EP2700737A3 - Pattern forming device and pattern forming method - Google Patents

Pattern forming device and pattern forming method Download PDF

Info

Publication number
EP2700737A3
EP2700737A3 EP13181003.8A EP13181003A EP2700737A3 EP 2700737 A3 EP2700737 A3 EP 2700737A3 EP 13181003 A EP13181003 A EP 13181003A EP 2700737 A3 EP2700737 A3 EP 2700737A3
Authority
EP
European Patent Office
Prior art keywords
pattern forming
tanks
workpiece
films
forming device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP13181003.8A
Other languages
German (de)
French (fr)
Other versions
EP2700737A2 (en
Inventor
Boyko Stoimenov
Kazuyoshi Yamakawa
Masahiro Suzuki
Kazuaki Matsuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JTEKT Corp
Original Assignee
JTEKT Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JTEKT Corp filed Critical JTEKT Corp
Publication of EP2700737A2 publication Critical patent/EP2700737A2/en
Publication of EP2700737A3 publication Critical patent/EP2700737A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D13/00—Electrophoretic coating characterised by the process
    • C25D13/22—Servicing or operating apparatus or multistep processes
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/02—Tanks; Installations therefor
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/10—Electrodes, e.g. composition, counter electrode
    • C25D17/12—Shape or form
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/004—Sealing devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

A pattern forming device includes a plurality of tanks, and a power supply device. Each of the tanks has an open end having the same shape as a profile shape of a corresponding one of regions of a surface of a workpiece, in which different types of films are to be formed, and stores a corresponding one of electrodeposition solutions used to form the different types of films in a state where the open end is in contact with the surface. The power supply device applies a predetermined voltage to between the workpiece that serves as a first electrode, and each one of second electrodes in the tanks.
EP13181003.8A 2012-08-22 2013-08-20 Pattern forming device and pattern forming method Withdrawn EP2700737A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012183261A JP2014040633A (en) 2012-08-22 2012-08-22 Pattern formation apparatus and pattern formation method

Publications (2)

Publication Number Publication Date
EP2700737A2 EP2700737A2 (en) 2014-02-26
EP2700737A3 true EP2700737A3 (en) 2015-05-27

Family

ID=49028916

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13181003.8A Withdrawn EP2700737A3 (en) 2012-08-22 2013-08-20 Pattern forming device and pattern forming method

Country Status (4)

Country Link
US (1) US20140054176A1 (en)
EP (1) EP2700737A3 (en)
JP (1) JP2014040633A (en)
CN (1) CN103628103A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160049701A1 (en) * 2014-08-13 2016-02-18 Farasis Energy, Inc. Process for preparing and recycling cathode active materials for lithium-ion batteries
US11408086B2 (en) * 2015-05-14 2022-08-09 Lacks Enterprises, Inc. Method for creating multiple electrical current pathways on a work piece

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4315809A (en) * 1979-04-23 1982-02-16 Honeywell Inc. Cluster core assembly for electroplating radioactive sources for an ionization smoke detector
US4348267A (en) * 1979-08-09 1982-09-07 Sonix Limited Plating means
US20030070917A1 (en) * 2001-10-11 2003-04-17 Symyx Technologies, Inc. Synthesis and characterization of materials for electrochemical cells
US20040168925A1 (en) * 2002-10-09 2004-09-02 Uziel Landau Electrochemical system for analyzing performance and properties of electrolytic solutions
US20070029189A1 (en) * 2005-08-02 2007-02-08 The University Of Chicago Combinatorial electrochemical deposition system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5571118A (en) * 1995-01-05 1996-11-05 Boutos; David Apparatus for stimulating penile, scrotal, anal, vaginal and clitoral tissue
JP2000256895A (en) 1999-03-08 2000-09-19 Sankyo Seiki Mfg Co Ltd System and method for electrodeposition coating
JP2002097594A (en) * 2000-09-20 2002-04-02 Ebara Corp Equipment and method for plating substrate
JP3513130B2 (en) * 2001-10-11 2004-03-31 日本エレクトロプレイテイング・エンジニヤース株式会社 Plating apparatus and plating method
US7544574B2 (en) * 2005-10-11 2009-06-09 Intermolecular, Inc. Methods for discretized processing of regions of a substrate
JP2010236054A (en) * 2009-03-31 2010-10-21 Fujitsu Semiconductor Ltd Method of manufacturing semiconductor device and plating apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4315809A (en) * 1979-04-23 1982-02-16 Honeywell Inc. Cluster core assembly for electroplating radioactive sources for an ionization smoke detector
US4348267A (en) * 1979-08-09 1982-09-07 Sonix Limited Plating means
US20030070917A1 (en) * 2001-10-11 2003-04-17 Symyx Technologies, Inc. Synthesis and characterization of materials for electrochemical cells
US20040168925A1 (en) * 2002-10-09 2004-09-02 Uziel Landau Electrochemical system for analyzing performance and properties of electrolytic solutions
US20070029189A1 (en) * 2005-08-02 2007-02-08 The University Of Chicago Combinatorial electrochemical deposition system

Also Published As

Publication number Publication date
CN103628103A (en) 2014-03-12
JP2014040633A (en) 2014-03-06
US20140054176A1 (en) 2014-02-27
EP2700737A2 (en) 2014-02-26

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