JP2013203596A5 - - Google Patents

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Publication number
JP2013203596A5
JP2013203596A5 JP2012074746A JP2012074746A JP2013203596A5 JP 2013203596 A5 JP2013203596 A5 JP 2013203596A5 JP 2012074746 A JP2012074746 A JP 2012074746A JP 2012074746 A JP2012074746 A JP 2012074746A JP 2013203596 A5 JP2013203596 A5 JP 2013203596A5
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JP
Japan
Prior art keywords
substrate
less
single crystal
crystal diamond
full width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012074746A
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English (en)
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JP2013203596A (ja
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Priority to JP2012074746A priority Critical patent/JP2013203596A/ja
Priority claimed from JP2012074746A external-priority patent/JP2013203596A/ja
Publication of JP2013203596A publication Critical patent/JP2013203596A/ja
Publication of JP2013203596A5 publication Critical patent/JP2013203596A5/ja
Pending legal-status Critical Current

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Claims (4)

  1. 単結晶ダイヤモンド基板であって、該基板中の結晶性の粗悪な線状領域と該基板のオフ方向が１°以上９０°以下の角度を成すことを特徴とする基板。
  2. 請求項１に記載の単結晶ダイヤモンド基板であって、基板全体でのラマンシフト値の半値幅が０より大きく１０ｃｍ−１以下である基板。
  3. 請求項１に記載の単結晶ダイヤモンド基板であって、基板全体でのＸ線ロッキングカーブの半値幅が０より大きく１５０秒以下である基板。
  4. 窒素含有量が０より多く１００ｐｐｍ未満である請求項１に記載の基板。
JP2012074746A 2012-03-28 2012-03-28 単結晶ダイヤモンド基板 Pending JP2013203596A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012074746A JP2013203596A (ja) 2012-03-28 2012-03-28 単結晶ダイヤモンド基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012074746A JP2013203596A (ja) 2012-03-28 2012-03-28 単結晶ダイヤモンド基板

Publications (2)

Publication Number Publication Date
JP2013203596A JP2013203596A (ja) 2013-10-07
JP2013203596A5 true JP2013203596A5 (ja) 2014-11-20

Family

ID=49523096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012074746A Pending JP2013203596A (ja) 2012-03-28 2012-03-28 単結晶ダイヤモンド基板

Country Status (1)

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JP (1) JP2013203596A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016024564A1 (ja) * 2014-08-11 2016-02-18 住友電気工業株式会社 ダイヤモンド複合体、基板、ダイヤモンド、ダイヤモンドを備える工具およびダイヤモンドの製造方法
JP6636239B2 (ja) * 2014-08-29 2020-01-29 国立大学法人電気通信大学 単結晶ダイヤモンドの製造方法、単結晶ダイヤモンド、単結晶ダイヤモンド基板の製造方法、単結晶ダイヤモンド基板及び半導体デバイス
JP7336132B2 (ja) * 2019-06-19 2023-08-31 国立研究開発法人産業技術総合研究所 単結晶ダイヤモンド、それを用いた単結晶ダイヤモンド粒および単結晶ダイヤモンド粒を備える工具

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4623356B2 (ja) * 2003-12-02 2011-02-02 住友電気工業株式会社 単結晶ダイヤモンド
JP2006124249A (ja) * 2004-10-29 2006-05-18 Namiki Precision Jewel Co Ltd ダイヤモンドｃｖｄ成長用基板

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