JP2013201299A5 - Substrate processing system, file management apparatus, and program - Google Patents
Substrate processing system, file management apparatus, and program Download PDFInfo
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- JP2013201299A5 JP2013201299A5 JP2012068848A JP2012068848A JP2013201299A5 JP 2013201299 A5 JP2013201299 A5 JP 2013201299A5 JP 2012068848 A JP2012068848 A JP 2012068848A JP 2012068848 A JP2012068848 A JP 2012068848A JP 2013201299 A5 JP2013201299 A5 JP 2013201299A5
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- substrate processing
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- file management
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- 239000000758 substrate Substances 0.000 title claims 18
- 230000000875 corresponding Effects 0.000 claims 5
- 239000000284 extract Substances 0.000 claims 2
Claims (3)
前記基板処理装置に接続され、該基板処理装置から送信される前記装置情報及び装置ＩＤと、管理装置を識別するための群管理ＩＤとを記憶する管理装置と、
前記管理装置と接続され、前記群管理ＩＤと、前記装置ＩＤと、複数の基板処理内容に対してグループ分けするためのグループＩＤとが対応付けられたグループ管理情報を記憶するファイル管理装置と、
を備えた基板処理システムであって、
前記基板処理装置において前記装置情報が変更されると、該変更された装置情報が前記装置ＩＤとともに、前記管理装置へ送信され、次に該管理装置から前記ファイル管理装置へ送信され、
前記変更された装置情報と前記装置ＩＤを受信したファイル管理装置は、前記受信した装置ＩＤに対応するグループＩＤと同一のグループＩＤに対応する装置ＩＤを、前記グループ管理情報から抽出する基板処理システム。
A device information including the substrate process recipe for processing board, and a substrate processing apparatus that stores a device ID for identifying the substrate processing apparatus,
A management apparatus connected to the substrate processing apparatus and storing the apparatus information and apparatus ID transmitted from the substrate processing apparatus, and a group management ID for identifying a management apparatus;
A file management device connected to the management device and storing group management information in which the group management ID, the device ID, and a group ID for grouping a plurality of substrate processing contents are associated;
A substrate processing system comprising:
When the apparatus information is changed in the substrate processing apparatus, the changed apparatus information is transmitted to the management apparatus together with the apparatus ID, and then transmitted from the management apparatus to the file management apparatus,
The file management device that has received the changed device information and the device ID extracts a device ID corresponding to the same group ID as the group ID corresponding to the received device ID from the group management information. .
基板を処理するための基板処理レシピを含む装置情報が変更されると、前記変更された装置情報と共に前記装置ＩＤを受信し、前記受信した装置ＩＤに対応するグループＩＤと同一のグループＩＤに対応する装置ＩＤを、前記グループ管理情報から抽出するファイル管理装置。When device information including a substrate processing recipe for processing a substrate is changed, the device ID is received together with the changed device information, and the same group ID as the group ID corresponding to the received device ID is supported. A file management apparatus that extracts a device ID to be extracted from the group management information.
前記基板処理装置で変更された基板を処理するための基板処理レシピを含む装置情報と共に前記装置ＩＤを受信する手順と、A procedure for receiving the apparatus ID together with apparatus information including a substrate processing recipe for processing a substrate changed by the substrate processing apparatus;
前記受信した装置ＩＤに対応するグループＩＤと同一のグループＩＤに対応する装置ＩＤを、前記グループ管理情報から抽出して、該抽出した装置ＩＤの背景色を変更して表示する手順と、A procedure for extracting a device ID corresponding to the same group ID as the group ID corresponding to the received device ID from the group management information, changing the background color of the extracted device ID, and displaying it;
を前記ファイル管理装置に実行させるグループ表示プログラム。A group display program for causing the file management apparatus to execute
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012068848A JP5955598B2 (en) | 2012-03-26 | 2012-03-26 | Substrate processing system, display method, and display program |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012068848A JP5955598B2 (en) | 2012-03-26 | 2012-03-26 | Substrate processing system, display method, and display program |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013201299A JP2013201299A (en) | 2013-10-03 |
| JP2013201299A5 true JP2013201299A5 (en) | 2015-04-23 |
| JP5955598B2 JP5955598B2 (en) | 2016-07-20 |
Family
ID=49521288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012068848A Active JP5955598B2 (en) | 2012-03-26 | 2012-03-26 | Substrate processing system, display method, and display program |
Country Status (1)
| Country | Link |
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| JP (1) | JP5955598B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6973956B2 (en) * | 2019-07-04 | 2021-12-01 | 株式会社Kokusai Electric | Substrate processing equipment, semiconductor device manufacturing methods, programs and recording media |
| WO2021176569A1 (en) * | 2020-03-03 | 2021-09-10 | 三菱電機株式会社 | Data processing transition device and method for identifying cause of abnormality |
| JP2022145329A (en) | 2021-03-19 | 2022-10-04 | 株式会社Kokusai Electric | Management device, data processing method, program, semiconductor device manufacturing method, and processing system |
| JP7465607B1 (en) | 2023-07-28 | 2024-04-11 | 不二越機械工業株式会社 | Control device, control system, and control program |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2986146B2 (en) * | 1995-11-02 | 1999-12-06 | 東京エレクトロン株式会社 | Recipe operation system for semiconductor manufacturing equipment |
| JP3892493B2 (en) * | 1995-11-29 | 2007-03-14 | 大日本スクリーン製造株式会社 | Substrate processing system |
| JP2006073845A (en) * | 2004-09-03 | 2006-03-16 | Hitachi Kokusai Electric Inc | Semiconductor manufacturing system |
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2012
- 2012-03-26 JP JP2012068848A patent/JP5955598B2/en active Active
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