JP2013217786A5 - - Google Patents

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Publication number
JP2013217786A5
JP2013217786A5 JP2012089060A JP2012089060A JP2013217786A5 JP 2013217786 A5 JP2013217786 A5 JP 2013217786A5 JP 2012089060 A JP2012089060 A JP 2012089060A JP 2012089060 A JP2012089060 A JP 2012089060A JP 2013217786 A5 JP2013217786 A5 JP 2013217786A5
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JP
Japan
Prior art keywords
substrate
support member
electromagnetic wave
wave detection
thermal electromagnetic
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Withdrawn
Application number
JP2012089060A
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English (en)
Japanese (ja)
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JP2013217786A (ja
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Priority to JP2012089060A priority Critical patent/JP2013217786A/ja
Priority claimed from JP2012089060A external-priority patent/JP2013217786A/ja
Publication of JP2013217786A publication Critical patent/JP2013217786A/ja
Publication of JP2013217786A5 publication Critical patent/JP2013217786A5/ja
Withdrawn legal-status Critical Current

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JP2012089060A 2012-04-10 2012-04-10 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器 Withdrawn JP2013217786A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012089060A JP2013217786A (ja) 2012-04-10 2012-04-10 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012089060A JP2013217786A (ja) 2012-04-10 2012-04-10 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器

Publications (2)

Publication Number Publication Date
JP2013217786A JP2013217786A (ja) 2013-10-24
JP2013217786A5 true JP2013217786A5 (cg-RX-API-DMAC10.html) 2015-05-07

Family

ID=49590043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012089060A Withdrawn JP2013217786A (ja) 2012-04-10 2012-04-10 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器

Country Status (1)

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JP (1) JP2013217786A (cg-RX-API-DMAC10.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016149443A (ja) * 2015-02-12 2016-08-18 株式会社日立製作所 放射線検出素子、放射線検出器および核医学診断装置ならびに放射線検出素子の製造方法
JP7718914B2 (ja) * 2021-08-30 2025-08-05 Tdk株式会社 構造体及び電磁波センサ
CN121385044A (zh) * 2023-02-23 2026-01-23 艾感科技(广东)有限公司 一种半导体气体传感器的单通多孔基底

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63223531A (ja) * 1987-03-13 1988-09-19 Taiyo Yuden Co Ltd 赤外線検出器
FR2877492B1 (fr) * 2004-10-28 2006-12-08 Commissariat Energie Atomique Detecteur bolometrique a isolation thermique par constriction et dispositif de detection infrarouge mettant en oeuvre un tel detecteur bolometrique
DE112007001046T5 (de) * 2006-05-10 2009-02-19 Murata Manufacturing Co. Ltd., Nagaokakyo-shi Infrarotsensor und Verfahren zum Herstellen desselben
JP4800883B2 (ja) * 2006-09-06 2011-10-26 日置電機株式会社 赤外線センサの製造方法

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