JP2013238886A - Exposure device and table for exposure device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an exposure device capable of making connection strength in assembling a stage higher, the stage being in a divided state in which processing and transportation are easy, and to provide an exposure device that can be easily assembled or in which the assembled part can be easily adjusted from the divided state even after the assembly, or a liquid crystal exposure method.SOLUTION: In an exposure device, a connection table connecting a plurality of tables constituting a stage and having a hollow four-prism structure is provided; a projection is provided on a connection surface and inserted into a mating table; and the position of the projection is operated from the upper surface of the table. An air quantity in an air storage chamber provided on the connection surface is adjusted.

Description

  The present invention relates to an apparatus for manufacturing a substrate such as a display panel, and more particularly to a liquid crystal exposure apparatus that forms a pattern on a glass substrate.

  Proximity type exposure apparatuses that transfer a mask pattern onto a substrate glass by irradiating parallel light with the mask and the substrate glass being close to 1 mm or less are used for manufacturing display panels including liquid crystals. In order to improve the productivity of the liquid crystal panel, the substrate glass processed by this exposure apparatus is increasing in size so that the number of liquid crystal panels created by the exposure apparatus in one round of exposure is increased. The size is 10m (length) x 5m (width) x 8m (height), and the weight is 100 tons. When the exposure equipment is enlarged, the exposure equipment or the stage equipment that composes the exposure equipment is divided into several parts so that the weight and size of the exposure equipment are not hindered during transportation from the equipment assembly factory to the liquid crystal panel manufacturing factory. It is configured to be assembled from the finished parts.

  The following document describes the division structure of the stage apparatus of the exposure apparatus and the connection method thereof. In both Patent Documents 1 and 2, an exposure apparatus is disclosed in which a glass substrate is alternately conveyed from the left and right carry-in stages to the center exposure stage to the exposure stage for exposure. Patent Document 1 proposes a structure in which a guide stage that moves to a carry-in stage and a central exposure stage is integrated and divided into left and right so that the moving rail is not divided. Patent Document 2 proposes a configuration in which the stage is divided into three parts by a left and right carry-in stage and an exposure stage.

JP 2005-189775 A JP 2007-065588

  However, Patent Document 1 aims at increasing the efficiency of exposure by alternately exposing left and right. There is no recognition of division for the large-scale apparatus described above, and two tables are connected even when two tables are connected. However, since the moving rail is not divided, the connection is not necessary. On the other hand, Patent Document 2 recognizes division of a large apparatus, but does not disclose how to connect divided stages.

The present invention has been made with respect to the following new problems not recognized in the prior art. That is, the prior art stage apparatus is used by assembling it at the apparatus installation place after transporting the divided stage apparatus. The connection strength in this assembly depends on the strength of the screw used for the connection and the axial force generated by the screw. Since the stage used in the liquid crystal exposure apparatus is often manufactured from a casting because of its size and required strength, the unevenness of the seating surface of the screw connecting them and the inclination thereof may reduce the axial force. (First issue)
In addition, the stage apparatus has become large, and a large number of legs are required to reduce the load on the legs that support the stage apparatus. The stage device continues to move for several to ten years after assembly, but during this time, even if there is ground fluctuation in the installation location, adjusting the assembled part from the divided state is possible for many legs on the lower surface of the stage. It was difficult to make adjustments. (Second problem)
In addition to the force that shifts the connection surface up and down, the bending force acts on the assembly portion of the stage device. When the screws at the part where the stage is assembled for adjustment are loosened or tightened, this part may cause the parts to be freely displaced by this force, making adjustment difficult. (Third issue)
Accordingly, a first object of the present invention is to provide a liquid crystal exposure apparatus that is a divided stage that can be easily processed and transported, and that can increase the connection strength in assembling the stage.

  A second object of the present invention is to provide a liquid crystal exposure apparatus, a table for the exposure apparatus, or a liquid crystal exposure method that can be easily assembled or that can be easily adjusted from the divided state even after assembly. It is an object to provide a method for assembling or adjusting a side-by-side exposure apparatus.

  In order to achieve the first object, the present invention provides a plurality of tables for transporting a substrate and an exposure apparatus for printing a pattern of a mask plate on the surface of the substrate at an exposure position after transport. One table has a polygonal column structure, at least a part of which is hollow, and has a connection table having a connection surface in contact with the other two tables.

  In order to achieve the first object, in addition to the first feature, the present invention provides at least a seat for fastening screws or nuts on the inner side of the connection surface and a seat facing the seat surface. A second feature is to have a hole larger than the surface diameter.

  Furthermore, in order to achieve the first object, the present invention has a third feature that, in addition to the second feature, the seating surface is processed by a cutting means through the hole.

  In order to achieve the second object, according to the present invention, a protrusion provided on the connection surface of one of the plurality of tables having a connection surface is connected to the connection of the other table. According to a fourth aspect of the present invention, there is provided a table up / down adjustment step of inserting into a recess provided on the surface, moving the protrusion up and down from the upper surface of the other table, and adjusting the position of the one table up and down.

  Furthermore, in order to achieve the second object, in addition to the fourth feature, the present invention includes the table vertical adjustment step and the other table adjacent to the recess provided in the connection surface of the other table. The protrusion provided on the connection surface of the table is inserted into a recess provided on the connection surface of the one table adjacent to the connection surface of the one table, and According to a fifth feature of the present invention, there is provided a table vertical adjustment step in which the protrusion is moved up and down from the upper surface to adjust the position of the one table up and down.

  In order to achieve the second object, the present invention is characterized in that the amount of air in an air reservoir chamber provided on a connection surface of two of the plurality of tables is adjusted.

  According to the present invention, it is possible to provide a liquid crystal exposure apparatus that is a divided stage that can be easily processed and transported and that can increase the connection strength in assembling the stage.

  In addition, according to the present invention, a liquid crystal exposure apparatus, a table for an exposure apparatus, or a liquid crystal exposure method that can be easily assembled or can be easily adjusted from the divided state even after assembly are arranged and exposed. A method of assembling or adjusting the device can be provided.

It is a perspective view which shows one Example of the liquid-crystal exposure apparatus by this invention. It is a perspective view which shows one Example of the liquid-crystal exposure apparatus by this invention. It is a perspective view which shows the processing method of the liquid crystal exposure apparatus by this invention. It is a perspective view which shows the connection method of the conventional stage. It is a perspective view which shows another Example of the liquid-crystal exposure apparatus by this invention. It is a perspective view which shows another Example of the liquid-crystal exposure apparatus by this invention. It is sectional drawing which shows another Example of the liquid-crystal exposure apparatus by this invention. It is a perspective view which shows another Example of the liquid-crystal exposure apparatus by this invention.

The best mode for carrying out the present invention will be described below with reference to the drawings.
FIG. 1 is a perspective view showing an embodiment of a liquid crystal exposure apparatus according to the present invention. The stage 1 includes a table 10, a connection table 11, and a table 12. Six X-axis rails 20 are installed on the upper surface of the stage 1, and a linear motor stator 30 is installed opposite to the concave side portion on the upper surface of the stage 1. An X-axis movable stage 40 that moves in the X-axis direction is mounted on the X-axis rail 20, and moves on the X-axis rail 20 by a linear motor movable element that is not shown.

  Two Y-axis rails 21 are installed on the upper surface of the X-axis movable stage. Similar to the stage 1, the X-axis movable stage is provided with a linear motor stator 31 facing a concave side portion on the upper surface thereof. A Y-axis movable stage 41 is mounted on the Y-axis rail 21 and moves on the Y-axis rail 21 by a linear motor mover not shown. A mounting table 50 is mounted on the Y-axis movable stage 41, and a substrate glass is placed on this upper surface and positioned at the exposure position on the stage 1 along the X-axis rail 20 and the Y-axis rail 21. .

  The number of tables constituting stage 1 is based on the scale of stage 1, the number of stators 30 and 31 is set according to the operation purpose of the movable stage, and the number of X-axis rails 20 and Y-axis rails 21 is set on the rails. In view of the applied load, the present invention is not limited to the above description, and can be increased or decreased.

  FIG. 2 shows a state in which the stage 1 is composed of the tables 10 and 12 and the connection table 11 in the apparatus of FIG. 1, and the table 10 is removed for explanation. The connection table 11 and the table 12 are fastened using a plurality of fastening screws 60 in the space 70 inside the connection table 11. As shown in the blow-out view of FIG. 2, the neck 60a of the fastening screw 60 is on a screw seat surface 61 that is countersunk as will be described later with reference to FIG. The screw 60 does not loosen. Further, since the screw seat surface 61 is formed so as to be parallel to the surface of the screw neck lower portion 60a, the axial force of the fastening screw 60 can be fastened without decreasing. Further, in this embodiment, the fastening is performed without using a washer as a dust-proof measure, but it can still have a sufficient fastening force.

  FIG. 3 shows a method of processing the screw seat surface 61 in the space 70 in the connection table 11. As described above, if the seat surface of the screw is uneven or inclined, the axial force may be reduced, and it is necessary to make the seat surface without a flat inclination. Due to the size of the stage used for the currently required liquid crystal exposure apparatus and the required strength, the size of the surface processing machine head itself is close to 1 m, and even if there is a space for a person to enter, the space 70 of the connection table 11 is sufficient. The work of forming the seating surface cannot be performed.

  Therefore, in this embodiment, a machining hole 62 corresponding to the screw seat surface 61 is provided on the connection surface 15 of the connection table 11 (see also FIG. 2), and the machining drill 14 mounted on the head of the surface machining machine is provided. The screw seat surface 61 is processed by insertion.

  That is, the connection table 11 is mounted on the surface processing machine bed 13, and a processing hole 62 is provided on the connection surface 15 of the connection table 11, and the processing hole 62 is provided at a position facing the screw seat surface 61 to be processed. The diameter of the processing drill 14 is such that the machining drill 14 can pass through the connection surface 15 of the connection table 11. As shown in FIG. 3, the processing holes 62 are provided on the connection surface 15 in the left and right directions (up and down when connected in FIG. 2) and in rows. Therefore, the processing drill 14 is passed through the processing hole 62 to process the screw seat surface 61 on the inner surface 16 in the space 70 of the connection table 11. The screw seat surface processing is performed on all the processing holes 62 provided on the connection surface 15 as shown in FIG. As a result, the screw seat surface 61 is formed in a row on the inner surface 16 corresponding to the row of the processing holes 62.

  As shown in FIG. 1, when connecting other tables to both side surfaces of the connection table 11, the seating surfaces of the other connection surfaces 15 are similarly processed. In this embodiment, in this case, the screw seat surface 61 and the processing hole 62 are processed so as to be alternately arranged in a line on the inner surface 16 in the space 70 of the connection table 11.

  FIG. 4 shows a conventional connection method. Conventionally, a work hole 64 is provided in one table 17 and the portion and an end thereof are connected by a fastening screw 60. In such a conventional connection, the work hole 64 for tightening the fastening screw 60 cannot be made large in order to ensure the strength of the table 17. As a result, the processing hole as in the present embodiment cannot be provided in the table 17, and the seating surface is not processed without being flat and inclined. Further, the work space by the work hole 64 is insufficient, and the screw tightening work of the screw (not shown) on the bottom surface of the work hole 64 is difficult.

  On the other hand, according to the present embodiment, the seating surface can be machined flat and without inclination by first providing the machining hole, and therefore, the necessary connection strength can be secured with a small screw. Further, since the number of screw fastenings can be increased, the connection strength is increased. Further, even if vibration occurs, the resonance frequency determined between the screws can be set to a high frequency with small vibration energy. As a result, when the table 10 and the table 12 are connected by using the connection table 11, the deformation is small when the X-axis movable stage moves on the stage 1 because of high earthquake resistance. Positioning of the substrate glass to be mounted can be made accurate, and an exposure apparatus with high accuracy can be provided.

  Further, according to the present embodiment, depending on the size of the exposure apparatus, it can be performed in the space 70 of the connection table 11 and the screw tightening work is easy, so that the workability in the production of the stage 1 can be improved. Can provide an expensive method.

  Furthermore, in the said Example, although the space 70 of the connection table 11 was provided, if a partition is installed in the center of the connection table 11 so that two spaces 70 may be installed in the right and left of the connection table 11 and the connection table 11, The bending rigidity of the connection table 11 can be further improved. As a result, an exposure apparatus with higher accuracy can be provided.

  In the above embodiment, the fastening is performed with a screw, but it may be performed with a nut or the like having a similar function.

  FIG. 5 is a perspective view showing another embodiment of the liquid crystal exposure apparatus according to the present invention. The present embodiment relates to a configuration and method for aligning the tables 10 and 12 and the connection table 11 to eliminate the step and to reduce the bending of the X-axis rail 20.

  As shown in FIG. 5, the stage 1 includes three tables 10, a connection table 11, and a table 12. The three tables 10, 11, and 12 are supported by legs 111 to 118 and the like (with other legs not shown). The tables 10 and 12 are fastened with a plurality of fastening screws 60 through the connection table 11 as shown in the previous embodiment. The X-axis movable stage and the like installed on the stage 1 shown in FIG. 1 are not shown for easy understanding.

  Since the table 10 and the connection table 11 and the connection tables 11 and 12 are provided with the X-axis rail 20 on the upper surface, if there is a step on the table connection end surface, the X-axis rail 20 bends along the step. When the X-axis movable table 40 is positioned at a portion where the X-axis rail 20 is bent, the X-axis movable table 40 is displaced in accordance with the bending of the X-axis rail 20, so that the substrate glass mounted on the mounting table 50 is positioned. In some cases, errors occurred.

  Conventionally, the steps of the table 10 and the connection table 11 and between the connection tables 11 and 12 are connected using the height adjustment mechanism of the legs 111 to 118. However, in this method, it is difficult to move only the end face to be adjusted, and when the step between the tables is adjusted with any one leg, the connected tables move together. In particular, when lowering the table end surface, even if the height of the legs is lowered, there is a large frictional force on the connection surface of the table, so it cannot be lowered, and it is necessary to loosen the screws that connect the table significantly. When the screws that connect the tables were loosened significantly, gaps might be created between the tables, and after adjusting the level difference, tightening the screws that connected the tables changed the posture of the table.

  The present embodiment is another embodiment of the present invention for solving these problems, and will be described with reference to FIGS.

  As shown in FIG. 5, on the upper surfaces of the table 10 and the connection table 11, alignment screws 81, 82 and 85, 86 for performing alignment in the height direction between the tables (hereinafter simply referred to as alignment) are provided. Is provided. Similarly, alignment screws 83, 84 and 87, 88 are provided on the upper surfaces of the connection table 11 and the table 12.

  FIG. 6 is a view for explaining a configuration for aligning the table 10 and the connection table 11 or the connection tables 11 and 12 in the stage 1 in FIG. 5, and a fastening screw 60 (not shown). It shows the state where the fastening by is removed.

  In this embodiment, the table 10 and the connection table 11 are aligned by aligning the alignment protrusions 91 and 92 provided on the connection surfaces of the tables 10 and 11 with the connection surface of the table facing the alignment protrusions 91 and 92, respectively. Insert into the alignment holes 93 and 94 provided, and insert the alignment screws 85 and 86 into the alignment screw holes 101 and 102 provided in the alignment protrusions 91 and 92 from the upper surface of the table 10 and the connection table 11. This is accomplished by providing a fastening mechanism on both ends of the connection surface.

  In the above description, the alignment hole 93 is made slightly larger than the alignment protrusion 91, and the alignment protrusion 91 can move freely in the alignment hole 93, that is, the table 10 is relative to the connection table 11. Can be moved for alignment. Similarly, the alignment hole 94 is made slightly larger than the alignment protrusion 92, and the alignment protrusion 92 can move freely within the alignment hole 94, that is, the connection table 11 is relative to the table 10. Can be moved for alignment.

  FIG. 7 shows a cross-sectional view including alignment screws 85 and 86 for explaining a method of aligning the table 10 and the connection table 11 or the connection tables 11 and 12 with the above-described mechanism. .

  As described above, the alignment screw 85 is installed on the upper surface of the table 10, and the tip screw portion is connected to the alignment screw hole 102 at the tip of the projection 92 of the connection table 11. An alignment screw 86 is installed on the upper surface, and the tip screw portion is connected to the alignment screw hole 101 at the tip of the alignment protrusion 91 of the table 10.

  In the alignment of the upper surface of the table 10 and the connection table 11, for example, when the alignment screw 85 on the upper surface of the table 10 is tightened, the alignment protrusion 92 of the connection table 11 is pulled toward the table 10. The upper surface of 11 rises. When the alignment screw 86 on the upper surface of the connection table 11 is tightened, the alignment protrusion 91 of the table 10 is pulled toward the connection table 11, so that the upper surface of the table 10 rises with respect to the connection table 11. Therefore, the alignment of the upper surfaces of the tables 10 and 11 is achieved by cooperatively adjusting the four alignment screws 85, 86, 81 and 82, which are aligned with the alignment screws 81 and 82 provided on the opposite side of the connection surface. By doing so, the step on the upper surface of both tables can be eliminated. After fastening with the fastening screws, a sufficient fastening force is maintained, so there is no need to adjust the height of each leg 111 or 112 under the stage in order to eliminate the step on the upper surface of both tables. It is sufficient to make the weight evenly or adjust the floating leg.

  Next, by aligning the upper surfaces of the connection tables 11 and 12, similarly, the alignment of the three tables 10, 11, and 12 can be completed.

  In the above, once both tables are fixed with the fastening screws 60 etc., it is clear that both tables do not move, and after adjustment, the tables are prevented from moving inadvertently by tightening both screws. Can do.

  According to the present embodiment, alignment of the upper surfaces of the tables 10 and 11 is merely tightening the screws 85 or 86, and the legs 111 and 112 below the stage need only be simply adjusted at the end. In particular, since the size of the table becomes large and it is difficult to align the upper surface between both tables simply by operating the legs on the lower surface of the central portion of the table, adjustment by this method is useful.

  Further, since adjustment force is generated only between the tables 10 and 11 to be adjusted, tables other than the intended purpose do not move carelessly, and adjustment work is facilitated.

  In particular, even when the table size is increased, this adjustment mechanism is installed to pull down one of the table surfaces, which conventionally relies on the downward force due to the table's own weight on the top surface of the table for alignment between the tables. It is only necessary to operate the screws, and fixing after adjustment is only required to tighten all the screws, and the adjustment work can be facilitated.

  In the embodiment shown in FIGS. 5 to 7, the table is provided with a protrusion and a hole for receiving the opposite protrusion. However, it is clear that the same effect can be obtained even if the table protrusion is installed on the side of the table. is there. The number of tables constituting the stage is three in this embodiment, but is not limited to this, and more tables can be connected.

  In the above-described embodiment, the protrusion is operated with a screw, but other methods may be used as long as the method can be operated from the upper surface of the table without being limited to the screw.

  FIG. 8 is a perspective view showing another embodiment of the liquid crystal exposure apparatus according to the present invention. This embodiment further facilitates the alignment of the tables 10 and 12 and the connection table 11, and reduces the friction of the connection surface when adjusting the alignment, and increases the friction after adjusting the alignment. The present invention relates to a structure and method for fixing firmly.

  In FIG. 8, for convenience of explanation, the tables 10 and 11 show a state where the fastening by the fastening screw 60 is removed. At least one friction adjustment recess 120 is provided on the connection surface 15 of the connection table 11, and when the connection table 11 is connected to the table 10, an air hole 121 is provided through which air connecting the recess 120 and the outside can pass. Yes. The air hole 121 is connected to a connection part 122 that allows high-pressure air to pass through using a pipe.

  After the table 10 and the connection table 11 are connected, when the upper surfaces of both tables are aligned, high-pressure air is injected through the connection portion 122. For example, when high pressure air of 40 kgf per square centimeter is injected into the area of 3000 square centimeters of the friction adjustment recess 120, a force is generated to expand the connection surface between the table 10 and the connection table 11 with a force of 120,000 kgf in the entire recess. This force reduces the fastening force by the fastening screw 60 on the connection surface. There is friction on the connection surface, and when the fastening force decreases, the force to move the table in the connection surface inward direction decreases, so that the alignment operation of the table upper surface by the alignment screws 85, 86, etc. becomes easy.

  The connection between the table 10 and the connection table 11 or between the connection tables 11 and 12 uses a lot of fastening screws 60 to reduce deformation at the connection portion when the stage 1 is used. Start with the work of loosening the screw 60. The degree of loosening of the fastening screw 60 becomes a problem. The reason is that, in this work, if the screw 60 is completely loosened, the frictional force between the tables disappears and the work of aligning the upper surface of the table becomes easy. However, if a bending moment force is applied to the table, the V There may be gaps in the shape. When the screw 60 is tightened again after the positioning of the table upper surface is completed, this gap disappears, but the table is moved so as to be tilted, so that it is displaced at a portion other than the connection surface of the table.

  Therefore, if this embodiment is applied, the table top surface alignment operation can be performed while the axial force remains without completely loosening the fastening screw 60, so that the tilt of the table can be reduced. Even if the fastening screw 60 is tightened again, the table does not move as if tilted as described above, and the operation can be easily performed.

  Further, the smaller the volume of the friction adjustment recess 120, the smaller the amount of air injected here. If a plate thinner than the depth of the friction adjustment recess 120 is placed in the friction adjustment recess 120 to reduce the volume, the load on the pump can be reduced and a small pump can be used, thereby improving workability on the site. There is an effect that can be. Further, the same effect can be obtained even if an O-ring is installed so as to surround the friction adjustment recess 120 and air escape from the friction adjustment recess 120 is reduced.

  Further, in contrast to injecting high-pressure air into the friction adjustment recess 120, the air in the friction adjustment recess 120 is extracted to generate a negative pressure, so that the table connection by the negative pressure in addition to the fastening force of the fastening screw 60 can be achieved. The strength can be further increased. In particular, by switching to the negative pressure immediately after the alignment of the table upper surface is completed, it is possible to prevent the table alignment from changing in the time until the screw fastening is completed.

  Furthermore, if the air is surrounded by an O-ring so that air does not flow from the outside into the friction adjustment recess 120 and a valve is provided at the connection portion 122, after the alignment of the table top surface is completed, the air is once extracted to be used as an exposure apparatus. It is possible to easily maintain the effect while using the stage.

  Although the connection table 11 is used in this embodiment, when the tables 10 and 12 are directly connected as in the conventional example shown in FIG. 4, a friction adjustment recess is provided on at least one of the tables on the connection surface. Even if this embodiment is applied, the effects of this embodiment can be obtained.

  The present invention can be applied to a display panel using a large thin substrate regardless of a liquid crystal substrate.

DESCRIPTION OF SYMBOLS 1: Stage 10, 12, 13: Table 11: Connection table 13: Surface processing machine bed 14: Processing drill 15: Connection surface of connection table 16: Inner surface in space of connection table 20: X-axis rail 21: Y-axis rail 30, 31: Linear motor stator 40: X-axis movable stage 41: Y-axis movable stage 50: Mounting table 60: Fastening screw 61: Screw seat surface 62: Processing hole 70: Space inside connection table 81-88: Alignment screw 91, 92: Alignment protrusion 93, 94: Alignment hole 101, 102: Alignment screw hole 111-118: Leg 120: Friction adjustment dent 121: Air hole 122: Connection part.

Claims (12)

A first table;
A second table connected to the first table,
The first table has a recess for adjusting friction,
An exposure apparatus in which high-pressure gas is supplied to the friction adjustment recess when alignment between the first table and the second table is performed. The exposure apparatus according to claim 1,
An exposure apparatus in which the high-pressure gas is supplied via a connection portion formed on a surface of the first table facing a back surface of a surface connected to the second table. The exposure apparatus according to claim 1 or 2,
An exposure apparatus in which a plurality of the recesses are formed on the first table. In the exposure apparatus according to claim 1 or 3,
An exposure apparatus having a fastening screw around the recess. In the exposure apparatus according to claim 1 or 4,
An exposure apparatus having a plate thinner than the depth of the recess in the recess. In the exposure apparatus according to claim 1 or 5,
An exposure apparatus having a sealing member for preventing inflow of air from the outside around the recess. A first table;
A second table connected to the first table,
The first table has a recess for adjusting friction,
A table for an exposure apparatus in which a high-pressure gas is supplied to the friction adjustment recess when the first table and the second table are aligned. The table for an exposure apparatus according to claim 7,
A table for an exposure apparatus to which the high-pressure gas is supplied via a connection portion formed on a surface facing the back surface of the surface where the first table is connected to the second table. The table for an exposure apparatus according to claim 7 or 8,
A table for an exposure apparatus in which a plurality of the recesses are formed in the first table. The table for an exposure apparatus according to claim 7 or 9,
A table for an exposure apparatus having a fastening screw around the recess. The table for an exposure apparatus according to claim 7 or 10,
A table for an exposure apparatus having a plate thinner than the depth of the recess in the recess. The table for an exposure apparatus according to claim 7 or 11,
A table for an exposure apparatus having a sealing member for preventing inflow of air from outside around the recess.

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