JP2013542163A5 - - Google Patents
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- Publication number
- JP2013542163A5 JP2013542163A5 JP2013532822A JP2013532822A JP2013542163A5 JP 2013542163 A5 JP2013542163 A5 JP 2013542163A5 JP 2013532822 A JP2013532822 A JP 2013532822A JP 2013532822 A JP2013532822 A JP 2013532822A JP 2013542163 A5 JP2013542163 A5 JP 2013542163A5
- Authority
- JP
- Japan
- Prior art keywords
- silane
- distillation column
- fraction
- reduced
- produced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US39007510P | 2010-10-05 | 2010-10-05 | |
| US39007810P | 2010-10-05 | 2010-10-05 | |
| US61/390,075 | 2010-10-05 | ||
| US12/898,494 US8524048B2 (en) | 2010-10-05 | 2010-10-05 | Processes for recovering silane from heavy-ends separation operations |
| US12/898,487 | 2010-10-05 | ||
| US12/898,494 | 2010-10-05 | ||
| US12/898,487 US8524044B2 (en) | 2010-10-05 | 2010-10-05 | Systems for recovering silane from heavy-ends separation operations |
| US61/390,078 | 2010-10-05 | ||
| PCT/US2011/052588 WO2012047522A2 (en) | 2010-10-05 | 2011-09-21 | Processes and systems for purifying silane |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013542163A JP2013542163A (ja) | 2013-11-21 |
| JP2013542163A5 true JP2013542163A5 (https=) | 2014-11-13 |
| JP5826854B2 JP5826854B2 (ja) | 2015-12-02 |
Family
ID=44720191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013532822A Active JP5826854B2 (ja) | 2010-10-05 | 2011-09-21 | シランを精製する方法及びシステム |
Country Status (6)
| Country | Link |
|---|---|
| EP (2) | EP2993157A3 (https=) |
| JP (1) | JP5826854B2 (https=) |
| KR (1) | KR101752949B1 (https=) |
| CN (1) | CN103153420B (https=) |
| TW (1) | TWI466826B (https=) |
| WO (1) | WO2012047522A2 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015111886A1 (ko) | 2014-01-24 | 2015-07-30 | 한화케미칼 주식회사 | 폐가스의 정제방법 및 정제장치 |
| US10252916B2 (en) * | 2014-09-04 | 2019-04-09 | Corner Star Limited | Methods for separating halosilanes |
| CN108079608A (zh) * | 2017-12-22 | 2018-05-29 | 天津科创复兴科技咨询有限公司 | 一种有氮气保护的高效的蒸馏提纯设备 |
| CN108751201A (zh) * | 2018-08-09 | 2018-11-06 | 洛阳中硅高科技有限公司 | 乙硅烷的制备装置 |
| CN115092934A (zh) * | 2022-06-21 | 2022-09-23 | 云南通威高纯晶硅有限公司 | 一种控制精制三氯氢硅中二氯氢硅含量的方法及系统 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4632816A (en) | 1982-12-13 | 1986-12-30 | Ethyl Corporation | Process for production of silane |
| US4554141A (en) * | 1984-05-14 | 1985-11-19 | Ethyl Corporation | Gas stream purification |
| US4900347A (en) * | 1989-04-05 | 1990-02-13 | Mobil Corporation | Cryogenic separation of gaseous mixtures |
| US5206004A (en) | 1990-04-30 | 1993-04-27 | Ethyl Corporation | Silane compositions and process |
| US5211931A (en) * | 1992-03-27 | 1993-05-18 | Ethyl Corporation | Removal of ethylene from silane using a distillation step after separation using a zeolite molecular sieve |
| CA2203352C (en) * | 1996-06-07 | 2000-08-01 | Walter H. Whitlock | Method and apparatus for purifying a substance |
| ITRM20040570A1 (it) * | 2004-11-19 | 2005-02-19 | Memc Electronic Materials | Procedimento e impianto di purificazione di triclorosilano e di tetracloruro di silicio. |
| CN101817527B (zh) * | 2010-04-16 | 2012-01-25 | 浙江中宁硅业有限公司 | 一种多晶硅生产过程中的电子级硅烷精制提纯的方法 |
-
2011
- 2011-09-21 EP EP15170509.2A patent/EP2993157A3/en not_active Withdrawn
- 2011-09-21 KR KR1020137011660A patent/KR101752949B1/ko active Active
- 2011-09-21 JP JP2013532822A patent/JP5826854B2/ja active Active
- 2011-09-21 WO PCT/US2011/052588 patent/WO2012047522A2/en not_active Ceased
- 2011-09-21 CN CN201180048451.7A patent/CN103153420B/zh active Active
- 2011-09-21 EP EP11761806.6A patent/EP2624929B1/en active Active
- 2011-10-04 TW TW100135942A patent/TWI466826B/zh active
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