JP2014022734A - フォトダイオード及びフォトダイオード作製方法 - Google Patents
フォトダイオード及びフォトダイオード作製方法 Download PDFInfo
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- JP2014022734A JP2014022734A JP2013145458A JP2013145458A JP2014022734A JP 2014022734 A JP2014022734 A JP 2014022734A JP 2013145458 A JP2013145458 A JP 2013145458A JP 2013145458 A JP2013145458 A JP 2013145458A JP 2014022734 A JP2014022734 A JP 2014022734A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000002086 nanomaterial Substances 0.000 claims abstract description 88
- 239000000758 substrate Substances 0.000 claims abstract description 72
- 238000000034 method Methods 0.000 claims abstract description 65
- 239000003446 ligand Substances 0.000 claims abstract description 47
- 239000010409 thin film Substances 0.000 claims abstract description 45
- 239000011248 coating agent Substances 0.000 claims abstract description 34
- 238000000576 coating method Methods 0.000 claims abstract description 34
- 238000000151 deposition Methods 0.000 claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims description 32
- 239000002184 metal Substances 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 21
- 229910052732 germanium Inorganic materials 0.000 claims description 19
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 19
- 150000004770 chalcogenides Chemical class 0.000 claims description 17
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 9
- 229910001507 metal halide Inorganic materials 0.000 claims description 9
- 150000005309 metal halides Chemical class 0.000 claims description 9
- 238000002161 passivation Methods 0.000 claims description 9
- 229910052717 sulfur Inorganic materials 0.000 claims description 9
- 239000011593 sulfur Substances 0.000 claims description 9
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 8
- 238000005137 deposition process Methods 0.000 claims description 7
- 239000011888 foil Substances 0.000 claims description 7
- 239000002096 quantum dot Substances 0.000 claims description 7
- 229910052723 transition metal Inorganic materials 0.000 claims description 7
- 150000003624 transition metals Chemical class 0.000 claims description 7
- AFNRRBXCCXDRPS-UHFFFAOYSA-N tin(ii) sulfide Chemical compound [Sn]=S AFNRRBXCCXDRPS-UHFFFAOYSA-N 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 3
- MFIWAIVSOUGHLI-UHFFFAOYSA-N selenium;tin Chemical compound [Sn]=[Se] MFIWAIVSOUGHLI-UHFFFAOYSA-N 0.000 claims description 3
- 150000004820 halides Chemical class 0.000 claims description 2
- 229920006254 polymer film Polymers 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 123
- 239000002159 nanocrystal Substances 0.000 description 11
- 238000004528 spin coating Methods 0.000 description 11
- 238000005240 physical vapour deposition Methods 0.000 description 7
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910005642 SnTe Inorganic materials 0.000 description 6
- 239000012212 insulator Substances 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000001771 vacuum deposition Methods 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 3
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 3
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 3
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 3
- 239000005642 Oleic acid Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 3
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical compound [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- 229910052714 tellurium Inorganic materials 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 229960001296 zinc oxide Drugs 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- UYJXRRSPUVSSMN-UHFFFAOYSA-P ammonium sulfide Chemical compound [NH4+].[NH4+].[S-2] UYJXRRSPUVSSMN-UHFFFAOYSA-P 0.000 description 1
- 229910052798 chalcogen Inorganic materials 0.000 description 1
- 150000001787 chalcogens Chemical class 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 239000013110 organic ligand Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000006385 ozonation reaction Methods 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- CENHPXAQKISCGD-UHFFFAOYSA-N trioxathietane 4,4-dioxide Chemical compound O=S1(=O)OOO1 CENHPXAQKISCGD-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
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- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0324—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIVBVI or AIIBIVCVI chalcogenide compounds, e.g. Pb Sn Te
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Abstract
【解決手段】基板12を提供するステップ、基板12上に、リガンドコーティング24を有する任意の数の量子ナノ材料22を含む量子ナノ材料層14を溶液堆積するステップ、並びに量子ナノ材料層14の上に薄膜酸化物層16を適用するステップを含む。
【選択図】図1
Description
12 基板層(ゲルマニウム)
13 基板層の表面
14 量子ナノ材料層
16 薄膜酸化物層
18 第1の接触層
20 第2の接触層
22 量子ナノ材料
24 リガンドコーティング
26 繋ぎ層
28 導電性金属
30 インジウムバンプ
Claims (15)
- フォトダイオード(10)の製造方法であって、
基板を提供するステップ、
前記基板上に、複数の量子ナノ材料(22)を含む量子ナノ材料層(14)を溶液堆積するステップであって、前記複数の量子ナノ材料(22)の各々がリガンドコーティング(24)を含むステップ、並びに
前記量子ナノ材料層(14)の上に薄膜酸化物層(16)を適用するステップ
を含む方法。 - 前記基板が半導体材料を含む、請求項1に記載の方法。
- 前記半導体材料がゲルマニウム(12)を含む、請求項1又は2に記載の方法。
- 前記溶液堆積ステップに先立って、前記基板を硫黄不動態化処理するステップをさらに含む、請求項1ないし3のいずれか一項に記載の方法。
- 前記基板が金属箔及びポリマー膜の少なくとも一方を含む、請求項1ないし4のいずれか一項に記載の方法。
- 前記複数の量子ナノ材料(14)は複数の量子ドット(22)であり、前記複数の量子ドット(22)の各々が錫−テルル化合物及び鉛−錫−テルル化合物の少なくとも一方を含む、請求項1ないし5のいずれか一項に記載の方法。
- 前記複数の量子ナノ材料(14)が錫−テルル化合物を含み、前記複数の量子ナノ材料(14)の最大断面積の寸法が約15ナノメートル〜約50ナノメートルである、請求項1ないし6のいずれか一項に記載の方法。
- 前記複数の量子ナノ材料(14)が鉛−錫−テルル化合物を含み、前記複数の量子ナノ材料(14)の最大断面積の寸法が少なくとも約7.5ナノメートルである、請求項1ないし6のいずれか一項に記載の方法。
- 前記リガンドコーティング(24)が、
i)錫及び遷移金属の少なくとも一方を含む金属カルコゲニド複合体、並びに
ii)錫−硫黄、錫−セレン化物、及び錫−テルル化合物の少なくとも一つ
のうちの少なくとも一方を含む、請求項1ないし8のいずれか一項に記載の方法。 - 前記リガンドコーティング(24)が金属ハロゲン化物リガンドを含む、請求項1ないし8のいずれか一項に記載の方法。
- 前記薄膜酸化物層(16)が溶液堆積プロセスにより適用される、請求項1ないし10のいずれか一項に記載の方法。
- 前記薄膜酸化物層(16)が非晶質酸化物半導体を含む、請求項1ないし11のいずれか一項に記載の方法。
- 前記薄膜酸化物層(16)の上に第1の接触層(18)を適用するステップをさらに含む、請求項1ないし12のいずれか一項に記載の方法。
- 前記基板の上に第2の接触層(20)を適用するステップをさらに含む、請求項1ないし13のいずれか一項に記載の方法。
- 基板と、
前記基板上に配置された、リガンドコーティング(24)を含む錫−テルル化合物量子ナノ材料(22)を含む溶液−流延量子ナノ材料層(14)であって、前記リガンドコーティング(24)が金属ハロゲン化物リガンド及び金属カルコゲニド複合体の少なくとも一方を含み、前記金属カルコゲニド複合体が錫及び遷移金属の少なくとも一方を含む溶液−流延量子ナノ材料層(14)と、
前記溶液−流延量子ナノ材料層(14)の上の薄膜酸化物層(16)と
を含むフォトダイオード。
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EP2688109B1 (en) | 2019-02-06 |
US20150122327A1 (en) | 2015-05-07 |
CN103545396A (zh) | 2014-01-29 |
CA3128702C (en) | 2023-12-19 |
KR102130286B1 (ko) | 2020-07-09 |
US20140014902A1 (en) | 2014-01-16 |
JP6289827B2 (ja) | 2018-03-07 |
CA2815482C (en) | 2021-09-28 |
EP2688109A3 (en) | 2018-01-10 |
EP2688109A2 (en) | 2014-01-22 |
CN103545396B (zh) | 2017-04-26 |
US8962378B2 (en) | 2015-02-24 |
CA2815482A1 (en) | 2014-01-16 |
CA3128702A1 (en) | 2014-01-16 |
US9318631B2 (en) | 2016-04-19 |
KR20140010335A (ko) | 2014-01-24 |
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