulation line 330b based on the pressure PA and the saturation vapor pressure curve of the heat medium. Then, the degree of superheat is derived by subtracting the calculated saturation temperature from the temperature TA.

  Next, the control means 420 determines whether or not the derived superheat degree is equal to or higher than a predetermined temperature T2 (for example, 30 ° C.) (S220-5), and if it is lower than the temperature T2 (S220-5) NO), the opening degree of the decompression unit 350 is adjusted (S220-6). Thereby, the heating of the hydrocarbon-based cleaning agent can be properly maintained in the steam chamber 200.

  Then, the control means 420 repeats the processing from S420-1 to S220-6 until a stop instruction is received (NO in S220-7), and when the stop instruction is received (YES in S220-7), the normal operation process S220. And the process proceeds to the stop process S230.

(Stop processing S230)
FIG. 8 is a flowchart for explaining the stop process S230 according to the second embodiment. When the stop instruction is received in the stop instruction determination process S220-7, the control unit 420 determines whether the current rotation speed of the compressor 340 is the rated rotation speed as shown in FIG. 8 (S430-1). . If it is the rated rotational speed (YES in S430-1), the rotational speed of the compressor 340 is reduced to the second rotational speed (S430-2). Then, the control unit 420 closes the decompression unit 350 (S230-3).

  When the current rotational speed of the compressor 340 is not the rated rotational speed, that is, when the rotational speed is the second rotational speed or the first rotational speed (NO in S430-1), the rotational speed is maintained. The control means 420 closes the decompression unit 350 (S230-3).

  The compressor 340 is rotated until the pressure PA drops below a predetermined pressure P2 (third threshold, for example, atmospheric pressure) (NO in S230-4) with the pressure reducing unit 350 closed as described above. As a result, the compressed heat medium, that is, the liquid heat medium is retained between the on-off valve 370 and the pressure reducing unit 350 (heat medium circulation lines 330c, 330d, 330e) on the downstream side of the compressor 340. Can do. As a result, it is possible to reduce the remaining heat medium between the condensing chamber heat exchanger 310 and the compressor 340 (heat medium circulation lines 330a and 330b), and liquid from the upstream side of the compressor 340 at the next start-up. It is possible to avoid the situation where the heat medium in the state is introduced.

(Startup process S210)
FIG. 9 is a flowchart for explaining the activation process S210 according to the second embodiment. Upon receipt of the start instruction, the control means 420 opens the on-off valve 370 while keeping the decompression unit 350 closed, and starts the rotation of the compressor 340, as shown in FIG. The number is controlled to the first rotation number (S410-1).

  Subsequently, the control means 420 derives the degree of superheat of the heat medium in the heat medium circulation line 330b from the temperature TA of the heat medium circulation line 330b measured by the measurement means 410 and the pressure PA (S210-2). . Specifically, the control unit 420 calculates the saturation temperature of the heat medium in the heat medium circulation line 330b based on the pressure PA and the saturation vapor pressure curve of the heat medium. Then, the degree of superheat is derived by subtracting the calculated saturation temperature from the temperature TA.

  Next, the control means 420 determines whether or not the derived superheat degree is equal to or higher than a predetermined temperature T3 (first threshold, for example, 30 ° C.) (S210-3). Then, until the degree of superheat becomes equal to or higher than the temperature T3 (NO in S210-3), the processes of S210-2 and S210-3 are repeated, and when the degree of superheat becomes equal to or higher than the temperature T3 (YES in S210-3), control means. 420 opens the decompression unit 350, increases the rotation speed of the compressor 340 to the second rotation number, and adjusts the opening degree of the decompression unit 350 so that the degree of superheat does not fall below the temperature T3 (S410-4). ).

  Subsequently, the control unit 420 determines whether the temperature TB of the heat medium in the heat medium circulation line 330a is equal to or higher than a predetermined temperature T4 (second threshold, for example, 70 ° C.) (S210-5). When temperature TB becomes equal to or higher than temperature T4 (YES in S210-5), the rotation speed of compressor 340 is set to the rotation speed of the rated operation (S410-6).

  As described above, in the above-described stop process S230, the liquid heat medium is removed from the upstream side of the compressor 340, and the compressor 340 is driven in the start-up process S210 with the decompression unit 350 closed. As a result, the liquid heat medium is not introduced into the compressor 340. Therefore, damage to the compressor 340 due to the introduction of the liquid heat medium can be avoided.

  Further, even if a liquid heat medium remains on the upstream side of the compressor 340, the first rotation speed (low enough to prevent the compressor 340 from being broken even if liquid is introduced into the compressor 340). Therefore, the compressor 340 can be prevented from being damaged.

  Furthermore, in order to increase the rotation speed of the compressor 340 while adjusting the pressure reducing unit 350 so that the degree of superheat does not fall below the temperature T3, that is, the temperature TA is maintained at a temperature higher than the saturation temperature, the compression is increased. A situation where a liquid heat medium is introduced into the machine 340 can be avoided.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this embodiment. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Is done.

  For example, in the start-up process S210 and the normal operation process S220 of the above-described embodiment, the control unit 420 derives the degree of superheat of the heat medium in the heat medium circulation line 330b based on the temperature TA and the pressure PA. Since the temperature TB is substantially equal to the saturation temperature, a value obtained by subtracting the temperature TB from the temperature TA can be used as the degree of superheat.

  In the stop process S230 of the above-described embodiment, the control unit 420 stops driving the compressor 340 when the pressure PA is less than P2, but the temperature TA is less than a predetermined fourth threshold (for example, (50 ° C.), the driving of the compressor 340 may be stopped.

  Further, when designing the heat pump unit 300, when the decompression unit 350 is closed and the unloader of the compressor 340 is operated, the time from when the pressure is closed until the pressure PA becomes less than P2 is calculated. When the time elapses, the driving of the compressor 340 may be stopped. Further, when designing the heat pump unit 300, when the decompression unit 350 is closed and the compressor 340 is driven at the second rotational speed, the time from the start of driving until the pressure PA becomes less than P2 is calculated. Then, the driving of the compressor 340 may be stopped when the time has elapsed.

  In the normal operation process S220 of the above-described embodiment, the control unit 420 controls the unloader or the rotation speed of the compressor 340 based on the pressure PC, but the temperature at the outlet of the compressor 340 (for example, 160 ° C.), the unloader of the compressor 340 or the rotation speed may be controlled.

  Further, in the second embodiment described above, the case where the control unit 420 controls the rotation speed of the compressor 340 provided with the unloader has been described. However, when the control unit 420 controls the rotation speed of the compressor, the compressor The unloader may not be provided.

  Moreover, if the steam at the target temperature (80 ° C. to 140 ° C., for example, 120 ° C.) can be generated in the steam chamber 200 without using the heater 202 by the condensation chamber heat exchanger 310 and the steam chamber heat exchanger 320, The heater 202 may be used only for the preparation step S310.

  In the above-described embodiment, the generation of the condensed cleaning agent by the condensing chamber heat exchanger 310 in the condensing chamber 120 has been described only in the preparation step S310, but may be performed in the loading step S320 to the unloading step S380. .

  Further, in the above-described embodiment, when steam cleaning is performed, steam generated in the steam chamber 200 is used. However, steam generated in the immersion chamber 140 may be used.

  In the above-described embodiment, the vacuum cleaning apparatus 100 includes the immersion chamber 140. However, the immersion chamber 140 is not an essential configuration, and the immersion chamber 140 may not be provided.

  In the above-described embodiment, the configuration in which the decompression unit 350 is an expansion valve has been described as an example. However, the configuration includes a turbine that is rotated by a heat medium cooled by the steam chamber heat exchanger 320 and an on-off valve. May be. In this case, the compressor 340 may be assisted in driving by the rotational power of the turbine.

  Note that the steps of the vacuum cleaning method and the operation method of the vacuum cleaning apparatus of this specification do not necessarily have to be processed in time series in the order described in the flowchart, and may include processing in parallel or by a subroutine. .

  INDUSTRIAL APPLICABILITY The present invention can be used in a vacuum cleaning apparatus that supplies a hydrocarbon-based cleaning agent vapor to a cleaning chamber under reduced pressure to clean a workpiece and a method for operating the vacuum cleaning apparatus.

DESCRIPTION OF SYMBOLS 100 ... Vacuum cleaning apparatus 102 ... Cleaning chamber 120 ... Condensing chamber 200 ... Steam chamber 310 ... Condensing chamber heat exchanger (1st heat exchanger)
320 ... steam chamber heat exchanger (second heat exchanger)
340 ... Compressor 350 ... Decompression unit 360 ... Intermediate heat exchanger (third heat exchanger)
370 ... Opening and closing valve 410 ... Measuring means 420 ... Control means

Claims (14)

A steam chamber for generating hydrocarbon-based cleaning agent steam;
A condensing chamber connected to the vapor chamber;
A cleaning chamber capable of cleaning the workpiece under reduced pressure by the condensed hydrocarbon-based cleaning agent supplied from the condensation chamber;
In the condensing chamber, heat exchange is performed between the steam introduced from the steam chamber and the heat medium, thereby condensing the steam into a hydrocarbon-based cleaning agent and heating the heat medium. An exchange,
A compressor that adiabatically compresses the heat medium heated in the first heat exchanger and further raises the temperature;
In the steam chamber, by performing heat exchange between the heating medium heated by the compressor and the hydrocarbon-based cleaning agent, the hydrocarbon-based cleaning agent is vaporized to generate steam, and the heat A second heat exchanger for cooling the medium;
A decompression unit that decompresses and expands the heat medium cooled by the second heat exchanger, and further cools and returns the heat medium to the first heat exchanger;
An on-off valve that communicates the compressor and the second heat exchanger, or shuts off the communication;
Control means for driving the compressor, controlling the opening of the pressure reducing unit and the on-off valve, and controlling the circulation amount of the heat medium;
With
The control means includes
When executing the stop process of the compressor, the pressure reducing unit is closed and the flow of the heat medium to the compressor through the pressure reducing unit is shut off, and then the on-off valve is closed, and the downstream of the on-off valve A heat medium is retained between the on-off valve and the pressure reducing part on the side,
A vacuum cleaning apparatus characterized by opening the on-off valve and starting the rotation of the compressor when the start-up process of the compressor is executed, with the decompression unit closed. A third heat exchanger that performs heat exchange between a heat medium that flows between the first heat exchanger and the compressor, and a heat medium that flows between the second heat exchanger and the decompression unit. With
The compressor includes an unloader;
The control means, when executing the startup process,
Rotate the compressor with the unloader activated,
Deriving the degree of superheat of the heat medium between the third heat exchanger and the compressor,
Adjusting the degree of opening of the decompression unit so as to maintain the derived degree of superheat above a predetermined first threshold value,
The unloader is stopped when the temperature of the heat medium between the first heat exchanger and the third heat exchanger is equal to or higher than a predetermined second threshold value. The vacuum cleaning apparatus as described. A third heat exchanger that performs heat exchange between a heat medium that flows between the first heat exchanger and the compressor, and a heat medium that flows between the second heat exchanger and the decompression unit. With
The control means, when executing the startup process,
Rotating the compressor at a first rotational speed lower than the rotational speed during rated operation;
Deriving the degree of superheat of the heat medium between the third heat exchanger and the compressor,
When the derived degree of superheat is equal to or higher than a predetermined first threshold, the rotational speed of the compressor is increased from the first rotational speed to a second rotational speed that is lower than the rotational speed during the rated operation, Adjusting the degree of opening of the decompression unit so as to maintain the derived degree of superheat above the first threshold,
When the temperature of the heat medium between the first heat exchanger and the third heat exchanger is equal to or higher than a predetermined second threshold, the rotation speed of the compressor is set to the rotation speed during the rated operation. The vacuum cleaning apparatus according to claim 1, wherein Measuring means for measuring the pressure and temperature of the heat medium downstream of the third heat exchanger and upstream of the compressor;
The control means derives the degree of superheat based on the measured pressure and temperature of the heat medium downstream of the third heat exchanger and upstream of the compressor. The vacuum cleaning apparatus according to claim 2 or 3. The temperature of the heat medium downstream of the first heat exchanger and upstream of the third heat exchanger, and the downstream of the third heat exchanger and upstream of the compressor Measuring means for measuring the temperature of the heating medium of
The control means includes the measured temperature of the heat medium downstream of the first heat exchanger and upstream of the third heat exchanger, and downstream of the third heat exchanger. 4. The vacuum cleaning apparatus according to claim 2, wherein the degree of superheat is derived based on the temperature of the heat medium upstream of the compressor. The compressor includes an unloader;
When the control means executes the stop process,
Activating the unloader of the compressor as the decompression unit is closed,
The pressure of the heat medium between the first heat exchanger and the compressor is less than a predetermined third threshold value, or the heat medium between the first heat exchanger and the compressor When the temperature of the compressor becomes lower than a predetermined fourth threshold value, the rotation of the compressor is stopped, and the on-off valve is closed to block the flow of the heat medium into the compressor. The vacuum cleaning apparatus of any one of Claim 1 to 5. When the control means executes the stop process,
Along with closing the decompression unit, the rotational speed of the compressor is lowered from the rotational speed during rated operation,
The pressure of the heat medium between the first heat exchanger and the compressor is less than a predetermined third threshold value, or the heat medium between the first heat exchanger and the compressor When the temperature of the compressor becomes lower than a predetermined fourth threshold value, the rotation of the compressor is stopped, and the on-off valve is closed to block the flow of the heat medium into the compressor. The vacuum cleaning apparatus of any one of Claim 1 to 5. A cleaning chamber capable of cleaning a workpiece under reduced pressure by a steam chamber for generating a hydrocarbon-based cleaning agent steam, a condensing chamber connected to the steam chamber, and a condensed hydrocarbon-based cleaning agent supplied from the condensing chamber In the chamber and the condensing chamber, heat exchange is performed between the steam introduced from the steam chamber and the heat medium, thereby condensing the steam into a hydrocarbon-based cleaning agent and heating the heat medium. 1 heat exchanger, a compressor that adiabatically compresses the heat medium heated by the first heat exchanger and further raises the temperature, and a heat medium that is heated by the compressor in the steam chamber, By performing heat exchange with the hydrocarbon-based cleaning agent, the hydrocarbon-based cleaning agent is vaporized to generate steam, and the second heat exchanger that cools the heat medium, and the second heat The heat medium cooled by the exchanger is expanded under reduced pressure and further cooled. An operation method of a vacuum cleaning apparatus comprising: a decompression unit that returns to the first heat exchanger; and an on-off valve that communicates the communication between the compressor and the second heat exchanger or shuts off the communication. There,
When executing the compressor stop process,
Closing the decompression unit to block the flow of the heat medium into the compressor through the decompression unit;
Closing the on-off valve, causing a heat medium to stay between the on-off valve and the pressure reducing unit on the downstream side of the on-off valve,
When performing the startup process of the compressor,
A method of operating a vacuum cleaning apparatus, wherein the on-off valve is opened and the compressor starts rotating with the decompression unit closed. The vacuum cleaning apparatus performs heat exchange between a heat medium that flows between the first heat exchanger and the compressor and a heat medium that flows between the second heat exchanger and the decompression unit. Comprising a third heat exchanger, the compressor comprising an unloader;
When performing the startup process of the compressor,
Rotate the compressor with the unloader activated,
Deriving the degree of superheat of the heat medium between the third heat exchanger and the compressor,
Adjusting the degree of opening of the decompression unit so as to maintain the derived degree of superheat above a predetermined first threshold value,
The unloader is stopped when the temperature of the heat medium between the first heat exchanger and the third heat exchanger becomes equal to or higher than a predetermined second threshold value. The operation method of the vacuum cleaning apparatus described. The vacuum cleaning apparatus performs heat exchange between a heat medium that flows between the first heat exchanger and the compressor and a heat medium that flows between the second heat exchanger and the decompression unit. A third heat exchanger,
When performing the startup process of the compressor,
Rotating the compressor at a first rotational speed lower than the rotational speed during rated operation;
Deriving the degree of superheat of the heat medium between the third heat exchanger and the compressor,
When the derived degree of superheat is equal to or higher than a predetermined first threshold, the rotational speed of the compressor is increased from the first rotational speed to a second rotational speed that is lower than the rotational speed during the rated operation, Adjusting the degree of opening of the decompression unit so as to maintain the derived degree of superheat above the first threshold,
When the temperature of the heat medium between the first heat exchanger and the third heat exchanger is equal to or higher than a predetermined second threshold, the rotation speed of the compressor is set to the rotation speed during the rated operation. The operation method of the vacuum cleaning apparatus according to claim 8, wherein   The degree of superheat of the heat medium between the third heat exchanger and the compressor is the pressure and temperature of the heat medium downstream of the third heat exchanger and upstream of the compressor. The operation method of the vacuum cleaning apparatus according to claim 9 or 10, wherein the operation is derived based on the above.   The degree of superheat of the heat medium between the third heat exchanger and the compressor is the temperature of the heat medium downstream of the first heat exchanger and upstream of the third heat exchanger. The operation of the vacuum cleaning apparatus according to claim 9 or 10, wherein the operation is derived based on the temperature of the heat medium downstream of the third heat exchanger and upstream of the compressor. Method. The compressor includes an unloader;
When executing the compressor stop process,
Activating the unloader of the compressor as the decompression unit is closed,
The pressure of the heat medium between the first heat exchanger and the compressor is less than a predetermined third threshold value, or the heat medium between the first heat exchanger and the compressor When the temperature of the compressor becomes lower than a predetermined fourth threshold value, the rotation of the compressor is stopped, and the on-off valve is closed to block the flow of the heat medium into the compressor. The operating method of the vacuum cleaning apparatus of any one of Claims 8-12. When executing the compressor stop process,
Along with closing the decompression unit, the rotational speed of the compressor is lowered from the rotational speed during rated operation,
The pressure of the heat medium between the first heat exchanger and the compressor is less than a predetermined third threshold value, or the heat medium between the first heat exchanger and the compressor When the temperature of the compressor becomes lower than a predetermined fourth threshold value, the rotation of the compressor is stopped, and the on-off valve is closed to block the flow of the heat medium into the compressor. The operating method of the vacuum cleaning apparatus of any one of Claims 8-12.

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