JP2014013895A5 - - Google Patents
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- Publication number
- JP2014013895A5 JP2014013895A5 JP2013134033A JP2013134033A JP2014013895A5 JP 2014013895 A5 JP2014013895 A5 JP 2014013895A5 JP 2013134033 A JP2013134033 A JP 2013134033A JP 2013134033 A JP2013134033 A JP 2013134033A JP 2014013895 A5 JP2014013895 A5 JP 2014013895A5
- Authority
- JP
- Japan
- Prior art keywords
- solution
- less
- ammonium hydroxide
- oxygen
- unsubstituted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/535,224 US20140004701A1 (en) | 2012-06-27 | 2012-06-27 | Texturing of monocrystalline semiconductor substrates to reduce incident light reflectance |
| US13/535,224 | 2012-06-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014013895A JP2014013895A (ja) | 2014-01-23 |
| JP2014013895A5 true JP2014013895A5 (enExample) | 2016-07-28 |
Family
ID=48699591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013134033A Pending JP2014013895A (ja) | 2012-06-27 | 2013-06-26 | 入射光反射率を低減させるための単結晶半導体基体のテクスチャ化 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20140004701A1 (enExample) |
| EP (1) | EP2680314A1 (enExample) |
| JP (1) | JP2014013895A (enExample) |
| KR (1) | KR20140004010A (enExample) |
| CN (1) | CN103515481B (enExample) |
| TW (1) | TWI488944B (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240112917A1 (en) * | 2021-02-10 | 2024-04-04 | Tokuyama Corporation | Method for processing substrate, and method for manufacturing silicon device comprising said processing method |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001351906A (ja) * | 2000-06-06 | 2001-12-21 | Canon Inc | シリコン基板のエッチング方法 |
| US8129212B2 (en) * | 2008-03-25 | 2012-03-06 | Applied Materials, Inc. | Surface cleaning and texturing process for crystalline solar cells |
| US7955989B2 (en) * | 2009-09-24 | 2011-06-07 | Rohm And Haas Electronic Materials Llc | Texturing semiconductor substrates |
| CN101661972B (zh) * | 2009-09-28 | 2011-07-20 | 浙江大学 | 一种低表面反射率的单晶硅太阳电池绒面制作工艺 |
| CN102169818B (zh) * | 2009-12-17 | 2013-12-11 | 罗门哈斯电子材料有限公司 | 纹理化半导体衬底的改进方法 |
| CN102181935B (zh) * | 2010-10-26 | 2012-09-19 | 浚鑫科技股份有限公司 | 一种制作单晶硅绒面的方法及腐蚀液 |
| US9038724B2 (en) * | 2010-11-16 | 2015-05-26 | Halliburton Energy Services, Inc. | Oxygen scavenger compositions for completion brines |
| US20120295447A1 (en) * | 2010-11-24 | 2012-11-22 | Air Products And Chemicals, Inc. | Compositions and Methods for Texturing of Silicon Wafers |
-
2012
- 2012-06-27 US US13/535,224 patent/US20140004701A1/en not_active Abandoned
-
2013
- 2013-06-26 EP EP13173732.2A patent/EP2680314A1/en not_active Withdrawn
- 2013-06-26 JP JP2013134033A patent/JP2014013895A/ja active Pending
- 2013-06-27 TW TW102122930A patent/TWI488944B/zh not_active IP Right Cessation
- 2013-06-27 KR KR1020130074342A patent/KR20140004010A/ko not_active Withdrawn
- 2013-06-27 CN CN201310381414.9A patent/CN103515481B/zh not_active Expired - Fee Related
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