JP2013179350A5 - - Google Patents

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Publication number
JP2013179350A5
JP2013179350A5 JP2013115832A JP2013115832A JP2013179350A5 JP 2013179350 A5 JP2013179350 A5 JP 2013179350A5 JP 2013115832 A JP2013115832 A JP 2013115832A JP 2013115832 A JP2013115832 A JP 2013115832A JP 2013179350 A5 JP2013179350 A5 JP 2013179350A5
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JP
Japan
Prior art keywords
piston
housing
gap
metal
vicinity
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Application number
JP2013115832A
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English (en)
Japanese (ja)
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JP5952778B2 (ja
JP2013179350A (ja
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Priority to JP2013115832A priority Critical patent/JP5952778B2/ja
Priority claimed from JP2013115832A external-priority patent/JP5952778B2/ja
Publication of JP2013179350A publication Critical patent/JP2013179350A/ja
Publication of JP2013179350A5 publication Critical patent/JP2013179350A5/ja
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Publication of JP5952778B2 publication Critical patent/JP5952778B2/ja
Expired - Fee Related legal-status Critical Current
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JP2013115832A 2011-09-14 2013-05-31 金属充填装置 Expired - Fee Related JP5952778B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013115832A JP5952778B2 (ja) 2011-09-14 2013-05-31 金属充填装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011200093 2011-09-14
JP2011200093 2011-09-14
JP2013115832A JP5952778B2 (ja) 2011-09-14 2013-05-31 金属充填装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2012167761A Division JP5303054B2 (ja) 2011-09-14 2012-07-27 金属充填装置

Publications (3)

Publication Number Publication Date
JP2013179350A JP2013179350A (ja) 2013-09-09
JP2013179350A5 true JP2013179350A5 (enrdf_load_stackoverflow) 2015-08-13
JP5952778B2 JP5952778B2 (ja) 2016-07-13

Family

ID=48481037

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2012167592A Expired - Fee Related JP5872409B2 (ja) 2011-09-14 2012-07-27 金属充填装置
JP2013115832A Expired - Fee Related JP5952778B2 (ja) 2011-09-14 2013-05-31 金属充填装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2012167592A Expired - Fee Related JP5872409B2 (ja) 2011-09-14 2012-07-27 金属充填装置

Country Status (1)

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JP (2) JP5872409B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6404745B2 (ja) * 2015-02-25 2018-10-17 住友精密工業株式会社 液状物充填装置
JP6466735B2 (ja) * 2015-02-25 2019-02-06 住友精密工業株式会社 充填装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3488586B2 (ja) * 1996-12-24 2004-01-19 株式会社東芝 半導体装置の製造方法
JP2002368083A (ja) * 2001-06-08 2002-12-20 Fujikura Ltd 微細空間への金属充填方法および装置
JP4186545B2 (ja) * 2002-08-06 2008-11-26 住友電気工業株式会社 成形用金型
US7449067B2 (en) * 2003-11-03 2008-11-11 International Business Machines Corporation Method and apparatus for filling vias
WO2007013212A1 (ja) * 2005-07-29 2007-02-01 Mikado Technos Co., Ltd. 真空高圧充填装置
JP4694358B2 (ja) * 2005-11-30 2011-06-08 トヨタ自動車株式会社 鋳造方法と鋳造型の製造方法
JP4505540B1 (ja) * 2009-06-02 2010-07-21 有限会社ナプラ 金属充填装置

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