JP2013251448A - Sheet peeling device and sheet peeling method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet peeling device and a sheet peeling method capable of peeling an unpeeled sheet by connecting with a peeling sheet, even if an already peeled sheet and an unpeeled sheet cannot be bonded.SOLUTION: An unpeeled sheet AS2 is peeled from a wafer body WF to obtain an already peeled sheet AS1, which is then connected to the unpeeled sheet AS2 of a next wafer WF and a tension is given thereto. When an already peeled sheet AS1 cannot be bonded to an unpeeled sheet AS2, it can be connected indirectly by a peeling sheet PS. Connection means 15 performs direct connection of an already peeled sheet AS1 and an unpeeled sheet AS2, and indirect connection of an already peeled sheet AS1 and an unpeeled sheet AS2 via a peeling sheet selectively.

Description

  The present invention relates to a sheet peeling apparatus and a peeling method, and more specifically, an aspect in which an adhesive sheet peeled from an adherend is directly connected to an adhesive sheet attached to another adherend and peeled, and for peeling The present invention relates to a sheet peeling apparatus and a peeling method that can selectively perform a mode in which sheets are interposed and indirectly connected and peeled.

A semiconductor wafer (hereinafter simply referred to as “wafer”) is attached with an adhesive sheet to protect the circuit surface, and the adhesive sheet is subjected to a predetermined process such as backside grinding of the wafer. And then peeled off.
As an apparatus for peeling such an adhesive sheet, for example, as described in Patent Document 1, the adhesive sheet affixed to a preceding wafer (preceding adherend) is peeled off to form a first sheet (peeled) The first sheet is directly connected (adhered) to a second sheet (unpeeled sheet) that is an adhesive sheet attached to another wafer (following adherend) following the preceding wafer. Then, a configuration is proposed in which the second sheet can be peeled from the adherend by pulling the first sheet.

JP 2011-228626 A

According to the sheet peeling apparatus described in Patent Document 1, since the adhesive sheet peeled off from the adherend is used for peeling another adhesive sheet, it is not necessary to prepare a separate peeling sheet, thereby reducing running costs. There is an advantage that you can.
However, the sheet peeling apparatus of Patent Document 1 may not be able to directly connect the peeled sheet and the unpeeled sheet depending on the composition, characteristics, physical properties, configuration, etc. of the adhesive sheet to be peeled. Inconvenience that the adhesive sheet cannot be peeled off.

[Object of invention]
The object of the present invention is that even if the peeled sheet and the unpeeled sheet cannot be directly connected, the adhesive sheet cannot be peeled by indirectly connecting them through the release sheet. An object of the present invention is to provide a sheet peeling apparatus and a peeling method that can prevent this.

  In order to achieve the above-mentioned object, the present invention peels off the adhesive sheet attached to the preceding adherend to form a peeled sheet, and the unexfoliated sheet, which is an adhesive sheet attached to the follow-up adherend, In the sheet peeling apparatus that peels off the unpeeled sheet by connecting the peeled sheet and applying tension to the unpeeled sheet through the peeled sheet, the adherend to which the adhesive sheet is attached is supported. Supporting means, connecting means for connecting the peeled sheet to the unpeeled sheet, recovery means capable of holding the peeled sheet, and moving the recovery means and the support means relative to each other to move the peeled sheet A tension applying unit that applies tension to the unpeeled sheet via, and further includes a release sheet supply unit that feeds the release sheet. Direct connection that directly connects the release sheet and indirect connection that indirectly connects the peeled sheet and the unpeeled sheet via the release sheet fed from the release sheet supply means are selectively performed. The configuration is to be performed.

  In this invention, the said support means can take the structure containing the holding means which can hold | maintain the peeling termination | terminus part of the said peeled sheet in a predetermined position with respect to the peeling front end part of the said unpeeled sheet.

  Further, the present invention peels off the adhesive sheet attached to the preceding adherend to form a peeled sheet, and connects the peeled sheet to an unpeeled sheet that is an adhesive sheet attached to the follow-up adherend. And supporting the adherend to which the adhesive sheet is attached in a sheet peeling method for peeling the unpeeled sheet by applying tension to the unpeeled sheet via the peeled sheet; The step of directly connecting the peeled sheet and the non-peeled sheet or the step of indirectly connecting the peeled sheet and the non-peeled sheet with a release sheet interposed therebetween is selectively performed. A step of holding the peeled sheet with a collecting means, and a step of relatively moving the collecting means and the adherend to which the adhesive sheet is attached to stretch the unpeeled sheet through the peeled sheet. It has adopted a method including the step of applying a.

According to the present invention, since the direct connection between the peeled sheet and the unpeeled sheet and the indirect connection with the peeling sheet interposed therebetween can be selectively performed, the composition, characteristics, physical properties, configuration, etc. of the adhesive sheet Even if the peeled sheet and the unpeeled sheet cannot be directly connected due to the above, it is possible to prevent the adhesive sheet from being peeled by indirectly connecting them with a peeling sheet interposed therebetween. be able to.
Moreover, the structure provided with the holding means can reliably hold the peeled sheet portion to be connected to the unpeeled sheet, and can prevent the peeled sheet and the unpeeled sheet from being bonded.

The schematic side view of a sheet peeling apparatus. Operation | movement explanatory drawing of the sheet peeling apparatus of FIG. Operation | movement explanatory drawing of the sheet peeling apparatus of FIG. 1 following FIG. Operation | movement explanatory drawing of the sheet peeling apparatus of FIG. 1 following FIG. FIG. 4 is another operation explanatory diagram of the sheet peeling apparatus of FIG. 1 following FIG. 3. FIG. 6 is another operation explanatory diagram of the sheet peeling apparatus of FIG. 1 following FIG. 5.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this embodiment, for example, when directions such as up, down, left, right, front, back, etc. are shown, all of FIG. When viewed from the appropriate orientation), the top, bottom, left, and right directions are parallel to the page, the front is the front direction perpendicular to the page, and the back is the back direction orthogonal to the page. To do.

In FIG. 1 (see FIG. 4), the sheet peeling apparatus 10 peels the adhesive sheet AS attached to the wafer WF as the preceding adherend to form a peeled sheet AS1, and is attached to the follow-up wafer WF. The unpeeled sheet AS2 is peeled off by connecting the peeled sheet AS1 to the unpeeled sheet AS2 that is the adhesive sheet AS and applying tension to the unpeeled sheet AS2 via the peeled sheet AS1.
The sheet peeling apparatus 10 includes a supporting means 11 for supporting the wafer WF to which the adhesive sheet AS is attached, a connecting means 15 for connecting the peeled sheet AS1 to the unpeeled sheet AS2, and a recovery capable of holding the peeled sheet AS1. A tension applying means 16 for applying tension to the unpeeled sheet AS2 through the peeled sheet AS1 by relatively moving the means 12, the recovery means 12 and the support means 11, and a peeling sheet capable of feeding the peeling sheet PS Supply means 17, cutting means 18 for cutting the release sheet PS to a predetermined length, detection means 19 capable of detecting whether or not the peeled sheet AS1 is held in the recovery means 12, and an unpeeled sheet AS2 And a roller 45 as a peeling posture maintaining means for maintaining the peeling posture of the sheet, and a remaining amount detecting means 50 for detecting the remaining amount of the peeling sheet PS. That. In this embodiment, a heat-sensitive adhesive release sheet PS is used.

  The support means 11 has an upper surface as an adsorption surface, and is connected to an adsorption means such as a decompression pump or a vacuum ejector (not shown) to thereby place a placement surface 21A capable of adsorbing and holding the wafer WF to which the adhesive sheet AS is adhered. As a holding means that is provided on the left side of the mounting surface 21A at the same height as the wafer WF, and that can hold the peeling end portion of the peeled sheet AS1 in a predetermined position with respect to the front peeling edge portion of the unpeeled sheet AS2. The table 21 includes a sheet holding surface 21B, and the table 21 is supported by a slider 22 of a linear motion motor LM1 as a driving device constituting the tension applying unit 16, and is relative to the collection unit 12 in the left-right direction. It is movable. The sheet holding surface 21B is provided with a right edge along the outer peripheral shape of the adhesive sheet AS or the wafer WF, and is connected to suction means such as a decompression pump or a vacuum ejector (not shown) so that the peeled sheet AS1 is peeled off. The end portion is provided so as to be capable of being sucked and held.

  The connecting means 15 has a first heat block 30 with a lower end provided in a pointed shape and a heating means such as a coil heater or an infrared heater (not shown) built therein, and the first heat block 30 in the vertical direction. A linear motion motor LM4 as a driving device to be moved, a fifth linear motion motor LM5 as a driving device provided on the left side surface of the first heat block 30, and a slider 32 of the linear motion motor LM5 are supported and illustrated inside. And a second heat block 31 in which heating means such as a coil heater and an infrared heater are incorporated. In addition, it is preferable to provide the lower end surface shape of the 1st, 2nd heat blocks 30 and 31 in the shape in alignment with the outer periphery shape of adhesive sheet AS.

  The collecting means 12 includes a rotation motor DM supported by a slider 25 of a direct acting motor LM2 as a driving device, and a direct acting motor LM3 as a driving device supported by an output shaft (not shown) of the rotation motor DM. The pair of chucks 29 are supported by the pair of sliders 27 of the linear motor LM3 and are provided so as to be separated from each other. The chuck 29 has a length that extends in the front-rear direction and exceeds the diameter of the adhesive sheet AS.

  The peeling sheet supply means 17 is supported by a linear motion motor LM6 as a driving device and a frame 33 supported by a slider (not shown) of the sixth linear motion motor LM6, and supports the peeling sheet PS so that the peeling sheet PS can be fed out. And a sheet guide plate 38 having a concave portion 38A on the upper surface and a sheet guide plate 38 that is always urged leftward by a coil spring 40 and is movable in the left-right direction via a bush 36 and a shaft 37. The sheet PS includes a lead end holding device 39 for the sheet PS. The lead end holding device 39 includes a linear motion motor LM7 as a drive device that can move the upper chuck 40 and the lower chuck 41 apart in the vertical direction and a linear motion motor LM8 as a drive device that moves the linear motion motor LM7 up and down. Has been.

  The cutting means 18 includes a cutter blade 43 fixed to a slider 42 of a linear motion motor LM9 as a driving device fixed to the first heat block 30.

  The detection means 19 is constituted by a sensor such as an optical sensor or a contact sensor attached inside one chuck 29, and determines whether or not the peeling sheet PS or the peeled sheet AS1 exists between the chucks 29. By doing so, it is possible to detect whether or not the peeled sheet AS1 is held in the collecting means 12.

  The remaining amount detecting means 50 includes a first remaining amount detecting means 50A such as an optical sensor or an imaging means for detecting that the remaining amount of the peeling sheet PS wound around the support roller 35 has decreased, and a peeling sheet. And a second remaining amount detecting means 50B such as an optical sensor or an imaging means for detecting that the final end of the PS has passed or that the peeling sheet PS has been cut.

  Next, the sheet peeling method by the sheet peeling apparatus 10 in this embodiment is demonstrated.

  First, as shown in FIG. 1, the release sheet PS is set on the release sheet supply means 17, and the operator does not show that the adhesive sheets AS can be directly connected to each other. The initial settings to be entered in are performed. In this initial setting, information is input to the control means by a touch panel (not shown) or an input button on the operation panel, and the control means selects the direct connection mode. As the adhesive sheet AS that can be directly connected, for example, a case where a resin material, a rubber material, or the like is adopted as a base material sheet of the adhesive sheet AS can be exemplified, but also in such a resin material, a rubber material, etc. Since direct connection may not be possible depending on the configuration of the connection means 15, whether or not direct connection is possible can be selected based on the experience value of the operator. Then, when the wafer WF having the adhesive sheet AS (unpeeled sheet AS2) attached thereto is placed on the table 21 stopped at the initial position indicated by the two-dot chain line in FIG. 11 drives a suction means (not shown) to hold the lower surface side of the wafer WF by suction with the suction surface 21A. When the wafer WF is sucked and held by the suction surface 21A, the tension applying unit 16 drives the linear motion motor LM1 to move the table 21 in the right direction, and the left upper end portion of the unpeeled sheet AS2 is moved to the first heat block 30. Located just below the lower left corner.

  Next, the detection means 19 determines whether or not the peeling sheet PS or the peeled sheet AS1 exists between the chucks 29 via the sensor. In the case of the first peeling of the adhesive sheet AS, the peeled sheet AS1 does not exist between the chucks 29. Therefore, the collecting means 12 that has received this information drives the linear motion motor LM2, as shown by the solid line in FIG. In the state where the chucks 29 are separated from each other, the sheet guide plate 38 is moved against the biasing force of the coil spring 40 by the chuck 29 positioned below, so that the left end region of the peeling sheet PS enters between the chucks 29. . Next, after the collecting means 12 drives the linear motion motor LM3 to sandwich the peeling sheet PS between the chucks 29, the linear motion motor LM2 is driven to move the chuck 29 to the left to keep the peeling sheet PS constant. Pull out the amount. Next, the connecting means 15 drives the linear motion motor LM4 to lower the first heat block 30 and place the release sheet PS on the upper left end of the unreleased sheet AS2, as indicated by the double chain line in FIG. Pressing and driving a heating means (not shown) to heat the peeling sheet PS and adhere the peeling sheet PS to the unpeeled sheet AS2. At this time, since the cutter blade 43 has entered the recess 38A of the guide plate 38, the cutting means 18 drives the linear motion motor LM9 and moves the cutter blade 43 in the front-rear direction to cut the peeling sheet PS. After this cutting, the cutting means 18 drives the linear motion motor LM9 to return the cutter blade 43 to the original position, and the connecting means 15 drives the linear motion motor LM4 to raise the first heat block 30.

Thereafter, the tension applying unit 16 drives the linear motor LM1, moves the table 21 in the left direction, and peels the unpeeled sheet AS2 from the wafer WF. At this time, the tension applying means 16 and the recovery means 12 synchronously drive the linear motor LM1 and the rotation motor DM, and as shown in FIG. In a state where the predetermined peeling angle αθ is maintained, the unfolded sheet AS2 is peeled while always maintaining the folded region ST having the predetermined length L. When this peeling is completed, the unpeeled sheet AS2 peeled from the wafer WF is used as a peeled sheet AS1 for subsequent peeling. Thereafter, the tension applying means 16 is shown in FIG.
The table 21 is stopped at the initial position indicated by the chain double-dashed line, and the wafer WF from which the unpeeled sheet AS2 has been peeled is transported to another process by a transport means (not shown). In addition, as shown by a double chain line in FIG. 4, the collecting means 12 does not wind up the peeled sheet AS1 with the rotation motor DM, or winds the rotation motor DM in the winding direction of the peeled sheet AS1. The peeled sheet AS1 is kept hanging from the chuck 29 by being rotated in the opposite direction.

  Thereafter, when the wafer WF to which the adhesive sheet AS (unpeeled sheet AS2) is pasted is again placed on the table 21 by a conveying means (not shown), the upper left end portion of the unpeeled sheet AS2 is first moved in the same manner as described above. The heat block 30 is positioned directly below the lower left end. At this time, the peeled sheet AS1 hanging from the chuck 29 is positioned on the unpeeled sheet AS2, as shown by the solid line in FIG. The holding means drives the suction means (not shown) so as not to fall, and sucks and holds the peeling termination portion of the peeled sheet AS1. Since the direct connection mode is selected for the control means, the recovery means 12 is not driven this time, and the connection means 15 drives the direct acting motor LM4, as shown in FIG. 1 The heat block 30 is lowered to press the peeled sheet AS1 against the upper surface of the outer periphery of the unpeeled sheet AS2, and a heating means (not shown) is driven to heat the peeled sheet AS1 and remove the peeled sheet AS1. Adhere to AS2. Thereafter, in the same manner as described above, the non-peeled sheet AS2 is peeled off, and the wafer WF from which the non-peeled sheet AS2 is peeled is transferred to another process, and thereafter the same operation as described above is repeated.

  Here, when the operator inputs to the control means (not shown) that the adhesive sheets AS cannot be directly connected to each other at the initial setting stage, the control means selects the indirect connection mode. As the adhesive sheet AS that cannot be directly connected, for example, a case where paper or metal foil or the like is adopted as the base sheet of the adhesive sheet AS can be exemplified, but also in such paper or metal foil or the like, the connection means 15 Depending on the configuration, they may be directly connectable, so whether or not indirect connection is possible can be selected based on the experience of the operator. In addition, what can be adhere | attached on the adhesive sheet AS is employ | adopted for peeling sheet PS. In such a case, after the first adhesive sheet AS is peeled off as shown in FIG. 2, the wafer WF to which the adhesive sheet AS (unpeeled sheet AS2) is pasted again by a conveying means (not shown) is attached to the table 21. When placed on the top, the left upper end of the non-peeled sheet AS2 is directly below the lower left end of the first heat block 30 with the peeled sheet AS1 hanging from the chuck 29 in the same manner as described above. To be located. Next, the collection means 12 drives the rotation motor DM, and as shown by the solid line in FIG. 5, the peeled sheet AS1 is positioned on the upper surface of the sheet adsorption surface 21B, and the peeling termination portion of the peeled sheet AS1 The peeled sheet AS1 is wound up until the front end of the unpeeled sheet AS2 faces. When it is detected by a sensor (not shown) that they are facing each other, the collecting means 12 stops driving the rotation motor DM, and the peeling end portion of the peeled sheet AS1 falls from the table 21. In order to prevent this, the holding means drives the suction means (not shown) to suck and hold the peeling terminal portion of the peeled sheet AS1.

  Thereafter, since the indirect connection mode is selected for the control means, the collection means 12 is not driven this time, and the peeling sheet supply means 17 drives the linear motion motor LM8. As shown, the upper and lower chucks 40, 41 are lowered, the linear motion motor LM6 is driven, and the frame 33 is moved to the left. As a result, the sheet guide plate 38 abuts against the right side surface of the lower chuck 41 and the coil spring 40 is compressed, so that the left end region of the peeling sheet PS enters between the upper and lower chucks 40 and 41. Next, the peeling sheet supply means 17 drives the linear motion motor LM7, sandwiches the peeling sheet PS with the upper and lower chucks 40, 41, drives the linear motion motor LM6, and moves the frame 33 to the right to move the peeling sheet. Pull out a certain amount of PS. Next, the connecting means 15 drives the linear motion motor LM4, and as shown in FIG. 6, the first heat block 30 is lowered to press the release sheet PS against the upper left end of the unreleased sheet AS2, The linear motor LM5 is driven, the second heat block 31 is lowered, the release sheet PS is pressed against the peeled rear end of the peeled sheet AS1, and the heating means (not shown) incorporated in each is driven to release. The sheet PS is heated to adhere the peeling sheet PS to the unpeeled sheet AS2 and the peeled sheet AS1. Next, after the release sheet PS is cut by the cutter blade 43 and the upper and lower chucks 40 and 41 are separated, the release sheet supply means 17 and the connecting means 15 drive the linear motors LM8 and LM4, respectively. , 41 and the first heat block 30 are raised. Thereafter, in the same manner as described above, the non-peeled sheet AS2 is peeled off, and the wafer WF from which the non-peeled sheet AS2 is peeled is transferred to another process, and thereafter the same operation as described above is repeated.

  Therefore, according to such an embodiment, even when the peeled sheet AS1 and the unpeeled sheet AS2 cannot be directly connected, they can be indirectly connected using the release sheet PS, and the adhesive sheet AS cannot be peeled off. This can be prevented.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.

  For example, the indirect connection is performed by placing the peeling termination portion of the peeled sheet AS1 on the peeling front end portion of the non-peeling sheet AS2, and bonding the peeling sheet PS to the peeled sheet AS1 and the non-peeling sheet AS2. Also good.

Further, by rotating the rotation motor DM without moving the support means 11 and moving the roller 45, or by moving the roller 45 and the support means 11 without rotating the rotation motor DM. The tension may be applied to the unpeeled sheet S2 via the peeled sheet AS1. The roller 45 may not be provided, and at least one of the chuck 29 and the support unit 11 is moved without rotating the rotation motor DM, and the chuck 29 and the support unit 11 are relatively separated from each other and are not peeled off. A tension may be applied to the sheet S2.
Further, the connecting means 15 is not limited in any way as long as it can connect the peeled sheet AS1 or the peeling sheet PS to the unpeeled sheet AS2. For example, the connecting means 15 connects them by infrared rays, microwaves, ultrasonic waves, or the like. Or a configuration in which they are connected by a double-sided adhesive sheet, a liquid adhesive, a single-sided adhesive sheet, or the like.
Further, the connecting means 15 may be configured to be connected to the non-peeled sheet AS2 by the adhesive of the peeled sheet AS1. In this case, since it is considered that the adhesive force of the adhesive of the peeled sheet AS1 is reduced, by heating the adhesive or applying a primer to the adherend surface of the unpeeled sheet AS2, You may make it improve the adhesive force of the adhesive agent of peeled sheet | seat AS1.
Further, the detecting means 19 is not particularly limited as long as it can detect whether or not the peeled sheet AS1 is held by the collecting means 12, and may be provided on both sides of the chuck 29 or the chuck 29. Alternatively, the peeled adhesive sheet AS1 may be detected on the outside, or an image sensor such as an optical sensor or a camera that detects the hanging of the peeled adhesive sheet AS1 may be used.
The holding unit only needs to be able to hold the peeling termination portion of the peeled sheet AS1, and may employ a mechanical chuck or the like in addition to the suction unit to hold the peeling termination portion of the peeled sheet AS1.
Further, the support unit 11 may be configured to hold the wafer WF by using a mechanical chuck or the like in addition to the suction unit.
In the above-described embodiment, an example in which the direct connection mode and the indirect connection mode are selected at the time of initial setting has been described. However, for example, the indirect connection mode may be selected during the operation in the direct connection mode. The direct connection mode may be selected during the operation in the indirect connection mode. Such a change of the connection mode may be input by an operator to a control means (not shown), or a peeling confirmation means such as an optical sensor or an imaging means that can detect whether or not the unpeeled adhesive sheet AS2 can be peeled off. Even if one of the direct connection mode and the indirect connection mode is selected, if the peeling confirmation means detects that the unpeeled adhesive sheet AS2 has not been peeled off, the direct connection mode and You may comprise so that the other mode with an indirect connection mode may be selected.

  Furthermore, the drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

  Moreover, the structure for supplying the sheet | seat type peeling sheet in advance may be sufficient as the peeling sheet PS other than the structure which cut | disconnects a strip | belt-shaped peeling sheet. Furthermore, the structure which peels adhesive sheet AS, without cut | disconnecting strip | belt-shaped peeling sheet PS may be sufficient. The release sheet PS may be a heat-sensitive adhesive sheet or a pressure-sensitive adhesive sheet.

  Further, the type and material of the adherend and the adhesive sheet AS in the present invention are not particularly limited. For example, the adhesive sheet AS has an intermediate layer between the base sheet and the adhesive layer, Three or more layers such as having a cover layer on the upper surface of the material sheet, and further, a so-called double-sided adhesive sheet that can peel the base material sheet from the adhesive layer may be used. The adhesive sheet may have a single layer or a multilayer intermediate layer, or may be a single layer or a multilayer without an intermediate layer. Further, the adherend may be an appropriate article (for example, food or a resin container), and the adhesive sheet AS may be a label, the adherend is a semiconductor wafer, and the adhesive sheet AS is a protective sheet, A dicing tape, a die attach film, etc. may be sufficient. At this time, the semiconductor wafer can be exemplified by a silicon semiconductor wafer, a compound semiconductor wafer, etc., and the adhesive sheet AS to be affixed to such a semiconductor wafer is not limited to them, and any use such as any sheet, film, tape, An adhesive sheet having a shape can be applied. Further, the adherend may be an optical disk substrate, and the adhesive sheet S may have a resin layer constituting a recording layer. As described above, as an adherend, not only other plate-like members such as glass plates, steel plates, earthenware, wood plates, resin plates, etc., but also members and articles in any form can be targeted.

DESCRIPTION OF SYMBOLS 10 Sheet peeling apparatus 11 Support means 12 Collecting means 15 Connection means 16 Tension providing means 17 Peeling sheet supply means 18 Cutting means 21B Sheet holding surface (holding means)
AS adhesive sheet AS1 Peeled sheet AS2 Unpeeled sheet PS Peeling sheet WF Semiconductor wafer (Substrate)

Claims (3)

An adhesive sheet affixed to a preceding adherend is peeled to form a peeled sheet, and the peeled sheet is connected to an unpeeled sheet that is an adhesive sheet affixed to a follow-up adherend, and the peeled sheet In the sheet peeling apparatus for peeling the unpeeled sheet by applying tension to the unpeeled sheet via
Support means for supporting the adherend to which the adhesive sheet is affixed;
Connecting means for connecting the peeled sheet to the unpeeled sheet;
Recovery means capable of holding the peeled sheet;
A tension applying means for applying a tension to the unpeeled sheet through the peeled sheet by relatively moving the recovery means and the support means;
It further comprises a peeling sheet supply means for feeding out the peeling sheet,
The connecting means directly connects the peeled sheet and the unpeeled sheet, and the peeled sheet and the unpeeled sheet via the peel sheet fed from the peel sheet supply means. A sheet peeling apparatus that selectively performs indirect coupling.   2. The sheet peeling apparatus according to claim 1, wherein the supporting means includes a holding means capable of holding a peeling termination portion of the peeled sheet in a predetermined position with respect to a peeling front end portion of the unpeeled sheet. An adhesive sheet affixed to a preceding adherend is peeled to form a peeled sheet, and the peeled sheet is connected to an unpeeled sheet that is an adhesive sheet affixed to a follow-up adherend, and the peeled sheet In the sheet peeling method for peeling the unpeeled sheet by applying tension to the unpeeled sheet via
Supporting the adherend to which the adhesive sheet is affixed; and
A step of directly connecting the peeled sheet and the non-peeled sheet or a step of selectively connecting the peeled sheet and the non-peeled sheet with a release sheet interposed therebetween. When,
Holding the peeled sheet with a collecting means;
And a step of applying a tension to the unpeeled sheet through the peeled sheet by relatively moving the collecting means and the adherend to which the adhesive sheet is attached.

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