JP2013234997A - Encoder device, optical device and exposure device - Google Patents

Encoder device, optical device and exposure device Download PDF

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JP2013234997A
JP2013234997A JP2013095352A JP2013095352A JP2013234997A JP 2013234997 A JP2013234997 A JP 2013234997A JP 2013095352 A JP2013095352 A JP 2013095352A JP 2013095352 A JP2013095352 A JP 2013095352A JP 2013234997 A JP2013234997 A JP 2013234997A
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diffracted light
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Zhigiang Liu
志強 劉
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Nikon Corp
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Abstract

PROBLEM TO BE SOLVED: To suppress reduction in signal intensity of interference light with respect to a height change of a grating pattern surface when measuring by use of a diffraction grating.SOLUTION: An encoder measuring a relative movement amount of a first member 6 and a second member 7 comprises: a diffraction grating 12 that is provided at the first member 6; a polarizing beam splitter (PBS) member 24X that is provided at the second member 7 and allows measurement light MX to enter the diffraction grating 12 almost vertically; and reflection parts 25XA and 25XB that are provided so as to interpose the PBS member 24X therebetween and be displaced in a Y direction, allow diffraction light beams DX1 and DX2 generated from the diffraction grating 12 to enter the diffraction grating 12 and allow diffraction light beams EX1 and EX2 generated from the diffraction grating 12 to enter the PBS member 24X. Thus, interference light beams of the diffraction light beams EX1 and EX2 and reference light beams are detected.

Description

本発明は、相対移動する部材間の相対移動量を計測するエンコーダ装置、このエンコーダ装置を備える光学装置及び露光装置、並びにこの露光装置を用いたデバイス製造方法に関する。   The present invention relates to an encoder apparatus for measuring a relative movement amount between relatively moving members, an optical apparatus and an exposure apparatus including the encoder apparatus, and a device manufacturing method using the exposure apparatus.

半導体素子等の電子デバイス(マイクロデバイス)を生産するためのフォトリソグラフィ工程で用いられる、いわゆるステッパー又はスキャニングステッパーなどの露光装置においては、従来より、露光対象の基板を移動するステージの位置計測はレーザ干渉計によって行われていた。ところが、レーザ干渉計では、計測用ビームの光路が長く、かつ変化するため、その光路上の雰囲気の温度揺らぎに起因する計測値の短期的な変動が無視できなくなりつつある。   In an exposure apparatus such as a so-called stepper or scanning stepper used in a photolithography process for producing an electronic device (microdevice) such as a semiconductor element, the position measurement of a stage that moves a substrate to be exposed has conventionally been a laser. It was done by an interferometer. However, in the laser interferometer, since the optical path of the measurement beam is long and changes, short-term fluctuations in measured values due to temperature fluctuations in the atmosphere on the optical path are becoming difficult to ignore.

そこで、例えばステージに固定された回折格子にレーザ光よりなる計測光を照射し、回折格子から発生する回折光と他の回折光又は参照光との干渉光を光電変換して得られる検出信号から、その回折格子が設けられた部材(ステージ等)の相対移動量を計測する、いわゆるエンコーダ装置(干渉型エンコーダ)も使用されつつある(例えば特許文献1参照)。このエンコーダ装置は、レーザ干渉計に比べて計測値の短期的安定性に優れるとともに、レーザ干渉計に近い分解能が得られるようになってきている。   Therefore, for example, from a detection signal obtained by irradiating the diffraction grating fixed to the stage with measurement light made of laser light and photoelectrically converting interference light between the diffracted light generated from the diffraction grating and other diffracted light or reference light A so-called encoder device (interference encoder) that measures the relative movement amount of a member (such as a stage) provided with the diffraction grating is also being used (see, for example, Patent Document 1). This encoder device is excellent in short-term stability of measurement values as compared with a laser interferometer, and has a resolution close to that of a laser interferometer.

国際公開第2008/029757号パンフレットInternational Publication No. 2008/029757 Pamphlet

従来のエンコーダ装置は、回折格子から発生する回折光を平面ミラー等で反射しているため、回折格子の格子パターン面の高さが変化すると、その回折光が他の回折光又は参照光に対して相対的にシフトして、干渉光の信号強度が低下する恐れがあった。
本発明の態様は、このような課題に鑑み、回折格子を用いて相対移動量を計測する際に、格子パターン面の高さ変化が生じたときの干渉光の信号強度の低下を抑制することを目的とする。
Since the conventional encoder device reflects the diffracted light generated from the diffraction grating by a flat mirror or the like, when the height of the grating pattern surface of the diffraction grating changes, the diffracted light is compared with other diffracted light or reference light. The signal intensity of the interference light may decrease.
In view of such a problem, the aspect of the present invention suppresses a decrease in the signal intensity of the interference light when a height change of the grating pattern surface occurs when measuring the relative movement amount using the diffraction grating. With the goal.

本発明の第1の態様によれば、第1部材と該第1部材に対して少なくとも第1方向に相対移動可能に支持された第2部材との相対移動量を計測するエンコーダ装置が提供される。このエンコーダ装置は、その第1部材に設けられ、少なくともその第1方向を周期方向とする格子パターンを有する反射型の回折格子と、計測光を射出する光源部と、その第2部材に設けられ、その計測光をその回折格子の格子パターン面に概ね垂直に入射させる第1光学部材と、その第2部材に設けられるとともに、その計測光によってその回折格子からその第1方向に関して発生する第1回折光をその回折格子に入射させ、その第1回折光によってその回折格子から発生する第2回折光をその第1光学部材に入射させる第1反射部と、その第1光学部材に関してその第1反射部に対向するように、かつその第1方向に直交する方向に位置ずれしてその第2部材に設けられるとともに、その計測光によってその回折格子からその第1方向に関して発生するその第1回折光と異なる次数の第3回折光をその回折格子に入射させ、その第3回折光によってその回折格子から発生する第4回折光をその第1光学部材に入射させる第2反射部と、その第1光学部材を介したその第2回折光及びその第4回折光と他の光束との干渉光をそれぞれ検出する第1及び第2光電検出器と、その第1及び第2光電検出器の検出信号を用いてその第1部材とその第2部材との相対移動量を求める計測部と、を備えるものである。   According to the first aspect of the present invention, there is provided an encoder apparatus for measuring a relative movement amount between a first member and a second member supported so as to be relatively movable in at least a first direction with respect to the first member. The The encoder device is provided in the first member, and is provided in a reflective diffraction grating having a grating pattern having a periodic direction at least in the first direction, a light source unit that emits measurement light, and a second member. A first optical member that causes the measurement light to enter the grating pattern surface of the diffraction grating substantially perpendicularly, and a first optical member that is provided on the second member and that is generated from the diffraction grating in the first direction by the measurement light. A first reflecting portion that causes the diffracted light to enter the diffraction grating and causes the second diffracted light generated from the diffraction grating to be incident on the first optical member by the first diffracted light, and the first optical member with respect to the first optical member. It is provided on the second member so as to face the reflecting portion and is displaced in the direction orthogonal to the first direction, and from the diffraction grating to the first direction by the measurement light. The third diffracted light having an order different from that of the first diffracted light generated is incident on the diffraction grating, and the fourth diffracted light generated from the diffraction grating by the third diffracted light is incident on the first optical member. First and second photoelectric detectors for detecting the second diffracted light, the second diffracted light and the fourth diffracted light through the first optical member, and the interference light of the other light flux, respectively, and the first And a measuring unit for obtaining a relative movement amount between the first member and the second member using a detection signal of the second photoelectric detector.

また、第2の態様によれば、第1の態様のエンコーダ装置と、対象物用の光学系と、を備える光学装置が提供される。
また、第3の態様によれば、パターンを被露光体に露光する露光装置であって、フレームと、その被露光体を支持するとともにそのフレームに対して少なくとも第1方向に相対移動可能なステージと、少なくともその第1方向へのそのフレームとそのステージとの相対移動量を計測するための第1の態様のエンコーダ装置と、を備える露光装置が提供される。
Moreover, according to the 2nd aspect, an optical apparatus provided with the encoder apparatus of a 1st aspect and the optical system for objects is provided.
According to the third aspect, there is provided an exposure apparatus that exposes a pattern onto an object to be exposed, the stage supporting the frame and the object to be exposed and movable relative to the frame in at least the first direction. And an encoder apparatus according to a first aspect for measuring a relative movement amount of the frame and the stage in the first direction at least.

また、第4の様態によれば、リソグラフィ工程を含み、そのリソグラフィ工程で第3の態様の露光装置を用いて物体を露光するデバイス製造方法が提供される。   Moreover, according to the 4th aspect, the device manufacturing method which exposes an object using the exposure apparatus of a 3rd aspect in the lithography process including the lithography process is provided.

本発明の態様によれば、第1反射部により第1回折光を回折格子に入射させ、第2反射部により第3回折光を回折格子に入射させているため、その第1反射部材に対するその回折格子の格子パターン面の相対的な高さが変化しても、第1回折光及び第3回折光によって回折格子から発生する第2回折光及び第4回折光と他の光束との相対的なシフト量が低減される。従って、回折格子の格子パターン面の高さの変化に対して干渉光の信号強度の低下を抑制でき、計測精度を高く維持できる。   According to the aspect of the present invention, the first diffracted light is incident on the diffraction grating by the first reflecting portion, and the third diffracted light is incident on the diffraction grating by the second reflecting portion. Even if the relative height of the grating pattern surface of the diffraction grating changes, the relative relationship between the second diffracted light and the fourth diffracted light generated from the diffraction grating by the first diffracted light and the third diffracted light and the other light fluxes. Shift amount is reduced. Accordingly, it is possible to suppress a decrease in the signal intensity of the interference light with respect to a change in the height of the grating pattern surface of the diffraction grating, and to maintain high measurement accuracy.

第1の実施形態に係るエンコーダを示す平面図である。It is a top view which shows the encoder which concerns on 1st Embodiment. (A)は図1中のX軸の干渉計部の要部を示す斜視図、(B)は図2(A)中の計測光及び回折光の照射位置を示す平面図、(C)は計測光及び参照光の開き角の説明図である。(A) is a perspective view showing the main part of the X-axis interferometer section in FIG. 1, (B) is a plan view showing the irradiation position of the measurement light and diffracted light in FIG. 2 (A), (C) is It is explanatory drawing of the opening angle of measurement light and reference light. (A)は図2(A)のX軸の干渉計部におけるX方向の±1次回折光の光路を示す図、(B)はY軸の干渉計部における±1次回折光の光路を示す図である。FIG. 2A is a diagram showing the optical path of ± first-order diffracted light in the X direction in the X-axis interferometer section of FIG. 2A, and FIG. 2B is a diagram showing optical paths of ± first-order diffracted light in the Y-axis interferometer section. It is. (A)は図2(A)のX軸の干渉計部において格子パターン面の相対的な高さが変化したときの回折光の光路の変化を示す図、(B)は格子パターン面が相対的に傾斜したときの回折光の光路の変化を示す図である。(A) is a figure which shows the change of the optical path of a diffracted light when the relative height of a grating | lattice pattern surface changes in the interferometer part of the X-axis of FIG. 2 (A), (B) is a relative grating | lattice pattern surface. It is a figure which shows the change of the optical path of the diffracted light when it inclines periodically. (A)は第1変形例に係るX軸の干渉計部の要部を示す図、(B)は図5(A)中のルーフミラーを示す斜視図である。(A) is a figure which shows the principal part of the interferometer part of the X-axis which concerns on a 1st modification, (B) is a perspective view which shows the roof mirror in FIG. 5 (A). 第1変形例に係る検出ヘッドの一部を示す平面図である。It is a top view which shows a part of detection head which concerns on a 1st modification. 第2の実施形態に係る露光装置の概略構成を示す図である。It is a figure which shows schematic structure of the exposure apparatus which concerns on 2nd Embodiment. 図7のウエハステージに設けられた回折格子及び複数の検出ヘッドの配置の一例を示す平面図である。FIG. 8 is a plan view illustrating an example of an arrangement of a diffraction grating and a plurality of detection heads provided on the wafer stage of FIG. 7. 図7の露光装置の制御系を示すブロック図である。It is a block diagram which shows the control system of the exposure apparatus of FIG. 電子デバイスの製造方法の一例を示すフローチャートである。It is a flowchart which shows an example of the manufacturing method of an electronic device.

[第1の実施形態]
本発明の第1の実施形態につき図1〜図4(B)を参照して説明する。図1は本実施形態に係るエンコーダ10を示す平面図である。図1において、一例として、第1部材6に対して第2部材7は3次元的に相対移動可能に配置され、第2部材7の互いに直交する相対移動可能な2つの方向に平行にX軸及びY軸を取り、X軸及びY軸によって規定される平面(XY面)に直交する相対移動方向に沿ってZ軸を取って説明する。また、X軸、Y軸、及びZ軸に平行な軸の回りの角度をそれぞれθx、θy、及びθz方向の角度とも呼ぶこととする。
[First Embodiment]
A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a plan view showing an encoder 10 according to the present embodiment. In FIG. 1, as an example, the second member 7 is arranged so as to be relatively movable in three dimensions with respect to the first member 6, and the X axis is parallel to two directions of the second member 7 that are relatively movable relative to each other. The Z axis is taken along the relative movement direction perpendicular to the plane (XY plane) defined by the X axis and the Y axis. In addition, the angles around axes parallel to the X axis, the Y axis, and the Z axis are also referred to as angles in the θx, θy, and θz directions, respectively.

図1において、エンコーダ10は、第1部材6の上面に固定された、XY面にほぼ平行な平板状の2次元の回折格子12と、第2部材7に固定された検出ヘッド14と、検出ヘッド14に計測用のレーザ光を供給するレーザ光源16及び光ファイバ17と、検出ヘッド14で生成される複数の干渉光を伝送する光ファイバ39XA,39XB,39YA,39YB,39Cと、光ファイバ39XA〜39Cを介して供給される複数の干渉光を受光して検出信号を出力するフォトダイオード等の光電センサ40XA,40XB,40YA,40YB,40Cと、それらの検出信号を処理して第1部材6に対する第2部材7のX方向、Y方向、及びZ方向の3次元の相対移動量を求める計測演算部42と、を有する。検出ヘッド14は、回折格子12に計測光を照射し、回折格子12からX方向に発生する複数の回折光と参照光との複数の干渉光を生成するX軸の干渉計部15Xと、回折格子12に計測光を照射し、回折格子12からY方向に発生する複数の回折光と参照光との複数の干渉光を生成するY軸の干渉計部15Yと、その他の光学部材と、複数の光学部材を支持するために第2部材7に固定されるとともに、内部に光束を通過させる複数の開口が形成された支持部材35X及び35Yと、を有する。   In FIG. 1, an encoder 10 includes a flat plate-like two-dimensional diffraction grating 12 fixed to the upper surface of a first member 6 and substantially parallel to the XY plane, a detection head 14 fixed to the second member 7, and a detection. Laser light source 16 and optical fiber 17 for supplying measurement laser light to head 14, optical fibers 39XA, 39XB, 39YA, 39YB, 39C for transmitting a plurality of interference lights generated by detection head 14, and optical fiber 39XA Photosensors 40XA, 40XB, 40YA, 40YB, 40C, such as photodiodes, which receive a plurality of interference lights supplied through -39C and output detection signals, and process these detection signals to process the first member 6 A measurement calculation unit 42 for obtaining a three-dimensional relative movement amount of the second member 7 in the X direction, the Y direction, and the Z direction. The detection head 14 irradiates the diffraction grating 12 with measurement light, generates an X-axis interferometer unit 15X that generates a plurality of interference lights of a plurality of diffraction lights generated in the X direction from the diffraction grating 12 and a reference light, and a diffraction Y-axis interferometer unit 15Y that irradiates measurement light onto grating 12 and generates a plurality of interference lights of a plurality of diffracted lights generated from diffraction grating 12 in the Y direction and a reference light, other optical members, a plurality of And supporting members 35X and 35Y, which are fixed to the second member 7 to support the optical member, and in which a plurality of openings through which the light beam passes are formed.

回折格子12のXY面にほぼ平行な格子パターン面12bには、X方向及びY方向に所定の周期(ピッチ)pを持ち、位相型でかつ反射型の2次元の格子パターン12aが形成されている。格子パターン12aのX方向、Y方向の周期pは、一例として100nm〜4μm程度(例えば1μm周期)である。なお、格子パターン12aのX方向、Y方向の周期が互いに異なっていてもよい。格子パターン12aは、例えばホログラム(例えば感光性樹脂に干渉縞を焼き付けたもの)として、又はガラス板等に機械的に溝等を形成して反射膜を被着することで作製可能である。さらに、格子パターン面12bは、保護用の平板ガラスで覆われていてもよい。   On the grating pattern surface 12b substantially parallel to the XY plane of the diffraction grating 12, a two-dimensional grating pattern 12a having a predetermined period (pitch) p in the X and Y directions and having a phase type and a reflection type is formed. Yes. The period p in the X direction and the Y direction of the lattice pattern 12a is, for example, about 100 nm to 4 μm (for example, 1 μm period). Note that the periods of the lattice pattern 12a in the X direction and the Y direction may be different from each other. The grating pattern 12a can be manufactured, for example, as a hologram (for example, a photosensitive resin baked with interference fringes) or by mechanically forming a groove or the like on a glass plate or the like and depositing a reflective film. Furthermore, the lattice pattern surface 12b may be covered with a protective flat glass.

レーザ光源16は、例えばHe−Neレーザ又は半導体レーザ等よりなり、一例として偏光方向が互いに直交するとともに互いに周波数が所定量だけ異なる第1及び第2の直線偏光のレーザ光ML,RLよりなる2周波ヘテロダイン光を射出する。それらのレーザ光は互いに可干渉(偏光方向を平行にした場合)であり、それらの平均波長をλとする。レーザ光源16は、それらのレーザ光から分岐した2つの光束の干渉光を光電変換して得られる基準周波数の信号(基準信号)を計測演算部42に供給する。なお、ホモダイン干渉方式も使用可能である。   The laser light source 16 is made of, for example, a He—Ne laser, a semiconductor laser, or the like. Emits frequency heterodyne light. These laser beams are coherent with each other (when the polarization directions are parallel), and their average wavelength is λ. The laser light source 16 supplies a signal of a reference frequency (reference signal) obtained by photoelectric conversion of interference light of two light beams branched from the laser light to the measurement calculation unit 42. A homodyne interference method can also be used.

光ファイバ17は、レーザ光源16から射出されたレーザ光ML,RLをそれぞれ偏光方向を維持しながら伝送するダブルコア型で偏波面保持型の光ファイバである。本実施形態では、光ファイバ17から射出されるときに、第1のレーザ光MLはXY平面に平行なX方向に偏光した直線偏光であり、第2のレーザ光RLはZ方向に偏光した直線偏光である。他の光ファイバ39XA〜39YB,39Cはシングルコア型であるが、偏波面保持型又は通常のいずれのタイプでもよい。また、光ファイバ39XA〜39YB,39Cの入射口に集光レンズを設けてもよい。なお、光ファイバ17,39XA〜39YB等は、図1では中間部が図示省略されている。また、光ファイバ17の代わりに複数のミラーを組み合わせたビーム送光光学系を使用してもよく、光ファイバ39XA〜39YB,39Cを使用することなく、干渉光を直接光電センサ40XA〜40YB,40Cで受光してもよい。   The optical fiber 17 is a double core type polarization maintaining optical fiber that transmits the laser beams ML and RL emitted from the laser light source 16 while maintaining the polarization direction. In the present embodiment, when emitted from the optical fiber 17, the first laser light ML is linearly polarized light polarized in the X direction parallel to the XY plane, and the second laser light RL is linearly polarized in the Z direction. Polarized light. The other optical fibers 39XA to 39YB and 39C are single-core types, but may be any polarization-maintaining type or normal type. Moreover, you may provide a condensing lens in the entrance of optical fiber 39XA-39YB, 39C. Note that the intermediate portions of the optical fibers 17, 39XA to 39YB, etc. are omitted in FIG. Further, instead of the optical fiber 17, a beam transmission optical system in which a plurality of mirrors are combined may be used. Without using the optical fibers 39XA to 39YB and 39C, the interference light is directly detected by the photoelectric sensors 40XA to 40YB and 40C. You may receive light.

検出ヘッド14は、光ファイバ17から射出されるレーザ光ML,RLを平行光束にするレンズ18b(図2(C)参照)を含む連結部18と、連結部18から射出されるレーザ光ML,RLをX軸用の計測光MX及び参照光RXと、Y軸用の計測光MY及び参照光RYとに分割するハーフプリズム20Aと、計測光MX及び参照光RXをほぼ−Y方向に向けてX軸の干渉計部15Xに入射させる2つのミラー22A,22Bと、計測光MY及び参照光RYの大部分をほぼ+X方向に向けてY軸の干渉計部15Yに入射させる光学部材36A及び36Bと、を有する。本実施形態において、ハーフプリズム20Aから射出されるX軸の計測光MX及び参照光RXはそれぞれX方向及びZ方向に直線偏光したヘテロダインビームであり、ハーフプリズム20Aから射出されるY軸の計測光MY及び参照光RYはそれぞれY方向及びZ方向に直線偏光したヘテロダインビームである。計測光MX,MY及び参照光RX,RYは例えば直径が0.5〜数mm程度の円形(楕円又は矩形等でもよい)の断面を有する。   The detection head 14 includes a connecting portion 18 including a lens 18b (see FIG. 2C) that converts the laser beams ML and RL emitted from the optical fiber 17 into parallel light beams, and the laser light ML and the laser light ML, emitted from the connecting portion 18. A half prism 20A that divides RL into measurement light MX and reference light RX for X-axis, measurement light MY and reference light RY for Y-axis, and measurement light MX and reference light RX are directed substantially in the −Y direction. Two mirrors 22A and 22B that enter the X-axis interferometer unit 15X, and optical members 36A and 36B that cause most of the measurement light MY and the reference light RY to enter the Y-axis interferometer unit 15Y substantially in the + X direction. And having. In the present embodiment, the X-axis measurement light MX and the reference light RX emitted from the half prism 20A are heterodyne beams linearly polarized in the X direction and the Z direction, respectively, and the Y-axis measurement light emitted from the half prism 20A. MY and reference light RY are heterodyne beams linearly polarized in the Y direction and the Z direction, respectively. The measurement beams MX and MY and the reference beams RX and RY have a circular (e.g., oval or rectangular) cross section with a diameter of about 0.5 to several mm, for example.

図2(C)に示すように、レーザ光ML,RLは光ファイバ17の隣接するコア部から射出されてレンズ18bによって平行光束に変換されるため、平行光束に変換された後のレーザ光ML,RLは所定の小さい角度βで交差している。このため、ハーフプリズム20Aから射出される計測光MX及び参照光RX、並びに計測光MY及び参照光RYはそれぞれ角度βで相対的に傾斜している。このように計測光MX及び参照光RX(計測光MY及び参照光RY)を相対的に傾斜させることによって、最終的に検出される干渉光に混入するノイズ光を低減させることができる。   As shown in FIG. 2C, since the laser beams ML and RL are emitted from the adjacent core portions of the optical fiber 17 and converted into parallel beams by the lens 18b, the laser beams ML after being converted into parallel beams. , RL intersect at a predetermined small angle β. For this reason, the measurement light MX and the reference light RX emitted from the half prism 20A, and the measurement light MY and the reference light RY are relatively inclined at an angle β. As described above, by relatively tilting the measurement light MX and the reference light RX (measurement light MY and reference light RY), it is possible to reduce noise light mixed in interference light that is finally detected.

図1において、+Y方向側の支持部材35Xの−X方向の端面に、YZ面をZ軸に平行な軸を中心として時計回りに45°回転した面に平行な反射面A3及び偏光ビームスプリッター面(以下、PBS面という)A4を有する合成光学部材33Xを介して、YZ面をZ軸に平行な軸を中心として反時計回りに45°回転した面に平行なPBS面A2及びハーフミラー面A1を有する合成光学部材32Xが固定されている。合成光学部材32Xの入射面に楔形プリズム34Xが固定されている。また、支持部材35Xの+X方向の端面のPBS面A2及びA4に対向する位置に偏光板41XA,41XBが固定され、偏光板41XA,41XBに光ファイバ39XA,39XBの入射端が固定されている。   In FIG. 1, on the end surface in the −X direction of the support member 35X on the + Y direction side, the reflecting surface A3 and the polarization beam splitter surface parallel to the surface obtained by rotating the YZ surface 45 ° clockwise about an axis parallel to the Z axis. A PBS surface A2 and a half mirror surface A1 parallel to a surface obtained by rotating the YZ surface 45 ° counterclockwise about an axis parallel to the Z axis via a synthetic optical member 33X having A4 (hereinafter referred to as a PBS surface). The synthetic optical member 32X having the above is fixed. A wedge-shaped prism 34X is fixed to the incident surface of the synthetic optical member 32X. Further, polarizing plates 41XA and 41XB are fixed at positions facing the PBS surfaces A2 and A4 on the end surface in the + X direction of the support member 35X, and incident ends of the optical fibers 39XA and 39XB are fixed to the polarizing plates 41XA and 41XB.

また、−Y方向側の支持部材35Yの−X方向の端面の+Y方向の端部に、透過率が大きく反射率が小さいビームスプリッター面(以下、BS面という)B1及びPBS面B2を有する光学部材36Aが固定されている。さらに、支持部材35Yのその端面の−Y方向側の領域に、合成光学部材33X,32Xと同じ構成の合成光学部材33Y,32Yが固定され、合成光学部材32Yの入射面に楔形プリズム34Xと同じ形状の楔形プリズム34Yが固定されている。支持部材35Yの+X方向の端面において、合成光学部材32Y,33YのPBS面及び光学部材36AのPBS面B2に対向する位置に偏光板41YB,41YA,41Cが固定され、偏光板41YB,41YA,41Cに光ファイバ39YB,39YA,39Cの入射端が固定されている。偏光板41XA〜41YB,41Cの結晶軸の方向は、後述のY方向に直線偏光した計測対象の回折光又は計測光とZ方向に直線偏光した参照光とを合成して干渉光を生成するように斜め方向に設定されている。さらに、楔形プリズム34X,34Yは、入射する参照光RX,RYの進行方向を、計測光MX,MYと参照光RX,RYとの間の角度β(図2(C)参照)を相殺するように変化させて、参照光と計測対象の回折光とを平行にするものである。   An optical element having a beam splitter surface (hereinafter referred to as a BS surface) B1 and a PBS surface B2 having high transmittance and low reflectance at the end portion in the + Y direction of the end surface in the −X direction of the support member 35Y on the −Y direction side. The member 36A is fixed. Furthermore, the composite optical members 33Y and 32Y having the same configuration as the composite optical members 33X and 32X are fixed to the −Y direction side region of the end surface of the support member 35Y, and the same as the wedge-shaped prism 34X on the incident surface of the composite optical member 32Y. A wedge-shaped prism 34Y having a shape is fixed. Polarizers 41YB, 41YA, and 41C are fixed to end surfaces in the + X direction of the support member 35Y at positions facing the PBS surfaces of the composite optical members 32Y and 33Y and the PBS surface B2 of the optical member 36A, and the polarizers 41YB, 41YA, and 41C. In addition, the incident ends of the optical fibers 39YB, 39YA, and 39C are fixed. The directions of the crystal axes of the polarizing plates 41XA to 41YB and 41C are such that interference light is generated by combining diffracted light or measurement light to be measured linearly polarized in the Y direction, which will be described later, and reference light linearly polarized in the Z direction. Is set in the diagonal direction. Further, the wedge-shaped prisms 34X and 34Y cancel the angle β (see FIG. 2C) between the measurement light MX and MY and the reference light RX and RY with respect to the traveling direction of the incident reference light RX and RY. The reference light and the diffracted light to be measured are made parallel to each other.

また、光学部材36Bは、透過率が小さく反射率が大きいBS面B3、ほぼ直交する2つの反射面B4,B5、及びBS面B3に対して−Y方向に離れた位置に配置された反射面B6を有する。ハーフプリズム20Aで分岐されたY軸の計測光MY及び参照光RYは、光学部材36AのBS面B1を大部分が透過し、BS面B1で反射された計測光MYの一部及び参照光の一部(参照光RY3)がPBS面B2に入射し、PBS面B2でS偏光の参照光RY3が反射される。また、BS面B1を透過した計測光MY及び参照光RYは光学部材36BのBS面B3で大部分が反射され、反射された計測光MY及び参照光RYは反射面B6を介してほぼ−X方向にY軸の干渉計部15Yに入射する。   The optical member 36B has a BS surface B3 having a low transmittance and a high reflectance, two reflecting surfaces B4 and B5 that are substantially orthogonal to each other, and a reflecting surface that is disposed at a position away from the BS surface B3 in the -Y direction. B6. Most of the Y-axis measurement light MY and the reference light RY branched by the half prism 20A pass through the BS surface B1 of the optical member 36A, and a part of the measurement light MY and the reference light reflected by the BS surface B1. A part (reference light RY3) enters the PBS surface B2, and the S-polarized reference light RY3 is reflected by the PBS surface B2. Further, most of the measurement light MY and the reference light RY transmitted through the BS surface B1 are reflected by the BS surface B3 of the optical member 36B, and the reflected measurement light MY and the reference light RY are substantially −X through the reflection surface B6. Incidently enters the Y-axis interferometer unit 15Y.

BS面B3を透過した計測光の一部(計測光MY3)及び参照光RYの一部は、反射面B4,B5で反射されて光学部材36AのPBS面B2に入射し、P偏光の計測光MY3がPBS面B2を透過してPBS面B2で反射された参照光RY3と合成されて参照用の干渉光を形成する。参照用の干渉光は偏光板41Cを介して光ファイバ39Cに入射し、光ファイバ39Cで伝送された干渉光は光電センサ40Cで受光される。一例として、光学部材36Bの反射面B5の位置及び角度は、PBS面B2で合成された計測光MY3及び参照光RY3が同軸で平行になるように、計測光MY3の位置及び角度を調整するように設定されている。   A part of the measurement light (measurement light MY3) and the part of the reference light RY transmitted through the BS surface B3 are reflected by the reflection surfaces B4 and B5 and enter the PBS surface B2 of the optical member 36A, and are P-polarized measurement light. MY3 is combined with the reference light RY3 transmitted through the PBS surface B2 and reflected by the PBS surface B2, thereby forming reference interference light. The reference interference light enters the optical fiber 39C through the polarizing plate 41C, and the interference light transmitted through the optical fiber 39C is received by the photoelectric sensor 40C. As an example, the position and angle of the reflection surface B5 of the optical member 36B are adjusted so that the measurement light MY3 synthesized on the PBS surface B2 and the reference light RY3 are coaxial and parallel to each other. Is set to

また、X軸の干渉計部15Xは、ミラー22Bでほぼ−Y方向に反射された計測光MX及び参照光RXが入射する偏光ビームスプリッター面(以下、PBS面という)A11(図2(A)参照)を有する偏光ビームスプリッター部材(以下、PBS部材という)24Xと、PBS部材24XをX方向に挟むように、かつY方向に位置ずれして固定された1対のルーフプリズム26XA,26XBと、PBS部材24Xの上面の+Y方向側に+X方向を向いて固定された大型の直角プリズム型の反射部材28XAと、PBS部材24Xの上面の中央部に−Y方向側にX方向に対称に外側を向いて固定された1対の小型の直角プリズム型の反射部材30XA,30XBと、BS部材24Xの上面の−Y方向側に−X方向を向いて固定された大型の直角プリズム型の反射部材28XAと、を有する。さらに、反射部材22C、楔形プリズム34X、合成光学部材32X,33Xも干渉計部15Xに含まれる。   Further, the X-axis interferometer unit 15X has a polarization beam splitter surface (hereinafter referred to as a PBS surface) A11 on which the measurement light MX and the reference light RX reflected by the mirror 22B substantially in the −Y direction are incident (FIG. 2A). A polarizing beam splitter member (hereinafter referred to as a PBS member) 24X having a reference) and a pair of roof prisms 26XA, 26XB fixed so as to sandwich the PBS member 24X in the X direction and displaced in the Y direction; A large-sized right-angle prism type reflecting member 28XA fixed to the + Y direction on the upper surface of the PBS member 24X and facing the + X direction, and symmetrically outward in the X direction on the −Y direction side at the center of the upper surface of the PBS member 24X. A pair of small right-angle prism type reflecting members 30XA and 30XB fixed facing and a large-sized fixed facing the −X direction on the −Y direction side of the upper surface of the BS member 24X. Having a reflecting member 28XA corner prism type, a. Further, the reflection member 22C, the wedge-shaped prism 34X, and the composite optical members 32X and 33X are also included in the interferometer unit 15X.

+X方向側のルーフプリズム26XA及び反射部材28XA,30XAより第1の反射部25XAが構成され、−X方向側のルーフプリズム26XB及び反射部材28XB,30XBより第2の反射部25XBが構成されている。第2部材7には、計測光MX及び回折格子12から射出される回折光を通す開口(不図示)が形成されており、PBS部材24Xはその開口を覆うように第2部材7に固定されている。   The first reflecting portion 25XA is constituted by the roof prism 26XA and the reflecting members 28XA and 30XA on the + X direction side, and the second reflecting portion 25XB is constituted by the roof prism 26XB and the reflecting members 28XB and 30XB on the -X direction side. . The second member 7 has an opening (not shown) through which the measurement light MX and the diffracted light emitted from the diffraction grating 12 pass. The PBS member 24X is fixed to the second member 7 so as to cover the opening. ing.

図2(A)は、図1中の干渉計部15XのPBS部材24X及び反射部25XA,25XBを示す。図2(A)において、PBS部材24Xは、+Y方向側の大型の反射部材28XAが固定された部分、及び−Y方向側の大型の反射部材28XBが固定された部分の内部はそれぞれ透過部で、中央の小型の反射部材30XA,30XBが固定された部分の内部に斜めに(XY面に対してX軸の回りに45°で傾斜して)PBS面A11が形成された3層構造の部材である。PBS部材24Xは、XY面に平行な2面と、YZ面に平行な2面と、ZX面に平行な2面との6面で囲まれた直方体状である。反射部25XAのルーフプリズム26XAは、PBS部材24Xの底面に対して反時計回りに角度α1(図3(A)参照)で傾斜した入射面A12と、XZ面に平行な稜線A16に関して対称に、かつ直交するように形成された1対の反射面A13,A14と、PBS部材24X及び反射部材28XA,30XBに密着した射出面A15とを有する。ルーフプリズム26XAの稜線A16は、ZY面に対して反時計回りに角度α2で傾斜している(図3(A)参照)。他方のルーフプリズム26XBはルーフプリズム26XAと対称な形状であり、ルーフプリズム26XBも直交する2つの反射面A23,A24を有する。   FIG. 2A shows the PBS member 24X and the reflecting portions 25XA and 25XB of the interferometer portion 15X in FIG. In FIG. 2A, the PBS member 24X has a transmission part inside the part where the large reflecting member 28XA on the + Y direction side is fixed and the part where the large reflecting member 28XB on the −Y direction side is fixed. A member having a three-layer structure in which a PBS surface A11 is formed obliquely (inclined at 45 ° around the X axis with respect to the XY surface) inside the portion where the small reflective members 30XA and 30XB at the center are fixed It is. The PBS member 24X has a rectangular parallelepiped shape surrounded by six planes, two planes parallel to the XY plane, two planes parallel to the YZ plane, and two planes parallel to the ZX plane. The roof prism 26XA of the reflector 25XA is symmetrical with respect to the incident surface A12 inclined at an angle α1 (see FIG. 3A) counterclockwise with respect to the bottom surface of the PBS member 24X, and the ridge line A16 parallel to the XZ plane. And it has a pair of reflective surfaces A13 and A14 formed so as to be orthogonal to each other, and an exit surface A15 in close contact with the PBS member 24X and the reflective members 28XA and 30XB. The ridgeline A16 of the roof prism 26XA is inclined at an angle α2 counterclockwise with respect to the ZY plane (see FIG. 3A). The other roof prism 26XB has a symmetrical shape with the roof prism 26XA, and the roof prism 26XB also has two reflecting surfaces A23 and A24 that are orthogonal to each other.

図1のミラー22Bで反射された計測光MXはS偏光として、参照光RXはP偏光としてほぼ−Y方向に図2(A)のPBS部材24XのPBS面A11に入射し、参照光RXはPBS面A11を透過してPBS部材24Xからほぼ−Y方向に射出される。一方、S偏光の計測光MXはPBS面A11で反射されて、回折格子12Xの格子パターン面12b(格子パターン12a)に概ね垂直に(概ねZ軸に平行に)入射する。概ね垂直に入射するとは、計測光MXを格子パターン面12bに垂直に入射させる場合の外に、0次光(正反射光)の影響を軽減するために、計測光MXをZ軸に平行な軸に対してX方向(θy方向)及び/又はY方向(θx方向)に例えば0.5〜1.5°程度傾斜させて格子パターン面12bに入射させる場合も含まれることを意味している。   The measurement light MX reflected by the mirror 22B in FIG. 1 is incident on the PBS surface A11 of the PBS member 24X in FIG. 2A in the −Y direction as S-polarized light and the reference light RX as P-polarized light. The light passes through the PBS surface A11 and is emitted from the PBS member 24X substantially in the -Y direction. On the other hand, the S-polarized measurement light MX is reflected by the PBS surface A11 and enters the grating pattern surface 12b (grating pattern 12a) of the diffraction grating 12X substantially perpendicularly (approximately parallel to the Z axis). The term “substantially perpendicularly incident” means that the measurement light MX is parallel to the Z axis in order to reduce the influence of zero-order light (regular reflection light) in addition to the case where the measurement light MX is incident perpendicularly to the grating pattern surface 12b. This includes the case where the light is incident on the grating pattern surface 12b with an inclination of, for example, about 0.5 to 1.5 ° in the X direction (θy direction) and / or the Y direction (θx direction) with respect to the axis. .

本実施形態において、概ね垂直に回折格子12の格子パターン面12bに入射する計測光MXによって、X方向に対称に±1次回折光DX1,DX2が発生し、発生した回折光DX1,DX2はルーフプリズム26XA,26XBの入射面に入射する。この際に、Y方向に対称に±1次回折光も発生するが、Y方向の回折光はX軸の干渉計部15Xでは使用されない。+1次回折光DX1は、ルーフプリズム26XAの入射面A12及び反射面A13,A14を介して+Y方向にシフトして、かつX軸に平行に−X方向に向けて射出面A15を介して反射部材28XAに入射する。そして、反射部材28XAで反射された回折光DX1は、PBS部材24Xを透過して回折格子12の格子パターン面12bに概ね垂直に入射する。また、−1次回折光DX2は、ルーフプリズム26XBの反射面A23,A24等を介して−Y方向にシフトして、かつX軸に平行に+X方向に向けて反射部材28XBに入射し、反射部材28XBで反射された回折光DX2は、回折格子12の格子パターン12aに概ね垂直に入射する。   In the present embodiment, the measurement light MX incident on the grating pattern surface 12b of the diffraction grating 12 substantially vertically generates ± first-order diffracted lights DX1 and DX2 symmetrically in the X direction, and the generated diffracted lights DX1 and DX2 are the roof prisms. It is incident on the incident surfaces of 26XA and 26XB. At this time, ± first-order diffracted light is also generated symmetrically in the Y direction, but the diffracted light in the Y direction is not used in the X-axis interferometer unit 15X. The + 1st-order diffracted light DX1 is shifted in the + Y direction via the incident surface A12 and the reflective surfaces A13 and A14 of the roof prism 26XA, and is parallel to the X axis and directed toward the −X direction via the exit surface A15 through the reflective member 28XA. Is incident on. The diffracted light DX1 reflected by the reflecting member 28XA passes through the PBS member 24X and enters the grating pattern surface 12b of the diffraction grating 12 substantially perpendicularly. The −1st order diffracted light DX2 is shifted in the −Y direction via the reflecting surfaces A23 and A24 of the roof prism 26XB and incident on the reflecting member 28XB in the + X direction parallel to the X axis. The diffracted light DX2 reflected by 28XB is incident on the grating pattern 12a of the diffraction grating 12 substantially perpendicularly.

図2(B)に示すように、格子パターン12aにおいて計測光MXが入射する位置に対して、回折光DX1,DX2が入射する位置は、Y方向に対称に間隔b1だけシフトしている。間隔b1は、PBS部材24XのY方向の幅のほぼ1/3である。このような配置で計測光MX及び回折光DX1,DX2を回折格子12に入射させることで、干渉計部15Xの構成を小型化できる。ただし、間隔b1は任意である。また、回折光DX1,DX2の入射位置はほぼ計測光MXの入射位置をY方向に挟むように配置されていればよい。   As shown in FIG. 2B, the position where the diffracted lights DX1 and DX2 are incident is shifted symmetrically in the Y direction by the interval b1 with respect to the position where the measurement light MX is incident on the grating pattern 12a. The interval b1 is approximately 1/3 of the width of the PBS member 24X in the Y direction. By making the measurement light MX and the diffracted lights DX1 and DX2 enter the diffraction grating 12 with such an arrangement, the configuration of the interferometer unit 15X can be reduced in size. However, the interval b1 is arbitrary. The incident positions of the diffracted beams DX1 and DX2 may be arranged so that the incident position of the measuring beam MX is substantially sandwiched in the Y direction.

反射部材28XA,28XBで反射された回折光DX1,DX2によって回折格子12からX方向に対称に+1次回折光EX1及び−1次回折光EX2(再回折光)が発生し、発生した回折光EX1は、ルーフプリズム26XAの入射面A12及び反射面A14,A13を介して−Y方向にシフトして、かつX軸に平行に−X方向に向けて反射部材30XAに入射する。そして、反射部材30XAで反射されたS偏光の回折光EX1は、PBS部材24XのPBS面A11で反射されてほぼ−Y方向にPBS部材24Xから射出される。そして、回折光EX2は、ルーフプリズム26XBの入射面及び反射面A23,A24を介して+Y方向にシフトして、かつX軸に平行に+X方向に向けて反射部材30XBに入射する。そして、反射部材30XBで反射されたS偏光の回折光EX2は、PBS面A11で反射されてほぼ−Y方向にPBS部材24Xから射出される。   The diffracted lights DX1 and DX2 reflected by the reflecting members 28XA and 28XB generate + 1st order diffracted light EX1 and −1st order diffracted light EX2 (rediffracted light) symmetrically in the X direction from the diffraction grating 12, and the generated diffracted light EX1 is The light beam is shifted in the −Y direction via the incident surface A12 and the reflecting surfaces A14 and A13 of the roof prism 26XA, and is incident on the reflecting member 30XA in the −X direction parallel to the X axis. Then, the S-polarized diffracted light EX1 reflected by the reflecting member 30XA is reflected by the PBS surface A11 of the PBS member 24X, and is emitted from the PBS member 24X in a substantially −Y direction. The diffracted light EX2 is shifted in the + Y direction via the incident surface of the roof prism 26XB and the reflecting surfaces A23 and A24, and is incident on the reflecting member 30XB in the + X direction parallel to the X axis. Then, the s-polarized diffracted light EX2 reflected by the reflecting member 30XB is reflected by the PBS surface A11 and emitted from the PBS member 24X substantially in the -Y direction.

図1において、PBS部材24Xから射出された回折光EX1,EX2は、反射部材22Cで反射されてそれぞれ合成光学部材32X,33XのPBS面A2,A4を透過する。回折光EX1,EX2は、PBS部材24XのPBS面A11に対してはS偏光であるが、PBS面A2,A4に対してはP偏光であることによる。また、PBS部材24Xを透過した参照光RXは、反射部材22Cで反射され、楔形プリズム34Xを介して合成光学部材32Xのハーフミラー面A1に入射する。ハーフミラー面A1で反射された参照光RX1は、PBS面A2で反射されて回折光EX1と同軸に合成されて干渉光となる。この干渉光は、偏光板41XA及び光ファイバ39XAを介して光電センサ40XAに受光される。ハーフミラー面A1を透過した参照光RX2は、合成光学部材33Xの反射面A3で反射された後、PBS面A4で反射されて回折光EX2と同軸に合成されて干渉光となる。この干渉光は、偏光板41XB及び光ファイバ39XBを介して光電センサ40XBに受光される。参照光RX1,RX2はPBS部材24XのPBS面A11に対してはP偏光であるが、PBS面A2,A4に対してはS偏光であることによる。   In FIG. 1, diffracted beams EX1 and EX2 emitted from the PBS member 24X are reflected by the reflecting member 22C and pass through the PBS surfaces A2 and A4 of the synthetic optical members 32X and 33X, respectively. The diffracted beams EX1 and EX2 are S-polarized light with respect to the PBS surface A11 of the PBS member 24X, but are P-polarized light with respect to the PBS surfaces A2 and A4. Further, the reference light RX transmitted through the PBS member 24X is reflected by the reflecting member 22C and enters the half mirror surface A1 of the combining optical member 32X via the wedge-shaped prism 34X. The reference light RX1 reflected by the half mirror surface A1 is reflected by the PBS surface A2 and synthesized coaxially with the diffracted light EX1 to become interference light. This interference light is received by the photoelectric sensor 40XA via the polarizing plate 41XA and the optical fiber 39XA. The reference light RX2 that has passed through the half mirror surface A1 is reflected by the reflecting surface A3 of the combining optical member 33X, then is reflected by the PBS surface A4, and is coaxially combined with the diffracted light EX2 to become interference light. This interference light is received by the photoelectric sensor 40XB via the polarizing plate 41XB and the optical fiber 39XB. This is because the reference beams RX1 and RX2 are P-polarized with respect to the PBS surface A11 of the PBS member 24X, but are S-polarized with respect to the PBS surfaces A2 and A4.

また、Y軸の干渉計部15Yは、X軸の干渉計部15XのPBS部材24X及び反射部25XA,25XBを一体的に90°回転した構成のPBS部材24Y及び反射部25YA,25YBを有する。すなわち、反射部25YA,25YBもそれぞれルーフプリズム26YA,26YB、大型の反射部材28YA,28YB、及び小型の反射部材30YA,30YBを有し、PBS部材24Yは開口(不図示)を覆うように第2部材7に固定されている。さらに、干渉計部15Yは、楔形プリズム34Y及び合成光学部材32Y,33Yを有する。   The Y-axis interferometer unit 15Y includes a PBS member 24Y and reflecting units 25YA and 25YB that are configured by integrally rotating the PBS member 24X and the reflecting units 25XA and 25XB of the X-axis interferometer unit 15X by 90 °. That is, the reflecting portions 25YA and 25YB also have roof prisms 26YA and 26YB, large reflecting members 28YA and 28YB, and small reflecting members 30YA and 30YB, respectively, and the PBS member 24Y covers the opening (not shown). It is fixed to the member 7. Further, the interferometer unit 15Y includes a wedge prism 34Y and synthetic optical members 32Y and 33Y.

反射面B6で反射された計測光MY及び参照光RYは、干渉計部15YのPBS部材24Yに入射し、P偏光の参照光RYはPBS部材24YのPBS面を透過して+X方向に射出される。そして、S偏光の計測光MYはPBS部材24YのPBS面で反射されて回折格子12の格子パターン12aに概ね垂直に入射し、格子パターン12aからY方向に対称に±1次回折光DY1,DY2(図3(B)参照)が発生する。X方向に発生する±1次回折光は干渉計部15Yでは使用されない。これらの回折光DY1(DY2)は反射部25YA(反射部25YB)を介して回折格子12の格子パターン12aに概ね垂直に入射する。そして、回折光DY1によるY方向の+1次回折光EY1及び回折光DY2によるY方向の−1次回折光EY2が回折格子12から発生し、回折光EY1は反射部25YAを介してPBS部材24YのPBS面で反射されて+X方向に射出され、回折光EY2は反射部25YBを介してPBS部材24YのPBS面で反射されて+X方向に射出される。   The measurement light MY and the reference light RY reflected by the reflection surface B6 are incident on the PBS member 24Y of the interferometer unit 15Y, and the P-polarized reference light RY is transmitted through the PBS surface of the PBS member 24Y and emitted in the + X direction. The Then, the S-polarized measurement light MY is reflected by the PBS surface of the PBS member 24Y and enters the grating pattern 12a of the diffraction grating 12 substantially perpendicularly, and ± 1st-order diffracted lights DY1, DY2 (symmetrically in the Y direction from the grating pattern 12a) 3B) occurs. The ± first-order diffracted light generated in the X direction is not used in the interferometer unit 15Y. These diffracted lights DY1 (DY2) are incident on the grating pattern 12a of the diffraction grating 12 substantially perpendicularly via the reflecting portion 25YA (reflecting portion 25YB). Then, the + 1st order diffracted light EY1 in the Y direction by the diffracted light DY1 and the −1st order diffracted light EY2 in the Y direction by the diffracted light DY2 are generated from the diffraction grating 12, and the diffracted light EY1 passes through the reflecting portion 25YA to the PBS surface of the PBS member 24Y. The diffracted light EY2 is reflected by the PBS surface of the PBS member 24Y via the reflector 25YB and emitted in the + X direction.

そして、PBS部材24Yから射出された回折光EY1,EY2は、それぞれ合成光学部材33Y,32YのPBS面をP偏光状態で透過する。また、PBS部材24Yを透過した参照光RYは、楔形プリズム34Yを介して合成光学部材32Yのハーフミラー面に入射する。そのハーフミラー面で反射された参照光RY2は、PBS面で反射されて回折光EY2と同軸に合成されて干渉光となる。この干渉光は、偏光板41YB及び光ファイバ39YBを介して光電センサ40YBに受光される。そのハーフミラー面を透過した参照光RY1は、合成光学部材33Yの反射面で反射された後、PBS面で反射されて回折光EY1と同軸に合成されて干渉光となる。この干渉光は、偏光板41YA及び光ファイバ39YAを介して光電センサ40YBに受光される。   Then, the diffracted beams EY1 and EY2 emitted from the PBS member 24Y are transmitted through the PBS surfaces of the composite optical members 33Y and 32Y in a P-polarized state, respectively. Further, the reference light RY transmitted through the PBS member 24Y is incident on the half mirror surface of the combining optical member 32Y through the wedge prism 34Y. The reference light RY2 reflected by the half mirror surface is reflected by the PBS surface and synthesized coaxially with the diffracted light EY2 to become interference light. This interference light is received by the photoelectric sensor 40YB via the polarizing plate 41YB and the optical fiber 39YB. The reference light RY1 transmitted through the half mirror surface is reflected by the reflecting surface of the combining optical member 33Y, then is reflected by the PBS surface, and is coaxially combined with the diffracted light EY1 to become interference light. This interference light is received by the photoelectric sensor 40YB through the polarizing plate 41YA and the optical fiber 39YA.

図1において、計測演算部42は、第1演算部42X、第2演算部42Y、及び第3演算部42Tを有する。そして、X軸の光電センサ40XAは、回折光EX1及び参照光RX1よりなる干渉光の検出信号(光電変換信号)を第1演算部42Xに供給し、X軸の光電センサ40XBは、回折光EX2及び参照光RX2よりなる干渉光の検出信号を第1演算部42Xに供給する。また、Y軸の光電センサ40YAは、回折光EY1及び参照光RY1よりなる干渉光の検出信号を第2演算部42Yに供給し、Y軸の光電センサ40YBは、回折光EY2及び参照光RY2よりなる干渉光の検出信号を第2演算部42Yに供給する。第1演算部42X及び第2演算部42Yには、レーザ光源16からの基準周波数の信号(基準信号)、及び光電センサ40Cで検出された参照用の干渉光のほぼその基準周波数の信号(参照信号)も供給されている。   In FIG. 1, the measurement calculation unit 42 includes a first calculation unit 42X, a second calculation unit 42Y, and a third calculation unit 42T. The X-axis photoelectric sensor 40XA supplies an interference light detection signal (photoelectric conversion signal) composed of the diffracted light EX1 and the reference light RX1 to the first calculation unit 42X, and the X-axis photoelectric sensor 40XB receives the diffracted light EX2. And the detection signal of the interference light which consists of reference light RX2 is supplied to the 1st calculating part 42X. The Y-axis photoelectric sensor 40YA supplies the interference light detection signal composed of the diffracted light EY1 and the reference light RY1 to the second calculation unit 42Y, and the Y-axis photoelectric sensor 40YB receives the diffracted light EY2 and the reference light RY2. The interference light detection signal is supplied to the second calculation unit 42Y. The first calculation unit 42X and the second calculation unit 42Y include a reference frequency signal (reference signal) from the laser light source 16 and a reference frequency signal (reference) of the reference interference light detected by the photoelectric sensor 40C. Signal) is also provided.

ここで、第1部材6と第2部材7とのX方向、Y方向、Z方向の相対移動量(相対変位)をX,Y,Zとして、第1演算部42X及び第2演算部42Yで求められるZ方向の相対移動量をそれぞれZX,ZYとする。このとき、一例として、第1演算部42Xは、光電センサ40XAの検出信号及び基準信号(又は参照信号)から、既知の係数a,bを用いてX方向及びZ方向の第1の相対移動量(a・X+b・ZX)を求め、光電センサ40XBの検出信号及び基準信号(又は参照信号)から、X方向及びZ方向の第2の相対移動量(−a・X+b・ZX)を求め、その第1及び第2の相対移動量からX方向の相対移動量(X)及びZ方向の相対移動量(ZX)を求め、求めた結果を第3演算部42Tに供給する。第2演算部42Yは、光電センサ40YAの検出信号及び基準信号(又は参照信号)から、Y方向及びZ方向の第1の相対移動量(a・Y+b・ZY)を求め、光電センサ40YBの検出信号及び基準信号(又は参照信号)から、Y方向及びZ方向の第2の相対移動量(−a・Y+b・ZY)を求め、その第1及び第2の相対移動量からY方向の相対移動量(Y)及びZ方向の相対移動量(ZY)を求め、求めた結果を第3演算部42Tに供給する。   Here, the X, Y, and Z direction relative movement amounts (relative displacements) between the first member 6 and the second member 7 are X, Y, Z, and the first calculation unit 42X and the second calculation unit 42Y. Assume that the obtained relative movement amounts in the Z direction are ZX and ZY, respectively. At this time, as an example, the first calculation unit 42X uses the detection coefficient and the reference signal (or reference signal) of the photoelectric sensor 40XA and the first relative movement amount in the X direction and the Z direction using the known coefficients a and b. (A · X + b · ZX) is obtained, and the second relative movement amount (−a · X + b · ZX) in the X direction and the Z direction is obtained from the detection signal and the reference signal (or reference signal) of the photoelectric sensor 40XB. A relative movement amount (X) in the X direction and a relative movement amount (ZX) in the Z direction are obtained from the first and second relative movement amounts, and the obtained results are supplied to the third calculation unit 42T. The second calculation unit 42Y obtains the first relative movement amount (a · Y + b · ZY) in the Y direction and the Z direction from the detection signal and the reference signal (or reference signal) of the photoelectric sensor 40YA, and detects the photoelectric sensor 40YB. The second relative movement amount (−a · Y + b · ZY) in the Y direction and the Z direction is obtained from the signal and the reference signal (or reference signal), and the relative movement in the Y direction is obtained from the first and second relative movement amounts. The amount (Y) and the relative movement amount (ZY) in the Z direction are obtained, and the obtained result is supplied to the third calculation unit 42T.

第3演算部42Tは、演算部42X,42Yから供給される相対移動量(X)及び(Y)を所定のオフセットで補正した値を第1部材6と第2部材7とのX方向、Y方向の相対移動量として出力する。また、第3演算部42Tは、一例として、演算部42X,42Yから供給されるZ方向の相対移動量(ZX)及び(ZY)の平均値(=(ZX+ZY)/2)を所定のオフセットで補正した値を第1部材6と第2部材7とのZ方向の相対移動量として出力する。X方向、Y方向、Z方向の相対移動量の検出分解能は例えば0.5〜0.1nm程度である。エンコーダ10では、計測光MX,MY等の光路が短いため、その光路上の気体の温度揺らぎに起因する計測値の短期的な変動を低減できる。さらに、最終的に2回目の+1次回折光EX1,EY1及び−1次回折光EX2,EY2と対応する参照光RX1〜RY2との干渉光を検出しているため、相対移動量の検出分解能(検出精度)を1/2に向上(微細化)できる。また、±1次回折光を用いることによって、第1部材6と第2部材7とのθz方向の相対回転角による計測誤差を低減できる。   The third calculation unit 42T calculates a value obtained by correcting the relative movement amounts (X) and (Y) supplied from the calculation units 42X and 42Y with a predetermined offset in the X direction of the first member 6 and the second member 7, Y Output as the amount of relative movement in the direction. In addition, as an example, the third calculation unit 42T calculates an average value (= (ZX + ZY) / 2) of the relative movement amounts (ZX) and (ZY) in the Z direction supplied from the calculation units 42X and 42Y with a predetermined offset. The corrected value is output as the relative movement amount in the Z direction between the first member 6 and the second member 7. The detection resolution of the relative movement amount in the X direction, the Y direction, and the Z direction is, for example, about 0.5 to 0.1 nm. In the encoder 10, since the optical paths of the measurement light MX, MY, etc. are short, short-term fluctuations in the measurement value due to the temperature fluctuation of the gas on the optical path can be reduced. Furthermore, since the interference light of the reference lights RX1 to RY2 corresponding to the + 1st order diffracted beams EX1 and EY1 and the −1st order diffracted beams EX2 and EY2 for the second time is finally detected, the detection resolution of the relative movement amount (detection accuracy) ) Can be improved to 1/2 (miniaturized). In addition, by using ± first-order diffracted light, measurement errors due to the relative rotation angles of the first member 6 and the second member 7 in the θz direction can be reduced.

次に、本実施形態の検出ヘッド14の回折光の光路につき詳細に説明する。
図3(A)はX軸の干渉計部15Xの要部及び回折格子12を示す。図3(A)において、計測光MXが回折格子12の格子パターン12aに垂直に(Z軸に平行に)入射するとき、計測光MXによるX方向の+1次回折光DX1の回折角φxは、格子パターン12aの周期p及び計測光MXの波長λを用いて次の関係を満たす。このとき、計測光MXによるX方向の−1次回折光DX2の回折角は−φxとなる。
Next, the optical path of the diffracted light of the detection head 14 of this embodiment will be described in detail.
FIG. 3A shows the main part of the X-axis interferometer unit 15X and the diffraction grating 12. FIG. In FIG. 3A, when the measurement light MX is incident on the grating pattern 12a of the diffraction grating 12 perpendicularly (parallel to the Z axis), the diffraction angle φx of the + 1st order diffracted light DX1 in the X direction by the measurement light MX is The following relationship is satisfied using the period p of the pattern 12a and the wavelength λ of the measurement light MX. At this time, the diffraction angle of the −1st order diffracted light DX2 in the X direction by the measurement light MX is −φx.

p・sin(φx)=λ …(1)
一例として、周期pを1000nm(1μm)、計測光MXの波長λを633nmとすると、回折角φxはほぼ39°となる。
また、回折光DX1は、ルーフプリズム26XA(入射面A12及び反射面A13,A14)及び反射部材28XAによって、計測光MX(ここではZ軸に平行)に平行になるように折り曲げられて回折格子12に再入射する。従って、ルーフプリズム26XAの入射面A12の角度α1、稜線A16の角度α2、屈折率ng、及び回折光DX1の入射面A12に対する入射角i(角度α1と回折角φxとの関数)は、反射部材28XAで反射された回折光DX1がZ軸に概ね平行になるように定められることが好ましい。
p · sin (φx) = λ (1)
As an example, if the period p is 1000 nm (1 μm) and the wavelength λ of the measurement light MX is 633 nm, the diffraction angle φx is approximately 39 °.
Further, the diffracted light DX1 is bent by the roof prism 26XA (incident surface A12 and reflecting surfaces A13, A14) and the reflecting member 28XA so as to be parallel to the measuring light MX (here, parallel to the Z axis). Re-incident on. Accordingly, the angle α1 of the incident surface A12 of the roof prism 26XA, the angle α2 of the ridge line A16, the refractive index ng, and the incident angle i (a function of the angle α1 and the diffraction angle φx) of the diffracted light DX1 with respect to the incident surface A12 are reflected members. It is preferable that the diffracted light DX1 reflected by 28XA is determined so as to be substantially parallel to the Z axis.

さらに、本実施形態では、ルーフプリズム26XAの入射面A12に入射する回折光DX1の振れ角δの入射角iに関する変化率(dδ/di)は、次のようにcos(φx)に設定されることが好ましい。
dδ/di=cos(φx)=cos{arcsin(λ/p)} …(3)
この式(3)の条件は、入射面A12における振れ角δの変化率(dδ/di)は、回折格子12に対する計測光MXの入射角が0から変化したときの回折光DX1の回折角の変化率を、入射面A12で相殺することを意味している(詳細後述)。
Furthermore, in the present embodiment, the rate of change (dδ / di) regarding the incident angle i of the deflection angle δ of the diffracted light DX1 incident on the incident surface A12 of the roof prism 26XA is set to cos (φx) as follows. It is preferable.
dδ / di = cos (φx) = cos {arcsin (λ / p)} (3)
The condition of this equation (3) is that the rate of change (dδ / di) of the deflection angle δ at the incident surface A12 is the diffraction angle of the diffracted light DX1 when the incident angle of the measuring light MX with respect to the diffraction grating 12 changes from zero. This means that the rate of change is canceled by the incident surface A12 (details will be described later).

計測光MXが格子パターン12aに垂直に(Z軸に平行に)入射する場合、反射部25XAで反射される回折光DX1は計測光MXが入射した位置から+X方向及び+Y方向にずれた位置で格子パターン12aに垂直に入射する。そして、回折光DX1によって回折格子12から発生する+1次回折光EX1の回折角は式(1)のφxと同じであり、回折光EX1は反射部25XAによって光路をZ軸に平行に折り曲げられてPBS部材24XのPBS面A11に向かう。このとき、計測光MXによる回折格子12からの−1次回折光DX2は、回折光DX1と対称に反射部25XBを介して計測光MXが入射した位置から−X方向及び+Y方向にずれた位置で格子パターン12aに垂直に入射する。そして、回折光DX2によって回折格子12から発生する−1次回折光EX2は、反射部25XBによって光路をZ軸に平行に折り曲げられてPBS面A11に向かう。   When the measurement light MX is incident on the grating pattern 12a perpendicularly (parallel to the Z axis), the diffracted light DX1 reflected by the reflecting portion 25XA is shifted from the position where the measurement light MX is incident in the + X direction and the + Y direction. Incident perpendicularly to the grating pattern 12a. Then, the diffraction angle of the + 1st order diffracted light EX1 generated from the diffraction grating 12 by the diffracted light DX1 is the same as φx in the equation (1), and the diffracted light EX1 is bent in parallel with the Z axis by the reflecting portion 25XA, and PBS It goes to the PBS surface A11 of the member 24X. At this time, the −1st-order diffracted light DX2 from the diffraction grating 12 by the measurement light MX is shifted in the −X direction and the + Y direction from the position where the measurement light MX is incident through the reflection portion 25XB symmetrically with the diffraction light DX1. Incident perpendicularly to the grating pattern 12a. Then, the minus first-order diffracted light EX2 generated from the diffraction grating 12 by the diffracted light DX2 is bent in the optical path parallel to the Z axis by the reflecting portion 25XB and travels toward the PBS surface A11.

また、図3(B)はY軸の干渉計部15Yの要部及び回折格子12を示す。図3(B)において、計測光MYが回折格子12の格子パターン12aに垂直に入射するとき、計測光MYによるY方向の+1次回折光DY1の回折角φyは、式(1)のX方向の回折角φxと同じである。そして、回折光DY1によって反射部25YAを介して回折格子12から発生する+1次回折光EY1、及び計測光MYによるY方向の−1次回折光DY2によって回折格子12から発生する−1次回折光EY2は、それぞれ反射部25YA,25YBによって光路をZ軸に平行に折り曲げられてPBS部材24YのPBS面に向かう。   FIG. 3B shows the main part of the Y-axis interferometer unit 15Y and the diffraction grating 12. FIG. In FIG. 3B, when the measurement light MY is perpendicularly incident on the grating pattern 12a of the diffraction grating 12, the diffraction angle φy of the + 1st order diffracted light DY1 in the Y direction by the measurement light MY is in the X direction of the equation (1). It is the same as the diffraction angle φx. Then, the + 1st order diffracted light EY1 generated from the diffraction grating 12 by the diffracted light DY1 via the reflecting portion 25YA and the −1st order diffracted light EY2 generated from the diffraction grating 12 by the −1st order diffracted light DY2 in the Y direction by the measurement light MY are: The optical path is bent parallel to the Z axis by the reflecting portions 25YA and 25YB, respectively, and heads toward the PBS surface of the PBS member 24Y.

そして、図3(A)の配置において、図4(A)に示すように、干渉計部15Xに対して回折格子12の格子パターン面12bのZ方向の相対位置が位置B11までδZだけ変化した場合を想定する。このとき、計測光MXによる+1次回折光DX1は、光路が位置B12に平行にシフトして反射部25XAに入射するが、反射部25XAでは入射光に対して射出光の光路は中心に関して対称にシフトする。このため、反射部25XAで反射された回折光DX1は、格子パターン面12bのZ方向の相対位置が変化していないときの+1次回折光EX1の光路と交差する位置で回折格子12に入射する。従って、格子パターン面12bが位置B11まで変化していても、回折光DX1によって回折格子12から発生する+1次回折光EX1の光路B13は、格子パターン面12bのZ方向の相対位置が変化していないときの光路と同じである。このため、回折光EX1と参照光RX1とをPBS面A2(図1参照)で同軸に合成して干渉光を生成したとき、回折光EX1と参照光RX1との相対的な横ずれ量がないため、その干渉光を光電変換したときに得られる検出信号のうちの交流信号(ビート信号又は信号成分)の割合が低下することがない。   In the arrangement of FIG. 3A, as shown in FIG. 4A, the relative position in the Z direction of the grating pattern surface 12b of the diffraction grating 12 with respect to the interferometer unit 15X has changed by δZ to the position B11. Assume a case. At this time, the + 1st-order diffracted light DX1 by the measurement light MX is incident on the reflection unit 25XA with the optical path shifted parallel to the position B12. However, in the reflection unit 25XA, the optical path of the emitted light is shifted symmetrically with respect to the incident light. To do. Therefore, the diffracted light DX1 reflected by the reflecting portion 25XA enters the diffraction grating 12 at a position that intersects the optical path of the + 1st order diffracted light EX1 when the relative position in the Z direction of the grating pattern surface 12b is not changed. Therefore, even if the grating pattern surface 12b is changed to the position B11, the relative position in the Z direction of the grating pattern surface 12b of the optical path B13 of the + 1st order diffracted light EX1 generated from the diffraction grating 12 by the diffracted light DX1 is not changed. It is the same as the optical path of time. For this reason, when the interference light is generated by coaxially combining the diffracted light EX1 and the reference light RX1 on the PBS surface A2 (see FIG. 1), there is no relative lateral shift amount between the diffracted light EX1 and the reference light RX1. The ratio of the AC signal (beat signal or signal component) in the detection signal obtained when photoelectrically converting the interference light does not decrease.

これは、X軸の−1次回折光DX2及びY軸の±1次回折光DY1,DY2でも同様であり、格子パターン面12bのZ方向の相対位置が変化しても、図1の光電センサ40XA〜40YBの検出信号のうちのビート信号の割合は低下しない。従って、それらの検出信号を用いて高いSN比で高精度に第1部材6と第2部材7との相対移動量を計測できる。   This also applies to the X-order −1st-order diffracted light DX2 and the Y-axis ± 1st-order diffracted lights DY1 and DY2, and even if the relative position in the Z direction of the grating pattern surface 12b changes, the photoelectric sensors 40XA to 40XA to The ratio of the beat signal in the 40YB detection signal does not decrease. Therefore, the relative movement amount between the first member 6 and the second member 7 can be measured with high accuracy at a high S / N ratio using these detection signals.

次に、図3(A)の配置において、図4(B)に示すように、干渉計部15Xに対して回折格子12の格子パターン面12bがY軸に平行な軸の回りに角度εだけ反時計回りに変化した場合を想定する。このとき、計測光MXの格子パターン面12bに対する入射角はεであり、+1次回折光DX1の回折角を(φx+δφx)とすると、以下の関係が成立する。   Next, in the arrangement of FIG. 3A, as shown in FIG. 4B, the grating pattern surface 12b of the diffraction grating 12 with respect to the interferometer portion 15X is an angle ε around an axis parallel to the Y axis. Assume the case of changing counterclockwise. At this time, when the incident angle of the measurement light MX with respect to the grating pattern surface 12b is ε, and the diffraction angle of the + 1st order diffracted light DX1 is (φx + δφx), the following relationship is established.

sin(φx+δφx)−sinε=λ/p …(4)
ここで、ε及びδφxが微少量であるとすると、sin(φx)の微分はcos(φx)であるため、式(4)は次のようになる。
sin(φx)+cos(φx)・δφx−ε=λ/p …(5)
式(5)において、式(1)よりsin(φx)がλ/pであることを考慮すると、次式が得られる。
sin (φx + δφx) −sinε = λ / p (4)
Here, assuming that ε and δφx are very small, the derivative of sin (φx) is cos (φx), and therefore equation (4) is as follows.
sin (φx) + cos (φx) · δφx−ε = λ / p (5)
In equation (5), considering that sin (φx) is λ / p from equation (1), the following equation is obtained.

δφx=ε/cos(φx) …(6)
また、格子パターン面12bが角度εだけ傾斜したときの回折格子12からの+1次回折光DX1の光路B22の角度の変化量δφは、次のようになる。
δφ={1+1/cos(φx)}ε …(7)
また、ルーフプリズム26XAの入射面A12における振れ角δの入射角iに関する変化率(dδ/di)は、式(3)で示したようにcos(φx)であるため、ルーフプリズム26XAを通過した回折光DX1の光路B23の角度の変化量δε1は、次のようになる。
δφx = ε / cos (φx) (6)
Further, the change amount δφ of the angle of the optical path B22 of the + 1st order diffracted light DX1 from the diffraction grating 12 when the grating pattern surface 12b is inclined by the angle ε is as follows.
δφ = {1 + 1 / cos (φx)} ε (7)
Further, since the rate of change (dδ / di) of the deflection angle δ on the incident surface A12 of the roof prism 26XA with respect to the incident angle i is cos (φx) as shown in the expression (3), it passes through the roof prism 26XA. The change amount δε1 of the angle of the optical path B23 of the diffracted light DX1 is as follows.

δε1=δφ・cos(φx)={cos(φx)+1}ε …(8)
そして、格子パターン面12bは角度εだけ傾斜しているため、反射部25XAから格子パターン面12bに入射する回折光DX1の入射角δεは次のようになる。
δε=ε・cos(φx) …(9)
回折光DX1が再び回折格子12に入射角δεで入射すると、回折光DX1による回折格子12からの+1次回折光EX1(再回折光)の回折角の変化量δφ1は、式(6)から次のようになる。
δε1 = δφ · cos (φx) = {cos (φx) +1} ε (8)
Since the grating pattern surface 12b is inclined by the angle ε, the incident angle δε of the diffracted light DX1 incident on the grating pattern surface 12b from the reflecting portion 25XA is as follows.
δε = ε · cos (φx) (9)
When the diffracted light DX1 is incident on the diffraction grating 12 again at an incident angle δε, the change amount δφ1 of the diffraction angle of the + 1st order diffracted light EX1 (re-diffracted light) from the diffraction grating 12 by the diffracted light DX1 is expressed by the following equation (6). It becomes like this.

δφ1=ε …(10)
これは、回折光EX1の回折角の変化量δφ1は格子パターン面12bの傾斜角εに等しいこと、すなわち回折光EX1の光路B24は、格子パターン面12bが傾斜する前の光路に平行であることを意味する。また、回折光EX1の光路B24の横シフトも生じていない。このため、回折光EX1と参照光RX1とをPBS面A2で同軸に合成して干渉光を生成したとき、回折光EX1と参照光RX1との相対的な傾きのずれ及び相対的な横ずれ量がないため、その干渉光を光電変換したときに得られる検出信号のうちの交流信号(ビート信号又は信号成分)の割合が低下することがない。これは、X軸の−1次回折光EX2でも同様である。
δφ1 = ε (10)
This is because the diffraction angle change amount δφ1 of the diffracted light EX1 is equal to the inclination angle ε of the grating pattern surface 12b, that is, the optical path B24 of the diffracted light EX1 is parallel to the optical path before the grating pattern surface 12b is inclined. Means. Further, no lateral shift of the optical path B24 of the diffracted light EX1 occurs. For this reason, when the interference light is generated by synthesizing the diffracted light EX1 and the reference light RX1 coaxially at the PBS surface A2, the relative tilt shift and the relative lateral shift amount between the diffracted light EX1 and the reference light RX1 are increased. Therefore, the ratio of the AC signal (beat signal or signal component) in the detection signal obtained when the interference light is photoelectrically converted does not decrease. The same applies to the -1st order diffracted light EX2 on the X axis.

また、回折格子12の格子パターン12bがX軸に平行な軸の回りに傾斜した場合にも、同様にY軸の±1次回折光EY1,EY2の光路の傾斜角のずれ及び横シフトは生じないため、図1の光電センサ40XA〜40YBの検出信号のうちのビート信号の割合は低下しない。従って、それらの検出信号を用いて高いSN比で高精度に第1部材6と第2部材7との相対移動量を計測できる。なお、回折格子12の格子パターン12bがX軸(又はY軸)に平行な軸の回りに傾斜した場合に、X軸の検出信号(又はY軸の検出信号)に対する影響は実質的にない。   Similarly, when the grating pattern 12b of the diffraction grating 12 is tilted about an axis parallel to the X axis, the deviation of the tilt angle and the lateral shift of the optical path of the ± 1st order diffracted beams EY1 and EY2 of the Y axis do not occur. Therefore, the ratio of the beat signal among the detection signals of the photoelectric sensors 40XA to 40YB in FIG. 1 does not decrease. Therefore, the relative movement amount between the first member 6 and the second member 7 can be measured with high accuracy at a high S / N ratio using these detection signals. Note that when the grating pattern 12b of the diffraction grating 12 is tilted around an axis parallel to the X axis (or Y axis), there is substantially no influence on the X axis detection signal (or Y axis detection signal).

なお、以上の説明では回折格子12側が検出ヘッド14(干渉計部15X,15Y)に対して傾斜するものとしたが、計測光MX,MYの回折格子12に対する入射角が0からX方向及び/又はY方向に微少量変化した場合にも、同様に回折光EX1〜EY2の光路の傾斜及び横シフトが生じないため、高いSN比で高精度に第1部材6と第2部材7との相対移動量を計測できる。   In the above description, the diffraction grating 12 side is inclined with respect to the detection head 14 (interferometer units 15X and 15Y). However, the incident angles of the measurement beams MX and MY with respect to the diffraction grating 12 are from 0 to the X direction and / or Alternatively, even when a slight change is made in the Y direction, the optical path of the diffracted beams EX1 to EY2 is not inclined and laterally shifted, so that the relative relationship between the first member 6 and the second member 7 with high SN ratio and high accuracy can be obtained. The amount of movement can be measured.

本実施形態の効果等は以下の通りである。
本実施形態のエンコーダ10は、第1部材6に対してX方向、Y方向、Z方向に3次元的に相対移動可能な第2部材7の相対移動量を計測する3軸のエンコーダ装置である。そして、エンコーダ10は、第1部材6に設けられ、X方向及びY方向を周期方向とする2次元の格子パターン12aを有する反射型の回折格子12と、計測光MX及び参照光RXを含むレーザ光を発生するレーザ光源16と、第2部材7に設けられ、計測光MXを透過させて回折格子12の格子パターン面12bに概ね垂直に入射させるPBS部材24X(第1光学部材)と、第2部材7に設けられるとともに、計測光MXによって回折格子12から発生するX方向の+1次回折光DX1(第1回折光)を回折格子12に入射させ、+1次回折光DX1によって回折格子12から発生するX方向の+1次回折光EX1(第2回折光)をPBS部材24Xに入射させる反射部25XAと、PBS部材24Xに関して反射部25XAに対向するように、かつX方向に直交するY方向に位置ずれして第2部材7に設けられるとともに、計測光MXによって回折格子12からX方向に回折光DX1に対称に発生する−1次回折光DX2(第3回折光)を回折格子12に入射させ、−1次回折光DX2によって回折格子12から発生するX方向の−1次回折光EX2(第4回折光)をPBS部材24Xに入射させる反射部25XBと、PBS部材24Xで反射された回折光EX1及びEX2と参照光RXから分岐された参照光との干渉光をそれぞれ検出する光電センサ40XA,40XBと、光電センサ40XA,40XBの検出信号を用いて第1部材6と第2部材7とのX方向及びZ方向の相対移動量を求める計測演算部42(計測部)と、を備えている。
The effects and the like of this embodiment are as follows.
The encoder 10 of the present embodiment is a three-axis encoder device that measures the relative movement amount of a second member 7 that can be three-dimensionally moved relative to the first member 6 in the X, Y, and Z directions. . The encoder 10 is a laser that is provided on the first member 6 and includes a reflective diffraction grating 12 having a two-dimensional grating pattern 12a having a periodic direction in the X direction and the Y direction, and the measurement light MX and the reference light RX. A laser light source 16 that generates light, a PBS member 24X (first optical member) that is provided on the second member 7, transmits the measurement light MX, and enters the grating pattern surface 12b of the diffraction grating 12 substantially perpendicularly; The + 1st order diffracted light DX1 (first diffracted light) in the X direction generated from the diffraction grating 12 by the measurement light MX is incident on the diffraction grating 12, and is generated from the diffraction grating 12 by the + 1st order diffracted light DX1. A reflective portion 25XA that makes X-direction + 1st order diffracted light EX1 (second diffracted light) incident on the PBS member 24X, and the PBS member 24X faces the reflective portion 25XA. In addition, the first-order diffracted light DX2 (the first diffracted light DX2 (first) generated symmetrically to the diffracted light DX1 in the X direction from the diffraction grating 12 by the measurement light MX is provided in the second member 7 while being displaced in the Y direction orthogonal to the X direction. (3 diffracted light) is incident on the diffraction grating 12, and the X-direction -1st order diffracted light EX2 (4th diffracted light) generated from the diffraction grating 12 by the -1st order diffracted light DX2 is incident on the PBS member 24X; The photoelectric sensors 40XA and 40XB that detect the interference light between the diffracted lights EX1 and EX2 reflected by the PBS member 24X and the reference light branched from the reference light RX, and the detection signals of the photoelectric sensors 40XA and 40XB, respectively, are used. A measurement calculation unit 42 (measurement unit) for obtaining a relative movement amount between the member 6 and the second member 7 in the X direction and the Z direction.

本実施形態によれば、反射部25XA,25XBによって、回折光DX1,DX2が回折格子12に入射するときの入射角はほぼ0になるため、第1部材6と第2部材7との相対位置が変化して、PBS部材24X(検出ヘッド14)に対する回折格子12の格子パターン面12bの相対的な高さ(Z方向の位置)が変化しても、回折光DX1,DX2による回折格子12からの回折光EX1,EX2(再回折光)の光路の変動がほとんどなくなり、回折光EX1,EX2と参照光RX1,RX2との横方向の相対的なシフト量がほぼ0になる。従って、回折格子12の格子パターン面12bの高さの変化に対して干渉光のビート信号(位置情報を含む信号)の強度の低下がなくなり、第1部材6と第2部材7との相対移動量の計測精度を高く維持できる。また、仮に第1部材6と第2部材7とのX方向、Y方向の相対位置が固定されている場合には、光電センサ40XAの検出信号から第1部材6と第2部材7とのZ方向の相対移動量を計測できる。   According to the present embodiment, the incident angle when the diffracted lights DX1 and DX2 are incident on the diffraction grating 12 is substantially 0 by the reflecting portions 25XA and 25XB, so the relative position between the first member 6 and the second member 7 Changes, and the relative height (position in the Z direction) of the grating pattern surface 12b of the diffraction grating 12 with respect to the PBS member 24X (detection head 14) also changes from the diffraction grating 12 by the diffracted light DX1 and DX2. The optical path of the diffracted beams EX1 and EX2 (re-diffracted beams) hardly changes, and the relative shift amount in the lateral direction between the diffracted beams EX1 and EX2 and the reference beams RX1 and RX2 becomes almost zero. Therefore, the intensity of the beat signal (signal including position information) of the interference light is not reduced with respect to the change in the height of the grating pattern surface 12b of the diffraction grating 12, and the relative movement between the first member 6 and the second member 7 is eliminated. High measurement accuracy of quantity can be maintained. Further, if the relative positions of the first member 6 and the second member 7 in the X direction and the Y direction are fixed, the Z of the first member 6 and the second member 7 is detected from the detection signal of the photoelectric sensor 40XA. The relative movement amount in the direction can be measured.

また、反射部25XA,25XBがY方向に位置ずれしているため、干渉計部15Xを容易に小型化できる。
さらに、エンコーダ10は、PBS部材24Yにより回折格子12に概ね垂直に計測光MYを入射させ、回折格子12から計測光MYによってY方向に発生する±1次回折光DY1,DY2を入射角がほぼ0で回折格子12に入射させるX方向に位置ずれした反射部25YA,25YBと、回折格子12から回折光DY1,DY2によって発生する±1次回折光EY1,EX2と参照光RY1,RY2との干渉光を検出する光電センサ40YA,40YBと、を備えている。このため、回折格子12の格子パターン面12bの相対的な高さが変化しても、光電センサ40YA,40YBの検出信号から、第1部材6と第2部材7とのY方向の相対移動量を高精度に計測できる。
Further, since the reflecting portions 25XA and 25XB are displaced in the Y direction, the interferometer portion 15X can be easily downsized.
Further, the encoder 10 causes the measurement light MY to enter the diffraction grating 12 almost perpendicularly by the PBS member 24Y, and the incident angles of the ± first-order diffracted lights DY1 and DY2 generated in the Y direction by the measurement light MY from the diffraction grating 12 are substantially 0. Interference light between the reflection portions 25YA and 25YB that are shifted in the X direction to be incident on the diffraction grating 12 and the ± first-order diffracted lights EY1 and EX2 and the reference lights RY1 and RY2 generated by the diffracted lights DY1 and DY2 from the diffraction grating 12. Photoelectric sensors 40YA and 40YB for detection. Therefore, even if the relative height of the grating pattern surface 12b of the diffraction grating 12 changes, the relative movement amount in the Y direction between the first member 6 and the second member 7 from the detection signals of the photoelectric sensors 40YA and 40YB. Can be measured with high accuracy.

なお、上記の実施形態では以下のような変形が可能である。
上記の実施形態では2次元の回折格子12が使用されているが、回折格子12の代わりに例えばX方向にのみ周期性を持つ1次元の回折格子を使用してもよい。この場合、検出ヘッド14からは、Y軸の干渉計部15Y及び光電センサ40YA,40YB等を省略し、光電センサ40XA,40XBの検出信号を用いて第1部材6と第2部材7とのX方向及びZ方向の相対移動量を計測できる。
In the above embodiment, the following modifications are possible.
In the above-described embodiment, the two-dimensional diffraction grating 12 is used. However, a one-dimensional diffraction grating having periodicity only in the X direction may be used instead of the diffraction grating 12. In this case, the Y-axis interferometer unit 15Y and the photoelectric sensors 40YA and 40YB are omitted from the detection head 14, and the X of the first member 6 and the second member 7 is detected using the detection signals of the photoelectric sensors 40XA and 40XB. The relative movement amount in the direction and the Z direction can be measured.

また、上記の実施形態では、回折光EX1〜EY2と参照光RX1〜RY2との干渉光を検出しているが、例えばX軸の第1の周波数の計測光の+1次回折光EX1と第2の周波数の計測光(上記の実施形態では参照光として使用されていた光)の−1次回折光EX2との干渉光、及びY軸の第1の周波数の計測光の+1次回折光EY1と第2の周波数の計測光の−1次回折光EY2との干渉光を検出してもよい。この場合には、第1部材6と第2部材7とのX方向、Y方向の相対移動量を計測できるとともに、回折格子12の格子パターン面12bの相対的な高さが変動しても、2つの回折光の横ずれがないため、常に高いSN比で高精度に計測を行うことができる。   In the above embodiment, the interference light between the diffracted lights EX1 to EY2 and the reference lights RX1 to RY2 is detected. For example, the first-order diffracted light EX1 of the measurement light having the first frequency on the X axis and the second Interfering light of frequency measuring light (light used as reference light in the above embodiment) with −1st order diffracted light EX2, and + 1st order diffracted light EY1 and second light of measuring light having a first frequency on the Y axis You may detect the interference light with -1st order diffracted light EY2 of the frequency measurement light. In this case, the relative movement amount in the X direction and the Y direction between the first member 6 and the second member 7 can be measured, and even if the relative height of the grating pattern surface 12b of the diffraction grating 12 varies, Since there is no lateral shift of the two diffracted lights, measurement can be performed with high SN ratio and high accuracy at all times.

次に、上記の実施形態では、回折格子12から発生する回折光DX1,EX1等はそれぞれルーフプリズム26XAを介して反射部材28XA,30XAに入射している。しかしながら、図5(A)の第1変形例のX軸の干渉計部15XAの要部で示すように、ルーフプリズム26XAの代わりに、直交する反射面A33,A34を有するルーフミラー44XA(図5(B)参照)及び頂角α3の楔形プリズム46XAを使用してもよい。この場合には、ルーフプリズム26XBの代わりに、ルーフミラー44XB及び楔形プリズム46XBを使用してもよい。ルーフミラー44XA,44XBを使用することによって、干渉計部15XAが軽量化できる場合がある。なお、楔形プリズム46XA,46XBは省略が可能である。同様に、反射部材28XA,30XA等として、平面ミラーを使用してもよい。   Next, in the above embodiment, the diffracted lights DX1, EX1, etc. generated from the diffraction grating 12 are incident on the reflecting members 28XA, 30XA via the roof prism 26XA, respectively. However, as shown in the main part of the X-axis interferometer 15XA of the first modification of FIG. 5A, a roof mirror 44XA having orthogonal reflecting surfaces A33 and A34 instead of the roof prism 26XA (FIG. 5). (B)) and a wedge-shaped prism 46XA having an apex angle α3 may be used. In this case, a roof mirror 44XB and a wedge prism 46XB may be used instead of the roof prism 26XB. By using the roof mirrors 44XA and 44XB, the interferometer unit 15XA may be reduced in weight. The wedge prisms 46XA and 46XB can be omitted. Similarly, a plane mirror may be used as the reflecting members 28XA and 30XA.

また、図6の第1変形例の検出ヘッド14Aの要部に示すように、図1の楔形プリズム34X,34Yを用いる代わりに、X軸の回折光EX1,EX2(計測光)の光路上にそれぞれ1対の偏角プリズム46XA,46XBを設置し、Y軸の回折光EY1,EY2(計測光)の光路上にそれぞれ1対の偏角プリズム46YA,46YBを設置し、参照用の計測光の光路上に1対の偏角プリズム46Cを設置してもよい。上記の実施形態では、検出ヘッド14Aに供給される計測光MX,MYと参照光RX,RYとは角度βで交差している。このため、偏角プリズム46XA,46XB,46YA,46YB,46Cによって、回折光EX1から参照用の計測光の角度及び傾斜方向を調整して、回折光EX1から参照用の計測光を対応する参照光に平行にすることによって、干渉縞の検出信号のSN比を高めることができる。
なお、検出ヘッド14に供給される計測光MX,MYと参照光RX,RYとをほぼ平行にしておいてもよい。この場合には、楔形プリズム34X,34Y又は偏角プリズム46XA〜46Cは設ける必要がない。
Further, as shown in the main part of the detection head 14A of the first modified example in FIG. 6, instead of using the wedge prisms 34X and 34Y in FIG. 1, the X-axis diffracted beams EX1 and EX2 (measurement beams) are on the optical path. A pair of declination prisms 46XA and 46XB are installed, and a pair of declination prisms 46YA and 46YB are installed on the optical path of the Y-axis diffracted beams EY1 and EY2 (measurement beam), respectively. A pair of declination prisms 46C may be installed on the optical path. In the above embodiment, the measurement beams MX and MY and the reference beams RX and RY supplied to the detection head 14A intersect at an angle β. For this reason, the angle and inclination direction of the reference measurement light are adjusted from the diffracted light EX1 by the declination prisms 46XA, 46XB, 46YA, 46YB, and 46C, and the reference light corresponding to the reference measurement light from the diffracted light EX1. The signal-to-noise ratio of the interference fringe detection signal can be increased.
Note that the measurement beams MX and MY supplied to the detection head 14 and the reference beams RX and RY may be substantially parallel. In this case, it is not necessary to provide the wedge-shaped prisms 34X and 34Y or the declination prisms 46XA to 46C.

[第2の実施形態]
本発明の第2の実施形態につき図7〜図9を参照して説明する。図7は、この実施形態に係るエンコーダ装置を備えた露光装置EXの概略構成を示す。露光装置EXは、スキャニングステッパーよりなる走査露光型の投影露光装置である。露光装置EXは、投影光学系PL(投影ユニットPU)を備えており、以下、投影光学系PLの光軸AXと平行にZ軸を取り、これに直交する面(ほぼ水平面に平行な面)内でレチクルRとウエハWとが相対走査される方向にY軸を、Z軸及びY軸に直交する方向にX軸を取って説明する。
[Second Embodiment]
A second embodiment of the present invention will be described with reference to FIGS. FIG. 7 shows a schematic configuration of an exposure apparatus EX including the encoder apparatus according to this embodiment. The exposure apparatus EX is a scanning exposure type projection exposure apparatus composed of a scanning stepper. The exposure apparatus EX includes a projection optical system PL (projection unit PU). Hereinafter, the Z-axis is parallel to the optical axis AX of the projection optical system PL, and a plane orthogonal to the Z-axis (a plane substantially parallel to the horizontal plane). In the following description, the Y axis is taken in the direction in which the reticle R and the wafer W are relatively scanned, and the X axis is taken in the direction perpendicular to the Z axis and the Y axis.

露光装置EXは、例えば米国特許出願公開第2003/0025890号明細書などに開示される照明系110、及び照明系110からの露光用の照明光(露光光)IL(例えば波長193nmのArFエキシマレーザ光、固体レーザ(半導体レーザなど)の高調波など)により照明されるレチクルR(マスク)を保持するレチクルステージRSTを備えている。さらに、露光装置EXは、レチクルRから射出された照明光ILをウエハW(基板)に投射する投影光学系PLを含む投影ユニットPU、ウエハWを保持するウエハステージWSTを含むステージ装置195、及び制御系等(図9参照)を備えている。   The exposure apparatus EX includes an illumination system 110 disclosed in, for example, US Patent Application Publication No. 2003/0025890, and illumination light (exposure light) IL (for example, an ArF excimer laser having a wavelength of 193 nm) from the illumination system 110 A reticle stage RST that holds a reticle R (mask) illuminated by light, a harmonic of a solid-state laser (such as a semiconductor laser). Further, the exposure apparatus EX includes a projection unit PU including a projection optical system PL that projects the illumination light IL emitted from the reticle R onto the wafer W (substrate), a stage apparatus 195 including a wafer stage WST that holds the wafer W, and A control system or the like (see FIG. 9) is provided.

レチクルRはレチクルステージRSTの上面に真空吸着等により保持され、レチクルRのパターン面(下面)には、回路パターンなどが形成されている。レチクルステージRSTは、例えばリニアモータ等を含む図9のレチクルステージ駆動系111によって、XY平面内で微少駆動可能であると共に、走査方向(Y方向)に指定された走査速度で駆動可能である。   The reticle R is held on the upper surface of the reticle stage RST by vacuum suction or the like, and a circuit pattern or the like is formed on the pattern surface (lower surface) of the reticle R. The reticle stage RST can be driven minutely in the XY plane by the reticle stage drive system 111 of FIG. 9 including a linear motor, for example, and can be driven at a scanning speed specified in the scanning direction (Y direction).

レチクルステージRSTの移動面内の位置情報(X方向、Y方向の位置、及びθz方向の回転角を含む)は、レーザ干渉計よりなるレチクル干渉計116によって、移動鏡115(又は鏡面加工されたステージ端面)を介して例えば0.5〜0.1nm程度の分解能で常時検出される。レチクル干渉計116の計測値は、図9のコンピュータよりなる主制御装置120に送られる。主制御装置120は、その計測値に基づいてレチクルステージ駆動系111を制御することで、レチクルステージRSTの位置及び速度を制御する。   Position information in the moving plane of the reticle stage RST (including the position in the X direction, the Y direction, and the rotation angle in the θz direction) is transferred to the moving mirror 115 (or mirror-finished) by the reticle interferometer 116 including a laser interferometer. For example, it is always detected with a resolution of about 0.5 to 0.1 nm via the stage end face. The measurement value of reticle interferometer 116 is sent to main controller 120 formed of a computer shown in FIG. Main controller 120 controls reticle stage drive system 111 based on the measurement value, thereby controlling the position and speed of reticle stage RST.

図7において、レチクルステージRSTの下方に配置された投影ユニットPUは、鏡筒140と、鏡筒140内に所定の位置関係で保持された複数の光学素子を有する投影光学系PLとを含む。投影光学系PLは、例えば両側テレセントリックで所定の投影倍率β(例えば1/4倍、1/5倍などの縮小倍率)を有する。照明系110からの照明光ILによってレチクルRの照明領域IARが照明されると、レチクルRを通過した照明光ILにより、投影光学系PLを介して照明領域IAR内のレチクルRの回路パターンの像が、ウエハ(半導体ウエハ)Wの一つのショット領域の露光領域IA(照明領域IARと共役な領域)に形成される。   In FIG. 7, the projection unit PU disposed below the reticle stage RST includes a lens barrel 140 and a projection optical system PL having a plurality of optical elements held in a predetermined positional relationship within the lens barrel 140. The projection optical system PL is, for example, telecentric on both sides and has a predetermined projection magnification β (for example, a reduction magnification of 1/4 times, 1/5 times, etc.). When the illumination area IAR of the reticle R is illuminated by the illumination light IL from the illumination system 110, an image of the circuit pattern of the reticle R in the illumination area IAR via the projection optical system PL by the illumination light IL that has passed through the reticle R. Are formed in an exposure area IA (an area conjugate to the illumination area IAR) of one shot area of the wafer (semiconductor wafer) W.

また、露光装置EXは、液浸法を適用した露光を行うため、投影光学系PLを構成する最も像面側(ウエハW側)の光学素子である先端レンズ191を保持する鏡筒140の下端部の周囲を取り囲むように、局所液浸装置108の一部を構成するノズルユニット132が設けられている。ノズルユニット132は、露光用の液体Lq(例えば純水)を供給するための供給管131A及び回収管131Bを介して、液体供給装置186及び液体回収装置189(図9参照)に接続されている。なお、液浸タイプの露光装置としない場合には、上記の局所液浸装置108は設けなくともよい。   In addition, since the exposure apparatus EX performs exposure using the liquid immersion method, the lower end of the lens barrel 140 that holds the tip lens 191 that is an optical element on the most image plane side (wafer W side) constituting the projection optical system PL is used. A nozzle unit 132 constituting a part of the local liquid immersion device 108 is provided so as to surround the periphery of the part. The nozzle unit 132 is connected to a liquid supply device 186 and a liquid recovery device 189 (see FIG. 9) via a supply tube 131A and a recovery tube 131B for supplying an exposure liquid Lq (for example, pure water). . If the immersion type exposure apparatus is not used, the local immersion apparatus 108 may not be provided.

また、ウエハステージWSTは、不図示の複数の例えば真空予圧型空気静圧軸受(エアパッド)を介して、ベース盤112のXY面に平行な上面112aに非接触で支持されている。ウエハステージWSTは、例えば平面モータ、又は直交する2組のリニアモータを含むステージ駆動系124(図9参照)によってX方向及びY方向に駆動可能である。露光装置EXは、レチクルRのアライメントを行う空間像計測系(不図示)、ウエハWのアライメントを行うアライメント系AL(図9参照)、照射系90a及び受光系90bよりなりウエハWの表面の複数箇所のZ位置を計測する斜入射方式の多点のオートフォーカスセンサ90(図8参照)、及びウエハステージWSTの位置情報を計測するためのエンコーダ装置8Bを備えている。   Wafer stage WST is supported in a non-contact manner on upper surface 112a parallel to the XY plane of base board 112 via a plurality of, for example, vacuum preload type static air bearings (air pads) (not shown). Wafer stage WST can be driven in the X and Y directions by a stage drive system 124 (see FIG. 9) including, for example, a planar motor or two sets of orthogonal linear motors. The exposure apparatus EX includes an aerial image measurement system (not shown) for aligning the reticle R, an alignment system AL (see FIG. 9) for aligning the wafer W, an irradiation system 90a, and a light receiving system 90b. An oblique incidence type multi-point autofocus sensor 90 (see FIG. 8) for measuring the Z position of the location, and an encoder device 8B for measuring position information of wafer stage WST are provided.

ウエハステージWSTは、X方向、Y方向に駆動されるステージ本体191と、ステージ本体191上に搭載されたウエハテーブルWTBと、ステージ本体191内に設けられて、ステージ本体191に対するウエハテーブルWTB(ウエハW)のZ方向の位置、及びθx方向、θy方向のチルト角を相対的に微小駆動するZ・レベリング機構とを備えている。ウエハテーブルWTBの中央の上部には、ウエハWを真空吸着等によってほぼXY平面に平行な吸着面上に保持するウエハホルダ(不図示)が設けられている。   Wafer stage WST is provided in stage main body 191, stage main body 191 driven in X and Y directions, wafer table WTB mounted on stage main body 191, and wafer table WTB (wafer for stage main body 191). And a Z / leveling mechanism that relatively finely drives the position of W) in the Z direction and the tilt angle in the θx direction and the θy direction. A wafer holder (not shown) that holds the wafer W on a suction surface substantially parallel to the XY plane by vacuum suction or the like is provided at the upper center of the wafer table WTB.

また、ウエハテーブルWTBの上面には、ウエハホルダ上に載置されるウエハの表面とほぼ同一面となる、液体Lqに対して撥液化処理された表面(又は保護部材)を有し、かつ外形(輪郭)が矩形でその中央部にウエハホルダ(ウエハの載置領域)よりも一回り大きな円形の開口が形成された高平面度の平板状のプレート体128が設けられている。
なお、上述の局所液浸装置108を設けたいわゆる液浸型の露光装置の構成にあっては、さらにプレート体128は、図8のウエハテーブルWTB(ウエハステージWST)の平面図に示されるように、その円形の開口を囲む、外形(輪郭)が矩形の表面に撥液化処理が施されたプレート部(撥液板)128aと、プレート部128aを囲む周辺部128eとを有する。周辺部128eの上面に、プレート部128aをY方向に挟むようにX方向に細長い1対の2次元の回折格子12A,12Bが配置され、プレート部128aをX方向に挟むようにY方向に細長い1対の2次元の回折格子12C,12Dが配置されている。回折格子12A〜12Dは、図1の回折格子12と同様にX方向、Y方向を周期方向とする2次元の格子パターンが形成された反射型の回折格子である。
In addition, the upper surface of wafer table WTB has a surface (or a protective member) that has been subjected to a liquid repellency treatment with respect to liquid Lq and is substantially flush with the surface of the wafer placed on the wafer holder. A flat plate member 128 having a high flatness is provided in which a circular opening is formed in the center of the rectangular shape and a circular opening that is slightly larger than the wafer holder (wafer mounting region).
In the configuration of the so-called immersion type exposure apparatus provided with the above-described local immersion apparatus 108, the plate body 128 is further shown in the plan view of the wafer table WTB (wafer stage WST) in FIG. In addition, a plate portion (liquid repellent plate) 128a surrounding the circular opening and having a liquid repellent treatment on a surface having a rectangular outer shape (outline), and a peripheral portion 128e surrounding the plate portion 128a. A pair of two-dimensional diffraction gratings 12A and 12B elongated in the X direction so as to sandwich the plate portion 128a in the Y direction is disposed on the upper surface of the peripheral portion 128e, and elongated in the Y direction so as to sandwich the plate portion 128a in the X direction. A pair of two-dimensional diffraction gratings 12C and 12D are arranged. The diffraction gratings 12 </ b> A to 12 </ b> D are reflection type diffraction gratings in which a two-dimensional grating pattern having a periodic direction in the X direction and the Y direction is formed as in the diffraction grating 12 of FIG. 1.

また、図7において、投影ユニットPUを支持するフレーム(不図示)に連結部材(不図示)を介してXY面にほぼ平行な平板状の計測フレーム150が支持されている。計測フレーム150の底面に、投影光学系PLをX方向に挟むように、図1の3軸の検出ヘッド14と同じ構成の複数の検出ヘッド14が固定され、投影光学系PLをY方向に挟むように、図1の検出ヘッド14と同じ構成の複数の検出ヘッド14が固定されている(図10参照)。また、複数の検出ヘッド14にレーザ光(計測光及び参照光)を供給するための図1のレーザ光源16と同様の一つ又は複数のレーザ光源(不図示)も備えられている。   In FIG. 7, a flat measurement frame 150 substantially parallel to the XY plane is supported on a frame (not shown) that supports the projection unit PU via a connecting member (not shown). A plurality of detection heads 14 having the same configuration as the triaxial detection head 14 in FIG. 1 are fixed to the bottom surface of the measurement frame 150 so as to sandwich the projection optical system PL in the X direction, and the projection optical system PL is sandwiched in the Y direction. As described above, a plurality of detection heads 14 having the same configuration as the detection head 14 of FIG. 1 are fixed (see FIG. 10). Further, one or a plurality of laser light sources (not shown) similar to the laser light source 16 of FIG. 1 for supplying laser light (measurement light and reference light) to the plurality of detection heads 14 are also provided.

図8において、投影光学系PLからの照明光でウエハWを露光している期間では、常にY方向の一列A1内の複数の検出ヘッド14のいずれか2つが回折格子12A,12Bに対向し、X方向の一行A2の複数の検出ヘッド14のいずれか2つが回折格子12C,12Dに対向するように構成されている。一列A1内の各検出ヘッド14は、回折格子12A又は12Bに計測光を照射し、回折格子12A,12Bから発生する回折光と参照光との干渉光の検出信号を対応する計測演算部42(図9参照)に供給する。これらの計測演算部42では、図1の計測演算部42と同様に、ウエハステージWSTと計測フレーム150とのX方向、Y方向、Z方向の相対位置(相対移動量)を例えば0.5〜0.1nmの分解能で求めてそれぞれ計測値を切り替え部80Aに供給する。計測値切り替え部80Aでは、回折格子12A,12Bに対向している検出ヘッド14に対応する計測演算部42から供給される相対位置の情報を主制御装置120に供給する。   In FIG. 8, during the period in which the wafer W is exposed with the illumination light from the projection optical system PL, any two of the plurality of detection heads 14 in one row A1 in the Y direction always face the diffraction gratings 12A and 12B. Any two of the plurality of detection heads 14 in one row A2 in the X direction are configured to face the diffraction gratings 12C and 12D. Each of the detection heads 14 in the row A1 irradiates the diffraction grating 12A or 12B with measurement light, and corresponds to a measurement calculation unit 42 (corresponding to a detection signal of interference light between the diffraction light generated from the diffraction gratings 12A and 12B and the reference light. (See FIG. 9). In these measurement calculation units 42, as in the measurement calculation unit 42 in FIG. 1, the relative positions (relative movement amounts) of the wafer stage WST and the measurement frame 150 in the X direction, the Y direction, and the Z direction are set to 0.5 to, for example. Each measurement value is obtained with a resolution of 0.1 nm and supplied to the switching unit 80A. In the measurement value switching unit 80A, information on the relative position supplied from the measurement calculation unit 42 corresponding to the detection head 14 facing the diffraction gratings 12A and 12B is supplied to the main controller 120.

また、一行A2に対応する各検出ヘッド14は、回折格子12C又は12Dに計測光を照射し、回折格子12C,12Dから発生する回折光と参照光との干渉光の検出信号を対応する計測演算部42(図9参照)に供給する。これらの計測演算部42では、図1の計測演算部42と同様に、ウエハステージWSTと計測フレーム150とのX方向、Y方向、Z方向の相対位置(相対移動量)を例えば0.5〜0.1nmの分解能で求めて計測値切り替え部80Bに供給する。計測値切り替え部80Bでは、回折格子12C,12Dに対向している検出ヘッド14に対応する計測演算部42から供給される相対位置の情報を主制御装置120に供給する。   Each detection head 14 corresponding to one row A2 irradiates the diffraction grating 12C or 12D with measurement light, and performs a measurement calculation corresponding to a detection signal of interference light between the diffraction light generated from the diffraction gratings 12C and 12D and the reference light. It supplies to the part 42 (refer FIG. 9). In these measurement calculation units 42, as in the measurement calculation unit 42 in FIG. 1, the relative positions (relative movement amounts) of the wafer stage WST and the measurement frame 150 in the X direction, the Y direction, and the Z direction are set to 0.5 to, for example. Obtained with a resolution of 0.1 nm and supplied to the measured value switching unit 80B. In the measurement value switching unit 80B, information on the relative position supplied from the measurement calculation unit 42 corresponding to the detection head 14 facing the diffraction gratings 12C and 12D is supplied to the main controller 120.

一列A1内の複数の検出ヘッド14、レーザ光源(不図示)、計測演算部42、及び回折格子12A,12Bから3軸のエンコーダ10Aが構成され、一行A2内の複数の検出ヘッド14、レーザ光源(不図示)、計測演算部42、及び回折格子12C,12Dから3軸のエンコーダ10Bが構成されている。そして、3軸のエンコーダ10A,10B、及び計測値切り替え部80A,80Bからエンコーダ装置8Bが構成されている。主制御装置120は、エンコーダ装置8Bから供給される相対位置の情報に基づいて、計測フレーム150(投影光学系PL)に対するウエハステージWSTのX方向、Y方向、Z方向の位置、及びθz方向の回転角等の情報を求め、この情報に基づいてステージ駆動系124を介してウエハステージWSTを駆動する。   A plurality of detection heads 14 in one row A1, a laser light source (not shown), a measurement calculation unit 42, and diffraction gratings 12A and 12B constitute a three-axis encoder 10A. The plurality of detection heads 14 in one row A2 and the laser light source (Not shown), the measurement calculation unit 42, and the diffraction gratings 12C and 12D constitute a three-axis encoder 10B. The encoder device 8B is composed of the three-axis encoders 10A and 10B and the measurement value switching units 80A and 80B. Based on the information on the relative position supplied from encoder device 8B, main controller 120 determines the position of wafer stage WST relative to measurement frame 150 (projection optical system PL) in the X, Y, and Z directions, and in the θz direction. Information such as the rotation angle is obtained, and wafer stage WST is driven via stage drive system 124 based on this information.

そして、露光装置EXの露光時には、先ずレチクルR及びウエハWのアライメントが行われる。その後、レチクルRへの照明光ILの照射を開始して、投影光学系PLを介してレチクルRのパターンの一部の像をウエハWの表面の一つのショット領域に投影しつつ、レチクルステージRSTとウエハステージWSTとを投影光学系PLの投影倍率βを速度比としてY方向に同期して移動(同期走査)する走査露光動作によって、そのショット領域にレチクルRのパターン像が転写される。その後、ウエハステージWSTを介してウエハWをX方向、Y方向にステップ移動する動作と、上記の走査露光動作とを繰り返すことによって、液浸法でかつステップ・アンド・スキャン方式でウエハWの全部のショット領域にレチクルRのパターン像が転写される。   Then, at the time of exposure by the exposure apparatus EX, alignment of the reticle R and the wafer W is first performed. Thereafter, irradiation of the reticle R with the illumination light IL is started, and an image of a part of the pattern of the reticle R is projected onto one shot area on the surface of the wafer W via the projection optical system PL, while the reticle stage RST. The pattern image of the reticle R is transferred to the shot area by a scanning exposure operation that moves the wafer stage WST in synchronization with the Y direction using the projection magnification β of the projection optical system PL as a speed ratio (synchronous scanning). Thereafter, by repeating the step movement of the wafer W in the X and Y directions via the wafer stage WST and the scanning exposure operation described above, the entire wafer W is immersed by the immersion method and the step-and-scan method. The pattern image of the reticle R is transferred to the shot area.

この際に、エンコーダ装置8Bの検出ヘッド14においては、計測光及び回折光の光路長はレーザ干渉計に比べて短いため、検出ヘッド14を用いた計測値に対する空気揺らぎの影響が非常に小さい。従って、本実施形態のエンコーダ装置8Bは、レーザ干渉計と比較して、空気が揺らぐ程度の短い期間における計測安定性(短期安定性)が格段に優れているため、レチクルRのパターン像をウエハWに高精度に転写できる。さらに、検出ヘッド14は回折格子12A〜12DのZ位置が変化しても常に高いSN比で相対移動量の上方を含む信号を検出できるため、常に高精度にウエハステージWSTを駆動できる。   At this time, in the detection head 14 of the encoder device 8B, since the optical path lengths of the measurement light and the diffracted light are shorter than those of the laser interferometer, the influence of the air fluctuation on the measurement value using the detection head 14 is very small. Accordingly, the encoder device 8B of the present embodiment has much better measurement stability (short-term stability) in a short period of time when the air fluctuates than the laser interferometer. Can be transferred to W with high accuracy. Furthermore, since the detection head 14 can always detect a signal including the upper portion of the relative movement amount with a high SN ratio even if the Z positions of the diffraction gratings 12A to 12D change, the wafer stage WST can always be driven with high accuracy.

なお、本実施形態では、計測フレーム150側に検出ヘッド14を配置し、ウエハステージWST側に回折格子12A〜12Dを配置している。この他の構成として、計測フレーム150側に回折格子12A〜12Dを配置し、ウエハステージWST側に検出ヘッド14を配置してもよい。
また、上記の実施形態の露光装置EX又は露光方法を用いて半導体デバイス等の電子デバイス(又はマイクロデバイス)を製造する場合、電子デバイスは、図10に示すように、電子デバイスの機能・性能設計を行うステップ221、この設計ステップに基づいたレチクル(マスク)を製作するステップ222、デバイスの基材である基板(ウエハ)を製造してレジストを塗布するステップ223、前述した実施形態の露光装置(露光方法)によりレチクルのパターンを基板(感光基板)に露光する工程、露光した基板を現像する工程、現像した基板の加熱(キュア)及びエッチング工程などを含む基板処理ステップ224、デバイス組み立てステップ(ダイシング工程、ボンディング工程、パッケージ工程などの加工プロセスを含む)225、並びに検査ステップ226等を経て製造される。
In the present embodiment, the detection head 14 is arranged on the measurement frame 150 side, and the diffraction gratings 12A to 12D are arranged on the wafer stage WST side. As another configuration, the diffraction gratings 12A to 12D may be arranged on the measurement frame 150 side, and the detection head 14 may be arranged on the wafer stage WST side.
Further, when an electronic device (or microdevice) such as a semiconductor device is manufactured using the exposure apparatus EX or the exposure method of the above embodiment, the electronic device has a function / performance design of the electronic device as shown in FIG. Step 221 for performing a step, Step 222 for fabricating a reticle (mask) based on this design step, Step 223 for fabricating a substrate (wafer) as a base material of the device and applying a resist, and the exposure apparatus ( Substrate processing step 224 including a step of exposing a reticle pattern to a substrate (photosensitive substrate) by an exposure method), a step of developing the exposed substrate, a heating (curing) and etching step of the developed substrate, and a device assembly step (dicing) (Including processing processes such as processes, bonding processes, and packaging processes) 22 And an inspection step 226, and the like.

言い換えると、このデバイスの製造方法は、上記の実施例の露光装置EX(露光方法)を用いてレチクルのパターンの像を基板(ウエハ)に転写し、その基板を現像するリソグラフィ工程と、そのパターンの像が転写されたその基板をそのパターンの像に基づいて加工する工程(ステップ224のエッチング等)とを含んでいる。この際に、上記の実施例によれば、露光装置のウエハステージWSTの位置を高精度に制御できるため、電子デバイスを高精度に製造できる。   In other words, this device manufacturing method includes a lithography process in which an image of a reticle pattern is transferred to a substrate (wafer) using the exposure apparatus EX (exposure method) of the above embodiment, and the pattern is developed. And a step (such as etching in step 224) of processing the substrate on which the image is transferred on the basis of the image of the pattern. At this time, according to the above-described embodiment, the position of wafer stage WST of the exposure apparatus can be controlled with high accuracy, so that an electronic device can be manufactured with high accuracy.

なお、本発明は、上述の走査露光型の投影露光装置(スキャナ)の他に、ステップ・アンド・リピート方式の投影露光装置(ステッパ等)にも適用できる。さらに、本発明は、液浸型露光装置以外のドライ露光型の露光装置にも同様に適用することができる。
また、本発明は、半導体デバイス製造用の露光装置への適用に限定されることなく、例えば、角型のガラスプレートに形成される液晶表示素子、若しくはプラズマディスプレイ等のディスプレイ装置用の露光装置や、撮像素子(CCD等)、マイクロマシーン、薄膜磁気ヘッド、及びDNAチップ等の各種デバイスを製造するための露光装置にも広く適用できる。更に、本発明は、各種デバイスのマスクパターンが形成されたマスク(フォトマスク、レチクル等)をフォトリソグフィ工程を用いて製造する際の、露光装置にも適用することができる。
The present invention can be applied to a step-and-repeat type projection exposure apparatus (stepper or the like) in addition to the above-described scanning exposure type projection exposure apparatus (scanner). Furthermore, the present invention can be similarly applied to a dry exposure type exposure apparatus other than an immersion type exposure apparatus.
In addition, the present invention is not limited to application to an exposure apparatus for manufacturing a semiconductor device, for example, an exposure apparatus for a display device such as a liquid crystal display element formed on a square glass plate or a plasma display, It can also be widely applied to an exposure apparatus for manufacturing various devices such as an image sensor (CCD or the like), a micromachine, a thin film magnetic head, and a DNA chip. Furthermore, the present invention can also be applied to an exposure apparatus when manufacturing a mask (photomask, reticle, etc.) on which a mask pattern of various devices is formed using a photolithography process.

また、上記の実施形態のエンコーダ10は、露光装置以外の検査装置又は計測装置等の検査又は加工対象の物体用の光学系(レーザ光を集光する光学系等)と、その物体を移動する移動装置(ステージ等)とを備えた光学装置において、その移動装置(物体)の例えばその光学系に対する相対移動量を計測するために適用することができる。
なお、本発明は上述の実施形態に限定されず、本発明の要旨を逸脱しない範囲で種々の構成を取り得ることは勿論である。
In addition, the encoder 10 of the above-described embodiment moves an optical system for an object to be inspected or processed (such as an optical system for condensing laser light) such as an inspection apparatus or a measurement apparatus other than the exposure apparatus, and the object. In an optical device provided with a moving device (such as a stage), the present invention can be applied to measure the relative movement amount of the moving device (object) with respect to the optical system, for example.
In addition, this invention is not limited to the above-mentioned embodiment, Of course, a various structure can be taken in the range which does not deviate from the summary of this invention.

EX…露光装置、R…レチクル、W…ウエハ、MX,MY…計測光、DX1,DY1,EX1,EY1…+1次回折光、DX2,DY2,EX2,EY2…−1次回折光、6…第1部材、7…第2部材、10…エンコーダ、12…2次元の回折格子、14…検出ヘッド、16…レーザ光源、24X,24Y…PBS(偏光ビームスプリッター)部材、25XA,25XB,25YA,25YB…反射部、26XA,26XB,26YA,26YB…ルーフプリズム、40XA,40XB,40YA,40YB,40C…光電センサ、42…計測演算部   EX ... exposure apparatus, R ... reticle, W ... wafer, MX, MY ... measurement light, DX1, DY1, EX1, EY1 ... + 1st order diffracted light, DX2, DY2, EX2, EY2 ... -1st order diffracted light, 6 ... first member 7 ... second member, 10 ... encoder, 12 ... two-dimensional diffraction grating, 14 ... detection head, 16 ... laser light source, 24X, 24Y ... PBS (polarization beam splitter) member, 25XA, 25XB, 25YA, 25YB ... reflection , 26XA, 26XB, 26YA, 26YB ... roof prism, 40XA, 40XB, 40YA, 40YB, 40C ... photoelectric sensor, 42 ... measurement calculation unit

Claims (12)

第1部材と該第1部材に対して少なくとも第1方向に相対移動可能に支持された第2部材との相対移動量を計測するエンコーダ装置であって、
前記第1部材に設けられ、少なくとも前記第1方向を周期方向とする格子パターンを有する反射型の回折格子と、
計測光を射出する光源部と、
前記第2部材に設けられ、前記計測光を前記回折格子の格子パターン面に概ね垂直に入射させる第1光学部材と、
前記第2部材に設けられるとともに、前記計測光によって前記回折格子から前記第1方向に関して発生する第1回折光を前記回折格子に入射させ、前記第1回折光によって前記回折格子から発生する第2回折光を前記第1光学部材に入射させる第1反射部と、
前記第1光学部材に関して前記第1反射部に対向するように、かつ前記第1方向に直交する方向に位置ずれして前記第2部材に設けられるとともに、前記計測光によって前記回折格子から前記第1方向に関して発生する前記第1回折光と異なる次数の第3回折光を前記回折格子に入射させ、前記第3回折光によって前記回折格子から発生する第4回折光を前記第1光学部材に入射させる第2反射部と、
前記第1光学部材を介した前記第2回折光及び前記第4回折光と他の光束との干渉光をそれぞれ検出する第1及び第2光電検出器と、
前記第1及び第2光電検出器の検出信号を用いて前記第1部材と前記第2部材との相対移動量を求める計測部と、
を備えることを特徴とするエンコーダ装置。
An encoder device for measuring a relative movement amount between a first member and a second member supported so as to be relatively movable in at least a first direction with respect to the first member,
A reflective diffraction grating provided on the first member and having a grating pattern having at least the first direction as a periodic direction;
A light source unit for emitting measurement light;
A first optical member provided on the second member for allowing the measurement light to enter the grating pattern surface of the diffraction grating substantially perpendicularly;
A second diffracted light that is provided on the second member and that is generated by the measurement light from the diffraction grating in the first direction is incident on the diffraction grating, and is generated from the diffraction grating by the first diffracted light. A first reflecting portion for making diffracted light incident on the first optical member;
The first optical member is provided on the second member so as to be opposed to the first reflecting portion and shifted in a direction orthogonal to the first direction, and from the diffraction grating by the measurement light. Third diffracted light having a different order from the first diffracted light generated in one direction is incident on the diffraction grating, and fourth diffracted light generated from the diffraction grating by the third diffracted light is incident on the first optical member. A second reflecting part to be made,
First and second photoelectric detectors for detecting interference light between the second diffracted light and the fourth diffracted light and other light beams via the first optical member;
A measurement unit for obtaining a relative movement amount between the first member and the second member using detection signals of the first and second photoelectric detectors;
An encoder device comprising:
前記回折格子の格子パターン面に対する前記計測光の入射位置に対して、前記格子パターン面に対する前記第1回折光及び前記第3回折光の入射位置が前記第1方向に直交する方向に概ね対称にずれていることを特徴とする請求項1に記載のエンコーダ装置。   The incident positions of the first diffracted light and the third diffracted light with respect to the grating pattern surface are substantially symmetrical with respect to the direction orthogonal to the first direction with respect to the incident position of the measurement light with respect to the grating pattern surface of the diffraction grating. The encoder device according to claim 1, wherein the encoder device is deviated. 前記第3回折光は、前記回折格子から前記第1方向に関して前記第1回折光とほぼ対称に発生することを特徴とする請求項1又は2に記載のエンコーダ装置。   3. The encoder device according to claim 1, wherein the third diffracted light is generated substantially symmetrically with the first diffracted light with respect to the first direction from the diffraction grating. 前記第1反射部は、前記第1回折光を前記回折格子に概ね垂直に入射させ、前記回折格子から前記第1回折光に概ね平行に発生する前記第2回折光を前記第1光学部材に入射させ、
前記第2反射部は、前記第3回折光を前記回折格子に概ね垂直に入射させ、前記回折格子から前記第3回折光に概ね平行に発生する前記第4回折光を前記第1光学部材に入射させることを特徴とする請求項3に記載のエンコーダ装置。
The first reflecting portion causes the first diffracted light to enter the diffraction grating substantially perpendicularly, and the second diffracted light generated from the diffraction grating substantially parallel to the first diffracted light is applied to the first optical member. Incident,
The second reflecting unit causes the third diffracted light to enter the diffraction grating substantially perpendicularly, and the fourth diffracted light generated from the diffraction grating to be substantially parallel to the third diffracted light is applied to the first optical member. The encoder device according to claim 3, wherein the encoder device is incident.
前記第1反射部は、前記第1回折光及び前記第2回折光を反射する直交する2つの反射面を持つ第1光束反射部材を有し、
前記第2反射部は、前記第3回折光及び前記第4回折光を反射する直交する2つの反射面を持つ第2光束反射部材を有することを特徴とする請求項1〜4のいずれか一項に記載のエンコーダ装置。
The first reflecting portion includes a first light beam reflecting member having two orthogonal reflecting surfaces that reflect the first diffracted light and the second diffracted light,
The said 2nd reflection part has a 2nd light beam reflective member with two orthogonal reflective surfaces which reflect the said 3rd diffracted light and the said 4th diffracted light, The any one of Claims 1-4 characterized by the above-mentioned. The encoder device according to item.
前記光源部は、前記計測光及び該計測光と偏光状態の異なる参照光を射出し、
前記第1光学部材は、前記計測光及び前記参照光のうち前記計測光を前記回折格子に入射させる偏光ビームスプリッターを含み、
前記第1及び第2光電検出器は、前記第2回折光及び前記第4回折光と前記参照光から分岐された第1参照光及び第2参照光との干渉光をそれぞれ検出することを特徴とすることを特徴とする請求項1〜5のいずれか一項に記載のエンコーダ装置。
The light source unit emits the measurement light and reference light having a polarization state different from that of the measurement light,
The first optical member includes a polarization beam splitter that makes the measurement light incident on the diffraction grating out of the measurement light and the reference light,
The first and second photoelectric detectors detect interference light between the second diffracted light, the fourth diffracted light, and the first reference light and the second reference light branched from the reference light, respectively. The encoder device according to any one of claims 1 to 5, wherein
前記計測光及び前記参照光は前記光源部から所定の角度をもって射出され、
前記第2回折光と前記第1参照光との相対角度を補正する第1角度補正部材と、
前記第4回折光と前記第2参照光との相対角度を補正する第2角度補正部材とを備えることを特徴とする請求項6に記載のエンコーダ装置。
The measurement light and the reference light are emitted from the light source unit at a predetermined angle,
A first angle correction member that corrects a relative angle between the second diffracted light and the first reference light;
The encoder apparatus according to claim 6, further comprising a second angle correction member that corrects a relative angle between the fourth diffracted light and the second reference light.
前記回折格子は、前記第1方向及び該第1方向に直交する第2方向を周期方向とする2次元の反射型の回折格子であり、
前記第2部材に設けられ、前記計測光を前記回折格子の格子パターン面に概ね垂直に入射させる第2光学部材と、
前記第2部材に設けられるとともに、前記計測光によって前記回折格子から前記第2方向に関して発生する第5回折光を前記回折格子に入射させ、前記第5回折光によって前記回折格子から発生する第6回折光を前記第2光学部材に入射させる第3反射部と、
前記第2光学部材に関して前記第3反射部に対向するように、かつ前記第2方向に直交する方向に位置ずれして前記第2部材に設けられるとともに、前記計測光によって前記回折格子から前記第2方向に関して発生する前記第5回折光と異なる次数の第7回折光を前記回折格子に入射させ、前記第7回折光によって前記回折格子から発生する第8回折光を前記第2光学部材に入射させる第4反射部と、
前記第2光学部材を介した前記第5回折光及び前記第8回折光と他の光束との干渉光をそれぞれ検出する第3及び第4光電検出器と、を備え、
前記計測部は、前記第1、第2、第3、及び第4光電検出器の検出信号を用いて前記第1部材と前記第2部材との相対移動量を求めることを特徴とする請求項1〜7のいずれか一項に記載のエンコーダ装置。
The diffraction grating is a two-dimensional reflection type diffraction grating whose periodic direction is the first direction and a second direction orthogonal to the first direction;
A second optical member that is provided on the second member and makes the measurement light incident substantially perpendicularly to a grating pattern surface of the diffraction grating;
A fifth diffracted light that is provided on the second member and is generated from the diffraction grating in the second direction by the measurement light is incident on the diffraction grating, and is generated from the diffraction grating by the fifth diffracted light. A third reflecting portion for allowing diffracted light to enter the second optical member;
The second optical member is provided on the second member so as to be opposed to the third reflecting portion and in a direction orthogonal to the second direction, and the first optical member is moved from the diffraction grating by the measurement light. Seventh diffracted light having a different order from the fifth diffracted light generated in two directions is incident on the diffraction grating, and the eighth diffracted light generated from the diffraction grating by the seventh diffracted light is incident on the second optical member. A fourth reflecting portion to be made,
And third and fourth photoelectric detectors for detecting interference light between the fifth diffracted light and the eighth diffracted light and other light beams via the second optical member,
The measurement unit obtains a relative movement amount between the first member and the second member using detection signals of the first, second, third, and fourth photoelectric detectors. The encoder apparatus as described in any one of 1-7.
前記計測部は、前記第1部材と前記第2部材との前記第1方向、前記第2方向、及び前記回折格子の格子パターン面に垂直な第3方向の相対移動量を求めることを特徴とする請求項8に記載のエンコーダ装置。   The measurement unit obtains a relative movement amount between the first member and the second member in the first direction, the second direction, and a third direction perpendicular to a grating pattern surface of the diffraction grating. The encoder device according to claim 8. 請求項1〜9のいずれか一項に記載のエンコーダ装置と、
対象物用の光学系と、を備えることを特徴とする光学装置。
The encoder device according to any one of claims 1 to 9,
And an optical system for an object.
パターンを被露光体に露光する露光装置であって、
フレームと、
前記被露光体を支持するとともに前記フレームに対して少なくとも第1方向に相対移動可能なステージと、
少なくとも前記第1方向への前記ステージの相対移動量を計測するための請求項1〜9のいずれか一項に記載のエンコーダ装置と、を備えることを特徴とする露光装置。
An exposure apparatus that exposes a pattern onto an object to be exposed,
Frame,
A stage that supports the object to be exposed and is relatively movable in at least a first direction with respect to the frame;
An exposure apparatus comprising: the encoder device according to claim 1 for measuring at least a relative movement amount of the stage in the first direction.
リソグラフィ工程を含むデバイス製造方法であって、
前記リソグラフィ工程で、請求項11に記載の露光装置を用いて物体を露光することを特徴とするデバイス製造方法。
A device manufacturing method including a lithography process,
12. A device manufacturing method comprising exposing an object using the exposure apparatus according to claim 11 in the lithography process.
JP2013095352A 2012-05-02 2013-04-30 Encoder device, optical device and exposure device Pending JP2013234997A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112033306A (en) * 2019-06-03 2020-12-04 株式会社三丰 Optical angle sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112033306A (en) * 2019-06-03 2020-12-04 株式会社三丰 Optical angle sensor
CN112033306B (en) * 2019-06-03 2022-08-05 株式会社三丰 Optical angle sensor

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