JP2014064078A5 - - Google Patents

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Publication number
JP2014064078A5
JP2014064078A5 JP2012206655A JP2012206655A JP2014064078A5 JP 2014064078 A5 JP2014064078 A5 JP 2014064078A5 JP 2012206655 A JP2012206655 A JP 2012206655A JP 2012206655 A JP2012206655 A JP 2012206655A JP 2014064078 A5 JP2014064078 A5 JP 2014064078A5
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JP
Japan
Prior art keywords
base
vibrating arm
insulating layer
element according
resonator element
Prior art date
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Application number
JP2012206655A
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English (en)
Japanese (ja)
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JP2014064078A (ja
JP6044222B2 (ja
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Priority to JP2012206655A priority Critical patent/JP6044222B2/ja
Priority claimed from JP2012206655A external-priority patent/JP6044222B2/ja
Publication of JP2014064078A publication Critical patent/JP2014064078A/ja
Publication of JP2014064078A5 publication Critical patent/JP2014064078A5/ja
Application granted granted Critical
Publication of JP6044222B2 publication Critical patent/JP6044222B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012206655A 2012-09-20 2012-09-20 振動片、振動子、電子デバイス、電子機器、および移動体 Expired - Fee Related JP6044222B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012206655A JP6044222B2 (ja) 2012-09-20 2012-09-20 振動片、振動子、電子デバイス、電子機器、および移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012206655A JP6044222B2 (ja) 2012-09-20 2012-09-20 振動片、振動子、電子デバイス、電子機器、および移動体

Publications (3)

Publication Number Publication Date
JP2014064078A JP2014064078A (ja) 2014-04-10
JP2014064078A5 true JP2014064078A5 (enExample) 2015-09-17
JP6044222B2 JP6044222B2 (ja) 2016-12-14

Family

ID=50618959

Family Applications (1)

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JP2012206655A Expired - Fee Related JP6044222B2 (ja) 2012-09-20 2012-09-20 振動片、振動子、電子デバイス、電子機器、および移動体

Country Status (1)

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JP (1) JP6044222B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102435364B1 (ko) * 2017-11-13 2022-08-22 엘지디스플레이 주식회사 전자 기기
JP2021005783A (ja) 2019-06-26 2021-01-14 セイコーエプソン株式会社 振動片、電子機器、および移動体
CN114553171B (zh) * 2022-01-25 2024-11-01 北京中科飞鸿科技股份有限公司 一种声表面波器件电极结构及其制作方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5067033B2 (ja) * 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器
JP2010081156A (ja) * 2008-09-25 2010-04-08 Seiko Epson Corp 圧電薄膜振動片、圧電薄膜振動片の製造方法、圧電薄膜振動子及び発振回路
JP2011142374A (ja) * 2010-01-05 2011-07-21 Seiko Epson Corp 圧電デバイス、圧電デバイスの製造方法
JP2011147053A (ja) * 2010-01-18 2011-07-28 Seiko Epson Corp 圧電振動片、圧電発振器
JP5533349B2 (ja) * 2010-06-30 2014-06-25 セイコーエプソン株式会社 屈曲振動片、屈曲振動子、発振器、および電子機器
JP5581931B2 (ja) * 2010-09-17 2014-09-03 セイコーエプソン株式会社 振動片、振動片の製造方法、振動子、振動デバイスおよび電子機器

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