JP2013539059A - 特に多重チャンネルの周波数選択的測定のための光学的バンドパスフィルタシステム - Google Patents
特に多重チャンネルの周波数選択的測定のための光学的バンドパスフィルタシステム Download PDFInfo
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- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
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- 238000012544 monitoring process Methods 0.000 description 2
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
- G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
- G01J3/513—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters having fixed filter-detector pairs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
- G02B1/005—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials made of photonic crystals or photonic band gap materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
- G01J2003/2826—Multispectral imaging, e.g. filter imaging
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
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Abstract
【解決手段】この発明は、第1のナノ構造金属層(4)を含むバンドパスフィルタと第2のナノ構造金属層(7)を含むバンドストップフィルタとの組み合わせを少なくとも1つ有する光学的バンドパスフィルタシステムに関し、これらフィルタの一方が他方の裏側に配置され、互いの層厚が異なる。バンドストップフィルタは、バンドパスフィルタの透過帯域幅と部分的に重なる隣接する波長帯域を遮断するように、バンドパスフィルタに対して調整される。提案に係る光学的フィルタシステムによれば、小さなスペースに隣り合うように小さい透過帯域幅の様々なフィルタ特性を作成できる。
【選択図】図3
Description
2 nドープウェル
3 誘電性中間層
4 バンドパスフィルタのための第1の金属層
5 ナノアパーチャ
6 誘電性中間層
7 バンドストップフィルタのための第2の金属層
8 円柱状または立方体状のナノ構造
Claims (9)
- 第1の層厚を有する第1のナノ構造金属層(4)を含むバンドパスフィルタと、第2の層厚を有する第2のナノ構造金属層(7)を含むバンドストップフィルタとの組み合わせを少なくとも1つ有し、それらの一方が他方の上に配置され、前記バンドストップフィルタは、前記バンドパスフィルタの透過帯域幅と部分的に重なる隣接する波長帯域を遮断するように、前記バンドパスフィルタに対して調整されており、前記第1および第2の層厚が互いに異なることを特徴とする光学的フィルタシステム。
- 前記第1の層厚は130nmと270nmとの間にて選択されることを特徴とする請求項1に記載の光学的フィルタシステム。
- 前記第2の層厚は30nmと170nmとの間にて選択されることを特徴とする請求項1または2に記載の光学的フィルタシステム。
- 前記第1の層厚は150nmと250nmとの間にて選択され、前記第2の層厚は50nmと150nmとの間にて選択されることを特徴とする請求項1に記載の光学的フィルタシステム。
- 前記第1のナノ構造金属層(4)はホールアレイ(5)を形成し、前記第2のナノ構造金属層(7)はアイランドアレイ(8)を形成することを特徴とする請求項1〜4のいずれかに記載の光学的フィルタシステム。
- 前記バンドパスフィルタと前記バンドストップフィルタとの複数の組み合わせが、互いに隣り合うように配列されていることを特徴とする請求項1〜5のいずれかに記載の光学的フィルタシステム。
- 少なくとも幾つかの前記組み合わせが、異なる波長透過帯域を有することを特徴とする請求項6に記載の光学的フィルタシステム。
- 前記フィルタのそれぞれの横方向の寸法が5mm以下であることを特徴とする請求項1〜7のいずれかに記載の光学的フィルタシステム。
- 波長選択的な検出のために上記請求項のいずれかに記載のフィルタシステムを有する光学的センサまたは分光器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102010027252.3 | 2010-07-15 | ||
DE102010027252 | 2010-07-15 | ||
PCT/EP2011/003468 WO2012007147A1 (de) | 2010-07-15 | 2011-07-11 | Optisches bandpass-filtersystem, insbesondere für mehrkanalige spektralselektive messungen |
Publications (2)
Publication Number | Publication Date |
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JP2013539059A true JP2013539059A (ja) | 2013-10-17 |
JP5620576B2 JP5620576B2 (ja) | 2014-11-05 |
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JP2013518986A Active JP5620576B2 (ja) | 2010-07-15 | 2011-07-11 | 特に多重チャンネルの周波数選択的測定のための光学的バンドパスフィルタシステム |
Country Status (5)
Country | Link |
---|---|
US (1) | US8879152B2 (ja) |
EP (1) | EP2593819B1 (ja) |
JP (1) | JP5620576B2 (ja) |
KR (1) | KR101455545B1 (ja) |
WO (1) | WO2012007147A1 (ja) |
Cited By (2)
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JP2015087526A (ja) * | 2013-10-30 | 2015-05-07 | 旭化成株式会社 | 赤外線用バンドパスフィルタ |
WO2019102813A1 (ja) * | 2017-11-24 | 2019-05-31 | 国立大学法人東北大学 | 選択波長反射体 |
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GB201117480D0 (en) | 2011-10-10 | 2011-11-23 | Palikaras George | Filter |
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WO2013167208A1 (de) * | 2012-05-07 | 2013-11-14 | Elmos Semiconductor Ag | Mikrooptisches filter und dessen verwendung in einem spektrometer |
DE102012016675B4 (de) | 2012-08-23 | 2015-02-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Farbkalibrierung eines Farbmonitors mit LED-Hintergrundbeleuchtung |
KR102401136B1 (ko) * | 2013-01-29 | 2022-05-24 | 비아비 솔루션즈 아이엔씨. | 가변 광 필터 및 그에 기반한 파장선택 센서 |
EP2772939B1 (en) | 2013-03-01 | 2016-10-19 | Ams Ag | Semiconductor device for detection of radiation and method of producing a semiconductor device for detection of radiation |
FR3007148B1 (fr) * | 2013-06-17 | 2016-11-25 | Centre Nat De La Rech Scient - Cnrs | Element de filtrage optique angulaire pour le filtrage angulaire a selectivite angulaire controlee |
JP6126490B2 (ja) * | 2013-08-05 | 2017-05-10 | シャープ株式会社 | 光学フィルター |
GB2523741A (en) | 2014-02-26 | 2015-09-09 | Medical Wireless Sensing Ltd | Sensor |
KR102214832B1 (ko) * | 2014-07-17 | 2021-02-10 | 삼성전자주식회사 | 광 필터 및 광 필터를 채용한 광 측정 장치 |
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WO2018038413A1 (ko) * | 2016-08-22 | 2018-03-01 | 삼성전자 주식회사 | 분광기 및 이를 이용한 스펙트럼 측정방법 |
KR102320479B1 (ko) * | 2016-08-22 | 2021-11-03 | 삼성전자주식회사 | 분광기 및 이를 이용한 스펙트럼 측정방법 |
US10914961B2 (en) | 2017-02-13 | 2021-02-09 | Viavi Solutions Inc. | Optical polarizing filter |
AU2018380006A1 (en) | 2017-12-04 | 2020-06-25 | California Institute Of Technology | Metasurface-assisted 3D beam shaping |
FR3080191B1 (fr) * | 2018-04-13 | 2022-03-11 | Office National D Etudes Et De Rech Aerospatiales | Filtre spectral de rayonnement electromagnetique |
EP3617757B1 (en) | 2018-08-27 | 2021-02-24 | CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement | Optical filter, optical filter system, spectrometer and method of fabrication thereof |
EP3633334B1 (en) | 2018-10-04 | 2022-12-28 | IMEC vzw | Spectral sensor for multispectral imaging |
KR20200108133A (ko) * | 2019-03-06 | 2020-09-17 | 삼성전자주식회사 | 이미지 센서 및 이미징 장치 |
KR20210055450A (ko) * | 2019-11-07 | 2021-05-17 | 삼성전자주식회사 | 광학 필터 및 이를 포함하는 분광기 및 전자 장치 |
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2011
- 2011-07-11 KR KR1020137000920A patent/KR101455545B1/ko active IP Right Grant
- 2011-07-11 US US13/809,949 patent/US8879152B2/en active Active
- 2011-07-11 WO PCT/EP2011/003468 patent/WO2012007147A1/de active Application Filing
- 2011-07-11 JP JP2013518986A patent/JP5620576B2/ja active Active
- 2011-07-11 EP EP11748561.5A patent/EP2593819B1/de active Active
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Also Published As
Publication number | Publication date |
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WO2012007147A1 (de) | 2012-01-19 |
KR101455545B1 (ko) | 2014-10-27 |
EP2593819B1 (de) | 2014-11-12 |
EP2593819A1 (de) | 2013-05-22 |
JP5620576B2 (ja) | 2014-11-05 |
US20130120843A1 (en) | 2013-05-16 |
US8879152B2 (en) | 2014-11-04 |
KR20130069714A (ko) | 2013-06-26 |
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