JP2014026434A - Processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processing device that can judge a level of work proficiency of an operator.SOLUTION: The processing device is provided that has control means including: an abnormality storage part that stores a type of abnormality occurring in the processing device and an occurrence time; an identification time storage part that stores a time at which an identification code is read by reading means and an operator specified from the read identification code; a counting start time storage part that stores a time at which the identification code is read by the reading means when the operator starts a work as a counting start time; a counting end time storage part that stores a time at which the identification code is read by the reading means when the operator ends the work as a counting end time; and an abnormality counting part that counts the number of abnormality occurrences occurring in a period of time from the counting start time to the counting end time of abnormalities stored in the abnormality storage part as the number of abnormality occurrences to the operator.

Description

  The present invention relates to a processing apparatus.

  Conventionally, for example, various processing apparatuses such as a cutting apparatus, a grinding apparatus, a polishing apparatus, and a laser processing apparatus are known as processing apparatuses for processing a semiconductor wafer that is a workpiece.

  For example, Patent Document 1 discloses a cutting apparatus provided with an imaging unit, and determines the state of a cutting groove by irradiating light to a cutting groove processed along a planned division line (street) of a wafer. It is configured. Moreover, it is set as the structure which can determine the state of a cutting groove correctly by adjusting light quantity.

  This Patent Document 1 discloses a technique for countermeasures against occurrence of abnormalities such as fine chipping (chipping) formed on both sides of a cutting groove and an increase in kerf width (cutting groove width).

JP 2011-66233 A

  As described in Patent Document 1, various abnormalities occur in the processing apparatus. In the example of the cutting apparatus disclosed in Patent Document 1, alignment is performed at the time of alignment of a wafer to be processed. Alignment error that mark cannot be detected, chipping over error indicating that the chipped chipping has exceeded the preset chipping (chipping) allowable value, and the cutting position during cutting is an allowable value There are various abnormalities such as a cut position error indicating that the position has shifted beyond. When such an abnormality occurs, the worker responds appropriately and continues machining each time.

  Here, the main cause of the occurrence of these abnormalities is a variation in the work piece, but one reason is that the worker's work proficiency is low and appropriate settings are not performed.

  For example, if the operator does not select the optimum alignment mark, it is possible that alignment errors frequently occur. Further, it is considered that chipping over errors and cut position errors frequently occur due to excessively small allowable values for chipping (chipping) and cut position deviation set by the operator.

  Based on the above, it is conceivable that the number of occurrences of abnormalities varies depending on the worker. The reverse would be the case.

  However, in the conventional processing apparatus, it is difficult to understand the worker's work proficiency because it has not been understood which worker has a large number of occurrences of abnormality during work and which worker has a small number of occurrences of abnormality. There was a problem.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a machining apparatus that can determine the work proficiency level of an operator.

  According to the first aspect of the present invention, there is provided a processing apparatus for processing a workpiece, a holding means for holding the workpiece, and a processing means for processing the workpiece held by the holding means; A control means for controlling the operation of the processing means; and a reading means for specifying the worker by reading an identification code for specifying the worker, and the control means stores the type and occurrence time of the abnormality that has occurred in the processing apparatus. An abnormal storage unit, an identification time storage unit for storing the time when the identification code is read by the reading unit and the worker specified from the read identification code, and the reading unit reads the identification code when the worker starts work Stored in a totaling start time storage unit that stores the time as a totaling start time, a totaling end time storage unit that stores a time when the identification code is read by the reading unit at the end of the work of the worker, and an abnormal storage unit The Among normal, the processing apparatus is provided with, and the abnormal aggregation unit to aggregate as a break occurrence count for the operator the number of occurrences of abnormality occurring during the aggregation end time from the aggregation starting time.

  According to the second aspect of the present invention, there is further provided: an input means for inputting machining conditions for machining performed on the workpiece by the machining means; and a display means for displaying at least the machining conditions input by the input means. The processing apparatus according to claim 1, further comprising: a display unit that displays the number of occurrences of abnormality for each operator that is totaled by the abnormality totaling unit.

  In the processing apparatus of the present invention, the number of occurrences of abnormality can be tabulated for each worker, and therefore, the worker's work proficiency level can be determined based on the number of occurrences of abnormality.

  Furthermore, the number of occurrences of abnormalities for each worker is increased, which leads to improvement of the worker's consciousness and can be expected to master the work in a shorter period of time than in the past.

It is a perspective view of the processing apparatus (cutting apparatus) suitable for implementation of this invention. It is a block diagram shown about the structure of a control apparatus. It is a perspective view shown about the composition of a reading device and an ID card. It is a functional block diagram explaining the function which performs abnormality tabulation etc. It is a figure shown about the example of a total screen.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. As an example of the processing apparatus, an external perspective view of a semiconductor wafer cutting apparatus 2 is shown in FIG. The cutting device 2 includes a processing device main body 4 in which processing means such as a cutting unit 10 having a cutting blade is accommodated in a housing 8, a display monitor 6 mounted on the housing 8 of the processing device main body 4, and the like. Is done.

  A chuck table 12 is disposed adjacent to the cutting unit 10 so as to be movable in the X-axis direction. Reference numeral 14 denotes a cassette mounting table (elevator) on which a cassette 24 capable of accommodating a plurality of wafers 22 is mounted, and is configured to be movable in the vertical direction. As a holding means for holding the wafer 22 during processing, it is conceivable that a holding means using an edge clamp (a form in which the end is clamped) is used in addition to a table such as the chuck table 12.

  Reference numeral 50 denotes a reading device for reading an identification code 54 recorded (recorded by display or magnetism) on an ID card 52 which is an article carried by an operator. It is assumed that the operator operates the cutting device 2 while holding the ID card 52 over the reading device 50.

  As shown in the schematic diagram of FIG. 2, the cutting device 2 is provided with a control device 30 for automatically controlling the cutting device 2. The control device 30 is constituted by a microcomputer, and stores a CPU (Central Processing Unit) 31 that performs arithmetic processing according to a control program, a ROM (Read Only Memory) 32 that stores a control program and various databases, and arithmetic results. A readable / writable RAM (random access memory) 33 and an input / output interface 34 are provided.

  The ROM 32 stores a control program for automatically controlling the cutting unit 10 and the like and various databases assumed to be read by the control program.

  The RAM 33 reads a control program and various data, and temporarily stores machining conditions input by an operator.

  The input / output interface 34 is connected to a display monitor 6 (see FIG. 1) that functions as an input means for inputting machining conditions and also functions as a display means for displaying various information.

  The input / output interface 34 is connected to a reading device 50 for reading an identification code 54 (see FIG. 3) recorded (recorded by display or magnetism) on an ID card 52 which is an article carried by the worker. .

  Various drive devices such as a motor that rotates the cutting unit 10 and a motor that moves the chuck table 12 are connected to the input / output interface 34, and various drive devices are machined based on the calculation results obtained by executing the control program. It is driven according to conditions.

  As shown in FIG. 3, the reading device 50 is configured to read the identification code 54 recorded on the ID card 52. In the present embodiment, the reading device 50 is configured in a substantially U shape having an insertion groove 51, and the identification code 54 is recognized without contact by inserting the ID card 52 into the insertion groove 51. It is configured.

  According to such a form, attribute information such as an operator's face photograph 53 is generally stored, and only an identification code 54 is added to an ID card 52 that is assumed to be always carried by the worker. For example, it is not necessary to carry another card or the like. Further, by adopting a non-contact recognizable configuration, the identification code 54 can be easily recognized simply by holding the ID card 52, and a configuration with excellent workability can be realized.

  The identification code 54 includes data for identifying the worker who owns the ID card 52. As will be described in detail later, the worker who operates the cutting apparatus 2 is identified by reading the identification code 54. Configured as follows.

  The identification code 54 is displayed on the surface of the ID card 52 in the form of a two-dimensional barcode as in the present embodiment so as to be visible, and is stored invisible in the ID card 52 by magnetism. There may be. Further, the identification code 54 may be directly stored in the ID card 52, or may be affixed to the ID card 52 by a seal or the like.

  Furthermore, in addition to the embodiment of the reading device 50 and the ID card 52 described above, a form of a card reader that allows the card to pass through the groove, a form that recognizes the identification code 54 by the uneven shape, and the like are also conceivable. In addition, a form in which an identification code 54 (for example, a character string such as a number or a symbol) is input to the reading device 50 by an operator is also conceivable. That is, the reading device 50 only needs to be able to recognize the information stored in the identification code 54, and the form of recognition is not particularly limited.

  FIG. 4 is a functional block diagram for explaining characteristic functions in the present invention. In FIG. 4, the reading device 50, the control device 30, and the display monitor 6 are shown.

  As shown in FIG. 4, in the control device 30, the CPU 31, ROM 32, and RAM 34 shown in FIG. 2, the identification time storage unit 35, the total start time storage unit 36, the total end time storage unit 37, Various functional units that respectively function as the storage unit 38, the abnormality totaling unit 39, and the control unit 40 are configured.

  The identification time storage unit 35 is configured to store the time when the reader 50 reads the identification code 54 of the worker's ID card 52 and the worker specified from the read identification code. Specifically, for example, a clock function for specifying the reading time, a table function that lists the identification code 54 and the worker's name, and a storage function for storing the reading time and the worker's name in association with each other are provided. Can be configured.

  For example, the time when an operator A holds the ID card 52 over the reading device 50 is stored in the identification time storage unit 35.

  The counting start time storage unit 36 is configured to store the time when the identification code 54 is read by the reading device 50 when the worker starts working as the counting start time. Specifically, for example, a clock function that specifies the reading time and a determination function that automatically acquires a start flag indicating that a machining operation has been started by a certain worker A can be provided. In addition, the method of acquiring a start flag is good also as acquiring as a start flag that the input operation (button operation etc.) of the process start by the operator A was performed, for example.

  For example, the time when the worker A started the machining operation is stored in the totalization start time storage unit 36.

  The totaling end time storage unit 37 is configured to store the time when the identification code 54 is read by the reading device 50 at the end of the work of the worker as the totaling end time. Specifically, for example, it can be configured by including a clock function for specifying the reading time and a determination function for automatically acquiring the completion flag of the work performed by a certain worker A as an end flag. Note that the method of acquiring the end flag may be, for example, acquiring as an end flag that the operator A has performed a processing end input operation (button operation or the like).

  For example, the time when the worker A finishes the machining operation is stored in the totaling end time storage unit 37.

  The abnormality storage unit 38 is configured to store the type and time of occurrence of an abnormality that has occurred in the machining apparatus. Specifically, for example, the type of abnormality is identified based on the clock function that identifies the abnormality occurrence time, which is the time when the abnormality information is input from the control unit 40, and the abnormality information input from the control unit 40. It can be configured by including an abnormality type specifying function and a storage function for storing the abnormality occurrence time and the abnormality type in association with each other.

  The abnormality storage unit 38 stores, for example, all types of abnormality that have occurred and the time at which each abnormality has occurred.

  The abnormality totaling unit 39 is configured to total the number of occurrences of abnormality that occurred between the totaling start time and the totaling end time among the abnormalities stored in the abnormality storage unit 38 as the number of abnormal occurrences for the worker. Specifically, for example, the name of the worker stored in the identification time storage unit 35, the total start time stored in the total start time storage unit 36, the total end time stored in the total end time storage unit 37, an abnormality Based on the number of abnormal inputs from the control unit 40 stored in the storage unit 38, the number of occurrences of abnormalities within the time in which the worker is engaged is tabulated.

  The abnormality totaling unit 39 stores, for example, the type of abnormality when the abnormality is limited to the time zone in which a certain worker A is engaged, and the time when each abnormality occurs, among all the abnormalities that have occurred.

  The control unit 40 is configured to automatically acquire various types of abnormality that occur in the cutting device 2 and to output the acquired abnormality information to the abnormality storage unit 38 as needed.

  Furthermore, the control unit 40 displays the totaling result totaled by the abnormality totaling unit 39 on the display monitor 6 as shown in the example of the totaling screen 42 in FIG. In the example of the tabulation screen 42, the horizontal axis is an abnormality item (abnormality type), the vertical axis is the number of occurrences of abnormality per unit time, and the tabulation results of the workers A, B, and C are displayed side by side. Thus, the work proficiency levels of the workers A, B, and C are easily compared.

  Here, as an example of an abnormality that occurs in the cutting apparatus 2, an alignment error that an alignment mark cannot be detected during alignment of a wafer that is a workpiece, or a chipping (chipping) in which chipping that occurs in the wafer being cut is set in advance. For example, there may be a chipping over error indicating that the allowable value exceeds the allowable value, or a cut position error indicating that the cut position during cutting has shifted beyond the allowable value.

  The occurrence of these abnormalities is influenced by the skill level of the operator. For example, if the operator does not select the optimum alignment mark, it is possible that alignment errors frequently occur. Further, it is considered that chipping over errors and cut position errors frequently occur due to excessively small allowable values for chipping (chipping) and cut position deviation set by the operator.

  Therefore, as shown in the tabulation screen 42 of FIG. 5, when the cutting device 2 is operated by a worker B with a low level of proficiency, many abnormalities are detected in the control unit 40 and the worker B is engaged. The number of occurrences of abnormalities within the working time increases.

  On the other hand, when the cutting device 2 is operated by a worker C with a high level of proficiency as shown in the tabulation screen 42 of FIG. 5, a few abnormalities are detected in the control unit 40, and the worker C is engaged. The number of occurrences of abnormalities within working hours is reduced.

  The present invention can be implemented as described above. That is, a chuck table (holding means) 12 that holds a wafer 22 as a workpiece, a cutting unit (processing means) 10 that processes the wafer 22 held by the chuck table 12, and an operation of the cutting unit 10 are controlled. A cutting device (processing device) 2 comprising a control device (control means) 30 for performing the above operation and a reading device (reading device) 50 for identifying the worker by reading an identification code 54 for identifying the worker. Reference numeral 30 denotes an abnormality storage unit 38 that stores the type and occurrence time of the abnormality that has occurred in the cutting device 2, the time that the reader's identification code 54 is read by the reading device 50, and the worker that is specified from the read identification code. And a start time storage for storing the time when the reading device 50 reads the identification code 54 as the start time of the start. 36, a totaling end time storage unit 37 for storing the time when the reading device 50 reads the identification code 54 at the end of the work of the operator as a totaling end time, and a totaling start time among the abnormalities stored in the abnormality storage unit 38 And an abnormality totaling unit 39 that counts the number of occurrences of abnormality that occurred between the totaling end time and the number of occurrences of abnormality for the operator.

  Further, the cutting device 2 includes an input unit that inputs processing conditions for processing performed on the wafer (workpiece) 22 by at least the cutting unit (processing unit) 10 and a display unit that displays at least the processing conditions input by the input unit. And the number of occurrences of abnormalities for each worker counted by the abnormality counting unit 39 is displayed on the display means.

  In the present embodiment, the display monitor 6 is configured with a touch panel, and the input unit and the display unit are combined. Then, the total screen 42 shown in FIG. 5 is displayed.

  And according to the above structure, since the frequency | count of abnormality occurrence can be totaled for every operator, a worker's work proficiency level can be judged based on this abnormality occurrence frequency.

  Furthermore, the number of occurrences of abnormalities for each worker is increased, which leads to improvement of the worker's consciousness and can be expected to master the work in a shorter period of time than in the past.

  In addition, although the above embodiment demonstrated using the cutting apparatus 2 as a processing apparatus, in addition to this, implementing this invention in various processing apparatuses, such as a grinding apparatus, a polishing apparatus, a laser processing apparatus, and a washing | cleaning apparatus. Is possible.

  Moreover, in addition to the above embodiment, the control device 30 may further include a work history storage unit for storing work details performed by the worker. According to this, in addition to the abnormality frequency and abnormality type for each worker, the work history can be totaled for each worker.

2 Cutting device 6 Display monitor 30 Control device 34 Input / output interface 35 Identification time storage unit 36 Total start time storage unit 37 Total end time storage unit 38 Abnormal storage unit 39 Abnormal total unit 40 Control unit 42 Total screen 50 Reading device 52 ID card 54 Identification code

Claims (2)

A processing device for processing a workpiece,
Holding means for holding the workpiece;
Processing means for processing the workpiece held by the holding means;
Control means for controlling the operation of the processing means;
Reading means for identifying an operator by reading an identification code for identifying the worker,
The control means includes
An abnormality storage unit for storing the type and occurrence time of an abnormality that has occurred in the processing apparatus;
An identification time storage unit for storing a time when the identification code is read by the reading unit and an operator specified from the read identification code;
A counting start time storage unit that stores a time at which the identification code is read by the reading unit at the start of the work of the worker as a counting start time;
A totaling end time storage unit for storing the time when the identification code is read by the reading unit at the end of the work of the worker as a totaling end time;
Of the abnormalities stored in the abnormal storage unit, an abnormal totaling unit that totalizes the number of occurrences of abnormalities occurring between the totaling start time and the totaling end time as the number of abnormal occurrences for the worker,
A processing apparatus having Input means for inputting processing conditions of processing applied to the workpiece at least by the processing means;
Display means for displaying at least the processing conditions input by the input means,
The display unit displays the number of occurrences of abnormalities for each operator, which are totaled by the abnormal totalization unit.
The processing apparatus according to claim 1.

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