JP2013542422A - センサー素子、その製造方法、及びそれを含むセンサー装置 - Google Patents

センサー素子、その製造方法、及びそれを含むセンサー装置 Download PDF

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JP2013542422A
JP2013542422A JP2013531611A JP2013531611A JP2013542422A JP 2013542422 A JP2013542422 A JP 2013542422A JP 2013531611 A JP2013531611 A JP 2013531611A JP 2013531611 A JP2013531611 A JP 2013531611A JP 2013542422 A JP2013542422 A JP 2013542422A
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conductive electrode
sensor element
conductive
sensor
electrode
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JP2013542422A5 (enExample
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マイケル， シー． パラゾット，
ステファン， エイチ． グリスカ，
ポール， エフ． バウデ，
ミュンチャン カン，
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus

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  • Health & Medical Sciences (AREA)
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  • Analytical Chemistry (AREA)
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  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
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  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
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  • Molecular Biology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2013531611A 2010-09-30 2011-09-07 センサー素子、その製造方法、及びそれを含むセンサー装置 Pending JP2013542422A (ja)

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US38814610P 2010-09-30 2010-09-30
US61/388,146 2010-09-30
PCT/US2011/050609 WO2012050686A1 (en) 2010-09-30 2011-09-07 Sensor element, method of making the same, and sensor device including the same

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JP2013542422A5 JP2013542422A5 (enExample) 2014-10-23

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US (1) US10228344B2 (enExample)
EP (1) EP2622333B1 (enExample)
JP (2) JP2013542422A (enExample)
CN (1) CN103154712B (enExample)
WO (1) WO2012050686A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160143385A (ko) * 2015-06-05 2016-12-14 숭실대학교산학협력단 커패시터형 후각 센서 및 제조 방법
JP2017506752A (ja) * 2014-02-27 2017-03-09 スリーエム イノベイティブ プロパティズ カンパニー 可撓性センサパッチ及びその使用方法

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5932806B2 (ja) 2010-09-30 2016-06-08 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びそれを含むセンサー装置
US9429537B2 (en) 2011-04-13 2016-08-30 3M Innovative Properties Company Method of detecting volatile organic compounds
CN103477216A (zh) 2011-04-13 2013-12-25 3M创新有限公司 包括具有集成加热的传感器元件的蒸气传感器
CN103492872B (zh) 2011-04-13 2016-04-06 3M创新有限公司 使用吸收性传感器元件的方法
WO2012170248A1 (en) 2011-06-08 2012-12-13 3M Innovative Properties Company Humidity sensor and sensor element therefor
JP6038950B2 (ja) 2011-12-13 2016-12-07 スリーエム イノベイティブ プロパティズ カンパニー 気体媒質内の未知の有機化合物の同定及び定量測定方法
US9562872B2 (en) 2012-05-29 2017-02-07 3M Innovative Properties Company Humidity sensor and sensor element
JP6289454B2 (ja) * 2012-06-25 2018-03-07 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びその使用方法
JP6263179B2 (ja) 2012-08-02 2018-01-17 スリーエム イノベイティブ プロパティズ カンパニー 携帯用電子装置及び蒸気センサカード
US9317068B2 (en) 2012-09-24 2016-04-19 Donaldson Company, Inc. Venting assembly and microporous membrane composite
EP3048983B1 (en) 2013-09-26 2020-11-25 3M Innovative Properties Company Vapor sensor suitable for detecting alcoholic residue at a skin site
US10161896B2 (en) 2014-02-27 2018-12-25 3M Innovative Properties Company Sub-ambient temperature vapor sensor and method of use
US11183737B2 (en) 2017-08-11 2021-11-23 Lg Chem, Ltd. Electrode assembly, method of manufacturing the same and secondary battery including the same
EP3762391A4 (en) 2018-03-08 2022-08-03 ExxonMobil Technology and Engineering Company SPIROCENTRIC COMPOUNDS AND POLYMERS THEREOF
CN108802110B (zh) * 2018-05-31 2021-06-22 广东联城住工装备信息科技有限公司 用于测量灌浆套筒灌浆密实度的检测装置及其检测方法
WO2020000169A1 (en) * 2018-06-26 2020-01-02 Boe Technology Group Co., Ltd. Sample analysis chip and fabricating method thereof
CN110208329B (zh) * 2019-06-24 2021-07-20 徐豫青 一种套筒灌浆密实度检测方法及装置
US20230392254A1 (en) * 2022-06-06 2023-12-07 Uchicago Argonne, Llc Inorganic porous coatings and methods of making the same
CN116753832B (zh) * 2023-08-21 2023-10-27 电子科技大学 一种离子梯度发电型拉伸应变传感器及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0212047A (ja) * 1988-06-30 1990-01-17 Toshiba Corp 容量変化型感湿素子およびその製造方法
JPH05312754A (ja) * 1992-05-11 1993-11-22 Nok Corp 湿度センサ
JP2002328110A (ja) * 2001-04-27 2002-11-15 Yamatake Corp 静電容量センサ
WO2009045733A2 (en) * 2007-10-05 2009-04-09 3M Innovative Properties Company Organic chemical sensor comprising microporous polymer, and method of use

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0426989B1 (de) * 1989-11-04 1994-02-02 Dornier Gmbh Selektiver Gassensor
JPH06281610A (ja) 1993-01-29 1994-10-07 Nok Corp 湿度センサ、アルコ−ルセンサまたはケトンセンサ
US6673533B1 (en) * 1995-03-10 2004-01-06 Meso Scale Technologies, Llc. Multi-array multi-specific electrochemiluminescence testing
DE10031976C2 (de) * 2000-06-30 2003-11-27 Daimler Chrysler Ag Hochtemperaturstoffsensor
GB2374419B (en) * 2001-03-09 2004-12-29 Zellweger Analytics Ltd Electrochemical gas sensor
DE10213805A1 (de) * 2001-03-28 2002-11-07 Denso Corp Gassensor und Verfahren zum Herstellen eines Gassensors
EP1278061B1 (en) * 2001-07-19 2011-02-09 Sony Deutschland GmbH Chemical sensors from nanoparticle/dendrimer composite materials
US7449146B2 (en) 2002-09-30 2008-11-11 3M Innovative Properties Company Colorimetric sensor
US6918284B2 (en) * 2003-03-24 2005-07-19 The United States Of America As Represented By The Secretary Of The Navy Interconnected networks of single-walled carbon nanotubes
GB0317557D0 (en) 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
US7217354B2 (en) * 2003-08-29 2007-05-15 Ut-Battelle, Llc Method and apparatus for detection of chemical vapors
JP4579593B2 (ja) 2004-03-05 2010-11-10 キヤノン株式会社 標的物質認識素子、検出方法及び装置
US8603825B2 (en) * 2004-03-31 2013-12-10 Agency For Science, Technology And Research Sensor for measuring gas permeability of a test material
US7582196B2 (en) * 2004-08-16 2009-09-01 General Electric Company Laminated membranes for diffusion limited gas sensors resistant to pressure variations
US7776269B2 (en) * 2005-03-15 2010-08-17 The United States Of America As Represented By The Secretary Of The Navy Capacitive based sensing of molecular adsorbates on the surface of single wall nanotubes
US7837844B2 (en) * 2005-04-26 2010-11-23 Seacoast Science, Inc. Interdigitated chemical sensors, and methods of making and using the same
JP2007139447A (ja) 2005-11-15 2007-06-07 Shinshu Univ 薄膜の透湿度測定装置および透湿度測定方法
US7556774B2 (en) 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
JP4057036B2 (ja) 2006-01-13 2008-03-05 株式会社日本自動車部品総合研究所 湿度センサ用感湿素子の製造方法
US7767143B2 (en) 2006-06-27 2010-08-03 3M Innovative Properties Company Colorimetric sensors
US8045996B2 (en) 2006-07-31 2011-10-25 Qualcomm Incorporated Determination of cell RF parameters based on measurements by user equipments
US7906223B2 (en) 2006-09-11 2011-03-15 3M Innovative Properties Company Permeable nanoparticle reflector
US20100140600A1 (en) * 2007-06-28 2010-06-10 3M Innovative Properties Company Thin film transistors incorporating interfacial conductive clusters
EP2208058B1 (en) * 2007-10-05 2018-07-11 3M Innovative Properties Company Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using
JP2011502049A (ja) * 2007-11-05 2011-01-20 シーオー２ シーアールシー・テクノロジーズ・プロプライエタリー・リミテッド 気体分離膜及びその製造方法
JP5160985B2 (ja) * 2008-07-14 2013-03-13 富士フイルム株式会社 検出方法、検出装置、検出用試料セルおよび検出用キット
US7816681B2 (en) * 2008-12-03 2010-10-19 Electronics And Telecommunications Research Institute Capacitive gas sensor and method of fabricating the same
BRPI0918200A2 (pt) 2008-12-23 2015-12-08 3M Innovative Properties Co elemento de detecção e método de detecção de analitos químicos orgânicos
KR200474377Y1 (ko) 2009-01-29 2014-09-12 쓰리엠 이노베이티브 프로퍼티즈 컴파니 유기 분석물의 광학적 검출을 위한 모니터
AU2010235022B2 (en) 2009-03-30 2013-08-22 3M Innovative Properties Company Optoelectronic methods and devices for detection of analytes
JP5800897B2 (ja) 2010-06-15 2015-10-28 スリーエム イノベイティブ プロパティズ カンパニー 可変静電容量センサ及びその作製方法
US8920731B2 (en) * 2010-09-20 2014-12-30 Kimberly-Clark Worldwide, Inc. Nonwoven-based chemi-capacitive or chemi-resistive gas sensor
JP5932806B2 (ja) 2010-09-30 2016-06-08 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びそれを含むセンサー装置
US9429537B2 (en) 2011-04-13 2016-08-30 3M Innovative Properties Company Method of detecting volatile organic compounds

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0212047A (ja) * 1988-06-30 1990-01-17 Toshiba Corp 容量変化型感湿素子およびその製造方法
JPH05312754A (ja) * 1992-05-11 1993-11-22 Nok Corp 湿度センサ
JP2002328110A (ja) * 2001-04-27 2002-11-15 Yamatake Corp 静電容量センサ
WO2009045733A2 (en) * 2007-10-05 2009-04-09 3M Innovative Properties Company Organic chemical sensor comprising microporous polymer, and method of use

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017506752A (ja) * 2014-02-27 2017-03-09 スリーエム イノベイティブ プロパティズ カンパニー 可撓性センサパッチ及びその使用方法
KR20160143385A (ko) * 2015-06-05 2016-12-14 숭실대학교산학협력단 커패시터형 후각 센서 및 제조 방법
KR101709329B1 (ko) 2015-06-05 2017-02-22 숭실대학교산학협력단 커패시터형 후각 센서 및 제조 방법

Also Published As

Publication number Publication date
EP2622333A1 (en) 2013-08-07
JP2016200605A (ja) 2016-12-01
CN103154712A (zh) 2013-06-12
CN103154712B (zh) 2015-11-25
US20130229194A1 (en) 2013-09-05
WO2012050686A1 (en) 2012-04-19
EP2622333B1 (en) 2020-06-17
US10228344B2 (en) 2019-03-12
EP2622333A4 (en) 2016-06-08

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