JP2013535105A - 光学システム - Google Patents
光学システム Download PDFInfo
- Publication number
- JP2013535105A JP2013535105A JP2013514678A JP2013514678A JP2013535105A JP 2013535105 A JP2013535105 A JP 2013535105A JP 2013514678 A JP2013514678 A JP 2013514678A JP 2013514678 A JP2013514678 A JP 2013514678A JP 2013535105 A JP2013535105 A JP 2013535105A
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- optical element
- electrons
- reflective optical
- flood gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/04—Irradiation devices with beam-forming means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Optical Elements Other Than Lenses (AREA)
- Microscoopes, Condenser (AREA)
Abstract
【選択図】図2a
Description
2、2’ 反射光学素子
3、3’、3’’、3a 電子源
4 EUV放射線
5 境界
21 基板
22 高反射性コーティング
23 電圧源
31、31’ フィラメント
32 電極
33 電極
34、34’ ハウジング
100 EUVリソグラフィ装置
110 ビーム整形システム
111 放射線源
112 コレクタミラー
113 モノクロメータ
120 照明システム
121、122 ミラー
123、124 荷電粒子源
130 フォトマスク
140 投影システム
141、142 ミラー
143 荷電粒子源
150 ウェーハ
Claims (10)
- EUV放射線を照射すると二次電子を放出する高反射性コーティングを有する基板を含む反射光学素子と、荷電粒子を前記反射光学素子(2)に付与できるよう配置した荷電粒子源(3)とを備え、該荷電粒子源(3)は唯一の電荷キャリア補償手段として電子を前記反射光学素子(2)に付与するフラッドガンである、EUVリソグラフィ用の光学システム。
- 請求項1に記載の光学システムにおいて、前記フラッドガン(3)を、前記反射光学素子(2)の前記高反射性コーティング(22)の境界(24)のみに電子を付与するよう配置した光学システム。
- 請求項1又は2に記載の光学システムにおいて、前記フラッドガン(3)を、前記反射光学システム(2)の前記高反射性コーティング(22)の前記境界(24)のみに完全に電子を付与するよう配置した光学システム。
- 請求項1〜3のいずれか1項に記載の光学システムにおいて、前記フラッドガン(3)を、表面法線に対して45°よりも大きな角度で前記反射光学システム(2)の表面に電子を付与するよう配置した光学システム。
- 請求項1〜4のいずれか1項に記載の光学システムにおいて、前記フラッドガンは、発熱体(31、31’)を有する熱電子フラッドガン(3、3’、3’’)であり、前記発熱体は面状素子(31’)である光学システム。
- 請求項1〜5のいずれか1項に記載の光学システムにおいて、前記高反射性コーティング(22)は多層系に基づく光学システム。
- 請求項1〜6のいずれか1項に記載の光学システムにおいて、少なくとも1つのさらなる反射光学素子(122)及び/又は少なくとも1つのさらなる反射光学素子(3a)を含む光学システム。
- 請求項1〜7のいずれか1項に記載の光学システム(1)を備えるEUVリソグラフィ用の照明システム。
- 請求項1〜7のいずれか1項に記載の光学システム(1)を備えるEUVリソグラフィ用の投影システム。
- 請求項1〜7のいずれか1項に記載の光学システム(1)を備えるEUVリソグラフィ用のEUVリソグラフィ装置。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US35455810P | 2010-06-14 | 2010-06-14 | |
DE102010030023.3 | 2010-06-14 | ||
DE102010030023A DE102010030023A1 (de) | 2010-06-14 | 2010-06-14 | Optisches System |
US61/354,558 | 2010-06-14 | ||
PCT/EP2011/059793 WO2011157684A1 (en) | 2010-06-14 | 2011-06-14 | Optical system |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013535105A true JP2013535105A (ja) | 2013-09-09 |
JP5878169B2 JP5878169B2 (ja) | 2016-03-08 |
Family
ID=44627213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013514678A Expired - Fee Related JP5878169B2 (ja) | 2010-06-14 | 2011-06-14 | 光学システム |
Country Status (6)
Country | Link |
---|---|
US (1) | US8546776B2 (ja) |
EP (1) | EP2580626A1 (ja) |
JP (1) | JP5878169B2 (ja) |
CN (1) | CN102939567B (ja) |
DE (1) | DE102010030023A1 (ja) |
WO (1) | WO2011157684A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021189215A (ja) * | 2020-05-26 | 2021-12-13 | レーザーテック株式会社 | 光学装置、及び光学装置の汚染防止方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9053833B2 (en) * | 2013-02-27 | 2015-06-09 | Kla-Tencor Technologies, Corporation | DC high-voltage super-radiant free-electron based EUV source |
DE102014221173A1 (de) * | 2014-10-17 | 2016-04-21 | Carl Zeiss Smt Gmbh | Strahlungsquellenmodul |
US9791771B2 (en) | 2016-02-11 | 2017-10-17 | Globalfoundries Inc. | Photomask structure with an etch stop layer that enables repairs of detected defects therein and extreme ultraviolet(EUV) photolithograpy methods using the photomask structure |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4680467A (en) * | 1986-04-08 | 1987-07-14 | Kevex Corporation | Electron spectroscopy system for chemical analysis of electrically isolated specimens |
JPH06267492A (ja) * | 1993-03-09 | 1994-09-22 | Mitsubishi Electric Corp | エレクトロンシャワー装置 |
JP2000047371A (ja) * | 1998-05-29 | 2000-02-18 | Seiko Instruments Inc | 集束イオンビーム装置の電荷中和方法 |
JP2005326177A (ja) * | 2004-05-12 | 2005-11-24 | Canon Inc | 光学素子の評価装置及び評価方法 |
JP2008263173A (ja) * | 2007-03-16 | 2008-10-30 | Canon Inc | 露光装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6642531B1 (en) * | 2002-12-23 | 2003-11-04 | Intel Corporation | Contamination control on lithography components |
US7015468B1 (en) | 2003-03-25 | 2006-03-21 | Kla-Tencor Technologies Corporation | Methods of stabilizing measurement of ArF resist in CD-SEM |
DE10324613A1 (de) | 2003-05-30 | 2004-12-16 | Carl Zeiss Smt Ag | Elektrodenanordnung und deren Verwendung |
GB2411763B (en) * | 2004-03-05 | 2009-02-18 | Thermo Electron Corp | Flood gun for charge neutralization |
CN1649077A (zh) * | 2004-12-23 | 2005-08-03 | 北京中科信电子装备有限公司 | 离子注入机长寿命离子源 |
US7279690B2 (en) | 2005-03-31 | 2007-10-09 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
EP1727158A3 (de) * | 2005-05-24 | 2008-07-02 | Carl Zeiss SMT AG | Optisches Element für Strahlung im EUV- und/oder weichen Röntgenwellenlängenbereich und ein optisches System mit mindestens einem optischen Element |
DE102007057252A1 (de) * | 2007-03-07 | 2008-09-11 | Carl Zeiss Smt Ag | Verfahren zur Messung der Ausgasung in EUV-Lithographievorrichtungen sowie EUV-Lithographievorrichtung |
US7671348B2 (en) * | 2007-06-26 | 2010-03-02 | Advanced Micro Devices, Inc. | Hydrocarbon getter for lithographic exposure tools |
DE102008000709B3 (de) * | 2008-03-17 | 2009-11-26 | Carl Zeiss Smt Ag | Reinigungsmodul, EUV-Lithographievorrichtung und Verfahren zu seiner Reinigung |
-
2010
- 2010-06-14 DE DE102010030023A patent/DE102010030023A1/de not_active Ceased
-
2011
- 2011-06-14 EP EP11726128.9A patent/EP2580626A1/en not_active Withdrawn
- 2011-06-14 CN CN201180029301.1A patent/CN102939567B/zh active Active
- 2011-06-14 WO PCT/EP2011/059793 patent/WO2011157684A1/en active Application Filing
- 2011-06-14 JP JP2013514678A patent/JP5878169B2/ja not_active Expired - Fee Related
-
2012
- 2012-12-13 US US13/713,978 patent/US8546776B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4680467A (en) * | 1986-04-08 | 1987-07-14 | Kevex Corporation | Electron spectroscopy system for chemical analysis of electrically isolated specimens |
JPH06267492A (ja) * | 1993-03-09 | 1994-09-22 | Mitsubishi Electric Corp | エレクトロンシャワー装置 |
JP2000047371A (ja) * | 1998-05-29 | 2000-02-18 | Seiko Instruments Inc | 集束イオンビーム装置の電荷中和方法 |
JP2005326177A (ja) * | 2004-05-12 | 2005-11-24 | Canon Inc | 光学素子の評価装置及び評価方法 |
JP2008263173A (ja) * | 2007-03-16 | 2008-10-30 | Canon Inc | 露光装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021189215A (ja) * | 2020-05-26 | 2021-12-13 | レーザーテック株式会社 | 光学装置、及び光学装置の汚染防止方法 |
Also Published As
Publication number | Publication date |
---|---|
DE102010030023A1 (de) | 2011-12-15 |
EP2580626A1 (en) | 2013-04-17 |
US20130099132A1 (en) | 2013-04-25 |
WO2011157684A1 (en) | 2011-12-22 |
JP5878169B2 (ja) | 2016-03-08 |
CN102939567B (zh) | 2016-08-17 |
CN102939567A (zh) | 2013-02-20 |
US8546776B2 (en) | 2013-10-01 |
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