JP2013544658A5 - - Google Patents
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- Publication number
- JP2013544658A5 JP2013544658A5 JP2013533879A JP2013533879A JP2013544658A5 JP 2013544658 A5 JP2013544658 A5 JP 2013544658A5 JP 2013533879 A JP2013533879 A JP 2013533879A JP 2013533879 A JP2013533879 A JP 2013533879A JP 2013544658 A5 JP2013544658 A5 JP 2013544658A5
- Authority
- JP
- Japan
- Prior art keywords
- load bearing
- abrasive article
- particles
- bearing particles
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims 8
- 239000000853 adhesive Substances 0.000 claims 2
- 230000001070 adhesive effect Effects 0.000 claims 2
- 239000012790 adhesive layer Substances 0.000 claims 2
- 239000010410 layer Substances 0.000 claims 2
- 239000011159 matrix material Substances 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 229910052787 antimony Inorganic materials 0.000 claims 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims 1
- 229910052797 bismuth Inorganic materials 0.000 claims 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000011258 core-shell material Substances 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
- 229910000311 lanthanide oxide Inorganic materials 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 239000004926 polymethyl methacrylate Substances 0.000 claims 1
- 239000004814 polyurethane Substances 0.000 claims 1
- 229920002635 polyurethane Polymers 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
- 239000011701 zinc Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US39359810P | 2010-10-15 | 2010-10-15 | |
| US61/393,598 | 2010-10-15 | ||
| PCT/US2011/054676 WO2012051002A2 (en) | 2010-10-15 | 2011-10-04 | Abrasive articles |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013544658A JP2013544658A (ja) | 2013-12-19 |
| JP2013544658A5 true JP2013544658A5 (https=) | 2014-09-25 |
| JP5871938B2 JP5871938B2 (ja) | 2016-03-01 |
Family
ID=45938900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013533879A Expired - Fee Related JP5871938B2 (ja) | 2010-10-15 | 2011-10-04 | 研磨物品 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8932115B2 (https=) |
| JP (1) | JP5871938B2 (https=) |
| CN (1) | CN103153538B (https=) |
| SG (1) | SG189227A1 (https=) |
| TW (1) | TWI524969B (https=) |
| WO (1) | WO2012051002A2 (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6188286B2 (ja) * | 2012-07-13 | 2017-08-30 | スリーエム イノベイティブ プロパティズ カンパニー | 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法 |
| WO2015050781A1 (en) * | 2013-10-04 | 2015-04-09 | 3M Innovative Properties Company | Bonded abrasive articles and methods |
| US20170210063A1 (en) * | 2014-08-04 | 2017-07-27 | 3M Innovative Properties Company | Finishing system for 3d printed components |
| US9418959B1 (en) * | 2015-07-08 | 2016-08-16 | Toyota Motor Engineering & Manufacturing North America, Inc. | Systems of bonded substrates |
| JP2018536119A (ja) | 2015-09-25 | 2018-12-06 | サン−ゴバン パフォーマンス プラスティックス コーポレイション | 接着剤、接着剤を有するベアリング及び製造方法 |
| CN107384312A (zh) * | 2017-06-06 | 2017-11-24 | 杭州希恩希拓斯精密机械有限公司 | 刀头钝化研磨磨料及其制备方法 |
| CN107799392B (zh) * | 2017-09-22 | 2020-12-11 | 中国科学院微电子研究所 | 黑硅、制备工艺及基于黑硅的mems器件制备方法 |
| CN107639554B (zh) * | 2017-11-10 | 2024-12-20 | 江苏瑞和磨料磨具有限公司 | 一种粗磨抛光一次完成的双面磨砂布 |
| US10947427B2 (en) | 2018-03-29 | 2021-03-16 | Saint-Gobain Performance Plastics Corporation | Adhesive, bearing with the adhesive, and methods of making |
| US20220041909A1 (en) * | 2018-12-18 | 2022-02-10 | 3M Innovative Properties Company | Abrasive articles with varying shaped abrasive particles |
| KR102174958B1 (ko) * | 2019-03-27 | 2020-11-05 | 에스케이씨 주식회사 | 결함 발생을 최소화시키는 연마패드 및 이의 제조방법 |
| CN121018327B (zh) * | 2025-10-28 | 2026-01-30 | 清华大学 | 晶圆减薄设备和减薄方法 |
Family Cites Families (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3041156A (en) | 1959-07-22 | 1962-06-26 | Norton Co | Phenolic resin bonded grinding wheels |
| US3314838A (en) | 1964-08-26 | 1967-04-18 | Minnesota Mining & Mfg | Pressure sensitive adhesives containing hollow spheroidal particles |
| US4311489A (en) | 1978-08-04 | 1982-01-19 | Norton Company | Coated abrasive having brittle agglomerates of abrasive grain |
| US4314827A (en) | 1979-06-29 | 1982-02-09 | Minnesota Mining And Manufacturing Company | Non-fused aluminum oxide-based abrasive mineral |
| US4623364A (en) | 1984-03-23 | 1986-11-18 | Norton Company | Abrasive material and method for preparing the same |
| WO1986002306A1 (en) * | 1984-10-09 | 1986-04-24 | Minnesota Mining And Manufacturing Company | Coated abrasive sheet material with improved backing |
| CA1254238A (en) | 1985-04-30 | 1989-05-16 | Alvin P. Gerk | Process for durable sol-gel produced alumina-based ceramics, abrasive grain and abrasive products |
| US4652275A (en) | 1985-08-07 | 1987-03-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
| US4770671A (en) | 1985-12-30 | 1988-09-13 | Minnesota Mining And Manufacturing Company | Abrasive grits formed of ceramic containing oxides of aluminum and yttrium, method of making and using the same and products made therewith |
| US4799939A (en) | 1987-02-26 | 1989-01-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
| US4881951A (en) | 1987-05-27 | 1989-11-21 | Minnesota Mining And Manufacturing Co. | Abrasive grits formed of ceramic containing oxides of aluminum and rare earth metal, method of making and products made therewith |
| JP2657965B2 (ja) | 1987-10-31 | 1997-09-30 | 日本カーバイド工業 株式会社 | 感圧接着剤層 |
| CH675250A5 (https=) | 1988-06-17 | 1990-09-14 | Lonza Ag | |
| US4931347A (en) | 1988-09-19 | 1990-06-05 | Nalco Chemical Company | Translucent pressure-sensitive adhesive systems |
| US5011508A (en) | 1988-10-14 | 1991-04-30 | Minnesota Mining And Manufacturing Company | Shelling-resistant abrasive grain, a method of making the same, and abrasive products |
| YU32490A (en) | 1989-03-13 | 1991-10-31 | Lonza Ag | Hydrophobic layered grinding particles |
| US4997461A (en) | 1989-09-11 | 1991-03-05 | Norton Company | Nitrified bonded sol gel sintered aluminous abrasive bodies |
| US5085671A (en) | 1990-05-02 | 1992-02-04 | Minnesota Mining And Manufacturing Company | Method of coating alumina particles with refractory material, abrasive particles made by the method and abrasive products containing the same |
| US5251802A (en) | 1991-04-25 | 1993-10-12 | Minnesota Mining And Manufacturing Company | Abrasive article and processes for producing it |
| US5201916A (en) | 1992-07-23 | 1993-04-13 | Minnesota Mining And Manufacturing Company | Shaped abrasive particles and method of making same |
| US5213591A (en) | 1992-07-28 | 1993-05-25 | Ahmet Celikkaya | Abrasive grain, method of making same and abrasive products |
| US5681612A (en) * | 1993-06-17 | 1997-10-28 | Minnesota Mining And Manufacturing Company | Coated abrasives and methods of preparation |
| US5549962A (en) | 1993-06-30 | 1996-08-27 | Minnesota Mining And Manufacturing Company | Precisely shaped particles and method of making the same |
| US5366140A (en) | 1993-09-30 | 1994-11-22 | Minnesota Mining And Manufacturing Company | Patterned array of uniform metal microbeads |
| BR9509116A (pt) * | 1994-09-30 | 1997-11-18 | Minnesota Mining & Mfg | Artigo abrasivo revestido processos para produzir o mesmo e processo para desbastar uma peça dura |
| US5897424A (en) | 1995-07-10 | 1999-04-27 | The United States Of America As Represented By The Secretary Of Commerce | Renewable polishing lap |
| US5976000A (en) * | 1996-05-28 | 1999-11-02 | Micron Technology, Inc. | Polishing pad with incompressible, highly soluble particles for chemical-mechanical planarization of semiconductor wafers |
| US6039633A (en) * | 1998-10-01 | 2000-03-21 | Micron Technology, Inc. | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies |
| EP1276593B1 (en) | 2000-04-28 | 2005-08-17 | 3M Innovative Properties Company | Abrasive article and methods for grinding glass |
| US6645624B2 (en) | 2000-11-10 | 2003-11-11 | 3M Innovative Properties Company | Composite abrasive particles and method of manufacture |
| KR20070008717A (ko) * | 2004-05-03 | 2007-01-17 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 미세마무리를 위한 지지 슈 및 방법 |
| US7294049B2 (en) * | 2005-09-01 | 2007-11-13 | Micron Technology, Inc. | Method and apparatus for removing material from microfeature workpieces |
| US7594845B2 (en) | 2005-10-20 | 2009-09-29 | 3M Innovative Properties Company | Abrasive article and method of modifying the surface of a workpiece |
| US20080096479A1 (en) * | 2006-10-18 | 2008-04-24 | Chien-Min Sung | Low-melting point superabrasive tools and associated methods |
| US8080072B2 (en) * | 2007-03-05 | 2011-12-20 | 3M Innovative Properties Company | Abrasive article with supersize coating, and methods |
| KR101404274B1 (ko) | 2007-10-22 | 2014-06-05 | 니폰 가가쿠 고교 가부시키가이샤 | 피복 도전성 분체 및 그것을 이용한 도전성 접착제 |
| JP5809053B2 (ja) | 2008-07-03 | 2015-11-10 | スリーエム イノベイティブ プロパティズ カンパニー | 固定研磨粒子及びそれから作製される物品 |
| US20100022174A1 (en) * | 2008-07-28 | 2010-01-28 | Kinik Company | Grinding tool and method for fabricating the same |
| US20100075578A1 (en) | 2008-09-19 | 2010-03-25 | Hung-Ke Chou | Abrasive polishing net with a stickable fiber layer |
| WO2010121025A1 (en) | 2009-04-17 | 2010-10-21 | 3M Innovative Properties Company | Metal particle transfer article, metal modified substrate, and method of making and using the same |
-
2011
- 2011-10-04 SG SG2013024518A patent/SG189227A1/en unknown
- 2011-10-04 JP JP2013533879A patent/JP5871938B2/ja not_active Expired - Fee Related
- 2011-10-04 WO PCT/US2011/054676 patent/WO2012051002A2/en not_active Ceased
- 2011-10-04 US US13/876,668 patent/US8932115B2/en not_active Expired - Fee Related
- 2011-10-04 CN CN201180049087.6A patent/CN103153538B/zh not_active Expired - Fee Related
- 2011-10-14 TW TW100137390A patent/TWI524969B/zh not_active IP Right Cessation
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