JP2014067770A - Frame body for holding substrate and transfer method of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a frame body for holding a substrate that can safely store and transport a large size substrate in a square shape of 2 meters on a side or larger, and a transfer method of the same.SOLUTION: A frame body for holding a substrate is configured to have at least a metal frame part 11 formed of flat metal frame materials with a rectangle cross section, and coupling parts 16 composed of the metal frame material to connect four corners of the metal frame part 11 in a rectangular shape in the plane view; and a substrate support plate 13 extended inside four sides of the metal frame part 11 to support the substrate. The coupling part 16 has a nonmagnetic material of a non-suction part and a suction part 17 made of a magnetic material inside the nonmagnetic material, and the suction part 17 is attracted by an electromagnet.

Description

In the present invention, a rigid (flexible) rectangular substrate is placed one by one on a substrate support plate provided inside a rectangular substrate holding frame, and the substrate is placed on the substrate. The present invention relates to a substrate holding frame for the purpose of stacking and storing and transporting the substrate holding frames in multiple stages, a method for transporting the substrate holding frame, and the like.

An example of the substrate is a thin glass substrate, and in particular, a plasma display, an organic EL display, a color filter substrate for a liquid crystal display, an intermediate product thereof, and various other substrates can be exemplified.
These large substrates are easy to bend, and if only the four-week edge is supported, they will be bent slightly downward horizontally, but when stacked in multiple stages, they will not touch each other and are stacked at a high density. There is a need to. Furthermore, it is necessary to protect the substrate from damage and cracking due to vibration during transportation and storage, and it is also necessary to prevent the occurrence of contamination and contamination.

  TECHNICAL FIELD The present invention relates to a substrate holding frame and a method for transporting the substrate holding frame, and in particular, a conventional method for holding a substrate holding frame on the left and right sides of the frame and engaging the frame. The present invention relates to a substrate holding frame that takes into consideration that it can be sucked and transported regardless of a method of gripping a portion, a transport method thereof, and the like.

It is important that a substrate used for a color filter for a liquid crystal display, a plasma display, an organic EL display, etc. is transported and stored without being damaged or soiled. When transporting such plate-like objects, it is effective to store them in parallel at a predetermined interval so that the substrates do not contact each other.
However, the flat panel display products represented by these liquid crystal displays, plasma displays, and organic EL displays have a large display screen size, and even in the case of small-size screens, they are in a state of being multifaceted in terms of cost. There is also a need to manufacture, and the substrates used and their intermediate products are becoming larger in size. Substrates are required to have a size of more than 1.5 meter square, and it is necessary to store and handle such substrates with high density and safety because of problems of storage space and handling equipment.

  Patent Document 1 is an invention relating to a display substrate storage tray, and a mechanism and method for extracting a display substrate stored in the display substrate storage tray. In the present invention, chucking chuck claws can be inserted between the engaging portion 13 of the upper display substrate storage tray 10 and the engaging portion 13 of the lower display substrate storage tray 10. The chuck claw is engaged with the engaging portion 13 of the upper display substrate storage tray 10 so that only the upper display substrate storage tray 10 is changed to the lower display substrate storage tray. 10 and transported separately (paragraph number 0036). Since the engaging portion extends outward from the outer peripheral frame, there is a problem that deformation may occur due to contact at the time of conveyance, which may cause gripping failure by the robot hand.

  Patent Document 2 relates to a device that supplies a component tray to a component insertion device, and describes that the component tray is gripped by an elevating mechanism and a suction mechanism. This is a component tray supply device that is constituted by a vacuum pad that sucks and grips a component tray by vacuum pressure, has a suction passage formed in a plurality of rods, and is connected to a vacuum device from the upper end via a pipe (paragraph number 0015). ), There is no description to prevent scattering of the pressurized air released when releasing the adsorption, and there is a problem that foreign matter is generated or scattered.

JP 2004-59116 A Japanese Patent Laid-Open No. 11-312895

Although not described in the prior literature, the related technology prior to the present application will be described.
FIG. 7 shows a general form of a conventional substrate holding frame. The substrate holding frame 10 is a plan view comprising a pair of metal frame members 11a and 11b opposed to each other and a pair of metal frame members 11c and 11d opposed to each other by assembling a metal frame having a rectangular cross section. It is composed of a rectangular metal frame portion 11. The four corners of the metal frame portion 11 are connected by a connecting portion 16. In some cases, the entire frame is made flat, but in many cases, the central portions of the pair of opposing metal frame members 11c and 11d are curved downward.

A substrate support plate 13 is extended inward from the four metal frame portions 11, and the thin plate substrate is placed on the substrate support plate 13 so as to have a peripheral edge. A region K surrounded by the substrate support plate 13 is an empty space region.
A handle 15 is formed on the left and right sides (generally the side on which the long side of the substrate is placed), and the handle 15 is gripped for the robot hand of the transfer device when the substrate holding frame 10 is transferred. To be part.

FIG. 8 is a view showing a packing state of the conventional substrate holding frame 10.
The substrate is placed on the substrate holding frame 10 to form a multistage stack 100 of 100 to 150 steps, the upper cover 31 is covered on the upper surface, the inner pallet 30 is applied to the lower step, the belt 32 is bound, and the vibration proof pallet 40 is further attached. It is common to transport in a packed state.

FIG. 9 is a diagram illustrating a conventional method for transporting a substrate holding frame. Although only one of the conveying devices is shown, there is a pair of mechanisms on the other side, which operate similarly. Moreover, although the state which mounted A1, A2, and A3 is shown, the state which does not mount a board | substrate is the same.
First, as shown in FIGS. 9A and 9B, the cylinder 51, which is a suspension mechanism of the frame body transfer device, is lowered. Next, as shown in (C), the hooking portion 62 of the suspension cylinder 61 is inserted into the lower surface of the handle portion 15 of the frame body 10. If the suspension cylinder 61 is raised in this state, the hook 62 and the handle 15 are engaged, and the substrate holding frame 10 can be transferred in this state (D). As described above, conventionally, a method of gripping the frame body with the handle 15 is generally performed.
The suspension mechanism in the present invention is an apparatus including an electromagnet provided at the tip of a cylinder attached to a robot hand of a frame transport apparatus.

  Substrates used in various flat panel displays represented by liquid crystal displays, plasma displays, and organic EL displays are 6th generation (1850 × 1500 mm), 7th generation (2200 × 1900 mm), and 8th generation (2500 × 2200 mm). With the increase in size, the added value of a single substrate is increasing. Therefore, handling of the substrate in the manufacturing process as well as handling and keeping of the substrate between the processes so as not to have foreign matters or scratches has become more important than ever.

In such a method of laminating and transporting the frame on which the substrate is placed, when the substrate is placed and the frames stacked in multiple stages are taken out one by one, the robot hand removes the frame from both sides of the frame. Grasping and moving. On both side surfaces of the frame on which the substrate is placed, the hand grips 15 held by the robot hand are attached so as to protrude outward from the frame.
In order to increase the loading efficiency of the substrates, a device for stacking the frames at high density has been devised, and the interval between the frames for stacking the substrates of the sixth generation size (hereinafter referred to as “G6 size”) should be reduced to about 10 mm. Is also possible. Along with this, the interval between the handle portions 15 protruding to the outer periphery is similarly reduced. Accordingly, since the margin for gripping the protruding handle 15 on both side surfaces of the frame on which the robot hands are stacked becomes narrow, the robot hand holds the handle 15 even if the handle 15 is slightly deformed. It becomes impossible to do so.
Since the handle portion 15 held by the robot hand extends outward from the outer peripheral frame, deformation may occur due to contact during transportation, which may cause a grip failure due to the robot hand. The present invention is intended to solve such a grip failure.

  Another issue is that the substrate holding frame becomes larger and heavier as the substrate becomes larger, and the robot, storage device, unpacking device, and packing device that are used for stacking and taking out the frame are also larger, and the viewpoint of the facility location. There is a demand for space saving. In addition, reduction of the frame size has become an important issue from the viewpoint of storing the stacked packages in a container used for truck transportation or sea transportation.

  The board is transported by stacking the frames on a pallet that has sufficient strength to mount a heavy-weight frame holding the board, and placing a lid on the top of the stacked frames and fixing it with a belt or the like. This is a state in which the entire structure is covered with a cover, which is placed on a vibration isolator that softens the laminate from vibration during transportation.

  Taking a G6 size substrate as an example, the frame size on which the substrate is placed is 1970 × 1670 mm and the lid size on the top surface is 1979 × 1670 mm, with respect to the substrate size of 1850 × 1500 mm. The size of the pallet on which the substrate is mounted is 1998 × 1698 mm, and the size of the vibration isolator on which all of these are mounted is 2008 × 1708 mm, which is about 200 mm larger in the horizontal direction than the substrate size of G6.

On the other hand, containers used for shipping are sized according to the ISO (International Organization for Standardization) standard in order to achieve efficient cargo handling at ports around the world. Although 20 feet, 40 feet, and 45 feet are used, in Japan, a 45 foot container is too large to be loaded on a trailer, so a 40 foot container is generally used.
The 40-foot container is length (12.2 m) × width 8 feet (2.438 m). The outer dimension in the width direction is 2.438 mm, while the inner dimension in the width direction is about 2.346-2. 352.
The board size is 2200 * 1900mm for the G7 size and 2500 * 2200mm for the G8 size, and the pallet size of these packages is estimated to be over 2100mm in the width direction and over 2400mm. This makes it difficult to store. The present invention is also intended to solve the problem of such handling.

The substrate holding frame and the method for transporting the substrate holding frame of the present invention solve the above-described problems by means described in the following embodiments.
A first aspect of the present invention is a substrate holding frame that holds a substrate made of a rectangular and rigid plate on a frame,
A flat metal frame member having a rectangular cross section, a metal frame portion having a rectangular shape in plan view in which the metal frame members are connected by connecting portions at four corners, and extending inside the four sides of the metal frame portion. A substrate holding frame having a structure having at least a substrate support plate for supporting the substrate,
The connecting portion includes a nonmagnetic material of a non-adsorbing portion and an attracting portion made of a magnetic material inside the nonmagnetic material, and an upper surface of the connecting portion on the side on which the substrate is placed is formed of the nonmagnetic material. The substrate holding frame is characterized in that it is formed inside as one flat surface of the attracting portion, and the lower surface of the connecting portion on the side where the substrate is not placed is formed of only a non-magnetic material.

According to a second aspect of the present invention, there is provided the substrate holding frame according to claim 1, wherein at least one pair of the metal frame members facing each other includes an adsorption unit, and the adsorption unit has a non-adsorption portion. A magnetic body and a metal frame adsorption portion made of a magnetic material inside the non-magnetic material,
The upper surface of the suction unit on the side on which the substrate is placed is formed as one flat surface of the suction portion for the metal frame inside the nonmagnetic material, and the lower surface on the side of the suction unit on which the substrate is not placed is a nonmagnetic material. The adsorption unit is further provided so that the upper surface of the adsorption unit and the surface of the metal frame material on which the substrate is placed are smoothed. It is.

  The third aspect of the present invention is the substrate holding frame according to claim 1 or 2, wherein the attracting portion and the metal frame attracting portion are made of a soft magnetic material.

  A fourth aspect of the present invention is characterized in that the suction portion and the metal frame suction portion are suspended and transported by being attracted by an electromagnet provided at a tip of a cylinder attached to a robot hand of a frame body transport device. The method for transporting a substrate holding frame according to any one of claims 1 to 3.

  Conventionally, the handle that is gripped by the robot hand of the frame transport device extends outward from the metal frame, so deformation may occur due to contact during transport, which causes grip failures due to the robot hand. There was something to do. However, as in the present application, it is not necessary to provide a handle portion that extends outward from the metal frame by providing the suction portion on the corner piece that connects the four corners of the metal frame portion. The number of cases in which the substrate holding frame is deformed is reduced, and the occurrence of poor gripping of the frame by the robot hand can be prevented. In addition, the connecting portion has a configuration in which a non-magnetic body and an upper surface in which an attracting portion made of a magnetic body is formed inside the non-magnetic body and a lower surface formed only of the non-magnetic body are stacked with a substrate holding frame. In this case, the non-magnetic material overlaps the upper and lower sides of the attracting portion made of a magnetic material, so that it is possible to prevent at least two frames from being attracted when attracted by a magnet or the like.

It is a top view which shows the frame for board | substrate holding | maintenance. (A) It is sectional drawing of the broken-line part aa 'part of a board | substrate holding frame. (B) It is sectional drawing of the broken-line part aa 'part in the state which accumulated the frame for board | substrate holding | maintenance. (C) It is a modification of the adsorption part of a corner piece. (A) It is sectional drawing of the broken-line part b-b 'part of the frame for board | substrate holding | maintenance. (B) It is sectional drawing of the broken-line part b-b 'part in the state which accumulated the frame for board | substrate holding | maintenance. It is a figure of a frame conveyance device. It is a figure of the one side part of the suspension apparatus of a frame conveyance apparatus. It is a figure which shows the operation | movement which a frame conveyance apparatus suspends the board | substrate holding frame. It is a figure which shows the general form of the conventional board | substrate holding frame. It is a figure which shows the packing state of the conventional board | substrate holding frame. It is a figure which shows the conveyance form of the conventional frame for board | substrate holding | maintenance.

Hereinafter, the substrate holding frame 10 will be described with reference to the drawings.
First, as shown in FIG. 1, the connecting portion 16 is for connecting the metal frame members 111 a, 11 b, 11 c, and 11 d to form the metal frame portion 11. A description will be given by replacing 16 with a corner piece 16.
FIG. 1 is a plan view showing a substrate holding frame 10. A substrate in which metal frame members 11 having a rectangular cross section are connected to each other by corner pieces 16 and assembled into a rectangular shape in plan view, and the metal frame portions 11 are extended inside the metal frame portions 11. And a support plate 13.
There are two basic forms of the substrate holding frame 10, the first form and the second form.
The first form of the substrate holding frame 10 is such that the metal frames 11a, 11b, 11c, and 11d on the four sides of the front, rear, left, and right are flat, and the second form of the substrate holding frame 10 is opposed. The pair of metal frame members 11a and 11b are flat, but the other pair of metal frame members 11c and 11d facing each other have a shape in which the center part is curved downward.
The shape up to here is the same as the conventional substrate holding frame described with reference to FIG.

The feature of the substrate holding frame 10 is that the height of the one-stage frame is 10 to 20 mm, preferably 10 to 15 mm, and the metal frame members 11a and 11b. The corner piece 16 that connects 11c and 11d is formed of a non-magnetic material, and an upper surface of the corner piece 16 is provided with an attracting portion 17 made of a magnetic material inside the non-magnetic material to suspend the substrate holding frame 10. ing. Accordingly, since the substrate holding frame 10 can be sucked and held, there is a feature that the handle 15 shown in FIG. 7 is eliminated. FIG. 1 also shows a state in which a suction unit 18 having a metal frame suction portion 19 is attached to the metal frame members 11a and 11b. The adsorption unit 18 is formed of a non-magnetic material, and an adsorption unit 18 made of a magnetic material is provided on the upper surface of the adsorption unit 18 to suspend the substrate holding frame 10 inside the non-magnetic material. Depending on the size and weight of the thin substrate, in addition to being adsorbed only by the adsorbing portion 17 on the upper surface of the corner piece 16, the adsorbing unit 18 mounted on the metal frame members 11a and 11b is used in combination. There is also a configuration in which 10 is adsorbed and suspended.
The reason why the substrate holding frame 10 is formed at a low height is to increase the substrate loading density of the multi-stage stack of frames, and the suction portion 17 is provided by eliminating the handle 15. This is to reduce the volume of the multi-stage stack of bodies and to enable transport of the substrate holding frame 10 that does not include the handle 15.
Further, the corner piece 16 and the suction unit 18 that can be easily detached are provided with the suction portion 17 and the metal frame suction portion 19, respectively, so that the substrate holding frame body 10 can be used continuously. Even if possible fouling or breakage occurs, it can be easily replaced.

FIG. 2A is a cross-sectional view of broken line portions a to a ′ of the substrate holding frame 10 of FIG. 1, and is a cross-sectional view of one side of the metal frame portion 11 having the adsorbing portion 17 embedded in the corner piece 16. . FIG. 2B is a cross-sectional view of broken line portions a to a ′ in a state where the substrate holding frame 10 is overlapped.
FIG. 3 a is a cross-sectional view of broken line parts b to b ′ of the substrate holding frame 10 of FIG. 1, and a cross section on one side of the metal frame part 11 having the metal frame suction part 19 embedded in the suction unit 18. FIG. FIG. 3B is a cross-sectional view of broken line portions b to b ′ in a state where the substrate holding frame 10 is overlapped.

The corner piece 16 has a structure in which a nonmagnetic material and an attracting portion 17 made of a magnetic material are provided inside the nonmagnetic material, and the upper surface 20 of the corner piece 16 forms the attracting portion 17 inside the nonmagnetic material, and a lower surface 21. Is formed only with a non-magnetic material, and the upper surface 20 and the lower surface 21 of the corner piece 16 are formed so as to be smooth on the upper surface 23 and the lower surface 24 of the metal frame member 11, respectively.
In the state where the substrate holding frame 10 is overlapped, the attracting portion 17 does not directly contact the attracting portions 17 on the upper and lower sides as shown in FIG. 2B, and has a structure with a non-magnetic material interposed therebetween. Accordingly, when the substrate holding frame 10 is attracted by bringing a magnet or the like into contact with the attracting portion 17, there is an effect of preventing the adsorption of two or more substrate holding frames 10.

The adsorption unit 18 has a structure in which a non-magnetic material and a metal frame adsorption portion 19 made of a magnetic material are provided inside the non-magnetic material, and an upper surface 25 of the adsorption unit 18 has a metal frame adsorption portion inside the non-magnetic material. 19, the lower surface 26 is formed only of a non-magnetic material, and the upper surface 25 of the adsorption unit is formed so as to be smooth with the upper surface 23 of the metal frame member 11. As shown in FIG. 3b, the upper and lower metal frame adsorbing portions 19 are not in direct contact with each other when the substrate holding frame 10 is overlapped, and the metal frame adsorbing portions 19 do not interpose a nonmagnetic material therebetween. It becomes a structure. Accordingly, when the substrate holding frame 10 is attracted by bringing a magnet or the like into contact with the metal frame attracting portion 19, there is an effect of preventing the adsorption of two or more substrate retaining frames 10.
Further, as a modification of the suction part 17 of the corner piece 16, as shown in FIG. 2c, a suction part having a concave shape in cross-section is provided on the upper surface of the corner piece 16 with both concave ends as suction surfaces. By abutting the magnets at both ends, a closed loop magnetic circuit can be configured by the magnet and the attracting portion 18, thereby reducing the leakage magnetic flux and preventing the two or more substrate holding frames 10 from being attracted. Although not shown in the drawings, the suction part 19 for the metal frame of the suction unit 18 can also employ the suction part having the concave shape in cross section described above.

Next, the frame body conveyance device 50 that conveys the substrate holding frame body 10 will be described.
First, the configuration of the frame body transfer device 50 that sucks and suspends the substrate holding frame body 10 will be described with reference to FIG.
The frame transport device 50 includes a robot hand 55 and a robot 70 that controls the operation of the robot hand 55. The robot hand 55 has at least a rotating arm 71 that rotates horizontally, an upper and lower arm 72 that moves up and down and back and forth, and a suspension device 56 that sucks and holds the substrate holding frame 10 to perform a hanging operation. Configured.

Next, the configuration of the suspension device 56 will be described with reference to FIG.
The suspension device 56 includes at least a frame 57 that holds the substrate holding frame 10 by suction and a frame 54 that holds the frame 57.
The casing 57 includes a cylinder driving device 58 and a cylinder 59 having an electromagnet 60 attached to the tip thereof. A wiring for passing a current for making the electromagnet 60 magnetized or non-magnetized passes through the cylinder 59. It is connected to the. The cylinder driving device 58 is a device that drives the cylinder 59 up and down.

  Next, the operation of carrying the substrate holding frame 10 by the frame carrying device 50 of the present invention will be described with reference to FIG. A power switch 65 for magnetizing and demagnetizing the electromagnet 60 is provided.

FIG. 6A is a diagram in which the suspension device 56 at the tip of the robot hand 55 is positioned above the loaded substrate holding frame 10. The electromagnet 60 at the front end of the casing 57 has not yet contacted the metal adsorption portion 17 of the substrate holding frame 10, and the power switch 65 is in an OFF state.
FIG. 6B is a diagram in which the cylinder 59 is lowered and the electromagnet 60 at the tip is lowered to the metal attracting portion 17. The power switch 65 is still OFF.
FIG. 6C is a diagram in which the cylinder 59 is lowered and the electromagnets 60 at the tips are respectively in contact with the metal attracting portions 17. In this state, the power switch is turned on.
FIG. 6D is a diagram showing a state in which the cylinder 59 is lifted and the robot hand 55 is pulled upwards with the power switch ON.

Selection of an electromagnet used for adsorbing the substrate holding frame 10 on which a G6 size glass substrate is placed will be described using Equation 1 and Table 1.
Formula 1 is a formula showing the relationship between the surface magnetic flux density of the electromagnet, the suction area, and the suction force when the article is suspended.

なお、数式１中の、Ｗは、吸着力〔Ｎ〕、μ０は、真空中の透磁率〔Ｈ/ｍ〕、Ｂｇは、表面磁束密度（Ｔ）、Ｓは吸着面積（ｍ２）、ｆは、安全率（水平吊り）を意味する。
本発明の基板保持用枠体は、電磁石で水平に吊り上げるものであり、数式１で用いられる安全率は４として、電磁石の表面磁束密度と吸着面積の関係から吸着力を求める。

In Equation 1, W is an adsorption force [N], μ0 is a magnetic permeability [H / m] in vacuum, Bg is a surface magnetic flux density (T), S is an adsorption area (m2), and f is , Meaning safety factor (horizontal hanging).
The substrate holding frame of the present invention is suspended horizontally by an electromagnet. The safety factor used in Equation 1 is 4, and the adsorption force is obtained from the relationship between the surface magnetic flux density of the electromagnet and the adsorption area.

  The weight of a G6 size glass substrate (1850 × 1500 mm 0.7 mm thick) is about 5.0 kg. In the substrate holding frame 10 shown in FIG. 1, the substrate holding frame that holds the G6 generation glass substrate has a metal frame member with a hollow cross section and a height of 10 mm in the stacking direction. The weight of the aluminum substrate holding frame having a thickness of 2 mm was 5.5 kg, and the total weight in the state where the G6 size glass substrate was held was 10.5 kg.

  Table 1 shows the relationship between the surface magnetic flux density of the electromagnet and the attracting area, the attracting force per electromagnet, and the attracting area of the electromagnet from the radius of 5 mm to 25 mm for the G6 size glass substrate and the substrate holding frame. The results of calculating the attractive force [N] when the surface magnetic flux density is 100 to 700 gauss in the range of are listed. 1T (Tesla) = 10000G (Gauss)

  Since the weight of the substrate holding frame on which the G6 size glass substrate is placed is 10.5 kg, an adsorption force of 102.9 N or more is required. A substrate holding frame 10 according to the present invention is a substrate holding frame that holds a glass substrate by the adsorption of an adsorption portion 18 and an electromagnet 60 on the upper surface of a corner piece 16 formed of resin at four corners of a metal frame 11. 10 is suspended and conveyed. Therefore, four places can be adsorbed, and an adsorbing force of about 26 N or more per place is required. In addition, suction at two locations of the corner piece 16 on the diagonal and further suction at three locations are possible, but in order to balance the single substrate holding frame 10, the suction at the four locations is stable. is there.

  Since the electromagnet 60 is attracted to the attracting portion 17 on the upper surface of the corner piece 16, the attracting area is limited by the area of the corner piece 16. The corner piece 16 is for connecting metal frame members for forming the metal frame portion 11. In the G6 size substrate holding frame, the width of the metal frame member is about 30 mm to 50 mm. Therefore, when an electromagnet having a circular attracting surface is used, the radius of the attracting surface needs to be 25 mm or less.

Based on the above restrictions, the electromagnets necessary for adsorbing the substrate holding frame holding the G6 size glass substrate will be described along a list.
The attracting surface can be attracted by an electromagnet having a radius of 25 mm and a surface magnetic flux density of 300 G. However, the suction surface with a radius of 25 mm cannot surround the suction portion 17 on the upper surface of the corner piece 16 with resin, so an electromagnet with a suction surface of radius 15 mm, a suction area of 707 mm 2 and a surface magnetic flux density of 500 G is suitable. is there.
In the form in which the adsorption unit 18 is provided on the metal frame member, the number of electromagnets can be adjusted, and an electromagnet along the shape of the metal frame member can be used.

(Embodiment related to material)
The magnetic material used for the attracting part 17 and the metal frame attracting part 19 is preferably a soft magnetic material that allows magnetic flux to pass but does not generate magnetic force (holding force) when no magnetic flux is supplied. For example, a high permeability material such as pure iron, silicon copper, ferrite, sendust, permalloy, etc., which allows easy flow of magnetic flux, is preferable.

  As the nonmagnetic material used for the corner piece 16 and the adsorption unit 18, a resin that is tough and excellent in impact resistance is suitable. Further, the nonmagnetic material used for the corner piece 16 and the suction unit 18 may be a nonmagnetic metal.

  As a material used for the metal frame member 11, a metal material that is lightweight and does not cause corrosion can be used. Specifically, pure aluminum, duralumin (aluminum, copper (3.5 to 5.5%), magnesium alloys, aluminum-manganese alloys, etc. can be used. These materials are hollow extruded and framed. Manufacture shapes.

  An embodiment of a frame for holding a substrate used for storage and transportation by stacking a large glass substrate of G6 size (1850 * 1500 mm 0.7 mt) with high density in the above-described contents will be described.

  A metal frame material having a rectangular hollow cross-section, a metal frame member 11 assembled in a rectangular shape in plan view, a pair of metal frame members having a central portion curved downward, and the metal frame member A substrate support plate 13 extending inward along the frame, a pair of flat metal frame members, and a substrate support plate 13 extending inward along the metal frame members. The frame 10 was manufactured by hollow extrusion of an aluminum material having a thickness of 2 mm. The metal frame portion 11 was manufactured by connecting metal frame members with corner pieces 16 having four corners formed of polyamide resin. The corner piece 16 was manufactured by embedding the adsorbing portion 17 with a general structural rolled steel SS400 having a thickness of 5 mm and a diameter of 25 mm so as to be smooth with the upper surface of the corner piece 16 and embedding it in the corner piece 16.

The substrate holding frame 10 holding a G6 size glass substrate had a glass substrate weight of 5 kg, an aluminum substrate holding frame 10 of 5.5 kg, and a total weight of 10.5 kg.
The electromagnet 60 at the tip of the housing 57 of the frame transport apparatus 50 is a portion that is attracted to the attracting portion 17, and is attracted to one corner piece 16 as described above in order to be attracted by the four corner pieces 16. Since the adsorption force of the electromagnet 60 is required to be 26 N or more, the electromagnet 60 is manufactured by Fujita Co., Ltd., round electromagnet type FSGP-20 (maximum adsorption force 28N, diameter 20 mm, height 40 mm, weight 0.06 kg). Adopted.

DESCRIPTION OF SYMBOLS 10 Board | substrate holding | maintenance frame 11 Metal frame part 11a, 11b Left and right metal frame material 11c, 11d Front and rear metal frame material 13 Substrate support plate 15 Handle part 16 Connection part (corner piece)
17 Adsorbing unit 18 Adsorbing unit 19 Metal frame adsorbing unit 30 Inner pallet 31 Upper lid 32 Bundling belt 40 Anti-vibration pallet 50 Substrate holding frame conveying device 54 Frame 55 Robot hand 56 Suspension device 57 Body 58 Cylinder driving device 59 Cylinder 60 Electromagnet 61 Suspension cylinder 62 Hook part 70 Robot 71 Rotating arm 72 Upper and lower arms 100 Multi-stage stack of substrate holding frames K Space area of substrate holding frame

Claims (4)

A substrate holding frame that holds a substrate made of a rectangular plate having a rigid plate shape on a frame,
A flat metal frame member having a rectangular cross section, a metal frame portion having a rectangular shape in plan view in which the metal frame members are connected by connecting portions at four corners, and extending inside the four sides of the metal frame portion. A substrate holding frame having a structure having at least a substrate support plate for supporting the substrate,
The connecting portion includes a nonmagnetic material of a non-adsorbing portion and an attracting portion made of a magnetic material inside the nonmagnetic material, and an upper surface of the connecting portion on the side on which the substrate is placed is formed of the nonmagnetic material. A substrate holding frame, wherein the lower surface on the side where the substrate is not placed is formed only of a non-magnetic material. 2. The substrate holding frame according to claim 1, wherein at least one pair of the metal frame members facing each other includes an adsorption unit, and the adsorption unit includes a non-magnetic body of a non-adsorption portion and an inner side of the non-magnetic body. And a metal frame adsorption part made of a magnetic material,
The upper surface of the suction unit on the side on which the substrate is placed is formed as one flat surface of the suction portion for the metal frame inside the nonmagnetic material, and the lower surface on the side of the suction unit on which the substrate is not placed is a nonmagnetic material. The adsorption unit is further provided so that the upper surface of the adsorption unit and the surface of the metal frame material on which the substrate is placed are smoothed. .   The substrate holding frame according to claim 1, wherein the attraction portion and the attraction portion for the metal frame are made of a soft magnetic material. The suction part and the suction part for the metal frame are attracted by an electromagnet provided at a tip of a cylinder attached to a robot hand of the frame body transporting device, and suspended and transported. The substrate holding frame described in any one of the above.

Images