JP2014040633A - Pattern formation apparatus and pattern formation method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable the reduction of the number of steps in a case where films of different types are formed respectively within multiple regions on the surface F of a workpiece W and where a specified film pattern is obtained from these films.SOLUTION: The provided pattern formation apparatus includes multiple tanks 11 through 19 and a power supply device 10. The tanks 11 through 19 possess aperture edges having shapes identical respectively to contour shapes of multiple regions in which films of mutually different types are scheduled to be formed, and electrodeposition liquids for forming films of different types are stocked respectively therein in a state where the aperture edges thereof are being contacted with the surface F of a workpiece W. The power supply device 10 impresses a specified voltage between the workpiece W serving as a first electrode and each of second electrodes positioned respectively within the multiple tanks 11 through 19.

Description

  The present invention relates to a pattern forming apparatus and a pattern forming method for forming different types of coatings on a plurality of regions on the surface of a workpiece by electrodeposition and obtaining a predetermined coating pattern on the surface of the workpiece by these coatings.

  For example, in order to reduce the frictional resistance of the surface of a metal workpiece, a film made of a resin may be formed on the surface, and electrodeposition is known as a means for forming such a film. That is, as shown in FIG. 7, a work 92 and a counter electrode 93 are arranged in a water tank 91 in which an electrodeposition liquid (electrolyte) 90 containing a resin component is stored, and a DC voltage is applied to them. The resin component contained in the electrodeposition liquid 90 can be adhered to the surface of the workpiece 92 to form a resin film. An apparatus for forming a film on the surface of a workpiece by electrodeposition is disclosed in Patent Document 1, for example.

  In addition, as shown in FIG. 8, when different types of coatings are formed by electrodeposition on a plurality of regions on the surface of the workpiece 95 and a predetermined coating pattern is formed by these coatings, a mask is conventionally used as described below. Is used. In FIG. 8, the surface of the plate-like workpiece 95 is divided into nine areas A1 to A9, a first film is formed in the areas A2, A4, A6, and A8, and the areas A1 and A9 are A second film having a different type from the first film is formed, a first film and a third film having a different type from the second film are formed in the regions A3 and A7, and the first, A fourth film different in type from the second and third films is formed.

When forming such a film pattern, first, a workpiece and a counter electrode are placed in a water tank in which an electrodeposition liquid for forming the first film is stored. Note that the surface of this work is covered with a lattice-like mask M1 as shown in FIG. And a 1st membrane | film | coat is formed in area | region A2, A4, A6, A8 which is not covered with the mask M1 by applying a DC voltage to a workpiece | work and a counter electrode (refer FIG.9 (B)).
Next, the work and the counter electrode on which the first film is formed are placed in a water tank in which the electrodeposition liquid for forming the second film is stored. The mask that covers the surface of the workpiece is replaced with another mask M2 as shown in FIG. 9C. As a result, a second film is formed in the regions A1 and A9 that are not covered with the mask M2 (see FIG. 9D).

Hereinafter, similarly, the work replaced with the mask M3 (see FIG. 9E) is placed in the water tank in which the electrodeposition liquid for forming the third film is stored, and the third work is placed in the regions A3 and A7. (FIG. 9F).
Further, a work covered with a mask M4 (see FIG. 9G) is placed in a water tank in which an electrodeposition liquid for forming the fourth film is stored, and the fourth film is formed in the region A5. (FIG. 9 (H)).

JP 2000-256895 A (see FIG. 1)

  As described above, different types of coatings are formed by electrodeposition on the plurality of regions A1 to A9 on the surface of the workpiece, and in order to obtain a predetermined coating pattern by these coatings, the types of electrodeposition liquids are different in water tanks. Therefore, it is necessary to repeat the electrodeposition process by arranging the workpiece repeatedly. Further, it is necessary to replace the mask placed on the work for each processing, and the conventional method has a problem that a lot of man-hours are generated and a product cost is increased.

  Therefore, the present invention provides a pattern forming apparatus and a man-hour that can reduce man-hours when different types of films are formed by electrodeposition on a plurality of regions on the surface of a workpiece and a predetermined film pattern is obtained by these films. An object of the present invention is to provide a pattern forming method capable of reducing the above.

  The present invention is a pattern forming apparatus that forms different types of coatings on a plurality of regions on the surface of a workpiece by electrodeposition, and obtains a predetermined coating pattern with these coatings, each of the plurality of regions where different types of coatings are formed. A plurality of tanks each storing an electrodeposition solution for forming a different type of film in a state where the opening end has the same shape as the contour shape of And a power supply device for applying a predetermined voltage between the work as an electrode and each of the second electrodes in the plurality of tanks.

  According to the present invention, a plurality of tanks having open ends having the same shape as the contour shape of each of the plurality of regions are formed on a plurality of regions where different types of coatings are formed on the surface of the workpiece. By contacting each of these tanks, an electrodeposition liquid for forming a different type of film is stored, and by applying a voltage between the work serving as the first electrode and the second electrodes in the plurality of tanks, Different types of films are formed in the plurality of regions on the surface of the workpiece. In other words, since different types of coatings are formed on the surface of the workpiece, a conventional mask is not necessary, so that it is not necessary to replace the mask, and man-hours can be reduced.

Moreover, it is preferable that the said power supply device applies a voltage simultaneously between said 1st electrode and each said 2nd electrode in these tanks.
In this case, it is possible to perform electrodeposition simultaneously on a plurality of regions where different types of films are formed, and simultaneously form different types of films.

Further, the pattern forming apparatus prevents the electrodeposition liquid in the tank from leaking from between the surface of the workpiece and the opening end in a state where the opening end of the tank is in contact with the surface of the workpiece. It is preferable to further include a seal portion.
According to this configuration, even when a plurality of regions formed on the surface of the workpiece are adjacent to each other and a plurality of tanks are adjacently disposed, the electrodeposition liquid leaks and the inside of the adjacent tank Can be prevented from mixing with the electrodeposition solution.

Moreover, it is preferable that at least some of the inner wall surfaces of the plurality of tanks serve as the second electrode.
In this case, at least a part of the inner wall surface of the tank can be used as the counter electrode of the first electrode (workpiece).

  Further, the present invention is a pattern forming method in which different types of coatings are formed by electrodeposition in a plurality of regions on the surface of the workpiece, and a predetermined coating pattern is obtained by these coatings, and the types of the surfaces of the workpiece are different. A plurality of tanks having open ends having the same shape as the contour shapes of the plurality of areas are brought into contact with the plurality of areas where the films are formed, and different types of films are formed in the respective tanks. The electrodeposition liquid for storing is stored, and a voltage is applied between the workpiece to be the first electrode and each of the second electrodes in the plurality of tanks.

  According to the present invention, since different types of coatings are formed on a plurality of regions on the surface of the workpiece, a conventional mask is not required, so that replacement is not necessary, and man-hours can be reduced. .

  According to the present invention, since different types of coatings are formed by electrodeposition in a plurality of regions on the surface of the workpiece, and a predetermined coating pattern is obtained by these coatings, a conventional mask is not necessary. No replacement is required, and man-hours can be reduced.

It is a perspective view which shows schematic structure of the pattern formation apparatus of this invention. It is a figure of the state which isolate | separated the tank and the workpiece | work. It is explanatory drawing which turned the tank upside down and showed the contact part up. It is explanatory drawing seen from the front which shows a tank as a cross section. It is explanatory drawing of the surface of the workpiece | work from which the predetermined film pattern was obtained with the pattern formation apparatus. It is a perspective view which shows schematic structure of the pattern formation apparatus by other embodiment. It is explanatory drawing explaining the conventional apparatus. It is explanatory drawing of the surface of a workpiece | work. It is explanatory drawing explaining the conventional pattern formation method.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view showing a schematic configuration of a pattern forming apparatus of the present invention. This pattern forming apparatus is an apparatus for forming different types of films on a plurality of regions of the surface F of the workpiece W by electrodeposition and obtaining a predetermined film pattern using these films. The reason for forming the film on the surface of the workpiece W in this way is, for example, to improve the wear resistance on the surface or to reduce the frictional resistance, and to form a film pattern having a plurality of types of films. This is because the characteristics are changed for each region of the surface F.

FIG. 5 is an explanatory diagram of the surface F of the workpiece W on which a predetermined film pattern is obtained by the pattern forming apparatus of the present embodiment. In the present embodiment, the workpiece W is made of a metal plate, and the surface F is partitioned in a lattice shape and has nine regions A1 to A9. In addition, although this workpiece | work W demonstrates later, it becomes an electrode (1st electrode).
Then, four types of films are formed on the surface F by electrodeposition, and a film pattern with these four types of films is obtained. Specifically, the first film S1 is formed in the regions A2, A4, A6, A8, the second film S2 of a different type from the first film S1 is formed in the regions A1, A9, and the region A3. , A7 is formed with a third coating S3 of a different type from the first coating S1 and the second coating S2, and the first, second and third coatings S1, S2, S3 and the type are formed in the region A5. A different fourth coating S4 is formed.

In FIG. 1, the pattern forming apparatus includes a plurality of tanks 11 to 19. FIG. 2 is a view showing a state in which the tanks 11 to 19 and the workpiece W are separated. 1 and 2, the pattern forming apparatus includes the same number of tanks as the regions A1 to A9 on which the film is formed on the surface F of the workpiece W, that is, nine tanks 11 to 19.
This pattern forming apparatus is used in a state in which the workpiece W is set so that the surface F faces upward and the tanks 11 to 19 are placed on the surface F. That is, each of the tanks 11 to 19 has a configuration that opens to the surface F side (that is, the lower end side), and is used with the lower end portion of each tank in contact with the surface F of the workpiece W.
The inner peripheral surface of each tank has a vertically long cylindrical shape, and the lower end portions of these tanks 11 to 19 serve as contact portions 9 with respect to the surface F. The lower end portions (open ends) of the tanks 11 to 19 are in contact with the outer peripheral edges of the regions A1 to A9.

FIG. 3 is an explanatory view showing the tanks 11 to 19 upside down and the contact portion 9 facing up. The shapes of the open ends 21 to 29 of the tanks 11 to 19 are the same as the contour shapes of the regions A1 to A9. In the present embodiment, each of the regions A1 to A9 has a rectangular outline shape, and all the regions A1 to A9 have the same shape. Accordingly, the shapes of the open ends 21 to 29 are all the same rectangle. These open ends 21 to 29 serve as contact portions 9 that contact the surface F of the workpiece W. Moreover, each of the tanks 11 to 19 has the same cross-sectional shape along the longitudinal direction (vertical direction).
And in this embodiment, these tanks 11-19 are comprised as an integral thing. That is, for example, the inner wall surface 11a of the tank 11 and the inner wall surface 12a of the adjacent tank 12 are formed from both side surfaces of one common side wall.

  And these tanks 11-19 can each store the electrodeposition liquid (electrolytic solution) for forming a different kind of membrane | film | coat in the state which contacted the surface F with the open ends 21-29. FIG. 4 is an explanatory view seen from the front showing the tanks 17, 18, and 19 as a cross section. According to FIG. 4, different types of electrodeposition liquids L3, L1, and L2 are stored in the tanks 17, 18, and 19, respectively. The internal spaces of the tanks 11 to 19 are configured independently of the internal spaces of the other tanks, and the electrodeposition liquids do not mix with each other.

  In FIG. 1, in the present embodiment, the same electrodeposition liquid L1 for forming the first film S1 is stored in the tanks 12, 14, 16, and 18, and the second film is stored in the tanks 11 and 19, respectively. The same electrodeposition liquid L2 for forming S2 is stored, the same electrodeposition liquid L3 for forming the third film S3 is stored in the tanks 13 and 17, and the fourth film is stored in the tank 15. The electrodeposition liquid L4 for forming S4 is stored. Each of these electrodeposition liquids L1 to L4 contains a resin component, and the resin components are different from each other. For this reason, in this embodiment, different types of resin films S1 to S4 are formed on the surface F.

  Although not shown, each of the tanks 11 to 19 is connected to a server tank through a pipe, and the electrodeposition liquid stored in the server tank is supplied to each of the tanks 11 to 19 through the pipe. It may be.

  In addition, the pattern forming apparatus includes a seal portion 8 that prevents leakage of the electrodeposition liquid (see FIGS. 3 and 4). The seal portion 8 is provided at the open ends 21 to 29 of the tanks 11 to 19 that are brought into contact with the surface F of the workpiece W. That is, the seal part 8 is provided in the contact part 9 of the tanks 11 to 19. The seal portion 8 is made of, for example, a resin such as rubber or silicon, and is configured by bonding a resin to the open ends 21 to 29. According to the seal portion 8, the electrodeposition liquids L 1 to L 4 in the tanks 11 to 19 are opened to the surface F in a state where the opening ends 21 to 29 of the tanks 11 to 19 are in contact with the surface F of the work W. Leakage from between the ends 21 to 29 can be prevented.

  In particular, in the present embodiment, the plurality of regions A1 to A9 formed by being partitioned on the surface F of the workpiece W include adjacent regions (for example, A7 and A8). 4 are disposed adjacent to each other (in FIG. 4, tank 17 and tank 18), but even in this case, electrodeposition liquid L1 (L3) leaks and the electrodeposition liquid in the adjacent tanks. Mixing with L3 (L1) can be prevented.

Moreover, in the tanks 11-19, the 2nd electrodes 31-39 are provided as a counter electrode of a 1st electrode (work W) (refer FIG. 4). In this embodiment, the electrodes 31-39 are provided in the inner wall surface of each of the tanks 11-19. That is, part of the inner wall surface of each of the tanks 11 to 19 is the second electrodes 31 to 39.
As described above, since the seal portion 8 is provided in the contact portion 9 of the tanks 11 to 19, the seal portion 8 is made of a non-conductive material, and the tanks 11 to 19 and the workpiece W All of the inner wall surfaces of the tanks 11 to 19 may serve as the second electrode by functioning as a member that electrically insulates the tank. That is, the tanks 11 to 19 may be made of a conductive material.

  The pattern forming apparatus further includes a power supply device 10 (see FIG. 1). The power supply device 10 applies a required DC voltage between the work W to be the first electrode and the second electrodes 31 to 39 in the tanks 11 to 19. Thereby, a different type of coating from the adjacent region is formed in each of the regions A1 to A9 of the surface F of the workpiece W, and a lattice-like coating pattern as shown in FIG. 5 is obtained. In particular, in this embodiment, the power supply device 10 applies a voltage simultaneously between the first electrode (work W) and each of the second electrodes 31 to 39 in the tanks 11 to 19 and simultaneously performs electrodeposition treatment. Do.

A pattern forming method will be described in which different types of films are formed by electrodeposition in the regions A1 to A9 of the surface F of the workpiece W by the pattern forming apparatus having the above-described configuration, and a predetermined film pattern is obtained by these films.
As shown in FIG.1 and FIG.2, with respect to the area | region A1-A9 in which the film | membrane from which a kind differs is formed among the surfaces F of the workpiece | work W, the opening which is the same shape as each outline shape of these area | region A1-A9. The tanks 11 to 19 having the ends 21 to 29 (see FIG. 3) are brought into contact with each other.

  Electrodeposition liquids L1 to L4 for forming different types of coatings S1 to S4 are stored in the tanks 11 to 19, respectively, and the work W serving as the first electrode and the second electrode 31 in the tanks 11 to 14 are stored. A DC voltage is applied by the power supply device 10 between each of .about.39.

  By applying a voltage in this way, different types of coatings S1 to S4 are formed in the regions A1 to A9 of the surface F of the workpiece W, and the coating pattern shown in FIG. 5 is obtained. Therefore, in order to form the different types of coatings S1 to S4 on the surface F of the workpiece W, a conventional mask is not required, so that the replacement thereof is also unnecessary, and the number of steps required to form the coating pattern is reduced. Reduction is possible. As a result, the surface treatment of the workpiece W can be performed in a short time, and it is possible to contribute to a reduction in product cost.

  In particular, in the present embodiment, the required electrodeposition liquids L1 to L4 are stored in the tanks 11 to 19, respectively, and a voltage between each of the second electrodes 31 to 39 and the first power (work W) is applied simultaneously. Thus, the regions A1 to A9 can be electrodeposited simultaneously, and different types of coatings S1 to S4 can be formed simultaneously.

In contrast, conventionally, as described with reference to FIG. 9, in order to form a plurality of types of coatings in a plurality of regions, a water tank in which a plurality of types of electrodeposition liquid is stored, and a plurality of types of masks. It is necessary to perform electrodeposition on the workpiece while changing the water tank, and to change the mask every time the water tank is changed. If the replacement of the mask and the electrodeposition process are taken as one step, it is necessary to repeat four steps in order to form the four types of films S1 to S4.
However, according to the present embodiment, no mask is necessary, and by performing the electrodeposition process on all the regions A1 to A9 at the same time, the four types of coatings S1 can be performed in one step, that is, in a short time. ~ S4 can be formed on the surface F of the workpiece W.

  In addition, regarding the control for the electrodeposition process using the power supply device 10, control may be performed so that the voltage, current, and the like are the same in all the tanks 11 to 19, but each tank 11 to 19 has a condition. May be different. The condition includes at least one of current, voltage, and application time. For this control, the power supply apparatus 10 includes a control unit (not shown) for controlling this condition. This control unit includes a microcomputer having a CPU and an internal memory.

  For example, in the embodiment shown in FIG. 1, the power source is single, and a required voltage is applied between the work W serving as the first electrode and the second electrodes 31 to 39 in the tanks 11 to 19. In the above description, the electrodeposition process is performed using the same parameters (for example, current, voltage) and the same process (for example, application time). Alternatively, one power source may be provided for one tank ( In the case of FIG. 6, power supplies V <b> 1 to V <b> 9 are provided for the tanks 11 to 19. For this reason, the electrodeposition process can be performed by changing the parameters and processes for each tank. For example, even if the characteristics of the electrodeposition liquid stored in the tanks 11 to 19 are various, Accordingly, it is possible to perform the electrodeposition process by changing one or both of the parameter and the process.

  In addition, the pattern forming apparatus of the present invention is not limited to the illustrated form, and may be of other forms within the scope of the present invention. For example, the workpiece W may not be plate-shaped, but may be cylindrical or columnar, and the plurality of regions formed by being partitioned on the surface of the workpiece are not rectangular but have a shape including a curved portion, etc. Other shapes may be used. And what is necessary is just to form a tank (open end) according to the outline shape of this area | region.

  8: Sealing part 10: Power supply device 11-19: Tank 11a: Inner wall surface 21-29: Open end 31-39: Second electrode W: Workpiece (first electrode) F: Surface A1-A9: Region L1-L4: Electrodeposition solution S1: First coating S2: Second coating S3: Third coating S4: Fourth coating

Claims (5)

A pattern forming apparatus that forms different types of coatings on a plurality of regions of the surface of a workpiece by electrodeposition, and obtains a predetermined coating pattern with these coatings,
An electrode for forming different types of coatings having an open end having the same shape as the contour shape of each of the plurality of regions on which different types of coatings are formed, with the open ends in contact with the surface. A plurality of tanks for storing liquids,
A power supply device that applies a predetermined voltage between the workpiece to be a first electrode and each of the second electrodes in the plurality of tanks;
A pattern forming apparatus comprising:   The pattern forming apparatus according to claim 1, wherein the power supply device simultaneously applies a voltage between the first electrode and each of the second electrodes in the plurality of tanks.   A seal portion is further provided to prevent the electrodeposition liquid in the tank from leaking between the surface of the workpiece and the opening end in a state where the opening end of the tank is in contact with the surface of the workpiece. Item 3. The pattern forming apparatus according to Item 1 or 2.   The pattern formation apparatus as described in any one of Claims 1-3 in which at least one part of the inner wall face of these tanks becomes said 2nd electrode. A pattern forming method for forming different types of coatings on a plurality of regions of the surface of a workpiece by electrodeposition and obtaining a predetermined coating pattern with these coatings,
Among the surface of the workpiece, a plurality of areas where different types of films are formed are brought into contact with a plurality of tanks having open ends that are the same shape as the contour shape of each of the plurality of areas,
In each of these tanks, an electrodeposition solution for forming different types of films is stored,
A pattern forming method, wherein a voltage is applied between the work to be a first electrode and each of the second electrodes in the plurality of tanks.

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