JP2013542422A - センサー素子、その製造方法、及びそれを含むセンサー装置 - Google Patents
センサー素子、その製造方法、及びそれを含むセンサー装置 Download PDFInfo
- Publication number
- JP2013542422A JP2013542422A JP2013531611A JP2013531611A JP2013542422A JP 2013542422 A JP2013542422 A JP 2013542422A JP 2013531611 A JP2013531611 A JP 2013531611A JP 2013531611 A JP2013531611 A JP 2013531611A JP 2013542422 A JP2013542422 A JP 2013542422A
- Authority
- JP
- Japan
- Prior art keywords
- conductive electrode
- sensor element
- conductive
- sensor
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title abstract description 4
- 238000000034 method Methods 0.000 claims abstract description 42
- 229920000642 polymer Polymers 0.000 claims abstract description 27
- 229910000510 noble metal Inorganic materials 0.000 claims abstract description 23
- 239000002250 absorbent Substances 0.000 claims abstract description 17
- 230000002745 absorbent Effects 0.000 claims abstract description 17
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 26
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 21
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 14
- 229910052737 gold Inorganic materials 0.000 claims description 14
- 239000010931 gold Substances 0.000 claims description 14
- 229910052697 platinum Inorganic materials 0.000 claims description 13
- 229910052763 palladium Inorganic materials 0.000 claims description 12
- 238000004891 communication Methods 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000012530 fluid Substances 0.000 claims description 6
- 229920000620 organic polymer Polymers 0.000 claims description 5
- 229920006254 polymer film Polymers 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 229920002521 macromolecule Polymers 0.000 claims 1
- 239000010410 layer Substances 0.000 description 110
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 60
- 239000000463 material Substances 0.000 description 57
- 239000013316 polymer of intrinsic microporosity Substances 0.000 description 46
- 239000012491 analyte Substances 0.000 description 29
- 238000000576 coating method Methods 0.000 description 23
- 238000012360 testing method Methods 0.000 description 23
- 239000003989 dielectric material Substances 0.000 description 22
- 239000011248 coating agent Substances 0.000 description 21
- 230000000052 comparative effect Effects 0.000 description 19
- 230000004044 response Effects 0.000 description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 14
- 230000006870 function Effects 0.000 description 12
- 239000011148 porous material Substances 0.000 description 11
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 10
- 239000000203 mixture Substances 0.000 description 10
- 238000002207 thermal evaporation Methods 0.000 description 10
- 230000008859 change Effects 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 9
- 238000000151 deposition Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 230000035484 reaction time Effects 0.000 description 9
- 239000011521 glass Substances 0.000 description 8
- 239000002904 solvent Substances 0.000 description 8
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- TWFZGCMQGLPBSX-UHFFFAOYSA-N carbendazim Chemical compound C1=CC=C2NC(NC(=O)OC)=NC2=C1 TWFZGCMQGLPBSX-UHFFFAOYSA-N 0.000 description 4
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000000741 silica gel Substances 0.000 description 4
- 229910002027 silica gel Inorganic materials 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- JFDZBHWFFUWGJE-UHFFFAOYSA-N benzonitrile Chemical compound N#CC1=CC=CC=C1 JFDZBHWFFUWGJE-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000003618 dip coating Methods 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000002209 hydrophobic effect Effects 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- POFMQEVZKZVAPQ-UHFFFAOYSA-N 1,1,1',1'-tetramethyl-3,3'-spirobi[2h-indene]-5,5',6,6'-tetrol Chemical compound C12=CC(O)=C(O)C=C2C(C)(C)CC11C2=CC(O)=C(O)C=C2C(C)(C)C1 POFMQEVZKZVAPQ-UHFFFAOYSA-N 0.000 description 2
- PCRSJGWFEMHHEW-UHFFFAOYSA-N 2,3,5,6-tetrafluorobenzene-1,4-dicarbonitrile Chemical compound FC1=C(F)C(C#N)=C(F)C(F)=C1C#N PCRSJGWFEMHHEW-UHFFFAOYSA-N 0.000 description 2
- ICSNLGPSRYBMBD-UHFFFAOYSA-N 2-aminopyridine Chemical compound NC1=CC=CC=N1 ICSNLGPSRYBMBD-UHFFFAOYSA-N 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 2
- 229910021536 Zeolite Inorganic materials 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- XLJMAIOERFSOGZ-UHFFFAOYSA-N cyanic acid Chemical compound OC#N XLJMAIOERFSOGZ-UHFFFAOYSA-N 0.000 description 2
- 238000013500 data storage Methods 0.000 description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000499 gel Substances 0.000 description 2
- 239000004816 latex Substances 0.000 description 2
- 229920000126 latex Polymers 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- 239000012855 volatile organic compound Substances 0.000 description 2
- 239000010457 zeolite Substances 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- 229940093475 2-ethoxyethanol Drugs 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 238000007605 air drying Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- QGJOPFRUJISHPQ-NJFSPNSNSA-N carbon disulfide-14c Chemical compound S=[14C]=S QGJOPFRUJISHPQ-NJFSPNSNSA-N 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 150000001924 cycloalkanes Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- -1 fluorocarbons Chemical class 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000005227 gel permeation chromatography Methods 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 239000012456 homogeneous solution Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000013315 hypercross-linked polymer Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000002198 insoluble material Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 239000004611 light stabiliser Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000012229 microporous material Substances 0.000 description 1
- 239000012982 microporous membrane Substances 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- LYGJENNIWJXYER-UHFFFAOYSA-N nitromethane Chemical compound C[N+]([O-])=O LYGJENNIWJXYER-UHFFFAOYSA-N 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 125000003003 spiro group Chemical group 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- 238000003828 vacuum filtration Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/128—Microapparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38814610P | 2010-09-30 | 2010-09-30 | |
| US61/388,146 | 2010-09-30 | ||
| PCT/US2011/050609 WO2012050686A1 (en) | 2010-09-30 | 2011-09-07 | Sensor element, method of making the same, and sensor device including the same |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016153865A Division JP2016200605A (ja) | 2010-09-30 | 2016-08-04 | センサー素子、その製造方法、及びそれを含むセンサー装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013542422A true JP2013542422A (ja) | 2013-11-21 |
| JP2013542422A5 JP2013542422A5 (enExample) | 2014-10-23 |
Family
ID=45938607
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013531611A Pending JP2013542422A (ja) | 2010-09-30 | 2011-09-07 | センサー素子、その製造方法、及びそれを含むセンサー装置 |
| JP2016153865A Pending JP2016200605A (ja) | 2010-09-30 | 2016-08-04 | センサー素子、その製造方法、及びそれを含むセンサー装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016153865A Pending JP2016200605A (ja) | 2010-09-30 | 2016-08-04 | センサー素子、その製造方法、及びそれを含むセンサー装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10228344B2 (enExample) |
| EP (1) | EP2622333B1 (enExample) |
| JP (2) | JP2013542422A (enExample) |
| CN (1) | CN103154712B (enExample) |
| WO (1) | WO2012050686A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160143385A (ko) * | 2015-06-05 | 2016-12-14 | 숭실대학교산학협력단 | 커패시터형 후각 센서 및 제조 방법 |
| JP2017506752A (ja) * | 2014-02-27 | 2017-03-09 | スリーエム イノベイティブ プロパティズ カンパニー | 可撓性センサパッチ及びその使用方法 |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2622334B1 (en) | 2010-09-30 | 2016-05-25 | 3M Innovative Properties Company | Sensor element, method of making the same, and sensor device including the same |
| CN103477215B (zh) | 2011-04-13 | 2015-07-29 | 3M创新有限公司 | 检测挥发性有机化合物的方法 |
| CN103492872B (zh) | 2011-04-13 | 2016-04-06 | 3M创新有限公司 | 使用吸收性传感器元件的方法 |
| KR20140026469A (ko) | 2011-04-13 | 2014-03-05 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서 |
| JP5908069B2 (ja) | 2011-06-08 | 2016-04-26 | スリーエム イノベイティブ プロパティズ カンパニー | 湿度センサ及びそのためのセンサ素子 |
| WO2013090188A1 (en) | 2011-12-13 | 2013-06-20 | 3M Innovative Properties Company | Method for identification and quantitative determination of an unknown organic compound in a gaseous medium |
| EP2856128B1 (en) | 2012-05-29 | 2016-09-14 | 3M Innovative Properties Company | Humidity sensor and sensor element |
| EP2864770B1 (en) * | 2012-06-25 | 2017-09-27 | 3M Innovative Properties Company | Sensor element, method of making, and method of using the same |
| US9702840B2 (en) | 2012-08-02 | 2017-07-11 | 3M Innovative Properties Company | Portable electronic device and vapor sensor card |
| US9317068B2 (en) | 2012-09-24 | 2016-04-19 | Donaldson Company, Inc. | Venting assembly and microporous membrane composite |
| US10041920B2 (en) | 2013-09-26 | 2018-08-07 | 3M Innovative Properties Company | Vapor sensor suitable for detecting alcoholic residue at a skin site |
| US10161896B2 (en) | 2014-02-27 | 2018-12-25 | 3M Innovative Properties Company | Sub-ambient temperature vapor sensor and method of use |
| ES2942264T3 (es) | 2017-08-11 | 2023-05-31 | Lg Energy Solution Ltd | Conjunto de electrodos, método de fabricación del mismo y batería secundaria que incluye el mismo |
| EP3762391A4 (en) | 2018-03-08 | 2022-08-03 | ExxonMobil Technology and Engineering Company | SPIROCENTRIC COMPOUNDS AND POLYMERS THEREOF |
| CN108802110B (zh) * | 2018-05-31 | 2021-06-22 | 广东联城住工装备信息科技有限公司 | 用于测量灌浆套筒灌浆密实度的检测装置及其检测方法 |
| CN109952154B (zh) * | 2018-06-26 | 2022-05-13 | 京东方科技集团股份有限公司 | 样本分析芯片及其制造方法 |
| CN110208329B (zh) * | 2019-06-24 | 2021-07-20 | 徐豫青 | 一种套筒灌浆密实度检测方法及装置 |
| US20230392254A1 (en) * | 2022-06-06 | 2023-12-07 | Uchicago Argonne, Llc | Inorganic porous coatings and methods of making the same |
| CN116753832B (zh) * | 2023-08-21 | 2023-10-27 | 电子科技大学 | 一种离子梯度发电型拉伸应变传感器及其制备方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0212047A (ja) * | 1988-06-30 | 1990-01-17 | Toshiba Corp | 容量変化型感湿素子およびその製造方法 |
| JPH05312754A (ja) * | 1992-05-11 | 1993-11-22 | Nok Corp | 湿度センサ |
| JP2002328110A (ja) * | 2001-04-27 | 2002-11-15 | Yamatake Corp | 静電容量センサ |
| WO2009045733A2 (en) * | 2007-10-05 | 2009-04-09 | 3M Innovative Properties Company | Organic chemical sensor comprising microporous polymer, and method of use |
Family Cites Families (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE59004506D1 (de) * | 1989-11-04 | 1994-03-17 | Dornier Gmbh | Selektiver Gassensor. |
| JPH06281610A (ja) | 1993-01-29 | 1994-10-07 | Nok Corp | 湿度センサ、アルコ−ルセンサまたはケトンセンサ |
| US6673533B1 (en) * | 1995-03-10 | 2004-01-06 | Meso Scale Technologies, Llc. | Multi-array multi-specific electrochemiluminescence testing |
| DE10031976C2 (de) * | 2000-06-30 | 2003-11-27 | Daimler Chrysler Ag | Hochtemperaturstoffsensor |
| GB2374419B (en) * | 2001-03-09 | 2004-12-29 | Zellweger Analytics Ltd | Electrochemical gas sensor |
| US20020142478A1 (en) * | 2001-03-28 | 2002-10-03 | Hiroyuki Wado | Gas sensor and method of fabricating a gas sensor |
| DE60144014D1 (de) * | 2001-07-19 | 2011-03-24 | Max Planck Gesellschaft | Chemische Sensoren aus Nanopartikel-Dendrimer-Komposit-Materialen |
| US7449146B2 (en) | 2002-09-30 | 2008-11-11 | 3M Innovative Properties Company | Colorimetric sensor |
| US6918284B2 (en) * | 2003-03-24 | 2005-07-19 | The United States Of America As Represented By The Secretary Of The Navy | Interconnected networks of single-walled carbon nanotubes |
| GB0317557D0 (en) | 2003-07-26 | 2003-08-27 | Univ Manchester | Microporous polymer material |
| US7217354B2 (en) * | 2003-08-29 | 2007-05-15 | Ut-Battelle, Llc | Method and apparatus for detection of chemical vapors |
| JP4579593B2 (ja) | 2004-03-05 | 2010-11-10 | キヤノン株式会社 | 標的物質認識素子、検出方法及び装置 |
| WO2005095924A1 (en) * | 2004-03-31 | 2005-10-13 | Agency For Science, Technology And Research | A sensor for measuring gas permeability of a test material |
| US7582196B2 (en) * | 2004-08-16 | 2009-09-01 | General Electric Company | Laminated membranes for diffusion limited gas sensors resistant to pressure variations |
| US7776269B2 (en) * | 2005-03-15 | 2010-08-17 | The United States Of America As Represented By The Secretary Of The Navy | Capacitive based sensing of molecular adsorbates on the surface of single wall nanotubes |
| US7837844B2 (en) * | 2005-04-26 | 2010-11-23 | Seacoast Science, Inc. | Interdigitated chemical sensors, and methods of making and using the same |
| JP2007139447A (ja) | 2005-11-15 | 2007-06-07 | Shinshu Univ | 薄膜の透湿度測定装置および透湿度測定方法 |
| US7556774B2 (en) | 2005-12-21 | 2009-07-07 | 3M Innovative Properties Company | Optochemical sensor and method of making the same |
| JP4057036B2 (ja) | 2006-01-13 | 2008-03-05 | 株式会社日本自動車部品総合研究所 | 湿度センサ用感湿素子の製造方法 |
| US7767143B2 (en) | 2006-06-27 | 2010-08-03 | 3M Innovative Properties Company | Colorimetric sensors |
| US8045996B2 (en) | 2006-07-31 | 2011-10-25 | Qualcomm Incorporated | Determination of cell RF parameters based on measurements by user equipments |
| US7906223B2 (en) | 2006-09-11 | 2011-03-15 | 3M Innovative Properties Company | Permeable nanoparticle reflector |
| EP2171775A1 (en) * | 2007-06-28 | 2010-04-07 | 3M Innovative Properties Company | Thin film transistors incorporating interfacial conductive clusters |
| KR101476487B1 (ko) | 2007-10-05 | 2014-12-24 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 플라즈마-증착된 미공성 층을 포함하는 유기 화학적 센서와, 제조 및 사용 방법 |
| EP2215165A1 (en) * | 2007-11-05 | 2010-08-11 | CO2CRC Technologies Pty Ltd | Gas separation membranes and processes for the manufacture thereof |
| JP5160985B2 (ja) * | 2008-07-14 | 2013-03-13 | 富士フイルム株式会社 | 検出方法、検出装置、検出用試料セルおよび検出用キット |
| US7816681B2 (en) * | 2008-12-03 | 2010-10-19 | Electronics And Telecommunications Research Institute | Capacitive gas sensor and method of fabricating the same |
| JP5662945B2 (ja) | 2008-12-23 | 2015-02-04 | スリーエム イノベイティブ プロパティズ カンパニー | 微多孔性有機ケイ酸塩材料を有する有機化学センサ |
| US20100189600A1 (en) | 2009-01-29 | 2010-07-29 | 3M Innovative Properties Company | Monitor for optical detection of organic analytes |
| AU2010235022B2 (en) | 2009-03-30 | 2013-08-22 | 3M Innovative Properties Company | Optoelectronic methods and devices for detection of analytes |
| EP2583090B1 (en) | 2010-06-15 | 2016-04-06 | 3M Innovative Properties Company | Variable capacitance sensors and methods of making the same |
| US8920731B2 (en) * | 2010-09-20 | 2014-12-30 | Kimberly-Clark Worldwide, Inc. | Nonwoven-based chemi-capacitive or chemi-resistive gas sensor |
| EP2622334B1 (en) | 2010-09-30 | 2016-05-25 | 3M Innovative Properties Company | Sensor element, method of making the same, and sensor device including the same |
| CN103477215B (zh) | 2011-04-13 | 2015-07-29 | 3M创新有限公司 | 检测挥发性有机化合物的方法 |
-
2011
- 2011-09-07 WO PCT/US2011/050609 patent/WO2012050686A1/en not_active Ceased
- 2011-09-07 CN CN201180047568.3A patent/CN103154712B/zh not_active Expired - Fee Related
- 2011-09-07 EP EP11832921.8A patent/EP2622333B1/en active Active
- 2011-09-07 JP JP2013531611A patent/JP2013542422A/ja active Pending
- 2011-09-07 US US13/825,660 patent/US10228344B2/en not_active Expired - Fee Related
-
2016
- 2016-08-04 JP JP2016153865A patent/JP2016200605A/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0212047A (ja) * | 1988-06-30 | 1990-01-17 | Toshiba Corp | 容量変化型感湿素子およびその製造方法 |
| JPH05312754A (ja) * | 1992-05-11 | 1993-11-22 | Nok Corp | 湿度センサ |
| JP2002328110A (ja) * | 2001-04-27 | 2002-11-15 | Yamatake Corp | 静電容量センサ |
| WO2009045733A2 (en) * | 2007-10-05 | 2009-04-09 | 3M Innovative Properties Company | Organic chemical sensor comprising microporous polymer, and method of use |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017506752A (ja) * | 2014-02-27 | 2017-03-09 | スリーエム イノベイティブ プロパティズ カンパニー | 可撓性センサパッチ及びその使用方法 |
| KR20160143385A (ko) * | 2015-06-05 | 2016-12-14 | 숭실대학교산학협력단 | 커패시터형 후각 센서 및 제조 방법 |
| KR101709329B1 (ko) | 2015-06-05 | 2017-02-22 | 숭실대학교산학협력단 | 커패시터형 후각 센서 및 제조 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20130229194A1 (en) | 2013-09-05 |
| EP2622333B1 (en) | 2020-06-17 |
| EP2622333A4 (en) | 2016-06-08 |
| WO2012050686A1 (en) | 2012-04-19 |
| US10228344B2 (en) | 2019-03-12 |
| CN103154712A (zh) | 2013-06-12 |
| EP2622333A1 (en) | 2013-08-07 |
| JP2016200605A (ja) | 2016-12-01 |
| CN103154712B (zh) | 2015-11-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2016200605A (ja) | センサー素子、その製造方法、及びそれを含むセンサー装置 | |
| JP5932806B2 (ja) | センサー素子、その製造方法、及びそれを含むセンサー装置 | |
| EP2864770B1 (en) | Sensor element, method of making, and method of using the same | |
| CN101815936B (zh) | 包含微孔聚合物的有机化学传感器及使用方法 | |
| KR101476487B1 (ko) | 플라즈마-증착된 미공성 층을 포함하는 유기 화학적 센서와, 제조 및 사용 방법 | |
| US10161896B2 (en) | Sub-ambient temperature vapor sensor and method of use | |
| JP6038950B2 (ja) | 気体媒質内の未知の有機化合物の同定及び定量測定方法 | |
| JP6016887B2 (ja) | 校正情報を含む電子素子及びその使用方法 | |
| EP2718706B1 (en) | Humidity sensor and sensor element therefor | |
| JP5968421B2 (ja) | 吸収性センサ素子の使用方法 | |
| WO2012141925A1 (en) | Method of detecting volatile organic compounds | |
| EP2856128B1 (en) | Humidity sensor and sensor element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140904 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140904 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150526 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150602 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20150901 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20150929 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20151030 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20151120 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20160405 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160804 |
|
| A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20160812 |
|
| A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20161021 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170905 |